JP7104541B2 - Brittle material processing liquid composition - Google Patents

Description

The present invention relates to a brittle material processing liquid composition.

In the manufacture of semiconductor products, it is important to accurately cut a silicon ingot, which is a brittle material, and in the cutting of a silicon ingot, wire saw processing is generally used from the viewpoint of processing accuracy and productivity.
Wire saw processing is also used in the processing of materials such as ceramics, quartz, sapphire, and glass.
Generally, as a processing method using a wire saw, a free abrasive grain method in which processing is performed while supplying free abrasive grains to the sliding portion between the wire and the workpiece, and a wire in which the abrasive grains are fixed in advance on the surface of the wire. A fixed wire method in which processing is performed using a wire can be mentioned.
For example, in recent years, in the field of producing a silicon wafer from the above-mentioned silicon ingot, further improvement in productivity is required, cutting is possible in a shorter time than the free abrasive grain method, and a finer wire tool is used. The fixed abrasive grain method has come to be often used because the yield can be improved by using the silicon wafer.

In addition, both types of wire saw processing improve processing efficiency during cutting, suppress friction between the work material and the tool that processes the work material, remove heat generated by processing (cooling), and extend the life of the tool. , A processing liquid (coolant) is used for the purpose of removing chips and the like.
The processing liquid used in the above-mentioned applications is an oil-based processing liquid composition containing mineral oil, animal and vegetable oil, synthetic oil, etc. as the main components, and an aqueous system obtained by blending a compound having a surface-active ability to impart water solubility. The processing liquid composition of the above is included.
In recent years, water-soluble products have been used from the viewpoint of safety during work and environmental problems.

For example, Patent Document 1 describes a water-soluble processing liquid composition for a fixed-abrasive wire saw used for cutting a processing material other than a rare earth magnet, which is characterized by containing glycols. Liquid compositions are disclosed.
Further, Patent Document 2 describes a water-soluble processing liquid composition for a fixed abrasive wire saw used for cutting a rare earth magnet, which comprises glycols, a carboxylic acid, a compound that dissolves in water and exhibits basicity, and water. A water-soluble processing liquid composition for a fixed-abrasive wire saw is disclosed, wherein each of these components is contained in a specific content (however, the total of these components is 100 parts by weight).

Japanese Unexamined Patent Publication No. 2003-82334 Japanese Unexamined Patent Publication No. 2003-82335

In general, in the above-mentioned both types of wire saw processing methods, a multi-wire saw device is used in order to cut out a plurality of silicon wafers at once from the above-mentioned silicon ingot. In the multi-wire saw device, one wire is wound around each groove on two or more guide rollers in which a plurality of grooves are carved at regular intervals, and the wires are held in parallel with a constant tension. Then, at the time of cutting, each guide roller is rotated to attach the working liquid composition discharged from the nozzle or the like to the wire, and the wire is run in one direction or both directions to the wire to which the working liquid composition is attached. The silicon wire is pressed against it to cut it.
The processing liquid composition used for the wire saw processing is charged into a tank provided in the wire saw device, supplied from the tank to a processing chamber nozzle by a pump provided in the wire saw device, and discharged from the nozzle. The machining fluid composition discharged from the nozzle is supplied aiming at the machining gap (gap between the wire and the silicon ingot), is used for lubrication of the machining gap, and then returns to the tank again. Thus, during the cutting of the silicon ingot, the working liquid composition circulates in the wire saw device.
During the cutting process, the machining fluid composition may be violently scattered due to high-speed rotation of the guide roller due to the increase in wire speed, which leads to foaming of the machining fluid composition. Further, during the cutting process, the processing liquid composition may flow down to the tank at the lower part of the wire saw device, so that the processing liquid composition in the tank may violently foam and overflow from the tank. Further, there is a problem that fine chips generated during the cutting process promote foaming of the processing liquid composition, and a wire saw, a cut wafer, etc. are significantly contaminated by the chips, and a load for cleaning them. There was a problem that it became large.
Further, as described above, the processed liquid after use is required to be detoxified by waste liquid treatment.

As described above, in addition to the conventional requirement for lubricity of the brittle material processing liquid composition, it would be better if foaming could be suppressed and the cleanliness of chips could be improved when the processing liquid composition was used. It also leads to stable production and improvement of processing accuracy. Further, a processing liquid composition having more excellent waste liquid treatability, for example, a processing liquid composition having a lower value of chemical oxygen demand (COD) in the processing liquid composition is environmentally friendly. It also leads to improvement of safety, improvement of safety during work, and improvement of economic efficiency by reducing the load associated with waste liquid treatment.
As described above, in recent years, a processing liquid composition having been imparted with water solubility has been required. The water-soluble processing liquid composition is usually used by diluting the stock solution of the processing liquid composition with water. From the viewpoint of the above-mentioned waste liquid treatment property, even when used in a state having a higher water content, it has excellent lubricity and an effect of suppressing foaming during processing (hereinafter, also simply referred to as "foaming property"). There is a demand for a processing liquid composition that can obtain (.). That is, there is a demand for a processing liquid composition having an excellent balance of lubricity, defoaming property, and waste liquid treatment property.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a brittle material processing liquid composition having excellent lubricity, defoaming property, and waste liquid treatment property.

As a result of diligent studies, the present inventors have made a brittle material processing liquid composition containing water and an additive mixture containing a specific compound, and the content of each component in the additive compound satisfies a specific range. However, it has been found that the above-mentioned problems can be solved. Each embodiment of the present invention has been completed based on such findings. That is, according to each embodiment of the present invention, the following [1] to [10] are provided.
[1] Containing (A) water and (B) additive mixture,
Ingredient (B) is
(B-1) A nonionic surfactant which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less, and
(B-2) Containing a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B).
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
The total content of the components (B-1) and (B-2) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B).
Brittle material processing liquid composition.
[2] The brittle material processing liquid composition according to the above [1], wherein the number average molecular weight of the component (B-2) is 500 or more and 6,000 or less.
[3] The brittle material processing liquid composition according to the above [1] or [2], wherein the surface tension of the 0.1% by mass aqueous solution of the component (B-1) is 31 mN / m or less.
[4] The ratio of the content of the component (B-1) to the content of the component (B-2) [(B-1) / (B-2)] is 0.015 or more and 9.50 in terms of mass ratio. The brittle material processing liquid composition according to any one of the above [1] to [3] below.
[5] The brittle material processing liquid composition according to any one of [1] to [4] above, wherein the pH is 3 or more and 9 or less.
[6] The brittle material processing liquid according to any one of [1] to [5] above, which contains 900 parts by mass or more and 999,900 parts by mass or less of the component (A) with respect to 100 parts by mass of the component (B). Composition.
[7] The brittle material processing liquid composition according to any one of [1] to [6] above, which is used when processing a work material made of a brittle material using a wire.
[8] The brittle material processing liquid composition according to the above [7], wherein the wire is a fixed abrasive grain wire.
[9] The brittle material processing liquid composition according to the above [7] or [6], wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass.
[10] A method for producing a brittle material processing liquid composition, which comprises at least (A) water and (B) an additive mixture.
Ingredient (B) is
(B-1) A nonionic surfactant which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less, and
(B-2) Containing a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B).
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
The brittle material processing liquid composition is blended so that the total content of the components (B-1) and (B-2) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B). The method for producing a brittle material processing liquid composition according to any one of the above [1] to [9].

According to the present invention, it is possible to provide a brittle material processing liquid composition having excellent lubricity, defoaming property, and waste liquid treatment property.

[Brittle material processing liquid composition]
The brittle material processing liquid composition (hereinafter, also simply referred to as “processing liquid”) according to one embodiment of the present invention contains (A) water and (B) a mixture of additives, and the component (B) is (B). B-1) An alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms, other than a nonionic surfactant having an HLB value of 4 or more and 11 or less, and (B-2) ethylene oxide and ethylene oxide. It contains a copolymer with alkylene oxide, and the content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B), and the component (B). The content of -2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
The total content of the components (B-1) and (B-2) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B).
A processing liquid that meets all the above requirements has an excellent balance of lubricity, defoaming property, and waste liquid treatment property.

