JP2002114970A - Aqueous lapping liquid and aqueous lapping agent - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lapping agent giving no unfavorable effect on abrasive performance, having the same dispersion stability of abrasive grain with an alkylphenol added with ethylene oxides, and having almost no unfavorable effect on environment. SOLUTION: This aqueous lapping liquid contains as component (A) an abrasive grain dispersant represented by formula (1): R1-O-(R2O)n-H (wherein R1 is a saturated alcohol synthesized by the oxo method from propylene or an olefin derived from a butylene oligomer, or an alcohol residue obtained by dimerization of the alcohol, R2O an oxyalkylene group, and (n) is a number of greater than 1), as component (B) a lubricating base oil, and as component (C) water, and the aqueous lapping agent contains an abrasive grain in the lapping liquid.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aqueous lapping liquid used for cutting or polishing brittle materials such as semiconductors, ceramics, quartz, glass, and carbide tools by using dispersed abrasive grains. Or, it relates to an aqueous wrap.

[0002]

2. Description of the Related Art A slurry-like working fluid in which abrasive grains are dispersed is placed between a workpiece and a tool, and the workpiece is cut or polished by causing relative movement while applying pressure. There is a processing method. Such a method is mainly used for processing brittle materials that cannot be processed by shear deformation, for example, semiconductors, quartz, glass, and carbide tools. A processing liquid in which abrasive grains used in such processing are dispersed is called a lapping agent.

[0003] Abrasive grains are sometimes supplied to a user in a form dispersed in a liquid in advance. However, due to problems such as transportation and a storage location, the user needs a concentrated processing liquid at a work site as necessary. After dilution with water or the like, the abrasive grains are often used after being dispersed. The thick working liquid before the abrasive grains are dispersed is called a lapping liquid. The polishing using a lapping agent is referred to as lapping, and the precision polishing using a lapping agent in which abrasive grains are fine particles such as colloidal silica may be particularly referred to as polishing.

[0004] The lapping agent is usually a dispersion of fine powdery abrasive particles in a liquid such as water, mineral oil, synthetic oil, oil or fat. To maintain the processing accuracy, the abrasive particles are added to the lapping agent. It is necessary to stably disperse for a long time. If the dispersion of the abrasive grains is unstable, sedimentation and non-uniform dispersion of the abrasive grains occur, and the processing efficiency and processing accuracy are significantly reduced.

For this reason, Japanese Unexamined Patent Publication (Kokai) No. 53-67191 proposes a wrapping agent obtained by adding fats or oils or grease to mineral oil. However, since lapping agents using mineral oil are insoluble in water, it is indispensable to wash the workpiece after processing with an organic solvent, etc., and then further use a surfactant to wash with water. is there. On the other hand, Japanese Patent Application Laid-Open No.
JP-A-145968 discloses a wrapping agent to which an ethylene oxide adduct of an alkylphenol is added.
JP-A-314449 proposes a wrapping agent obtained by adding a fatty acid ester-based surfactant and an ethylene oxide adduct of alkylphenol to mineral oil.

[0006] However, ethylene oxide adducts of alkylphenols exhibit excellent effects such as abrasive grain dispersibility and abrasive cleaning properties. However, since they are hardly biodegradable, they have long-term effects when released into the environment. It was not decomposed and could pollute the environment. In recent years, there has been concern about the so-called endocrine problem that nonylphenol may exert a pseudohormonal effect on living organisms and disrupt the endocrine system of living organisms. Alternatives were being sought.

As a wrapping agent which does not use an ethylene oxide adduct of an alkylphenol, JP-A No. 3-18 / 1990
In Japanese Patent Application Laid-Open No. 1598/1997, a wrapping agent using a polyalkylene glycol derivative or a high molecular weight polysaccharide as a thickener is disclosed in
Japanese Patent No. 6074 proposes a lapping agent using a pluronic type or a PO / EO random polymerization type polyether-based surfactant as an abrasive dispersant. The dispersion of the grains was unstable.

