TW202248405A - Aqueous processing liquid - Google Patents
Aqueous processing liquid Download PDFInfo
- Publication number
- TW202248405A TW202248405A TW111111442A TW111111442A TW202248405A TW 202248405 A TW202248405 A TW 202248405A TW 111111442 A TW111111442 A TW 111111442A TW 111111442 A TW111111442 A TW 111111442A TW 202248405 A TW202248405 A TW 202248405A
- Authority
- TW
- Taiwan
- Prior art keywords
- mass
- processing fluid
- less
- aqueous
- aqueous processing
- Prior art date
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- 239000007788 liquid Substances 0.000 title abstract description 4
- 150000001875 compounds Chemical class 0.000 claims abstract description 25
- 125000002947 alkylene group Chemical group 0.000 claims abstract description 24
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 172
- 239000000463 material Substances 0.000 claims description 48
- 238000003754 machining Methods 0.000 claims description 39
- 125000000217 alkyl group Chemical group 0.000 claims description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 18
- 238000005520 cutting process Methods 0.000 claims description 17
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims description 16
- 239000012141 concentrate Substances 0.000 claims description 15
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 10
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 10
- ZUQAPLKKNAQJAU-UHFFFAOYSA-N acetylenediol Chemical compound OC#CO ZUQAPLKKNAQJAU-UHFFFAOYSA-N 0.000 claims description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 9
- 239000002202 Polyethylene glycol Substances 0.000 claims description 8
- 229920001223 polyethylene glycol Polymers 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- 125000003118 aryl group Chemical group 0.000 claims description 6
- 238000007865 diluting Methods 0.000 claims description 4
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 claims description 2
- 229920001451 polypropylene glycol Polymers 0.000 claims description 2
- -1 ether compound Chemical class 0.000 description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000000654 additive Substances 0.000 description 10
- 239000006061 abrasive grain Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 229920006395 saturated elastomer Polymers 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 7
- GHVNFZFCNZKVNT-UHFFFAOYSA-N decanoic acid Chemical compound CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 6
- 239000004615 ingredient Substances 0.000 description 6
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- XDOFQFKRPWOURC-UHFFFAOYSA-N 16-methylheptadecanoic acid Chemical compound CC(C)CCCCCCCCCCCCCCC(O)=O XDOFQFKRPWOURC-UHFFFAOYSA-N 0.000 description 4
- 239000006260 foam Substances 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- VKOBVWXKNCXXDE-UHFFFAOYSA-N icosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCC(O)=O VKOBVWXKNCXXDE-UHFFFAOYSA-N 0.000 description 4
- 150000002763 monocarboxylic acids Chemical class 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229940051841 polyoxyethylene ether Drugs 0.000 description 4
- 229920000056 polyoxyethylene ether Polymers 0.000 description 4
- 238000003672 processing method Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 239000005632 Capric acid (CAS 334-48-5) Substances 0.000 description 3
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 3
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- SXJBHJCKWQIWHA-UHFFFAOYSA-N 2-ethyl-2,3,3-trimethylbutanoic acid Chemical compound CCC(C)(C(O)=O)C(C)(C)C SXJBHJCKWQIWHA-UHFFFAOYSA-N 0.000 description 2
- VCIMZVUJVMTQMG-UHFFFAOYSA-N 7-methyloctanoic acid 3,5,5-trimethylhexanoic acid Chemical compound CC(C)CCCCCC(O)=O.OC(=O)CC(C)CC(C)(C)C VCIMZVUJVMTQMG-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 150000003973 alkyl amines Chemical class 0.000 description 2
- MBMBGCFOFBJSGT-KUBAVDMBSA-N all-cis-docosa-4,7,10,13,16,19-hexaenoic acid Chemical compound CC\C=C/C\C=C/C\C=C/C\C=C/C\C=C/C\C=C/CCC(O)=O MBMBGCFOFBJSGT-KUBAVDMBSA-N 0.000 description 2
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 2
- 229940043276 diisopropanolamine Drugs 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-MDZDMXLPSA-N elaidic acid Chemical compound CCCCCCCC\C=C\CCCCCCCC(O)=O ZQPPMHVWECSIRJ-MDZDMXLPSA-N 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- LIWAQLJGPBVORC-UHFFFAOYSA-N ethylmethylamine Chemical compound CCNC LIWAQLJGPBVORC-UHFFFAOYSA-N 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- YYVJAABUJYRQJO-UHFFFAOYSA-N isomyristic acid Chemical compound CC(C)CCCCCCCCCCC(O)=O YYVJAABUJYRQJO-UHFFFAOYSA-N 0.000 description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- GVWISOJSERXQBM-UHFFFAOYSA-N n-methylpropan-1-amine Chemical compound CCCNC GVWISOJSERXQBM-UHFFFAOYSA-N 0.000 description 2
- CRSOQBOWXPBRES-UHFFFAOYSA-N neopentane Chemical compound CC(C)(C)C CRSOQBOWXPBRES-UHFFFAOYSA-N 0.000 description 2
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 description 2
- HQHCYKULIHKCEB-UHFFFAOYSA-N tetradecanedioic acid Chemical compound OC(=O)CCCCCCCCCCCCC(O)=O HQHCYKULIHKCEB-UHFFFAOYSA-N 0.000 description 2
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 2
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 150000003628 tricarboxylic acids Chemical class 0.000 description 2
- SZHOJFHSIKHZHA-UHFFFAOYSA-N tridecanoic acid Chemical compound CCCCCCCCCCCCC(O)=O SZHOJFHSIKHZHA-UHFFFAOYSA-N 0.000 description 2
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- LWBHHRRTOZQPDM-UHFFFAOYSA-N undecanedioic acid Chemical compound OC(=O)CCCCCCCCCC(O)=O LWBHHRRTOZQPDM-UHFFFAOYSA-N 0.000 description 2
- ZDPHROOEEOARMN-UHFFFAOYSA-N undecanoic acid Chemical compound CCCCCCCCCCC(O)=O ZDPHROOEEOARMN-UHFFFAOYSA-N 0.000 description 2
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 2
- OBETXYAYXDNJHR-SSDOTTSWSA-M (2r)-2-ethylhexanoate Chemical compound CCCC[C@@H](CC)C([O-])=O OBETXYAYXDNJHR-SSDOTTSWSA-M 0.000 description 1
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 1
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- OTJFQRMIRKXXRS-UHFFFAOYSA-N (hydroxymethylamino)methanol Chemical compound OCNCO OTJFQRMIRKXXRS-UHFFFAOYSA-N 0.000 description 1
- CEGRHPCDLKAHJD-UHFFFAOYSA-N 1,1,1-propanetricarboxylic acid Chemical compound CCC(C(O)=O)(C(O)=O)C(O)=O CEGRHPCDLKAHJD-UHFFFAOYSA-N 0.000 description 1
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical group C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 1
- BFIAIMMAHAIVFT-UHFFFAOYSA-N 1-[bis(2-hydroxybutyl)amino]butan-2-ol Chemical compound CCC(O)CN(CC(O)CC)CC(O)CC BFIAIMMAHAIVFT-UHFFFAOYSA-N 0.000 description 1
- KODLUXHSIZOKTG-UHFFFAOYSA-N 1-aminobutan-2-ol Chemical compound CCC(O)CN KODLUXHSIZOKTG-UHFFFAOYSA-N 0.000 description 1
- RMSGQZDGSZOJMU-UHFFFAOYSA-N 1-butyl-2-phenylbenzene Chemical group CCCCC1=CC=CC=C1C1=CC=CC=C1 RMSGQZDGSZOJMU-UHFFFAOYSA-N 0.000 description 1
- FRPZMMHWLSIFAZ-UHFFFAOYSA-N 10-undecenoic acid Chemical compound OC(=O)CCCCCCCCC=C FRPZMMHWLSIFAZ-UHFFFAOYSA-N 0.000 description 1
- QFGCFKJIPBRJGM-UHFFFAOYSA-N 12-[(2-methylpropan-2-yl)oxy]-12-oxododecanoic acid Chemical compound CC(C)(C)OC(=O)CCCCCCCCCCC(O)=O QFGCFKJIPBRJGM-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- NPMHELYJLOUPIZ-UHFFFAOYSA-N 2,2,3,4-tetramethylpentanoic acid Chemical compound CC(C)C(C)C(C)(C)C(O)=O NPMHELYJLOUPIZ-UHFFFAOYSA-N 0.000 description 1
- VUAXHMVRKOTJKP-UHFFFAOYSA-N 2,2-dimethylbutyric acid Chemical compound CCC(C)(C)C(O)=O VUAXHMVRKOTJKP-UHFFFAOYSA-N 0.000 description 1
- IKNDGHRNXGEHTO-UHFFFAOYSA-N 2,2-dimethyloctanoic acid Chemical compound CCCCCCC(C)(C)C(O)=O IKNDGHRNXGEHTO-UHFFFAOYSA-N 0.000 description 1
- OWEMTCOXFULTNW-UHFFFAOYSA-N 2,3-dimethyl-2-propan-2-ylbutanoic acid Chemical compound CC(C)C(C)(C(C)C)C(O)=O OWEMTCOXFULTNW-UHFFFAOYSA-N 0.000 description 1
- NWPCFCBFUXXJIE-UHFFFAOYSA-N 2-(hydroxymethylamino)ethanol Chemical compound OCCNCO NWPCFCBFUXXJIE-UHFFFAOYSA-N 0.000 description 1
- GVNHOISKXMSMPX-UHFFFAOYSA-N 2-[butyl(2-hydroxyethyl)amino]ethanol Chemical compound CCCCN(CCO)CCO GVNHOISKXMSMPX-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- QFWGJUQOWNHFKT-UHFFFAOYSA-N 2-tert-butyl-2,5,5-trimethylhexanoic acid Chemical compound CC(C)(C)CCC(C)(C(O)=O)C(C)(C)C QFWGJUQOWNHFKT-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- AWQSAIIDOMEEOD-UHFFFAOYSA-N 5,5-Dimethyl-4-(3-oxobutyl)dihydro-2(3H)-furanone Chemical compound CC(=O)CCC1CC(=O)OC1(C)C AWQSAIIDOMEEOD-UHFFFAOYSA-N 0.000 description 1
- XZOYHFBNQHPJRQ-UHFFFAOYSA-N 7-methyloctanoic acid Chemical compound CC(C)CCCCCC(O)=O XZOYHFBNQHPJRQ-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- YWWVWXASSLXJHU-UHFFFAOYSA-N 9E-tetradecenoic acid Natural products CCCCC=CCCCCCCCC(O)=O YWWVWXASSLXJHU-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- DPUOLQHDNGRHBS-UHFFFAOYSA-N Brassidinsaeure Natural products CCCCCCCCC=CCCCCCCCCCCCC(O)=O DPUOLQHDNGRHBS-UHFFFAOYSA-N 0.000 description 1
- FTLXOZDSNKVPQJ-UHFFFAOYSA-N CC(C(C(=O)O)(C(=O)O)C(=O)O)CCCCCCCC Chemical compound CC(C(C(=O)O)(C(=O)O)C(=O)O)CCCCCCCC FTLXOZDSNKVPQJ-UHFFFAOYSA-N 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- URXZXNYJPAJJOQ-UHFFFAOYSA-N Erucic acid Natural products CCCCCCC=CCCCCCCCCCCCC(O)=O URXZXNYJPAJJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 239000005639 Lauric acid Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- 229920000604 Polyethylene Glycol 200 Polymers 0.000 description 1
- 229920002565 Polyethylene Glycol 400 Polymers 0.000 description 1
- 229920002582 Polyethylene Glycol 600 Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- ITBPIKUGMIZTJR-UHFFFAOYSA-N [bis(hydroxymethyl)amino]methanol Chemical compound OCN(CO)CO ITBPIKUGMIZTJR-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- JAZBEHYOTPTENJ-JLNKQSITSA-N all-cis-5,8,11,14,17-icosapentaenoic acid Chemical compound CC\C=C/C\C=C/C\C=C/C\C=C/C\C=C/CCCC(O)=O JAZBEHYOTPTENJ-JLNKQSITSA-N 0.000 description 1
- ZRYCZAWRXHAAPZ-UHFFFAOYSA-N alpha,alpha-dimethyl valeric acid Chemical compound CCCC(C)(C)C(O)=O ZRYCZAWRXHAAPZ-UHFFFAOYSA-N 0.000 description 1