Unless otherwise specified in the present specification, the "alkylene oxide (hereinafter, also simply referred to as" AO ") adduct" is not only a compound to which a single alkylene oxide is added, but also a plurality of alkylene oxides, that is, Also includes compounds with polyalkylene oxides added. Hereinafter, the same applies to "ethylene oxide (hereinafter, also simply referred to as" EO ") adduct" and "propylene oxide (hereinafter, also simply referred to as" PO ") adduct".
Further, the “HLB value” used in the present specification means a value of HLB (Hydrophilic-Lipopicular Balance) calculated by the Griffin method.
In this specification, the lower limit value and the upper limit value described stepwise with respect to a preferable numerical range (for example, a range such as content) can be independently combined. For example, for the corresponding numerical range, a description of a lower limit value of "preferably 10 or more, more preferably 20 or more, still more preferably 30 or more" and "preferably 90 or less, more preferably 80 or less, still more preferably 60 or less". From the above description, the preferable range can be set to "10 or more and 60 or less" by combining the "favorable lower limit value (10)" and the "more preferable upper limit value (60)". Similarly, the preferred range can be set to "30 or more and 90 or less" by combining the "more preferable lower limit value (30)" and the "preferable upper limit value (90)".
Similarly, for example, from the description of "preferably 10 to 90, more preferably 20 to 80, still more preferably 30 to 60", it can be "10 to 60".
Unless otherwise specified, when simply describing "10 to 90" as a preferable numerical range, it represents a range of 10 or more and 90 or less.
Hereinafter, each component contained in the processing liquid will be described.

<Ingredient (A)>
The water as the component (A) is not particularly limited, and purified water such as distilled water and ion-exchanged water (deionized water); tap water; industrial water; and the like can be used, preferably purified water, more preferably. Is ion-exchanged water (deionized water).

The content of the component (A) can be appropriately adjusted depending on the situation in which the processing liquid is used.
For example, when the processing liquid is in a concentrated state (hereinafter, also referred to as “stock liquid”) and the stock liquid is stored and transported, the content of the component (A) is based on 100 parts by mass of the component (B). It is preferably 1.0 part by mass or more, more preferably 5.0 parts by mass or more, further preferably 10.0 parts by mass or more, and even more preferably 25.0 parts by mass or more. On the other hand, the content of the component (A) is preferably 1800 parts by mass or less, more preferably less than 900 parts by mass, still more preferably 550 parts by mass or less, still more preferably 550 parts by mass or less, based on 100 parts by mass of the component (B). It is 200 parts by mass or less.

Further, for example, when the processing liquid is used for processing a brittle material, the above-mentioned stock solution is further diluted with the component (A), and the processing liquid is in a diluted state (hereinafter, also referred to as “diluted liquid”). It is preferable to use, for example, the content of the component (A) is 100 mass of the component (B) from the viewpoint of lowering the viscosity of the processing liquid to improve the handleability and more effectively obtaining the effect of the present invention. With respect to parts, preferably 900 parts by mass or more, more preferably 1,900 parts by mass or more, still more preferably 9,900 parts by mass or more, still more preferably 12,000 parts by mass or more, still more preferably 15,000 parts by mass. It is more than a department. On the other hand, the content of the component (A) is preferably 999,900 parts by mass or less, more preferably 199,900 parts by mass, with respect to 100 parts by mass of the component (B) from the viewpoint of securing the amount of the active ingredient in the processing liquid. It is less than or equal to parts, more preferably 99,900 parts by mass or less, still more preferably 66,500 parts by mass or less, and even more preferably 49,900 parts by mass or less.
Here, in the present specification, the "active ingredient" refers to all the components excluding the component (A) from the processing liquid.

When the processing liquid is used for processing a brittle material, the pH of the diluted liquid is preferably 3 or more from the viewpoint of suppressing corrosion of each wire, processing equipment, etc., which will be described later in the column of application of the processing liquid. It is more preferably 4 or more, still more preferably 5 or more. On the other hand, the pH of the diluted solution is preferably 9 or less, more preferably 8 or less, still more preferably 7 or less, from the viewpoint of suppressing the generation of a large amount of hydrogen from chips when processing silicon or the like. Is.

<Ingredient (B)>
Component (B) is an additive mixture, which is an alkylene oxide adduct of (B-1) alcohol having 10 or more and 24 or less carbon atoms, which is described in detail below, and has an HLB value of 4 or more and 10 or less. Each contains a surfactant and a copolymer of (B-2) ethylene oxide and alkylene oxide in a specific amount. The content and total content of each component will be described later in the explanation column of each component.
When the component (B) contains both the component (B-1) and the component (B-2), the processing liquid composition has good lubricity and good defoaming property, particularly during the above-mentioned cutting process. The processing liquid has an excellent balance with the defoaming property when the fine chips generated in the processing liquid are contained in the processing liquid.
Hereinafter, each component contained in the additive mixture will be described.

[Component (B-1)]
The component (B-1) is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms, and is a nonionic surfactant having an HLB value of 4 or more and 11 or less.
When the HLB value of the component (B-1) is 4 or more, the solubility of the component (B-1) in the component (A) is improved. Further, when the HLB value of the component (B-1) is 11 or less, the defoaming property of the processing liquid is improved.
The HLB value of the component (B-1) is preferably 6 or more, more preferably 8 or more, and further preferably more than 8 from the viewpoint of improving the lubricity of the processing liquid. On the other hand, the HLB value of the component (B-1) is preferably 10 or less, more preferably 9 or less, from the viewpoint of improving the defoaming property of the processing liquid.

The surface tension of the 0.1% by mass aqueous solution of the component (B-1) is preferably 31 mN / m or less, more preferably 30 mN / m or less, still more preferably 29 mN / m or less, still more preferably 28 mN / m. Is less than. On the other hand, the surface tension of the 0.1% by mass aqueous solution of the component (B-1) is preferably 1 mN / m or more, more preferably 5 mN / m or more, and further preferably 10 mN / m or more.

Examples of the alcohol having 10 or more and 24 or less carbon atoms include an aliphatic alcohol having 10 or more and 24 or less carbon atoms.
The carbon number of the alcohol having 10 or more and 24 or less carbon atoms is preferably 11 or more, and more preferably 12 or more. On the other hand, the carbon number of the alcohol having 10 or more and 24 or less carbon atoms is preferably 20 or less, more preferably 18 or less, and further preferably 16 or less.

The aliphatic alcohol is preferably a primary alcohol or a secondary alcohol, and more preferably a primary alcohol. Further, it may be linear, branched, or cyclic.
The aliphatic alcohol is preferably a monohydric alcohol.
Examples of the aliphatic alcohol include decanol, undecyl alcohol, lauryl alcohol, tridecyl alcohol, isotridecyl alcohol, myristyl alcohol, pentadecyl alcohol, palmityl alcohol, heptadecanol, stearyl alcohol, isostearyl alcohol, and nona. Saturated aliphatic alcohols such as decyl alcohol and eikosanol; non-saturated aliphatic alcohols such as decenyl alcohol, dodecenyl alcohol, tridecenyl alcohol, tetradecenyl alcohol, palmitrail alcohol, oleyl alcohol, gadrail alcohol, linoleil alcohol, etc. Saturated aliphatic alcohols; cyclic aliphatic alcohols such as octylcyclohexyl alcohol, nonylcyclohexylalcohol, and adamantyl alcohol can be mentioned.

