JP2019178297A - Brittle material processing fluid composition - Google Patents

Abstract

To provide a brittle material processing fluid composition which has excellent lubricity, antifoaming properties, and waste liquid treatment properties.SOLUTION: The present invention relates to a brittle material processing fluid composition which comprises (A) water and (B) an additive mixture. The component (B) comprises: (B-1) a nonionic surfactant which is an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms and has a HLB value of 4 or more and 11 or less; and (B-2) a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide. The content of component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on the total amount of component (B) of 100% by mass. The content of component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on the total amount of component (B) of 100% by mass. The total content of the component (B-1) and (B-2) is 83.0% by mass or more based on the total amount of component (B) of 100% by mass.SELECTED DRAWING: None

Description

  The present invention relates to a brittle material working fluid composition.

In the manufacture of semiconductor products, it is important to accurately cut a silicon ingot, which is a brittle material, and wire saw processing is generally used for cutting silicon ingots from the viewpoint of processing accuracy and productivity.
Wire saw processing is also used for processing materials such as ceramics, quartz, sapphire, and glass.
Generally, as a processing method using a wire saw, a free abrasive grain method that performs processing while supplying free abrasive grains to a sliding portion between the wire and a workpiece, and a wire in which abrasive grains are fixed to the surface of the wire in advance And a fixed abrasive method in which processing is performed using
For example, in recent years, in the field of producing silicon wafers from the aforementioned silicon ingots, further improvement in productivity has been demanded, and cutting can be performed in a shorter time than a loose abrasive method, and a thinner wire tool For example, the fixed abrasive method is often used for the reason that the yield can be improved.

In both types of wire saw processing, the efficiency of cutting is improved, the friction between the workpiece and the tool that processes the workpiece is reduced, the heat generated by the processing is removed (cooling), and the life of the tool is extended. A machining fluid (coolant) is used for the purpose of removing chips.
As the processing fluid used in the above-mentioned applications, etc., an aqueous processing fluid composition containing water-soluble processing fluid composition composed mainly of mineral oil, animal and vegetable oil, synthetic oil, etc. and a compound having surface active ability is added. And a working fluid composition.
In recent years, water-soluble ones have been used from the viewpoint of safety during work and environmental problems.

For example, Patent Document 1 discloses a water-soluble machining liquid composition for a fixed abrasive wire saw that is used for cutting work materials other than rare earth magnets, and contains glycols. A liquid composition is disclosed.
Patent Document 2 discloses a water-soluble working fluid composition for fixed abrasive wire saws used for cutting rare earth magnets, which includes glycols, carboxylic acid, a compound that dissolves in water and exhibits basicity, water Are contained in a specific content (however, the total of these components is 100 parts by weight), and a water-soluble working liquid composition for a fixed abrasive wire saw is disclosed.

JP 2003-82334 A JP 2003-82335 A

Generally, in both the above-described wire saw processing methods, a multi-wire saw apparatus is used to cut out a plurality of silicon wafers from the above-described silicon ingot at a time. In the multi-wire saw device, one wire is wound around each groove on two or more guide rollers having a plurality of grooves carved at a constant interval, and each wire is held in parallel with a constant tension. At the time of cutting, each guide roller is rotated, and the wire is run in one direction or both directions while causing the working liquid composition discharged from the nozzle or the like to adhere to the wire. The silicon ingot is pressed to perform cutting.
The working fluid composition used for the wire saw processing is put into a tank provided in the wire saw device, supplied from the tank to a processing chamber nozzle by a pump provided in the wire saw device, and discharged from the nozzle. The machining liquid composition discharged from the nozzle is supplied with the aim of the machining gap (gap between the wire and the silicon ingot), used for lubrication of the machining gap, etc., and then returns to the tank again. Thus, during the cutting of the silicon ingot, the working fluid composition circulates in the wire saw device.
At the time of the cutting process, the processing liquid composition may be violently scattered due to high-speed rotation of the guide roller accompanying the increase in the wire speed, which leads to foaming of the processing liquid composition. Further, when the machining liquid composition flows down to the tank below the wire saw device during the cutting process, the machining liquid composition in the tank may foam violently and overflow from the tank. Furthermore, the problem that the fine chips generated during the cutting process promote foaming of the processing liquid composition, and the wire saw and the cut wafer are significantly contaminated by the chips, and the load for cleaning them. There was a problem that became larger.
Further, as described above, it is required that the used working fluid be rendered harmless by waste liquid treatment.

In this way, the brittle material working fluid composition can be used in addition to the conventional requirement of lubricity, if foaming when using the working fluid composition can be suppressed and the cleanliness of chips can be improved, It also leads to stable production and improved processing accuracy. In addition, if the processing liquid composition is more excellent in waste liquid processability, for example, if the processing liquid composition has a lower value of the chemical oxygen demand (COD) in the processing liquid composition, it is suitable for the environment. It also leads to improved safety, improved safety during work, and improved economy by reducing the load associated with waste liquid treatment.
As described above, in recent years, there has been a demand for a working fluid composition imparted with water solubility. And the water-soluble working fluid composition is usually used by diluting the stock solution of the working fluid composition with water. And from the viewpoint of the waste liquid processability described above, even when used in a state where the water content is higher, excellent lubricity and an effect of suppressing foaming during processing (hereinafter also simply referred to as “defoaming”) There is a need for a working fluid composition that yields. That is, there is a need for a working fluid composition that is excellent in the balance of lubricity, antifoaming property, and waste liquid treatability.

  This invention is made | formed in view of the above problem, and the subject of this invention is providing the brittle material processing liquid composition which is excellent in lubricity, defoaming property, and waste liquid processability.

As a result of intensive studies, the inventors of the present invention have included a brittle material working fluid composition that contains water and an additive mixture containing a specific compound, and the content of each component in the additive compound satisfies a specific range. However, it discovered that the said subject could be solved. Each embodiment of the present invention has been completed based on such knowledge. That is, according to each embodiment of the present invention, the following [1] to [10] are provided.
[1] comprising (A) water, and (B) additive mixture,
Component (B) is
(B-1) an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant having an HLB value of 4 to 11; and
(B-2) including a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The total content of components (B-1) and (B-2) is 83.0% by mass or more based on the total amount of component (B) of 100% by mass,
Brittle material processing fluid composition.
[2] The brittle material working fluid composition according to [1], wherein the number average molecular weight of the component (B-2) is 500 or more and 6,000 or less.
[3] The brittle material working fluid composition according to the above [1] or [2], wherein the surface tension of a 0.1% by mass aqueous solution of the component (B-1) is 31 mN / m or less.
[4] Ratio [(B-1) / (B-2)] of content of component (B-1) and content of component (B-2) is 0.015 or more and 9.50 in mass ratio. The brittle material working fluid composition according to any one of [1] to [3], which is as follows.
[5] The brittle material working fluid composition according to any one of [1] to [4], wherein the pH is 3 or more and 9 or less.
[6] The brittle material processing liquid according to any one of [1] to [5], wherein the component (A) is contained in an amount of 900 parts by mass or more and 999,900 parts by mass or less with respect to 100 parts by mass of the component (B). Composition.
[7] The brittle material working fluid composition according to any one of [1] to [6], which is used when a workpiece made of a brittle material is processed using a wire.
[8] The brittle material working fluid composition according to [7], wherein the wire is a fixed abrasive wire.
[9] The brittle material working fluid composition according to [7] or [6], wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass.
[10] A method for producing a brittle material processing fluid composition, comprising at least (A) water and (B) an additive mixture,
Component (B) is
(B-1) an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant having an HLB value of 4 to 11; and
(B-2) including a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on the total amount of the component (B) of 100% by mass,
A brittle material working fluid composition was formulated by blending so that the total content of components (B-1) and (B-2) was 83.0% by mass or more based on 100% by mass of the total amount of component (B). A method for producing a brittle material working fluid composition according to any one of [1] to [9].

