EP0517640B1 - Finishing machine with pneumatic control of the tool load - Google Patents
Finishing machine with pneumatic control of the tool load Download PDFInfo
- Publication number
- EP0517640B1 EP0517640B1 EP92470019A EP92470019A EP0517640B1 EP 0517640 B1 EP0517640 B1 EP 0517640B1 EP 92470019 A EP92470019 A EP 92470019A EP 92470019 A EP92470019 A EP 92470019A EP 0517640 B1 EP0517640 B1 EP 0517640B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- tool
- jack
- polishing
- piston
- tool holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means
Definitions
- the present invention relates to machines for polishing parts, the surface of which must have a very good quality polish.
- An important condition for obtaining a good quality of polishing is the achievement of a constant pressure of the abrasive on the workpiece to avoid deformation.
- the suspension system of the tool reacts with a time constant reduced at most equal to the period of vibration transversely to the direction of feed of the tool so that the constant pressure condition between the tool and the workpiece is fulfilled.
- the invention therefore aims to create a polishing machine, in particular of the vibrating type which combines the properties of low inertia and great flexibility set out above.
- a machine for polishing parts comprising a chassis, a polishing head mounted movable on the chassis, a tool and means for setting in motion the tool to make it perform a polishing action on a part with which it is brought into contact by displacement of the polishing head by relative to the chassis, characterized in that the tool is mounted on the means for setting in motion by means of a tool holder provided with pneumatic means with double effect for regulating the force of application of the tool to the room.
- the polishing machine shown in Fig. 1 mainly comprises a chassis 1 extending vertically and on which is slidably mounted a polishing head designated by the general reference 2 and comprising a column 3 in the general form of a square which can be moved vertically on the chassis 1.
- a polishing head designated by the general reference 2 On the horizontal branch 4 of the column 3 is fixed an assembly 5 of vibration setting comprising a support 6 for a slide 7.
- an electric motor 8 for driving in rotation an inner connecting rod-crank assembly intended to communicate to the slide 7 an alternative translational movement.
- the slide 7 is fixed a tool holder 9 in which is mounted a tool 10 carrying at its free end a polishing stone 11.
- the tool 10 comprises a shank 12 engaged in the tool holder 9, immobilized therein by means of a screw 13 and extended by a rod 14 provided with a mount 15 for the stone 11.
- column 3 is mounted as known per se, a device for vertical displacement of the polishing head support relative to the chassis.
- This displacement device comprises a hydraulic cylinder 16 whose cylinder 17 closed at its lower part by a plug 18 contains a piston 19 carried by a fixed rod 20 secured to the chassis 1.
- the cylinder is supplied with pressurized fluid through an inlet orifice located at its upper part and shown in the diagrams of Fig. 2 and 3 to which we will now refer.
- Fig.2 there is shown the hydraulic and pneumatic circuits for controlling the various moving parts of the machine allowing it to perform polishing operations with a tool directed downwards.
- the fixed frame of the machine is here materialized by the rod 20 of the piston 19 secured to the frame.
- the cylinder 17 of the jack is integral with the support 6 of the slide or carriage 7 movable in an alternating movement relative to the support 6 by means of a rod-crank assembly 21 driven by the electric motor 8 (Fig.1).
- the jack 16 is supplied with hydraulic fluid from a central unit 23 comprising a pump 24 with a discharge valve 25, a distributor 26 with three positions and a pressure regulator 27.
- a pipe 31 connects the distributor 26 to a throttle 32 for adjusting the flow of fluid supplying the cylinder 17 of the jack 16 and consequently the speed of movement of the polishing assembly relative to the chassis.
- a line 33 connects the distributor 26 to a first inlet of a hydraulic regulator 34 contained in the tool holder 9, a second inlet of this regulator being connected to the adjustable throttle 32 by means of a non-return valve. 35.
- the pneumatic supply circuit for the device for regulating the force of the tool on the workpiece comprises a source of compressed air 36, a pressure regulator 37 and a pneumatic cylinder 38, the cylinder 39 of which is integral with the tool holder. and the piston 40 of which is made integral with the tool 10.
- the hydraulic regulator 34 has a throttled passage 41 with which a needle 42 movable in the tool holder 9 cooperates with the piston 40 of the jack.
- the polishing assembly 2 is first lowered relative to the chassis 1 of the machine. To this end, the distributor 26 is placed in the working position. Fluid contained in the cylinder 17 of the jack 16 is evacuated towards the tank 30 through the hydraulic regulator 34 and the cylinder 17 and consequently, the polishing assembly integral with the latter is moved downwards.
- the jack 38 is supplied with compressed air so that its piston 40 carrying the tool 10 is moved down the cylinder, causing the opening of the hydraulic regulator due to the displacement of the needle 42 outside the constricted orifice 41.
