EP0517640B1 - Machine de polissage à régulation pneumatique de l'effort de l'outil - Google Patents

Machine de polissage à régulation pneumatique de l'effort de l'outil Download PDF

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Publication number
EP0517640B1
EP0517640B1 EP92470019A EP92470019A EP0517640B1 EP 0517640 B1 EP0517640 B1 EP 0517640B1 EP 92470019 A EP92470019 A EP 92470019A EP 92470019 A EP92470019 A EP 92470019A EP 0517640 B1 EP0517640 B1 EP 0517640B1
Authority
EP
European Patent Office
Prior art keywords
tool
jack
polishing
piston
tool holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92470019A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0517640A1 (fr
Inventor
Claude Attanasio
Jean-Claude Seigue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEVA SA
Original Assignee
SEVA SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEVA SA filed Critical SEVA SA
Publication of EP0517640A1 publication Critical patent/EP0517640A1/fr
Application granted granted Critical
Publication of EP0517640B1 publication Critical patent/EP0517640B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means

Definitions

  • the present invention relates to machines for polishing parts, the surface of which must have a very good quality polish.
  • An important condition for obtaining a good quality of polishing is the achievement of a constant pressure of the abrasive on the workpiece to avoid deformation.
  • the suspension system of the tool reacts with a time constant reduced at most equal to the period of vibration transversely to the direction of feed of the tool so that the constant pressure condition between the tool and the workpiece is fulfilled.
  • the invention therefore aims to create a polishing machine, in particular of the vibrating type which combines the properties of low inertia and great flexibility set out above.
  • a machine for polishing parts comprising a chassis, a polishing head mounted movable on the chassis, a tool and means for setting in motion the tool to make it perform a polishing action on a part with which it is brought into contact by displacement of the polishing head by relative to the chassis, characterized in that the tool is mounted on the means for setting in motion by means of a tool holder provided with pneumatic means with double effect for regulating the force of application of the tool to the room.
  • the polishing machine shown in Fig. 1 mainly comprises a chassis 1 extending vertically and on which is slidably mounted a polishing head designated by the general reference 2 and comprising a column 3 in the general form of a square which can be moved vertically on the chassis 1.
  • a polishing head designated by the general reference 2 On the horizontal branch 4 of the column 3 is fixed an assembly 5 of vibration setting comprising a support 6 for a slide 7.
  • an electric motor 8 for driving in rotation an inner connecting rod-crank assembly intended to communicate to the slide 7 an alternative translational movement.
  • the slide 7 is fixed a tool holder 9 in which is mounted a tool 10 carrying at its free end a polishing stone 11.
  • the tool 10 comprises a shank 12 engaged in the tool holder 9, immobilized therein by means of a screw 13 and extended by a rod 14 provided with a mount 15 for the stone 11.
  • column 3 is mounted as known per se, a device for vertical displacement of the polishing head support relative to the chassis.
  • This displacement device comprises a hydraulic cylinder 16 whose cylinder 17 closed at its lower part by a plug 18 contains a piston 19 carried by a fixed rod 20 secured to the chassis 1.
  • the cylinder is supplied with pressurized fluid through an inlet orifice located at its upper part and shown in the diagrams of Fig. 2 and 3 to which we will now refer.
  • Fig.2 there is shown the hydraulic and pneumatic circuits for controlling the various moving parts of the machine allowing it to perform polishing operations with a tool directed downwards.
  • the fixed frame of the machine is here materialized by the rod 20 of the piston 19 secured to the frame.
  • the cylinder 17 of the jack is integral with the support 6 of the slide or carriage 7 movable in an alternating movement relative to the support 6 by means of a rod-crank assembly 21 driven by the electric motor 8 (Fig.1).
  • the jack 16 is supplied with hydraulic fluid from a central unit 23 comprising a pump 24 with a discharge valve 25, a distributor 26 with three positions and a pressure regulator 27.
  • a pipe 31 connects the distributor 26 to a throttle 32 for adjusting the flow of fluid supplying the cylinder 17 of the jack 16 and consequently the speed of movement of the polishing assembly relative to the chassis.
  • a line 33 connects the distributor 26 to a first inlet of a hydraulic regulator 34 contained in the tool holder 9, a second inlet of this regulator being connected to the adjustable throttle 32 by means of a non-return valve. 35.
  • the pneumatic supply circuit for the device for regulating the force of the tool on the workpiece comprises a source of compressed air 36, a pressure regulator 37 and a pneumatic cylinder 38, the cylinder 39 of which is integral with the tool holder. and the piston 40 of which is made integral with the tool 10.
  • the hydraulic regulator 34 has a throttled passage 41 with which a needle 42 movable in the tool holder 9 cooperates with the piston 40 of the jack.
  • the polishing assembly 2 is first lowered relative to the chassis 1 of the machine. To this end, the distributor 26 is placed in the working position. Fluid contained in the cylinder 17 of the jack 16 is evacuated towards the tank 30 through the hydraulic regulator 34 and the cylinder 17 and consequently, the polishing assembly integral with the latter is moved downwards.