  ADVANTAGE OF THE INVENTION According to this invention, the brittle material processing liquid composition excellent in lubricity, defoaming property, and waste liquid processability can be provided.

[Brittle material processing fluid composition]
The brittle material processing fluid composition according to an embodiment of the present invention (hereinafter, also simply referred to as “processing fluid”) includes (A) water and (B) an additive mixture, and the component (B) is ( B-1) an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, an HLB value of 4 to 11, and (B-2) other than ethylene oxide and ethylene oxide Including a copolymer with alkylene oxide, the content of component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of component (B), and component (B -2) content is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of component (B),
The total content of components (B-1) and (B-2) is 83.0% by mass or more based on the total amount of components (B) of 100% by mass.
A working fluid that satisfies all the above-described requirements is excellent in the balance of lubricity, defoaming property, and waste liquid treatment property.

In the present specification, unless otherwise specified, the “alkylene oxide (hereinafter also simply referred to as“ AO ”) adduct” refers to not only a compound to which a single alkylene oxide is added, but also a plurality of alkylene oxides, In addition, a compound to which a polyalkylene oxide is added is also included. The same applies to “ethylene oxide (hereinafter also simply referred to as“ EO ”) adduct” and “propylene oxide (hereinafter also simply referred to as“ PO ”) adduct”.
Further, the “HLB value” used in the present specification means a value of HLB (Hydrophilic-Lipophilic Balance) calculated by the Griffin method.
In addition, in this specification, about the preferable numerical range (for example, range of content etc.), the lower limit value and upper limit value which were described in steps can be combined independently, respectively. For example, for the corresponding numerical range, the description of the lower limit value “preferably 10 or more, more preferably 20 or more, more preferably 30 or more” and “preferably 90 or less, more preferably 80 or less, more preferably 60 or less”. Therefore, the preferable range can be set to “10 or more and 60 or less” by combining “preferable lower limit value (10)” and “more preferable upper limit value (60)”. Similarly, the “more preferable lower limit value (30)” and the “preferable upper limit value (90)” can be combined to set the preferable range to “30 or more and 90 or less”.
Similarly, for example, “preferably 10 to 90, more preferably 20 to 80, still more preferably 30 to 60” can be used as “10 to 60”.
In addition, unless it mentions especially, when only describing as "10-90" as a preferable numerical range, the range of 10-90 is represented.
Hereinafter, each component contained in the processing liquid will be described.

<Component (A)>
The water which is the component (A) is not particularly limited, and purified water such as distilled water and ion exchange water (deionized water); tap water; industrial water; etc. can be used, preferably purified water, more preferably. Is ion-exchanged water (deionized water).

Content of a component (A) can be suitably adjusted with the condition which uses the said processing liquid.
For example, when the processing liquid is in a concentrated state (hereinafter also referred to as “stock solution”) and the stock solution is stored and transported, the content of component (A) is 100 parts by weight of component (B). Preferably, it is 1.0 mass part or more, More preferably, it is 5.0 mass part or more, More preferably, it is 10.0 mass part or more, More preferably, it is 25.0 mass part or more. On the other hand, the content of the component (A) is preferably 1,800 parts by mass or less, more preferably less than 900 parts by mass, still more preferably 550 parts by mass or less, and still more preferably with respect to 100 parts by mass of the component (B). It is 200 parts by mass or less.

Further, for example, when the processing liquid is used for processing a brittle material, the above-mentioned stock solution is further diluted with the component (A), and the processing liquid is diluted (hereinafter also referred to as “diluted liquid”). It is preferable to use, for example, the content of the component (A) is 100 masses of the component (B) from the viewpoint of lowering the viscosity of the processing liquid and improving the handling properties and obtaining the effect of the present invention more effectively. Parts, preferably 900 parts by weight or more, more preferably 1,900 parts by weight or more, still more preferably 9,900 parts by weight or more, still more preferably 12,000 parts by weight or more, still more preferably 15,000 parts by weight. More than a part. On the other hand, the content of the component (A) is preferably 999,900 parts by mass or less, more preferably 199,900 parts by mass with respect to 100 parts by mass of the component (B) from the viewpoint of securing the effective component amount in the working fluid. Part or less, more preferably 99,900 parts by weight or less, still more preferably 66,500 parts by weight or less, and still more preferably 49,900 parts by weight or less.
Here, in this specification, "active ingredient" refers to all the components except the component (A) from the working fluid.

  Moreover, when using the said processing liquid for the process of a brittle material, from the viewpoint which can suppress corrosion of each wire, a processing apparatus, etc. which are mentioned later in the column of the use of a processing liquid, Preferably it is 3 or more, More preferably, it is 4 or more, More preferably, it is 5 or more. On the other hand, the pH of the diluted solution is preferably 9 or less, more preferably 8 or less, and even more preferably 7 or less, from the viewpoint of suppressing generation of a large amount of hydrogen from chips when processing silicon or the like. It is.

<Component (B)>
Component (B) is an additive mixture, which will be described in detail below (B-1) is an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and has a HLB value of 4 to 10 The surfactant and (B-2) a copolymer of ethylene oxide and alkylene oxide are each included in a specific amount. The content and total content of each component will be described later in the explanation column for each component.
The component (B) contains both the component (B-1) and the component (B-2), so that the good lubricity and good antifoaming property of the working fluid composition, especially during the cutting process described above. It becomes the processing liquid which is excellent in balance with the defoaming property when the fine chips generated in the processing liquid are contained in the processing liquid.
Hereinafter, each component contained in the additive mixture will be described.

[Component (B-1)]
Component (B-1) is an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and is a nonionic surfactant having an HLB value of 4 to 11.
When the HLB value of the component (B-1) is 4 or more, the solubility of the component (B-1) in the component (A) is improved. Moreover, the defoaming property of a processing liquid improves that the HLB value of a component (B-1) is 11 or less.
The HLB value of component (B-1) is preferably 6 or more, more preferably 8 or more, and even more preferably 8 from the viewpoint of improving the lubricity of the working fluid. On the other hand, the HLB value of the component (B-1) is preferably 10 or less, more preferably 9 or less, from the viewpoint of improving the defoaming property of the working fluid.

  The surface tension of the 0.1% by mass aqueous solution of component (B-1) is preferably 31 mN / m or less, more preferably 30 mN / m or less, still more preferably 29 mN / m or less, and even more preferably 28 mN / m. Is less than. On the other hand, the surface tension of the 0.1% by mass aqueous solution of the component (B-1) is preferably 1 mN / m or more, more preferably 5 mN / m or more, and further preferably 10 mN / m or more.

Examples of the alcohol having 10 to 24 carbon atoms include aliphatic alcohols having 10 to 24 carbon atoms.
The carbon number of the alcohol having 10 to 24 carbon atoms is preferably 11 or more, more preferably 12 or more. On the other hand, the carbon number of the alcohol having 10 to 24 carbon atoms is preferably 20 or less, more preferably 18 or less, and still more preferably 16 or less.

The aliphatic alcohol is preferably a primary alcohol or a secondary alcohol, and more preferably a primary alcohol. Further, it may be linear, branched or cyclic.
The aliphatic alcohol is preferably a monohydric alcohol.
Examples of the aliphatic alcohol include decanol, undecyl alcohol, lauryl alcohol, tridecyl alcohol, isotridecyl alcohol, myristyl alcohol, pentadecyl alcohol, palmityl alcohol, heptadecanol, stearyl alcohol, isostearyl alcohol, nona Saturated aliphatic alcohols such as decyl alcohol and eicosanol; such as decenyl alcohol, dodecenyl alcohol, tridecenyl alcohol, tetradecenyl alcohol, palmitoleyl alcohol, oleyl alcohol, gadrel alcohol, linoleyl alcohol Saturated aliphatic alcohols; cyclic aliphatic alcohols such as octyl cyclohexyl alcohol, nonyl cyclohexyl alcohol, adamantyl alcohol, etc. .