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 235000020661 alpha-linolenic acid Nutrition 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 125000002178 anthracenyl group Chemical group C1(=CC=CC2=CC3=CC=CC=C3C=C12)* 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 229960004365 benzoic acid Drugs 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 1
- ZNFNDZCXTPWRLQ-UHFFFAOYSA-N butane-1,1,1-tricarboxylic acid Chemical compound CCCC(C(O)=O)(C(O)=O)C(O)=O ZNFNDZCXTPWRLQ-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- KHAVLLBUVKBTBG-UHFFFAOYSA-N caproleic acid Natural products OC(=O)CCCCCCCC=C KHAVLLBUVKBTBG-UHFFFAOYSA-N 0.000 description 1
- GTZCVFVGUGFEME-IWQZZHSRSA-N cis-aconitic acid Chemical compound OC(=O)C\C(C(O)=O)=C\C(O)=O GTZCVFVGUGFEME-IWQZZHSRSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- GXFFCJFXZPEAKI-UHFFFAOYSA-N decane-1,1,1-tricarboxylic acid Chemical compound CCCCCCCCCC(C(O)=O)(C(O)=O)C(O)=O GXFFCJFXZPEAKI-UHFFFAOYSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- WDNQRCVBPNOTNV-UHFFFAOYSA-N dinonylnaphthylsulfonic acid Chemical class C1=CC=C2C(S(O)(=O)=O)=C(CCCCCCCCC)C(CCCCCCCCC)=CC2=C1 WDNQRCVBPNOTNV-UHFFFAOYSA-N 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 235000020669 docosahexaenoic acid Nutrition 0.000 description 1
- 229940090949 docosahexaenoic acid Drugs 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 235000020673 eicosapentaenoic acid Nutrition 0.000 description 1
- 229960005135 eicosapentaenoic acid Drugs 0.000 description 1
- JAZBEHYOTPTENJ-UHFFFAOYSA-N eicosapentaenoic acid Natural products CCC=CCC=CCC=CCC=CCC=CCCCC(O)=O JAZBEHYOTPTENJ-UHFFFAOYSA-N 0.000 description 1
- DPUOLQHDNGRHBS-KTKRTIGZSA-N erucic acid Chemical compound CCCCCCCC\C=C/CCCCCCCCCCCC(O)=O DPUOLQHDNGRHBS-KTKRTIGZSA-N 0.000 description 1
- BEFDCLMNVWHSGT-UHFFFAOYSA-N ethenylcyclopentane Chemical compound C=CC1CCCC1 BEFDCLMNVWHSGT-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000005469 ethylenyl group Chemical group 0.000 description 1
- 239000000417 fungicide Substances 0.000 description 1
- VZCCETWTMQHEPK-UHFFFAOYSA-N gamma-Linolensaeure Natural products CCCCCC=CCC=CCC=CCCCCC(O)=O VZCCETWTMQHEPK-UHFFFAOYSA-N 0.000 description 1
- VZCCETWTMQHEPK-QNEBEIHSSA-N gamma-linolenic acid Chemical compound CCCCC\C=C/C\C=C/C\C=C/CCCCC(O)=O VZCCETWTMQHEPK-QNEBEIHSSA-N 0.000 description 1
- 235000020664 gamma-linolenic acid Nutrition 0.000 description 1
- 229960002733 gamolenic acid Drugs 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- ZHYZQXUYZJNEHD-VQHVLOKHSA-N geranic acid Chemical compound CC(C)=CCC\C(C)=C\C(O)=O ZHYZQXUYZJNEHD-VQHVLOKHSA-N 0.000 description 1
- 229930008392 geranic acid Natural products 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- KEMQGTRYUADPNZ-UHFFFAOYSA-N heptadecanoic acid Chemical compound CCCCCCCCCCCCCCCCC(O)=O KEMQGTRYUADPNZ-UHFFFAOYSA-N 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- IPCSVZSSVZVIGE-UHFFFAOYSA-M hexadecanoate Chemical compound CCCCCCCCCCCCCCCC([O-])=O IPCSVZSSVZVIGE-UHFFFAOYSA-M 0.000 description 1
- SEIUOYFQDIJJEO-UHFFFAOYSA-N hexane-1,1,1-tricarboxylic acid Chemical compound CCCCCC(C(O)=O)(C(O)=O)C(O)=O SEIUOYFQDIJJEO-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- MTNDZQHUAFNZQY-UHFFFAOYSA-N imidazoline Chemical compound C1CN=CN1 MTNDZQHUAFNZQY-UHFFFAOYSA-N 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- YAQXGBBDJYBXKL-UHFFFAOYSA-N iron(2+);1,10-phenanthroline;dicyanide Chemical compound [Fe+2].N#[C-].N#[C-].C1=CN=C2C3=NC=CC=C3C=CC2=C1.C1=CN=C2C3=NC=CC=C3C=CC2=C1 YAQXGBBDJYBXKL-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 125000000654 isopropylidene group Chemical group C(C)(C)=* 0.000 description 1
- 229960004488 linolenic acid Drugs 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000006078 metal deactivator Substances 0.000 description 1
- 125000006178 methyl benzyl group Chemical group 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- LSHROXHEILXKHM-UHFFFAOYSA-N n'-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCN LSHROXHEILXKHM-UHFFFAOYSA-N 0.000 description 1
- AQGNVWRYTKPRMR-UHFFFAOYSA-N n'-[2-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCNCCN AQGNVWRYTKPRMR-UHFFFAOYSA-N 0.000 description 1
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- XCVNDBIXFPGMIW-UHFFFAOYSA-N n-ethylpropan-1-amine Chemical compound CCCNCC XCVNDBIXFPGMIW-UHFFFAOYSA-N 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- MAVABZCZTPTYNQ-UHFFFAOYSA-N octane-1,1,1-tricarboxylic acid Chemical compound CCCCCCCC(C(O)=O)(C(O)=O)C(O)=O MAVABZCZTPTYNQ-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- JLFNLZLINWHATN-UHFFFAOYSA-N pentaethylene glycol Chemical compound OCCOCCOCCOCCOCCO JLFNLZLINWHATN-UHFFFAOYSA-N 0.000 description 1
- DPBLXKKOBLCELK-UHFFFAOYSA-N pentan-1-amine Chemical compound CCCCCN DPBLXKKOBLCELK-UHFFFAOYSA-N 0.000 description 1
- IKIZWKVZMQYKLC-UHFFFAOYSA-N pentane-1,1,1-tricarboxylic acid Chemical compound CCCCC(C(O)=O)(C(O)=O)C(O)=O IKIZWKVZMQYKLC-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 229960005323 phenoxyethanol Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920001281 polyalkylene Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 1
- 229940083082 pyrimidine derivative acting on arteriolar smooth muscle Drugs 0.000 description 1
- 150000003230 pyrimidines Chemical class 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000004334 sorbic acid Substances 0.000 description 1
- 235000010199 sorbic acid Nutrition 0.000 description 1
- 229940075582 sorbic acid Drugs 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
- IBYFOBGPNPINBU-UHFFFAOYSA-N tetradecenoic acid Natural products CCCCCCCCCCCC=CC(O)=O IBYFOBGPNPINBU-UHFFFAOYSA-N 0.000 description 1
- VLLMWSRANPNYQX-UHFFFAOYSA-N thiadiazole Chemical compound C1=CSN=N1.C1=CSN=N1 VLLMWSRANPNYQX-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- IBYFOBGPNPINBU-OUKQBFOZSA-N trans-2-tetradecenoic acid Chemical compound CCCCCCCCCCC\C=C\C(O)=O IBYFOBGPNPINBU-OUKQBFOZSA-N 0.000 description 1
- GTZCVFVGUGFEME-UHFFFAOYSA-N trans-aconitic acid Natural products OC(=O)CC(C(O)=O)=CC(O)=O GTZCVFVGUGFEME-UHFFFAOYSA-N 0.000 description 1
- ZHYZQXUYZJNEHD-UHFFFAOYSA-N trans-geranic acid Natural products CC(C)=CCCC(C)=CC(O)=O ZHYZQXUYZJNEHD-UHFFFAOYSA-N 0.000 description 1
- DXNCZXXFRKPEPY-UHFFFAOYSA-N tridecanedioic acid Chemical compound OC(=O)CCCCCCCCCCCC(O)=O DXNCZXXFRKPEPY-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- FJOMYOIAMDJAAY-UHFFFAOYSA-N undecane-1,1,1-tricarboxylic acid Chemical compound CCCCCCCCCCC(C(O)=O)(C(O)=O)C(O)=O FJOMYOIAMDJAAY-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229960002703 undecylenic acid Drugs 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/18—Ethers, e.g. epoxides
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
- C10M107/20—Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
- C10M107/30—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
- C10M107/34—Polyoxyalkylenes
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
- C10M2207/126—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids monocarboxylic
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/105—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
- C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
- C10N2020/01—Physico-chemical properties
- C10N2020/04—Molecular weight; Molecular weight distribution
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/18—Anti-foaming property
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2070/00—Specific manufacturing methods for lubricant compositions
- C10N2070/02—Concentrating of additives
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Lubricants (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
Description
發明領域 本發明是有關於水性加工液、水性加工液用濃縮液、水性加工液之用途及使用了該水性加工液的脆性材料之加工方法。 field of invention The present invention relates to an aqueous processing fluid, a concentrated solution for aqueous processing fluid, uses of the aqueous processing fluid, and a processing method for brittle materials using the aqueous processing fluid.
背景技術 製造半導體製品時，必須切割屬於脆性材料之矽錠，從切割精度及生產性之觀點來看，一般會利用線鋸加工。在此，切割矽錠時包括以下方式：游離磨粒方式，係於已令磨粒分散於加工液之狀態下切割矽錠；及固定磨粒方式，係於已預先將磨粒固定於鋸線表面之狀態下切割矽錠。目前已提出各種能適當用於各個磨粒方式的加工液。 例如，專利文獻1中揭示的發明是有關於一種固定磨粒線鋸用水溶性加工液組成物，特徵在於其係在切割稀土類磁石以外的加工材料時使用，且含有(A)二醇類。 Background technique When manufacturing semiconductor products, silicon ingots, which are brittle materials, must be cut. From the perspective of cutting accuracy and productivity, wire saws are generally used for processing. Here, the cutting of silicon ingots includes the following methods: the free abrasive method, which is to cut the silicon ingot in the state where the abrasive particles have been dispersed in the processing fluid; and the fixed abrasive method, which is to fix the abrasive particles on the saw wire in advance Cut the silicon ingot in the state of the surface. Various machining fluids which can be suitably used for each abrasive grain type have been proposed so far. For example, the invention disclosed in Patent Document 1 relates to a water-soluble working fluid composition for fixed abrasive wire saws, which is used when cutting materials other than rare earth magnets and contains (A) glycols.
先前技術文獻 專利文獻 專利文獻1：日本特開2003-82334號公報 prior art literature patent documents Patent Document 1: Japanese Patent Laid-Open No. 2003-82334
發明概要 發明欲解決之課題 此種情況下，必須要有一種比以往更容易適用於脆性材料之切割步驟的新穎水性加工液。 Summary of the invention The problem to be solved by the invention In this case, there must be a novel aqueous machining fluid that is easier than ever to adapt to the cutting step of brittle materials.
用以解決課題之手段
本發明提供一種水性加工液，其含有具特定結構且特定分子量之醚化合物及非水溶性聚氧伸烷基醚，並調整為預定黏度。具體而言，本發明提供例如下述態樣[1]~[15]。
[1]一種水性加工液，包含：
以下述通式(a-1)表示且重量平均分子量為12,000以下之化合物(A)；及
具有聚氧伸烷基之非水溶性化合物(B)；
前述水性加工液於25℃下的黏度為4.0~26.0mPa．s，
[化學式1]
發明效果 本發明較佳的一個態樣之水性加工液具有可提升加工性的各種特性(例如適度之黏度特性、表面張力小及良好之消泡性等)，因此可成為適合於脆性材料加工的水性加工液。 Invention effect The water-based processing fluid of a preferred aspect of the present invention has various characteristics that can improve processability (such as moderate viscosity characteristics, low surface tension, and good defoaming properties, etc.), so it can be suitable for processing brittle materials. liquid.
