EP4317384A1 - Liquide de traitement aqueux - Google Patents

Liquide de traitement aqueux Download PDF

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Publication number
EP4317384A1
EP4317384A1 EP22780542.1A EP22780542A EP4317384A1 EP 4317384 A1 EP4317384 A1 EP 4317384A1 EP 22780542 A EP22780542 A EP 22780542A EP 4317384 A1 EP4317384 A1 EP 4317384A1
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EP
European Patent Office
Prior art keywords
working fluid
mass
aqueous working
less
component
Prior art date
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EP22780542.1A
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German (de)
English (en)
Inventor
Tomohiko Kitamura
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Idemitsu Kosan Co Ltd
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Idemitsu Kosan Co Ltd
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Publication of EP4317384A1 publication Critical patent/EP4317384A1/fr
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    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M173/00Lubricating compositions containing more than 10% water
    • C10M173/02Lubricating compositions containing more than 10% water not containing mineral or fatty oils
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M105/00Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
    • C10M105/08Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
    • C10M105/18Ethers, e.g. epoxides
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M107/00Lubricating compositions characterised by the base-material being a macromolecular compound
    • C10M107/20Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
    • C10M107/30Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M107/32Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
    • C10M107/34Polyoxyalkylenes
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/02Hydroxy compounds
    • C10M2207/021Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2207/022Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/10Carboxylix acids; Neutral salts thereof
    • C10M2207/12Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2207/125Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
    • C10M2207/126Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids monocarboxylic
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/104Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/105Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/108Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2215/00Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
    • C10M2215/02Amines, e.g. polyalkylene polyamines; Quaternary amines
    • C10M2215/04Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2215/042Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10NINDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2020/00Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
    • C10N2020/01Physico-chemical properties
    • C10N2020/04Molecular weight; Molecular weight distribution
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10NINDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10NINDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/02Pour-point; Viscosity index
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10NINDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/18Anti-foaming property
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10NINDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00Specified use or application for which the lubricating composition is intended
    • C10N2040/20Metal working
    • C10N2040/22Metal working with essential removal of material, e.g. cutting, grinding or drilling
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10NINDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2070/00Specific manufacturing methods for lubricant compositions
    • C10N2070/02Concentrating of additives

Definitions

  • the present invention relates to an aqueous working fluid, a concentrate for the aqueous working fluid, the use of the aqueous working fluid, and a method for processing a brittle material using the aqueous working fluid.
  • silicon ingot which is a brittle material, needs to be cut, and wire sawing is generally used from the viewpoint of cutting accuracy and productivity.
  • wire sawing is generally used from the viewpoint of cutting accuracy and productivity.
  • a loose abrasive process involving cutting silicon ingot with abrasive grains being dispersed in a working fluid
  • a fixed abrasive process involving cutting silicon ingot with abrasive grains being fixed to the wire surface in advance.
  • working fluids are proposed that can be suitably used in the respective abrasive processes.
  • Patent Literature 1 discloses an invention relating to a water-soluble working fluid composition for fixed abrasive wire sawing used in the cutting of a workpiece other than rare-earth magnets, in which (A) the aqueous working fluid composition for fixed-abrasive wire sawing comprises glycol.
  • the present invention provides an aqueous working fluid that has a specific structure, contains an ether compound having a specific molecular weight and water-insoluble polyoxyalkylene ether, and is regulated to a predetermined viscosity.
  • the present invention provides, for example, the following embodiments [1] to [15]:
  • the aqueous working fluid of one suitable embodiment of the present invention has various characteristics (such as appropriate viscosity characteristics, small surface tension, good antifoaming properties) that can increase workability and, therefore, can be an aqueous working fluid suitable for processing brittle materials.
  • the upper limits and the lower limits can be suitably combined.
  • a numerical range is described as being “preferably 30 to 100, and more preferably 40 to 80”
  • the range of "30 to 80” and the range of "40 to 100” are also included in the numerical range described herein.
  • a numerical range is described as being “preferably 30 or more and more preferably 40 or more, and preferably 100 or less and more preferably 80 or less”
  • the range of "30 to 80" and the range of "40 to 100" are also included in the numerical range described herein.