Examples of the alkylene oxide (AO) include alkylene oxides having 2 to 4 carbon atoms, such as ethylene oxide (EO), 1,2-propylene oxide, 1,3-propylene oxide, 1,2-butylene oxide, 2,3-butylene oxide, 1,3-butylene oxide, and tetrahydrofuran are mentioned.
The component (B-1) is preferably a compound in which at least EO is added to the alcohol having 10 to 24 carbon atoms, and more preferably EO and AO other than EO are added to the alcohol having 10 to 24 carbon atoms. It is an added compound.
Component (B-1) is more preferably at least one selected from polyoxyethylene alkyl ether and polyoxyethylene alkylene alkyl ether.
Component (B-1) can be synthesized by adding EO and / or AO other than EO to the alcohol having 10 to 24 carbon atoms. Addition of EO and / or AO other than EO to the alcohol having 10 or more and 24 or less carbon atoms can be carried out by a known method. It may be done in stages.
In addition, a component (B-1) may be used individually by 1 type, and may be used in combination of 2 or more type.

Content of a component (B-1) is 0.9 to 88.0 mass% on the basis of 100 mass% of the total amount of a component (B).
When the content of the component (B-1) is equal to or more than the lower limit value, the lubricity of the working fluid is excellent. Moreover, it is excellent in the waste-liquid processability of a processing liquid as content of a component (B-1) is below the said upper limit.
The content of the component (B-1) is preferably 2.5% by mass or more, more preferably 3.5% by mass based on the total amount of the component (B) of 100% by mass from the viewpoint of improving the lubricity of the working fluid. % Or more, more preferably 8.0% by mass or more, still more preferably 15.0% by mass or more, and still more preferably 30.0% by mass or more. On the other hand, the content of the component (B-1) is preferably 84.0% by mass or less, more preferably 82.0% by mass based on the total amount of the component (B) of 100% by mass, from the viewpoint of improving the waste liquid processability. % Or less, more preferably 80.0% by mass or less, and still more preferably 78.0% by mass or less.

[Component (B-2)]
Component (B-2) is a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide.
The copolymer of EO and AO other than EO is a copolymer of EO and AO other than EO, which will be described later. The mode of addition of EO and AO other than EO is random addition or block addition. Any of them may be used, and random addition and block addition may be mixed, but a block-added copolymer is preferable, and a pluronic-type copolymer is more preferable.
Examples of AO other than EO include alkylene oxides having 3 or 4 carbon atoms, such as propylene oxide (PO), oxetane, 1,2-butylene oxide, 2,3-butylene oxide, 1,3-butylene oxide. And tetrahydrofuran.
The copolymer of EO and AO other than EO is more preferably a copolymer of EO and PO, more preferably a block copolymer of EO and PO (“polyethylene glycol unit and polypropylene glycol unit”). And more preferably a triblock copolymer of EO and PO (also referred to as a “triblock copolymer having a polyethylene glycol unit and a polypropylene glycol unit”). More preferably, it is a pluronic copolymer obtained by adding ethylene oxide to polypropylene glycol.

The number average molecular weight (Mn) of the component (B-2) is preferably 500 or more, more preferably 1,000 or more, and still more preferably 1,500 or more. On the other hand, the number average molecular weight (Mn) of the component (B-2) is preferably 6,000 or less, more preferably 5,000 or less, and still more preferably 3,000 or less.
Moreover, the value of the number average molecular weight (Mn) is a value measured using the method described in Examples described later.
In the copolymer of EO and AO other than EO, the number average molecular weight (Mn) of the structural portion derived from AO other than EO is preferably 500 or more, more preferably 1,000 or more, and still more preferably. 1,500 or more. On the other hand, the number average molecular weight (Mn) of the structural portion derived from AO is preferably 5,000 or less, more preferably 3,000 or less, and still more preferably 2,000 or less.
In addition, a component (B-2) may be used individually by 1 type, and may be used in combination of 2 or more type.

Content of a component (B-2) is 0.9 to 96.0 mass% on the basis of 100 mass% of the total amount of a component (B).
When the content of the component (B-2) is equal to or more than the lower limit value, the anti-foaming property of the processing liquid, particularly when the fine liquid generated during the cutting process described above is contained in the processing liquid. Excellent defoaming properties. Moreover, it is excellent in the waste liquid processability of a processing liquid as content of a component (B-2) is below the said upper limit.
Content of a component (B-2) improves the defoaming property at the time of the defoaming property of a processing liquid composition, especially the fine chip which generate | occur | produces during the cutting process mentioned above in the processing liquid. From the viewpoint, the total amount of the working fluid composition component (B) is preferably at least 1.8% by mass, more preferably at least 5.0% by mass, even more preferably at least 7.0% by mass, even more based on 100% by mass. Preferably it is 16.0 mass% or more, More preferably, it is 18.0 mass% or more. On the other hand, the content of the component (B-2) is preferably 94.0% by mass or less, more preferably 92.0% by mass based on the total amount of the component (B) of 100% by mass, from the viewpoint of improving the waste liquid processability. % Or less, more preferably 91.0% by mass or less, still more preferably 85.0% by mass or less, and still more preferably 70.0% by mass or less.

Moreover, the total content of a component (B-1) and a component (B-2) in a component (B) is 83.0 mass% or more on the basis of 100 mass% of total amounts of a component (B).
When the total content of the component (B-1) and the component (B-2) is equal to or higher than the lower limit value, the processing liquid is excellent in the balance of lubricity, defoaming property, and waste liquid processability.
From the viewpoint of more effectively obtaining the effects of the present invention, the total content is preferably 85.0% by mass or more, more preferably 88.0% by mass or more, based on the total amount of component (B) of 100% by mass, More preferably, it is 90.0 mass% or more, More preferably, it is 94.0 mass% or more. On the other hand, the total content of the component (B-1) and the component (B-2) is preferably 99.9% by mass or less, more preferably 100% by mass or less based on the total amount of the component (B) from the same viewpoint. Is 99.0% by mass or less, more preferably 98.0% by mass or less, still more preferably 97.0% by mass or less, and still more preferably 96.0% by mass or less.

  Moreover, ratio [(B-1) / (B-2)] of content of a component (B-1) and content of a component (B-2) is lubricity, waste liquid processability, defoaming From the viewpoint of making the processing liquid excellent in balance with the anti-foaming property when the fine cuttings generated during the above-described cutting processing are contained in the processing liquid, the mass ratio is preferably 0.00. 015 or more, more preferably 0.020 or more, still more preferably 0.050 or more, still more preferably 0.10 or more, still more preferably 0.50 or more, still more preferably 1.00 or more, and even more preferably. It is 2.00 or more, More preferably, it is 3.00 or more. On the other hand, from the same viewpoint, the ratio [(B-1) / (B-2)] is preferably 9.50 or less, more preferably 8.00 or less, and even more preferably 7.00 or less, in terms of mass ratio. More preferably, it is 6.00 or less, More preferably, it is 5.00 or less.

[Other additives]
In addition to the above-mentioned component (B-1) and component (B-2), the component (B) may further contain other additives as long as the object of the present invention is not impaired.
Other additives include surfactants other than components (B-1) and (B-2), pH adjusters, water retention improvers, antifoaming agents, metal deactivators, bactericides / preservatives, Examples include rusting agents and antioxidants. These additives may be used alone or in combination of two or more. Moreover, in these additives, 1 or more types chosen from the group which consists of surfactant other than a component (B-1) and (B-2) and a pH adjuster are preferable.
In addition, these other additives may be used individually by 1 type, and may be used in combination of 2 or more type.