用以實施發明之形態 針對本說明書中所記載之數值範圍，可任意組合上限值及下限值。例如，當數值範圍記載為「宜為30~100，較佳為40~80」時，「30~80」之範圍或「40~100」之範圍亦包含於本說明書中所記載之數值範圍。又例如，當數值範圍記載為「宜為30以上，較佳為40以上，並且宜為100以下，較佳為80以下」時，「30~80」之範圍或「40~100」之範圍亦包含於本說明書中所記載之數值範圍。 此外，作為本說明書中所記載之數值範圍，例如「60~100」之記載，意指「60以上、100以下」之範圍。 再者，本說明書中所記載之上限值及下限值之規定中，可從各個選項中適當選擇並且任意組合來規定下限值~上限值之數值範圍。 又，記載作為本說明書中所記載之較佳態樣的各種要件可組合複數種。 form for carrying out the invention For the numerical range described in this specification, the upper limit and the lower limit can be combined arbitrarily. For example, when the numerical range is described as "preferably 30-100, preferably 40-80", the range of "30-80" or "40-100" is also included in the numerical range described in this specification. For another example, when the numerical range is described as "preferably more than 30, preferably more than 40, and preferably less than 100, preferably less than 80", the range of "30~80" or "40~100" is also The numerical range described in this specification is included. In addition, as a numerical range described in this specification, description of "60-100", for example, means the range of "60 or more and 100 or less". In addition, in the specification of the upper limit value and the lower limit value described in this specification, the numerical range of the lower limit value to the upper limit value can be defined by appropriately selecting from each option and arbitrarily combining them. In addition, various requirements described as the preferred aspects described in this specification can be combined in plural.
[水性加工液之構造] 本發明之水性加工液係包含：以前述通式(a-1)表示且重量平均分子量為12,000以下之化合物(A)；及具有聚氧伸烷基之非水溶性化合物(B)；並將於25℃下的黏度調整為4.0~26.0mPa．s。 另，本發明之水性加工液是未經稀釋而直接用於被加工材加工的溶液。 另一方面，後述本發明之水性加工液用濃縮液則是能以水稀釋而作成具有上述黏度之水性加工液的溶液，並非是直接用於被加工材加工的溶液，此點有別於本發明之水性加工液。 [Structure of water-based machining fluid] The aqueous processing fluid of the present invention comprises: a compound (A) represented by the aforementioned general formula (a-1) and having a weight average molecular weight of 12,000 or less; and a water-insoluble compound (B) having a polyoxyalkylene group; and The viscosity at 25°C is adjusted to 4.0~26.0mPa. s. In addition, the aqueous working fluid of the present invention is a solution that is directly used for machining a workpiece without dilution. On the other hand, the concentrated solution for aqueous processing fluid of the present invention described later is a solution that can be diluted with water to make an aqueous processing fluid having the above-mentioned viscosity, and is not a solution directly used for processing the workpiece. This point is different from that of the present invention. Invented aqueous processing fluid.
本發明一個態樣的水性加工液是藉由含有成分(A)及成分(B)，調製成可提升加工性的各種特性，尤其是表面張力小的水性加工液。The aqueous processing fluid according to one aspect of the present invention contains component (A) and component (B), and is formulated to improve various characteristics of processability, especially an aqueous processing fluid with low surface tension.
又，本發明之水性加工液是將於25℃下的黏度設為4.0~26.0mPa．s，且具有適度之黏性特性，因此可作成脆性材料加工性優異的水性加工液。 從作成脆性材料加工性優異的水性加工液之觀點來看，本發明一個態樣的水性加工液於25℃下的黏度為4.0mPa．s以上，且宜為4.5mPa．s以上，較佳為5.0mPa．s以上，較佳為5.5mPa．s以上，較佳為6.0mPa．s以上，更佳為6.5mPa．s以上，更佳為7.0mPa．s以上，更佳為7.5mPa．s以上，再更佳為8.0mPa．s以上，再更佳為8.5mPa．s以上，尤宜為9.0mPa．s以上，亦可進一步設為9.5mPa．s以上、10.0mPa．s以上、10.5mPa．s以上、11.0mPa．s以上、11.5mPa．s以上、12.0mPa．s以上、12.5mPa．s以上、13.0mPa．s以上、13.5mPa．s以上或14.0mPa．s以上，並且為26.0mPa．s以下，且宜為25.0mPa．s以下，較佳為24.0mPa．s以下，較佳為23.0mPa．s以下，更佳為22.0mPa．s以下，更佳為21.0mPa．s以下，再更佳為20.5mPa．s以下，尤宜為20.0mPa．s以下，亦可進一步設為19.0mPa．s以下、18.0mPa．s以下、17.0mPa．s以下、16.0mPa．s以下或15.0mPa．s以下。 本說明書中，水性加工液於25℃下的黏度可利用實施例中記載的方法來測定。 Also, the viscosity of the aqueous processing fluid of the present invention at 25°C is set to 4.0~26.0mPa. s, and has moderate viscosity characteristics, so it can be made into an aqueous processing fluid with excellent processability for brittle materials. From the viewpoint of making an aqueous working fluid with excellent processability for brittle materials, the viscosity of the aqueous working fluid in one aspect of the present invention is 4.0 mPa at 25°C. s or more, and should be 4.5mPa. s or more, preferably 5.0mPa. s or more, preferably 5.5mPa. s or more, preferably 6.0mPa. s or more, more preferably 6.5mPa. s or more, more preferably 7.0mPa. s or more, more preferably 7.5mPa. s or more, more preferably 8.0mPa. s or more, and more preferably 8.5mPa. s or more, especially 9.0mPa. s or more, it can be further set to 9.5mPa. More than s, 10.0mPa. More than s, 10.5mPa. More than s, 11.0mPa. More than s, 11.5mPa. More than s, 12.0mPa. More than s, 12.5mPa. More than s, 13.0mPa. More than s, 13.5mPa. More than s or 14.0mPa. s or more, and 26.0mPa. s below, and should be 25.0mPa. s or less, preferably 24.0mPa. s or less, preferably 23.0mPa. s or less, more preferably 22.0mPa. s or less, more preferably 21.0mPa. s or less, more preferably 20.5mPa. s below, especially 20.0mPa. s below, can also be further set to 19.0mPa. Below s, 18.0mPa. Below s, 17.0mPa. Below s, 16.0mPa. s below or 15.0mPa. below s. In this specification, the viscosity of the aqueous working fluid at 25° C. can be measured by the method described in the examples.
從作成調整為上述黏度範圍的水性加工液之觀點來看，本發明一個態樣的水性加工液更可含有水(C)。 從作成可防止裝置或鋸線腐蝕的水性加工液之觀點來看，本發明一個態樣的水性加工液亦可含有選自羧酸類(D)及胺化合物(E)中之1種以上。 在不損及本發明效果之範圍內，本發明一個態樣的水性加工液亦可視需要含有成分(A)~(E)以外的其他添加劑。 From the viewpoint of preparing an aqueous working fluid adjusted to the above-mentioned viscosity range, the aqueous working fluid according to one aspect of the present invention may further contain water (C). From the viewpoint of making an aqueous working fluid capable of preventing corrosion of devices or saw wires, the aqueous working fluid according to one aspect of the present invention may contain one or more selected from carboxylic acids (D) and amine compounds (E). The aqueous machining fluid of one aspect of the present invention may optionally contain other additives other than components (A) to (E) within the scope of not impairing the effects of the present invention.
本發明一個態樣的水性加工液中，以該水性加工液之總量(100質量%)為基準計，成分(A)及(B)之合計含量宜為大於15質量%，較佳為大於20質量%，較佳為大於25質量%，更佳為大於30質量%，更佳為大於35質量%，再更佳為大於40質量%，尤宜為大於45質量%，亦可進一步設為大於50質量%、大於55質量%、大於60質量%、大於65質量%或大於70質量%，並且可設為100質量%以下、98質量%以下、96質量%以下、95質量%以下、93質量%以下或90質量%以下。In the aqueous processing fluid according to one aspect of the present invention, based on the total amount (100% by mass) of the aqueous processing fluid, the total content of components (A) and (B) is preferably greater than 15% by mass, preferably greater than 20% by mass, preferably greater than 25% by mass, more preferably greater than 30% by mass, more preferably greater than 35% by mass, more preferably greater than 40% by mass, especially preferably greater than 45% by mass, and can be further set to More than 50% by mass, more than 55% by mass, more than 60% by mass, more than 65% by mass, or more than 70% by mass, and can be set to 100% by mass or less, 98% by mass or less, 96% by mass or less, 95% by mass or less, 93% by mass Mass % or less or 90 mass % or less.
本發明一個態樣的水性加工液中，以該水性加工液中所含水(C)以外成分之總量(100質量%)為基準計，成分(A)及(B)之合計含量宜為70質量%以上，較佳為80質量%以上，更佳為90質量%以上，再更佳為95質量%以上，尤宜為98質量%以上，並且可設為100質量%以下、99.99質量%以下、99.90質量%以下或99.80質量%以下。In the aqueous processing fluid according to one aspect of the present invention, the total content of components (A) and (B) is preferably 70% by mass or more, preferably 80% by mass or more, more preferably 90% by mass or more, more preferably 95% by mass or more, especially preferably 98% by mass or more, and may be 100% by mass or less, 99.99% by mass less than, 99.90% by mass or less than 99.80% by mass.
本發明一個態樣的水性加工液中，以該水性加工液之總量(100質量%)為基準計，成分(A)、(B)及(C)之合計含量宜為20質量%以上，較佳為30質量%以上，較佳為40質量%以上，更佳為50質量%以上，更佳為60質量%以上，再更佳為70質量%以上，尤宜為75質量%以上，亦可進一步設為80質量%以上、85質量%以上、90質量%以上或95質量%以上，並且可設為100質量%以下、99.999質量%以下、99.99質量%以下或99.98質量%以下。 以下，說明本發明一個態樣的水性加工液中所含各成分。 In the aqueous processing fluid according to one aspect of the present invention, based on the total amount (100% by mass) of the aqueous processing fluid, the total content of components (A), (B) and (C) is preferably 20% by mass or more, Preferably at least 30% by mass, more preferably at least 40% by mass, more preferably at least 50% by mass, more preferably at least 60% by mass, even more preferably at least 70% by mass, especially preferably at least 75% by mass, and more preferably at least 75% by mass. It may further be 80 mass % or more, 85 mass % or more, 90 mass % or more, or 95 mass % or more, and may be 100 mass % or less, 99.999 mass % or less, 99.99 mass % or less, or 99.98 mass % or less. Hereinafter, each component contained in the aqueous machining fluid of one aspect of the present invention will be described.