  • a numerical range from a lower limit to an upper limit can be specified by suitably selecting from, and appropriately combining, the respective options.
  • the aqueous working fluid of the present invention contains compound (A) represented by the above general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group, and has a viscosity at 25°C of 4.0 to 26.0 mPa ⁇ s.
  • the aqueous working fluid of the present invention is a solution that is directly used in the processing of a workpiece without being diluted.
  • the concentrate for an aqueous working fluid of the present invention as will be described below is a solution that can be diluted with water to be formed into an aqueous working fluid having the above-described viscosity, and is distinguished from the aqueous working fluid of the present invention in that the concentrate for an aqueous working fluid is not a solution directly used in the processing of a workpiece.
  • the aqueous working fluid of one embodiment of the present invention is prepared as an aqueous working fluid having various characteristics that can increase workability, or, in particular, small surface tension.
  • the aqueous working fluid of the present invention can be an aqueous working fluid having excellent brittle material workability.
  • the viscosity at 25°C of the aqueous working fluid of one embodiment of the present invention is 4.0 mPa ⁇ s or more, preferably 4.5 mPa ⁇ s or more, more preferably 5.0 mPa ⁇ s or more, more preferably 5.5 mPa ⁇ s or more, more preferably 6.0 mPa ⁇ s or more, even more preferably 6.5 mPa ⁇ s or more, even more preferably 7.0 mPa ⁇ s or more, even more preferably 7.5 mPa ⁇ s or more, yet more preferably 8.0 mPa ⁇ s or more, yet more preferably 8.5 mPa ⁇ s or more, and particularly preferably 9.0 mPa ⁇ s or more, and, moreover, may be 9.5 mPa ⁇ s or more, 10.0 mPa ⁇ s or more, 10.5 mPa ⁇ s or more, 11.0 mPa-s or more, 11.5
  • the viscosity at 25°C of the aqueous working fluid can be measured by the method described in the Examples.
  • the aqueous working fluid of one embodiment of the present invention may further contain (C) water from the viewpoint of providing an aqueous working fluid regulated to the above-described viscosity range.
  • the aqueous working fluid of one embodiment of the present invention may contain one or more selected from (D) carboxylic acid and (E) an amine compound.
  • the aqueous working fluid of one embodiment of the present invention may contain, as necessary, other additives other than the components (A) to (E) as long as the effects of the present invention are not impaired.
  • the total content of the components (A) and (B) is preferably more than 15% by mass, more preferably more than 20% by mass, more preferably more than 25% by mass, even more preferably more than 30% by mass, even more preferably more than 35% by mass, yet more preferably more than 40% by mass, particularly preferably more than 45% by mass, and, moreover, may be more than 50% by mass, more than 55% by mass, more than 60% by mass, more than 65% by mass, or more than 70% by mass, and may be 100% by mass or less, 98% by mass or less, 96% by mass or less, 95% by mass or less, 93% by mass or less, or 90% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
  • the total content of the components (A) and (B) is preferably 70% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, yet more preferably 95% by mass or more, and particularly preferably 98% by mass or more, and may be 100% by mass or less, 99. 99% by mass or less, 99.90% by mass or less, or 99.80% by mass or less based on the total amount (100% by mass) of the components contained in the aqueous working fluid excluding water (C) .
  • the total content of the components (A), (B), and (C) is preferably 20% by mass or more, more preferably 30% by mass or more, more preferably 40% by mass or more, even more preferably 50% by mass or more, even more preferably 60% by mass or more, yet more preferably 70% by mass or more, and particularly preferably 75% by mass or more, and, moreover, may be 80% by mass or more, 85% by mass or more, 90% by mass or more, or 95% by mass or more, and may be 100% by mass or less, 99.999% by mass or less, 99.99% by mass or less, or 99.98% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
  • the aqueous working fluid of the present invention contains a compound represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less as component (A).
  • Containing component (A) the aqueous working fluid can have excellent brittle material workability.
  • One component (A) may be used singly, or two or more may be used in combination.
  • A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; and m is an integer of 1 or more, and preferably an integer of 2 or more.