As surfactants other than components (B-1) and (B-2), anionic surfactants, cationic surfactants, nonionic surfactants other than components (B-1) and (B-2), And amphoteric surfactants.
Examples of the anionic surfactant include alkyl benzene sulfonate and alpha olefin sulfonate. Examples of the cationic surfactant include quaternary ammonium salts such as alkyltrimethylammonium salts, dialkyldimethylammonium salts, and alkyldimethylbenzylammonium salts.
Examples of the nonionic surfactant other than the components (B-1) and (B-2) include a nonionic surfactant having a carbon number of less than 10 and more than 24, and a nonionic interface having an HLB value of less than 4 and more than 11 Activators (amides such as fatty acid alkanolamides) are listed.
Examples of amphoteric surfactants include alkyl betaines as betaines.
Among the surfactants, nonionic surfactants such as ethers other than the components (B-1) and (B-2) are preferably used.

The pH adjuster is mainly used to adjust the pH of the processing liquid. Examples of the pH adjuster include various acid components and base components, and the pH of the processing liquid can be appropriately adjusted by adjusting the content ratio of these components.
The acid component and the base component can react with each other to form a salt.
Therefore, when an acid component and a base component are used as a pH adjuster, when a reaction product of the acid component and the base component exists in the processing liquid, as described above, the reaction product of the acid component and the base component is contained. Each content of the acid component and the base component contributing to the reaction calculated from the amount can also be calculated. Moreover, it can replace with the said reaction material in that case, and can be considered that the said acid component and base component before reaction are contained.

  Examples of the acid component used as a pH adjuster include various fatty acids such as lauric acid, stearic acid, oleic acid, linoleic acid, linolenic acid, neodecanoic acid, isononanoic acid, capric acid, isostearic acid; acetic acid, malic acid, citric acid, and the like. Examples thereof include carboxylic acids such as acids; polymer acids such as polyacrylic acid and salts thereof; and inorganic acids such as phosphoric acid. Among these, fatty acids are preferable, fatty acids having 12 or less carbon atoms, such as neodecanoic acid, isononanoic acid, capric acid, dodecanedioic acid, and the like, more preferably from the group consisting of neodecanoic acid, isononanoic acid, capric acid, and dodecanedioic acid. One or more selected are more preferable.

  Examples of the base component used as a pH adjuster include monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, tri-n-propanolamine, tri-n-butanolamine, Isobutanolamine, tri-tert-butanolamine, N-methylethanolamine, N-ethylethanolamine, N-butylethanolamine, N-cyclohexylethanolamine, N-methyldiethanolamine, N-ethyldiethanolamine, N-cyclohexyldiethanolamine, Alkanolamines such as N, N-dimethylethanolamine, N, N-diethylethanolamine; methylamine, dimethylamine, ethylamine Include ammonia; diethylamine, propylamine, alkyl amines such as dipropylamine. Among these, tertiary amines are preferable, and at least one selected from the group consisting of triethanolamine, triisopropanolamine, N-methyldiethanolamine, and N-cyclohexyldiethanolamine is more preferable.

  Examples of the water retention improver include ethylene glycol, propylene glycol, 1,4-butanediol, hexamethylene glycol, neopentyl glycol, diethylene glycol, triethylene glycol, dipropylene glycol, tripropylene glycol, glycerin, and ester derivatives thereof. , These ether derivatives; polyethylene glycol, polypropylene glycol and the like. Among these, at least one selected from the group consisting of ethylene glycol, propylene glycol, dipropylene glycol, diethylene glycol, polyethylene glycol, glycerin, their ester derivatives and their ether derivatives is preferable, and ethylene glycol, diethylene glycol, polyethylene glycol More preferably, one or more selected from the group consisting of glycerin, their ester derivatives and their ether derivatives, and one or more selected from the group consisting of diethylene glycol, glycerin, their ester derivatives, and their ether derivatives are further preferable.

Examples of the antifoaming agent include silicone oil, fluorosilicone oil, polyether polysiloxane, and fluoroalkyl ether. Of these, polyether polysiloxane is preferred.
Examples of the metal deactivator include imidazoline, pyrimidine derivatives, thiadiazole, and benzotriazole.
Examples of the disinfectant / preservative include paraoxybenzoic acid esters (parabens), benzoic acid, salicylic acid, sorbic acid, dehydroacetic acid, p-toluenesulfonic acid and salts thereof, and phenoxyethanol.
Examples of the rust preventive include alkylbenzene sulfonate, dinonyl naphthalene sulfonate, alkenyl succinate, and polyhydric alcohol ester.
Examples of the antioxidant include phenolic antioxidants and amine antioxidants.

  When component (B) contains other additives, the content of other additives is preferably 0.1% by mass or more, more preferably 1.0% by mass, based on 100% by mass of the total amount of component (B). More preferably, it is 2.0% by mass or more, still more preferably 3.0% by mass or more, and still more preferably 4.0% by mass or more. On the other hand, the content of the other additives is preferably 17.0% by mass or less, more preferably 15.0% by mass or less, and further preferably 12.0% by mass, based on the total amount of component (B) of 100% by mass. Hereinafter, it is more preferably 10.0% by mass or less, and still more preferably 6.0% by mass or less.

  When component (B) contains other additives, the ratio of the amount of other additives in component (B) and the total content of components (B-1) and (B-2) [(other additives ) / (B-1 + B-2)] is preferably 0.001 or more, more preferably 0.005 or more, still more preferably 0.01 or more, still more preferably 0.02 or more, and still more preferably by mass ratio. Is 0.03 or more. On the other hand, the ratio [(other additives) / (B-1 + B-2)] is preferably 0.20 or less, more preferably 0.18 or less, still more preferably 0.14 or less, and still more preferably in terms of mass ratio. Is 0.11 or less, more preferably 0.06 or less.

Moreover, from a viewpoint of obtaining the effect of the present invention more effectively, when the component (B) contains other additives, the component (B-1), the component (B-2), and other additives are added in the component (B). The total content of the agent is preferably 100% by mass, based on the total amount of component (B) of 100% by mass.
Further, from the viewpoint of obtaining the effect of the present invention more effectively, the total content of the component (A) and the component (B) is preferably 100% by mass based on the total amount of the processing fluid of 100% by mass.

[Method for producing brittle material working fluid composition]
The manufacturing method of the brittle material working fluid composition is:
A method for producing a brittle material working fluid composition comprising at least (A) water and (B) an additive mixture,
Component (B) is
(B-1) an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant having an HLB value of 4 to 11; and
(B-2) including a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on the total amount of the component (B) of 100% by mass,
A brittle material working fluid composition was formulated by blending so that the total content of components (B-1) and (B-2) was 83.0% by mass or more based on 100% by mass of the total amount of component (B). It is a manufacturing method to obtain.

There is no restriction | limiting in particular in the order which mix | blends a component (A), a component (B-1), and a component (B-2), A component (B-1) and a component (B-2) are compared with respect to a component (A). You may mix | blend sequentially or simultaneously, you may mix | blend a component (B-1) and a component (B-2) previously, and you may mix | blend the mixture with a component (A).
Moreover, in the said manufacturing method, a component (A), a component (B-1), and a component (B-2) may be mix | blended, and also other additives may be mix | blended as needed, In that case, each mix | blending There are no particular restrictions on the order in which the components are blended, the blending method, and the like.
However, when the brittle material working fluid composition is used for processing a brittle material, the stock solution of the brittle material working fluid composition described above is prepared in advance, and then the component (A) is further added to the stock solution. It is preferable to prepare and use a diluted solution of the brittle material processing fluid composition.
For example, the diluting liquid of the brittle material processing liquid composition can be appropriately adjusted depending on the use of the diluting liquid. However, the stock solution of the brittle material processing liquid composition can be prepared using the component (A). It can be prepared by diluting so that the total amount (volume) is preferably 2 times or more, more preferably 5 times or more, still more preferably 10 times or more, and still more preferably 100 times or more. On the other hand, the diluting liquid of the brittle material processing liquid composition can be appropriately adjusted depending on the use of the diluting liquid. However, the stock solution of the brittle material processing liquid composition can be prepared using the component (A). It can be prepared by diluting so that the total amount (volume) is preferably 1,000 times or less, more preferably 900 times or less, still more preferably 800 times or less, and still more preferably 700 times or less.