Examples of the alkylene oxide (AO) include alkylene oxides having 2 to 4 carbon atoms, such as ethylene oxide (EO), 1,2-propylene oxide, 1,3-propylene oxide, 1,2-butylene oxide, and the like. Examples thereof include 2,3-butylene oxide, 1,3-butylene oxide and tetrahydrofuran.
The component (B-1) is preferably a compound in which at least EO is added to the alcohol having 10 or more and 24 or less carbon atoms, and more preferably EO and AO other than EO are added to the alcohol having 10 or more and 24 or less carbon atoms. It is an added compound.
The component (B-1) is more preferably at least one selected from polyoxyethylene alkyl ether and polyoxyethylene alkylene alkyl ether.
The component (B-1) can be synthesized by adding EO and / or AO other than EO to the alcohol having 10 or more and 24 or less carbon atoms. Addition of EO and / or AO other than EO to the alcohol having 10 or more and 24 or less carbon atoms can be carried out by a known method, in the presence of no catalyst or catalyst, under normal pressure or pressure, one step or many. It may be done in stages.
The component (B-1) may be used alone or in combination of two or more.

The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B).
When the content of the component (B-1) is at least the above lower limit value, the lubricity of the processing liquid is excellent. Further, when the content of the component (B-1) is not more than the above upper limit value, the waste liquid treatability of the processing liquid is excellent.
The content of the component (B-1) is preferably 2.5% by mass or more, more preferably 3.5% by mass, based on 100% by mass of the total amount of the component (B) from the viewpoint of improving the lubricity of the processing liquid. % Or more, more preferably 8.0% by mass or more, still more preferably 15.0% by mass or more, still more preferably 30.0% by mass or more. On the other hand, the content of the component (B-1) is preferably 84.0% by mass or less, more preferably 82.0% by mass, based on 100% by mass of the total amount of the component (B) from the viewpoint of improving the waste liquid treatability. % Or less, more preferably 80.0% by mass or less, still more preferably 78.0% by mass or less.

[Component (B-2)]
The component (B-2) is a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide.
The copolymer of EO and AO other than EO is a copolymer of EO and AO other than EO described later, and the mode of addition of the EO and AO other than EO is random addition or block addition. Either of them may be used, and random addition and block addition may be mixed, but a block-added copolymer is preferable, and a purlonic type copolymer is more preferable.
Examples of AOs other than EO include alkylene oxides having 3 or 4 carbon atoms, such as propylene oxide (PO), oxetane, 1,2-butylene oxide, 2,3-butylene oxide, and 1,3-butylene oxide. , Tetrahydrofuran.
The copolymer of EO and AO other than EO is more preferably a copolymer of EO and PO, and further preferably a block copolymer of EO and PO ("Polyethylene glycol unit and polypropylene glycol unit". It is also referred to as "block copolymer having"), and more preferably a triblock copolymer of EO and PO (also referred to as "triblock copolymer having a polyethylene glycol unit and a polypropylene glycol unit"). , And even more preferably, it is a pluronic-type copolymer in which ethylene oxide is added to polypropylene glycol.

The number average molecular weight (Mn) of the component (B-2) is preferably 500 or more, more preferably 1,000 or more, and even more preferably 1,500 or more. On the other hand, the number average molecular weight (Mn) of the component (B-2) is preferably 6,000 or less, more preferably 5,000 or less, and even more preferably 3,000 or less.
The value of the number average molecular weight (Mn) is a value measured by using the method described in Examples described later.
Further, in the copolymer of the EO and the AO other than the EO, the number average molecular weight (Mn) of the structural portion derived from the AO other than the EO is preferably 500 or more, more preferably 1,000 or more, still more preferably 1,000 or more. It is 1,500 or more. On the other hand, the number average molecular weight (Mn) of the structural portion derived from the AO is preferably 5,000 or less, more preferably 3,000 or less, still more preferably 2,000 or less.
The component (B-2) may be used alone or in combination of two or more.

The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
When the content of the component (B-2) is at least the above lower limit value, the defoaming property of the processing liquid, particularly when the processing liquid contains fine chips generated during the above-mentioned cutting process. Excellent defoaming property. Further, when the content of the component (B-2) is not more than the above upper limit value, the waste liquid treatability of the processing liquid is excellent.
The content of the component (B-2) improves the defoaming property of the processing liquid composition, particularly the defoaming property when the processing liquid contains fine chips generated during the above-mentioned cutting process. From the viewpoint, the total amount of the processing liquid composition component (B) is preferably 1.8% by mass or more, more preferably 5.0% by mass or more, still more preferably 7.0% by mass or more, and further based on 100% by mass. It is preferably 16.0% by mass or more, and even more preferably 18.0% by mass or more. On the other hand, the content of the component (B-2) is preferably 94.0% by mass or less, more preferably 92.0% by mass, based on 100% by mass of the total amount of the component (B) from the viewpoint of improving the waste liquid treatability. % Or less, more preferably 91.0% by mass or less, still more preferably 85.0% by mass or less, still more preferably 70.0% by mass or less.

The total content of the component (B-1) and the component (B-2) in the component (B) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B).
When the total content of the component (B-1) and the component (B-2) is at least the above lower limit value, the processing liquid has an excellent balance of lubricity, defoaming property, and waste liquid treatment property.
From the viewpoint of more effectively obtaining the effects of the present invention, the total content is preferably 85.0% by mass or more, more preferably 88.0% by mass or more, based on 100% by mass of the total amount of the component (B). It is more preferably 90.0% by mass or more, and even more preferably 94.0% by mass or more. On the other hand, the total content of the component (B-1) and the component (B-2) is preferably 99.9% by mass or less, more preferably 99.9% by mass or less, based on 100% by mass of the total amount of the component (B) from the same viewpoint. Is 99.0% by mass or less, more preferably 98.0% by mass or less, still more preferably 97.0% by mass or less, still more preferably 96.0% by mass or less.

The ratio of the content of the component (B-1) to the content of the component (B-2) [(B-1) / (B-2)] is lubricity, waste liquid treatment property, and defoaming. In terms of mass ratio, preferably 0. 015 or more, more preferably 0.020 or more, still more preferably 0.050 or more, still more preferably 0.10 or more, still more preferably 0.50 or more, still more preferably 1.00 or more, still more preferably. It is 2.00 or more, more preferably 3.00 or more. On the other hand, the ratio [(B-1) / (B-2)] is preferably 9.50 or less, more preferably 8.00 or less, still more preferably 7.00 or less in terms of mass ratio from the same viewpoint. , More preferably 6.00 or less, and even more preferably 5.00 or less.

[Other additives]
The component (B) may further contain other additives in addition to the above-mentioned component (B-1) and the component (B-2) as long as the object of the present invention is not impaired.
Other additives include surfactants other than components (B-1) and (B-2), pH adjusters, water retention improvers, defoamers, metal deactivators, bactericides / preservatives, and antiseptic. Examples include rust agents and antioxidants. These additives may be used alone or in combination of two or more. Further, among these additives, one or more selected from the group consisting of surfactants other than the components (B-1) and (B-2) and pH adjusters is preferable.
These other additives may be used alone or in combination of two or more.

Examples of the surfactant other than the components (B-1) and (B-2) include an anionic surfactant, a cationic surfactant, and a nonionic surfactant other than the components (B-1) and (B-2). And amphoteric surfactants and the like.
Examples of the anionic surfactant include alkylbenzene sulfonate, alpha olefin sulfonate and the like. Examples of the cationic surfactant include quaternary ammonium salts such as alkyltrimethylammonium salt, dialkyldimethylammonium salt and alkyldimethylbenzylammonium salt.
Examples of the nonionic surfactant other than the components (B-1) and (B-2) include a nonionic surfactant having less than 10 carbon atoms and more than 24 carbon atoms, and a nonionic surfactant having an HLB value of less than 4 and more than 11 carbon atoms. Activators (such as amides such as fatty acid alkanolamides) can be mentioned.
Examples of the amphoteric surfactant include alkyl betaine as a betaine system.
Among the surfactants, nonionic surfactants such as ethers other than the components (B-1) and (B-2) are preferably mentioned.