[0008]

Means for Solving the Problems The inventors of the present invention have studied diligently, and by adding an abrasive dispersant having a specific structure to a lapping agent, the polishing performance is not adversely affected, and the dispersion of the abrasive is stabilized. The present inventors have found that a wrap agent having the same properties as an ethylene oxide adduct of an alkylphenol and having almost no adverse effect on the environment can be obtained, and completed the present invention. That is, the present invention provides, as a component (A), the following general formula (1) A water-based lapping liquid characterized by containing a lubricating base oil as a component (B); and water as a component (C); and abrasive grains in the lapping liquid. It is an aqueous wrap.

[0009]

First, the component (A) of the present invention will be described. The component (A) of the present invention has the general formula (1)
Is an abrasive dispersant represented by the formula: In the general formula (1), R ¹ represents a saturated alcohol synthesized by an oxo method from an olefin derived from an oligomer of propylene or butylene, or a residue of an alcohol obtained by dimerizing the alcohol. Examples of the oligomer of propylene or butylene include a polymer of about 2 to pentamer of propylene or butylene. For example, propylene dimer (carbon number 6), propylene trimer (carbon number 9), propylene tetramer (carbon number 12), propylene pentamer (carbon number 15), butylene dimer (carbon number 8), butylene trimer (carbon number 12) And butylene tetramer (having 16 carbon atoms). These are mixtures of structural isomers of branched olefins. R ¹ is a residue of a saturated alcohol synthesized from these olefins by the oxo method.

The oxo method is a synthesis method in which an olefin is reacted with carbon monoxide to form an aldehyde and then reduced with hydrogen to obtain an alcohol. Therefore, the carbon number of the obtained alcohol is larger than that of the olefin. One more.
The main component of the synthesized saturated alcohol is a primary alcohol. Therefore, the main component of the synthesized saturated alcohol is a mixture of a saturated primary alcohol having many branches at various positions of the alkyl group. Examples of such alcohols include isoheptanol (using propylene dimer as a raw material), isononanol (using butylene dimer as a raw material), isodecanol (using propylene trimer as a raw material), and isotridecanol (using propylene tetramer or propylene tetramer). Butylene trimer as a raw material), isohexadecanol (propylene pentamer as a raw material), isoheptadecanol (butylene tetramer as a raw material), and the like.

Further, R ¹ may be an alcohol residue obtained by further dimerizing a saturated alcohol synthesized by an oxo method from an olefin derived from an oligomer of propylene or butylene. As a method for dimerization, Guerbet reaction is generally used. The Guerbet reaction is a reaction in which two molecules of a primary alcohol are condensed in the presence of sodium metal to obtain a β-branched primary alcohol.
Alternatively, a method may be used in which an aldehyde which is an intermediate of the oxo method is dimerized by an aldol reaction and then reduced with hydrogen to obtain an alcohol. Such alcohols include, for example, isomyristyl alcohol (2 of isoheptanol).
Monomer), isostearyl alcohol (a dimer of isononanol) and the like.

These alcohols are characterized by having a large number of branches, and are known by known analytical methods, for example, ¹ H-N
It can be determined by using MR, ¹³ C-NMR, various types of chromatography, and the like. Such R ¹
Is preferably 10 to 18, and 13 to 14
Is more preferable, but 13 having excellent abrasive grain dispersibility is most preferable.

In the general formula (1), R ² O represents an oxyalkylene group. The oxyalkylene group is preferably an oxyalkylene group having 2 to 4 carbon atoms, and more preferably an oxyethylene group.
The part of (R ² O) _{n in} the general formula (1) is an alkylene oxide such as ethylene oxide, propylene oxide, butylene oxide, tetrahydrofuran (1,4-butylene oxide), long-chain α-olefin oxide and styrene oxide. It can be obtained by addition polymerization.