In addition, a component (A), a component (B-1), a component (B-2), and another additive are respectively the same as what was mentioned above in the column of a brittle material processing liquid composition, The suitable aspect Since this is the same, detailed description thereof is omitted. Moreover, about the suitable compounding quantity of a component (A), a component (B-1), a component (B-2), and another additive, and the suitable compounding quantity ratio between each component, respectively, a brittle material processing liquid composition Since it is the same as each content and each content ratio in the said brittle material processing-fluid composition mentioned above in the column of the thing, the detailed description is abbreviate | omitted.
Moreover, the component (A) and component (B- 1), the component (B-2), and other suitable additives, and the preferable compounding ratio between the components are also the same as the contents and content ratios described later, Detailed description thereof is omitted.

[Use of brittle material processing fluid composition]
The brittle material working fluid composition can be suitably used when wire sawing a workpiece made of a brittle material such as a silicon ingot using the wire saw described above, preferably a fixed abrasive wire saw. That is, the processing liquid can be suitably used when processing a workpiece made of a brittle material using a wire.
Examples of the brittle material include crystalline silicon, sapphire, gallium nitride, silicon carbide, neodymium magnet, zirconia, graphite, niobic acid, tantalate, quartz and glass. The processing liquid can be more suitably used when processing crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass from the viewpoint of the contamination suppression effect, and processes crystalline silicon, sapphire, or silicon carbide. In this case, it can be used more suitably.

[Processing of brittle materials]
A brittle material processing method according to an embodiment of the present invention is a method of processing a workpiece made of the brittle material such as a silicon ingot using the brittle material working fluid composition.
Here, the machining fluid is used by supplying the machining fluid to the workpiece and bringing it into contact with the workpiece. The machining fluid lubricates between the workpiece and a processing tool such as the wire saw. Furthermore, it is used for removal of chips (chips), rust prevention of workpieces, cooling of tools and workpieces, and the like.
Specific examples of the processing of the brittle material performed using the processing liquid include various processing such as cutting, grinding, punching, polishing, drawing, drawing, rolling, and the like. Among them, cutting and grinding are preferable, and cutting is more preferable.
Examples of the brittle material as the workpiece include the materials described above.
Note that, as described above, the processing liquid is preferably used as one used for cutting a silicon ingot.

More specifically, as described above, the wire saw processing method of both the free abrasive grain method and the fixed abrasive grain method cuts a plurality of silicon wafers from the silicon ingot at a time. Is used. In the multi-wire saw device, one wire is wound around each groove on two or more guide rollers having a plurality of grooves carved at a constant interval, and each wire is held in parallel with a constant tension. During the cutting process, each guide roller is rotated and the wire is run in one or both directions while the machining liquid discharged from the nozzle or the like is adhered to the wire, and the silicon ingot is pushed onto the wire to which the machining liquid is adhered. Cutting is applied. In addition, processing may be performed while applying a processing liquid to a workpiece itself such as a silicon ingot as necessary.
The processing liquid used for processing is stored in a tank or the like, and is transported from there to the aforementioned processing chamber nozzle by piping or the like. Further, the machining fluid used at the time of cutting is collected in a used machining fluid receiving tank or the like below the cutting device. Moreover, depending on the case, it may be reused by circulating in the apparatus.
Therefore, the processing liquid is more preferably used as a processing liquid used in such a brittle material processing method. Among these, the processing liquid is further used as a processing liquid used in a processing method of cutting a silicon wafer from a silicon ingot with a fixed abrasive wire. It is preferably used and more preferably used by a processing method of cutting a silicon wafer from a silicon ingot using a multi-wire apparatus using a fixed abrasive wire saw.

[Processing equipment]
The brittle material processing apparatus according to one embodiment of the present invention is a processing apparatus that uses the brittle material processing liquid composition according to one embodiment of the present invention, preferably a multi-wire cutting apparatus, and more preferably. A multi-wire cutting apparatus equipped with a fixed abrasive wire saw, and more preferably a multi-wire cutting apparatus equipped with a fixed abrasive wire saw for cutting a silicon ingot.

In addition, examples of the brittle material working fluid composition related to one embodiment of the present invention can include the following embodiments [2-1] to [2-18].
In addition, a part of aspect contained in embodiment described in the following [2-1]-[2-18] can also be mentioned as an example of the aspect which concerns on the stock solution mentioned above.
[2-1] A brittle material processing fluid composition comprising the following component (A), component (B-1) and component (B-2),
The content of the component (B-1) is more than 0.500% by mass and 90.0% by mass or less based on the total amount of 100% by mass of the brittle material working fluid composition,
The content of the component (B-2) is more than 0.500% by mass and 90.0% by mass or less based on 100% by mass of the total amount of the brittle material working fluid composition,
The total content of the component (B-1) and the component (B-2) is more than 1.00% by mass and not more than 98.0% by mass based on the total amount of 100% by mass of the brittle material processing liquid composition.
Brittle material processing fluid composition.
Component (A): Water component (B-1): Alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant component (B-2) having an HLB value of 4 to 11 Copolymer of ethylene oxide and alkylene oxide other than ethylene oxide [2-2] The number average molecular weight of component (B-2) is preferably 500 or more, more preferably 1,000 or more, still more preferably 1,500 or more. The brittle material working fluid composition according to [2-1], which is preferably 6,000 or less, more preferably 5,000 or less, and still more preferably 3,000 or less.
[2-3] The content of the component (A) is preferably 1.00% by mass or more, more preferably 2.00% by mass or more, and still more preferably based on the total amount of the brittle material working fluid composition of 100% by mass. 5.00% by mass or more, more preferably 10.0% by mass or more, still more preferably 20.0% by mass or more, and preferably 90.0% by mass or less, more preferably 85.0% by mass. Hereinafter, the brittle material working fluid composition according to [2-1] or [2-2], which is more preferably 80.0% by mass or less, and still more preferably 70.0% by mass or less.
[2-4] The surface tension of the 0.1% by mass aqueous solution of component (B-1) is preferably 31 mN / m or less, more preferably 30 mN / m or less, still more preferably 29 mN / m or less, and even more preferably 28 mN. / M, and preferably 1 mN / m or more, more preferably 5 mN / m or more, and even more preferably 10 mN / m or more, according to any one of [2-1] to [2-3]. A brittle material processing fluid composition.
[2-5] The content of the component (B-1) is preferably 0.800% by mass or more, more preferably 1.00% by mass or more, based on 100% by mass of the total amount of the brittle material working fluid composition. Preferably, it is 1.50% by mass or more, and preferably 80.0% by mass or less, more preferably 90.0% by mass or less, and further preferably 70.0% by mass or less, [2-1] The brittle material working fluid composition according to any one of to [2-4].
[2-6] The content of component (B-2) is preferably 100% by mass based on the total amount of the brittle material working fluid composition and 100% by mass based on the total amount of the brittle material working fluid composition. % Or more, more preferably 5.00% by mass or more, still more preferably 10.0% by mass or more, and preferably 80.0% by mass or less, more preferably 70.0% by mass or less, still more preferably 60%. The brittle material working fluid composition according to any one of [2-1] to [2-5], which is 0.0 mass% or less.
[2-7] The ratio [(B-1) / (B-2)] of the content of the component (B-1) and the content of the component (B-2) is preferably a mass ratio, preferably 0.8. 015 or more, more preferably 0.020 or more, still more preferably 0.050 or more, still more preferably 0.10 or more, still more preferably 0.50 or more, still more preferably 1.00 or more, and even more preferably. 2.00 or more, more preferably 3.00 or more, and preferably 9.50 or less, more preferably 8.00 or less, still more preferably 7.00 or less, even more preferably 6.00 or less, The brittle material processing liquid composition according to [2-1] to [2-6], which is even more preferably 5.00 or less.
[2-8] The total content of the component (B-1) and the component (B-2) is preferably 5.00% by mass or more, more preferably 100% by mass or more based on the total amount of the brittle material processing liquid composition. 10.0% by mass or more, more preferably 20.0% by mass or more, still more preferably 25.0% by mass or more, and preferably 95.0% by mass or less, more preferably 90.0% by mass or less. The brittle material working fluid composition according to any one of [2-1] to [2-7], more preferably 80.0% by mass or less, and still more preferably 70.0% by mass or less.
[2-9] Further, other additives are included, and the total content of the other additives is preferably 0.01% by mass or more, more preferably 0.00% or more based on the total amount of the brittle material processing liquid composition of 100% by mass. 10 mass% or more, more preferably 1.00 mass% or more, still more preferably 2.00 mass% or more, and preferably 10.00 mass% or less, more preferably 8.00 mass% or less, The brittle material working fluid composition according to any one of [2-1] to [2-8], which is preferably 7.00% by mass or less, and more preferably 6.00% by mass or less.
[2-10] The total content of the component (A), the component (B-1) and the component (B-2) is preferably 90.00% by mass based on the total amount of 100% by mass of the brittle material working fluid composition. More preferably, it is 92.00% by mass or more, more preferably 93.00% by mass or less, still more preferably 94.00% by mass or more, and preferably 100% by mass or less, more preferably 99.99%. [2-1] to [2-9], which are not more than mass%, more preferably not more than 99.90 mass%, still more preferably not more than 99.00 mass%, still more preferably not more than 98.00 mass%. The brittle material working fluid composition according to any one of the above.
[2-11] The brittle material working fluid composition, wherein the total content of component (A), component (B-1), component (B-2), and other additives added as necessary The brittle material working fluid composition according to the above [2-9] or [2-10], which is 100% by mass based on the total amount of 100% by mass.
[2-12] The brittle material working fluid composition according to any one of [2-1] to [2-11], which is used when a workpiece made of a brittle material is processed using a wire.
[2-13] The brittle material working fluid composition according to [2-12], wherein the wire is a fixed abrasive wire.
[2-14] The brittle material working fluid composition according to [2-12] or [2-13], wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass.
[2-15] The brittle material processing according to any one of [2-1] to [2-14], wherein at least the following component (A), component (B-1), and component (B-2) are blended: A method for producing a liquid composition.
Component (A): Water component (B-1): Alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant component (B-2) having an HLB value of 4 to 11 : Copolymer of ethylene oxide and alkylene oxide other than ethylene oxide [2-16] The brittle material working fluid composition according to any one of [2-10] to [2-14] In terms of the total amount (volume) of the liquid composition, preferably 2 times or more, more preferably 5 times or more, still more preferably 10 times or more, still more preferably 100 times or more, and preferably 1,000 times or less, more A brittle material that is further diluted with the component (A) so as to be 900 times or less, more preferably 800 times or less, and still more preferably 700 times or less, and is used for processing a brittle material. Use of the processing fluid composition.
[2-17] The brittle material processing fluid composition according to any one of [2-10] to [2-14] preferably has a pH of 3 or more, more preferably 4 or more, and even more preferably 5 or more. Yes, preferably 9 or less, more preferably 8 or less, and even more preferably 7 or less, further diluted with the component (A) for use in processing brittle materials. use.
[2-18] The brittle material working fluid composition according to any one of the above [2-10] to [2-14] is used in accordance with 17. of JIS K 0102: 2016. The oxygen consumption (COD _Mn ) by potassium permanganate at 100 ° C. measured according to the test method described in 1. is preferably 100 mg / L or more, more preferably 500 mg / L or more, and still more preferably 1,000 mg. Is further diluted with the component (A) so as to be less than 10,000 mg / L, more preferably less than 8,000 mg / L, still more preferably less than 7,000 mg / L. Use of a brittle material working fluid composition for use in the processing of brittle materials.