  • the jack 38 is supplied with compressed air so that its piston 40 carrying the tool 10 is moved down the cylinder, causing the opening of the hydraulic regulator due to the displacement of the needle 42 outside the constricted orifice 41.
  • the hydraulic fluid flow is then maximum and the polishing head moves downward with maximum speed.
  • the piston 40 tends to go up in the cylinder 39 which continues to descend under the action of the hydraulic device, and carries with it the needle 42 which tends to reduce the passage section of the throttle orifice 41 of the regulator 34 until an equilibrium position which is the working position of the stone is thus reached.
  • the distributor 26 When the tool must be released from the workpiece, the distributor 26 is placed in its tool release position shown on the right.
  • the pump 24 then delivers into the cylinder 17 of the jack 16, which causes the cylinder 17 to rise relative to the piston 19.
  • the tool 10 which has a low inertia with respect to the rest of the machine can be moved very quickly to follow the surface of a workpiece to be polished because only pneumatic regulation intervenes in variations in low amplitude of the tool.
  • Fig.3 there is shown the same hydraulic and pneumatic circuits comprising means for the machine to perform polishing operations with a tool pointing upwards.
  • Fig.3 differs from that of Fig.2 in that it includes a tool 45 intended to work to polish a surface located above it.
  • the tool 45 is bent and carries a stone 46 at the end of its horizontal branch 47.
  • the vertical branch 48 of the tool is integral with the piston 49 of another cylinder 50 integral with the tool holder 9.
  • the cylinder 51 of the cylinder 50 is supplied with compressed air at its lower part.
  • the needle 42 of the hydraulic regulator is integral with the vertical branch 48 of the tool.
  • FIGS. 4 to 6 a particular embodiment of a tool holder for a polishing machine according to the invention.
  • This tool holder comprises a body 55 fixed to the slide or carriage 7 of the vibrating device by screws 56.
  • the body 55 of the tool holder comprises a vertical wall 57 and two parallel lateral branches 58, defining with the vertical wall 57 a channel in which are fixed cooperating guide rails 59, with interposition of rows of needles 59a, with complementary guide rails 60 carried by a carriage 61 in which the tail of a tool is intended to be engaged to polish.
  • the carriage 61 includes a recess 62 provided with a screw 63 for locking the tail of the tool on the carriage 61.
  • the carriage At its end opposite to the recess 62, the carriage comprises a part 64 forming a piston engaged in a jacket 65 forming a cylinder mounted in the body 55 and thus constituting a first jack whose supply of compressed air is ensured by means of the passage 66 formed in the carriage 61.
  • a second cylinder 67 formed by a bush 68 with a thick bottom closed by a plug 69.
  • conduits 70, 71 for supplying compressed air, these conduits also passing through the lateral branch 58 of the body 55 against which this second cylinder is mounted.
  • a piston 72 disposed on the intermediate part of a rod 73, one end of which extends beyond the plug 69 which it passes through is made integral with the carriage 61.
  • the second cylinder 67 whose l compressed air supply can be ensured on either side of the piston 72 is therefore a double-acting cylinder.
  • the hydraulic regulator 34 whose needle 42 is fixed to the carriage 61 as shown in Fig.4 and whose passage constricted 41 is constituted by a sleeve provided with transverse holes 75 communicating with the hydraulic unit by a passage 76 formed in a regulator body 77 mounted in the body 55 of the tool holder and a passage 78 formed in the branch 58 of the body opposite to the one against which the second cylinder 67 is mounted.
  • the tool holder described with reference to Figs. 4 to 6 therefore comprises a first single-acting cylinder 64, 65 placed at the top of the carriage 61 which corresponds to the cylinder 38 supplied with compressed air for the purpose of operating the machine to polish down.
  • the second actuator 67 also performs the function of the actuator 50 of the arrangement of FIG. 3 intended for the operation of the machine when ascending because its part located above the piston 72 is supplied from below by the conduit 71.
  • the tool holder described with reference to Figs. 4 to 6 therefore ensures the pneumatic damping function of the tool during the operation of the machine going down and up as well as, thanks to the pressure of the needle regulator 34, the regulation hydraulic movement of the polishing assembly relative to the workpiece.
  • the invention is applied to a polishing tool which is only subjected to a reciprocating translational movement or vibration.
  • the force exerted by the polishing tool on the workpiece to be polished by probing is obtained using the stone carried by the tool in the position of contact between the stone. and the surface of the part to be polished, and this automatically taking into account the weight of the tool, whether it works down or up.
  • the tool therefore also constitutes a feeler member for the position of the polishing head relative to the part to be polished.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP92470019A 1991-06-04 1992-05-27 Machine de polissage à régulation pneumatique de l'effort de l'outil Expired - Lifetime EP0517640B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9106756 1991-06-04
FR9106756A FR2677292B1 (fr) 1991-06-04 1991-06-04 Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir.