The pH adjuster is mainly used to adjust the pH of the processing liquid. Examples of the pH adjuster include various acid components and base components, and the pH of the processing liquid can be appropriately adjusted by adjusting the content ratio of these components.
The acid component and the base component can react with each other to form a salt.
Therefore, when an acid component and a base component are used as the pH adjuster, if a reaction product of the acid component and the base component is present in the processing liquid, the reaction product of the acid component and the base component is contained as described above. It is also possible to calculate the content of each of the acid component and the base component that contributed to the reaction, which is calculated from the amount. Further, in that case, it can be considered that the reaction product contains the acid component and the base component before the reaction.

Examples of the acid component used as the pH adjuster include various fatty acids such as lauric acid, stearic acid, oleic acid, linoleic acid, linolenic acid, neodecanoic acid, isononanoic acid, capric acid, and isostearic acid; acetic acid, malic acid, and citrus. Examples thereof include carboxylic acids such as acids; high molecular acids such as polyacrylic acid and salts thereof; and inorganic acids such as phosphoric acid. Among these, fatty acids are preferable, and fatty acids having 12 or less carbon atoms such as neodecanoic acid, isononanoic acid, capric acid, and dodecanoic acid are more preferable, and the group consisting of neodecanoic acid, isononanoic acid, capric acid, and dodecanoic acid is more preferable. One or more selected are more preferred.

Examples of the basic component used as the pH adjuster include monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, tri-n-propanolamine, tri-n-butanolamine, and tri. Isobutanolamine, tri-tert-butanolamine, N-methylethanolamine, N-ethylethanolamine, N-butylethanolamine, N-cyclohexylethanolamine, N-methyldiethanolamine, N-ethyldiethanolamine, N-cyclohexyldiethanolamine, Alkanol amines such as N, N-dimethylethanolamine and N, N-diethylethanolamine; alkylamines such as methylamine, dimethylamine, ethylamine, diethylamine, propylamine and dipropylamine; ammonia. Among these, tertiary amines are preferable, and at least one selected from the group consisting of triethanolamine, triisopropanolamine, N-methyldiethanolamine, and N-cyclohexyldiethanolamine is more preferable.

Examples of the water retention improver include ethylene glycol, propylene glycol, 1,4-butanediol, hexamethylene glycol, neopentyl glycol, diethylene glycol, triethylene glycol, dipropylene glycol, tripropylene glycol, glycerin, and ester derivatives thereof. , These ether derivatives; polyethylene glycol, polypropylene glycol and the like. Among these, one or more selected from the group consisting of ethylene glycol, propylene glycol, dipropylene glycol, diethylene glycol, polyethylene glycol, glycerin, ester derivatives thereof and ether derivatives thereof is preferable, and ethylene glycol, diethylene glycol and polyethylene glycol are preferable. , Glycerin, one or more selected from the group consisting of these ester derivatives and these ether derivatives, and more preferably one or more selected from the group consisting of diethylene glycol, glycerin, these ester derivatives, and these ether derivatives. preferable.

Examples of the defoaming agent include silicone oil, fluorosilicone oil, polyether polysiloxane, and fluoroalkyl ether. Of these, polyether polysiloxane is preferred.
Examples of the metal inactivating agent include imidazoline, pyrimidine derivatives, thiadiazole and benzotriazole.
Examples of the bactericide / preservative include paraoxybenzoic acid esters (parabens), benzoic acid, salicylic acid, sorbic acid, dehydroacetic acid, p-toluenesulfonic acid and salts thereof, and phenoxyethanol.
Examples of the rust preventive include alkylbenzene sulphonate, dinonylnaphthalen sulphonate, alkenyl succinic acid ester, and polyhydric alcohol ester.
Examples of the antioxidant include a phenol-based antioxidant and an amine-based antioxidant.

When the component (B) contains other additives, the content of the other additives is preferably 0.1% by mass or more, more preferably 1.0% by mass, based on 100% by mass of the total amount of the component (B). As mentioned above, it is more preferably 2.0% by mass or more, still more preferably 3.0% by mass or more, and even more preferably 4.0% by mass or more. On the other hand, the content of the other additive is preferably 17.0% by mass or less, more preferably 15.0% by mass or less, still more preferably 12.0% by mass, based on 100% by mass of the total amount of the component (B). Below, it is even more preferably 10.0% by mass or less, and even more preferably 6.0% by mass or less.

When the component (B) contains other additives, the ratio of the blending amount of the other additives to the total content of the components (B-1) and (B-2) in the component (B) [(Other additives) ) / (B-1 + B-2)] is preferably 0.001 or more, more preferably 0.005 or more, still more preferably 0.01 or more, still more preferably 0.02 or more, still more preferable in terms of mass ratio. Is 0.03 or more. On the other hand, the ratio [(other additives) / (B-1 + B-2)] is preferably 0.20 or less, more preferably 0.18 or less, still more preferably 0.14 or less, still more preferable in terms of mass ratio. Is 0.11 or less, more preferably 0.06 or less.

Further, from the viewpoint of more effectively obtaining the effect of the present invention, when the component (B) contains other additives, the component (B-1), the component (B-2) and other additives are added in the component (B). The total content of the agent is 100% by mass based on the total amount of the component (B), preferably 100% by mass.
Further, from the viewpoint of more effectively obtaining the effect of the present invention, the total content of the component (A) and the component (B) is 100% by mass based on 100% by mass of the total amount of the processing liquid, and is preferably 100% by mass.

[Manufacturing method of brittle material processing liquid composition]
The method for producing the brittle material processing liquid composition is as follows.
A method for producing a brittle material processing liquid composition, which comprises at least (A) water and (B) a mixture of additives.
Ingredient (B) is
(B-1) A nonionic surfactant which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less, and
(B-2) Containing a copolymer of ethylene oxide and an alkylene oxide other than ethylene oxide,
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B).
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
The brittle material processing liquid composition is blended so that the total content of the components (B-1) and (B-2) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B). It is a manufacturing method to obtain.

The order in which the component (A), the component (B-1) and the component (B-2) are blended is not particularly limited, and the component (B-1) and the component (B-2) are mixed with respect to the component (A). It may be blended sequentially or simultaneously, or the component (B-1) and the component (B-2) may be blended in advance, and the mixture thereof may be blended with the component (A).
Further, in the production method, the component (A), the component (B-1) and the component (B-2) may be blended, and if necessary, other additives may be blended. The order of blending the ingredients, the blending method, etc. are not particularly limited.
However, when the brittle material processing liquid composition is used for processing a brittle material, the stock solution of the brittle material processing liquid composition described above is prepared in advance, and then the component (A) is further added to the stock solution. It is preferable to prepare and use a diluted solution of the brittle material processing solution composition.
For example, the diluent of the brittle material processing liquid composition can be appropriately adjusted depending on the use of the diluent, but the stock solution of the brittle material processing liquid composition can be prepared by using the component (A). It can be prepared by diluting it so that it is preferably 2 times or more, more preferably 5 times or more, further preferably 10 times or more, still more preferably 100 times or more in terms of total amount (volume). On the other hand, the diluent of the brittle material processing liquid composition can be appropriately adjusted depending on the use of the diluent, but the stock solution of the brittle material processing liquid composition can be prepared by using the component (A). In terms of total amount (volume), it can be prepared by diluting it so that it is preferably 1,000 times or less, more preferably 900 times or less, further preferably 800 times or less, and even more preferably 700 times or less.

The component (A), the component (B-1), the component (B-2), and other additives are the same as those described above in the column of the brittle material processing liquid composition, and are preferred embodiments thereof. The same applies to the above, and detailed description thereof will be omitted. Further, regarding the suitable blending amount of the component (A), the component (B-1), the component (B-2), and other additives and the suitable blending amount ratio between the components, the composition of the brittle material processing liquid is also determined. Since it is the same as each content and each content ratio in the above-mentioned brittle material processing liquid composition in the item column, detailed description thereof will be omitted.
In addition, the components (A) and components (B-) in a preferred embodiment of the above-mentioned concentrated brittle material processing liquid composition (stock solution) and in a preferred mode of the diluted brittle material processing liquid composition (diluted liquid). Since the suitable blending amounts of 1), the component (B-2), and other additives and the suitable blending amount ratios between the components are the same as the respective contents and the respective content ratios described later, respectively. The detailed description thereof will be omitted.