- the hydraulic fluid flow is then maximum and the polishing head moves downward with maximum speed.
- the piston 40 tends to go up in the cylinder 39 which continues to descend under the action of the hydraulic device, and carries with it the needle 42 which tends to reduce the passage section of the throttle orifice 41 of the regulator 34 until an equilibrium position which is the working position of the stone is thus reached.
- the distributor 26 When the tool must be released from the workpiece, the distributor 26 is placed in its tool release position shown on the right.
- the pump 24 then delivers into the cylinder 17 of the jack 16, which causes the cylinder 17 to rise relative to the piston 19.
- the tool 10 which has a low inertia with respect to the rest of the machine can be moved very quickly to follow the surface of a workpiece to be polished because only pneumatic regulation intervenes in variations in low amplitude of the tool.
- Fig.3 there is shown the same hydraulic and pneumatic circuits comprising means for the machine to perform polishing operations with a tool pointing upwards.
- Fig.3 differs from that of Fig.2 in that it includes a tool 45 intended to work to polish a surface located above it.
- the tool 45 is bent and carries a stone 46 at the end of its horizontal branch 47.
- the vertical branch 48 of the tool is integral with the piston 49 of another cylinder 50 integral with the tool holder 9.
- the cylinder 51 of the cylinder 50 is supplied with compressed air at its lower part.
- the needle 42 of the hydraulic regulator is integral with the vertical branch 48 of the tool.
- FIGS. 4 to 6 a particular embodiment of a tool holder for a polishing machine according to the invention.
- This tool holder comprises a body 55 fixed to the slide or carriage 7 of the vibrating device by screws 56.
- the body 55 of the tool holder comprises a vertical wall 57 and two parallel lateral branches 58, defining with the vertical wall 57 a channel in which are fixed cooperating guide rails 59, with interposition of rows of needles 59a, with complementary guide rails 60 carried by a carriage 61 in which the tail of a tool is intended to be engaged to polish.
- the carriage 61 includes a recess 62 provided with a screw 63 for locking the tail of the tool on the carriage 61.
- the carriage At its end opposite to the recess 62, the carriage comprises a part 64 forming a piston engaged in a jacket 65 forming a cylinder mounted in the body 55 and thus constituting a first jack whose supply of compressed air is ensured by means of the passage 66 formed in the carriage 61.
- a second cylinder 67 formed by a bush 68 with a thick bottom closed by a plug 69.
- conduits 70, 71 for supplying compressed air, these conduits also passing through the lateral branch 58 of the body 55 against which this second cylinder is mounted.
- a piston 72 disposed on the intermediate part of a rod 73, one end of which extends beyond the plug 69 which it passes through is made integral with the carriage 61.
- the second cylinder 67 whose l compressed air supply can be ensured on either side of the piston 72 is therefore a double-acting cylinder.
- the hydraulic regulator 34 whose needle 42 is fixed to the carriage 61 as shown in Fig.4 and whose passage constricted 41 is constituted by a sleeve provided with transverse holes 75 communicating with the hydraulic unit by a passage 76 formed in a regulator body 77 mounted in the body 55 of the tool holder and a passage 78 formed in the branch 58 of the body opposite to the one against which the second cylinder 67 is mounted.
- the tool holder described with reference to Figs. 4 to 6 therefore comprises a first single-acting cylinder 64, 65 placed at the top of the carriage 61 which corresponds to the cylinder 38 supplied with compressed air for the purpose of operating the machine to polish down.
- the second actuator 67 also performs the function of the actuator 50 of the arrangement of FIG. 3 intended for the operation of the machine when ascending because its part located above the piston 72 is supplied from below by the conduit 71.
- the tool holder described with reference to Figs. 4 to 6 therefore ensures the pneumatic damping function of the tool during the operation of the machine going down and up as well as, thanks to the pressure of the needle regulator 34, the regulation hydraulic movement of the polishing assembly relative to the workpiece.
- the invention is applied to a polishing tool which is only subjected to a reciprocating translational movement or vibration.
- the force exerted by the polishing tool on the workpiece to be polished by probing is obtained using the stone carried by the tool in the position of contact between the stone. and the surface of the part to be polished, and this automatically taking into account the weight of the tool, whether it works down or up.
- the tool therefore also constitutes a feeler member for the position of the polishing head relative to the part to be polished.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
La présente invention est relative aux machines de polissage de pièces dont la surface doit présenter un poli de très bonne qualité.The present invention relates to machines for polishing parts, the surface of which must have a very good quality polish.
