EP4530471B1 - Pompe à vide à spirales et système de pompe à vide à spirales - Google Patents
Pompe à vide à spirales et système de pompe à vide à spiralesInfo
- Publication number
- EP4530471B1 EP4530471B1 EP25156934.9A EP25156934A EP4530471B1 EP 4530471 B1 EP4530471 B1 EP 4530471B1 EP 25156934 A EP25156934 A EP 25156934A EP 4530471 B1 EP4530471 B1 EP 4530471B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- spiral
- scroll vacuum
- vacuum pump
- drive shaft
- balancing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/02—Arrangements of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
- F04C18/0253—Details concerning the base
- F04C18/0261—Details of the ports, e.g. location, number, geometry
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
- F04C18/0269—Details concerning the involute wraps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/008—Hermetic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/005—Axial sealings for working fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/807—Balance weight, counterweight
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Claims (5)
- Pompe à vide à spirales, comprenant :- un système de pompage (11, 13) comprenant un composant spiralé fixe (11) et un composant spiralé (13) coopérant avec ce dernier pour le pompage,- un arbre d'entraînement (17) tournant autour d'un axe de rotation (15) pendant le fonctionnement, doté d'une portion excentrique (19) pour entraîner le composant spiralé mobile (13), et- un moteur électrique d'entraînement (21, 23) pour l'arbre d'entraînement (17),dans laquellele composant spiralé mobile (13) comprend un agencement en spirale avec des parois spiralées (69), des rainures spiralées (70) délimitées par celles-ci et une base spiralée (71) formant leur fond, ainsi qu'un support (73) pour l'agencement en spirale, qui coopère avec la portion excentrique (19) de l'arbre d'entraînement (17),le composant spiralé fixe (11) comprend un agencement en spirale avec des parois spiralées (49) et une base spiralée (51) ainsi qu'un support (53) pour l'agencement en spirale, etdans le composant spiralé mobile (13) et/ou dans le composant spiralé fixe (11), ladite ou lesdites parois spiralées (69, 49) situées radialement à l'extérieur présentent une épaisseur (WD) qui est plus grande que l'épaisseur (WD) des parois spiralées (69, 49) situées radialement plus à l'intérieur, caractérisée en ce queladite paroi spiralée (69, 49) située radialement à l'extérieur ou lesdites parois spiralées (69, 49) situées radialement à l'extérieur, dont l'épaisseur (WD) est plus grande que l'épaisseur (WD) des parois spiralées (69, 49) situées radialement plus à l'intérieur, est interrompue en direction circonférentielle ou sont chacune interrompues en direction circonférentielle.
- Pompe à vide à spirales selon la revendication 1,dans laquelle le support (73, 53) comporte, dans sa zone située radialement à l'extérieur, une entrée de gaz (67) au niveau de laquelle la paroi spiralée (69, 49) ou les parois spiralées (69, 49) sont interrompues en direction circonférentielle,au moins une, de préférence chacune, des parois spiralées (69, 49) interrompues en direction circonférentielle présente l'épaisseur plus grande (WD).
- Pompe à vide à spirales selon la revendication 2,
dans laquelle l'entrée de gaz (67) comprend un évidement s'étendant radialement vers l'intérieur, de préférence en forme de V, à partir du bord extérieur du support (73, 53), ou est formée par un tel évidement. - Pompe à vide à spirales selon l'une des revendications précédentes, dans laquelle la ou chaque paroi spiralée (69, 49) d'épaisseur plus grande (WD) est disposée sur un cercle.