[Use of brittle material processing liquid composition]
The brittle material processing liquid composition can be suitably used when processing a work material made of a brittle material such as a silicon ingot by using the above-mentioned wire saw, preferably a fixed abrasive grain wire saw. That is, the processing liquid can be suitably used when processing a work material made of a brittle material using a wire.
Examples of the brittle material include crystalline silicon, sapphire, gallium nitride, silicon carbide, neodymium magnet, zirconia, graphite, niobic acid, tantalic acid, crystal and glass. The processing liquid can be more preferably used when processing crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass from the viewpoint of pollution suppressing effect, and processes crystalline silicon, sapphire, or silicon carbide. In some cases, it can be used more preferably.

[Processing method for brittle materials]
The method for processing a brittle material according to an embodiment of the present invention is a method for processing a material to be processed made of the brittle material such as a silicon ingot using the brittle material processing liquid composition.
Here, the processing liquid is used by supplying the processing liquid to the work material and bringing it into contact with the work material. The processing liquid lubricates between the work material and a processing tool such as a wire saw. Furthermore, it is also used for removing chips (chips), preventing rust on the work material, cooling tools and the work material, and the like.
Specific examples of the processing of the brittle material performed using the processing liquid include various processing such as cutting, grinding, punching, polishing, drawing, drawing, and rolling. Among them, cutting and grinding are preferable, and cutting is more preferable.
Examples of the brittle material as the work material include the above-mentioned materials.
As described above, the processing liquid is preferably used for cutting a silicon ingot.

Here, more specifically, as described above, the wire saw processing method of both the free abrasive grain method and the fixed abrasive grain method cuts out a plurality of silicon wafers at once from the silicon ingot described above, and thus is a multi-wire saw device. Is used. In the multi-wire saw device, one wire is wound around each groove on two or more guide rollers in which a plurality of grooves are carved at regular intervals, and the wires are held in parallel with a constant tension. Then, at the time of cutting, each guide roller is rotated, and the wire is moved in one direction or both directions while adhering the machining fluid discharged from the nozzle or the like to the wire, and the silicon ingot is pushed against the wire to which the machining fluid is adhered. I'm hitting and cutting. Further, if necessary, processing may be performed while applying a processing liquid to the work piece itself such as a silicon ingot.
The processing liquid used for processing is stored in a tank or the like, and is carried from there to the above-mentioned processing chamber nozzle by piping or the like. Further, the processing liquid used at the time of cutting is collected in a used processing liquid receiving tank or the like at the lower part of the cutting device. In some cases, it may be circulated in the device and reused.
Therefore, the processing liquid is more preferably used as a processing liquid used in such a processing method for brittle materials, and among them, further as a processing liquid used in a processing method for cutting out a silicon wafer from a silicon wafer by a fixed abrasive wire. It is preferably used, and is more preferably used by a processing method for cutting out a silicon wafer from a silicon ingot using a multi-wire device using a fixed-abrasive wire saw.

[Processing equipment]
The brittle material processing apparatus according to the embodiment of the present invention is a processing apparatus using the brittle material processing liquid composition according to the embodiment of the present invention, preferably a multi-wire cutting processing apparatus, and more preferably. It is a multi-wire cutting processing apparatus provided with a fixed abrasive grain wire saw, and more preferably a multi-wire cutting processing apparatus provided with a fixed abrasive grain wire saw for cutting a silicon ingot.

Further, as the brittle material processing liquid composition related to one embodiment of the present invention, the following embodiments [2-1] to [2-18] can be further mentioned.
In addition, some of the embodiments included in the embodiments described in the following [2-1] to [2-18] can also be mentioned as examples of the embodiments relating to the above-mentioned undiluted solution.
[2-1] A brittle material processing liquid composition containing the following component (A), component (B-1) and component (B-2).
The content of the component (B-1) is more than 0.500% by mass and 90.0% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
The content of the component (B-2) is more than 0.500% by mass and 90.0% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
The total content of the component (B-1) and the component (B-2) is more than 1.00% by mass and 98.0% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
Brittle material processing liquid composition.
Component (A): Water component (B-1): Nonionic surfactant component (B-2) which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less. The number average molecular weight of the copolymer [2-2] component (B-2) of ethylene oxide and an alkylene oxide other than ethylene oxide is preferably 500 or more, more preferably 1,000 or more, still more preferably 1,500 or more. The brittle material processing liquid composition according to the above [2-1], preferably 6,000 or less, more preferably 5,000 or less, still more preferably 3,000 or less.
[2-3] The content of the component (A) is preferably 1.00% by mass or more, more preferably 2.00% by mass or more, still more preferably 2.00% by mass or more, based on 100% by mass of the total amount of the brittle material processing liquid composition. 5.00% by mass or more, more preferably 10.0% by mass or more, still more preferably 20.0% by mass or more, and preferably 90.0% by mass or less, more preferably 85.0% by mass. Hereinafter, the brittle material processing liquid composition according to the above [2-1] or [2-2], further preferably 80.0% by mass or less, still more preferably 70.0% by mass or less.
[2-4] The surface tension of the 0.1% by mass aqueous solution of the component (B-1) is preferably 31 mN / m or less, more preferably 30 mN / m or less, still more preferably 29 mN / m or less, still more preferably 28 mN. It is described in any one of the above-mentioned [2-1] to [2-3], which is less than / m and preferably 1 mN / m or more, more preferably 5 mN / m or more, still more preferably 10 mN / m or more. Brittle material processing liquid composition.
[2-5] The content of the component (B-1) is preferably 0.800% by mass or more, more preferably 1.00% by mass or more, and further, based on 100% by mass of the total amount of the brittle material processing liquid composition. It is preferably 1.50% by mass or more, and preferably 90.0% by mass or less, more preferably 80.0 % by mass or less, still more preferably 70.0% by mass or less. The brittle material processing liquid composition according to any one of 1] to [2-4].
[2-6] The content of the component (B-2) is based on 100% by mass of the total amount of the brittle material processing liquid composition, and is preferably 1.00% by mass based on 100% by mass of the total amount of the brittle material processing liquid composition. % Or more, more preferably 5.00% by mass or more, still more preferably 10.0% by mass or more, and preferably 80.0% by mass or less, more preferably 70.0% by mass or less, still more preferably 60. The brittle material processing liquid composition according to any one of the above [2-1] to [2-5], which is 0.0% by mass or less.
[2-7] The ratio of the content of the component (B-1) to the content of the component (B-2) [(B-1) / (B-2)] is a mass ratio, preferably 0. 015 or more, more preferably 0.020 or more, still more preferably 0.050 or more, still more preferably 0.10 or more, still more preferably 0.50 or more, still more preferably 1.00 or more, still more preferably. 2.00 or more, more preferably 3.00 or more, and preferably 9.50 or less, more preferably 8.00 or less, still more preferably 7.00 or less, even more preferably 6.00 or less. The brittle material processing liquid composition according to the above [2-1] to [2-6], which is even more preferably 5.00 or less.
[2-8] The total content of the component (B-1) and the component (B-2) is preferably 5.00% by mass or more, more preferably 5.00% by mass or more, based on 100% by mass of the total amount of the brittle material processing liquid composition. 10.0% by mass or more, more preferably 20.0% by mass or more, still more preferably 25.0% by mass or more, and preferably 95.0% by mass or less, more preferably 90.0% by mass or less. The brittle material processing liquid composition according to any one of the above [2-1] to [2-7], further preferably 80.0% by mass or less, still more preferably 70.0% by mass or less.
[2-9] Further, other additives are included, and the total content of the other additives is preferably 0.01% by mass or more, more preferably 0.%, based on 100% by mass of the total amount of the brittle material processing liquid composition. 10% by mass or more, more preferably 1.00% by mass or more, still more preferably 2.00% by mass or more, and preferably 10.00% by mass or less, more preferably 8.00% by mass or less, further. The brittle material processing liquid composition according to any one of [2-1] to [2-8] above, preferably 7.00% by mass or less, and even more preferably 6.00% by mass or less.
[2-10] The total content of the component (A), the component (B-1) and the component (B-2) is preferably 90.00% by mass based on 100% by mass of the total amount of the brittle material processing liquid composition. The above is more preferably 92.00% by mass or more, further preferably 93.00% by mass or less, still more preferably 94.00% by mass or more, and preferably 100% by mass or less, more preferably 99.99. [2-1] to [2-9] above, which are 9.90% by mass or less, more preferably 99.00% by mass or less, still more preferably 98.00% by mass or less. The brittle material processing liquid composition according to any one of.
[2-11] The brittle material processing liquid composition has a total content of the component (A), the component (B-1), the component (B-2), and other additives added as needed. The brittle material processing liquid composition according to the above [2-9] or [2-10], which is 100% by mass based on 100% by mass of the total amount of the above.
[2-12] The brittle material processing liquid composition according to any one of the above [2-1] to [2-11], which is used when processing a work material made of a brittle material using a wire.
[2-13] The brittle material processing liquid composition according to the above [2-12], wherein the wire is a fixed abrasive grain wire.
[2-14] The brittle material processing liquid composition according to the above [2-12] or [2-13], wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass.
[2-15] The brittle material processing according to any one of [2-1] to [2-14] above, wherein at least the following component (A), component (B-1) and component (B-2) are blended. A method for producing a liquid composition.
Component (A): Water component (B-1): Nonionic surfactant component (B-2) which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less. : Copolymer of ethylene oxide and alkylene oxide other than ethylene oxide [2-16] The brittle material processing liquid composition according to any one of the above [2-10] to [2-14] is processed into the brittle material. In terms of the total amount (volume) of the liquid composition, it is preferably 2 times or more, more preferably 5 times or more, further preferably 10 times or more, still more preferably 100 times or more, and preferably 1,000 times or less. Use of a brittle material processing liquid composition which is further diluted with the component (A) so as to be preferably 900 times or less, more preferably 800 times or less, still more preferably 700 times or less, and used for processing a brittle material. ..
[2-17] The brittle material processing liquid composition according to any one of [2-10] to [2-14] has a pH of preferably 3 or more, more preferably 4 or more, still more preferably 5 or more. A brittle material processing liquid composition which is further diluted with the component (A) so as to be preferably 9 or less, more preferably 8 or less, still more preferably 7 or less, and used for processing a brittle material. use.
[2-18] The brittle material processing liquid composition according to any one of the above [2-10] to [2-14] is used in JIS K 0102: 2016 17. The oxygen consumption (COD _Mn ) due to potassium permanganate at 100 ° C. measured according to the test method described in 1 is preferably 100 mg / L or more, more preferably 500 mg / L or more, still more preferably 1,000 mg. Dilute with component (A) to be greater than or equal to / L and preferably less than 10,000 mg / L, more preferably 8,000 mg / L or less, still more preferably 7,000 mg / L or less. , Use of brittle material processing liquid composition used for processing brittle materials.