When the (R ² O) _n portion is formed by adding an alkylene oxide or the like, R ² is determined by the alkylene oxide or the like to be added. The polymerization form of the alkylene oxide or the like to be added is not particularly limited, and homopolymerization of one kind of alkylene oxide or the like, 2
Random copolymerization of more than one kind of alkylene oxide,
Block copolymerization or random / block copolymerization may be used.

When R ² O is two or more oxyalkylene groups, one is preferably an oxyethylene group. (R ² O) _n moiety of preferably 50 to 100 mole% of oxyethylene groups, more preferably 60 to 100
It is preferred that the polyoxyalkylene chain contain mol%.
The polymerization degree n is a number of 1 or more, preferably 1 to 200,
It is more preferably from 1 to 100, further preferably from 2 to 50. The 1% cloud point of the abrasive dispersant represented by the general formula (1) (the temperature at which clouding starts when a 1% by mass aqueous solution is heated from a low temperature to a high temperature) is preferably 20 ° C. or higher, more preferably 30 ° C. or higher. .

The abrasive dispersant represented by the general formula (1), which is the component (A) of the present invention, is superior in biodegradability as compared with the conventional nonylphenol-based abrasive dispersant. Rarely remain for a long time. In addition, since it has no nonylphenyl group, the concern about the so-called endocrine problem derived from nonylphenol is solved. Therefore, even if the wrapping agent of the present invention is discharged into the environment,
The adverse effects on the environment are extremely small. Further, the abrasive dispersant of the present invention has a structure in which the alkyl chain portion has a large number of branches as described above. The dispersion of the abrasive grains is more stable than when used as a dispersant, and the dispersibility of the abrasive grains is equal to or higher than that of a nonylphenol-based abrasive dispersant.

When an ethylene oxide adduct of an alkyl phenol is added to a wrapping agent with a water-insoluble component, an emulsifier, a dispersant,
In addition, the abrasive dispersant represented by the general formula (1) is equal to or more effective than the nonylphenol-based abrasive dispersant in such an effect.

Next, the lubricating base oil which is the component (B) of the present invention will be described. As the lubricating base oil which is the component (B) of the present invention, a known lubricating base oil can be used. Such lubricating base oils include, for example, mineral oils, synthetic oils, fats and oils, and the like. Here, the mineral oil refers to one that is separated, distilled, and refined from natural crude oil, and examples thereof include paraffinic, naphthenic, and those obtained by subjecting these to hydrogenation treatment and solvent purification. These include mineral oils called so-called spindle oils, machine oils, turbine oils, and cylinder oils.

The synthetic oil is a chemically synthesized lubricating oil, for example, poly-α-olefin, polyisobutylene (polybutene), dicarboxylic acid ester, polyol ester, phosphate ester, silicate ester. ,
Examples thereof include polyalkylene glycol, polyphenyl ether, silicone, fluorinated compound, alkylbenzene, and alkylnaphthalene. The fats and oils include, for example, beef tallow, lard, rapeseed oil, coconut oil, palm oil, bran oil, soybean oil, and hydrogenated products thereof.
Among them, preferred are paraffinic or naphthenic mineral oils, or the following general formula (2) Is a polyether compound represented by

The paraffinic or naphthenic mineral oil has a kinematic viscosity at 40 ° C. of preferably 0.5 to 100 m
m ² / s, more preferably 1 to 60 mm ² / s. If the kinematic viscosity at 40 ° C. in mineral oil is less than 0.5 mm ² / s, there is the surface roughness of the machining efficiency and the workpiece is deteriorated, when it exceeds 100 mm ² / s, the post-processed This is because the cleanability of the workpiece may be deteriorated.

