FR2677292B1 - Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir. - Google Patents

Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir.

Info

Publication number
FR2677292B1
FR2677292B1 FR9106756A FR9106756A FR2677292B1 FR 2677292 B1 FR2677292 B1 FR 2677292B1 FR 9106756 A FR9106756 A FR 9106756A FR 9106756 A FR9106756 A FR 9106756A FR 2677292 B1 FR2677292 B1 FR 2677292B1
Authority
FR
France
Prior art keywords
tool
polishing
effort
frame
pneumatic regulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9106756A
Other languages
English (en)
Other versions
FR2677292A1 (fr
Inventor
Claude Attanasio
Jean-Claude Seigue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEVA SA
Original Assignee
SEVA SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9106756A priority Critical patent/FR2677292B1/fr
Application filed by SEVA SA filed Critical SEVA SA
Priority to ES92470019T priority patent/ES2063724T3/es
Priority to DE69202003T priority patent/DE69202003T2/de
Priority to EP92470019A priority patent/EP0517640B1/fr
Priority to AT92470019T priority patent/ATE120997T1/de
Priority to US07/889,621 priority patent/US5325636A/en
Priority to JP4166892A priority patent/JP2562549B2/ja
Publication of FR2677292A1 publication Critical patent/FR2677292A1/fr
Application granted granted Critical
Publication of FR2677292B1 publication Critical patent/FR2677292B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
FR9106756A 1991-06-04 1991-06-04 Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir. Expired - Fee Related FR2677292B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR9106756A FR2677292B1 (fr) 1991-06-04 1991-06-04 Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir.
DE69202003T DE69202003T2 (de) 1991-06-04 1992-05-27 Feinstbearbeitungsmaschine mit pneumatischer Kraftsteuerung des Werkzeuges.
EP92470019A EP0517640B1 (fr) 1991-06-04 1992-05-27 Machine de polissage à régulation pneumatique de l'effort de l'outil
AT92470019T ATE120997T1 (de) 1991-06-04 1992-05-27 Feinstbearbeitungsmaschine mit pneumatischer kraftsteuerung des werkzeuges.
ES92470019T ES2063724T3 (es) 1991-06-04 1992-05-27 Maquina pulidora de regulacion neumatica del esfuerzo de la herramienta.
US07/889,621 US5325636A (en) 1991-06-04 1992-05-28 Polishing machine with pneumatic tool pressure adjustment
JP4166892A JP2562549B2 (ja) 1991-06-04 1992-06-02 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9106756A FR2677292B1 (fr) 1991-06-04 1991-06-04 Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir.

Publications (2)

Publication Number Publication Date
FR2677292A1 FR2677292A1 (fr) 1992-12-11
FR2677292B1 true FR2677292B1 (fr) 1995-12-08

Family

ID=9413462

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9106756A Expired - Fee Related FR2677292B1 (fr) 1991-06-04 1991-06-04 Machine de polissage a regulation pneumatique de l'effort de l'outil de la piece a polir.

Country Status (7)

Country Link
US (1) US5325636A (fr)
EP (1) EP0517640B1 (fr)
JP (1) JP2562549B2 (fr)
AT (1) ATE120997T1 (fr)
DE (1) DE69202003T2 (fr)
ES (1) ES2063724T3 (fr)
FR (1) FR2677292B1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733175A (en) 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US6336845B1 (en) 1997-11-12 2002-01-08 Lam Research Corporation Method and apparatus for polishing semiconductor wafers
EP1057592A4 (fr) * 1998-01-22 2006-10-04 Nitta Corp Meuleuse-presseuse
JP2977807B1 (ja) * 1998-07-15 1999-11-15 システム精工株式会社 研磨方法および研磨装置
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
US6431959B1 (en) 1999-12-20 2002-08-13 Lam Research Corporation System and method of defect optimization for chemical mechanical planarization of polysilicon
KR100392414B1 (en) * 2002-12-20 2003-07-22 Fineacetechnology Co Ltd Structure of tool head unit of polishing machine
US6772784B1 (en) 2003-04-11 2004-08-10 Mac Valves, Inc. Proportional pressure regulator having positive and negative pressure delivery capability
WO2005053905A1 (fr) * 2003-11-28 2005-06-16 Comercial Trasluz Imagen E Iluminacion, S.L. Systeme de gravure de la surface d'un conducteur optique plat
JP5306065B2 (ja) 2009-06-04 2013-10-02 株式会社荏原製作所 ドレッシング装置およびドレッシング方法
KR101126382B1 (ko) * 2010-05-10 2012-03-28 주식회사 케이씨텍 화학 기계식 연마시스템의 컨디셔너
US9669509B2 (en) 2012-09-28 2017-06-06 Thomas Engineering Solutions & Consulting, Llc Methods for external cleaning and inspection of tubulars
KR101679131B1 (ko) * 2014-12-29 2016-11-23 주식회사 엘지실트론 웨이퍼 연마장치 및 그 연마방법
CN104907904A (zh) * 2015-06-16 2015-09-16 中山市玛而特电子科技有限公司 一种全自动磁芯加工机

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1933373A (en) * 1928-09-07 1933-10-31 Norton Co Grinding and lapping machine
CH267749A (de) * 1948-02-04 1950-04-15 Spojene Tovarny Na Obrabeci St Einrichtung zum Superfinishieren.
US2606410A (en) * 1948-12-14 1952-08-12 Snecma Device for superfinishing machined surfaces
FR1244369A (fr) * 1959-09-12 1960-10-28 Distributeur de commande pour vérin hydraulique à double effet, et, en particulier, pour vérin hydraulique de copieur pour machines-outils
JPS496592A (fr) * 1972-02-18 1974-01-21
US3903653A (en) * 1973-04-11 1975-09-09 Harold J Imhoff Lapping machine
DE3007314A1 (de) * 1980-02-27 1981-09-03 Peter 7442 Neuffen Nagel Verfahren und vorrichtung zum bearbeiten von lagerflaechen
US4558537A (en) * 1984-01-10 1985-12-17 Taft-Peirce Supfina Machine Company, Inc. Centerless honing machines having automatic size control
JPS63260752A (ja) * 1987-04-16 1988-10-27 Makino Milling Mach Co Ltd 自動研摩機械
JPH01171747A (ja) * 1987-12-25 1989-07-06 Matsushita Electric Ind Co Ltd 研削加工装置
DE58905593D1 (de) * 1988-06-21 1993-10-21 Supfina Maschf Hentzen Automatische spitzenlose Feinstbearbeitungsvorrichtung für oberflächenrotationssymmetrische Körper in einer Durchlaufmaschine.
IT1244131B (it) * 1990-10-17 1994-07-08 Melchiorre Off Mecc Metodo e dispositivo per il controllo continuo della spinta applicata sui pezzi in lavorazione in una macchina lappatrice a doppio plateau.

Also Published As

Publication number Publication date
FR2677292A1 (fr) 1992-12-11
ES2063724T1 (es) 1995-01-16
JPH05192864A (ja) 1993-08-03
ATE120997T1 (de) 1995-04-15
DE69202003D1 (de) 1995-05-18
ES2063724T3 (es) 1995-06-16
DE69202003T2 (de) 1995-08-24
US5325636A (en) 1994-07-05
EP0517640A1 (fr) 1992-12-09
JP2562549B2 (ja) 1996-12-11
EP0517640B1 (fr) 1995-04-12

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Legal Events

Date Code Title Description
ST Notification of lapse