Une condition importante d'obtention d'une bonne qualité de polissage est la réalisation d'une pression constante de l'abrasif sur la pièce à polir, pour éviter les déformations.An important condition for obtaining a good quality of polishing is the achievement of a constant pressure of the abrasive on the workpiece to avoid deformation.
Dans une machine à outil vibrant, on a déjà réalisé une suspension hydraulique compensée permettant de maintenir cette pression constante lorsque la cote de la zone de contact varie pendant que l'outil abrasif parcourt la pièce.In a vibrating tool machine, a compensated hydraulic suspension has already been made allowing this pressure to be maintained constant when the dimension of the contact zone varies while the abrasive tool traverses the part.
Le brevet français n° 73 14 262 et son certificat d'addition n° 75 10 522 décrivent une telle machine.French patent n ° 73 14 262 and its certificate of addition n ° 75 10 522 describe such a machine.
Si lors de la vibration et dans la direction de celle-ci, la pièce traitée présente une courbure ou une pente, il est nécessaire que le système de suspension de l'outil réagisse avec une constante de temps réduite au plus égale à la période de vibration transversalement à la direction de l'avance de l'outil pour que la condition de pression constante entre l'outil et la pièce soit remplie.If during the vibration and in the direction of it, the treated part has a curvature or a slope, it is necessary that the suspension system of the tool reacts with a time constant reduced at most equal to the period of vibration transversely to the direction of feed of the tool so that the constant pressure condition between the tool and the workpiece is fulfilled.
Compte tenu de la faible valeur de cette période, les pièces en mouvement de la machine doivent avoir une très faible inertie et la suspension doit être d'une grande souplesse.Given the low value of this period, the moving parts of the machine must have very low inertia and the suspension must be very flexible.
L'invention vise donc à créer une machine à polir, notamment du type vibrant qui allie les propriétés de faible inertie et de grande souplesse énoncées ci-dessus.The invention therefore aims to create a polishing machine, in particular of the vibrating type which combines the properties of low inertia and great flexibility set out above.
Elle a donc pour objet une machine de polissage de pièces comprenant un châssis, une tête de polissage montée déplaçable sur le châssis, un outil et des moyens de mise en mouvement de l'outil pour lui faire effectuer une action de polissage sur une pièce avec laquelle il est mis en contact par déplacement de la tête de polissage par rapport au châssis, caractérisée en ce que l'outil est monté sur les moyens de mise en mouvement par l'intermédiaire d'un porte-outil pourvu de moyens pneumatiques à double effet de régulation de la force d'application de l'outil sur la pièce.It therefore relates to a machine for polishing parts comprising a chassis, a polishing head mounted movable on the chassis, a tool and means for setting in motion the tool to make it perform a polishing action on a part with which it is brought into contact by displacement of the polishing head by relative to the chassis, characterized in that the tool is mounted on the means for setting in motion by means of a tool holder provided with pneumatic means with double effect for regulating the force of application of the tool to the room.
L'invention sera mieux comprise à l'aide de la description qui va suivre, donnée uniquement à titre d'exemple et faite en se référant aux dessins annexés, sur lesquels :
- la Fig.1 est une vue schématique en élévation d'une machine de polissage suivant l'invention;
- les Fig.2 et 3 sont ds schémas des moyens hydrauliques de commande de déplacements de la tête de polissage par rapport au châssis et de moyens pneumatiques de régulation de la force d'application de l'outil dans différentes conditions de fonctionnement de la machine;
- la Fig.4 est une vue en coupe détaillée d'un porte-outil mettant en oeuvre l'invention;
- la Fig.5 est une coupe suivant la ligne 5-5 de la Fig.4; et
- la Fig.6 est une coupe suivant la ligne 6-6 de la Fig.4.
- Fig.1 is a schematic elevational view of a polishing machine according to the invention;
- Fig.2 and 3 are diagrams of the hydraulic means for controlling the movements of the polishing head relative to the chassis and pneumatic means for regulating the force of application of the tool under different operating conditions of the machine;
- Fig.4 is a detailed sectional view of a tool holder implementing the invention;
- Fig.5 is a section along line 5-5 of Fig.4; and
- Fig.6 is a section along line 6-6 of Fig.4.