In the polyether compound represented by the general formula (2), R ³ represents a residue obtained by removing a hydroxyl group from a divalent or higher polyol. Such polyols include, for example, ethylene glycol, propylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 1,5-pentanediol, neopentyl glycol, isoprene glycol (3- Methyl-1,3-butanediol), 1,2
-Hexanediol, 1,6-hexanediol, 3-
Methyl-1,5-pentanediol, 1,2-octanediol, octanediol (2-ethyl-1,3-hexanediol), 2-butyl-2-ethyl-1,3-
Propanediol, 1,2-decanediol, 1,2-
Dodecanediol, 1,2-tetradecanediol,
1,2-hexadecanediol, 1,2-octadecanediol, 1,12-octadecanediol, 1,2-
Dihydric alcohols such as cyclohexanediol, 1,4-cyclohexanediol, 1,4-cyclohexanedimethanol, hydrogenated bisphenol A, sorbide and methyldiethanolamine; glycerin, 1,2,3-butanetriol, 1,2,4- Butanetriol, 2-methyl-1,2,3-propanetriol, 1,2,3-
Pentanetriol, 1,2,4-pentanetriol, 1,3,5-pentanetriol, 2,3,4-pentanetriol, 2-methyl-2,3,4-butanetriol, trimethylolethane, 2,3 , 4-hexanetriol, 2-ethyl-1,2,3-butanetriol, trimethylolpropane, 4-propyl-3,
Trihydric alcohols such as 4,5-heptanetriol, pentamethylglycerin (2,4-dimethyl-2,3,4-pentanetriol), triethanolamine and triisopropanolamine; pentaerythritol,
2,3,4-pentane tetrol, 2,3,4,5-hexane tetrol, 1,2,4,5-pentane tetrol, 1,3,4,5-hexane tetrol, diglycerin, ditri Methylolpropane, sorbitan, N, N,
N ′, N′-tetrakis (2-hydroxyethyl) ethylenediamine, N, N, N ′, N′-tetrakis (2-
(Hydroxypropyl) tetrahydric alcohols such as ethylenediamine; pentahydric alcohols such as adonitol, arabitol, xylitol and triglycerin; hexahydric alcohols such as dipentaerythritol, sorbitol, mannitol, iditol, inositol, darcitol, talose, allose; Octahydric alcohols and the like can be mentioned.
b is a number of 2 or more representing the same number as the number of hydroxyl groups of these polyols. As such a polyol, a polyol having 2 to 20 carbon atoms is preferable.
A divalent to tetravalent polyol of 4 is preferred.

In the general formula (2), R ⁴ O represents an oxyalkylene group. The oxyalkylene group is preferably an oxyalkylene group having 2 to 4 carbon atoms. The part of (R ⁴ O) _{a in} the general formula (2) is an alkylene oxide such as ethylene oxide, propylene oxide, butylene oxide, tetrahydrofuran (1,4-butylene oxide), long-chain α-olefin oxide, and styrene oxide. It can be obtained by addition polymerization. The polymerization form of the alkylene oxide or the like to be added is not particularly limited, and may be homopolymerization of one kind of alkylene oxide or the like, random copolymerization of two or more kinds of alkylene oxides or the like, block copolymerization, or random / block copolymerization or the like. However, block copolymerization is preferred because the processing accuracy of the workpiece is improved.
When R ⁴ O is two or more oxyalkylene groups,
One type is preferably an oxyethylene group, more preferably an oxyethylene group and an oxypropylene group.

[0023] (R ⁴ O) amount of the preferred range of the oxyethylene groups contained in the portion of _a varies by polymerization forms part of (R ⁴ O) _a. That is, when the (R ⁴ O) _a portion is a random copolymer of two or more oxyalkylene groups,
(R ⁴ O) The amount of oxyethylene groups contained in the portion _a is
Preferably 5-95 mol%, more preferably 20-80
Mol%. When the (R ⁴ O) _a portion is a block copolymer of two or more oxyalkylene groups, (R
⁴ O) The amount of oxyethylene groups contained in the portion _a is preferably 5 to 70 mol%, more preferably 10 to 50 mol%. A block copolymer of (R ⁴ O) _a portion of two or more oxyalkylene groups, when the content of oxyethylene groups is 70 mol% or more, that the effervescence increases workability is lowered Because there is.