In addition, examples of the brittle material working fluid composition related to one embodiment of the present invention can include the following embodiments [3-1] to [3-17].
In addition, a part of aspect contained in embodiment described in the following [3-1]-[3-17] can also be mentioned as an example of the aspect which concerns on the diluent mentioned above.

[3-1] A brittle material processing fluid composition comprising the following component (A), component (B-1) and component (B-2),
The content of the component (B-1) is 0.005% by mass or more and 0.500% by mass or less based on 100% by mass of the total amount of the brittle material working fluid composition,
The content of the component (B-2) is 0.005% by mass or more and 0.500% by mass or less based on 100% by mass of the total amount of the brittle material working fluid composition,
The total content of the component (B-1) and the component (B-2) is 0.108% by mass or more and 1.000% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
Brittle material processing fluid composition.
Component (A): Water component (B-1): Alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant component (B-2) having an HLB value of 4 to 11 Copolymer of ethylene oxide and alkylene oxide other than ethylene oxide [3-2] The number average molecular weight of component (B-2) is preferably 500 or more, more preferably 1,000 or more, still more preferably 1,500 or more. The brittle material working fluid composition according to [3-1], which is preferably 6,000 or less, more preferably 5,000 or less, and still more preferably 3,000 or less.
[3-3] The content of the component (A) is preferably 90.00% by mass or more, more preferably 95.00% by mass or more, still more preferably, based on 100% by mass of the total amount of the brittle material working fluid composition. 99.00% by mass or more, more preferably 99.20% by mass or more, still more preferably 99.40% by mass or more, and preferably 99.99% by mass or less, more preferably 99.95% by mass. The following [3-1] or [3-2], more preferably 99.90% by mass or less, still more preferably 99.85% by mass or less, and still more preferably 99.80% by mass or less. A brittle material processing fluid composition.
[3-4] The surface tension of the 0.1 mass% aqueous solution of component (B-1) is preferably 31 mN / m or less, more preferably 30 mN / m or less, still more preferably 29 mN / m or less, and even more preferably 28 mN. / M, and preferably 1 mN / m or more, more preferably 5 mN / m or more, and even more preferably 10 mN / m or more, according to any one of [3-1] to [3-3]. A brittle material processing fluid composition.
[3-5] The pH is preferably 3 or more, more preferably 4 or more, still more preferably 5 or more, and preferably 9 or less, more preferably 8 or less, and even more preferably 7 or less. -1] to [3-4] The brittle material working fluid composition according to any one of [3-4].
[3-6] The content of the component (B-1) is preferably 0.007% by mass or more, more preferably 0.010% by mass or more, based on 100% by mass of the total amount of the brittle material processing fluid composition, Preferably it is 0.020 mass% or more, More preferably, it is 0.050 mass% or more, More preferably, it is 0.080 mass% or more, More preferably, it is 0.150 mass% or more, Preferably it is 0.00. 480% by mass or less, more preferably 0.460% by mass or less, further preferably 0.450% by mass or less, still more preferably 0.440% by mass or less, still more preferably 0.430% by mass or less, [3-1] The brittle material working fluid composition according to any one of [3-5].
[3-7] The content of the component (B-2) is preferably 0.010 mass based on 100 mass% of the total amount of the brittle material working fluid composition and 100 mass% of the total amount of the brittle material processing fluid composition. % Or more, more preferably 0.020% by mass or more, still more preferably 0.030% by mass or more, still more preferably 0.040% by mass or more, still more preferably 0.060% by mass or more, and still more preferably 0. 0.080% by mass or more, and preferably 0.480% by mass or less, more preferably 0.450% by mass or less, still more preferably 0.400% by mass or less, still more preferably 0.350% by mass or less, The brittle material working fluid composition according to any one of [3-1] to [3-6], more preferably 0.300% by mass or less, and still more preferably 0.200% by mass or less.
[3-8] The ratio [(B-1) / (B-2)] of the content of the component (B-1) and the content of the component (B-2) is preferably a mass ratio, preferably 0.8. 015 or more, more preferably 0.020 or more, still more preferably 0.050 or more, still more preferably 0.10 or more, still more preferably 0.50 or more, still more preferably 1.00 or more, and even more preferably. 2.00 or more, more preferably 3.00 or more, and preferably 9.50 or less, more preferably 8.00 or less, still more preferably 7.00 or less, even more preferably 6.00 or less, The brittle material working fluid composition according to [3-1] to [3-7], which is even more preferably 5.00 or less.
[3-9] The total content of the component (B-1) and the component (B-2) is preferably 0.110% by mass or more, more preferably based on 100% by mass of the total amount of the brittle material processing liquid composition. 0.150% by mass or more, more preferably 0.200% by mass or more, still more preferably 0.300% by mass or more, still more preferably 0.400% by mass or more, and preferably 0.900% by mass. In the following, any one of [3-1] to [3-8], more preferably 0.800% by mass or less, still more preferably 0.700% by mass or less, and still more preferably 0.600% by mass or less. The brittle material working fluid composition according to claim 1.
[3-10] Further, other additives are included, and the total content of other additives is preferably 0.0001% by mass or more, more preferably 0.001% by mass or more based on 100% by mass of the total amount of the brittle material processing liquid composition. 001% by mass or more, more preferably 0.005% by mass or more, still more preferably 0.010% by mass or more, still more preferably 0.015% by mass or more, and preferably 0.200% by mass or less, More preferably, it is 0.150 mass% or less, More preferably, it is 0.100 mass% or less, More preferably, it is 0.050 mass% or less, In any one of said [3-1]-[3-9]. A brittle material processing fluid composition.
[3-11] The total content of the component (A), the component (B-1) and the component (B-2) is preferably 95.000% by mass based on the total amount of 100% by mass of the brittle material working fluid composition. Or more, more preferably 98.000% by mass or more, further preferably 99.800% by mass or more, still more preferably 99.900% by mass or more, still more preferably 99.950% by mass or more, and preferably 100% by mass or less, more preferably 99.9999% by mass or less, still more preferably 99.999% by mass or less, still more preferably 99.995% by mass or less, still more preferably 99.990% by mass or less, and still more preferably Is a brittle material working fluid composition according to any one of [3-1] to [3-10], which is 99.985% by mass or less.
[3-12] A brittle material working fluid composition in which the total content of component (A), component (B-1), component (B-2), and other additives added as necessary is The brittle material working fluid composition according to the above [3-10] or [3-11], which is 100% by mass based on the total amount of 100% by mass.
[3-13] 17. JIS K 0102: 2016 The oxygen consumption (COD _Mn ) by potassium permanganate at 100 ° C. measured according to the test method described in 1. is preferably 100 mg / L or more, more preferably 500 mg / L or more, and still more preferably 1,000 mg. [3] to [3-12], preferably less than 10,000 mg / L, more preferably 8,000 mg / L or less, and still more preferably 7,000 mg / L or less. ] The brittle material processing liquid composition in any one of.
[3-14] The brittle material working fluid composition according to any one of [3-1] to [3-13], which is used when a workpiece made of a brittle material is processed using a wire.
[3-15] The brittle material working fluid composition according to [3-14], wherein the wire is a fixed abrasive wire.
[3-16] The brittle material working fluid composition according to [3-14] or [3-15], wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass.
[3-17] The brittle material processing according to any one of [3-1] to [3-16], wherein at least the following component (A), component (B-1), and component (B-2) are blended: A method for producing a liquid composition.
Component (A): Water component (B-1): Alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant component (B-2) having an HLB value of 4 to 11 : Copolymer of ethylene oxide and alkylene oxide other than ethylene oxide