  • alkylene group examples include alkylene groups having 2 carbon atoms such as an ethylene group (-CH 2 CH 2 -) and an ethylidene group (-CH(CH 3 )-); alkylene groups having 3 carbon atoms such as a trimethylene group (-CH 2 CH 2 CH 2 -), a propylene group (-CH(CH 3 )CH 2 -), a propylidene group (-CHCH 2 CH 3 -), and an isopropylidene group (-C(CH 3 ) 2 -); and alkylene groups having 4 carbon atoms such as a tetramethylene group (-CH 2 CH 2 CH 2 CH 2 -), a 1-methyltrimethylene group (-CH(CH 3 )CH 2 CH 2 -), a 2-methyltrimethylene group (-CH 2 CH(CH 3 )CH 2 -), and a butylene group (-C(CH 3 ) 2 CH 2 -).
  • the alkylene group may be
  • component (A) preferably contains one or more selected from diethylene glycol, dipropylene glycol, polyethylene glycol, and polypropylene glycol, and more preferably contains one or more selected from diethylene glycol and polyethylene glycol.
  • the total content of diethylene glycol and polyethylene glycol is preferably 30 to 100% by mass, more preferably 40 to 100% by mass, more preferably 50 to 100% by mass, more preferably 60 to 100% by mass, even more preferably 70 to 100% by mass, even more preferably 80 to 100% by mass, and yet more preferably 90 to 100% by mass, and particularly preferably 95 to 100% by mass based on the total amount (100% by mass) of component (A) contained in the aqueous working fluid.
  • the weight average molecular weight of component (A) is 12,000 or less, preferably 10,000 or less, more preferably 8,000 or less, more preferably 6,500 or less, even more preferably 5,000 or less, even more preferably 4,000 or less, yet more preferably 3,000 or less, yet more preferably 2,000 or less, and particularly preferably 1,000 or less, and, moreover, may be 900 or less, 800 or less, 700 or less, 600 or less, 500 or less, 450 or less, 400 or less, or 350 or less.
  • the lower limit of the weight average molecular weight of component (A) is not particularly limited, and the minimum molecular weight of component (A) should be equal to or greater than the molecular weight of ethylene glycol, i.e., 62, and, moreover, may be 65 or more, 70 or more, 80 or more, 90 or more, or 100 or more.
  • the weight average molecular weight means a value measured by the method described in the Examples.
  • the content of component (A) is preferably 15.0% by mass or more, more preferably 20% by mass or more, more preferably 25% by mass or more, even more preferably 30% by mass or more, even more preferably 35% by mass or more, yet more preferably 40% by mass or more, and particularly preferably 45% by mass or more, and, moreover, may be 50% by mass or more, 55% by mass or more, 60% by mass or more, 65% by mass or more, or 70% by mass or more, and is preferably 95.0% by mass or less, more preferably 92.0% by mass or less, more preferably 90.0% by mass or less, even more preferably 87.0% by mass or less, even more preferably 85.0% by mass or less, yet more preferably 83.0% by mass or less, and particularly preferably 80.0% by mass or less based on
  • the aqueous working fluid of the present invention contains water-insoluble compound (B) having a polyoxyalkylene group as component (B).
  • Containing component (B) enables the surface tension of the aqueous working fluid to be small, and an aqueous working fluid having excellent brittle material workability to be provided.
  • One component (B) may be used singly, or two or more may be used in combination.
  • the compound of interest can be determined as being a water-insoluble compound when 0.1 g of the compound of interest is added to 99.9 g of ion exchanged water at 25°C, the mixture is stirred and left to stand still at 25°C for 24 hours, and residues of the compound of interest are visually confirmed.
  • the HLB value of component (B) used in one embodiment of the present invention is preferably 10.0 or less, more preferably 9.0 or less, and even more preferably 8.0 or less, and, moreover, may be 7.0 or less, 6.0 or less, 5.0 or less, or 4.0 or less, and may be more than 0, 1.0 or more, or 2.0 or more.
  • the HLB value means a value calculated by Griffin's method.