＜成分(A)＞
本發明之水性加工液含有以下述通式(a-1)表示且重量平均分子量為12,000以下之化合物作為成分(A)。
藉由含有成分(A)，可作成脆性材料加工性優異的水性加工液。成分(A)可單獨使用，亦可併用2種以上。
[化學式4]
上述通式(a-1)中，A為碳數2~4之伸烷基，當存在有複數個A時，複數個A可相同亦可互異。m為1以上之整數，且宜為2以上之整數。 可選擇作為A之前述伸烷基可舉例如：伸乙基(-CH 2CH 2-)、亞乙基(-CH(CH 3)-)等碳數2之伸烷基；三亞甲基(-CH 2CH 2CH 2-)、伸丙基(-CH(CH 3)CH 2-)、亞丙基(-CHCH 2CH 3-)、亞異丙基(-C(CH 3) 2-)等碳數3之伸烷基；四亞甲基(-CH 2CH 2CH 2CH 2-)、1-甲基三亞甲基(-CH(CH 3)CH 2CH 2-)、2-甲基三亞甲基(-CH 2CH(CH 3)CH 2-)、伸丁基(-C(CH 3) 2CH 2-)等碳數4之伸烷基。該伸烷基可為直鏈伸烷基，亦可為支鏈伸烷基。 In the above general formula (a-1), A is an alkylene group having 2 to 4 carbon atoms. When there are multiple A, the multiple A may be the same or different. m is an integer of 1 or more, preferably an integer of 2 or more. The aforementioned alkylene group that can be selected as A can be, for example: an alkylene group with 2 carbons such as ethylidene (-CH 2 CH 2 -), ethylene (-CH(CH 3 )-); trimethylene ( -CH 2 CH 2 CH 2 -), Propylene (-CH(CH 3 )CH 2 -), Propylene (-CHCH 2 CH 3 -), Isopropylidene (-C(CH 3 ) 2 - ) and other alkylene groups with 3 carbons; tetramethylene (-CH 2 CH 2 CH 2 CH 2 -), 1-methyltrimethylene (-CH(CH 3 )CH 2 CH 2 -), 2- C4-alkylene groups such as methyltrimethylene (-CH 2 CH(CH 3 )CH 2 -) and butylene (-C(CH 3 ) 2 CH 2 -). The alkylene group may be a straight chain alkylene group or a branched chain alkylene group.
本發明一個態樣的水性加工液中，從作成脆性材料加工性優異的水性加工液之觀點來看，成分(A)宜包含選自二乙二醇、二丙二醇、聚乙二醇、聚丙二醇中之1種以上，更宜包含選自二乙二醇及聚乙二醇中之1種以上。In the aqueous working fluid according to one aspect of the present invention, from the viewpoint of producing an aqueous working fluid excellent in processability of brittle materials, component (A) preferably contains One or more of them, more preferably one or more selected from diethylene glycol and polyethylene glycol.
本發明一個態樣的水性加工液中，從作成脆性材料加工性優異的水性加工液之觀點來看，以該水性加工液中所含成分(A)之總量(100質量%)為基準計，二乙二醇及聚乙二醇之合計含有比率宜為30~100質量%，較佳為40~100質量%，較佳為50~100質量%，較佳為60~100質量%，更佳為70~100質量%，更佳為80~100質量%，再更佳為90~100質量%，尤宜為95~100質量%。In the aqueous working fluid of one aspect of the present invention, from the viewpoint of producing an aqueous working fluid excellent in the processability of brittle materials, the total amount (100% by mass) of the component (A) contained in the aqueous working fluid is used as a reference , the total content ratio of diethylene glycol and polyethylene glycol is preferably 30-100 mass%, preferably 40-100 mass%, preferably 50-100 mass%, preferably 60-100 mass%, more preferably It is preferably 70-100% by mass, more preferably 80-100% by mass, still more preferably 90-100% by mass, especially preferably 95-100% by mass.
從作成表面張力小的水性加工液、作成適合於脆性材料加工性的水性加工液之觀點來看，成分(A)之重量平均分子量為12,000以下，且宜為10,000以下，較佳為8,000以下，較佳為6,500以下，更佳為5,000以下，更佳為4,000以下，再更佳為3,000以下，再更佳為2,000以下，尤宜為1,000以下，亦可進一步設為900以下、800以下、700以下、600以下、500以下、450以下、400以下或350以下。 又，成分(A)之重量平均分子量並無特別限制下限，只要是作為成分(A)屬於最小分子量的乙二醇分子量之62以上即可，亦可進一步設為65以上、70以上、80以上、90以上或100以上。 另，本說明書中，重量平均分子量意指利用實施例中記載的方法測得之值。 From the viewpoint of making an aqueous working fluid with low surface tension and suitable for the processability of brittle materials, the weight average molecular weight of component (A) is 12,000 or less, preferably 10,000 or less, preferably 8,000 or less, It is preferably less than 6,500, more preferably less than 5,000, more preferably less than 4,000, more preferably less than 3,000, still more preferably less than 2,000, especially preferably less than 1,000, and can be further set to less than 900, less than 800, or less than 700 Below, below 600, below 500, below 450, below 400 or below 350. Also, the weight average molecular weight of the component (A) is not particularly limited, as long as it is 62 or more than the molecular weight of ethylene glycol, which is the minimum molecular weight of the component (A), and may be further set to 65 or more, 70 or more, or 80 or more. , more than 90 or more than 100. In addition, in this specification, a weight average molecular weight means the value measured by the method described in an Example.
本發明一個態樣的水性加工液中，從作成調整為上述黏度範圍且脆性材料加工性優異的水性加工液之觀點來看，以該水性加工液之總量(100質量%)為基準計，成分(A)之含量宜為15.0質量%以上，較佳為20質量%以上，較佳為25質量%以上，更佳為30質量%以上，更佳為35質量%以上，再更佳為40質量%以上，尤宜為45質量%以上，亦可進一步設為50質量%以上、55質量%以上、60質量%以上、65質量%以上或70質量%以上，並且宜為95.0質量%以下，較佳為92.0質量%以下，較佳為90.0質量%以下，更佳為87.0質量%以下，更佳為85.0質量%以下，再更佳為83.0質量%以下，尤宜為80.0質量%以下。In the aqueous working fluid of one aspect of the present invention, based on the total amount (100% by mass) of the aqueous working fluid, The content of component (A) is preferably at least 15.0% by mass, preferably at least 20% by mass, preferably at least 25% by mass, more preferably at least 30% by mass, more preferably at least 35% by mass, and still more preferably at least 40% by mass. More than 45% by mass, preferably 45% by mass or more, can be further set to 50% by mass, 55% by mass, 60% by mass, 65% by mass or 70% by mass, and preferably 95.0% by mass or less, Preferably it is 92.0 mass % or less, more preferably 90.0 mass % or less, more preferably 87.0 mass % or less, more preferably 85.0 mass % or less, still more preferably 83.0 mass % or less, especially preferably 80.0 mass % or less.
＜成分(B)＞ 本發明之水性加工液含有具有聚氧伸烷基之非水溶性化合物(B)作為成分(B)。 藉由含有成分(B)，可作成能將水性加工液之表面張力調小且脆性材料加工性優異的水性加工液。 成分(B)可單獨使用，亦可併用2種以上。 ＜Ingredient (B)＞ The aqueous processing fluid of the present invention contains the water-insoluble compound (B) having a polyoxyalkylene group as the component (B). By containing the component (B), it is possible to prepare an aqueous working fluid capable of reducing the surface tension of the aqueous working fluid and having excellent processability of brittle materials. Component (B) may be used individually or in combination of 2 or more types.
另，本說明書中，所謂「非水溶性化合物」，係於25℃之離子交換水99.9g中添加對象化合物0.1g並攪拌，於25℃下靜置24小時後，經目視確認對象化合物並未溶解時，即可將該對象化合物判定為非水溶性化合物。In addition, in this specification, the so-called "water-insoluble compound" refers to adding 0.1 g of the target compound to 99.9 g of ion-exchanged water at 25°C and stirring, and after standing still at 25°C for 24 hours, it was visually confirmed that the target compound was not When dissolved, the target compound can be judged as a water-insoluble compound.
從作成將表面張力調得更小且脆性材料加工性優異的水性加工液之觀點來看，本發明一個態樣中所用的成分(B)之HLB值宜為10.0以下，較佳為9.0以下，更佳為8.0以下，亦可進一步設為7.0以下、6.0以下、5.0以下或4.0以下，並且可設為大於0、1.0以上或2.0以上。 另，本說明書中，HLB值意指利用格利芬法(Griffin Method)算出之值。 From the viewpoint of making an aqueous working fluid with lower surface tension and excellent processability of brittle materials, the HLB value of component (B) used in one aspect of the present invention is preferably 10.0 or less, preferably 9.0 or less, More preferably, it is 8.0 or less, and may further be 7.0 or less, 6.0 or less, 5.0 or less, or 4.0 or less, and may be greater than 0, 1.0 or more, or 2.0 or more. In addition, in this specification, HLB value means the value calculated by the Griffin method (Griffin Method).
從作成將表面張力調得更小且脆性材料加工性優異的水性加工液之觀點來看，本發明一個態樣中所用的成分(B)宜包含選自下述通式(b-1)所示非水溶性聚氧伸烷基醚(B1)及下述通式(b-2)所示非水溶性乙炔二醇之氧化烯加成物(B2)中之1種以上。
[化學式5]
前述通式(b-1)及(b-2)中，A 1~A 3各自獨立為碳數2~4之伸烷基。 R a~R e各自獨立為氫原子、烷基、可具有烷基之環烷基或可具有烷基之芳基，且以氫原子或烷基為佳。 R 1~R 3各自獨立為烷基、可具有烷基之環烷基或可具有烷基之芳基，且以烷基為佳。 n、p、q各自獨立為1以上之整數。 In the aforementioned general formulas (b-1) and (b-2), A 1 to A 3 are each independently an alkylene group having 2 to 4 carbon atoms. R a to R e are each independently a hydrogen atom, an alkyl group, a cycloalkyl group that may have an alkyl group, or an aryl group that may have an alkyl group, preferably a hydrogen atom or an alkyl group. R 1 to R 3 are each independently an alkyl group, a cycloalkyl group that may have an alkyl group, or an aryl group that may have an alkyl group, and preferably an alkyl group. n, p, and q are each independently an integer of 1 or more.
可選擇作為A 1~A 3之碳數2~4之伸烷基可舉例：與上述可選擇作為前述通式(a-1)中的A之碳數2~4之伸烷基相同者，且以碳數2~3之伸烷基為佳，較佳為伸乙基、三亞甲基或伸丙基，更佳為伸乙基。該伸烷基可為直鏈伸烷基，亦可為支鏈伸烷基。 The alkylene group with 2 to 4 carbons that can be selected as A 1 to A 3 can be exemplified: the same as the alkylene group with 2 to 4 carbons that can be selected as A in the aforementioned general formula (a-1), Furthermore, an alkylene group having 2 to 3 carbon atoms is preferred, more preferably an ethylene group, a trimethylene group or a propylidene group, and more preferably an ethylene group. The alkylene group may be a straight chain alkylene group or a branched chain alkylene group.
可選擇作為R a~R e及R 1~R 3之烷基可舉例如：甲基、乙基、丙基(正丙基、異丙基)、丁基(正丁基、二級丁基、三級丁基、異丁基)、戊基、己基、庚基、辛基、2-乙基己基、壬基、1,1-二甲基庚基、癸基、十一基、十二基、十三基、十四基、十五基、十六基、十七基、十八基等，該等烷基可為直鏈烷基，亦可為支鏈烷基。該烷基之碳數宜為1~20，較佳為1~16，更佳為1~12，再更佳為1~10。 可選擇作為R a~R e及R 1~R 3之可具有烷基之環烷基可舉例如：環戊基、環己基、二甲基環己基、乙基環己基、丙基環己基、丁基環己基、庚基環己基等。該環烷基之形成環之碳數宜為5~18，較佳為5~12，更佳為6~10。 可選擇作為R a~R e及R 1~R 3之可具有烷基之芳基可舉例如：苯基、萘基、蒽基、聯苯基、聯三苯基、甲苯基、二甲基苯基、丁基苯基、壬基苯基、甲基苄基、二甲基萘基等。該芳基之形成環之碳數宜為6~24，較佳為6~18，更佳為6~12。 The alkyl groups that can be selected as R a ~ R e and R 1 ~ R 3 can be, for example: methyl, ethyl, propyl (n-propyl, isopropyl), butyl (n-butyl, secondary butyl) , tertiary butyl, isobutyl), pentyl, hexyl, heptyl, octyl, 2-ethylhexyl, nonyl, 1,1-dimethylheptyl, decyl, undecyl, dodecyl These alkyl groups may be straight-chain or branched-chain. The carbon number of the alkyl group is preferably 1-20, preferably 1-16, more preferably 1-12, even more preferably 1-10. The cycloalkyl group that can be selected as R a ~ R e and R 1 ~ R 3 may have an alkyl group, for example: cyclopentyl, cyclohexyl, dimethylcyclohexyl, ethylcyclohexyl, propylcyclohexyl, Butylcyclohexyl, heptylcyclohexyl, etc. The ring-forming carbon number of the cycloalkyl group is preferably 5-18, more preferably 5-12, more preferably 6-10. The aryl group that can be selected as R a ~ R e and R 1 ~ R 3 may have an alkyl group, for example: phenyl, naphthyl, anthracenyl, biphenyl, terphenyl, tolyl, dimethyl Phenyl, butylphenyl, nonylphenyl, methylbenzyl, dimethylnaphthyl, etc. The ring-forming carbon number of the aryl group is preferably 6-24, preferably 6-18, more preferably 6-12.