In addition, as described in [2-1] to [2-18] and [3-1] to [3-17], the component (A), the component (B-1), the component (B-2), and Other additives are the same as the corresponding components described above in the section of the brittle material processing liquid composition according to [1], which is an embodiment of the present invention, and the preferred embodiments thereof are also the same. Therefore, detailed description is omitted.
In addition, in the embodiments described in [2-1] to [2-18] and [3-1] to [3-17], the reasons for setting the preferable ranges of the respective contents and mass ratios are also described in the present invention. Since it is the same as the reason for setting the content of each corresponding component described above in the column of the brittle material working fluid composition according to [1] which is an embodiment of the present invention, detailed description thereof is omitted.
In addition, in the embodiments described in [2-1] to [2-18] and [3-1] to [3-17], the blending amount of other additives and components (B-1) and (B-2) )) To the total content [(other additives) / (B-1 + B-2)] (mass ratio) is also a preferred range according to [1], which is an embodiment of the present invention. Since it is the same as the range mentioned above in the column of a brittle material processing liquid composition, detailed description is abbreviate | omitted.

Moreover, about the manufacturing method of the brittle material processing liquid composition as described in said [2-15], there is no restriction | limiting in particular in the order which mix | blends a component (A), a component (B-1), and a component (B-2), Component (B-1) and component (B-2) may be blended sequentially or simultaneously with component (A), and component (B-1) and component (B-2) are blended in advance. The mixture may be blended with the component (A).
Moreover, in the said manufacturing method, a component (A), a component (B-1), and a component (B-2) may be mix | blended, and also other additives may be mix | blended as needed, In that case, each mix | blending There are no particular restrictions on the order in which the components are blended, the blending method, and the like.
The same applies to the method for producing a brittle material working fluid composition described in [3-17]. However, in the case of the method for producing a brittle material working fluid composition according to [3-17] above, the step of preparing a stock solution of the brittle material working fluid composition in advance using the production method according to [2-15] above And a step of further blending and diluting the component (A) with the stock solution to prepare a brittle material processing liquid composition. The preferable range of the dilution ratio when diluting the stock solution with the component (A) is the same as the range described above in the column of the brittle material processing liquid composition according to [1], which is an embodiment of the present invention. is there.

  Moreover, the use of the brittle material working fluid composition according to the above [2-1] to [2-18] and [3-1] to [3-17], the processing of the brittle material using the brittle working fluid composition The method and the processing apparatus are also the same as the contents described in the corresponding items in the column of the brittle material processing liquid composition according to [1], which is an embodiment of the present invention, respectively, and thus the detailed description is as follows. Omitted.

Examples The present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples.
In addition, each physical property regarding each component and a brittle material working fluid composition was evaluated according to the following procedure.

[HLB value]
The value calculated by the Griffin method was used.

[Surface tension of 0.1% by weight aqueous solution]
A value measured in accordance with a test method using a Wilhelmy surface tension meter described in JIS K 2241: 2017 was used.

[Molecular weight]
The weight average molecular weight (Mw) and the number average molecular weight (Mn) were measured using gel permeation chromatography (GPC). GPC uses two TSKgel SuperMultipores HZ-M manufactured by Tosoh Corporation as a column, performs measurement using tetrahydrofuran as an eluent, and a refractive index detector as a detector, and uses polystyrene as a standard sample and weight average molecular weight (Mw) and number The average molecular weight (Mn) was determined.

[PH value]
The pH of each brittle material working fluid composition obtained in Examples and Comparative Examples was evaluated using a glass electrode type hydrogen ion concentration indicator, model: HM-25R, manufactured by Toa DKK Corporation.

