EP4317384A1 - Aqueous processing liquid - Google Patents
Aqueous processing liquid Download PDFInfo
- Publication number
- EP4317384A1 EP4317384A1 EP22780542.1A EP22780542A EP4317384A1 EP 4317384 A1 EP4317384 A1 EP 4317384A1 EP 22780542 A EP22780542 A EP 22780542A EP 4317384 A1 EP4317384 A1 EP 4317384A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- working fluid
- mass
- aqueous working
- less
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 title claims description 12
- 239000007788 liquid Substances 0.000 title description 2
- 239000012530 fluid Substances 0.000 claims abstract description 179
- 125000002947 alkylene group Chemical group 0.000 claims abstract description 25
- 150000001875 compounds Chemical class 0.000 claims abstract description 25
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims description 49
- -1 acetylene glycol Chemical compound 0.000 claims description 46
- 125000000217 alkyl group Chemical group 0.000 claims description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 24
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 22
- 238000005520 cutting process Methods 0.000 claims description 21
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims description 21
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 18
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 16
- 239000012141 concentrate Substances 0.000 claims description 16
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 12
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 10
- 229920001223 polyethylene glycol Polymers 0.000 claims description 10
- 239000002202 Polyethylene glycol Substances 0.000 claims description 9
- 125000003118 aryl group Chemical group 0.000 claims description 8
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 8
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 claims description 3
- 229920001451 polypropylene glycol Polymers 0.000 claims description 3
- 230000000052 comparative effect Effects 0.000 description 15
- 230000003254 anti-foaming effect Effects 0.000 description 12
- 238000011156 evaluation Methods 0.000 description 12
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 239000000654 additive Substances 0.000 description 10
- 230000001105 regulatory effect Effects 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 8
- 229920006395 saturated elastomer Polymers 0.000 description 8
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 230000000704 physical effect Effects 0.000 description 7
- 229940051841 polyoxyethylene ether Drugs 0.000 description 7
- 229920000056 polyoxyethylene ether Polymers 0.000 description 7
- 239000006260 foam Substances 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 5
- 150000002500 ions Chemical group 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- XZOYHFBNQHPJRQ-UHFFFAOYSA-N 7-methyloctanoic acid Chemical compound CC(C)CCCCCC(O)=O XZOYHFBNQHPJRQ-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 229920000604 Polyethylene Glycol 200 Polymers 0.000 description 3
- 229920002565 Polyethylene Glycol 400 Polymers 0.000 description 3
- 229920002582 Polyethylene Glycol 600 Polymers 0.000 description 3
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 description 2
- XDOFQFKRPWOURC-UHFFFAOYSA-N 16-methylheptadecanoic acid Chemical compound CC(C)CCCCCCCCCCCCCCC(O)=O XDOFQFKRPWOURC-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- SXJBHJCKWQIWHA-UHFFFAOYSA-N 2-ethyl-2,3,3-trimethylbutanoic acid Chemical compound CCC(C)(C(O)=O)C(C)(C)C SXJBHJCKWQIWHA-UHFFFAOYSA-N 0.000 description 2
- VCIMZVUJVMTQMG-UHFFFAOYSA-N 7-methyloctanoic acid 3,5,5-trimethylhexanoic acid Chemical compound CC(C)CCCCCC(O)=O.OC(=O)CC(C)CC(C)(C)C VCIMZVUJVMTQMG-UHFFFAOYSA-N 0.000 description 2
- DPUOLQHDNGRHBS-UHFFFAOYSA-N Brassidinsaeure Natural products CCCCCCCCC=CCCCCCCCCCCCC(O)=O DPUOLQHDNGRHBS-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 150000003973 alkyl amines Chemical class 0.000 description 2
- MBMBGCFOFBJSGT-KUBAVDMBSA-N all-cis-docosa-4,7,10,13,16,19-hexaenoic acid Chemical compound CC\C=C/C\C=C/C\C=C/C\C=C/C\C=C/C\C=C/CCC(O)=O MBMBGCFOFBJSGT-KUBAVDMBSA-N 0.000 description 2
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 description 2
- YZXBAPSDXZZRGB-DOFZRALJSA-N arachidonic acid Chemical compound CCCCC\C=C/C\C=C/C\C=C/C\C=C/CCCC(O)=O YZXBAPSDXZZRGB-DOFZRALJSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- GHVNFZFCNZKVNT-UHFFFAOYSA-N decanoic acid Chemical compound CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 2
- 229940043276 diisopropanolamine Drugs 0.000 description 2
- UKMSUNONTOPOIO-UHFFFAOYSA-N docosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCC(O)=O UKMSUNONTOPOIO-UHFFFAOYSA-N 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-MDZDMXLPSA-N elaidic acid Chemical compound CCCCCCCC\C=C\CCCCCCCC(O)=O ZQPPMHVWECSIRJ-MDZDMXLPSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- LIWAQLJGPBVORC-UHFFFAOYSA-N ethylmethylamine Chemical compound CCNC LIWAQLJGPBVORC-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- KEMQGTRYUADPNZ-UHFFFAOYSA-N heptadecanoic acid Chemical compound CCCCCCCCCCCCCCCCC(O)=O KEMQGTRYUADPNZ-UHFFFAOYSA-N 0.000 description 2
- MNWFXJYAOYHMED-UHFFFAOYSA-N heptanoic acid Chemical compound CCCCCCC(O)=O MNWFXJYAOYHMED-UHFFFAOYSA-N 0.000 description 2
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- YYVJAABUJYRQJO-UHFFFAOYSA-N isomyristic acid Chemical compound CC(C)CCCCCCCCCCC(O)=O YYVJAABUJYRQJO-UHFFFAOYSA-N 0.000 description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 2
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 2
- GVWISOJSERXQBM-UHFFFAOYSA-N n-methylpropan-1-amine Chemical compound CCCNC GVWISOJSERXQBM-UHFFFAOYSA-N 0.000 description 2
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 description 2
- FBUKVWPVBMHYJY-UHFFFAOYSA-N nonanoic acid Chemical compound CCCCCCCCC(O)=O FBUKVWPVBMHYJY-UHFFFAOYSA-N 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- JLFNLZLINWHATN-UHFFFAOYSA-N pentaethylene glycol Chemical compound OCCOCCOCCOCCOCCO JLFNLZLINWHATN-UHFFFAOYSA-N 0.000 description 2
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 2
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 description 2
- HQHCYKULIHKCEB-UHFFFAOYSA-N tetradecanedioic acid Chemical compound OC(=O)CCCCCCCCCCCCC(O)=O HQHCYKULIHKCEB-UHFFFAOYSA-N 0.000 description 2
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 150000003628 tricarboxylic acids Chemical class 0.000 description 2
- SZHOJFHSIKHZHA-UHFFFAOYSA-N tridecanoic acid Chemical compound CCCCCCCCCCCCC(O)=O SZHOJFHSIKHZHA-UHFFFAOYSA-N 0.000 description 2
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- LWBHHRRTOZQPDM-UHFFFAOYSA-N undecanedioic acid Chemical compound OC(=O)CCCCCCCCCC(O)=O LWBHHRRTOZQPDM-UHFFFAOYSA-N 0.000 description 2
- ZDPHROOEEOARMN-UHFFFAOYSA-N undecanoic acid Chemical compound CCCCCCCCCCC(O)=O ZDPHROOEEOARMN-UHFFFAOYSA-N 0.000 description 2
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 2
- GWHCXVQVJPWHRF-KTKRTIGZSA-N (15Z)-tetracosenoic acid Chemical compound CCCCCCCC\C=C/CCCCCCCCCCCCCC(O)=O GWHCXVQVJPWHRF-KTKRTIGZSA-N 0.000 description 1
- OBETXYAYXDNJHR-SSDOTTSWSA-M (2r)-2-ethylhexanoate Chemical compound CCCC[C@@H](CC)C([O-])=O OBETXYAYXDNJHR-SSDOTTSWSA-M 0.000 description 1
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 1
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- OTJFQRMIRKXXRS-UHFFFAOYSA-N (hydroxymethylamino)methanol Chemical compound OCNCO OTJFQRMIRKXXRS-UHFFFAOYSA-N 0.000 description 1
- CEGRHPCDLKAHJD-UHFFFAOYSA-N 1,1,1-propanetricarboxylic acid Chemical compound CCC(C(O)=O)(C(O)=O)C(O)=O CEGRHPCDLKAHJD-UHFFFAOYSA-N 0.000 description 1
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical group C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 1
- BFIAIMMAHAIVFT-UHFFFAOYSA-N 1-[bis(2-hydroxybutyl)amino]butan-2-ol Chemical compound CCC(O)CN(CC(O)CC)CC(O)CC BFIAIMMAHAIVFT-UHFFFAOYSA-N 0.000 description 1
- KODLUXHSIZOKTG-UHFFFAOYSA-N 1-aminobutan-2-ol Chemical compound CCC(O)CN KODLUXHSIZOKTG-UHFFFAOYSA-N 0.000 description 1
- FRPZMMHWLSIFAZ-UHFFFAOYSA-N 10-undecenoic acid Chemical compound OC(=O)CCCCCCCCC=C FRPZMMHWLSIFAZ-UHFFFAOYSA-N 0.000 description 1
- QFGCFKJIPBRJGM-UHFFFAOYSA-N 12-[(2-methylpropan-2-yl)oxy]-12-oxododecanoic acid Chemical compound CC(C)(C)OC(=O)CCCCCCCCCCC(O)=O QFGCFKJIPBRJGM-UHFFFAOYSA-N 0.000 description 1
- ZONJATNKKGGVSU-UHFFFAOYSA-N 14-methylpentadecanoic acid Chemical compound CC(C)CCCCCCCCCCCCC(O)=O ZONJATNKKGGVSU-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- NPMHELYJLOUPIZ-UHFFFAOYSA-N 2,2,3,4-tetramethylpentanoic acid Chemical compound CC(C)C(C)C(C)(C)C(O)=O NPMHELYJLOUPIZ-UHFFFAOYSA-N 0.000 description 1
- VUAXHMVRKOTJKP-UHFFFAOYSA-N 2,2-dimethylbutyric acid Chemical compound CCC(C)(C)C(O)=O VUAXHMVRKOTJKP-UHFFFAOYSA-N 0.000 description 1
- IKNDGHRNXGEHTO-UHFFFAOYSA-N 2,2-dimethyloctanoic acid Chemical compound CCCCCCC(C)(C)C(O)=O IKNDGHRNXGEHTO-UHFFFAOYSA-N 0.000 description 1
- OWEMTCOXFULTNW-UHFFFAOYSA-N 2,3-dimethyl-2-propan-2-ylbutanoic acid Chemical compound CC(C)C(C)(C(C)C)C(O)=O OWEMTCOXFULTNW-UHFFFAOYSA-N 0.000 description 1
- NWPCFCBFUXXJIE-UHFFFAOYSA-N 2-(hydroxymethylamino)ethanol Chemical compound OCCNCO NWPCFCBFUXXJIE-UHFFFAOYSA-N 0.000 description 1
- GVNHOISKXMSMPX-UHFFFAOYSA-N 2-[butyl(2-hydroxyethyl)amino]ethanol Chemical compound CCCCN(CCO)CCO GVNHOISKXMSMPX-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- QFWGJUQOWNHFKT-UHFFFAOYSA-N 2-tert-butyl-2,5,5-trimethylhexanoic acid Chemical compound CC(C)(C)CCC(C)(C(O)=O)C(C)(C)C QFWGJUQOWNHFKT-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- 235000021357 Behenic acid Nutrition 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- FTLXOZDSNKVPQJ-UHFFFAOYSA-N CC(C(C(=O)O)(C(=O)O)C(=O)O)CCCCCCCC Chemical compound CC(C(C(=O)O)(C(=O)O)C(=O)O)CCCCCCCC FTLXOZDSNKVPQJ-UHFFFAOYSA-N 0.000 description 1
- 239000005632 Capric acid (CAS 334-48-5) Substances 0.000 description 1
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004287 Dehydroacetic acid Substances 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- URXZXNYJPAJJOQ-UHFFFAOYSA-N Erucic acid Natural products CCCCCCC=CCCCCCCCCCCCC(O)=O URXZXNYJPAJJOQ-UHFFFAOYSA-N 0.000 description 1
- OPGOLNDOMSBSCW-CLNHMMGSSA-N Fursultiamine hydrochloride Chemical compound Cl.C1CCOC1CSSC(\CCO)=C(/C)N(C=O)CC1=CN=C(C)N=C1N OPGOLNDOMSBSCW-CLNHMMGSSA-N 0.000 description 1
- 239000005639 Lauric acid Substances 0.000 description 1
- XJXROGWVRIJYMO-SJDLZYGOSA-N Nervonic acid Natural products O=C(O)[C@@H](/C=C/CCCCCCCC)CCCCCCCCCCCC XJXROGWVRIJYMO-SJDLZYGOSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- 235000021314 Palmitic acid Nutrition 0.000 description 1
- 239000005643 Pelargonic acid Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- ITBPIKUGMIZTJR-UHFFFAOYSA-N [bis(hydroxymethyl)amino]methanol Chemical compound OCN(CO)CO ITBPIKUGMIZTJR-UHFFFAOYSA-N 0.000 description 1
- GTZCVFVGUGFEME-UHFFFAOYSA-N aconitic acid Chemical compound OC(=O)CC(C(O)=O)=CC(O)=O GTZCVFVGUGFEME-UHFFFAOYSA-N 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- JAZBEHYOTPTENJ-JLNKQSITSA-N all-cis-5,8,11,14,17-icosapentaenoic acid Chemical compound CC\C=C/C\C=C/C\C=C/C\C=C/C\C=C/CCCC(O)=O JAZBEHYOTPTENJ-JLNKQSITSA-N 0.000 description 1
- ZRYCZAWRXHAAPZ-UHFFFAOYSA-N alpha,alpha-dimethyl valeric acid Chemical compound CCCC(C)(C)C(O)=O ZRYCZAWRXHAAPZ-UHFFFAOYSA-N 0.000 description 1
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 235000020661 alpha-linolenic acid Nutrition 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 125000002178 anthracenyl group Chemical group C1(=CC=CC2=CC3=CC=CC=C3C=C12)* 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 235000021342 arachidonic acid Nutrition 0.000 description 1