本發明一個態樣中所用的成分(B1)，宜為一前述通式(b-1)中的A 1為伸乙基、R a為氫原子、R 1為碳數1~20(宜為1~10)之烷基的非水溶性聚氧伸烷基醚。 又，本發明一個態樣中所用的成分(B2)，宜為一前述通式(b-2)中的A 2及A 3為伸乙基、R b及R c為氫原子、R d及R e各自獨立為氫原子或碳數1~10(宜為1~6，較佳為1~4，更佳為1~3)之烷基、R 2及R 3各自獨立為碳數1~20(宜為2~16，較佳為3~10，更佳為4~8，再更佳為4~6)之烷基(宜為支鏈烷基)的非水溶性乙炔二醇之氧化乙烯加成物。 The component (B1) used in one aspect of the present invention is preferably that A in the aforementioned general formula (b- 1 ) is an ethylenyl group, R is a hydrogen atom, and R is a carbon number of 1 to 20 (preferably 1~10) Alkyl water-insoluble polyoxyalkylene ether. Also, the component (B2) used in one aspect of the present invention is preferably that A2 and A3 in the aforementioned general formula (b- 2 ) are ethylidene groups, Rb and Rc are hydrogen atoms, Rd and R e are each independently a hydrogen atom or an alkyl group with 1 to 10 carbons (preferably 1 to 6, preferably 1 to 4, more preferably 1 to 3), R 2 and R 3 are each independently a carbon number of 1 to 3 Oxidation of water-insoluble acetylene diol with 20 (preferably 2~16, preferably 3~10, more preferably 4~8, more preferably 4~6) alkyl (preferably branched chain alkyl) Ethylene adducts.
本發明一個態樣的水性加工液中，從作成將表面張力調得更小且脆性材料加工性優異的水性加工液之觀點來看，以該水性加工液之總量(100質量%)為基準計，成分(B)之含量宜為0.0001質量%以上，較佳為0.0003質量%以上，較佳為0.0005質量%以上，更佳為0.0010質量%以上，更佳為0.0020質量%以上，再更佳為0.0030質量%以上，尤宜為0.0040質量%以上，並且宜為1.0質量%以下，較佳為0.80質量%以下，較佳為0.50質量%以下，更佳為0.30質量%以下，更佳為0.10質量%以下，再更佳為0.080質量%以下，尤宜為0.050質量%以下，亦可進一步設為0.030質量%以下、0.020質量%以下、0.010質量%以下、0.0090質量%以下、0.0080質量%以下或0.0070質量%以下。In the aqueous working fluid according to one aspect of the present invention, from the viewpoint of making an aqueous working fluid with a lower surface tension and excellent workability of brittle materials, based on the total amount (100% by mass) of the aqueous working fluid In total, the content of component (B) should be at least 0.0001% by mass, preferably at least 0.0003% by mass, more preferably at least 0.0005% by mass, more preferably at least 0.0010% by mass, more preferably at least 0.0020% by mass, and even more preferably 0.0030% by mass or more, especially preferably 0.0040% by mass or more, and preferably 1.0% by mass or less, preferably 0.80% by mass or less, more preferably 0.50% by mass or less, more preferably 0.30% by mass or less, more preferably 0.10% by mass or less. Mass % or less, more preferably 0.080 mass % or less, particularly preferably 0.050 mass % or less, may further be 0.030 mass % or less, 0.020 mass % or less, 0.010 mass % or less, 0.0090 mass % or less, 0.0080 mass % or less Or 0.0070% by mass or less.
本發明一個態樣的水性加工液中，從作成調整為上述黏度範圍、同時將表面張力調得更小且脆性材料加工性優異的水性加工液之觀點來看，成分(B)相對於成分(A)100質量份之含量比宜為0.0001質量份以上，較佳為0.0003質量份以上，較佳為0.0005質量份以上，更佳為0.0010質量份以上，更佳為0.0020質量份以上，再更佳為0.0030質量份以上，再更佳為0.0040質量份以上，尤宜為0.0050質量份以上，並且宜為1.80質量份以下，較佳為1.70質量份以下，較佳為1.50質量份以下，更佳為1.40質量份以下，再更佳為1.30質量份以下，尤宜為1.25質量份以下，亦可進一步設為1.00質量份以下、0.500質量份以下、0.100質量份以下、0.050質量份以下、0.020質量份以下或0.010質量份以下。In the aqueous working fluid according to one aspect of the present invention, component (B) is relative to component ( A) The content ratio per 100 parts by mass is preferably 0.0001 parts by mass or more, preferably 0.0003 parts by mass or more, preferably 0.0005 parts by mass or more, more preferably 0.0010 parts by mass or more, more preferably 0.0020 parts by mass or more, and even more preferably More than 0.0030 parts by mass, more preferably more than 0.0040 parts by mass, especially preferably more than 0.0050 parts by mass, and preferably less than 1.80 parts by mass, preferably less than 1.70 parts by mass, more preferably less than 1.50 parts by mass, more preferably 1.40 parts by mass or less, more preferably 1.30 parts by mass or less, particularly preferably 1.25 parts by mass or less, and may further be 1.00 parts by mass or less, 0.500 parts by mass or less, 0.100 parts by mass or less, 0.050 parts by mass or less, or 0.020 parts by mass or less than 0.010 parts by mass.
＜成分(C)＞ 從作成調整為上述黏度範圍的水性加工液之觀點來看，本發明一個態樣的水性加工液亦可進一步含有水作為成分(C)。 本發明一個態樣的水性加工液中，用作成分(C)的水可舉例如：超純水、純水、蒸餾水、離子交換水、自來水、工業用水等。 ＜Ingredient (C)＞ From the viewpoint of preparing an aqueous working fluid adjusted to the above-mentioned viscosity range, the aqueous working fluid according to one aspect of the present invention may further contain water as component (C). In the aqueous processing fluid of one aspect of the present invention, the water used as the component (C) includes, for example, ultrapure water, pure water, distilled water, ion-exchanged water, tap water, industrial water, and the like.
本發明一個態樣的水性加工液中，以該水性加工液之總量(100質量%)為基準計，成分(C)之含量宜為5.0質量%以上，較佳為7.0質量%以上，較佳為10.0質量%以上，更佳為12.0質量%以上，更佳為15.0質量%以上，再更佳為17.0質量%以上，尤宜為20.0質量%以上，並且宜為70.0質量%以下，較佳為67.0質量%以下，較佳為65.0質量%以下，更佳為63.0質量%以下，更佳為60.0質量%以下，再更佳為57.0質量%以下，尤宜為55.0質量%以下，亦可進一步設為50.0質量%以下、45.0質量%以下、40.0質量%以下、35.0質量%以下、或30.0質量%以下或27.0質量%以下。In the aqueous processing fluid according to one aspect of the present invention, based on the total amount (100% by mass) of the aqueous processing fluid, the content of component (C) is preferably at least 5.0% by mass, preferably at least 7.0% by mass, more preferably Preferably at least 10.0% by mass, more preferably at least 12.0% by mass, more preferably at least 15.0% by mass, still more preferably at least 17.0% by mass, especially preferably at least 20.0% by mass, and more preferably at least 70.0% by mass, more preferably at least 70.0% by mass 67.0% by mass or less, preferably 65.0% by mass or less, more preferably 63.0% by mass or less, more preferably 60.0% by mass or less, more preferably 57.0% by mass or less, especially preferably 55.0% by mass or less. It is 50.0 mass % or less, 45.0 mass % or less, 40.0 mass % or less, 35.0 mass % or less, or 30.0 mass % or less, or 27.0 mass % or less.
＜成分(D)＞ 從作成可防止裝置或鋸線腐蝕的水性加工液之觀點來看，本發明一個態樣的水性加工液亦可進一步含有羧酸類作為成分(D)。 成分(D)可單獨使用，亦可併用2種以上。 ＜Ingredient (D)＞ From the viewpoint of preparing an aqueous machining fluid capable of preventing corrosion of devices or saw wires, the aqueous machining fluid according to one aspect of the present invention may further contain carboxylic acids as component (D). Component (D) may be used individually or in combination of 2 or more types.
本發明一個態樣中用作成分(D)的羧酸可舉例如：飽和單羧酸、不飽和單羧酸、二羧酸、三羧酸等。 該等之中，本發明一個態樣中用作成分(D)的羧酸又以飽和單羧酸或不飽和單羧酸為佳，較佳為飽和單羧酸，更佳為支鏈飽和單羧酸。 The carboxylic acid used as the component (D) in one aspect of the present invention includes, for example, a saturated monocarboxylic acid, an unsaturated monocarboxylic acid, a dicarboxylic acid, a tricarboxylic acid, and the like. Among them, the carboxylic acid used as component (D) in one aspect of the present invention is preferably a saturated monocarboxylic acid or an unsaturated monocarboxylic acid, preferably a saturated monocarboxylic acid, more preferably a branched chain saturated monocarboxylic acid. carboxylic acid.
飽和單羧酸可舉例如：纈草酸、羊油酸、庚酸、羊脂酸、天竺葵酸、羊蠟酸、十一酸、月桂酸、十三酸、肉豆蔻酸、十五酸、軟脂酸、十七酸、硬脂酸、十九酸、花生酸、蘿酸等直鏈飽和單羧酸；異肉豆蔻酸、異軟脂酸、異硬脂酸、2,2-二甲基丙酸、2,2-二甲基丁酸、2,2-二甲基戊酸、2,2-二甲基辛酸、2-乙基-2,3,3-三甲基丁酸、2,2,3,4-四甲基戊酸、2,5,5-三甲基-2-三級丁基己酸、2,3,3-三甲基-2-乙基丁酸、2,3-二甲基-2-異丙基丁酸、2-乙基己酸、3,5,5-三甲基己酸(異壬酸)等支鏈飽和單羧酸等。該等之中，又以支鏈飽和單羧酸為佳，較佳為3,5,5-三甲基己酸(異壬酸)。 不飽和單羧酸可舉例如：十一烯酸、油酸、反油酸、芥子酸、二十四烯酸、亞麻油酸、γ-次亞麻油酸、花生油酸、α-次亞麻油酸、硬脂四烯酸、二十碳五烯酸及二十二碳六烯酸等。 二羧酸可舉例如：己二酸、庚二酸、辛二酸、壬二酸、癸二酸、十一烷二酸、十二烷二酸、十三烷二酸、十四烷二酸等。 三羧酸可舉例如：丙烷三甲酸、1-丙烯-1,2,3-三甲酸、丁烷三甲酸、戊烷三甲酸、己烷三甲酸、辛烷三甲酸、壬烷三甲酸、癸烷三甲酸、十一烷三甲酸、單甲基癸烷三甲酸等。 Examples of saturated monocarboxylic acids are: valeric acid, capric acid, heptanoic acid, capric acid, geranic acid, capric acid, undecanoic acid, lauric acid, tridecanoic acid, myristic acid, pentadecanoic acid, palmitate Straight-chain saturated monocarboxylic acids such as heptadecanic acid, stearic acid, nonadecanic acid, arachidic acid, and carotid acid; isomyristic acid, isostearic acid, isostearic acid, 2,2-dimethylpropane acid, 2,2-dimethylbutanoic acid, 2,2-dimethylpentanoic acid, 2,2-dimethyloctanoic acid, 2-ethyl-2,3,3-trimethylbutanoic acid, 2, 2,3,4-tetramethylpentanoic acid, 2,5,5-trimethyl-2-tertiary butylhexanoic acid, 2,3,3-trimethyl-2-ethylbutanoic acid, 2, 3-Dimethyl-2-isopropylbutanoic acid, 2-ethylhexanoic acid, 3,5,5-trimethylhexanoic acid (isononanoic acid) and other branched saturated monocarboxylic acids, etc. Among them, branched chain saturated monocarboxylic acid is preferred, more preferably 3,5,5-trimethylhexanoic acid (isononanoic acid). Examples of unsaturated monocarboxylic acids are: undecylenic acid, oleic acid, elaidic acid, erucic acid, tetradecenoic acid, linoleic acid, γ-linolenic acid, arachidic acid, α-linolenic acid , stearydonic acid, eicosapentaenoic acid and docosahexaenoic acid, etc. Examples of dicarboxylic acids include: adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, undecanedioic acid, dodecanedioic acid, tridecanedioic acid, tetradecanedioic acid Wait. Tricarboxylic acids can be, for example: propanetricarboxylic acid, 1-propene-1,2,3-tricarboxylic acid, butanetricarboxylic acid, pentanetricarboxylic acid, hexanetricarboxylic acid, octanetricarboxylic acid, nonanetricarboxylic acid, decane tricarboxylic acid, Alkane tricarboxylic acid, undecane tricarboxylic acid, monomethyl decane tricarboxylic acid, etc.