[Silicon (Si) friction coefficient]
Using each brittle material working fluid composition obtained in the examples and comparative examples, a reciprocating friction test was performed according to the following test conditions to measure the friction coefficient.
Testing machine: “F-2100” manufactured by Orientec Co., Ltd.
Sphere: 3/16 inch SUJ2
Test temperature: room temperature test plate: polycrystalline silicon sliding speed: 20 mm / sec sliding distance: 2 cm
Load: 200g

[Defoaming evaluation]
Using each brittle material working fluid composition obtained in Examples and Comparative Examples, evaluation was performed according to the following procedure.
(Liquid level: no fine powder)
200 mL of the processing liquid is poured into a 2 L measuring cylinder (total height: 460 mm, inner diameter φ85 mm) equipped with a liquid circulating device, and the processing liquid is extracted from the bottom of the measuring cylinder with a circulating device and circulated, and the bottom of the 2 L measuring cylinder From the position where the height from the nozzle becomes 400 mm, the extracted working fluid was discharged into the 2 L graduated cylinder using a nozzle having an inner diameter of φ5 mm. The circulation rate was adjusted so that the flow rate of the working fluid at this time was 1.3 L / min.
The liquid level after 5 minutes from the start of circulation was measured.
The liquid level is compared with the unit “mL” using the scale of the graduated cylinder.
At this time, when bubbling occurs, the liquid level height increases, that is, the value of “mL” increases. Therefore, the smaller the liquid level height value “mL”, the better the defoaming property.
The obtained results are shown in Tables 1 and 2 below.
(Liquid level: fine powder)
A blend of fine powder (“graphite powder”, manufactured by Wako Pure Chemical Industries, Ltd., special grade) so as to have a concentration of 13 mass% in the evaluation liquid was prepared as an evaluation liquid.
Except using the said evaluation liquid, liquid level height was measured by the method similar to the measuring method of the liquid level height "without fine powder", and the defoaming property of the processing liquid at the time of fine powder mixing was evaluated.

[Evaluation of waste liquid treatment]
The oxygen consumption (COD _Mn ) by potassium permanganate at 100 ° C. of each brittle material working fluid composition obtained in the examples and comparative examples was determined according to 17. of JIS K 0102: 2016. Measured according to the test method described in 1. From the numerical value of COD _Mn , the waste liquid processability of each brittle material processing liquid composition obtained in the examples and comparative examples was evaluated according to the following criteria.

-Y: COD _Mn is less than 10,000 mg / L-N: COD _Mn is 10,000 mg / L or more

In addition, the fact that it is a processing liquid with excellent waste liquid treatability means that it is a processing liquid that can sufficiently exhibit performances such as lubricity and defoaming properties required as a processing liquid even with a smaller active ingredient concentration as described above. Also represents.
Similarly, the waste liquid processability in the present invention is not intended to specify that the processing liquid actually satisfies a specific water content, and the evaluation based on the above index can exhibit sufficient performance even with a small concentration of active ingredients. It is also used as an index for judging whether or not it is a machining fluid.

[Examples 1 to 5, Comparative Examples 1 to 7]
Each component was blended so as to have the composition shown in Tables 1 and 2 below to prepare a brittle material working fluid composition. According to the said evaluation method, the brittle material processing liquid composition of each Example and a comparative example was evaluated. The obtained results are shown in Tables 1 and 2 below.

In addition, each component shown in following Table 1 and 2 represents the following compounds, respectively.
Ingredient (A)
・ Additives other than ion-exchanged water component (A) (component (B) in Table 1 or raw material of active ingredients in Table 2)
Surfactant 1: EO adduct of alcohol having 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 7.9, surface tension of 0.1 mass% aqueous solution = 27.9 mN / m
Surfactant 2: EO adduct of C12 alcohol (main component: polyoxyalkylene alkyl ether), HLB = 6.3, surface tension of 0.1 mass% aqueous solution = 26.6 mN / m
Surfactant 3: EO adduct of alcohol having 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 8.9, surface tension of 0.1 mass% aqueous solution = 27.6 mN / m
Surfactant 4: EO adduct of alcohol having 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 12.1, surface tension of 0.1 mass% aqueous solution = 28.3 mN / m
Surfactant 5: block copolymer of ethylene oxide (EO) and propylene oxide (PO) (pluronic surfactant), number average molecular weight (Mn) = 2,950, number average of polyoxypropylene chain portion Molecular weight (Mn) = 1,750, EO added mole number = 27, HLB = 8
Antifoaming agent: polyether polysiloxane pH adjusting agent 1: isononanoic acid pH adjusting agent 2: triisopropanolamine

As shown in Table 1, the brittle material working fluid compositions of Examples 1 to 5 include the component (A) and the component (B), and the component (B) is the component (B-1) and the component (B-2). Each with a predetermined content, and the total content of the component (B-1) and the component (B-2) in the component (B) is 83.0% by mass or more, Even if the value of COD _Mn is low, the lubricity and antifoaming property are excellent, and it was confirmed that the balance of lubricity, defoaming property and waste liquid treatment property is excellent.
On the other hand, as shown in Table 2, the brittle material working fluid compositions of Comparative Examples 1 to 7 include the component (A) and the component (B), and the component (B) is the component (B-1) and the component (B -2) each with a predetermined content, and the total content of component (B-1) and component (B-2) in component (B) is 83.0% by mass or more Since all of these were not satisfied, it was confirmed that the properties were inferior in any of lubricity, defoaming properties, and waste liquid treatment properties.
The brittle material working fluid composition described in Example 1 was used to cut a silicon ingot using a fixed-abrasive multi-wire saw device. As a result, the brittle material working fluid composition was less foamed during processing. It was confirmed that the antifoaming property was excellent. Moreover, it was also confirmed that the waste liquid processability of the brittle material processing liquid composition is excellent.

The brittle material working fluid composition according to an embodiment of the present invention is excellent in the balance of lubricity, antifoaming property, and waste liquid treatment property. Therefore, for example, when cutting a workpiece made of a brittle material such as a silicon ingot, foaming of the processing liquid can be suppressed, and the processing liquid overflows from the tank that receives the processing liquid due to foaming. It is possible to prevent adverse effects such as a soaking (occurrence of overflow) failure or a reduction in processing accuracy caused by foaming.
In addition, since the brittle material working fluid composition according to one embodiment of the present invention has excellent waste liquid treatment properties, it is economically efficient due to improved environmental safety, improved safety during work, and reduced load associated with waste liquid treatment. It leads to improvement.
As described above, the brittle material working fluid composition according to an embodiment of the present invention is preferably used as a material for cutting brittle materials such as silicon ingots, and more preferably, It is used as a coolant for machining a silicon wafer from a silicon ingot using a fixed abrasive wire.

Claims (10)

(A) water, and (B) additive mixture,
Component (B) is
(B-1) an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant having an HLB value of 4 to 11; and
(B-2) including a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The total content of components (B-1) and (B-2) is 83.0% by mass or more based on the total amount of component (B) of 100% by mass,
Brittle material processing fluid composition.   The brittle material working fluid composition according to claim 1, wherein the number average molecular weight of the component (B-2) is 500 or more and 6,000 or less.   The brittle material working fluid composition according to claim 1 or 2, wherein the surface tension of a 0.1% by mass aqueous solution of the component (B-1) is 31 mN / m or less.   Ratio [(B-1) / (B-2)] of content of component (B-1) and content of component (B-2) is 0.015 or more and 9.50 or less in mass ratio. The brittle material working fluid composition according to any one of claims 1 to 3.   The brittle material processing liquid composition according to any one of claims 1 to 4, wherein the pH is 3 or more and 9 or less.   The brittle material working fluid composition according to any one of claims 1 to 5, wherein the component (A) is contained in an amount of 900 parts by mass or more and 999,900 parts by mass or less with respect to 100 parts by mass of the component (B).   The brittle material working fluid composition according to any one of claims 1 to 6, which is used when a workpiece made of a brittle material is processed using a wire.   The brittle material working fluid composition according to claim 7, wherein the wire is a fixed abrasive wire.   The brittle material working fluid composition according to claim 7 or 8, wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass. A method for producing a brittle material working fluid composition comprising at least (A) water and (B) an additive mixture,
Component (B) is
(B-1) an alkylene oxide adduct of an alcohol having 10 to 24 carbon atoms, and a nonionic surfactant having an HLB value of 4 to 11; and
(B-2) including a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on the total amount of the component (B) of 100% by mass,
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on the total amount of the component (B) of 100% by mass,
A brittle material working fluid composition was formulated by blending so that the total content of components (B-1) and (B-2) was 83.0% by mass or more based on 100% by mass of the total amount of component (B). The manufacturing method of the brittle material processing-fluid composition as described in any one of Claims 1-9 obtained.