- 229940114079 arachidonic acid Drugs 0.000 description 1
- 239000003899 bactericide agent Substances 0.000 description 1
- 229940116226 behenic acid Drugs 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 229960004365 benzoic acid Drugs 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 1
- ZNFNDZCXTPWRLQ-UHFFFAOYSA-N butane-1,1,1-tricarboxylic acid Chemical compound CCCC(C(O)=O)(C(O)=O)C(O)=O ZNFNDZCXTPWRLQ-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- BELZJFWUNQWBES-UHFFFAOYSA-N caldopentamine Chemical compound NCCCNCCCNCCCNCCCN BELZJFWUNQWBES-UHFFFAOYSA-N 0.000 description 1
- KHAVLLBUVKBTBG-UHFFFAOYSA-N caproleic acid Natural products OC(=O)CCCCCCCC=C KHAVLLBUVKBTBG-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- GWHCXVQVJPWHRF-UHFFFAOYSA-N cis-tetracosenoic acid Natural products CCCCCCCCC=CCCCCCCCCCCCCCC(O)=O GWHCXVQVJPWHRF-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 235000019258 dehydroacetic acid Nutrition 0.000 description 1
- JEQRBTDTEKWZBW-UHFFFAOYSA-N dehydroacetic acid Chemical compound CC(=O)C1=C(O)OC(C)=CC1=O JEQRBTDTEKWZBW-UHFFFAOYSA-N 0.000 description 1
- 229940061632 dehydroacetic acid Drugs 0.000 description 1
- PGRHXDWITVMQBC-UHFFFAOYSA-N dehydroacetic acid Natural products CC(=O)C1C(=O)OC(C)=CC1=O PGRHXDWITVMQBC-UHFFFAOYSA-N 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- WDNQRCVBPNOTNV-UHFFFAOYSA-N dinonylnaphthylsulfonic acid Chemical compound C1=CC=C2C(S(O)(=O)=O)=C(CCCCCCCCC)C(CCCCCCCCC)=CC2=C1 WDNQRCVBPNOTNV-UHFFFAOYSA-N 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 235000020669 docosahexaenoic acid Nutrition 0.000 description 1
- 229940090949 docosahexaenoic acid Drugs 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 235000020673 eicosapentaenoic acid Nutrition 0.000 description 1
- 229960005135 eicosapentaenoic acid Drugs 0.000 description 1
- JAZBEHYOTPTENJ-UHFFFAOYSA-N eicosapentaenoic acid Natural products CCC=CCC=CCC=CCC=CCC=CCCCC(O)=O JAZBEHYOTPTENJ-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- DPUOLQHDNGRHBS-KTKRTIGZSA-N erucic acid Chemical compound CCCCCCCC\C=C/CCCCCCCCCCCC(O)=O DPUOLQHDNGRHBS-KTKRTIGZSA-N 0.000 description 1
- BEFDCLMNVWHSGT-UHFFFAOYSA-N ethenylcyclopentane Chemical compound C=CC1CCCC1 BEFDCLMNVWHSGT-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 1
- VZCCETWTMQHEPK-UHFFFAOYSA-N gamma-Linolensaeure Natural products CCCCCC=CCC=CCC=CCCCCC(O)=O VZCCETWTMQHEPK-UHFFFAOYSA-N 0.000 description 1
- VZCCETWTMQHEPK-QNEBEIHSSA-N gamma-linolenic acid Chemical compound CCCCC\C=C/C\C=C/C\C=C/CCCCC(O)=O VZCCETWTMQHEPK-QNEBEIHSSA-N 0.000 description 1
- 235000020664 gamma-linolenic acid Nutrition 0.000 description 1
- 229960002733 gamolenic acid Drugs 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- SEIUOYFQDIJJEO-UHFFFAOYSA-N hexane-1,1,1-tricarboxylic acid Chemical compound CCCCCC(C(O)=O)(C(O)=O)C(O)=O SEIUOYFQDIJJEO-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- VKOBVWXKNCXXDE-UHFFFAOYSA-N icosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCC(O)=O VKOBVWXKNCXXDE-UHFFFAOYSA-N 0.000 description 1
- MTNDZQHUAFNZQY-UHFFFAOYSA-N imidazoline Chemical compound C1CN=CN1 MTNDZQHUAFNZQY-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- YAQXGBBDJYBXKL-UHFFFAOYSA-N iron(2+);1,10-phenanthroline;dicyanide Chemical compound [Fe+2].N#[C-].N#[C-].C1=CN=C2C3=NC=CC=C3C=CC2=C1.C1=CN=C2C3=NC=CC=C3C=CC2=C1 YAQXGBBDJYBXKL-UHFFFAOYSA-N 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 125000000654 isopropylidene group Chemical group C(C)(C)=* 0.000 description 1
- 229960004488 linolenic acid Drugs 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 125000002960 margaryl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000006078 metal deactivator Substances 0.000 description 1
- 125000006178 methyl benzyl group Chemical group 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- LSHROXHEILXKHM-UHFFFAOYSA-N n'-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCN LSHROXHEILXKHM-UHFFFAOYSA-N 0.000 description 1
- AQGNVWRYTKPRMR-UHFFFAOYSA-N n'-[2-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCNCCN AQGNVWRYTKPRMR-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- XCVNDBIXFPGMIW-UHFFFAOYSA-N n-ethylpropan-1-amine Chemical compound CCCNCC XCVNDBIXFPGMIW-UHFFFAOYSA-N 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- MAVABZCZTPTYNQ-UHFFFAOYSA-N octane-1,1,1-tricarboxylic acid Chemical compound CCCCCCCC(C(O)=O)(C(O)=O)C(O)=O MAVABZCZTPTYNQ-UHFFFAOYSA-N 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- DPBLXKKOBLCELK-UHFFFAOYSA-N pentan-1-amine Chemical compound CCCCCN DPBLXKKOBLCELK-UHFFFAOYSA-N 0.000 description 1
- IKIZWKVZMQYKLC-UHFFFAOYSA-N pentane-1,1,1-tricarboxylic acid Chemical compound CCCCC(C(O)=O)(C(O)=O)C(O)=O IKIZWKVZMQYKLC-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 229960005323 phenoxyethanol Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- IUGYQRQAERSCNH-UHFFFAOYSA-N pivalic acid Chemical compound CC(C)(C)C(O)=O IUGYQRQAERSCNH-UHFFFAOYSA-N 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 1
- 229940083082 pyrimidine derivative acting on arteriolar smooth muscle Drugs 0.000 description 1
- 150000003230 pyrimidines Chemical class 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000004334 sorbic acid Substances 0.000 description 1
- 235000010199 sorbic acid Nutrition 0.000 description 1
- 229940075582 sorbic acid Drugs 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- JIWBIWFOSCKQMA-UHFFFAOYSA-N stearidonic acid Natural products CCC=CCC=CCC=CCC=CCCCCC(O)=O JIWBIWFOSCKQMA-UHFFFAOYSA-N 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- VLLMWSRANPNYQX-UHFFFAOYSA-N thiadiazole Chemical compound C1=CSN=N1.C1=CSN=N1 VLLMWSRANPNYQX-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- DXNCZXXFRKPEPY-UHFFFAOYSA-N tridecanedioic acid Chemical compound OC(=O)CCCCCCCCCCCC(O)=O DXNCZXXFRKPEPY-UHFFFAOYSA-N 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- FJOMYOIAMDJAAY-UHFFFAOYSA-N undecane-1,1,1-tricarboxylic acid Chemical compound CCCCCCCCCCC(C(O)=O)(C(O)=O)C(O)=O FJOMYOIAMDJAAY-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229960002703 undecylenic acid Drugs 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/18—Ethers, e.g. epoxides
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
- C10M107/20—Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
- C10M107/30—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
- C10M107/34—Polyoxyalkylenes
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
- C10M2207/126—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids monocarboxylic
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/105—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
- C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
- C10N2020/01—Physico-chemical properties
- C10N2020/04—Molecular weight; Molecular weight distribution
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/18—Anti-foaming property
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2070/00—Specific manufacturing methods for lubricant compositions
- C10N2070/02—Concentrating of additives
Definitions
- the present invention relates to an aqueous working fluid, a concentrate for the aqueous working fluid, the use of the aqueous working fluid, and a method for processing a brittle material using the aqueous working fluid.
- silicon ingot which is a brittle material, needs to be cut, and wire sawing is generally used from the viewpoint of cutting accuracy and productivity.
- wire sawing is generally used from the viewpoint of cutting accuracy and productivity.
- a loose abrasive process involving cutting silicon ingot with abrasive grains being dispersed in a working fluid
- a fixed abrasive process involving cutting silicon ingot with abrasive grains being fixed to the wire surface in advance.
- working fluids are proposed that can be suitably used in the respective abrasive processes.
- Patent Literature 1 discloses an invention relating to a water-soluble working fluid composition for fixed abrasive wire sawing used in the cutting of a workpiece other than rare-earth magnets, in which (A) the aqueous working fluid composition for fixed-abrasive wire sawing comprises glycol.
- the present invention provides an aqueous working fluid that has a specific structure, contains an ether compound having a specific molecular weight and water-insoluble polyoxyalkylene ether, and is regulated to a predetermined viscosity.
- the present invention provides, for example, the following embodiments [1] to [15]:
- the aqueous working fluid of one suitable embodiment of the present invention has various characteristics (such as appropriate viscosity characteristics, small surface tension, good antifoaming properties) that can increase workability and, therefore, can be an aqueous working fluid suitable for processing brittle materials.
- the upper limits and the lower limits can be suitably combined.
- a numerical range is described as being “preferably 30 to 100, and more preferably 40 to 80”
- the range of "30 to 80” and the range of "40 to 100” are also included in the numerical range described herein.
- a numerical range is described as being “preferably 30 or more and more preferably 40 or more, and preferably 100 or less and more preferably 80 or less”
- the range of "30 to 80" and the range of "40 to 100" are also included in the numerical range described herein.
- a numerical range from a lower limit to an upper limit can be specified by suitably selecting from, and appropriately combining, the respective options.
- the aqueous working fluid of the present invention contains compound (A) represented by the above general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group, and has a viscosity at 25°C of 4.0 to 26.0 mPa ⁇ s.
- the aqueous working fluid of the present invention is a solution that is directly used in the processing of a workpiece without being diluted.
- the concentrate for an aqueous working fluid of the present invention as will be described below is a solution that can be diluted with water to be formed into an aqueous working fluid having the above-described viscosity, and is distinguished from the aqueous working fluid of the present invention in that the concentrate for an aqueous working fluid is not a solution directly used in the processing of a workpiece.
- the aqueous working fluid of one embodiment of the present invention is prepared as an aqueous working fluid having various characteristics that can increase workability, or, in particular, small surface tension.
- the aqueous working fluid of the present invention can be an aqueous working fluid having excellent brittle material workability.
- the viscosity at 25°C of the aqueous working fluid of one embodiment of the present invention is 4.0 mPa ⁇ s or more, preferably 4.5 mPa ⁇ s or more, more preferably 5.0 mPa ⁇ s or more, more preferably 5.5 mPa ⁇ s or more, more preferably 6.0 mPa ⁇ s or more, even more preferably 6.5 mPa ⁇ s or more, even more preferably 7.0 mPa ⁇ s or more, even more preferably 7.5 mPa ⁇ s or more, yet more preferably 8.0 mPa ⁇ s or more, yet more preferably 8.5 mPa ⁇ s or more, and particularly preferably 9.0 mPa ⁇ s or more, and, moreover, may be 9.5 mPa ⁇ s or more, 10.0 mPa ⁇ s or more, 10.5 mPa ⁇ s or more, 11.0 mPa-s or more, 11.5
- the viscosity at 25°C of the aqueous working fluid can be measured by the method described in the Examples.