本發明一個態樣的水性加工液中，從作成可防止裝置或鋸線腐蝕的水性加工液之觀點來看，以該水性加工液之總量(100質量%)為基準計，成分(D)之含量宜為0.001質量%以上，較佳為0.003質量%以上，更佳為0.005質量%以上，再更佳為0.007質量%以上，尤宜為0.009質量%以上，並且宜為3.0質量%以下，較佳為2.0質量%以下，較佳為1.0質量%以下，更佳為0.50質量%以下，再更佳為0.20質量%以下，尤宜為0.10質量%以下。In the aqueous working fluid of one aspect of the present invention, from the viewpoint of making an aqueous working fluid capable of preventing corrosion of devices or saw wires, the component (D) is based on the total amount (100% by mass) of the aqueous working fluid. The content is preferably at least 0.001% by mass, preferably at least 0.003% by mass, more preferably at least 0.005% by mass, even more preferably at least 0.007% by mass, especially preferably at least 0.009% by mass, and preferably not more than 3.0% by mass. Preferably it is 2.0 mass % or less, more preferably 1.0 mass % or less, more preferably 0.50 mass % or less, still more preferably 0.20 mass % or less, especially preferably 0.10 mass % or less.
＜成分(E)＞ 從作成可防止裝置或鋸線腐蝕的水性加工液之觀點來看，本發明一個態樣的水性加工液亦可進一步含有胺化合物作為成分(E)。 成分(E)可單獨使用，亦可併用2種以上。 ＜Ingredient (E)＞ From the viewpoint of preparing an aqueous machining fluid capable of preventing corrosion of devices or saw wires, the aqueous machining fluid according to one aspect of the present invention may further contain an amine compound as component (E). Component (E) may be used individually or in combination of 2 or more types.
本發明一個態樣中用作成分(E)的胺化合物可舉例：烷基胺、烷醇胺及聚伸烷基聚胺等。 該等之中，本發明一個態樣中用作成分(E)的胺化合物又以烷醇胺為佳，較佳為碳數2~6之烷醇胺。 The amine compound used as the component (E) in one aspect of the present invention can be exemplified by alkylamines, alkanolamines, polyalkylenepolyamines, and the like. Among them, the amine compound used as component (E) in one aspect of the present invention is preferably an alkanolamine, more preferably an alkanolamine having 2 to 6 carbon atoms.
烷基胺可舉例如：單甲胺、單乙胺、單丙胺、單丁胺、單戊胺等一級脂肪族烷基胺類；二甲胺、甲基乙胺、二乙胺、甲基丙胺、乙基丙胺等二級脂肪族烷基胺類等。 烷醇胺可舉例如：單甲醇胺、單乙醇胺、單丙醇胺、單異丙醇胺、單丁醇胺、二甲醇胺、甲醇乙醇胺、二乙醇胺、甲醇丙醇胺、乙醇丙醇胺、二丙醇胺、二異丙醇胺、三甲醇胺、三乙醇胺、三丙醇胺、三異丙醇胺、三丁醇胺、單丁基二乙醇胺等。 該等烷醇胺中，又以碳數2~6之烷醇胺為佳，較佳為選自單乙醇胺、二乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺及三異丙醇胺中之1種以上，更佳為選自三乙醇胺及三異丙醇胺中之1種以上，再更佳為三異丙醇胺。 聚伸烷基聚胺可舉例如：二伸乙三胺、三伸乙四胺、四伸乙五胺、五伸乙六胺、六伸乙七胺、四伸丙五胺、六伸丁七胺等。 Examples of alkylamines include: monomethylamine, monoethylamine, monopropylamine, monobutylamine, monopentylamine and other primary aliphatic alkylamines; dimethylamine, methylethylamine, diethylamine, methylpropylamine , Ethylpropylamine and other secondary aliphatic alkylamines, etc. Alkanolamines can be, for example: monomethanolamine, monoethanolamine, monopropanolamine, monoisopropanolamine, monobutanolamine, dimethanolamine, methanolethanolamine, diethanolamine, methanolpropanolamine, ethanolpropanolamine, Dipropanolamine, diisopropanolamine, trimethanolamine, triethanolamine, tripropanolamine, triisopropanolamine, tributanolamine, monobutyldiethanolamine, etc. Among these alkanolamines, alkanolamines with 2 to 6 carbon atoms are preferred, preferably selected from monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine and triisopropanolamine. One or more kinds of alcoholamines, more preferably one or more kinds selected from triethanolamine and triisopropanolamine, still more preferably triisopropanolamine. Examples of polyalkylene polyamines include: diethylenetriamine, triethylenetetramine, tetraethylenepentamine, pentaethylenehexamine, hexaethyleneheptamine, tetraethylenepentamine, hexaethyleneheptamine Amines etc.
本發明一個態樣的水性加工液中，從作成可防止裝置或鋸線腐蝕的水性加工液之觀點來看，以該水性加工液之總量(100質量%)為基準計，成分(E)之含量宜為0.001質量%以上，較佳為0.005質量%以上，更佳為0.007質量%以上，再更佳為0.010質量%以上，尤宜為0.015質量%以上，並且宜為5.0質量%以下，較佳為3.0質量%以下，更佳為2.0質量%以下，再更佳為1.0質量%以下，尤宜為0.70質量%以下，亦可進一步設為0.50質量%以下、0.30質量%以下、0.20質量%以下、0.10質量%以下、0.070質量%以下或0.050質量%以下。In the aqueous working fluid of one aspect of the present invention, from the viewpoint of making an aqueous working fluid capable of preventing corrosion of devices or saw wires, the component (E) is based on the total amount (100% by mass) of the aqueous working fluid. The content is preferably at least 0.001% by mass, preferably at least 0.005% by mass, more preferably at least 0.007% by mass, even more preferably at least 0.010% by mass, especially preferably at least 0.015% by mass, and preferably not more than 5.0% by mass. Preferably it is 3.0 mass % or less, more preferably 2.0 mass % or less, still more preferably 1.0 mass % or less, especially preferably 0.70 mass % or less, and may further be 0.50 mass % or less, 0.30 mass % or less, or 0.20 mass % % or less, 0.10 mass % or less, 0.070 mass % or less, or 0.050 mass % or less.
本發明一個態樣的水性加工液中，從作成可防止裝置或鋸線腐蝕的水性加工液之觀點來看，成分(D)與成分(E)之含量比[(D)/(E)]以質量比計宜為0.01以上，較佳為0.05以上，較佳為0.10以上，更佳為0.20以上，再更佳為0.30以上，尤宜為0.40以上，並且宜為1.2以下，較佳為1.0以下，較佳為0.90以下，更佳為0.80以下，再更佳為0.75以下，尤宜為0.70以下。In the aqueous working fluid according to one aspect of the present invention, the content ratio of component (D) to component (E) is [(D)/(E)] from the viewpoint of making an aqueous working fluid capable of preventing corrosion of devices or saw wires. In terms of mass ratio, it is preferably at least 0.01, preferably at least 0.05, preferably at least 0.10, more preferably at least 0.20, even more preferably at least 0.30, especially preferably at least 0.40, and preferably at least 1.2, preferably at least 1.0 or less, preferably less than 0.90, more preferably less than 0.80, even more preferably less than 0.75, especially preferably less than 0.70.
＜其他添加劑＞ 在不損及本發明效果之範圍內，本發明一個態樣的水性加工液亦可視需要進一步含有上述成分(A)~(E)以外的其他添加劑。 此種其他添加劑可舉例如：防鏽劑(烷基苯磺酸鹽、二壬基萘磺酸鹽、烯基琥珀酸酯、多元醇酯等)、摩擦調整劑(各種非離子界面活性劑等)、消泡劑(矽油、氟矽油、氟烷基醚等)、金屬減活劑(咪唑啉、嘧啶衍生物、噻二唑、苯并三唑等)、殺菌劑．防腐劑(對羥苯甲酸酯類；苯甲酸、柳酸、山梨酸、脫水乙酸、對甲苯磺酸及該等之鹽；苯氧乙醇等)、pH調整劑(乙酸、蘋果酸、檸檬酸等有機酸或其鹽；磷酸等或其鹽等)。 另，該等添加劑可分別單獨使用，亦可併用2種以上。 ＜Other additives＞ The aqueous machining fluid according to one aspect of the present invention may further contain other additives other than the above-mentioned components (A) to (E) as needed within the scope of not impairing the effects of the present invention. Examples of such other additives include rust inhibitors (alkylbenzene sulfonates, dinonylnaphthalene sulfonates, alkenyl succinates, polyol esters, etc.), friction modifiers (various nonionic surfactants, etc.) ), defoamers (silicone oil, fluorosilicone oil, fluoroalkyl ether, etc.), metal deactivators (imidazoline, pyrimidine derivatives, thiadiazole, benzotriazole, etc.), fungicides. Preservatives (parabens; benzoic acid, salicylic acid, sorbic acid, dehydrated acetic acid, p-toluenesulfonic acid and their salts; phenoxyethanol, etc.), pH adjusters (acetic acid, malic acid, citric acid, etc. organic acid or its salt; phosphoric acid, etc. or its salt, etc.). In addition, these additives may be used individually, respectively, and may use 2 or more types together.
另，本發明一個態樣的水性加工液中，該等各種添加劑各自之含量可依照各成分之種類及機能適當設定，惟以該水性加工液之總量(100質量%)為基準計，可設為0.0001質量%以上、0.005質量%以上、0.01質量%以上、0.05質量%以上或0.1質量%以上，並且可設為20質量%以下、10質量%以下、5質量%以下、2質量%以下或1質量%以下。In addition, in the aqueous processing fluid of an aspect of the present invention, the respective contents of these various additives can be appropriately set according to the type and function of each component, but based on the total amount (100% by mass) of the aqueous processing fluid, it can be 0.0001% by mass or more, 0.005% by mass or more, 0.01% by mass or more, 0.05% by mass or more, or 0.1% by mass or more, and may be 20% by mass or less, 10% by mass or less, 5% by mass or less, or 2% by mass or less or 1% by mass or less.
＜水性加工液之製造方法＞ 本發明一個態樣的水性加工液之製造方法並無特殊限制，宜為具有以下步驟的方法：摻合成分(A)及(B)、以及視需要之成分(C)~(E)及其他添加劑之步驟。 例如，製造含有水作為成分(C)的水性加工液時，可藉由於水中摻合成分(A)及(B)、以及視需要之成分(C)~(E)及其他添加劑，並且視需要進行攪拌來製造。另，各成分之摻合順序可適當設定。 ＜Manufacturing method of aqueous machining fluid＞ The manufacturing method of the aqueous processing fluid according to one aspect of the present invention is not particularly limited, and it is preferably a method comprising the following steps: blending components (A) and (B), and optional components (C)~(E) and others Additive step. For example, when producing an aqueous processing fluid containing water as component (C), components (A) and (B), components (C) to (E) and other additives as needed can be mixed into water, and as needed Stir to make. In addition, the blending order of each component can be set suitably.