  • component (B) preferably contains one or more selected from water-insoluble polyoxyalkylene ether (B1) represented by the following general formula (b-1) and an alkylene oxide adduct of water-insoluble acetylene glycol (B2) represented by the following general formula (b-2):
  • a 1 to A 3 are each independently an alkylene group having 2 to 4 carbon atoms;
  • R a to R e are each independently a hydrogen atom, an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group, and is preferably a hydrogen atom or an alkyl group;
  • R 1 to R 3 are each independently an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group, and is preferably an alkyl group;
  • n, p, and q are each independently an integer of 1 or more.
  • Examples of the alkylene group having 2 to 4 carbon atoms that can be selected as A 1 to A 3 include those identical to the above-described alkylene groups having 2 to 4 carbon atoms that can be selected as A in the above general formula (a-1), an alkylene group having 2 to 3 carbon atoms is preferable, an ethylene group, a trimethylene group, or a propylene group is more preferable, and an ethylene group is even more preferable.
  • the alkylene group may be a linear alkylene group or may be a branched alkylene group.
  • Examples of the alkyl group that can be selected as R a to R e and R 1 to R 3 include a methyl group, an ethyl group, a propyl group (a n-propyl group, an isopropyl group), a butyl group (a n-butyl group, a s-butyl group, a t-butyl group, an isobutyl group), a pentyl group, a hexyl group, a heptyl group, an octyl group, a 2-ethylhexyl group, a nonyl group, a 1,1-dimethylheptyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl
  • Examples of the cycloalkyl group optionally having an alkyl group, which can be selected as R a to R e and R 1 to R 3 , include a cyclopentyl group, a cyclohexyl group, a dimethylcyclohexyl group, an ethylcyclohexyl group, a propylcyclohexyl group, a butylcyclohexyl group, and a heptylcyclohexyl group.
  • the number of ring-forming carbon atoms in the cycloalkyl group is preferably 5 to 18, more preferably 5 to 12, and even more preferably 6 to 10.
  • Examples of the aryl group optionally having an alkyl group include a phenyl group, a naphthyl group, an anthracenyl group, a biphenyl group, a terphenyl group, a tolyl group, a dimethylphenyl group, a butylphenyl group, a nonylphenyl group, a methylbenzyl group, and a dimethylnaphthyl group.
  • the number of ring-forming carbon atoms in the aryl group is preferably 6 to 24, more preferably 6 to 18, and even more preferably 6 to 12.
  • Component (B1) used in one embodiment of the present invention is preferably water-insoluble polyoxyalkylene ether of the above general formula (b-1) wherein A 1 is an ethylene group, R a is a hydrogen atom, and R 1 is an alkyl group having 1 to 20 (preferably 1 to 10) carbon atoms.
  • Component (B2) used in one embodiment of the present invention is preferably an ethylene oxide adduct of water-insoluble acetylene glycol of the above general formula (b-2) wherein A 2 and A 3 are ethylene groups, R b and R c are hydrogen atoms, R d and R e are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms (preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3), and R 2 and R 3 are each independently an alkyl group (preferably a branched alkyl group) having 1 to 20 carbon atoms (preferably 2 to 16, more preferably 3 to 10, even more preferably 4 to 8, and yet more preferably 4 to 6).
  • the content of component (B) is preferably 0.0001% by mass or more, more preferably 0.0003% by mass or more, more preferably 0.0005% by mass or more, even more preferably 0.0010% by mass or more, even more preferably 0.0020% by mass or more, yet more preferably 0.0030% by mass or more, and particularly preferably 0.0040% by mass or more, is preferably 1.0% by mass or less, more preferably 0.80% by mass or less, more preferably 0.50% by mass or less, even more preferably 0.30% by mass or less, even more preferably 0.10% by mass or less, yet more preferably 0.080% by mass or less, and particularly preferably 0.050% by mass or less, and, moreover, may be 0.030% by mass or less, 0.020% by mass or less, 0.010% by mass or less, 0.0090% by mass or
  • the ratio of the content of component (B) to 100 parts by mass of component (A) is preferably 0.0001 parts by mass or more, more preferably 0.0003 parts by mass or more, more preferably 0.0005 parts by mass or more, even more preferably 0.0010 parts by mass or more, even more preferably 0.0020 parts by mass or more, yet more preferably 0.0030 parts by mass or more, yet more preferably 0.0040 parts by mass or more, and particularly preferably 0.0050 parts by mass or more, is preferably 1.80 parts by mass or less, more preferably 1.70 parts by mass or less, more preferably 1.50 parts by mass or less, even more preferably 1.40 parts by mass or less, yet more preferably 1.30 parts by mass or less, and particularly preferably 1.25 parts by mass or less, and, more
  • the aqueous working fluid of one embodiment of the present invention may further contain water as the component (C).
