FR2746249B1 - Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces - Google Patents

Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces

Info

Publication number
FR2746249B1
FR2746249B1 FR9603324A FR9603324A FR2746249B1 FR 2746249 B1 FR2746249 B1 FR 2746249B1 FR 9603324 A FR9603324 A FR 9603324A FR 9603324 A FR9603324 A FR 9603324A FR 2746249 B1 FR2746249 B1 FR 2746249B1
Authority
FR
France
Prior art keywords
excitting
plasma
manufacturing
application
microwave energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9603324A
Other languages
English (en)
Other versions
FR2746249A1 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR9603324A priority Critical patent/FR2746249B1/fr
Publication of FR2746249A1 publication Critical patent/FR2746249A1/fr
Application granted granted Critical
Publication of FR2746249B1 publication Critical patent/FR2746249B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/3222—Antennas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
FR9603324A 1996-03-13 1996-03-13 Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces Expired - Fee Related FR2746249B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9603324A FR2746249B1 (fr) 1996-03-13 1996-03-13 Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9603324A FR2746249B1 (fr) 1996-03-13 1996-03-13 Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces

Publications (2)

Publication Number Publication Date
FR2746249A1 FR2746249A1 (fr) 1997-09-19
FR2746249B1 true FR2746249B1 (fr) 1998-06-12

Family

ID=9490248

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9603324A Expired - Fee Related FR2746249B1 (fr) 1996-03-13 1996-03-13 Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces

Country Status (1)

Country Link
FR (1) FR2746249B1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583250B1 (fr) * 1985-06-07 1989-06-30 France Etat Procede et dispositif d'excitation d'un plasma par micro-ondes a la resonance cyclotronique electronique
FR2665323B1 (fr) * 1990-07-27 1996-09-27 Reydel J Dispositif de production d'un plasma.
DE4037091C2 (de) * 1990-11-22 1996-06-20 Leybold Ag Vorrichtung für die Erzeugung eines homogenen Mikrowellenfeldes
DE4136297A1 (de) * 1991-11-04 1993-05-06 Plasma Electronic Gmbh, 7024 Filderstadt, De Vorrichtung zur lokalen erzeugung eines plasmas in einer behandlungskammer mittels mikrowellenanregung
US5232569A (en) * 1992-03-09 1993-08-03 Tulip Memory Systems, Inc. Circularly symmetric, large-area, high-deposition-rate sputtering apparatus for the coating of disk substrates
DE4236242A1 (de) * 1992-10-27 1994-04-28 Dornier Gmbh Verfahren zur Minderung von Russpartikeln in Abgasströmen

Also Published As

Publication number Publication date
FR2746249A1 (fr) 1997-09-19

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Legal Events

Date Code Title Description
ST Notification of lapse