Publications (2)

Publication Number Publication Date
EP0517640A1 EP0517640A1 (fr) 1992-12-09
EP0517640B1 true EP0517640B1 (fr) 1995-04-12

Family

ID=9413462

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92470019A Expired - Lifetime EP0517640B1 (fr) 1991-06-04 1992-05-27 Machine de polissage à régulation pneumatique de l'effort de l'outil

Country Status (7)

Country Link
US (1) US5325636A (es)
EP (1) EP0517640B1 (es)
JP (1) JP2562549B2 (es)
AT (1) ATE120997T1 (es)
DE (1) DE69202003T2 (es)
ES (1) ES2063724T3 (es)
FR (1) FR2677292B1 (es)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733175A (en) 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US6336845B1 (en) 1997-11-12 2002-01-08 Lam Research Corporation Method and apparatus for polishing semiconductor wafers
WO1999037442A1 (fr) * 1998-01-22 1999-07-29 Nitta Corporation Meuleuse-presseuse
JP2977807B1 (ja) * 1998-07-15 1999-11-15 システム精工株式会社 研磨方法および研磨装置
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
US6431959B1 (en) * 1999-12-20 2002-08-13 Lam Research Corporation System and method of defect optimization for chemical mechanical planarization of polysilicon
KR100392414B1 (en) * 2002-12-20 2003-07-22 Fineacetechnology Co Ltd Structure of tool head unit of polishing machine
US6772784B1 (en) 2003-04-11 2004-08-10 Mac Valves, Inc. Proportional pressure regulator having positive and negative pressure delivery capability
AU2003286196A1 (en) * 2003-11-28 2005-06-24 Comercial Trasluz Imagen E Iluminacion, S.L. System for etching the surface of a flat optical conductor
JP5306065B2 (ja) * 2009-06-04 2013-10-02 株式会社荏原製作所 ドレッシング装置およびドレッシング方法
KR101126382B1 (ko) * 2010-05-10 2012-03-28 주식회사 케이씨텍 화학 기계식 연마시스템의 컨디셔너
US9669509B2 (en) * 2012-09-28 2017-06-06 Thomas Engineering Solutions & Consulting, Llc Methods for external cleaning and inspection of tubulars
KR101679131B1 (ko) 2014-12-29 2016-11-23 주식회사 엘지실트론 웨이퍼 연마장치 및 그 연마방법
CN104907904A (zh) * 2015-06-16 2015-09-16 中山市玛而特电子科技有限公司 一种全自动磁芯加工机

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
US1933373A (en) * 1928-09-07 1933-10-31 Norton Co Grinding and lapping machine
CH267749A (de) * 1948-02-04 1950-04-15 Spojene Tovarny Na Obrabeci St Einrichtung zum Superfinishieren.
US2606410A (en) * 1948-12-14 1952-08-12 Snecma Device for superfinishing machined surfaces
FR1244369A (fr) * 1959-09-12 1960-10-28 Distributeur de commande pour vérin hydraulique à double effet, et, en particulier, pour vérin hydraulique de copieur pour machines-outils
JPS496592A (es) * 1972-02-18 1974-01-21
US3903653A (en) * 1973-04-11 1975-09-09 Harold J Imhoff Lapping machine
DE3007314A1 (de) * 1980-02-27 1981-09-03 Peter 7442 Neuffen Nagel Verfahren und vorrichtung zum bearbeiten von lagerflaechen
US4558537A (en) * 1984-01-10 1985-12-17 Taft-Peirce Supfina Machine Company, Inc. Centerless honing machines having automatic size control
JPS63260752A (ja) * 1987-04-16 1988-10-27 Makino Milling Mach Co Ltd 自動研摩機械
JPH01171747A (ja) * 1987-12-25 1989-07-06 Matsushita Electric Ind Co Ltd 研削加工装置
EP0347847B1 (de) * 1988-06-21 1993-09-15 Supfina Maschinenfabrik Hentzen GmbH & Co. KG Automatische spitzenlose Feinstbearbeitungsvorrichtung für oberflächenrotationssymmetrische Körper in einer Durchlaufmaschine
IT1244131B (it) * 1990-10-17 1994-07-08 Melchiorre Off Mecc Metodo e dispositivo per il controllo continuo della spinta applicata sui pezzi in lavorazione in una macchina lappatrice a doppio plateau.

Also Published As

Publication number Publication date
DE69202003T2 (de) 1995-08-24
FR2677292A1 (fr) 1992-12-11
FR2677292B1 (fr) 1995-12-08
DE69202003D1 (de) 1995-05-18
JPH05192864A (ja) 1993-08-03
EP0517640A1 (fr) 1992-12-09
JP2562549B2 (ja) 1996-12-11
US5325636A (en) 1994-07-05
ES2063724T1 (es) 1995-01-16
ES2063724T3 (es) 1995-06-16
ATE120997T1 (de) 1995-04-15

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