La machine de polissage représentée à la Fig.1 comporte principalement un châssis 1 s'étendant verticalement et sur lequel est montée à coulissement une tête de polissage désignée par la référence générale 2 et comportant une colonne 3 en forme générale d'équerre déplaçable verticalement sur le châssis 1. Sur la branche horizontale 4 de la colonne 3 est fixé un ensemble 5 de mise en vibrations comportant un support 6 pour un coulisseau 7.The polishing machine shown in Fig. 1 mainly comprises a chassis 1 extending vertically and on which is slidably mounted a polishing head designated by the
Au-dessus de la branche horizontale 4 de la colonne 3 est disposé un moteur électrique 8 d'entraînement en rotation d'un ensemble bielle-manivelle intérieur destiné à communiquer au coulisseau 7 un mouvement de translation alternatif.Above the
Au coulisseau 7 est fixé un porte-outil 9 dans lequel est monté un outil 10 portant à son extrémité libre une pierre à polir 11.The
L'outil 10 comporte une queue 12 engagée dans le porte-outil 9, immobilisée dans celui-ci à l'aide d'une vis 13 et prolongée par une tige 14 pourvue d'une monture 15 pour la pierre 11.The
Dans la colonne 3 est monté comme connu en soi, un dispositif de déplacement vertical du support de tête de polissage par rapport au châssis. Ce dispositif de déplacement comprend un vérin hydraulique 16 dont le cylindre 17 fermé à sa partie inférieure par un bouchon 18 contient un piston 19 porté par une tige fixe 20 solidaire du châssis 1.In
Le vérin est alimenté en fluide sous pression par un orifice d'entrée situé à sa partie supérieure et représenté aux schémas des Fig.2 et 3 auxquels on va maintenant se référer.The cylinder is supplied with pressurized fluid through an inlet orifice located at its upper part and shown in the diagrams of Fig. 2 and 3 to which we will now refer.
Sur la Fig.2, on a représenté les circuits hydraulique et pneumatique de commande des différents organes mobiles de la machine permettant à celle-ci d'effectuer des opérations de polissage avec un outil dirigé vers le bas.In Fig.2, there is shown the hydraulic and pneumatic circuits for controlling the various moving parts of the machine allowing it to perform polishing operations with a tool directed downwards.
Le châssis fixe de la machine est ici matérialisé par la tige 20 du piston 19 solidaire du châssis.The fixed frame of the machine is here materialized by the
Le cylindre 17 du vérin est solidaire du support 6 du coulisseau ou chariot 7 déplaçable selon un mouvement alternatif par rapport au support 6 au moyen d'un ensemble bielle-manivelle 21 entraîné par le moteur électrique 8 (Fig.1).The
Sur le coulisseau 7 est fixé le porte-outil 9.On the
Le vérin 16 est alimenté en fluide hydraulique à partir d'une centrale 23 comportant une pompe 24 avec une vanne de décharge 25, un distributeur 26 à trois positions et un régulateur de pression 27. La pompe 24 de la vanne de décharge 25 et une canalisation de retour 28 communiquent avec un bac 30.The
Une conduite 31 relie le distributeur 26 à un étranglement 32 de réglage du débit de fluide alimentant le cylindre 17 du vérin 16 et par conséquent la vitesse de déplacement de l'ensemble de polissage par rapport au châssis.A
Une conduite 33 relie le distributeur 26 à une première entrée d'un régulateur hydraulique 34 contenu dans le porte-outil 9, une seconde entrée de ce régulateur étant reliée à l'étranglement réglable 32 par l'intermédiaire d'un clapet anti-retour 35.A
Le circuit pneumatique d'alimentation du dispositif de régulation de l'effort de l'outil sur la pièce comporte une source d'air comprimé 36, un régulateur de pression 37 et un vérin pneumatique 38 dont le cylindre 39 est solidaire du porte-outil et dont le piston 40 est rendu solidaire de l'outil 10.The pneumatic supply circuit for the device for regulating the force of the tool on the workpiece comprises a source of compressed
Le régulateur hydraulique 34 comporte un passage étranglé 41 avec lequel coopère une aiguille 42 déplaçable dans le porte-outil 9 avec le piston 40 du vérin.The
Le fonctionnement d'un tel agencement est le suivant.The operation of such an arrangement is as follows.
Pour mettre la pierre 11 de l'outil 10 en contact avec la pièce P à polir on provoque d'abord la descente de l'ensemble de polissage 2 par rapport au châssis 1 de la machine. A cet effet, on place le distributeur 26 dans la position de travail. Du fluide contenu dans le cylindre 17 du vérin 16 est évacué vers le bac 30 à travers le régulateur hydraulique 34 et le cylindre 17 et par conséquent, l'ensemble de polissage solidaire de celui-ci est déplacé vers le bas.To bring the
Simultanément, le vérin 38 est alimenté en air comprimé de sorte que son piston 40 portant l'outil 10 est déplacé vers le bas du cylindre, provoquant l'ouverture du régulateur hydraulique en raison du déplacement de l'aiguille 42 en dehors de l'orifice étranglé 41.Simultaneously, the
Le débit de fluide hydraulique est alors maximal et la tête de polissage se déplace vers le bas avec une vitesse maximale.The hydraulic fluid flow is then maximum and the polishing head moves downward with maximum speed.