  • examples of water used as the component (C) include ultrapure water, pure water, distilled water, ion exchanged water, tap water, and water for industrial use.
  • the content of the component (C) is preferably 5.0% by mass or more, more preferably 7.0% by mass or more, more preferably 10.0% by mass or more, even more preferably 12.0% by mass or more, even more preferably 15.0% by mass or more, yet more preferably 17.0% by mass or more, and particularly preferably 20.0% by mass or more, is preferably 70.0% by mass or less, more preferably 67.0% by mass or less, more preferably 65.0% by mass or less, even more preferably 63.0% by mass or less, even more preferably 60.0% by mass or less, yet more preferably 57.0% by mass or less, and particularly preferably 55.0% by mass or less, and, moreover, may be 50.0% by mass or less, 45.0% by mass or less, 40.0% by mass or less, 35.0% by mass or less, 30.0% by mass or less, or 27.0% by mass or less based on the total amount (100% by mass) of the aqueous
  • the aqueous working fluid of one embodiment of the present invention may further contain carboxylic acid as the component (D).
  • One component (D) may be used singly, and two or more may be used in combination.
  • carboxylic acid used as the component (D) in one embodiment of the present invention include saturated monocarboxylic acid, unsaturated monocarboxylic acid, dicarboxylic acid, and tricarboxylic acid.
  • carboxylic acid used as the component (D) in one embodiment of the present invention is preferably saturated monocarboxylic acid or unsaturated monocarboxylic acid, more preferably saturated monocarboxylic acid, and even more preferably branched saturated monocarboxylic acid.
  • saturated monocarboxylic acid examples include linear saturated monocarboxylic acid such as valeric acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, undecanoic acid, lauric acid, tridecanoic acid, myristic acid, pentadecanoic acid, palmitic acid, heptadecanoic acid, stearic acid, nonadecanic acid, arachic acid, and behenic acid; and branched saturated monocarboxylic acid such as isomyristic acid, isopalmitic acid, isostearic acid, 2,2-dimethylpropanoic acid, 2,2-dimethylbutanoic acid, 2,2-dimethylpentanoic acid, 2,2-dimethyloctanoic acid, 2-ethyl-2,3,3-trimethylbutanoic acid, 2,2,3,4-tetramethylpentanoic acid, 2,5,5-trimethyl-2-t-butylhexa
  • unsaturated monocarboxylic acid examples include undecylenic acid, oleic acid, elaidic acid, erucic acid, nervonic acid, linoleic acid, ⁇ -linolenic acid, arachidonic acid, ⁇ -linolenic acid, stearidonic acid, eicosapentaenoic acid, and docosahexaenoic acid.
  • dicarboxylic acid examples include adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, undecanedioic acid, dodecanedioic acid, brassylic acid, and tetradecanedioic acid.
  • tricarboxylic acid examples include propanetricarboxylic acid, propan-1-ene-1,2,3-tricarboxylic acid, butanetricarboxylic acid, pentanetricarboxylic acid, hexanetricarboxylic acid, octanetricarboxylic acid, nonanetricarboxylic acid, decanetricarboxylic acid, undecanetricarboxylic acid, and monomethyldecanetricarboxylic acid.
  • the content of the component (D) is preferably 0.001% by mass or more, more preferably 0.003% by mass or more, even more preferably 0.005% by mass or more, yet more preferably 0.007% by mass or more, and particularly preferably 0.009% by mass or more, and is preferably 3.0% by mass or less, more preferably 2.0% by mass or less, more preferably 1.0% by mass or less, even more preferably 0.50% by mass or less, yet more preferably 0.20% by mass or less, and particularly preferably 0.10% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
  • the aqueous working fluid of one embodiment of the present invention may further contain an amine compound as the component (E).