- the aqueous working fluid of one embodiment of the present invention may further contain (C) water from the viewpoint of providing an aqueous working fluid regulated to the above-described viscosity range.
- the aqueous working fluid of one embodiment of the present invention may contain one or more selected from (D) carboxylic acid and (E) an amine compound.
- the aqueous working fluid of one embodiment of the present invention may contain, as necessary, other additives other than the components (A) to (E) as long as the effects of the present invention are not impaired.
- the total content of the components (A) and (B) is preferably more than 15% by mass, more preferably more than 20% by mass, more preferably more than 25% by mass, even more preferably more than 30% by mass, even more preferably more than 35% by mass, yet more preferably more than 40% by mass, particularly preferably more than 45% by mass, and, moreover, may be more than 50% by mass, more than 55% by mass, more than 60% by mass, more than 65% by mass, or more than 70% by mass, and may be 100% by mass or less, 98% by mass or less, 96% by mass or less, 95% by mass or less, 93% by mass or less, or 90% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- the total content of the components (A) and (B) is preferably 70% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, yet more preferably 95% by mass or more, and particularly preferably 98% by mass or more, and may be 100% by mass or less, 99. 99% by mass or less, 99.90% by mass or less, or 99.80% by mass or less based on the total amount (100% by mass) of the components contained in the aqueous working fluid excluding water (C) .
- the total content of the components (A), (B), and (C) is preferably 20% by mass or more, more preferably 30% by mass or more, more preferably 40% by mass or more, even more preferably 50% by mass or more, even more preferably 60% by mass or more, yet more preferably 70% by mass or more, and particularly preferably 75% by mass or more, and, moreover, may be 80% by mass or more, 85% by mass or more, 90% by mass or more, or 95% by mass or more, and may be 100% by mass or less, 99.999% by mass or less, 99.99% by mass or less, or 99.98% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- the aqueous working fluid of the present invention contains a compound represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less as component (A).
- Containing component (A) the aqueous working fluid can have excellent brittle material workability.
- One component (A) may be used singly, or two or more may be used in combination.
- A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; and m is an integer of 1 or more, and preferably an integer of 2 or more.
- alkylene group examples include alkylene groups having 2 carbon atoms such as an ethylene group (-CH 2 CH 2 -) and an ethylidene group (-CH(CH 3 )-); alkylene groups having 3 carbon atoms such as a trimethylene group (-CH 2 CH 2 CH 2 -), a propylene group (-CH(CH 3 )CH 2 -), a propylidene group (-CHCH 2 CH 3 -), and an isopropylidene group (-C(CH 3 ) 2 -); and alkylene groups having 4 carbon atoms such as a tetramethylene group (-CH 2 CH 2 CH 2 CH 2 -), a 1-methyltrimethylene group (-CH(CH 3 )CH 2 CH 2 -), a 2-methyltrimethylene group (-CH 2 CH(CH 3 )CH 2 -), and a butylene group (-C(CH 3 ) 2 CH 2 -).
- the alkylene group may be
- component (A) preferably contains one or more selected from diethylene glycol, dipropylene glycol, polyethylene glycol, and polypropylene glycol, and more preferably contains one or more selected from diethylene glycol and polyethylene glycol.
- the total content of diethylene glycol and polyethylene glycol is preferably 30 to 100% by mass, more preferably 40 to 100% by mass, more preferably 50 to 100% by mass, more preferably 60 to 100% by mass, even more preferably 70 to 100% by mass, even more preferably 80 to 100% by mass, and yet more preferably 90 to 100% by mass, and particularly preferably 95 to 100% by mass based on the total amount (100% by mass) of component (A) contained in the aqueous working fluid.
- the weight average molecular weight of component (A) is 12,000 or less, preferably 10,000 or less, more preferably 8,000 or less, more preferably 6,500 or less, even more preferably 5,000 or less, even more preferably 4,000 or less, yet more preferably 3,000 or less, yet more preferably 2,000 or less, and particularly preferably 1,000 or less, and, moreover, may be 900 or less, 800 or less, 700 or less, 600 or less, 500 or less, 450 or less, 400 or less, or 350 or less.
- the lower limit of the weight average molecular weight of component (A) is not particularly limited, and the minimum molecular weight of component (A) should be equal to or greater than the molecular weight of ethylene glycol, i.e., 62, and, moreover, may be 65 or more, 70 or more, 80 or more, 90 or more, or 100 or more.
- the weight average molecular weight means a value measured by the method described in the Examples.
- the content of component (A) is preferably 15.0% by mass or more, more preferably 20% by mass or more, more preferably 25% by mass or more, even more preferably 30% by mass or more, even more preferably 35% by mass or more, yet more preferably 40% by mass or more, and particularly preferably 45% by mass or more, and, moreover, may be 50% by mass or more, 55% by mass or more, 60% by mass or more, 65% by mass or more, or 70% by mass or more, and is preferably 95.0% by mass or less, more preferably 92.0% by mass or less, more preferably 90.0% by mass or less, even more preferably 87.0% by mass or less, even more preferably 85.0% by mass or less, yet more preferably 83.0% by mass or less, and particularly preferably 80.0% by mass or less based on
- the aqueous working fluid of the present invention contains water-insoluble compound (B) having a polyoxyalkylene group as component (B).
- Containing component (B) enables the surface tension of the aqueous working fluid to be small, and an aqueous working fluid having excellent brittle material workability to be provided.
- One component (B) may be used singly, or two or more may be used in combination.
- the compound of interest can be determined as being a water-insoluble compound when 0.1 g of the compound of interest is added to 99.9 g of ion exchanged water at 25°C, the mixture is stirred and left to stand still at 25°C for 24 hours, and residues of the compound of interest are visually confirmed.
- the HLB value of component (B) used in one embodiment of the present invention is preferably 10.0 or less, more preferably 9.0 or less, and even more preferably 8.0 or less, and, moreover, may be 7.0 or less, 6.0 or less, 5.0 or less, or 4.0 or less, and may be more than 0, 1.0 or more, or 2.0 or more.
- the HLB value means a value calculated by Griffin's method.
- component (B) preferably contains one or more selected from water-insoluble polyoxyalkylene ether (B1) represented by the following general formula (b-1) and an alkylene oxide adduct of water-insoluble acetylene glycol (B2) represented by the following general formula (b-2):
- a 1 to A 3 are each independently an alkylene group having 2 to 4 carbon atoms;
- R a to R e are each independently a hydrogen atom, an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group, and is preferably a hydrogen atom or an alkyl group;
- R 1 to R 3 are each independently an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group, and is preferably an alkyl group;
- n, p, and q are each independently an integer of 1 or more.
- Examples of the alkylene group having 2 to 4 carbon atoms that can be selected as A 1 to A 3 include those identical to the above-described alkylene groups having 2 to 4 carbon atoms that can be selected as A in the above general formula (a-1), an alkylene group having 2 to 3 carbon atoms is preferable, an ethylene group, a trimethylene group, or a propylene group is more preferable, and an ethylene group is even more preferable.
- the alkylene group may be a linear alkylene group or may be a branched alkylene group.
- Examples of the alkyl group that can be selected as R a to R e and R 1 to R 3 include a methyl group, an ethyl group, a propyl group (a n-propyl group, an isopropyl group), a butyl group (a n-butyl group, a s-butyl group, a t-butyl group, an isobutyl group), a pentyl group, a hexyl group, a heptyl group, an octyl group, a 2-ethylhexyl group, a nonyl group, a 1,1-dimethylheptyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl
- Examples of the cycloalkyl group optionally having an alkyl group, which can be selected as R a to R e and R 1 to R 3 , include a cyclopentyl group, a cyclohexyl group, a dimethylcyclohexyl group, an ethylcyclohexyl group, a propylcyclohexyl group, a butylcyclohexyl group, and a heptylcyclohexyl group.
- the number of ring-forming carbon atoms in the cycloalkyl group is preferably 5 to 18, more preferably 5 to 12, and even more preferably 6 to 10.
- Examples of the aryl group optionally having an alkyl group include a phenyl group, a naphthyl group, an anthracenyl group, a biphenyl group, a terphenyl group, a tolyl group, a dimethylphenyl group, a butylphenyl group, a nonylphenyl group, a methylbenzyl group, and a dimethylnaphthyl group.
- the number of ring-forming carbon atoms in the aryl group is preferably 6 to 24, more preferably 6 to 18, and even more preferably 6 to 12.
- Component (B1) used in one embodiment of the present invention is preferably water-insoluble polyoxyalkylene ether of the above general formula (b-1) wherein A 1 is an ethylene group, R a is a hydrogen atom, and R 1 is an alkyl group having 1 to 20 (preferably 1 to 10) carbon atoms.
- Component (B2) used in one embodiment of the present invention is preferably an ethylene oxide adduct of water-insoluble acetylene glycol of the above general formula (b-2) wherein A 2 and A 3 are ethylene groups, R b and R c are hydrogen atoms, R d and R e are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms (preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3), and R 2 and R 3 are each independently an alkyl group (preferably a branched alkyl group) having 1 to 20 carbon atoms (preferably 2 to 16, more preferably 3 to 10, even more preferably 4 to 8, and yet more preferably 4 to 6).
- the content of component (B) is preferably 0.0001% by mass or more, more preferably 0.0003% by mass or more, more preferably 0.0005% by mass or more, even more preferably 0.0010% by mass or more, even more preferably 0.0020% by mass or more, yet more preferably 0.0030% by mass or more, and particularly preferably 0.0040% by mass or more, is preferably 1.0% by mass or less, more preferably 0.80% by mass or less, more preferably 0.50% by mass or less, even more preferably 0.30% by mass or less, even more preferably 0.10% by mass or less, yet more preferably 0.080% by mass or less, and particularly preferably 0.050% by mass or less, and, moreover, may be 0.030% by mass or less, 0.020% by mass or less, 0.010% by mass or less, 0.0090% by mass or
- the ratio of the content of component (B) to 100 parts by mass of component (A) is preferably 0.0001 parts by mass or more, more preferably 0.0003 parts by mass or more, more preferably 0.0005 parts by mass or more, even more preferably 0.0010 parts by mass or more, even more preferably 0.0020 parts by mass or more, yet more preferably 0.0030 parts by mass or more, yet more preferably 0.0040 parts by mass or more, and particularly preferably 0.0050 parts by mass or more, is preferably 1.80 parts by mass or less, more preferably 1.70 parts by mass or less, more preferably 1.50 parts by mass or less, even more preferably 1.40 parts by mass or less, yet more preferably 1.30 parts by mass or less, and particularly preferably 1.25 parts by mass or less, and, more
- the aqueous working fluid of one embodiment of the present invention may further contain water as the component (C).
- examples of water used as the component (C) include ultrapure water, pure water, distilled water, ion exchanged water, tap water, and water for industrial use.
- the content of the component (C) is preferably 5.0% by mass or more, more preferably 7.0% by mass or more, more preferably 10.0% by mass or more, even more preferably 12.0% by mass or more, even more preferably 15.0% by mass or more, yet more preferably 17.0% by mass or more, and particularly preferably 20.0% by mass or more, is preferably 70.0% by mass or less, more preferably 67.0% by mass or less, more preferably 65.0% by mass or less, even more preferably 63.0% by mass or less, even more preferably 60.0% by mass or less, yet more preferably 57.0% by mass or less, and particularly preferably 55.0% by mass or less, and, moreover, may be 50.0% by mass or less, 45.0% by mass or less, 40.0% by mass or less, 35.0% by mass or less, 30.0% by mass or less, or 27.0% by mass or less based on the total amount (100% by mass) of the aqueous
- the aqueous working fluid of one embodiment of the present invention may further contain carboxylic acid as the component (D).
- One component (D) may be used singly, and two or more may be used in combination.
- carboxylic acid used as the component (D) in one embodiment of the present invention include saturated monocarboxylic acid, unsaturated monocarboxylic acid, dicarboxylic acid, and tricarboxylic acid.
- carboxylic acid used as the component (D) in one embodiment of the present invention is preferably saturated monocarboxylic acid or unsaturated monocarboxylic acid, more preferably saturated monocarboxylic acid, and even more preferably branched saturated monocarboxylic acid.
- saturated monocarboxylic acid examples include linear saturated monocarboxylic acid such as valeric acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, undecanoic acid, lauric acid, tridecanoic acid, myristic acid, pentadecanoic acid, palmitic acid, heptadecanoic acid, stearic acid, nonadecanic acid, arachic acid, and behenic acid; and branched saturated monocarboxylic acid such as isomyristic acid, isopalmitic acid, isostearic acid, 2,2-dimethylpropanoic acid, 2,2-dimethylbutanoic acid, 2,2-dimethylpentanoic acid, 2,2-dimethyloctanoic acid, 2-ethyl-2,3,3-trimethylbutanoic acid, 2,2,3,4-tetramethylpentanoic acid, 2,5,5-trimethyl-2-t-butylhexa
- unsaturated monocarboxylic acid examples include undecylenic acid, oleic acid, elaidic acid, erucic acid, nervonic acid, linoleic acid, ⁇ -linolenic acid, arachidonic acid, ⁇ -linolenic acid, stearidonic acid, eicosapentaenoic acid, and docosahexaenoic acid.