[水性加工液之性狀] 從作成脆性材料加工性優異的水性加工液之觀點來看，本發明一個態樣的水性加工液其表面張力愈小愈佳。 從上述觀點來看，本發明一個態樣的水性加工液之表面張力宜為45.0mN/m以下，較佳為43.0mN/m以下，較佳為40.0mN/m以下，更佳為38.0mN/m以下，再更佳為36.0mN/m以下，尤宜為35.0mN/m以下，並且可設為1.0mN/m以上、3.0mN/m以上、5.0mN/m以上、7.0mN/m以上、10.0mN/m以上或15.0mN/m以上。 另，本說明書中，水性加工液之表面張力意指遵行JIS K2241之白金板法測得之值。 [Properties of aqueous processing fluid] From the viewpoint of making an aqueous working fluid with excellent processability for brittle materials, the lower the surface tension of the aqueous working fluid according to one aspect of the present invention, the better. From the above point of view, the surface tension of the aqueous processing fluid of an aspect of the present invention is preferably 45.0mN/m or less, preferably 43.0mN/m or less, preferably 40.0mN/m or less, more preferably 38.0mN/m m or less, more preferably 36.0 mN/m or less, particularly preferably 35.0 mN/m or less, and can be set to 1.0 mN/m or more, 3.0 mN/m or more, 5.0 mN/m or more, 7.0 mN/m or more, 10.0mN/m or more or 15.0mN/m or more. In addition, in this specification, the surface tension of an aqueous processing fluid means the value measured according to the platinum plate method of JIS K2241.
從抑制加工裝置生鏽之觀點及防止被加工材腐蝕之觀點來看，本發明一個態樣的水性加工液之pH宜為4.0~10.0，較佳為5.0~9.0，更佳為6.0~8.5，再更佳為7.0~8.0。 另，水性加工液之pH意指遵行JIS Z8802於25℃下測得之值。 From the perspective of inhibiting the rust of the processing equipment and preventing the corrosion of the processed material, the pH of the aqueous processing fluid in one aspect of the present invention is preferably 4.0-10.0, preferably 5.0-9.0, more preferably 6.0-8.5, More preferably, it is 7.0~8.0. In addition, the pH of an aqueous processing fluid means the value measured at 25 degreeC in compliance with JIS Z8802.
將本發明一個態樣的水性加工液90mL放入容量100mL之量筒中，對量筒加蓋後，劇烈地上下振盪10次，靜置10秒鐘後所產生的泡沫量宜為15mL以下，較佳為10mL以下，更佳為9.0mL以下，再更佳為8.0mL以下，尤宜為7.5mL以下，進而宜為小於6.0mL、小於5.0mL、小於4.0mL、小於3.5mL、小於3.0mL、小於2.5mL、小於2.0mL、小於1.5mL或1.0mL以下。 另，該泡沫量意指基於後述實施例之方法測得之值。 Put 90mL of the aqueous processing fluid according to one aspect of the present invention into a measuring cylinder with a capacity of 100mL. After putting a cover on the measuring cylinder, shake it vigorously up and down 10 times. After standing for 10 seconds, the amount of foam produced should be less than 15mL, preferably It is less than 10mL, more preferably less than 9.0mL, more preferably less than 8.0mL, especially preferably less than 7.5mL, and more preferably less than 6.0mL, less than 5.0mL, less than 4.0mL, less than 3.5mL, less than 3.0mL, less than 2.5mL, less than 2.0mL, less than 1.5mL or less than 1.0mL. In addition, this amount of foam means the value measured based on the method of the Example mentioned later.
[水性加工液用濃縮液] 本發明亦提供一種水性加工液用濃縮物，其包含：以前述通式(a-1)表示且重量平均分子量為12,000以下之化合物(A)；及具有聚氧伸烷基之非水溶性化合物(B)。 藉由以水稀釋本發明之水性加工液用濃縮物，可調製成於25℃下的黏度為4.0~20.0mPa．s之水性加工液。即，本發明之水性加工液用濃縮物可藉由以水稀釋，調製成上述本發明一個態樣的水性加工液。 [Concentrates for aqueous processing fluids] The present invention also provides a concentrate for aqueous processing fluid, which includes: a compound (A) represented by the aforementioned general formula (a-1) and having a weight average molecular weight of 12,000 or less; and a water-insoluble compound having a polyoxyalkylene group (B). By diluting the concentrate for aqueous processing fluid of the present invention with water, the viscosity at 25°C can be adjusted to be 4.0~20.0mPa. s water-based processing fluid. That is, the concentrate for aqueous machining fluid of the present invention can be prepared into the aqueous machining fluid of the above-mentioned one aspect of the present invention by diluting it with water.
本發明一個態樣的水性加工液用濃縮物中，成分(B)相對於成分(A)100質量份之含量比宜為0.0001質量份以上，較佳為0.0003質量份以上，較佳為0.0005質量份以上，更佳為0.0010質量份以上，更佳為0.0020質量份以上，再更佳為0.0030質量份以上，再更佳為0.0040質量份以上，尤宜為0.0050質量份以上，並且宜為1.80質量份以下，較佳為1.70質量份以下，較佳為1.50質量份以下，更佳為1.40質量份以下，再更佳為1.30質量份以下，尤宜為1.25質量份以下，亦可進一步設為1.00質量份以下、0.500質量份以下、0.100質量份以下、0.050質量份以下、0.020質量份以下或0.010質量份以下。In the concentrate for aqueous processing fluid according to one aspect of the present invention, the content ratio of component (B) to 100 parts by mass of component (A) is preferably 0.0001 mass parts or more, preferably 0.0003 mass parts or more, more preferably 0.0005 mass parts more than 0.0010 parts by mass, more preferably more than 0.0020 parts by mass, more preferably more than 0.0030 parts by mass, more preferably more than 0.0040 parts by mass, especially preferably more than 0.0050 parts by mass, and preferably 1.80 parts by mass Parts or less, preferably less than 1.70 parts by mass, preferably less than 1.50 parts by mass, more preferably less than 1.40 parts by mass, more preferably less than 1.30 parts by mass, especially preferably less than 1.25 parts by mass, and can be further set to 1.00 parts by mass Parts by mass or less, 0.500 parts by mass or less, 0.100 parts by mass or less, 0.050 parts by mass or less, 0.020 parts by mass or less, or 0.010 parts by mass or less.
又，本發明一個態樣的水性加工液用濃縮物除了成分(A)及(B)外，亦可含有成分(D)及(E)以及上述其他添加劑。 另，本發明一個態樣的水性加工液用濃縮物中，成分(A)及(B)、成分(D)及(E)以及上述其他添加劑之具體態樣(亦包含較佳態樣)係與上述本發明一個態樣的水性加工液之各成分項目所記載相同。 Moreover, the concentrate for aqueous machining fluids of one aspect of the present invention may contain components (D) and (E) and the above-mentioned other additives in addition to components (A) and (B). In addition, in the concentrate for aqueous processing fluid according to one aspect of the present invention, the specific aspects (including preferred aspects) of components (A) and (B), components (D) and (E) and other additives mentioned above are It is the same as described in each component item of the aqueous machining fluid of one aspect of the present invention mentioned above.
本發明一個態樣的水性加工液用濃縮物中，以該水性加工液用濃縮物之總量(100質量%)為基準計，成分(A)及(B)之合計含量宜為70質量%以上，較佳為80質量%以上，更佳為90質量%以上，再更佳為95質量%以上，尤宜為98質量%以上，並且可設為100質量%以下、99.99質量%以下、99.90質量%以下或99.80質量%以下。In the concentrate for aqueous processing fluid according to one aspect of the present invention, the total content of components (A) and (B) is preferably 70% by mass based on the total amount (100% by mass) of the concentrate for aqueous processing fluid. Above, preferably above 80% by mass, more preferably above 90% by mass, more preferably above 95% by mass, especially preferably above 98% by mass, and can be set to below 100% by mass, below 99.99% by mass, or below 99.90% by mass Mass % or less or 99.80 mass % or less.
[水性加工液之用途、水性加工液之運用、脆性材料之加工方法] 本發明較佳的一個態樣之水性加工液含有成分(A)及(B)，且於25℃下的黏度調整為特定範圍，因此具有可提升加工性的各種特性(適度之黏度特性、表面張力小及良好之消泡性等)，故而可適當應用在脆性材料之加工。 尤其是本發明較佳的一個態樣之水性加工液具有適度之黏度特性，表面張力小且消泡性亦良好，因此，適合作為在利用線鋸進行脆性材料之切割時使用的水性加工液，更適合作為固定磨粒方式之水性加工液，該固定磨粒係使用已預先將磨粒固定於表面的鋸線來切割脆性材料。若為本發明一個態樣的水性加工液，即使在利用固定磨粒方式之脆性材料切割加工時，亦可以高精度進行切割加工。 [Use of water-based processing fluid, application of water-based processing fluid, processing method of brittle materials] The aqueous processing fluid of a preferred aspect of the present invention contains components (A) and (B), and the viscosity at 25°C is adjusted to a specific range, so it has various characteristics that can improve processability (moderate viscosity characteristics, surface Small tension and good defoaming properties, etc.), so it can be properly applied to the processing of brittle materials. In particular, the aqueous processing fluid of a preferred aspect of the present invention has moderate viscosity characteristics, low surface tension and good defoaming properties, so it is suitable as an aqueous processing fluid for cutting brittle materials with a wire saw, It is more suitable as an aqueous processing fluid with fixed abrasive grains. The fixed abrasive grains are used to cut brittle materials by using a saw wire with abrasive grains fixed on the surface in advance. According to an aspect of the present invention, the aqueous machining fluid can be cut with high precision even when brittle materials are cut with fixed abrasive grains.
加工對象之脆性材料可舉如矽錠、水晶、碳、玻璃等，惟以矽錠為佳。 固定磨粒方式用鋸線之直徑可設為0.2mm以下、0.12mm以下、0.1mm以下或0.08mm以下，且可設為0.01mm以上、0.02mm以上、0.03mm以上、0.04mm以上、0.05mm以上或0.06mm以上。 另，愈是直徑小的鋸線，愈能提升從被加工材之脆性材料製得製品時的產率，但被加工材之脆性材料性會降低，而有切割效率降低之傾向。對此，藉由使用本發明一個態樣的水性加工液，可提升磨粒之咬合性並提升切割效率，因此可使用直徑小的鋸線。又，本發明一個態樣的水性加工液之表面張力小，因此可抑制鋸線間的斥力，並防止鋸線彼此扭轉，提升加工性。 Brittle materials to be processed include silicon ingots, crystals, carbon, glass, etc., but silicon ingots are the best. The diameter of the sawing wire for the fixed abrasive method can be set to 0.2mm or less, 0.12mm or less, 0.1mm or less, or 0.08mm or less, and can be set to 0.01mm or more, 0.02mm or more, 0.03mm or more, 0.04mm or more, and 0.05mm Above or above 0.06mm. In addition, the smaller the diameter of the sawing wire, the higher the productivity of the product from the brittle material to be processed, but the brittle material of the processed material will decrease, and the cutting efficiency will tend to decrease. In this regard, by using the aqueous machining fluid of an aspect of the present invention, the interlocking property of the abrasive grains can be improved and the cutting efficiency can be improved, so a saw wire with a small diameter can be used. In addition, the aqueous machining fluid according to one aspect of the present invention has low surface tension, so it can suppress the repulsion between the saw wires, prevent the saw wires from twisting each other, and improve the workability.