Further, as the brittle material processing liquid composition related to one embodiment of the present invention, the following embodiments [3-1] to [3-17] can be further mentioned.
In addition, some of the embodiments included in the embodiments described in the following [3-1] to [3-17] can also be mentioned as examples of the embodiments related to the above-mentioned diluent.

[3-1] A brittle material processing liquid composition containing the following component (A), component (B-1) and component (B-2).
The content of the component (B-1) is 0.005% by mass or more and 0.500% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
The content of the component (B-2) is 0.005% by mass or more and 0.500% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
The total content of the component (B-1) and the component (B-2) is 0.108% by mass or more and 1.000% by mass or less based on 100% by mass of the total amount of the brittle material processing liquid composition.
Brittle material processing liquid composition.
Component (A): Water component (B-1): Nonionic surfactant component (B-2) which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less. The number average molecular weight of the copolymer [3-2] component (B-2) of ethylene oxide and an alkylene oxide other than ethylene oxide is preferably 500 or more, more preferably 1,000 or more, still more preferably 1,500 or more. The brittle material processing liquid composition according to the above [3-1], preferably 6,000 or less, more preferably 5,000 or less, still more preferably 3,000 or less.
[3-3] The content of the component (A) is preferably 90.00% by mass or more, more preferably 95.00% by mass or more, still more preferably 95.00% by mass or more, based on 100% by mass of the total amount of the brittle material processing liquid composition. 99.00% by mass or more, more preferably 99.20% by mass or more, even more preferably 99.40% by mass or more, and preferably 99.99% by mass or less, more preferably 99.95% by mass. Hereinafter, the above-mentioned [3-1] or [3-2], further preferably 99.90% by mass or less, still more preferably 99.85% by mass or less, still more preferably 99.80% by mass or less. Brittle material processing liquid composition.
[3-4] The surface tension of the 0.1% by mass aqueous solution of the component (B-1) is preferably 31 mN / m or less, more preferably 30 mN / m or less, still more preferably 29 mN / m or less, still more preferably 28 mN. It is described in any one of the above-mentioned [3-1] to [3-3], which is less than / m and preferably 1 mN / m or more, more preferably 5 mN / m or more, still more preferably 10 mN / m or more. Brittle material processing liquid composition.
[3-5] The pH is preferably 3 or more, more preferably 4 or more, still more preferably 5 or more, and preferably 9 or less, more preferably 8 or less, still more preferably 7 or less. The brittle material processing liquid composition according to any one of -1] to [3-4].
[3-6] The content of the component (B-1) is preferably 0.007% by mass or more, more preferably 0.010% by mass or more, and further, based on 100% by mass of the total amount of the brittle material processing liquid composition. It is preferably 0.020% by mass or more, more preferably 0.050% by mass or more, still more preferably 0.080% by mass or more, still more preferably 0.150% by mass or more, and preferably 0. 480% by mass or less, more preferably 0.460% by mass or less, still more preferably 0.450% by mass or less, still more preferably 0.440% by mass or less, still more preferably 0.430% by mass or less. The brittle material processing liquid composition according to any one of [3-1] to [3-5].
[3-7] The content of the component (B-2) is based on 100% by mass of the total amount of the brittle material processing liquid composition and 100% by mass of the total amount of the brittle material processing liquid composition, preferably 0.010% by mass. % Or more, more preferably 0.020% by mass or more, still more preferably 0.030% by mass or more, still more preferably 0.040% by mass or more, still more preferably 0.060% by mass or more, still more preferably 0. .080% by mass or more, and preferably 0.480% by mass or less, more preferably 0.450% by mass or less, still more preferably 0.400% by mass or less, still more preferably 0.350% by mass or less. The brittle material processing liquid composition according to any one of [3-1] to [3-6] above, further preferably 0.300% by mass or less, still more preferably 0.200% by mass or less.
[3-8] The ratio of the content of the component (B-1) to the content of the component (B-2) [(B-1) / (B-2)] is a mass ratio, preferably 0. 015 or more, more preferably 0.020 or more, still more preferably 0.050 or more, still more preferably 0.10 or more, still more preferably 0.50 or more, still more preferably 1.00 or more, still more preferably. 2.00 or more, more preferably 3.00 or more, and preferably 9.50 or less, more preferably 8.00 or less, still more preferably 7.00 or less, even more preferably 6.00 or less. The brittle material processing liquid composition according to the above [3-1] to [3-7], which is even more preferably 5.00 or less.
[3-9] The total content of the component (B-1) and the component (B-2) is preferably 0.110% by mass or more, more preferably 0.110% by mass or more, based on 100% by mass of the total amount of the brittle material processing liquid composition. 0.150% by mass or more, more preferably 0.200% by mass or more, still more preferably 0.300% by mass or more, still more preferably 0.400% by mass or more, and preferably 0.900% by mass. Hereinafter, any of the above [3-1] to [3-8], more preferably 0.800% by mass or less, still more preferably 0.700% by mass or less, still more preferably 0.600% by mass or less. The brittle material processing liquid composition described in Crab.
[3-10] Further, other additives are included, and the total content of the other additives is preferably 0.0001% by mass or more, more preferably 0.%, based on 100% by mass of the total amount of the brittle material processing liquid composition. 001% by mass or more, more preferably 0.005% by mass or more, still more preferably 0.010% by mass or more, still more preferably 0.015% by mass or more, and preferably 0.200% by mass or less. More preferably 0.150% by mass or less, further preferably 0.100% by mass or less, still more preferably 0.050% by mass or less, according to any one of the above [3-1] to [3-9]. Brittle material processing liquid composition.
[3-11] The total content of the component (A), the component (B-1) and the component (B-2) is preferably 95.000% by mass based on 100% by mass of the total amount of the brittle material processing liquid composition. The above is more preferably 98.000% by mass or more, further preferably 99.800% by mass or more, still more preferably 99.900% by mass or more, still more preferably 99.950% by mass or more, and preferably. 100% by mass or less, more preferably 99.9999% by mass or less, still more preferably 99.999% by mass or less, still more preferably 99.995% by mass or less, still more preferably 99.990% by mass or less, still more preferable. Is 99.985% by mass or less, the brittle material processing liquid composition according to any one of the above [3-1] to [3-10].
[3-12] The brittle material processing liquid composition has a total content of the component (A), the component (B-1), the component (B-2), and other additives added as needed. The brittle material processing liquid composition according to the above [3-10] or [3-11], which is 100% by mass based on 100% by mass of the total amount of the above.
[3-13] JIS K 0102: 2016 17. The oxygen consumption (COD _Mn ) by potassium permanganate at 100 ° C. measured according to the test method described in 1 is preferably 100 mg / L or more, more preferably 500 mg / L or more, still more preferably 1,000 mg. / L or more, and preferably less than 10,000 mg / L, more preferably 8,000 mg / L or less, still more preferably 7,000 mg / L or less, as described above [3-1] to [3-12]. ]. The brittle material processing liquid composition according to any one of.
[3-14] The brittle material processing liquid composition according to any one of [3-1] to [3-13], which is used when processing a work material made of a brittle material using a wire.
[3-15] The brittle material processing liquid composition according to the above [3-14], wherein the wire is a fixed abrasive grain wire.
[3-16] The brittle material processing liquid composition according to the above [3-14] or [3-15], wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass.
[3-17] The brittle material processing according to any one of [3-1] to [3-16] above, wherein at least the following component (A), component (B-1) and component (B-2) are blended. A method for producing a liquid composition.
Component (A): Water component (B-1): Nonionic surfactant component (B-2) which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less. : Copolymer of ethylene oxide and alkylene oxide other than ethylene oxide