The degree of polymerization a is a number of 2 or more, and the number average molecular weight of the polyether compound represented by the general formula (2) is preferably 500 to 50,000, more preferably 700 to 20,000 or more. , More preferably 800 to
The number is preferably 10,000. If the molecular weight is less than 500, the processing accuracy of the workpiece may be reduced, and if it is more than 20,000, it may be difficult to wash the dried lapping agent by scattering around during processing.

Among the polyether compounds represented by the general formula (2), the following general formulas (3) to (3)
The polyether compound represented by (6) is preferred.

In the general formulas (3) to (6), EO represents an oxyethylene group, and PO represents an oxypropylene group. Further, the polymerization degrees c, e, g and i of the oxyethylene group or the polymerization degrees d, f, h and j of the oxypropylene group each represent a number of 1 or more.

In the same manner as in the case of the polyether compound represented by the general formula (1), c to j represent the general formulas (3) to (6)
The number average molecular weight of the polyether compound represented by the formula is preferably 500 to 50,000, more preferably 700.
~ 20,000 or more, more preferably 800 ~ 10,0
It is preferable that the number be 00. The content of the oxyethylene group in the polyoxyalkylene chain is 5 to 20 mol% for the polyether compound represented by the general formula (3) or (5), and the general formula (4) or the general formula (6). )) For the polyether compound represented by
Preferably it is 50 mol%.

The aqueous wrap solution of the present invention contains water as the component (C) in addition to the components (A) and (B). In the aqueous lapping liquid of the present invention, the content of the component (A) is preferably from 3 to 70% by mass, more preferably from 5 to 50% by mass, based on the total amount of the lapping solution.
When the content of the component (A) is less than 3% by mass, the dispersibility and dispersion stability of the abrasive grains may decrease. When the content exceeds 70% by mass, the relative content of the component (B) decreases. This is because the processing accuracy may be reduced.

The content of component (B) is preferably from 10 to 50% by mass, more preferably from 15 to 40% by mass. If the content of the component (B) is less than 10% by mass, the processing accuracy may be reduced. Further, the content of the component (C) is preferably from 10 to 80% by mass, and more preferably from 15 to 50% by mass. When the content of the component (C) is less than 10% by mass,
The components (A) and (B) may cause separation,
If the content is more than 0% by mass, the significance of supplying the liquid in the form of a concentrated liquid called a wrapping liquid is diminished, and problems such as transportation, handling, and storage of the lapping liquid occur.

The aqueous lapping liquid of the present invention preferably further contains a rust preventive agent as a component (D) in order to prevent rust of tools and machines. As a rust inhibitor, for example,
Carboxylate, sulfonate, acid phosphate,
Examples include phosphonates, inorganic acid salts, ethylene oxide adducts of alkylamines, partial esters of polyhydric alcohols, carboxylic acid amides and the like.

Examples of the carboxylic acid of the carboxylate include hexanoic acid, octanoic acid, 2-ethylhexanoic acid,
Nonanoic acid, isononanoic acid, decanoic acid, lauric acid, isodecanoic acid, dodecanoic acid, myristic acid, palmitic acid,
Aliphatic monobasic acids such as stearic acid, isostearic acid, undecenoic acid, oleic acid, linoleic acid, linolenic acid, arachinic acid, behenic acid, 12-hydroxystearic acid, ricinoleic acid; malonic acid, succinic acid, glutaric acid, adipine Acids, pimelic acid, spearic acid, azelaic acid, sebacic acid, dodecane diacid, brassic acid, alkenyl succinic acid and other aliphatic dibasic acids; salicylic acid, alkyl salicylic acid, phthalic acid, isophthalic acid, terephthalic acid, hemi-mellitic acid, Aromatic carboxylic acids such as trimellitic acid, trimesic acid, pyromellitic acid and naphthalene carboxylic acid; dimer acid, trimer acid, naphthenic acid, 9 (or 10)-
(4-hydroxyphenyl) octadecanoic acid and the like. Some of these act as dispersants, emulsifiers, oil agents or preservatives.