  • One component (E) may be used singly, or two or more may be used in combination.
  • Examples of the amine compound used as the component (E) in one embodiment of the present invention include alkylamine, alkanolamine, and polyalkylenepolyamine.
  • alkanolamine is preferable as the amine compound used as the component (E) in one embodiment of the present invention, and alkanolamine having 2 to 6 carbon atoms is more preferable.
  • alkylamine examples include primary aliphatic alkylamine such as monomethylamine, monoethylamine, monopropylamine, monobutylamine, and monopentylamine; and secondary aliphatic alkylamine such as dimethylamine, methylethylamine, diethylamine, methylpropylamine, and ethylpropylamine.
  • alkanolamine examples include monomethanolamine, monoethanolamine, monopropanolamine, monoisopropanolamine, monobutanolamine, dimethanolamine, methanolethanolamine, diethanolamine, methanolpropanolamine, ethanolpropanolamine, dipropanolamine, diisopropanolamine, trimethanolamine, triethanolamine, tripropanolamine, triisopropanolamine, tributanolamine, and monobutyldiethanolamine.
  • alkanolamine having 2 to 6 carbon atoms is preferable, one or more selected from monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine are more preferable, and one or more selected from triethanolamine and triisopropanolamine are even more preferable, and triisopropanolamine is yet more preferable.
  • polyalkylenepolyamine examples include diethylenetriamine, triethylenetetramine, tetraethylenepentamine, pentaethylenehexamine, hexaethyleneheptamine, tetrapropylenepentamine, and hexabutyleneheptamine.
  • the content of the component (E) is preferably 0.001% by mass or more, more preferably 0.005% by mass or more, even more preferably 0.007% by mass or more, yet more preferably 0.010% by mass or more, and particularly preferably 0.015% by mass or more, is preferably 5.0% by mass or less, more preferably 3.0% by mass or less, even more preferably 2.0% by mass or less, yet more preferably 1.0% by mass or less, and particularly preferably 0.70% by mass or less, and, moreover, may be 0.50% by mass or less, 0.30% by mass or less, 0.20% by mass or less, 0.10% by mass or less, 0.070% by mass or less, or 0.050% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
  • the mass ratio of the content of the component (D) to the content of the component (E) [(D)/(E)] is preferably 0.01 or more, more preferably 0.05 or more, more preferably 0.10 or more, even more preferably 0.20 or more, yet more preferably 0.30 or more, and particularly preferably 0.40 or more, and is preferably 1.2 or less, more preferably 1.0 or less, more preferably 0.90 or less, even more preferably 0.80 or less, yet more preferably 0.75 or less, and particularly preferably 0.70 or less.
  • the aqueous working fluid of one embodiment of the present invention may further contain, as necessary, other additives other than the components (A) to (E) as long as the effects of the present invention are not impaired.
  • Such other additives include rust inhibitors (such as alkylbenzene sulfonate, dinonylnaphthalene sulfonate, alkenyl succinate, and polyhydric alcohol ester), friction modifiers (such as various nonionic surfactants), antifoaming agents (such as silicone oil, fluorosilicone oil, and fluoroalkyl ether), metal deactivators (such as imidazoline, pyrimidine derivatives, thiadiazole, and benzotriazole), bactericides/preservatives (such as paraoxybenzoic acid esters; benzoic acid, salicylic acid, sorbic acid, dehydroacetic acid, p-toluenesulfonic acid, and salts thereof; and phenoxyethanol), and pH adjusters (such as organic acids such as acetic acid, malic acid, and citric acid, and salts thereof; and phosphoric acid and salts thereof).
  • rust inhibitors such as alkylbenzene
  • the content of each of these various additives is suitably set according to the type and the function of each component, and may be 0.0001% by mass or more, 0.005% by mass or more, 0.01% by mass or more, 0.05% by mass or more, or 0.1% by mass or more, and may be 20% by mass or less, 10% by mass or less, 5% by mass or less, 2% by mass or less, or 1% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
  • the method for producing an aqueous working fluid of one embodiment of the present invention is not particularly limited, and is preferably a method comprising the step of blending the components (A) and (B) and, optionally, the components (C) to (E) and other additives.