In addition, the component (A), the component (B-1), the component (B-2), and the components (B-2) described in the above [2-1] to [2-18] and [3-1] to [3-17]. The other additives are the same as the corresponding components described in the section of the brittle material processing liquid composition according to the above [1] according to the embodiment of the present invention, and the preferred embodiments thereof are also the same. Therefore, detailed description will be omitted.
In addition, in the embodiments described in the above [2-1] to [2-18] and [3-1] to [3-17], the reasons for setting the preferable ranges of each content and mass ratio are also the reasons for setting the present invention, respectively. Since it is the same as the reason for setting the content of each corresponding component described above in the column of the brittle material processing liquid composition according to the above [1] which is one embodiment, detailed description thereof will be omitted.
Further, in the embodiments described in the above [2-1] to [2-18] and [3-1] to [3-17], the blending amount and component (B-1) and (B-2) of other additives are added. ) To the total content [(other additives) / (B-1 + B-2)] (mass ratio), respectively, also according to the above-mentioned [1] which is one embodiment of the present invention. Since it is the same as the range described above in the column of the brittle material processing liquid composition, detailed description thereof will be omitted.

Further, regarding the method for producing the brittle material processing liquid composition according to the above [2-15], the order in which the component (A), the component (B-1) and the component (B-2) are blended is not particularly limited. The component (B-1) and the component (B-2) may be sequentially or simultaneously blended with respect to the component (A), and the component (B-1) and the component (B-2) are blended in advance. , The mixture may be blended with the component (A).
Further, in the production method, the component (A), the component (B-1) and the component (B-2) may be blended, and if necessary, other additives may be blended. The order of blending the ingredients, the blending method, etc. are not particularly limited.
The same applies to the method for producing the brittle material processing liquid composition according to the above [3-17]. However, in the case of the method for producing a brittle material processing liquid composition according to the above [3-17], a step of preparing a stock solution of the brittle material processing liquid composition in advance using the production method according to the above [2-15]. It is preferable to have a step of further adding the component (A) to the stock solution and diluting it to prepare a brittle material processing liquid composition. The preferred range of the dilution ratio when diluting the stock solution with the component (A) is the same as the range described above in the column of the brittle material processing liquid composition according to the above [1] according to the embodiment of the present invention. be.

Further, applications of the brittle material processing liquid composition according to the above [2-1] to [2-18] and [3-1] to [3-17], processing of a brittle material using the brittle processing liquid composition. The method and the processing apparatus are the same as those described in the corresponding items in the column of the brittle material processing liquid composition according to the above [1], which is one embodiment of the present invention. Omit.

Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to these examples.
The physical characteristics of each component and the brittle material processing liquid composition were evaluated according to the following procedure.

[HLB value]
The value calculated by the Griffin method was used.

[Surface tension of 0.1% by mass aqueous solution]
Values measured according to the test method by the Wilhelmy Tensiometer described in JIS K 2241: 2017 were used.

[Molecular weight]
The weight average molecular weight (Mw) and the number average molecular weight (Mn) were measured using gel permeation chromatography (GPC). For GPC, two TSKgel SuperMultipore HZ-M manufactured by Tosoh Corporation were used as columns, measurement was performed using tetrahydrofuran as an eluent and a refractive index detector as a detector, and polystyrene was used as a standard sample to measure the weight average molecular weight (Mw) and number. The average molecular weight (Mn) was determined.

[PH value]
The pH of each brittle material processing liquid composition obtained in Examples and Comparative Examples was evaluated using a glass electrode type hydrogen ion concentration indicator manufactured by Toa DKK Co., Ltd., model: HM-25R.

[Silicon (Si) friction coefficient]
Using each brittle material processing liquid composition obtained in Examples and Comparative Examples, a reciprocating friction test was performed according to the following test conditions, and the friction coefficient was measured.
Testing machine: "F-2100" manufactured by Orient Tech Co., Ltd.
Sphere: 3/16 inch SUJ2
Test temperature: Room temperature Test plate: Polycrystalline silicon Sliding speed: 20 mm / sec Sliding distance: 2 cm
Load: 200g

[Defoaming property evaluation]
Each brittle material processing liquid composition obtained in Examples and Comparative Examples was evaluated according to the following procedure.
(Liquid level: no fine powder)
200 mL of the machining fluid is injected into a 2 L graduated cylinder (total height: 460 mm, inner diameter φ85 mm) equipped with a liquid circulation device, and the machining fluid is extracted from the bottom of the graduated cylinder by a circulator and circulated, and the bottom surface of the 2 L graduated cylinder is circulated. The extracted machining fluid was discharged into the 2L graduated cylinder using a nozzle having an inner diameter of φ5 mm from a position where the height from the above was 400 mm. The circulation amount was adjusted so that the flow rate of the processing liquid at this time was 1.3 L / min.
The liquid level was measured 5 minutes after the start of circulation.
The liquid level is compared in units of "mL" using the scale of the measuring cylinder.
At this time, when foaming occurs, the liquid level height increases, that is, the value of “mL” increases. Therefore, the smaller the liquid level height value “mL”, the better the defoaming property.
The obtained results are shown in Tables 1 and 2 below.
(Liquid level height: with fine powder)
A fine powder (“graphite powder”, manufactured by Wako Pure Chemical Industries, Ltd., special grade) mixed with the processing liquid so as to have a concentration of 13% by mass in the evaluation liquid was prepared as the evaluation liquid.
Except for using the evaluation liquid, the liquid level height was measured by the same method as the liquid level height measurement method in "without fine powder", and the defoaming property of the processing liquid when fine powder was mixed was evaluated.