Examples of the sulfonic acid of the sulfonic acid salt include petroleum sulfonic acid, alkylbenzene sulfonic acid, α
-Olefin sulfonic acid, naphthalene sulfonic acid and the like. Some of these act as dispersants and emulsifiers.

Examples of the acidic phosphate of the acidic phosphate include: (mono or di) phosphate of octanol, (mono or di) phosphate of lauryl alcohol, and (mono or di) phosphate of oleyl alcohol. Acid esters, (mono or di) phosphates of butyl alcohol ethoxylate, (mono or di) phosphates of oleyl alcohol ethoxylate and the like can be mentioned. Some of these act as dispersants and emulsifiers.

Examples of the phosphonic acid of the phosphonate include aminotrimethylenephosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid and the like. Examples of the inorganic acid include (poly) phosphoric acid, silicic acid, boric acid, and the like.

Examples of the base component which forms a salt with these acids include inorganic alkalis and amines. Examples of the inorganic alkali include alkali metal hydroxides or carbonates such as potassium hydroxide, sodium hydroxide, cesium hydroxide, potassium carbonate, and sodium carbonate; calcium hydroxide, magnesium hydroxide, calcium oxide, and magnesium oxide. And alkaline earth metal hydroxides or alkaline earth metal oxides.

As the amine, for example, ammonia;
(Mono, di, or tri) methylamine, (mono, di, or tri) ethylamine, (mono, di, or tri) propylamine, (mono, di, or tri) isopropylamine, (mono, di, or tri) ) Butylamine, (mono,
Di or tri) octylamine, (mono, di or tri) 2-ethylhexylamine, (mono, di or tri) decylamine, (mono or di) dodecylamine,
(Mono or di) tridecylamine, (mono or di) tetradecylamine, (mono or di) hexadecylamine,
(Mono or di) octadecylamine, (mono or di) oleylamine, ethylenediamine, diethylenetriamine, hexamethylenediamine, piperazine, 1- (2-
(Aminoethyl) piperazine, N-methylpiperazine, cyclohexylamine, benzylamine, aliphatic amines such as morpholine; (mono, di or tri) ethanolamine, (mono, di or tri) isopropanolamine,
N-methyldiethanolamine, N, N-dimethylethanolamine, N-ethyldiethanolamine, N-butyldiethanolamine, N-octyldiethanolamine, N- (2-ethylhexyl) diethanolamine, N-decyldiethanolamine, N-dodecyldiethanolamine, N-triethylamine Decyldiethanolamine,
N-tetradecyldiethanolamine, N-hexadecyldiethanolamine, N-octadecyldiethanolamine, alkyldiethanolamine derived from N-coconut oil,
N-tallow-derived alkyldiethanolamine, N-soybean-derived alkyldiethanolamine, N-oleyldiethanolamine, N- (β-aminoethyl) ethanolamine, N-cyclohexyldiethanolamine, N,
N, N ', N'-tetrakis (2-hydroxyethyl)
Alkanolamines such as ethylenediamine, N, N, N ', N'-tetrakis (2-hydroxypropyl) ethylenediamine;

Examples of the polyhydric alcohol partial ester include glycerin (mono or di) laurate, glycerin (mono or di) myristate, glycerin (mono or di) palmitate, glycerin (mono or di) stearate, and glycerin. Glycerin partial esters such as (mono or di) oleate; diglycerin (mono, di or tri) stearate, diglycerin (mono, di or tri)
Diglycerin partial esters such as oleate; sorbitan (mono, di or tri) laurate, sorbitan (mono,
Di or tri) myristate, sorbitan (mono, di or tri) palmitate, sorbitan (mono, di or tri)
And sorbitan partial esters such as stearate and sorbitan (mono, di or tri) oleate. Some of these act as dispersants, emulsifiers or oil agents.