- dicarboxylic acid examples include adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, undecanedioic acid, dodecanedioic acid, brassylic acid, and tetradecanedioic acid.
- tricarboxylic acid examples include propanetricarboxylic acid, propan-1-ene-1,2,3-tricarboxylic acid, butanetricarboxylic acid, pentanetricarboxylic acid, hexanetricarboxylic acid, octanetricarboxylic acid, nonanetricarboxylic acid, decanetricarboxylic acid, undecanetricarboxylic acid, and monomethyldecanetricarboxylic acid.
- the content of the component (D) is preferably 0.001% by mass or more, more preferably 0.003% by mass or more, even more preferably 0.005% by mass or more, yet more preferably 0.007% by mass or more, and particularly preferably 0.009% by mass or more, and is preferably 3.0% by mass or less, more preferably 2.0% by mass or less, more preferably 1.0% by mass or less, even more preferably 0.50% by mass or less, yet more preferably 0.20% by mass or less, and particularly preferably 0.10% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- the aqueous working fluid of one embodiment of the present invention may further contain an amine compound as the component (E).
- One component (E) may be used singly, or two or more may be used in combination.
- Examples of the amine compound used as the component (E) in one embodiment of the present invention include alkylamine, alkanolamine, and polyalkylenepolyamine.
- alkanolamine is preferable as the amine compound used as the component (E) in one embodiment of the present invention, and alkanolamine having 2 to 6 carbon atoms is more preferable.
- alkylamine examples include primary aliphatic alkylamine such as monomethylamine, monoethylamine, monopropylamine, monobutylamine, and monopentylamine; and secondary aliphatic alkylamine such as dimethylamine, methylethylamine, diethylamine, methylpropylamine, and ethylpropylamine.
- alkanolamine examples include monomethanolamine, monoethanolamine, monopropanolamine, monoisopropanolamine, monobutanolamine, dimethanolamine, methanolethanolamine, diethanolamine, methanolpropanolamine, ethanolpropanolamine, dipropanolamine, diisopropanolamine, trimethanolamine, triethanolamine, tripropanolamine, triisopropanolamine, tributanolamine, and monobutyldiethanolamine.
- alkanolamine having 2 to 6 carbon atoms is preferable, one or more selected from monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine are more preferable, and one or more selected from triethanolamine and triisopropanolamine are even more preferable, and triisopropanolamine is yet more preferable.
- polyalkylenepolyamine examples include diethylenetriamine, triethylenetetramine, tetraethylenepentamine, pentaethylenehexamine, hexaethyleneheptamine, tetrapropylenepentamine, and hexabutyleneheptamine.
- the content of the component (E) is preferably 0.001% by mass or more, more preferably 0.005% by mass or more, even more preferably 0.007% by mass or more, yet more preferably 0.010% by mass or more, and particularly preferably 0.015% by mass or more, is preferably 5.0% by mass or less, more preferably 3.0% by mass or less, even more preferably 2.0% by mass or less, yet more preferably 1.0% by mass or less, and particularly preferably 0.70% by mass or less, and, moreover, may be 0.50% by mass or less, 0.30% by mass or less, 0.20% by mass or less, 0.10% by mass or less, 0.070% by mass or less, or 0.050% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- the mass ratio of the content of the component (D) to the content of the component (E) [(D)/(E)] is preferably 0.01 or more, more preferably 0.05 or more, more preferably 0.10 or more, even more preferably 0.20 or more, yet more preferably 0.30 or more, and particularly preferably 0.40 or more, and is preferably 1.2 or less, more preferably 1.0 or less, more preferably 0.90 or less, even more preferably 0.80 or less, yet more preferably 0.75 or less, and particularly preferably 0.70 or less.
- the aqueous working fluid of one embodiment of the present invention may further contain, as necessary, other additives other than the components (A) to (E) as long as the effects of the present invention are not impaired.
- Such other additives include rust inhibitors (such as alkylbenzene sulfonate, dinonylnaphthalene sulfonate, alkenyl succinate, and polyhydric alcohol ester), friction modifiers (such as various nonionic surfactants), antifoaming agents (such as silicone oil, fluorosilicone oil, and fluoroalkyl ether), metal deactivators (such as imidazoline, pyrimidine derivatives, thiadiazole, and benzotriazole), bactericides/preservatives (such as paraoxybenzoic acid esters; benzoic acid, salicylic acid, sorbic acid, dehydroacetic acid, p-toluenesulfonic acid, and salts thereof; and phenoxyethanol), and pH adjusters (such as organic acids such as acetic acid, malic acid, and citric acid, and salts thereof; and phosphoric acid and salts thereof).
- rust inhibitors such as alkylbenzene
- the content of each of these various additives is suitably set according to the type and the function of each component, and may be 0.0001% by mass or more, 0.005% by mass or more, 0.01% by mass or more, 0.05% by mass or more, or 0.1% by mass or more, and may be 20% by mass or less, 10% by mass or less, 5% by mass or less, 2% by mass or less, or 1% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- the method for producing an aqueous working fluid of one embodiment of the present invention is not particularly limited, and is preferably a method comprising the step of blending the components (A) and (B) and, optionally, the components (C) to (E) and other additives.
- the aqueous working fluid when producing an aqueous working fluid containing water as the component (C), can be produced by blending water with the components (A) and (B) and, optionally, the components (C) to (E) and other additives, and optionally stirring the mixture.
- the order of blending the respective components can be suitably set.
- the surface tension of the aqueous working fluid of one embodiment of the present invention is preferably 45.0 mN/m or less, more preferably 43.0 mN/m or less, more preferably 40.0 mN/m or less, even more preferably 38.0 mN/m or less, yet more preferably 36.0 mN/m or less, and particularly preferably 35.0 mN/m or less, and may be 1.0 mN/m or more, 3.0 mN/m or more, 5.0 mN/m or more, 7.0 mN/m or more, 10.0 mN/m or more, or 15.0 mN/m or more.
- the surface tension of the aqueous working fluid means a value measured in accordance with the platinum plate method of JIS K 2241.
- the pH of the aqueous processing liquid of one embodiment of the present invention is preferably 4.0 to 10.0, more preferably 5.0 to 9.0, even more preferably 6.0 to 8.5, and yet more preferably 7.0 to 8.0.
- the pH of the aqueous working fluid means a value measured at 25°C in accordance with JIS Z 8802.
- the amount of produced foam after adding 90 mL of the aqueous working fluid of one embodiment of the present invention to a 100 mL graduated cylinder, placing a lid on the graduated cylinder, vigorously shaking the graduated cylinder up and down 10 times, and leaving the graduated cylinder to stand still for 10 seconds is preferably 15 mL or less, more preferably 10 mL or less, even more preferably 9.0 mL or less, yet more preferably 8.0 mL or less, and particularly preferably 7.5 mL or less, and, moreover, is preferably less than 6.0 mL, less than 5.0 mL, less than 4.0 mL, less than 3.5 mL, less than 3.0 mL, less than 2.5 mL, less than 2.0 mL, less than 1.5 mL, or less than 1.0 mL.
- the amount of foam means a value measured by the method of the Examples described below.
- the present invention also provides a concentrate for an aqueous working fluid that contains compound (A) represented by the above general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group.
- the concentrate for an aqueous working fluid of the present invention can be prepared into an aqueous working fluid having a viscosity at 25°C of 4.0 to 20.0 mPa ⁇ s. That is to say, the aqueous working fluid concentrate of the present invention can be prepared into the above-described aqueous working fluid of one embodiment of the present invention by being diluted with water.
- the ratio of the content of component (B) to 100 parts by mass of component (A) is preferably 0.0001 parts by mass or more, more preferably 0.0003 parts by mass or more, more preferably 0.0005 parts by mass or more, even more preferably 0.0010 parts by mass or more, even more preferably 0.0020 parts by mass or more, yet more preferably 0.0030 parts by mass or more, yet more preferably 0.0040 parts by mass or more, and particularly preferably 0.0050 parts by mass or more, is preferably 1.80 parts by mass or less, more preferably 1.70 parts by mass or less, more preferably 1.50 parts by mass or less, even more preferably 1.40 parts by mass or less, yet more preferably 1.30 parts by mass or less, and particularly preferably 1.25 parts by mass or less, and, moreover, may be 1.00 parts by mass or less, 0.500 parts by mass or less, 0.100 parts by mass or less, 0.050 parts by mass or less, 0.020 parts by mass
- the concentrate for an aqueous working fluid of one embodiment of the present invention may contain, other than the components (A) and (B), the components (D) and (E) and the above-described other additives.
- the total content of the components (A) and (B) is preferably 70% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, yet more preferably 95% by mass or more, and particularly preferably 98% by mass or more, and may be 100% by mass or less, 99.99% by mass or less, 99.90% by mass or less, or 99.80% by mass or less based on the total amount (100% by mass) of the concentrate for an aqueous working fluid.
- the aqueous working fluid of one preferable embodiment of the present invention contains the components (A) and (B) and has a viscosity at 25°C that is regulated to a specific range, thus has various characteristics (such as appropriate viscosity characteristics, small surface tension, and good antifoaming properties) that can increase workability, and thus can be suitably applied to the processing of brittle materials.
- the aqueous working fluid of one preferable embodiment of the present invention has appropriate viscosity characteristics, small surface tension, and good antifoaming properties, is thus suitable as an aqueous working fluid used when cutting brittle materials by means of a wire saw, and is more suitable as an aqueous working fluid for a fixed abrasive process wherein brittle materials are cut using a wire, to the surface of which abrasive grains are fixed in advance.
- the aqueous working fluid of one embodiment of the present invention enables highly accurate cutting to be performed even when cutting brittle materials by a fixed abrasive process.
- Examples of the brittle material as a workpiece include silicon ingot, crystal, carbon, and glass, and silicon ingot is preferable.
- the diameter of the wire for a fixed-abrasive process may be 0.2 mm or less, 0.12 mm or less, 0.1 mm or less, or 0.08 mm or less, and may be 0.01 mm or more, 0.02 mm or more, 0.03 mm or more, 0.04 mm or more, 0.05 mm or more, or 0.06 mm or more.
- a wire having a smaller diameter can provide a higher yield when obtaining a product from a brittle material as a workpiece, but impairs properties of a brittle material as a workpiece and tends to result in poor cutting efficiency.
- the biting of abrasive grains is increased, and cutting efficiency can be increased, thus enabling a wire having a smaller diameter to be used.
- the aqueous working fluid of one embodiment of the present invention because the surface tension of which is small, can suppress repulsion between wires, prevent wires from being intertwined, and increase workability.
- the present invention can also provide [1] and [2] below:
- the cutting step in [1] and [2] is preferably performed by a fixed abrasive process wherein a wire, to the surface of which abrasive grains are fixed in advance, is used to cut a brittle material.
- a wire to the surface of which abrasive grains are fixed in advance.
- Specific embodiments of the wire and the brittle material used in wire sawing are as described above.
- the physical property values of the viscosity at 25°C, surface tension, and pH of the prepared aqueous working fluids were measured by the following methods, and also the antifoaming properties were evaluated by the following method.
- the brittle material workability of the aqueous working fluids of Example 1 and Comparative Examples 5 and 6 was evaluated by the following method. The results thereof are shown in Tables 1 and 2.
- water-insoluble polyoxyethylene ether blended did not dissolve in water, and thus it was not possible to measure the above physical property values and evaluate antifoaming properties.
- the aqueous working fluid of Comparative Example 4 had high viscosity, and thus it was not possible to evaluate antifoaming properties.
- Viscosity was measured at a rotor speed of 60 rpm using a Brookfield rotary viscometer TVB-10 (trade name, manufactured by Toki Sangyo Co., Ltd.).
- pH was measured at 25°C in accordance with JIS Z 8802.
- the amount of foam after adding 90 mL of the prepared aqueous working fluid to a 100 mL graduated cylinder, placing a lid on the graduated cylinder, vigorously shaking the graduated cylinder up and down 10 times, and leaving the graduated cylinder to stand still for 10 seconds was measured by reading the marked line on the graduated cylinder. It can be said that the smaller the amount of foam is, the better the antifoaming properties of the aqueous working fluid are.
- TTV total thickness variation
- the aqueous working fluids of Examples 1 to 10 have good antifoaming properties and, excellent brittle material workability, in view of the viscosity characteristics and surface tension.
- the aqueous working fluid of Example 1 had a TTV value of less than 10 ⁇ m and was confirmed as having excellent brittle material workability.
- the aqueous working fluids of Comparative Examples 2 to 5 have excessively low or high viscosity, and are thus considered as being problematic in brittle material workability.
- the aqueous working fluids of Comparative Examples 6 and 7 have high surface tension and, likewise, are considered as being problematic in brittle material workability.
- the aqueous working fluids of Comparative Examples 5 and 6 had a TTV value of 10 ⁇ m or more, and were confirmed as having poorer brittle material workability than the aqueous working fluid of Example 1.
