ES2063724T3 - Maquina pulidora de regulacion neumatica del esfuerzo de la herramienta. - Google Patents

Maquina pulidora de regulacion neumatica del esfuerzo de la herramienta.

Info

Publication number
ES2063724T3
ES2063724T3 ES92470019T ES92470019T ES2063724T3 ES 2063724 T3 ES2063724 T3 ES 2063724T3 ES 92470019 T ES92470019 T ES 92470019T ES 92470019 T ES92470019 T ES 92470019T ES 2063724 T3 ES2063724 T3 ES 2063724T3
Authority
ES
Spain
Prior art keywords
tool
polishing machine
chassis
pneumatic regulation
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92470019T
Other languages
English (en)
Other versions
ES2063724T1 (es
Inventor
Claude Attanasio
Jean-Claude Seigue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEVA SA
Original Assignee
SEVA SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEVA SA filed Critical SEVA SA
Publication of ES2063724T1 publication Critical patent/ES2063724T1/es
Application granted granted Critical
Publication of ES2063724T3 publication Critical patent/ES2063724T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

MAQUINA DE PULIDO DE PIEZAS QUE COMPRENDE UN CHASIS (1), UNA CABEZA DE PULIDO MONTADA DE MANERA DESPLAZABLE SOBRE EL CHASIS, UNA HERRAMIENTA (10) Y MEDIOS DE PUESTA EN MOVIMIENTO DE LA HERRAMIENTA PARA HACERLA EFECTUAR UNA ACCION DE PULIDO SOBRE UNA PIEZA CON LA QUE SE LE PONE EN CONTACTO POR DESPLAZAMIENTO DE LA CABEZA DE PULIDO RESPECTO DEL CHASIS, CARACTERIZADA EN QUE LA HERRAMIENTA (10) ESTA MONTADA SOBRE LOS MEDIOS (6,7) DE PUESTA EN MOVIMIENTO MEDIANTE UN PORTAHERRAMIENTAS (9) PROVISTO DE MEDIOS NEUMATICOS (36,38; 50) DE DOBLE EFECTO DE AJUSTE DE LA FUERZA DE APLICACION DE LA HERRAMIENTA (10) SOBRE LA PIEZA (P) A PULIR.
ES92470019T 1991-06-04 1992-05-27 Maquina pulidora de regulacion neumatica del esfuerzo de la herramienta. Expired - Lifetime ES2063724T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9106756A FR2677292B1 (fr) 1991-06-04 1991-06-04 Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir.

Publications (2)

Publication Number Publication Date
ES2063724T1 ES2063724T1 (es) 1995-01-16
ES2063724T3 true ES2063724T3 (es) 1995-06-16

Family

ID=9413462

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92470019T Expired - Lifetime ES2063724T3 (es) 1991-06-04 1992-05-27 Maquina pulidora de regulacion neumatica del esfuerzo de la herramienta.

Country Status (7)

Country Link
US (1) US5325636A (es)
EP (1) EP0517640B1 (es)
JP (1) JP2562549B2 (es)
AT (1) ATE120997T1 (es)
DE (1) DE69202003T2 (es)
ES (1) ES2063724T3 (es)
FR (1) FR2677292B1 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005053905A1 (es) * 2003-11-28 2005-06-16 Comercial Trasluz Imagen E Iluminacion, S.L. Sistema de rayado de la superficie de un conductor óptico plano

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733175A (en) 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US6336845B1 (en) 1997-11-12 2002-01-08 Lam Research Corporation Method and apparatus for polishing semiconductor wafers
EP1057592A4 (en) * 1998-01-22 2006-10-04 Nitta Corp GRINDER-presser
JP2977807B1 (ja) * 1998-07-15 1999-11-15 システム精工株式会社 研磨方法および研磨装置
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
US6431959B1 (en) * 1999-12-20 2002-08-13 Lam Research Corporation System and method of defect optimization for chemical mechanical planarization of polysilicon
KR100392414B1 (en) * 2002-12-20 2003-07-22 Fineacetechnology Co Ltd Structure of tool head unit of polishing machine
US6772784B1 (en) 2003-04-11 2004-08-10 Mac Valves, Inc. Proportional pressure regulator having positive and negative pressure delivery capability
JP5306065B2 (ja) 2009-06-04 2013-10-02 株式会社荏原製作所 ドレッシング装置およびドレッシング方法
KR101126382B1 (ko) * 2010-05-10 2012-03-28 주식회사 케이씨텍 화학 기계식 연마시스템의 컨디셔너
US9669509B2 (en) * 2012-09-28 2017-06-06 Thomas Engineering Solutions & Consulting, Llc Methods for external cleaning and inspection of tubulars
KR101679131B1 (ko) 2014-12-29 2016-11-23 주식회사 엘지실트론 웨이퍼 연마장치 및 그 연마방법
CN104907904A (zh) * 2015-06-16 2015-09-16 中山市玛而特电子科技有限公司 一种全自动磁芯加工机

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1933373A (en) * 1928-09-07 1933-10-31 Norton Co Grinding and lapping machine
CH267749A (de) * 1948-02-04 1950-04-15 Spojene Tovarny Na Obrabeci St Einrichtung zum Superfinishieren.
US2606410A (en) * 1948-12-14 1952-08-12 Snecma Device for superfinishing machined surfaces
FR1244369A (fr) * 1959-09-12 1960-10-28 Distributeur de commande pour vérin hydraulique à double effet, et, en particulier, pour vérin hydraulique de copieur pour machines-outils
JPS496592A (es) * 1972-02-18 1974-01-21
US3903653A (en) * 1973-04-11 1975-09-09 Harold J Imhoff Lapping machine
DE3007314A1 (de) * 1980-02-27 1981-09-03 Peter 7442 Neuffen Nagel Verfahren und vorrichtung zum bearbeiten von lagerflaechen
US4558537A (en) * 1984-01-10 1985-12-17 Taft-Peirce Supfina Machine Company, Inc. Centerless honing machines having automatic size control
JPS63260752A (ja) * 1987-04-16 1988-10-27 Makino Milling Mach Co Ltd 自動研摩機械
JPH01171747A (ja) * 1987-12-25 1989-07-06 Matsushita Electric Ind Co Ltd 研削加工装置
EP0347847B1 (de) * 1988-06-21 1993-09-15 Supfina Maschinenfabrik Hentzen GmbH & Co. KG Automatische spitzenlose Feinstbearbeitungsvorrichtung für oberflächenrotationssymmetrische Körper in einer Durchlaufmaschine
IT1244131B (it) * 1990-10-17 1994-07-08 Melchiorre Off Mecc Metodo e dispositivo per il controllo continuo della spinta applicata sui pezzi in lavorazione in una macchina lappatrice a doppio plateau.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005053905A1 (es) * 2003-11-28 2005-06-16 Comercial Trasluz Imagen E Iluminacion, S.L. Sistema de rayado de la superficie de un conductor óptico plano

Also Published As

Publication number Publication date
JPH05192864A (ja) 1993-08-03
DE69202003T2 (de) 1995-08-24
ATE120997T1 (de) 1995-04-15
FR2677292B1 (fr) 1995-12-08
JP2562549B2 (ja) 1996-12-11
EP0517640A1 (fr) 1992-12-09
EP0517640B1 (fr) 1995-04-12
FR2677292A1 (fr) 1992-12-11
DE69202003D1 (de) 1995-05-18
ES2063724T1 (es) 1995-01-16
US5325636A (en) 1994-07-05

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