Lorsque la pierre 11 de l'outil entre en contact avec la pièce P à polir, le piston 40 a tendance à remonter dans le cylindre 39 qui continue de descendre sous l'action du dispositif hydraulique, et entraîne avec lui l'aiguile 42 qui tend à réduire la section de passage de l'orifice d'étranglé 41 du régulateur 34 jusqu'à ce qu'une position d'équilibre qui est la position de travail de la pierre soit ainsi atteinte.When the
Lorsque la pierre 11 est en contact avec une surface présentant des variations de cote, par exemple, lorsqu'elle rencontre au cours de l'opération de polissage, une surface en pente, le piston 40 poussé par l'outil se déplace vers le haut.When the
La pression excédentaire engendrée dans le cylindre 39 par la remontée du piston 40 est éliminée par une fente d'échappement à l'air libre non représentée.The excess pressure generated in the
Lorsque l'outil doit être dégagé de la pièce à polir, on place le distributeur 26 dans sa position de dégagement d'outil représentée à droite.When the tool must be released from the workpiece, the
La pompe 24 débite alors dans le cylindre 17 du vérin 16, ce qui provoque la remontée du cylindre 17 par rapport au piston 19.The
Grâce à l'agencement qui vient d'être décrit, l'outil 10 qui présente une faible inertie par rapport au reste de la machine peut être déplacé très rapidement pour suivre la surface d'une pièce à polir car seule la régulation pneumatique intervient dans les variations de faible amplitude de l'outil.Thanks to the arrangement which has just been described, the
Sur la Fig.3, on a représenté les mêmes circuits hydraulique et pneumatique comportant des moyens permettant à la machine d'effectuer des opérations de polissage avec un outil dirigé vers le haut.In Fig.3, there is shown the same hydraulic and pneumatic circuits comprising means for the machine to perform polishing operations with a tool pointing upwards.
Sur cette figure, les éléments identiques à ceux de la Fig.2 portent les mêmes numéros de référence et ne seront pas à nouveau décrits.In this figure, the elements identical to those of FIG. 2 bear the same reference numbers and will not be described again.
L'agencement de la Fig.3 diffère de celui de la Fig.2 en ce qu'il comporte un outil 45 destiné à travailler pour polir une surface située au-dessus de lui.The arrangement of Fig.3 differs from that of Fig.2 in that it includes a
A cet effet, l'outil 45 est coudé et porte une pierre 46 à l'extrémité de sa branche horizontale 47.To this end, the
La branche verticale 48 de l'outil est solidaire du piston 49 d'un autre vérin 50 solidaire du porte-outil 9. Le cylindre 51 du vérin 50 est alimenté en air comprimé à sa partie inférieure.The
L'aiguille 42 du régulateur hydraulique est solidaire de la branche verticale 48 de l'outil.The
Le fonctionnement de l'agencement de la Fig.3 est similaire à celui de l'agencement de la Fig.2 à la différence près que l'entrée en contact de la pierre 46 avec la surface à polir est assurée lors d'un déplacement vers le haut de l'outil par alimentation par le bas du cylindre 50.The operation of the arrangement of Fig.3 is similar to that of the arrangement of Fig.2 with the difference that the contact of the
On constate que grâce à l'agencement qui vient d'être décrit, le poids de l'outil est toujours compensé que ce soit lors d'un fonctionnement en descente ou lors d'un fonctionnement en montée.It can be seen that, thanks to the arrangement which has just been described, the weight of the tool is always compensated for, whether during downhill operation or during uphill operation.
On va maintenant décrite en référence aux Fig.4 à 6, un mode de réalisation particulier d'un porte-outil pour une machine à polir suivant l'invention.A description will now be given with reference to FIGS. 4 to 6, a particular embodiment of a tool holder for a polishing machine according to the invention.