- Concerning the aqueous working fluid of Comparative Example 1 the experiment was terminated without measurement and evaluation of physical properties because water-insoluble polyoxyethylene ether blended did not dissolve in water.
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Abstract
Provided is an aqueous working fluid containing compound (A) represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group, wherein the aqueous working fluid has a viscosity at 25°C of 4.0 to 20.0 mPa·s:
wherein A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; and m is an integer of 1 or more.
Description
- The present invention relates to an aqueous working fluid, a concentrate for the aqueous working fluid, the use of the aqueous working fluid, and a method for processing a brittle material using the aqueous working fluid.
- In the manufacture of semiconductor products, silicon ingot, which is a brittle material, needs to be cut, and wire sawing is generally used from the viewpoint of cutting accuracy and productivity. Here, in the cutting of silicon ingot, there are a loose abrasive process involving cutting silicon ingot, with abrasive grains being dispersed in a working fluid, and a fixed abrasive process involving cutting silicon ingot, with abrasive grains being fixed to the wire surface in advance. A variety of working fluids are proposed that can be suitably used in the respective abrasive processes.
- For example, Patent Literature 1 discloses an invention relating to a water-soluble working fluid composition for fixed abrasive wire sawing used in the cutting of a workpiece other than rare-earth magnets, in which (A) the aqueous working fluid composition for fixed-abrasive wire sawing comprises glycol.
- [Patent Literature 1]
JP-A-2003-82334 - Under such circumstances, the demand exists for a novel aqueous working fluid that is more readily applicable to the step of cutting brittle materials than conventional working fluids.
- The present invention provides an aqueous working fluid that has a specific structure, contains an ether compound having a specific molecular weight and water-insoluble polyoxyalkylene ether, and is regulated to a predetermined viscosity. Specifically, the present invention provides, for example, the following embodiments [1] to [15]:
- [1] An aqueous working fluid comprising compound (A) represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group,
wherein the aqueous working fluid has a viscosity at 25°C of 4.0 to 26.0 mPa·s:- A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; and
- m is an integer of 1 or more.
- [2] The aqueous working fluid according to [1], having a surface tension of 45.0 mN/m or less.
- [3] The aqueous working fluid according to [1] or [2], having a content of component (A) of 15.0 to 95.0% by mass based on the total amount of the aqueous working fluid.
- [4] The aqueous working fluid according to any one of [1] to [3], having a content of component (B) of 0.0001 to 1.0% by mass based on the total amount of the aqueous working fluid.
- [5] The aqueous working fluid according to any one of [1] to [4], wherein a ratio of the content of component (B) to 100 parts by mass of component (A) is 0.0001 to 1.80 parts by mass.
- [6] The aqueous working fluid according to any one of [1] to [5], wherein component (A) comprises one or more selected from diethylene glycol, dipropylene glycol, polyethylene glycol, and polypropylene glycol.
- [7] The aqueous working fluid according to any one of [1] to [6], wherein component (B) comprises one or more selected from water-insoluble polyoxyalkylene ether (B1) represented by the following general formula (b-1) and an alkylene oxide adduct of water-insoluble acetylene glycol (B2) represented by the following general formula (b-2):
- A1 to A3 are each independently an alkylene group having 2 to 4 carbon atoms;
- Ra to Re are each independently a hydrogen atom, an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group;
- R1 to R3 are each independently an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group; and
- n, p, and q are each independently an integer of 1 or more.
- [8] The aqueous working fluid according to any one of [1] to [7], further comprising (C) water.
- [9] The aqueous working fluid according to [8], wherein a content of the component (C) is 5.0 to 70.0% by mass based on the total amount of the aqueous working fluid.
- [10] The aqueous working fluid according to any one of [1] to [9], having a pH of 4.0 to 10.0.
- [11] The aqueous working fluid according to any one of [1] to [10], which is used when cutting a brittle material by means of a wire saw.
- [12] A concentrate for an aqueous working fluid, comprising compound (A) represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group:
- A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; and
- m is an integer of 1 or more.
- [13] The concentrate for an aqueous working fluid according to [12], which is capable of preparing an aqueous working fluid having a viscosity at 25°C of 4.0 to 20.0 mPa·s by being diluted with water.
- [14] Use of an aqueous working fluid, wherein the aqueous working fluid according to any one of [1] to [11] is applied to the step of cutting a brittle material by means of a wire saw.
- [15] A method for processing a brittle material, comprising the step of cutting a brittle material by means of a wire saw with applying the aqueous working fluid according to any one of [1] to [11].
- The aqueous working fluid of one suitable embodiment of the present invention has various characteristics (such as appropriate viscosity characteristics, small surface tension, good antifoaming properties) that can increase workability and, therefore, can be an aqueous working fluid suitable for processing brittle materials.
- Concerning the numerical ranges described herein, the upper limits and the lower limits can be suitably combined. For example, when a numerical range is described as being "preferably 30 to 100, and more preferably 40 to 80", the range of "30 to 80" and the range of "40 to 100" are also included in the numerical range described herein. Also, for example, when a numerical range is described as being "preferably 30 or more and more preferably 40 or more, and preferably 100 or less and more preferably 80 or less", the range of "30 to 80" and the range of "40 to 100" are also included in the numerical range described herein.
- In addition, for example, "60 to 100" as a numerical range described herein means the range of "60 or more and 100 or less".
- Moreover, concerning the specification of the upper limits and the lower limits described herein, a numerical range from a lower limit to an upper limit can be specified by suitably selecting from, and appropriately combining, the respective options.
- Also, concerning the various requirements described as preferable embodiments herein, multiple requirements can be combined.
- The aqueous working fluid of the present invention contains compound (A) represented by the above general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group, and has a viscosity at 25°C of 4.0 to 26.0 mPa·s.
- The aqueous working fluid of the present invention is a solution that is directly used in the processing of a workpiece without being diluted.
- On the other hand, the concentrate for an aqueous working fluid of the present invention as will be described below is a solution that can be diluted with water to be formed into an aqueous working fluid having the above-described viscosity, and is distinguished from the aqueous working fluid of the present invention in that the concentrate for an aqueous working fluid is not a solution directly used in the processing of a workpiece.
- Containing component (A) and component (B), the aqueous working fluid of one embodiment of the present invention is prepared as an aqueous working fluid having various characteristics that can increase workability, or, in particular, small surface tension.
- Also, having a viscosity at 25°C of 4.0 to 26.0 mPa·s, i.e., appropriate viscosity characteristics, the aqueous working fluid of the present invention can be an aqueous working fluid having excellent brittle material workability.
- From the viewpoint of providing an aqueous working fluid having excellent brittle material workability, the viscosity at 25°C of the aqueous working fluid of one embodiment of the present invention is 4.0 mPa·s or more, preferably 4.5 mPa·s or more, more preferably 5.0 mPa·s or more, more preferably 5.5 mPa·s or more, more preferably 6.0 mPa·s or more, even more preferably 6.5 mPa·s or more, even more preferably 7.0 mPa·s or more, even more preferably 7.5 mPa·s or more, yet more preferably 8.0 mPa·s or more, yet more preferably 8.5 mPa·s or more, and particularly preferably 9.0 mPa·s or more, and, moreover, may be 9.5 mPa·s or more, 10.0 mPa·s or more, 10.5 mPa·s or more, 11.0 mPa-s or more, 11.5 mPa·s or more, 12.0 mPa·s or more, 12.5 mPa·s or more, 13.0 mPa·s or more, 13.5 mPa·s or more, or 14.0 mPa·s or more, and is 26.0 mPa·s or less, preferably 25.0 mPa·s or less, more preferably 24.0 mPa·s or less, more preferably 23.0 mPa·s or less, even more preferably 22.0 mPa·s or less, even more preferably 21.0 mPa·s or less, yet more preferably 20.5 mPa·s or less, and particularly preferably 20.0 mPa·s or less, and, moreover, may be 19.0 mPa·s or less, 18.0 mPa·s or less, 17.0 mPa·s or less, 16.0 mPa·s or less, or 15.0 mPa·s or less.
- Herein, the viscosity at 25°C of the aqueous working fluid can be measured by the method described in the Examples.
- The aqueous working fluid of one embodiment of the present invention may further contain (C) water from the viewpoint of providing an aqueous working fluid regulated to the above-described viscosity range.
- From the viewpoint of providing an aqueous working fluid capable of preventing corrosion of apparatuses and wires, the aqueous working fluid of one embodiment of the present invention may contain one or more selected from (D) carboxylic acid and (E) an amine compound.
- The aqueous working fluid of one embodiment of the present invention may contain, as necessary, other additives other than the components (A) to (E) as long as the effects of the present invention are not impaired.
- In the aqueous working fluid of one embodiment of the present invention, the total content of the components (A) and (B) is preferably more than 15% by mass, more preferably more than 20% by mass, more preferably more than 25% by mass, even more preferably more than 30% by mass, even more preferably more than 35% by mass, yet more preferably more than 40% by mass, particularly preferably more than 45% by mass, and, moreover, may be more than 50% by mass, more than 55% by mass, more than 60% by mass, more than 65% by mass, or more than 70% by mass, and may be 100% by mass or less, 98% by mass or less, 96% by mass or less, 95% by mass or less, 93% by mass or less, or 90% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- In the aqueous working fluid of one embodiment of the present invention, the total content of the components (A) and (B) is preferably 70% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, yet more preferably 95% by mass or more, and particularly preferably 98% by mass or more, and may be 100% by mass or less, 99. 99% by mass or less, 99.90% by mass or less, or 99.80% by mass or less based on the total amount (100% by mass) of the components contained in the aqueous working fluid excluding water (C) .
- In the aqueous working fluid of one embodiment of the present invention, the total content of the components (A), (B), and (C) is preferably 20% by mass or more, more preferably 30% by mass or more, more preferably 40% by mass or more, even more preferably 50% by mass or more, even more preferably 60% by mass or more, yet more preferably 70% by mass or more, and particularly preferably 75% by mass or more, and, moreover, may be 80% by mass or more, 85% by mass or more, 90% by mass or more, or 95% by mass or more, and may be 100% by mass or less, 99.999% by mass or less, 99.99% by mass or less, or 99.98% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- Below, the respective components contained in the aqueous working fluid of one embodiment of the present invention will now be described.
- The aqueous working fluid of the present invention contains a compound represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less as component (A).
-
- In the above general formula (a-1), A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; and m is an integer of 1 or more, and preferably an integer of 2 or more.
- Examples of the alkylene group that can be selected as A include alkylene groups having 2 carbon atoms such as an ethylene group (-CH2CH2-) and an ethylidene group (-CH(CH3)-); alkylene groups having 3 carbon atoms such as a trimethylene group (-CH2CH2CH2-), a propylene group (-CH(CH3)CH2-), a propylidene group (-CHCH2CH3-), and an isopropylidene group (-C(CH3)2-); and alkylene groups having 4 carbon atoms such as a tetramethylene group (-CH2CH2CH2CH2-), a 1-methyltrimethylene group (-CH(CH3)CH2CH2-), a 2-methyltrimethylene group (-CH2CH(CH3)CH2-), and a butylene group (-C(CH3)2CH2-). The alkylene group may be a linear alkylene group or may be a branched alkylene group.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid having excellent brittle material workability, component (A) preferably contains one or more selected from diethylene glycol, dipropylene glycol, polyethylene glycol, and polypropylene glycol, and more preferably contains one or more selected from diethylene glycol and polyethylene glycol.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid having excellent brittle material workability, the total content of diethylene glycol and polyethylene glycol is preferably 30 to 100% by mass, more preferably 40 to 100% by mass, more preferably 50 to 100% by mass, more preferably 60 to 100% by mass, even more preferably 70 to 100% by mass, even more preferably 80 to 100% by mass, and yet more preferably 90 to 100% by mass, and particularly preferably 95 to 100% by mass based on the total amount (100% by mass) of component (A) contained in the aqueous working fluid.
- From the viewpoint of providing an aqueous working fluid having small surface tension and suitable brittle material workability, the weight average molecular weight of component (A) is 12,000 or less, preferably 10,000 or less, more preferably 8,000 or less, more preferably 6,500 or less, even more preferably 5,000 or less, even more preferably 4,000 or less, yet more preferably 3,000 or less, yet more preferably 2,000 or less, and particularly preferably 1,000 or less, and, moreover, may be 900 or less, 800 or less, 700 or less, 600 or less, 500 or less, 450 or less, 400 or less, or 350 or less.
- The lower limit of the weight average molecular weight of component (A) is not particularly limited, and the minimum molecular weight of component (A) should be equal to or greater than the molecular weight of ethylene glycol, i.e., 62, and, moreover, may be 65 or more, 70 or more, 80 or more, 90 or more, or 100 or more.