  • the aqueous working fluid when producing an aqueous working fluid containing water as the component (C), can be produced by blending water with the components (A) and (B) and, optionally, the components (C) to (E) and other additives, and optionally stirring the mixture.
  • the order of blending the respective components can be suitably set.
  • the surface tension of the aqueous working fluid of one embodiment of the present invention is preferably 45.0 mN/m or less, more preferably 43.0 mN/m or less, more preferably 40.0 mN/m or less, even more preferably 38.0 mN/m or less, yet more preferably 36.0 mN/m or less, and particularly preferably 35.0 mN/m or less, and may be 1.0 mN/m or more, 3.0 mN/m or more, 5.0 mN/m or more, 7.0 mN/m or more, 10.0 mN/m or more, or 15.0 mN/m or more.
  • the surface tension of the aqueous working fluid means a value measured in accordance with the platinum plate method of JIS K 2241.
  • the pH of the aqueous processing liquid of one embodiment of the present invention is preferably 4.0 to 10.0, more preferably 5.0 to 9.0, even more preferably 6.0 to 8.5, and yet more preferably 7.0 to 8.0.
  • the pH of the aqueous working fluid means a value measured at 25°C in accordance with JIS Z 8802.
  • the amount of produced foam after adding 90 mL of the aqueous working fluid of one embodiment of the present invention to a 100 mL graduated cylinder, placing a lid on the graduated cylinder, vigorously shaking the graduated cylinder up and down 10 times, and leaving the graduated cylinder to stand still for 10 seconds is preferably 15 mL or less, more preferably 10 mL or less, even more preferably 9.0 mL or less, yet more preferably 8.0 mL or less, and particularly preferably 7.5 mL or less, and, moreover, is preferably less than 6.0 mL, less than 5.0 mL, less than 4.0 mL, less than 3.5 mL, less than 3.0 mL, less than 2.5 mL, less than 2.0 mL, less than 1.5 mL, or less than 1.0 mL.
  • the amount of foam means a value measured by the method of the Examples described below.
  • the present invention also provides a concentrate for an aqueous working fluid that contains compound (A) represented by the above general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group.
  • the concentrate for an aqueous working fluid of the present invention can be prepared into an aqueous working fluid having a viscosity at 25°C of 4.0 to 20.0 mPa ⁇ s. That is to say, the aqueous working fluid concentrate of the present invention can be prepared into the above-described aqueous working fluid of one embodiment of the present invention by being diluted with water.
  • the ratio of the content of component (B) to 100 parts by mass of component (A) is preferably 0.0001 parts by mass or more, more preferably 0.0003 parts by mass or more, more preferably 0.0005 parts by mass or more, even more preferably 0.0010 parts by mass or more, even more preferably 0.0020 parts by mass or more, yet more preferably 0.0030 parts by mass or more, yet more preferably 0.0040 parts by mass or more, and particularly preferably 0.0050 parts by mass or more, is preferably 1.80 parts by mass or less, more preferably 1.70 parts by mass or less, more preferably 1.50 parts by mass or less, even more preferably 1.40 parts by mass or less, yet more preferably 1.30 parts by mass or less, and particularly preferably 1.25 parts by mass or less, and, moreover, may be 1.00 parts by mass or less, 0.500 parts by mass or less, 0.100 parts by mass or less, 0.050 parts by mass or less, 0.020 parts by mass
  • the concentrate for an aqueous working fluid of one embodiment of the present invention may contain, other than the components (A) and (B), the components (D) and (E) and the above-described other additives.
  • the total content of the components (A) and (B) is preferably 70% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, yet more preferably 95% by mass or more, and particularly preferably 98% by mass or more, and may be 100% by mass or less, 99.99% by mass or less, 99.90% by mass or less, or 99.80% by mass or less based on the total amount (100% by mass) of the concentrate for an aqueous working fluid.
  • the aqueous working fluid of one preferable embodiment of the present invention contains the components (A) and (B) and has a viscosity at 25°C that is regulated to a specific range, thus has various characteristics (such as appropriate viscosity characteristics, small surface tension, and good antifoaming properties) that can increase workability, and thus can be suitably applied to the processing of brittle materials.