- Pompe à vide à spirales selon l'une des revendications précédentes, dans laquelle plusieurs, en particulier deux, parois spiralées radialement extrêmes (73, 53) d'épaisseur plus grande (WD) sont disposées sur des cercles concentriques, sont interrompues en direction circonférentielle au niveau d'une entrée de gaz (67) formée dans le support (73, 53) et délimitent une structure de pompage en parallèle composée de canaux circulaires ou en forme de segments de cercle qui pompent en parallèle et qui se transforment en un canal de pompage hélicoïdal qui est délimité par au moins une paroi spiralée (69, 49) d'épaisseur plus petite s'étendant en hélice.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP25156934.9A EP4530471B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP23190388.1A EP4253720B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
| EP25156934.9A EP4530471B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
Related Parent Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP23190388.1A Division EP4253720B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
| EP23190388.1A Division-Into EP4253720B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| EP4530471A2 EP4530471A2 (fr) | 2025-04-02 |
| EP4530471A3 EP4530471A3 (fr) | 2025-07-02 |
| EP4530471B1 true EP4530471B1 (fr) | 2026-02-25 |
| EP4530471C0 EP4530471C0 (fr) | 2026-02-25 |
Family
ID=87567462
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP24197627.3A Active EP4506537B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales |
| EP23190388.1A Active EP4253720B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
| EP25156934.9A Active EP4530471B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
| EP25156928.1A Pending EP4530470A3 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
| EP24197612.5A Active EP4506536B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP24197627.3A Active EP4506537B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales |
| EP23190388.1A Active EP4253720B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP25156928.1A Pending EP4530470A3 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
| EP24197612.5A Active EP4506536B1 (fr) | 2023-08-08 | 2023-08-08 | Pompe à vide à spirales et système de pompe à vide à spirales |
Country Status (3)
| Country | Link |
|---|---|
| EP (5) | EP4506537B1 (fr) |
| CN (1) | CN120693445A (fr) |
| WO (1) | WO2025032188A1 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4407183A1 (fr) | 2024-05-31 | 2024-07-31 | Pfeiffer Vacuum Technology AG | Pompe à vide à spirales et son procédé de mise en oeuvre |
| EP4467810A3 (fr) | 2024-07-15 | 2025-02-26 | Pfeiffer Vacuum Technology AG | Pompe à vide à spirales et procédé de fabrication d'une pompe à vide à spirales |
| EP4538532A3 (fr) * | 2025-02-25 | 2025-08-27 | Pfeiffer Vacuum Technology AG | Pompe à vide à spirales |
| EP4621238A3 (fr) * | 2025-07-16 | 2025-11-12 | Pfeiffer Vacuum Technology AG | Procédé de montage d'une pompe à vide à spirales |
| EP4636251A2 (fr) | 2025-09-09 | 2025-10-22 | Pfeiffer Vacuum Technology AG | Pompe à vide à spirales |
Family Cites Families (27)
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| GB809445A (en) * | 1954-02-27 | 1959-02-25 | Heraeus Gmbh W C | Improvements in or relating to rotary high vacuum pumps |
| JPS60206989A (ja) * | 1984-03-30 | 1985-10-18 | Mitsubishi Electric Corp | スクロ−ル形流体機械 |
| US6884047B1 (en) * | 2003-10-20 | 2005-04-26 | Varian, Inc. | Compact scroll pump |
| DE102006058842A1 (de) * | 2006-12-13 | 2008-06-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Lüfter |
| FR2968731B1 (fr) * | 2010-12-13 | 2015-02-27 | Danfoss Commercial Compressors | Systeme thermodynamique equipe d'une pluralite de compresseurs |