- Herein, the weight average molecular weight means a value measured by the method described in the Examples.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid regulated to the above-described viscosity range and having excellent brittle material workability, the content of component (A) is preferably 15.0% by mass or more, more preferably 20% by mass or more, more preferably 25% by mass or more, even more preferably 30% by mass or more, even more preferably 35% by mass or more, yet more preferably 40% by mass or more, and particularly preferably 45% by mass or more, and, moreover, may be 50% by mass or more, 55% by mass or more, 60% by mass or more, 65% by mass or more, or 70% by mass or more, and is preferably 95.0% by mass or less, more preferably 92.0% by mass or less, more preferably 90.0% by mass or less, even more preferably 87.0% by mass or less, even more preferably 85.0% by mass or less, yet more preferably 83.0% by mass or less, and particularly preferably 80.0% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- The aqueous working fluid of the present invention contains water-insoluble compound (B) having a polyoxyalkylene group as component (B).
- Containing component (B) enables the surface tension of the aqueous working fluid to be small, and an aqueous working fluid having excellent brittle material workability to be provided.
- One component (B) may be used singly, or two or more may be used in combination.
- Herein, concerning the "water-insoluble compound", the compound of interest can be determined as being a water-insoluble compound when 0.1 g of the compound of interest is added to 99.9 g of ion exchanged water at 25°C, the mixture is stirred and left to stand still at 25°C for 24 hours, and residues of the compound of interest are visually confirmed.
- From the viewpoint of providing an aqueous working fluid regulated to a smaller surface tension and having excellent brittle material workability, the HLB value of component (B) used in one embodiment of the present invention is preferably 10.0 or less, more preferably 9.0 or less, and even more preferably 8.0 or less, and, moreover, may be 7.0 or less, 6.0 or less, 5.0 or less, or 4.0 or less, and may be more than 0, 1.0 or more, or 2.0 or more.
- Herein, the HLB value means a value calculated by Griffin's method.
- From the viewpoint of providing an aqueous working fluid regulated to a smaller surface tension and having excellent brittle material workability, component (B) preferably contains one or more selected from water-insoluble polyoxyalkylene ether (B1) represented by the following general formula (b-1) and an alkylene oxide adduct of water-insoluble acetylene glycol (B2) represented by the following general formula (b-2):
- In the general formulae (b-1) and (b-2), A1 to A3 are each independently an alkylene group having 2 to 4 carbon atoms;
- Ra to Re are each independently a hydrogen atom, an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group, and is preferably a hydrogen atom or an alkyl group;
- R1 to R3 are each independently an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group, and is preferably an alkyl group; and
- n, p, and q are each independently an integer of 1 or more.
- Examples of the alkylene group having 2 to 4 carbon atoms that can be selected as A1 to A3 include those identical to the above-described alkylene groups having 2 to 4 carbon atoms that can be selected as A in the above general formula (a-1), an alkylene group having 2 to 3 carbon atoms is preferable, an ethylene group, a trimethylene group, or a propylene group is more preferable, and an ethylene group is even more preferable. The alkylene group may be a linear alkylene group or may be a branched alkylene group.
- Examples of the alkyl group that can be selected as Ra to Re and R1 to R3 include a methyl group, an ethyl group, a propyl group (a n-propyl group, an isopropyl group), a butyl group (a n-butyl group, a s-butyl group, a t-butyl group, an isobutyl group), a pentyl group, a hexyl group, a heptyl group, an octyl group, a 2-ethylhexyl group, a nonyl group, a 1,1-dimethylheptyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group, and these alkyl groups may be linear alkyl groups or branched alkyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 20, more preferably 1 to 16, even more preferably 1 to 12, and yet more preferably 1 to 10.
- Examples of the cycloalkyl group optionally having an alkyl group, which can be selected as Ra to Re and R1 to R3, include a cyclopentyl group, a cyclohexyl group, a dimethylcyclohexyl group, an ethylcyclohexyl group, a propylcyclohexyl group, a butylcyclohexyl group, and a heptylcyclohexyl group. The number of ring-forming carbon atoms in the cycloalkyl group is preferably 5 to 18, more preferably 5 to 12, and even more preferably 6 to 10.
- Examples of the aryl group optionally having an alkyl group, which can be selected as Ra to Re and R1 to R3, include a phenyl group, a naphthyl group, an anthracenyl group, a biphenyl group, a terphenyl group, a tolyl group, a dimethylphenyl group, a butylphenyl group, a nonylphenyl group, a methylbenzyl group, and a dimethylnaphthyl group. The number of ring-forming carbon atoms in the aryl group is preferably 6 to 24, more preferably 6 to 18, and even more preferably 6 to 12.
- Component (B1) used in one embodiment of the present invention is preferably water-insoluble polyoxyalkylene ether of the above general formula (b-1) wherein A1 is an ethylene group, Ra is a hydrogen atom, and R1 is an alkyl group having 1 to 20 (preferably 1 to 10) carbon atoms.
- Component (B2) used in one embodiment of the present invention is preferably an ethylene oxide adduct of water-insoluble acetylene glycol of the above general formula (b-2) wherein A2 and A3 are ethylene groups, Rb and Rc are hydrogen atoms, Rd and Re are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms (preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3), and R2 and R3 are each independently an alkyl group (preferably a branched alkyl group) having 1 to 20 carbon atoms (preferably 2 to 16, more preferably 3 to 10, even more preferably 4 to 8, and yet more preferably 4 to 6).
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid regulated to a smaller surface tension and having excellent brittle material workability, the content of component (B) is preferably 0.0001% by mass or more, more preferably 0.0003% by mass or more, more preferably 0.0005% by mass or more, even more preferably 0.0010% by mass or more, even more preferably 0.0020% by mass or more, yet more preferably 0.0030% by mass or more, and particularly preferably 0.0040% by mass or more, is preferably 1.0% by mass or less, more preferably 0.80% by mass or less, more preferably 0.50% by mass or less, even more preferably 0.30% by mass or less, even more preferably 0.10% by mass or less, yet more preferably 0.080% by mass or less, and particularly preferably 0.050% by mass or less, and, moreover, may be 0.030% by mass or less, 0.020% by mass or less, 0.010% by mass or less, 0.0090% by mass or less, 0.0080% by mass or less, or 0.0070% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid regulated to the above-described viscosity range, also regulated to a smaller surface tension, and having excellent brittle material workability, the ratio of the content of component (B) to 100 parts by mass of component (A) is preferably 0.0001 parts by mass or more, more preferably 0.0003 parts by mass or more, more preferably 0.0005 parts by mass or more, even more preferably 0.0010 parts by mass or more, even more preferably 0.0020 parts by mass or more, yet more preferably 0.0030 parts by mass or more, yet more preferably 0.0040 parts by mass or more, and particularly preferably 0.0050 parts by mass or more, is preferably 1.80 parts by mass or less, more preferably 1.70 parts by mass or less, more preferably 1.50 parts by mass or less, even more preferably 1.40 parts by mass or less, yet more preferably 1.30 parts by mass or less, and particularly preferably 1.25 parts by mass or less, and, moreover, may be 1.00 parts by mass or less, 0.500 parts by mass or less, 0.100 parts by mass or less, 0.050 parts by mass or less, 0.020 parts by mass or less, or 0.010 parts by mass or less.
- From the viewpoint of providing an aqueous working fluid regulated to the above-described viscosity range, the aqueous working fluid of one embodiment of the present invention may further contain water as the component (C).
- In the aqueous working fluid of one embodiment of the present invention, examples of water used as the component (C) include ultrapure water, pure water, distilled water, ion exchanged water, tap water, and water for industrial use.
- In the aqueous working fluid of one embodiment of the present invention, the content of the component (C) is preferably 5.0% by mass or more, more preferably 7.0% by mass or more, more preferably 10.0% by mass or more, even more preferably 12.0% by mass or more, even more preferably 15.0% by mass or more, yet more preferably 17.0% by mass or more, and particularly preferably 20.0% by mass or more, is preferably 70.0% by mass or less, more preferably 67.0% by mass or less, more preferably 65.0% by mass or less, even more preferably 63.0% by mass or less, even more preferably 60.0% by mass or less, yet more preferably 57.0% by mass or less, and particularly preferably 55.0% by mass or less, and, moreover, may be 50.0% by mass or less, 45.0% by mass or less, 40.0% by mass or less, 35.0% by mass or less, 30.0% by mass or less, or 27.0% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- From the viewpoint of providing an aqueous working fluid capable of preventing corrosion of apparatuses and wires, the aqueous working fluid of one embodiment of the present invention may further contain carboxylic acid as the component (D).
- One component (D) may be used singly, and two or more may be used in combination.
- Examples of carboxylic acid used as the component (D) in one embodiment of the present invention include saturated monocarboxylic acid, unsaturated monocarboxylic acid, dicarboxylic acid, and tricarboxylic acid.
- Among these, carboxylic acid used as the component (D) in one embodiment of the present invention is preferably saturated monocarboxylic acid or unsaturated monocarboxylic acid, more preferably saturated monocarboxylic acid, and even more preferably branched saturated monocarboxylic acid.
- Examples of saturated monocarboxylic acid include linear saturated monocarboxylic acid such as valeric acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, undecanoic acid, lauric acid, tridecanoic acid, myristic acid, pentadecanoic acid, palmitic acid, heptadecanoic acid, stearic acid, nonadecanic acid, arachic acid, and behenic acid; and branched saturated monocarboxylic acid such as isomyristic acid, isopalmitic acid, isostearic acid, 2,2-dimethylpropanoic acid, 2,2-dimethylbutanoic acid, 2,2-dimethylpentanoic acid, 2,2-dimethyloctanoic acid, 2-ethyl-2,3,3-trimethylbutanoic acid, 2,2,3,4-tetramethylpentanoic acid, 2,5,5-trimethyl-2-t-butylhexanoic acid, 2,3,3-trimethyl-2-ethylbutanoic acid, 2,3-dimethyl-2-isopropylbutanoic acid, 2-ethylhexanoic acid, and 3,5,5-trimethylhexanoic acid (isononanoic acid). Among these, branched saturated monocarboxylic acid is preferable, and 3,5,5-trimethylhexanoic acid (isononanoic acid) is more preferable.
- Examples of unsaturated monocarboxylic acid include undecylenic acid, oleic acid, elaidic acid, erucic acid, nervonic acid, linoleic acid, γ-linolenic acid, arachidonic acid, α-linolenic acid, stearidonic acid, eicosapentaenoic acid, and docosahexaenoic acid.
- Examples of dicarboxylic acid include adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, undecanedioic acid, dodecanedioic acid, brassylic acid, and tetradecanedioic acid.
- Examples of tricarboxylic acid include propanetricarboxylic acid, propan-1-ene-1,2,3-tricarboxylic acid, butanetricarboxylic acid, pentanetricarboxylic acid, hexanetricarboxylic acid, octanetricarboxylic acid, nonanetricarboxylic acid, decanetricarboxylic acid, undecanetricarboxylic acid, and monomethyldecanetricarboxylic acid.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid capable of preventing corrosion of apparatuses and wires, the content of the component (D) is preferably 0.001% by mass or more, more preferably 0.003% by mass or more, even more preferably 0.005% by mass or more, yet more preferably 0.007% by mass or more, and particularly preferably 0.009% by mass or more, and is preferably 3.0% by mass or less, more preferably 2.0% by mass or less, more preferably 1.0% by mass or less, even more preferably 0.50% by mass or less, yet more preferably 0.20% by mass or less, and particularly preferably 0.10% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- From the viewpoint of providing an aqueous working fluid capable of preventing corrosion of apparatuses and wires, the aqueous working fluid of one embodiment of the present invention may further contain an amine compound as the component (E). One component (E) may be used singly, or two or more may be used in combination.
- Examples of the amine compound used as the component (E) in one embodiment of the present invention include alkylamine, alkanolamine, and polyalkylenepolyamine.
- Among these, alkanolamine is preferable as the amine compound used as the component (E) in one embodiment of the present invention, and alkanolamine having 2 to 6 carbon atoms is more preferable.
- Examples of alkylamine include primary aliphatic alkylamine such as monomethylamine, monoethylamine, monopropylamine, monobutylamine, and monopentylamine; and secondary aliphatic alkylamine such as dimethylamine, methylethylamine, diethylamine, methylpropylamine, and ethylpropylamine.
- Examples of alkanolamine include monomethanolamine, monoethanolamine, monopropanolamine, monoisopropanolamine, monobutanolamine, dimethanolamine, methanolethanolamine, diethanolamine, methanolpropanolamine, ethanolpropanolamine, dipropanolamine, diisopropanolamine, trimethanolamine, triethanolamine, tripropanolamine, triisopropanolamine, tributanolamine, and monobutyldiethanolamine.
- Among these alkanolamines, alkanolamine having 2 to 6 carbon atoms is preferable, one or more selected from monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine are more preferable, and one or more selected from triethanolamine and triisopropanolamine are even more preferable, and triisopropanolamine is yet more preferable.