Ce porte-outil comporte un corps 55 fixé au coulisseau ou chariot 7 du dispositif de mise en vibration par des vis 56.This tool holder comprises a
Comme représenté clairement à la Fig.6, le corps 55 du porte-outil comporte une paroi verticale 57 et deux branches latérales parallèles 58, définissant avec la paroi verticale 57 un canal dans lequel sont fixés des rails 59 de guidage coopérant, avec interposition de rangées d'aiguilles 59a, avec des rails de guidage complémentaires 60 portés par un chariot 61 dans lequel est destinée à être engagée la queue d'un outil à polir.As shown clearly in FIG. 6, the
A cet effet, le chariot 61 comporte un évidement 62 pourvu d'une vis 63 de blocage de la queue de l'outil sur le chariot 61.To this end, the
A son extrémité opposée à l'évidement 62, le chariot comporte une partie 64 formant piston engagée dans une chemise 65 formant cylindre montée dans le corps 55 et constituant ainsi un premier vérin dont l'alimentation en air comprimé est assurée au moyen du passage 66 ménagé dans le chariot 61.At its end opposite to the
Dans le corps 55 est également monté un second vérin 67 formé d'une douille 68 à fond épais fermée par un bouchon 69.In the
Dans le fond et le bouchon du corps de ce second vérin sont ménagés des conduits 70, 71 d'alimentation en air comprimé ces conduits traversant également la branche latérale 58 du corps 55 contre laquelle ce second vérin est monté.In the bottom and the plug of the body of this second cylinder are formed
Dans la douille 68 est monté déplaçable un piston 72 disposé sur la partie intermédiaire d'une tige 73 dont une extrémité qui s'étend au-delà du bouchon 69 qu'elle traverse est rendue solidaire du chariot 61. Le second vérin 67 dont l'alimentation en air comprimé peut être assurée de part et d'autre du piston 72 est donc un vérin à double effet.In the
Lorsqu'il est alimenté par le haut, son action s'ajoute à celle du premier vérin 64,65 pour déplacer l'outil dans le sens de la descente.When it is fed from above, its action is added to that of the
Enfin, dans le corps 55 est également monté le régulateur hydraulique 34 dont l'aiguille 42 est fixée au chariot 61 comme représenté à la Fig.4 et dont le passage étranglé 41 est constitué par un manchon pourvu de trous transversaux 75 communiquant avec la centrale hydraulique par un passage 76 ménagé dans un corps de régulateur 77 monté dans le corps 55 du porte-outil et un passage 78 ménagé dans la branche 58 du corps opposée à celle contre laquelle est monté le second vérin 67.Finally, in the
Au-dessus du manchon 41 est ménagé un autre passage 79 de liaison avec la centrale hydraulique.Above the
Le porte-outil décrit en référence aux Fig.4 à 6 comporte donc un premier vérin 64, 65 à simple effet placé à la partie supérieure du chariot 61 qui correspond au vérin 38 alimenté en air comprimé en vue d'un fonctionnement de la machine à polir en descendant.The tool holder described with reference to Figs. 4 to 6 therefore comprises a first single-acting
A ce premier vérin 64, 65 peut être adjointe la partie du second vérin à double effet 67 alimentée au-dessus de son piston 72 par le passage 70.To this
Le second vérin 67 assure de plus la fonction du vérin 50 de l'agencement de la Fig.3 destiné au fonctionnement de la machine en montant car sa partie située au-dessus du piston 72 est alimentée par le bas par le conduit 71.The second actuator 67 also performs the function of the
Le porte-outil décrit en référence aux Fig.4 à 6 assure donc la fonction d'amortissement pneumatique de l'outil lors du fonctionnement de la machine en descendant et en montant ainsi que grâce à la pression du régulateur à aiguille 34,la régulation hydraulique des déplacements de l'ensemble de polissage par rapport à la pièce à polir.The tool holder described with reference to Figs. 4 to 6 therefore ensures the pneumatic damping function of the tool during the operation of the machine going down and up as well as, thanks to the pressure of the
Dans le mode de réalisation représenté à la Fig.1, l'invention est appliquée à un outil de polissage qui n'est soumis qu'à un mouvement de translation alternatif ou de vibration.In the embodiment shown in Fig.1, the invention is applied to a polishing tool which is only subjected to a reciprocating translational movement or vibration.
On comprendra cependant qu'elle s'applique tout aussi bien à un outil soumis à la fois à des mouvements de vibration et de rotation.It will however be understood that it applies equally well to a tool subjected to both vibrational and rotational movements.
Grâce à la présence des moyens pneumatiques, on obtient une régulation de l'effort exercé par l'outil de polissage sur la pièce à polir par palpage à l'aide de la pierre portée par l'outil de la position de contact entre la pierre et la surface de la pièce à polir, et ceci en tenant compte automatiquement du poids de l'outil, que celui-ci travaille en descendant ou en montant.Thanks to the presence of pneumatic means, the force exerted by the polishing tool on the workpiece to be polished by probing is obtained using the stone carried by the tool in the position of contact between the stone. and the surface of the part to be polished, and this automatically taking into account the weight of the tool, whether it works down or up.
L'outil constitue donc en outre un organe palpeur de la position de la tête de polissage par rapport à la pièce à polir.The tool therefore also constitutes a feeler member for the position of the polishing head relative to the part to be polished.