[Evaluation of waste liquid treatability]
The oxygen consumption (COD _Mn ) by potassium permanganate at 100 ° C. of each brittle material processing liquid composition obtained in Examples and Comparative Examples was determined in 17. of JIS K 0102: 2016. The measurement was performed according to the test method described in 1. From the numerical value of COD _Mn , the waste liquid treatability of each brittle material processing liquid composition obtained in Examples and Comparative Examples was evaluated according to the following criteria.

・A: COD _Mn is less than 10,000 mg / L ・F: COD _Mn is 10,000 mg / L or more

As described above, the fact that the processing liquid has excellent waste liquid treatability means that the processing liquid can sufficiently exhibit the performances such as lubricity and defoaming properties required for the processing liquid even with a smaller concentration of the active ingredient. It also represents that.
Similarly, the waste liquid treatability in the present invention is not intended to specify that the processing liquid actually satisfies a specific water content, and the evaluation based on the index can exhibit sufficient performance even with a small active ingredient concentration. It is also used as an index for determining whether or not it is a processing liquid.

[Examples 1 to 5, Comparative Examples 1 to 7]
Each component was blended so as to have the compositions shown in Tables 1 and 2 below to prepare a brittle material processing liquid composition. The brittle material processing liquid composition of each Example and Comparative Example was evaluated according to the evaluation method. The obtained results are shown in Tables 1 and 2 below.

In addition, each component shown in Tables 1 and 2 below represents the following compound, respectively.
Ingredient (A)
-Additives other than the ion-exchanged water component (A) (raw material of the component (B) in Table 1 or the active ingredient in Table 2)
Surfactant 1: EO adduct of alcohol with 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 7.9, surface tension of 0.1% by mass aqueous solution = 27.9 mN / m
-Surfactant 2: EO adduct of alcohol having 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 6.3, surface tension of 0.1% by mass aqueous solution = 26.6 mN / m
-Surfactant 3: EO adduct of alcohol having 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 8.9, surface tension of 0.1% by mass aqueous solution = 27.6 mN / m
Surfactant 4: EO adduct of alcohol with 12 carbon atoms (main component: polyoxyalkylene alkyl ether), HLB = 12.1, surface tension of 0.1% by mass aqueous solution = 28.3 mN / m
Surfactant 5: Block copolymer of ethylene oxide (EO) and propylene oxide (PO) (pluronic type surfactant), number average molecular weight (Mn) = 2,950, number average of polyoxypropylene chain portion Molecular weight (Mn) = 1,750, number of moles added with EO = 27, HLB = 8
・ Defoamer: Polyetherpolysiloxane ・ pH adjuster 1: Isononanoic acid ・ pH adjuster 2: Triisopropanolamine

As shown in Table 1, the brittle material processing liquid compositions of Examples 1 to 5 contain the component (A) and the component (B), and the component (B) is the component (B-1) and the component (B-2). , Each of which has a predetermined content, and the total content of the component (B-1) and the component (B-2) in the component (B) is 83.0% by mass or more. It was confirmed that even if the value of COD _Mn is low, the lubricity and defoaming property are excellent, and the balance between the lubricity, the defoaming property and the waste liquid treatment property is excellent.
On the other hand, as shown in Table 2, the brittle material processing liquid compositions of Comparative Examples 1 to 7 contain the component (A) and the component (B), and the component (B) is the component (B-1) and the component (B). -2) is contained in a predetermined content, and the total content of the component (B-1) and the component (B-2) in the component (B) is 83.0% by mass or more. Since it does not satisfy all of the above, it was confirmed that it is inferior in any of the properties of lubricity, defoaming property, and waste liquid treatment property.
As a result of cutting the silicon ingot using the brittle material processing liquid composition described in Example 1 and using a fixed abrasive grain type multi-wire saw device, the brittle material processing liquid composition is less foamed during processing. , It was confirmed that it has excellent defoaming properties. It was also confirmed that the brittle material processing liquid composition has excellent waste liquid treatability.

The brittle material processing liquid composition according to the embodiment of the present invention has an excellent balance of lubricity, defoaming property, and waste liquid treatment property. Therefore, for example, when cutting a work material made of a brittle material such as a silicon ingot, foaming of the processing liquid can be suppressed, and the processing liquid overflows from the tank that receives the processing liquid due to the foaming. It is possible to prevent adverse effects such as a malfunction (occurrence of overflow) or a decrease in processing accuracy caused by foaming.
Further, since the brittle material processing liquid composition according to the embodiment of the present invention is excellent in waste liquid treatment property, it is economical due to improvement of environmental safety, improvement of safety during work, and reduction of load associated with waste liquid treatment. It also leads to improvement of.
As described above, the brittle material processing liquid composition according to the embodiment of the present invention is preferably used for cutting a brittle material such as a silicon ingot, and more preferably. It is used as a coolant for cutting a silicon wafer from a silicon ingot using a fixed abrasive wire.

Claims (10)

Contains (A) water and (B) additive mixture
Ingredient (B) is
(B-1) A nonionic surfactant which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less, and
(B-2) A triblock copolymer having a polyethylene glycol unit and a polypropylene glycol unit.
Including
The number average molecular weight of the component (B-2) is 500 or more and 5,000 or less.
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B).
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
The total content of the components (B-1) and (B-2) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B).
Brittle material processing liquid composition. The brittle material processing liquid composition according to claim 1, wherein the number average molecular weight of the component (B-2) is 1,000 or more and 5,000 or less . The brittle material processing liquid composition according to claim 1 or 2, wherein the surface tension of the 0.1% by mass aqueous solution of the component (B-1) is 31 mN / m or less. The ratio of the content of the component (B-1) to the content of the component (B-2) [(B-1) / (B-2)] is 0.015 or more and 9.50 or less in terms of mass ratio. , The brittle material processing liquid composition according to any one of claims 1 to 3. The brittle material processing liquid composition according to any one of claims 1 to 4, wherein the pH is 3 or more and 9 or less. The brittle material processing liquid composition according to any one of claims 1 to 5, which contains 900 parts by mass or more and 999,900 parts by mass or less of the component (A) with respect to 100 parts by mass of the component (B). The brittle material processing liquid composition according to any one of claims 1 to 6, which is used when processing a work material made of a brittle material using a wire. The brittle material processing liquid composition according to claim 7, wherein the wire is a fixed abrasive grain wire. The brittle material processing liquid composition according to claim 7 or 8, wherein the brittle material is crystalline silicon, sapphire, silicon carbide, neodymium magnet, crystal, or glass. A method for producing a brittle material processing liquid composition, which comprises at least (A) water and (B) a mixture of additives.
Ingredient (B) is
(B-1) A nonionic surfactant which is an alkylene oxide adduct of an alcohol having 10 or more and 24 or less carbon atoms and having an HLB value of 4 or more and 11 or less, and
(B-2) A triblock copolymer having a polyethylene glycol unit and a polypropylene glycol unit.
Including
The number average molecular weight of the component (B-2) is 500 or more and 5,000 or less.
The content of the component (B-1) is 0.9% by mass or more and 88.0% by mass or less based on 100% by mass of the total amount of the component (B).
The content of the component (B-2) is 0.9% by mass or more and 96.0% by mass or less based on 100% by mass of the total amount of the component (B).
The brittle material processing liquid composition is blended so that the total content of the components (B-1) and (B-2) is 83.0% by mass or more based on 100% by mass of the total amount of the component (B). The method for producing a brittle material processing liquid composition according to any one of claims 1 to 9.