- Examples of polyalkylenepolyamine include diethylenetriamine, triethylenetetramine, tetraethylenepentamine, pentaethylenehexamine, hexaethyleneheptamine, tetrapropylenepentamine, and hexabutyleneheptamine.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid capable of preventing corrosion of apparatuses and wires, the content of the component (E) is preferably 0.001% by mass or more, more preferably 0.005% by mass or more, even more preferably 0.007% by mass or more, yet more preferably 0.010% by mass or more, and particularly preferably 0.015% by mass or more, is preferably 5.0% by mass or less, more preferably 3.0% by mass or less, even more preferably 2.0% by mass or less, yet more preferably 1.0% by mass or less, and particularly preferably 0.70% by mass or less, and, moreover, may be 0.50% by mass or less, 0.30% by mass or less, 0.20% by mass or less, 0.10% by mass or less, 0.070% by mass or less, or 0.050% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- In the aqueous working fluid of one embodiment of the present invention, from the viewpoint of providing an aqueous working fluid capable of preventing corrosion of apparatuses and wires, the mass ratio of the content of the component (D) to the content of the component (E) [(D)/(E)] is preferably 0.01 or more, more preferably 0.05 or more, more preferably 0.10 or more, even more preferably 0.20 or more, yet more preferably 0.30 or more, and particularly preferably 0.40 or more, and is preferably 1.2 or less, more preferably 1.0 or less, more preferably 0.90 or less, even more preferably 0.80 or less, yet more preferably 0.75 or less, and particularly preferably 0.70 or less.
- The aqueous working fluid of one embodiment of the present invention may further contain, as necessary, other additives other than the components (A) to (E) as long as the effects of the present invention are not impaired.
- Examples of such other additives include rust inhibitors (such as alkylbenzene sulfonate, dinonylnaphthalene sulfonate, alkenyl succinate, and polyhydric alcohol ester), friction modifiers (such as various nonionic surfactants), antifoaming agents (such as silicone oil, fluorosilicone oil, and fluoroalkyl ether), metal deactivators (such as imidazoline, pyrimidine derivatives, thiadiazole, and benzotriazole), bactericides/preservatives (such as paraoxybenzoic acid esters; benzoic acid, salicylic acid, sorbic acid, dehydroacetic acid, p-toluenesulfonic acid, and salts thereof; and phenoxyethanol), and pH adjusters (such as organic acids such as acetic acid, malic acid, and citric acid, and salts thereof; and phosphoric acid and salts thereof).
- Each of these additives may be used singly, or two or more may be used in combination.
- In the aqueous working fluid of one embodiment of the present invention, the content of each of these various additives is suitably set according to the type and the function of each component, and may be 0.0001% by mass or more, 0.005% by mass or more, 0.01% by mass or more, 0.05% by mass or more, or 0.1% by mass or more, and may be 20% by mass or less, 10% by mass or less, 5% by mass or less, 2% by mass or less, or 1% by mass or less based on the total amount (100% by mass) of the aqueous working fluid.
- The method for producing an aqueous working fluid of one embodiment of the present invention is not particularly limited, and is preferably a method comprising the step of blending the components (A) and (B) and, optionally, the components (C) to (E) and other additives.
- For example, when producing an aqueous working fluid containing water as the component (C), the aqueous working fluid can be produced by blending water with the components (A) and (B) and, optionally, the components (C) to (E) and other additives, and optionally stirring the mixture. The order of blending the respective components can be suitably set.
- From the viewpoint of providing an aqueous working fluid having excellent brittle material workability, the lower the surface tension of the aqueous working fluid of one embodiment of the present invention is, the more preferable it is.
- From the above viewpoint, the surface tension of the aqueous working fluid of one embodiment of the present invention is preferably 45.0 mN/m or less, more preferably 43.0 mN/m or less, more preferably 40.0 mN/m or less, even more preferably 38.0 mN/m or less, yet more preferably 36.0 mN/m or less, and particularly preferably 35.0 mN/m or less, and may be 1.0 mN/m or more, 3.0 mN/m or more, 5.0 mN/m or more, 7.0 mN/m or more, 10.0 mN/m or more, or 15.0 mN/m or more.
- Herein, the surface tension of the aqueous working fluid means a value measured in accordance with the platinum plate method of JIS K 2241.
- From the viewpoint of suppressing rusting of processing equipment and from the viewpoint of preventing corrosion of a workpiece, the pH of the aqueous processing liquid of one embodiment of the present invention is preferably 4.0 to 10.0, more preferably 5.0 to 9.0, even more preferably 6.0 to 8.5, and yet more preferably 7.0 to 8.0.
- The pH of the aqueous working fluid means a value measured at 25°C in accordance with JIS Z 8802.
- The amount of produced foam after adding 90 mL of the aqueous working fluid of one embodiment of the present invention to a 100 mL graduated cylinder, placing a lid on the graduated cylinder, vigorously shaking the graduated cylinder up and down 10 times, and leaving the graduated cylinder to stand still for 10 seconds is preferably 15 mL or less, more preferably 10 mL or less, even more preferably 9.0 mL or less, yet more preferably 8.0 mL or less, and particularly preferably 7.5 mL or less, and, moreover, is preferably less than 6.0 mL, less than 5.0 mL, less than 4.0 mL, less than 3.5 mL, less than 3.0 mL, less than 2.5 mL, less than 2.0 mL, less than 1.5 mL, or less than 1.0 mL.
- The amount of foam means a value measured by the method of the Examples described below.
- The present invention also provides a concentrate for an aqueous working fluid that contains compound (A) represented by the above general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group.
- By being diluted with water, the concentrate for an aqueous working fluid of the present invention can be prepared into an aqueous working fluid having a viscosity at 25°C of 4.0 to 20.0 mPa·s. That is to say, the aqueous working fluid concentrate of the present invention can be prepared into the above-described aqueous working fluid of one embodiment of the present invention by being diluted with water.
- In the concentrate for an aqueous working fluid of one embodiment of the present invention, the ratio of the content of component (B) to 100 parts by mass of component (A) is preferably 0.0001 parts by mass or more, more preferably 0.0003 parts by mass or more, more preferably 0.0005 parts by mass or more, even more preferably 0.0010 parts by mass or more, even more preferably 0.0020 parts by mass or more, yet more preferably 0.0030 parts by mass or more, yet more preferably 0.0040 parts by mass or more, and particularly preferably 0.0050 parts by mass or more, is preferably 1.80 parts by mass or less, more preferably 1.70 parts by mass or less, more preferably 1.50 parts by mass or less, even more preferably 1.40 parts by mass or less, yet more preferably 1.30 parts by mass or less, and particularly preferably 1.25 parts by mass or less, and, moreover, may be 1.00 parts by mass or less, 0.500 parts by mass or less, 0.100 parts by mass or less, 0.050 parts by mass or less, 0.020 parts by mass or less, or 0.010 parts by mass or less.
- The concentrate for an aqueous working fluid of one embodiment of the present invention may contain, other than the components (A) and (B), the components (D) and (E) and the above-described other additives.
- In the concentrate for an aqueous working fluid of one embodiment of the present invention, specific embodiments (including preferable embodiments as well) of the components (A) and (B), the components (D) and (E), and the above-described other additives are the same as those described for the respective components of the above-described aqueous working fluid of one embodiment of the present invention.
- In the concentrate for an aqueous working fluid of one embodiment of the present invention, the total content of the components (A) and (B) is preferably 70% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, yet more preferably 95% by mass or more, and particularly preferably 98% by mass or more, and may be 100% by mass or less, 99.99% by mass or less, 99.90% by mass or less, or 99.80% by mass or less based on the total amount (100% by mass) of the concentrate for an aqueous working fluid.
- The aqueous working fluid of one preferable embodiment of the present invention contains the components (A) and (B) and has a viscosity at 25°C that is regulated to a specific range, thus has various characteristics (such as appropriate viscosity characteristics, small surface tension, and good antifoaming properties) that can increase workability, and thus can be suitably applied to the processing of brittle materials.
- In particular, the aqueous working fluid of one preferable embodiment of the present invention has appropriate viscosity characteristics, small surface tension, and good antifoaming properties, is thus suitable as an aqueous working fluid used when cutting brittle materials by means of a wire saw, and is more suitable as an aqueous working fluid for a fixed abrasive process wherein brittle materials are cut using a wire, to the surface of which abrasive grains are fixed in advance. The aqueous working fluid of one embodiment of the present invention enables highly accurate cutting to be performed even when cutting brittle materials by a fixed abrasive process.
- Examples of the brittle material as a workpiece include silicon ingot, crystal, carbon, and glass, and silicon ingot is preferable.
- The diameter of the wire for a fixed-abrasive process may be 0.2 mm or less, 0.12 mm or less, 0.1 mm or less, or 0.08 mm or less, and may be 0.01 mm or more, 0.02 mm or more, 0.03 mm or more, 0.04 mm or more, 0.05 mm or more, or 0.06 mm or more.
- Note that a wire having a smaller diameter can provide a higher yield when obtaining a product from a brittle material as a workpiece, but impairs properties of a brittle material as a workpiece and tends to result in poor cutting efficiency. On the other hand, by using the aqueous working fluid of one embodiment of the present invention, the biting of abrasive grains is increased, and cutting efficiency can be increased, thus enabling a wire having a smaller diameter to be used. Also, the aqueous working fluid of one embodiment of the present invention, because the surface tension of which is small, can suppress repulsion between wires, prevent wires from being intertwined, and increase workability.
- Considering the above characteristics of the aqueous working fluid of one embodiment of the present invention, the present invention can also provide [1] and [2] below:
- [1] Use of an aqueous working fluid, wherein the above-described aqueous working fluid of one embodiment of the present invention is applied to the step of cutting a brittle material by means of a wire saw.
- [2] A method for processing a brittle material, comprising the step of cutting a brittle material by means of a wire saw with applying the above-described aqueous working fluid of one embodiment of the present invention.
- The cutting step in [1] and [2] is preferably performed by a fixed abrasive process wherein a wire, to the surface of which abrasive grains are fixed in advance, is used to cut a brittle material. Specific embodiments of the wire and the brittle material used in wire sawing are as described above.
- Next, the present invention will now be described in more detail by way of Examples, but the present invention is not limited to these Examples in any way.
- In the following Examples, the methods for measuring and calculating the following physical property values are as follows.
- Using a gel permeation chromatograph (manufactured by Agilent Technologies, "1260 HPLC"), the weight average molecular weight was measured under the following conditions, and a value measured in terms of standard polystyrene was used.
-
- Column: Two "Shodex LF-404" columns sequentially connected.
- Column temperature: 35°C
- Developing solvent: Chloroform
- Flow rate: 0.3 mL/min
- Calculated by Griffin's method.
- Various components of the types shown in Tables 1 and 2 were added and mixed in the amounts shown in Tables 1 and 2 to prepare respective aqueous working fluids. Details of each component used in the preparation of the aqueous working fluids are as follows.
-
- DEG: Diethylene glycol
- PEG 200: Polyethylene glycol having weight average molecular weight of 200.
- PEG 400: Polyethylene glycol having weight average molecular weight of 400.
- PEG 600: Polyethylene glycol having weight average molecular weight of 600.
- PEG 13000: Polyethylene glycol having weight average molecular weight of 13,000.
-
- Water-insoluble polyoxyethylene ether: Aliphatic polyoxyethylene ether having general formula (b-1) wherein A1 is an ethylene group, Ra is a hydrogen atom, and R1 is an alkyl group having 1 to 10 carbon atoms, a water-insoluble compound.
- Water-insoluble acetylene glycol EO adduct (1):
Ethylene oxide adduct of acetylene glycol having general formula (b-2) wherein A2 and A3 are ethylene groups, Rb and Rc are hydrogen atoms, Rd and Re are methyl groups, and R2 and R3 are isobutyl groups, a water-insoluble compound, water insoluble, HLB = 8 - Water-insoluble acetylene glycol EO adduct (2):
Ethylene oxide adduct of acetylene glycol having general formula (b-2) wherein A2 and A3 are ethylene groups, Rb and Rc are hydrogen atoms, Rd and Re are methyl groups, and R2 and R3 are isobutyl groups, a water-insoluble compound, HLB = 4 - Water-soluble acetylene glycol EO adduct: Ethylene oxide adduct of acetylene glycol, water soluble, HLB = 13
-
- Isononanoic acid
- Triisopropanolamine
- Ion exchanged water
- The physical property values of the viscosity at 25°C, surface tension, and pH of the prepared aqueous working fluids were measured by the following methods, and also the antifoaming properties were evaluated by the following method. Moreover, the brittle material workability of the aqueous working fluids of Example 1 and Comparative Examples 5 and 6 was evaluated by the following method. The results thereof are shown in Tables 1 and 2. In Comparative Example 1, water-insoluble polyoxyethylene ether blended did not dissolve in water, and thus it was not possible to measure the above physical property values and evaluate antifoaming properties. Also, the aqueous working fluid of Comparative Example 4 had high viscosity, and thus it was not possible to evaluate antifoaming properties.
- Viscosity was measured at a rotor speed of 60 rpm using a Brookfield rotary viscometer TVB-10 (trade name, manufactured by Toki Sangyo Co., Ltd.).
- Surface tension was measured by a platinum plate method in accordance with JIS K 2241.
- pH was measured at 25°C in accordance with JIS Z 8802.