Claims (5)
- A machine for polishing items comprising a frame (1), a polishing head movably mounted on the frame, a tool (10) and means for placing the tool in movement in order to cause it to effect a polishing action on a piece with which it is placed in contact by moving the polishing head with respect to the frame, characterised in that the tool (10) is mounted on means (6, 7) for placing it in movement through the intermediary of a tool holder (9) which is provided with double acting pneumatic means (36, 38; 50) regulating the force with which the tool (10) is applied to the piece (P) which is to be polished.
- A polishing machine according to claim 1, characterised in that the pneumatic adjustment means (36, 38; 48) comprise at least one jack (38,50) supplied with compressed air by a source (36), the said jack being integral with the tool holder (9), the tool (10) being integral with the piston (40, 48) of the jack and comprising a member which senses the position of the polishing head with respect to the piece which is to be polished, and in that the tool holder (9) also has hydraulic adjustment means (34) controlled by movements of the pneumatic jack (38; 50) and incorporated in a hydraulic feed circuit for the means (16, 17, 19, 20) moving the polishing head with respect to the frame (1).
- A polishing machine according to either of claims 1 and 2, characterised in that the pneumatic adjustment means comprise at least a first jack (38) for operation of the machine in the descending direction, the tool being located above the piece which is to be polished, and a second jack (50) for operating the machine in the ascending direction, the tool being located beneath the piece which is to be polished, the first and second jacks (38; 50) being linked mechanically to the hydraulic adjustment means (34).
- A polishing machine according to any one of claims 1 to 3, characterised in that the tool holder (9) comprises a body (55) fixed to the means (6, 7) for imparting movement to the tool (10), a carriage (61) which is provided with means (62, 63) for receiving the tool (10) and is slidably mounted in the body (55), the said carriage (55) comprising at its end opposite the tool a part (64) which forms a piston engaging a sleeve (65) forming a cylinder mounted in the body (55), the parts forming the piston and cylinder respectively (64, 65) comprising a first pneumatic jack for moving the tool in the descending direction, the carriage (55) being linked mechanically to a needle (42) which is movably mounted in a sleeve (41) which forms a restricted passage for the hydraulic adjustment means (34) supplying the means (16, 17, 19, 20) moving the polishing head, the said sleeve being located within a body (77) mounted in the body (55) of the tool holder and connected to the hydraulic circuit by passages (76, 78) and in which provision is also made for a second jack (67) comprising a body (68, 69) mounted in the body (55) of the tool holder, and a piston (72) which can be moved within the body and which is borne by a rod (73) which is mechanically linked to the carriage (61), the second jack being capable of being supplied on either side of the piston (72) from a source of compressed air via corresponding feed ducts (70, 71) in order to displace the tool in the descending or ascending directions.
- A polishing machine according to claim 4, characterised in that the effect of the part of the second jack (67) fed from one side of the piston in the descending direction of the tool is added to that of the first jack (64, 65).first jack 64, 65.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9106756 | 1991-06-04 | ||
FR9106756A FR2677292B1 (en) | 1991-06-04 | 1991-06-04 | POLISHING MACHINE WITH PNEUMATIC REGULATION OF THE EFFORT OF THE TOOL OF THE POLISHING PIECE. |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0517640A1 EP0517640A1 (en) | 1992-12-09 |
EP0517640B1 true EP0517640B1 (en) | 1995-04-12 |
Family
ID=9413462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92470019A Expired - Lifetime EP0517640B1 (en) | 1991-06-04 | 1992-05-27 | Finishing machine with pneumatic control of the tool load |
Country Status (7)
Country | Link |
---|---|
US (1) | US5325636A (en) |
EP (1) | EP0517640B1 (en) |
JP (1) | JP2562549B2 (en) |
AT (1) | ATE120997T1 (en) |
DE (1) | DE69202003T2 (en) |
ES (1) | ES2063724T3 (en) |
FR (1) | FR2677292B1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5733175A (en) | 1994-04-25 | 1998-03-31 | Leach; Michael A. | Polishing a workpiece using equal velocity at all points overlapping a polisher |