| CN102817840B (zh) * | 2011-06-07 | 2014-08-27 | 思科涡旋科技(杭州)有限公司 | 一种带有绕动式推力轴承的涡卷式容积位移装置 |
| US9605676B2 (en) * | 2013-05-31 | 2017-03-28 | Emerson Climate Technologies, Inc. | Variable speed scroll compressor |
| US20150004039A1 (en) * | 2013-06-28 | 2015-01-01 | Emerson Climate Technologies, Inc. | Capacity-modulated scroll compressor |
| JP6165576B2 (ja) * | 2013-09-30 | 2017-07-19 | 株式会社日立産機システム | スクロール式流体機械 |
| CN105443377A (zh) * | 2014-06-10 | 2016-03-30 | 丹佛斯(天津)有限公司 | 涡旋压缩机 |
| US10954944B2 (en) * | 2015-04-27 | 2021-03-23 | Emerson Climate Technologies, Inc. | Compressor having counterweight assembly |
| EP3508727B1 (fr) | 2015-10-06 | 2020-05-13 | Pfeiffer Vacuum Gmbh | Pompe à spirales et procédé de fonctionnement d'une pompe à spirales |
| JP6325041B2 (ja) * | 2016-08-31 | 2018-05-16 | 三菱重工サーマルシステムズ株式会社 | スクロール流体機械およびチップシール |
| US11193490B2 (en) * | 2018-03-30 | 2021-12-07 | Kabushiki Kaisha Toyota Jidoshokki | Scroll compressor including bushing mounted on eccentric shaft containing cylindrical and auxiliary weight portions and balancer disposed above annular rotor remote from back pressure chamber |
| EP4336713A3 (fr) * | 2018-07-19 | 2024-06-05 | Agilent Technologies, Inc. | Système de pompage à vide comprenant une pompe à vide lubrifiée à l'huile |
| US12098642B2 (en) * | 2019-04-30 | 2024-09-24 | Agilent Technologies, Inc. | Double sided oil film thrust bearing in a scroll pump |
| CN110159528B (zh) * | 2019-05-23 | 2020-11-17 | 浙江大学 | 一种双侧双槽并联式无油涡旋空压机 |
| CN110185614B (zh) * | 2019-06-26 | 2020-10-02 | 浙江大学 | 一种干式双涡旋真空泵 |
| JP2021014801A (ja) * | 2019-07-10 | 2021-02-12 | ダイキン工業株式会社 | スクロール圧縮機 |
| EP3647599B2 (fr) | 2019-10-07 | 2025-09-03 | Pfeiffer Vacuum Gmbh | Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes |
| JP7220692B2 (ja) * | 2019-10-07 | 2023-02-10 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ、スクロールポンプ及びその製造方法 |
| EP3617511B1 (fr) | 2019-10-07 | 2021-12-08 | Pfeiffer Vacuum Gmbh | Pompes à spirales et procédé de fabrication pour des telles pompes |
| EP4491877A3 (fr) * | 2020-07-22 | 2025-04-02 | Pfeiffer Vacuum Technology AG | Clapet anti-retour, appareil à vide et pompe à vide |
| JP7534951B2 (ja) * | 2020-12-22 | 2024-08-15 | サンデン株式会社 | スクロール型圧縮機 |
| CN113431781A (zh) * | 2021-08-05 | 2021-09-24 | 临海市谭氏真空设备有限公司 | 干式涡旋真空泵 |
| EP3940234B1 (fr) * | 2021-09-29 | 2023-08-23 | Pfeiffer Vacuum Technology AG | Pompe et procédé de fabrication d'une couche antifriction |
| CN116470689A (zh) * | 2023-03-27 | 2023-07-21 | 北京通嘉宏瑞科技有限公司 | 一体轴式真空泵电机 |
-
2023
- 2023-08-08 EP EP24197627.3A patent/EP4506537B1/fr active Active
- 2023-08-08 EP EP23190388.1A patent/EP4253720B1/fr active Active
- 2023-08-08 EP EP25156934.9A patent/EP4530471B1/fr active Active
- 2023-08-08 EP EP25156928.1A patent/EP4530470A3/fr active Pending
- 2023-08-08 EP EP24197612.5A patent/EP4506536B1/fr active Active
-
2024
- 2024-08-08 WO PCT/EP2024/072497 patent/WO2025032188A1/fr active Pending
- 2024-08-08 CN CN202480015459.0A patent/CN120693445A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP4253720C0 (fr) | 2025-10-01 |
| EP4506536C0 (fr) | 2025-12-17 |
| EP4530471A3 (fr) | 2025-07-02 |
| EP4253720B1 (fr) | 2025-10-01 |
| EP4530470A2 (fr) | 2025-04-02 |
| EP4530470A3 (fr) | 2025-07-02 |
| EP4530471A2 (fr) | 2025-04-02 |
| EP4253720A3 (fr) | 2024-06-19 |
| EP4253720A2 (fr) | 2023-10-04 |
| CN120693445A (zh) | 2025-09-23 |
| EP4506537B1 (fr) | 2025-10-08 |
| EP4530471C0 (fr) | 2026-02-25 |
| WO2025032188A1 (fr) | 2025-02-13 |
| EP4506536B1 (fr) | 2025-12-17 |
| EP4506537C0 (fr) | 2025-10-08 |
| EP4506536A1 (fr) | 2025-02-12 |
| EP4506537A1 (fr) | 2025-02-12 |
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