  • the aqueous working fluid of one preferable embodiment of the present invention has appropriate viscosity characteristics, small surface tension, and good antifoaming properties, is thus suitable as an aqueous working fluid used when cutting brittle materials by means of a wire saw, and is more suitable as an aqueous working fluid for a fixed abrasive process wherein brittle materials are cut using a wire, to the surface of which abrasive grains are fixed in advance.
  • the aqueous working fluid of one embodiment of the present invention enables highly accurate cutting to be performed even when cutting brittle materials by a fixed abrasive process.
  • Examples of the brittle material as a workpiece include silicon ingot, crystal, carbon, and glass, and silicon ingot is preferable.
  • the diameter of the wire for a fixed-abrasive process may be 0.2 mm or less, 0.12 mm or less, 0.1 mm or less, or 0.08 mm or less, and may be 0.01 mm or more, 0.02 mm or more, 0.03 mm or more, 0.04 mm or more, 0.05 mm or more, or 0.06 mm or more.
  • a wire having a smaller diameter can provide a higher yield when obtaining a product from a brittle material as a workpiece, but impairs properties of a brittle material as a workpiece and tends to result in poor cutting efficiency.
  • the biting of abrasive grains is increased, and cutting efficiency can be increased, thus enabling a wire having a smaller diameter to be used.
  • the aqueous working fluid of one embodiment of the present invention because the surface tension of which is small, can suppress repulsion between wires, prevent wires from being intertwined, and increase workability.
  • the present invention can also provide [1] and [2] below:
  • the cutting step in [1] and [2] is preferably performed by a fixed abrasive process wherein a wire, to the surface of which abrasive grains are fixed in advance, is used to cut a brittle material.
  • a wire to the surface of which abrasive grains are fixed in advance.
  • Specific embodiments of the wire and the brittle material used in wire sawing are as described above.
  • the physical property values of the viscosity at 25°C, surface tension, and pH of the prepared aqueous working fluids were measured by the following methods, and also the antifoaming properties were evaluated by the following method.
  • the brittle material workability of the aqueous working fluids of Example 1 and Comparative Examples 5 and 6 was evaluated by the following method. The results thereof are shown in Tables 1 and 2.
  • water-insoluble polyoxyethylene ether blended did not dissolve in water, and thus it was not possible to measure the above physical property values and evaluate antifoaming properties.
  • the aqueous working fluid of Comparative Example 4 had high viscosity, and thus it was not possible to evaluate antifoaming properties.
  • Viscosity was measured at a rotor speed of 60 rpm using a Brookfield rotary viscometer TVB-10 (trade name, manufactured by Toki Sangyo Co., Ltd.).
  • pH was measured at 25°C in accordance with JIS Z 8802.
  • the amount of foam after adding 90 mL of the prepared aqueous working fluid to a 100 mL graduated cylinder, placing a lid on the graduated cylinder, vigorously shaking the graduated cylinder up and down 10 times, and leaving the graduated cylinder to stand still for 10 seconds was measured by reading the marked line on the graduated cylinder. It can be said that the smaller the amount of foam is, the better the antifoaming properties of the aqueous working fluid are.
  • TTV total thickness variation
  • the aqueous working fluids of Examples 1 to 10 have good antifoaming properties and, excellent brittle material workability, in view of the viscosity characteristics and surface tension.
  • the aqueous working fluid of Example 1 had a TTV value of less than 10 ⁇ m and was confirmed as having excellent brittle material workability.
  • the aqueous working fluids of Comparative Examples 2 to 5 have excessively low or high viscosity, and are thus considered as being problematic in brittle material workability.
  • the aqueous working fluids of Comparative Examples 6 and 7 have high surface tension and, likewise, are considered as being problematic in brittle material workability.
  • the aqueous working fluids of Comparative Examples 5 and 6 had a TTV value of 10 ⁇ m or more, and were confirmed as having poorer brittle material workability than the aqueous working fluid of Example 1.
  • Concerning the aqueous working fluid of Comparative Example 1 the experiment was terminated without measurement and evaluation of physical properties because water-insoluble polyoxyethylene ether blended did not dissolve in water.

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