考量本發明一個態樣的水性加工液之上述特性，本發明亦可提供下述[1]及[2]。 [1]一種水性加工液之用途，係於利用線鋸切割脆性材料之步驟中應用上述本發明一個態樣的水性加工液。 [2]一種脆性材料之加工方法，具有切割步驟，係應用上述本發明一個態樣的水性加工液並利用線鋸切割脆性材料。 In consideration of the above-mentioned characteristics of the aqueous machining fluid according to one aspect of the present invention, the present invention may also provide the following [1] and [2]. [1] An application of an aqueous machining fluid, which involves applying the aforementioned aqueous machining fluid according to one aspect of the present invention in the step of cutting brittle materials with a wire saw. [2] A processing method for a brittle material, comprising a cutting step, is to use the above-mentioned aqueous processing fluid according to one aspect of the present invention and use a wire saw to cut the brittle material.
上述[1]及[2]中的切割步驟宜藉由使用已預先將磨粒固定於表面的鋸線來切割脆性材料的固定磨粒方式來進行。又，線鋸中所用鋸線及脆性材料之具體態樣如上述。The cutting steps in the above [1] and [2] are preferably performed by using a saw wire with abrasive grains fixed on the surface in advance to cut brittle materials by means of fixed abrasive grains. In addition, the specific aspects of the saw wire and the brittle material used in the wire saw are as above.
實施例 接著，利用實施例更詳細說明本發明，惟本發明並不因該等例子而受到任何限制。 另，以下實施例中，下述物性值之測定及算出方法如以下所示。 (1)重量平均分子量 使用凝膠滲透層析儀裝置(安捷倫(AGILENT)公司製，「1260型HPLC」)，於下述條件下進行測定，並使用以標準聚苯乙烯換算測得之值。 (測定條件) ．管柱：已將2支「Shodex LF404」依序連結者。 ．管柱溫度：35℃ ．展開溶劑：氯仿 ．流速：0.3mL/min (2)HLB 利用格利芬法(Griffin Method)算出。 Example Next, the present invention will be described in more detail using examples, but the present invention is not limited by these examples. In addition, in the following examples, the measurement and calculation methods of the following physical property values are as follows. (1) Weight average molecular weight The measurement was performed under the following conditions using a gel permeation chromatography device (manufactured by Agilent, "1260 HPLC"), and the values measured in terms of standard polystyrene were used. (measurement conditions) ． Pipe string: Those who have connected two "Shodex LF404" in sequence. ． Column temperature: 35°C ． Developing solvent: chloroform ． Flow rate: 0.3mL/min (2) HLB Calculated using the Griffin Method.
實施例1~10、比較例1~7 以表1及表2所示摻合量，添加、混合表1及表2所示種類之各種成分，分別調製出水性加工液。用於調製該水性加工液的各成分之詳情如下。 Embodiment 1~10, comparative example 1~7 Add and mix various ingredients of the types shown in Table 1 and Table 2 with the blending amounts shown in Table 1 and Table 2 to prepare aqueous processing fluids respectively. The details of each component used to prepare the aqueous processing fluid are as follows.
＜(聚)伸烷基二醇＞ ．DEG：二乙二醇。 ．PEG200：重量平均分子量為200之聚乙二醇。 ．PEG400：重量平均分子量為400之聚乙二醇。 ．PEG600：重量平均分子量為600之聚乙二醇。 ．PEG13000：重量平均分子量為13,000之聚乙二醇。 ＜具有聚氧伸烷基之化合物＞ ．非水溶性聚氧伸乙基醚：脂肪族聚氧伸乙基醚、前述通式(b-1)中的A 1為伸乙基、R a為氫原子、R 1為碳數1~10之烷基的非水溶性化合物。 ．非水溶性乙炔二醇EO加成物(1)：乙炔二醇之氧化乙烯加成物、前述通式(b-2)中的A 2及A 3為伸乙基、R b及R c為氫原子、R d及R e為甲基、R 2及R 3為異丁基的非水溶性化合物、非水溶性、HLB=8 ．非水溶性乙炔二醇EO加成物(2)：乙炔二醇之氧化乙烯加成物、前述通式(b-2)中的A 2及A 3為伸乙基、R b及R c為氫原子、R d及R e為甲基、R 2及R 3為異丁基的非水溶性化合物、HLB=4 ．水溶性乙炔二醇EO加成物：乙炔二醇之氧化乙烯加成物、水溶性、HLB=13 ＜其他成分＞ ．異壬酸 ．三異丙醇胺 ．離子交換水 ＜(Poly)alkylene glycol＞ . DEG: diethylene glycol. ． PEG200: polyethylene glycol with a weight average molecular weight of 200. ． PEG400: polyethylene glycol with a weight average molecular weight of 400. ． PEG600: polyethylene glycol with a weight average molecular weight of 600. ． PEG13000: polyethylene glycol with a weight average molecular weight of 13,000. <Compounds having polyoxyalkylene groups> . Non-water-soluble polyoxyethylene ether: aliphatic polyoxyethylene ether, A1 in the aforementioned general formula (b- 1 ) is an ethylidene group, R a is a hydrogen atom, and R1 is a carbon number of 1 to 10 Alkyl water-insoluble compounds. ． Water-insoluble EO adduct of acetylene diol (1): ethylene oxide adduct of acetylene diol, A 2 and A 3 in the aforementioned general formula (b-2) are ethylidene, R b and R c are Hydrogen atom, R d and R e are methyl, R 2 and R 3 are isobutyl water-insoluble compounds, water-insoluble, HLB=8. Water-insoluble EO adduct of acetylene diol (2): ethylene oxide adduct of acetylene diol, A 2 and A 3 in the aforementioned general formula (b-2) are ethylidene, R b and R c are Hydrogen atom, R d and R e are methyl, R 2 and R 3 are isobutyl water-insoluble compounds, HLB=4. Water-soluble EO adduct of acetylene glycol: ethylene oxide adduct of acetylene glycol, water-soluble, HLB=13 <Other ingredients> . Isononanoic acid. Triisopropanolamine. ion exchange water
針對所調製之水性加工液，利用以下方法測定於25℃下的黏度、表面張力及pH之各物性值，同時利用以下方法評價消泡性。又，針對實施例1及比較例5、6之水性加工液，進一步利用以下方法評價脆性材料之加工性。表1及表2中顯示該等結果。另，比較例1中，所摻合的非水溶性聚氧伸乙基醚並未溶解於水中，無法進行上述各物性值之測定及消泡性之評價。又，比較例4之水性加工液屬於高黏度，因此無法進行消泡性之評價。For the prepared aqueous processing fluid, use the following methods to measure the physical properties of viscosity, surface tension and pH at 25°C, and use the following methods to evaluate the defoaming properties. Furthermore, for the aqueous machining fluids of Example 1 and Comparative Examples 5 and 6, the processability of brittle materials was further evaluated by the following method. The results are shown in Table 1 and Table 2. In addition, in Comparative Example 1, the water-insoluble polyoxyethylene ether blended was not dissolved in water, and the measurement of the above-mentioned various physical properties and the evaluation of the defoaming property could not be performed. In addition, the water-based working fluid of Comparative Example 4 has a high viscosity, so the defoaming property cannot be evaluated.
(1)於25℃下的黏度 使用B型旋轉黏度計TVB-10(製品名，東機產業股份有限公司製)，於轉子旋轉數60rpm下進行測定。 (2)表面張力 遵行JIS K2241之白金板法進行測定。 (3)pH 遵行JIS Z8802於25℃下進行測定。 (1) Viscosity at 25°C Using a B-type rotational viscometer TVB-10 (product name, manufactured by Toki Sangyo Co., Ltd.), the measurement was performed at a rotor rotation speed of 60 rpm. (2) surface tension Measured in accordance with the platinum plate method of JIS K2241. (3)pH The measurement was performed at 25° C. in compliance with JIS Z8802.
(4)消泡性之評價 於容量100mL之量筒中放入所調製之水性加工液90mL，對量筒加蓋後，劇烈地上下振盪10次，靜置10秒鐘後的泡沫量是讀取量筒刻度來測得。該泡沫量愈少，愈能稱為消泡性優異之水性加工液。 (4) Evaluation of defoaming properties Put 90mL of the prepared aqueous processing fluid into a measuring cylinder with a capacity of 100mL, cover the measuring cylinder, shake it up and down vigorously for 10 times, and measure the amount of foam after standing for 10 seconds by reading the scale of the measuring cylinder. The smaller the amount of foam, the more it can be called an aqueous processing fluid with excellent defoaming properties.
(5)脆性材料加工性之評價 使用多線式線鋸(multi wire saw)及固定磨粒鋸線(電沈積鑽石鋸線)，一邊令所調製之水性加工液於固定磨粒鋸線上恆流，一邊切割單晶矽錠而加工成矽晶圓。 又，為了評價上述利用切割加工而得的矽晶圓之平坦度，測定TTV(總厚度變異值，Total Thickness Variation)，並基於下述基準評價脆性材料之加工性。另，平坦度評價中所用的TTV，是以度盤規測定所製得矽晶圓之厚度，並且以最大厚度與最小厚度的差表示之值，該值愈小，愈能稱為平坦度高的矽晶圓。本實施例中，度盤規是使用「DIGIMATIC INDICATOR ID-C112CX」(製品名，三豐(MITUTOYO)股份有限公司製)。 (脆性材料加工性之評價基準) ．A：TTV小於10μm。 ．B：TTV為10μm以上且小於15μm。 ．C：TTV為15μm以上。 (5) Evaluation of processability of brittle materials Using a multi-wire saw (multi wire saw) and a fixed abrasive saw wire (electrodeposited diamond saw wire), while making the prepared aqueous processing fluid flow constant on the fixed abrasive saw wire, while cutting monocrystalline silicon ingots for processing into silicon wafers. In addition, in order to evaluate the flatness of the above-mentioned silicon wafer obtained by dicing, TTV (Total Thickness Variation) was measured, and the processability of brittle materials was evaluated based on the following criteria. In addition, the TTV used in the evaluation of flatness is the thickness of the silicon wafer obtained by measuring the thickness of the silicon wafer with a dial gauge, and the value expressed as the difference between the maximum thickness and the minimum thickness. The smaller the value, the higher the flatness. of silicon wafers. In this example, "DIGIMATIC INDICATOR ID-C112CX" (product name, manufactured by Mitutoyo Co., Ltd.) was used as the dial gauge. (Evaluation criteria for processability of brittle materials) ． A: TTV is less than 10 μm. ． B: TTV is 10 μm or more and less than 15 μm. ． C: TTV is 15 μm or more.
[表1]
[表2]
依據表1，實施例1~10之水性加工液之消泡性良好，從黏度特性及表面張力來看具有脆性材料之加工性優異的特性。實際上，實施例1之水性加工液之TTV值小於10μm，可確認脆性材料之加工性優異。 另一方面，依據表2，比較例2~5之水性加工液之黏度過低或過高，因此吾人認為脆性材料之加工性會有問題。又，比較例6~7之水性加工液之表面張力高，吾人認為脆性材料之加工性同樣會有問題。實際上，比較例5及6之水性加工液之TTV值為10μm以上，可確認脆性材料之加工性較實施例1之水性加工液差。另，比較例1之水性加工液因所摻合的非水溶性聚氧伸乙基醚並未溶解於水中，故而未進行各物性之評價及評價即結束。 According to Table 1, the water-based processing fluids of Examples 1-10 have good defoaming properties, and have the characteristics of excellent processability of brittle materials in terms of viscosity characteristics and surface tension. In fact, the TTV value of the aqueous working fluid of Example 1 is less than 10 μm, which confirms that the workability of brittle materials is excellent. On the other hand, according to Table 2, the viscosity of the aqueous working fluids of Comparative Examples 2-5 is too low or too high, so we think that the processability of brittle materials will be problematic. In addition, the surface tension of the aqueous machining fluids of Comparative Examples 6-7 is high, and we think that the processability of brittle materials will also be problematic. In fact, the TTV values of the aqueous machining fluids of Comparative Examples 5 and 6 are above 10 μm, and it can be confirmed that the processability of brittle materials is inferior to that of the aqueous machining fluid of Example 1. In addition, in the aqueous machining fluid of Comparative Example 1, the water-insoluble polyoxyethylene ether blended was not dissolved in water, so the evaluation of various physical properties was not performed and the evaluation was completed.
(無)(none)
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