US5607341A (en) | 1994-08-08 | 1997-03-04 | Leach; Michael A. | Method and structure for polishing a wafer during manufacture of integrated circuits |
US6336845B1 (en) | 1997-11-12 | 2002-01-08 | Lam Research Corporation | Method and apparatus for polishing semiconductor wafers |
AU747820B2 (en) * | 1998-01-22 | 2002-05-23 | Yasuhiro Hayakawa | Grinder pressing device |
JP2977807B1 (en) * | 1998-07-15 | 1999-11-15 | システム精工株式会社 | Polishing method and polishing apparatus |
US6083082A (en) * | 1999-08-30 | 2000-07-04 | Lam Research Corporation | Spindle assembly for force controlled polishing |
US6431959B1 (en) * | 1999-12-20 | 2002-08-13 | Lam Research Corporation | System and method of defect optimization for chemical mechanical planarization of polysilicon |
KR100392414B1 (en) * | 2002-12-20 | 2003-07-22 | Fineacetechnology Co Ltd | Structure of tool head unit of polishing machine |
US6772784B1 (en) | 2003-04-11 | 2004-08-10 | Mac Valves, Inc. | Proportional pressure regulator having positive and negative pressure delivery capability |
WO2005053905A1 (en) * | 2003-11-28 | 2005-06-16 | Comercial Trasluz Imagen E Iluminacion, S.L. | System for etching the surface of a flat optical conductor |
JP5306065B2 (en) * | 2009-06-04 | 2013-10-02 | 株式会社荏原製作所 | Dressing apparatus and dressing method |
KR101126382B1 (en) * | 2010-05-10 | 2012-03-28 | 주식회사 케이씨텍 | Conditioner of chemical mechanical polishing system |
US9669509B2 (en) * | 2012-09-28 | 2017-06-06 | Thomas Engineering Solutions & Consulting, Llc | Methods for external cleaning and inspection of tubulars |
KR101679131B1 (en) * | 2014-12-29 | 2016-11-23 | 주식회사 엘지실트론 | Wafer's final polishing apparatus and final polishing method by it |
CN104907904A (en) * | 2015-06-16 | 2015-09-16 | 中山市玛而特电子科技有限公司 | Full-automatic magnetic core machine tool |
Family Cites Families (12)
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US1933373A (en) * | 1928-09-07 | 1933-10-31 | Norton Co | Grinding and lapping machine |
CH267749A (en) * | 1948-02-04 | 1950-04-15 | Spojene Tovarny Na Obrabeci St | Facility for superfinishing. |
US2606410A (en) * | 1948-12-14 | 1952-08-12 | Snecma | Device for superfinishing machined surfaces |
FR1244369A (en) * | 1959-09-12 | 1960-10-28 | Control valve for double-acting hydraulic cylinder, and in particular for copier hydraulic cylinder for machine tools | |
JPS496592A (en) * | 1972-02-18 | 1974-01-21 | ||
US3903653A (en) * | 1973-04-11 | 1975-09-09 | Harold J Imhoff | Lapping machine |
DE3007314A1 (en) * | 1980-02-27 | 1981-09-03 | Peter 7442 Neuffen Nagel | Bearing surface machining system - has honing stone subjected to two superimposed oscillations transverse to rotating bearing surface |
US4558537A (en) * | 1984-01-10 | 1985-12-17 | Taft-Peirce Supfina Machine Company, Inc. | Centerless honing machines having automatic size control |
JPS63260752A (en) * | 1987-04-16 | 1988-10-27 | Makino Milling Mach Co Ltd | Automatic polishing machine |
JPH01171747A (en) * | 1987-12-25 | 1989-07-06 | Matsushita Electric Ind Co Ltd | Grinding device |
DE58905593D1 (en) * | 1988-06-21 | 1993-10-21 | Supfina Maschf Hentzen | Automatic centerless fine machining device for surface rotationally symmetrical bodies in a continuous machine. |
IT1244131B (en) * | 1990-10-17 | 1994-07-08 | Melchiorre Off Mecc | METHOD AND DEVICE FOR THE CONTINUOUS CONTROL OF THE THRUST APPLIED ON THE WORKPIECES IN A DOUBLE PLATEAU LAPPING MACHINE. |
-
1991
- 1991-06-04 FR FR9106756A patent/FR2677292B1/en not_active Expired - Fee Related
-
1992
- 1992-05-27 EP EP92470019A patent/EP0517640B1/en not_active Expired - Lifetime
- 1992-05-27 DE DE69202003T patent/DE69202003T2/en not_active Expired - Fee Related
- 1992-05-27 ES ES92470019T patent/ES2063724T3/en not_active Expired - Lifetime
- 1992-05-27 AT AT92470019T patent/ATE120997T1/en active
- 1992-05-28 US US07/889,621 patent/US5325636A/en not_active Expired - Fee Related
- 1992-06-02 JP JP4166892A patent/JP2562549B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2677292B1 (en) | 1995-12-08 |
DE69202003D1 (en) | 1995-05-18 |
FR2677292A1 (en) | 1992-12-11 |
ES2063724T1 (en) | 1995-01-16 |
ES2063724T3 (en) | 1995-06-16 |
EP0517640A1 (en) | 1992-12-09 |
JPH05192864A (en) | 1993-08-03 |
ATE120997T1 (en) | 1995-04-15 |
US5325636A (en) | 1994-07-05 |
DE69202003T2 (en) | 1995-08-24 |
JP2562549B2 (en) | 1996-12-11 |
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