- The amount of foam after adding 90 mL of the prepared aqueous working fluid to a 100 mL graduated cylinder, placing a lid on the graduated cylinder, vigorously shaking the graduated cylinder up and down 10 times, and leaving the graduated cylinder to stand still for 10 seconds was measured by reading the marked line on the graduated cylinder. It can be said that the smaller the amount of foam is, the better the antifoaming properties of the aqueous working fluid are.
- Using a multi wire saw and a fixed abrasive wire (an electrodeposited diamond wire), single crystal silicon ingot was cut into a silicon wafer while pouring the prepared aqueous working fluid onto the fixed abrasive wire.
- Then, total thickness variation (TTV) was measured to evaluate the flatness of the silicon wafer obtained by the above cutting, and the brittle material workability was evaluated based on the following criteria. TTV used in the flatness evaluation is a value expressed by the difference between the maximum thickness and the minimum thickness obtained by measuring the thickness of the resulting silicon wafer with a dial indicator, and it can be said that the smaller the value is, the higher the flatness of the silicon wafer is. In the present Examples, a dial indicator "DIGIMATIC INDICATOR ID-C112CX" (trade name, manufactured by Mitutoyo Corporation) was used.
-
- A: TTV is less than 10 µm.
- B: TTV is 10 µm or more and less than 15 µm.
- C: TTV is 15 µm or more.
- From Table 1, the aqueous working fluids of Examples 1 to 10 have good antifoaming properties and, excellent brittle material workability, in view of the viscosity characteristics and surface tension. In fact, the aqueous working fluid of Example 1 had a TTV value of less than 10 µm and was confirmed as having excellent brittle material workability.
- On the other hand, from Table 2, the aqueous working fluids of Comparative Examples 2 to 5 have excessively low or high viscosity, and are thus considered as being problematic in brittle material workability. Also, the aqueous working fluids of Comparative Examples 6 and 7 have high surface tension and, likewise, are considered as being problematic in brittle material workability. In fact, the aqueous working fluids of Comparative Examples 5 and 6 had a TTV value of 10 µm or more, and were confirmed as having poorer brittle material workability than the aqueous working fluid of Example 1. Concerning the aqueous working fluid of Comparative Example 1, the experiment was terminated without measurement and evaluation of physical properties because water-insoluble polyoxyethylene ether blended did not dissolve in water.
Example 1 | Example 2 | Exampl e 3 | Example 4 | Example 5 | Example 6 | Example 7 | Example 8 | Example 9 | Example 10 | ||||
Composition of aqueous working fluid | Component (A) | DEG | % by mass | 75.900 | - | - | - | 85.000 | 75.900 | - | - | 75.900 | 75.900 |
Component (A) | PEG200 | % by mass | - | 65.900 | - | - | - | - | - | - | - | - | |
Component (A) | PEG400 | % by mass | - | - | 55.900 | - | - | - | - | - | - | - | |
Component (A) | PEG600 | % by mass | - | - | - | 40.000 | - | - | 40.000 | 40.000 | - | - | |
- | PEG13000 | % by mass | - | - | - | - | - | - | - | - | - | - | |
Component (B) | Water-insoluble polyoxyethylene ether | % by mass | 0.005 | 0.005 | 0.005 | 0.005 | 0.005 | - | - | - | 0.010 | 0.0005 | |
Component (B) | EO adduct of water-insoluble acetylene glycol (1) | % by mass | - | - | - | - | - | 0.500 | 0.500 | - | - | - | |
Component (B) | EO adduct of water-insoluble acetylene glycol (2) | % by mass | - | - | - | - | - | - | - | 0.500 | - | - | |
- | EO adduct of water-soluble acetylene glycol | % by mass | - | - | - | - | - | - | - | - | - | - | |
Component (D) | Isononanoic acid | % by mass | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | |
Component (E) | Triisopropanolamine | % by mass | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | |
Component (C) | Ion exchanged water | % by mass | 24.065 | 34.065 | 44.065 | 59.965 | 14.965 | 23.570 | 59.470 | 59.470 | 24.060 | 24.070 | |
Total amount | % by mass | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | ||
Ratio of content of component (B) to 100 parts by mass of component (A) | Part by mass | 0.0066 | 0.0076 | 0.0089 | 0.0125 | 0.0059 | 0.6588 | 1.2500 | 1.2500 | 0.0132 | 0.0007 | ||
Physical properties/ evaluation of aqueous working fluid | Viscosity at 25°C | mPa·s | 14.6 | 17.1 | 18.6 | 9.1 | 21.5 | 14.8 | 9.2 | 9.2 | 14.7 | 14.3 | |
Surface tension | mN/m | 34.3 | 34.7 | 34.4 | 32.7 | 34.3 | 35.3 | 28.5 | 29.3 | 33.9 | 42.5 | ||
pH | - | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | ||
Evaluation of antifoaming properties Amount of foam | mL | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 3.0 | 0.5 | 1.0 | 1.0 | 2.0 | ||
Evaluation of brittle material workability TTV | - | A | - | - | - | - | - | - | - | - | - |
Comparative Example 1 | Comparative Example 2 | Comparative Example 3 | Comparative Example 4 | Comparative Example 5 | Comparative Example 6 | Comparative Example 7 | ||||
Compositio n of aqueous working fluid | Component (A) | DEG | % by mass | - | - | 95.000 | - | 35.000 | 75.900 | 75.900 |
Component (A) | PEG200 | % by mass | - | - | - | - | - | - | - | |
Component (A) | PEG400 | % by mass | - | 10.000 | - | - | - | - | - | |
Component (A) | PEG600 | % by mass | - | - | - | - | - | - | - | |
- | PEG13000 | % by mass | - | - | - | 40.000 | - | - | - | |
Component (B) | Water-insoluble polyoxyethylene ether | % by mass | 0.005 | 0.005 | 0.005 | 0.005 | 0.005 | - | - | |
Component (B) | EO adduct of water-insoluble acetylene glycol (1) | % by mass | - | - | - | - | - | - | - | |
Component (B) | EO adduct of water-insoluble acetylene glycol (2) | % by mass | - | - | - | - | - | - | - | |
- | EO adduct of water-soluble acetylene glycol | % by mass | - | - - - | - | - | 0.005 | |||
Component (D) | Isononanoic acid | % by mass | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | 0.010 | |
Component (E) | Triisopropanolamine | % by mass | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | 0.020 | |
Component (C) | Ion exchanged water | % by mass | 99.965 | 89.965 | 4.965 | 59.965 | 64.965 | 24.070 | 24.065 | |
Total amount | % by mass | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | 100.000 | ||
Ratio of content of component (B) to 100 parts by mass of component (A) | Part by mass | - | 0.0500 | 0.0053 | - | 0.0143 | - | - | ||
Physical properties/ evaluation of aqueous working fluid | Viscosity at 25°C | mPa·s | *1 | 1.5 | 30.2 | 298.0 | 3.0 | 15.1 | 14.6 | |
Surface tension | mN/m | *1 | 32.3 | 34.8 | 37.8 | 33.2 | 47.9 | 47.8 | ||
pH | - | *1 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | 7.3 | ||
Evaluation of antifoaming properties Amount of foam | mL | *1 | 4.0 | 1.0 | *2 | 4.0 | 2.0 | 6.0 | ||
Evaluation of brittle material workability TTV | - | - | - | - | - | C | B | - |
*1 The experiment was terminated without measurement and evaluation of physical properties because water-insoluble polyoxyethylene ether blended did not dissolve in water. *2 It was not possible to evaluate antifoaming properties because of high viscosity. |
Claims (15)
- An aqueous working fluid comprising compound (A) represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group,
wherein the aqueous working fluid has a viscosity at 25°C of 4.0 to 26.0 mPa·s:A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; andm is an integer of 1 or more. - The aqueous working fluid according to claim 1, having a surface tension of 45.0 mN/m or less.
- The aqueous working fluid according to claim 1 or 2, having a content of component (A) of 15.0 to 95.0% by mass based on the total amount of the aqueous working fluid.
- The aqueous working fluid according to any one of claims 1 to 3, having a content of component (B) of 0.0001 to 1.0% by mass based on the total amount of the aqueous working fluid.
- The aqueous working fluid according to any one of claims 1 to 4, wherein a ratio of the content of component (B) to 100 parts by mass of component (A) is 0.0001 to 1.80 parts by mass.
- The aqueous working fluid according to any one of claims 1 to 5, wherein component (A) comprises one or more selected from diethylene glycol, dipropylene glycol, polyethylene glycol, and polypropylene glycol.
- The aqueous working fluid according to any one of claims 1 to 6, wherein component (B) comprises one or more selected from water-insoluble polyoxyalkylene ether (B1) represented by the following general formula (b-1) and an alkylene oxide adduct of water-insoluble acetylene glycol (B2) represented by the following general formula (b-2):A1 to A3 are each independently an alkylene group having 2 to 4 carbon atoms;Ra to Re are each independently a hydrogen atom, an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group;R1 to R3 are each independently an alkyl group, a cycloalkyl group optionally having an alkyl group, or an aryl group optionally having an alkyl group; andn, p, and q are each independently an integer of 1 or more.
- The aqueous working fluid according to any one of claims 1 to 7, further comprising (C) water.
- The aqueous working fluid according to claim 8, wherein a content of the component (C) is 5.0 to 70.0% by mass based on the total amount of the aqueous working fluid.
- The aqueous working fluid according to any one of claims 1 to 9, having a pH of 4.0 to 10.0.
- The aqueous working fluid according to any one of claims 1 to 10, which is used when cutting a brittle material by means of a wire saw.
- A concentrate for an aqueous working fluid, comprising compound (A) represented by the following general formula (a-1) and having a weight average molecular weight of 12,000 or less, and water-insoluble compound (B) having a polyoxyalkylene group:A is an alkylene group having 2 to 4 carbon atoms, and when there is a plurality of A, the plurality of A may be the same or different; andm is an integer of 1 or more.
- The concentrate for an aqueous working fluid according to claim 12, which is capable of preparing an aqueous working fluid having a viscosity at 25°C of 4.0 to 20.0 mPa·s by being diluted with water.
- Use of an aqueous working fluid, wherein the aqueous working fluid according to any one of claims 1 to 11 is applied to the step of cutting a brittle material by means of a wire saw.
- A method for processing a brittle material, comprising the step of cutting a brittle material by means of a wire saw with applying the aqueous working fluid according to any one of claims 1 to 11.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2021055460 | 2021-03-29 | ||
PCT/JP2022/014260 WO2022210328A1 (en) | 2021-03-29 | 2022-03-25 | Aqueous processing liquid |
Publications (1)
Publication Number | Publication Date |
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EP4317384A1 true EP4317384A1 (en) | 2024-02-07 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP22780542.1A Pending EP4317384A1 (en) | 2021-03-29 | 2022-03-25 | Aqueous processing liquid |
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EP (1) | EP4317384A1 (en) |
JP (1) | JPWO2022210328A1 (en) |
KR (1) | KR20230161470A (en) |
CN (1) | CN116981759A (en) |
TW (1) | TW202248405A (en) |
WO (1) | WO2022210328A1 (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5698294A (en) * | 1980-01-09 | 1981-08-07 | Honda Motor Co Ltd | Water-soluble cutting oil |
JP4497767B2 (en) | 2001-09-06 | 2010-07-07 | ユシロ化学工業株式会社 | Water-soluble machining fluid composition for fixed abrasive wire saw |
JP5464055B2 (en) * | 2009-06-02 | 2014-04-09 | 日信化学工業株式会社 | Water-based cutting fluid and water-based cutting agent |
JP5780423B2 (en) * | 2011-07-25 | 2015-09-16 | 日油株式会社 | Water-based cutting fluid and water-based cutting agent |
JP6204029B2 (en) * | 2013-03-06 | 2017-09-27 | 出光興産株式会社 | Aqueous processing fluid |
JP5750525B2 (en) * | 2014-03-10 | 2015-07-22 | ユシロ化学工業株式会社 | Water-soluble machining fluid for fixed abrasive wire saws |
JP6860266B2 (en) * | 2017-03-17 | 2021-04-14 | 出光興産株式会社 | Brittle material processing liquid |
-
2022
- 2022-03-25 JP JP2023511160A patent/JPWO2022210328A1/ja active Pending
- 2022-03-25 KR KR1020237035850A patent/KR20230161470A/en unknown
- 2022-03-25 CN CN202280019859.XA patent/CN116981759A/en active Pending
- 2022-03-25 EP EP22780542.1A patent/EP4317384A1/en active Pending
- 2022-03-25 TW TW111111442A patent/TW202248405A/en unknown
- 2022-03-25 WO PCT/JP2022/014260 patent/WO2022210328A1/en active Application Filing
Also Published As
Publication number | Publication date |
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WO2022210328A1 (en) | 2022-10-06 |
JPWO2022210328A1 (en) | 2022-10-06 |
CN116981759A (en) | 2023-10-31 |
TW202248405A (en) | 2022-12-16 |
KR20230161470A (en) | 2023-11-27 |
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