Examples of the carboxylic acid amide include alkenyl succinamide, lauric acid monoethanolamide, lauric acid diethanolamide, myristic acid monoethanolamide, myristic acid diethanolamide, palmitic acid monoethanolamide, and palmitic acid diethanolamide. , Stearic acid monoethanolamide, stearic acid diethanolamide and the like. Some of these act as dispersants, emulsifiers, and oil agents.

Of these rust inhibitors, carboxylate salts are preferred, and aliphatic dibasic acid salts are particularly preferred. Also,
As the base component forming a salt with the carboxylic acid of the carboxylate, an alkanolamine is preferable. (D) The content of the rust inhibitor as a component is 0.5 to 30 with respect to the total amount of the wrapping liquid.
It is preferable that the content is mass%. When the content of the component (D) is 0.
If the amount is less than 5% by mass, the rust-preventing effect may not be sufficient. If the amount exceeds 30% by mass, the content of the component (A) or the component (B) is relatively reduced, so that the processing accuracy is reduced. There are cases.

In the aqueous wrap solution of the present invention, a thickener, an emulsifier, an antifoaming agent, a solvent, a preservative, a metal deactivator, and the like can be added as required. These may be added at the stage of dispersing the abrasive grains in the aqueous lapping liquid of the present invention to form a lapping agent. Examples of the thickener include chitansan gum, methylcellulose, ethylcellulose,
Examples include hydroxyethyl cellulose, hydroxypropyl cellulose, carboxymethyl cellulose, polyvinyl alcohol, polyacrylic acid, polyacrylamide, polypyrrolidone, polyethylene oxide, and water-soluble urethane compounds.

Examples of the emulsifier include long-chain alcohol ethoxylate, long-chain alcohol ethoxylate sulfate, long-chain alcohol sulfate, alkyl sulfonate, and alkylbenzene sulfonate. Examples of the antifoaming agent include polyoxypropylene alkyl ether, silicone oil, fluorosilicone oil and the like.

Examples of the solvent include ethylene glycol, diethylene glycol, triethylene glycol,
Propylene glycol, dipropylene glycol, tripropylene glycol, glycerin, methyl cellosolve, butyl cellosolve, methyl carbitol, butyl carbitol, propylene glycol methyl ether, dipropylene glycol methyl ether, tripropylene glycol methyl ether, dipropylene glycol butyl ether, and the like. Can be

As the preservative, for example, 2-methyl-4
-Isothiazolin-3-one, 5-chloro-2-methyl-4-isothiazolin-3-one, benz-4-isothiazolin-3-one, 2-octyl-4-isothiazolin-3-one, dehydroacetic acid, pyridine- 2-thiol-1-oxide salt, N, N ′, N ″ -tris (2-hydroxyethyl) hexahydro-S-triazine, 2,
2-dibromo-2-nitrotriethanol, parachloromethcresol, 2-bromo-2-nitro-1,3-propanediol, paraoxybenzoate, benzalkonium chloride, 1,2-dibromo-2,4- Dicyanobutane and the like. Examples of the metal deactivator include mercaptobenzothiazole, benzotriazole, tolyltriazole, benzimidazole and the like.

The water-based lapping liquid of the present invention is diluted with water and then used as a lapping agent in which abrasive grains are added and dispersed, for example, for cutting and polishing. The dilution ratio with water varies depending on the processing method, processing conditions, type of the workpiece, shape of the workpiece, and the like, but is preferably 5 to 150 times by mass, and more preferably 10 to 100 times by mass. If the dilution ratio exceeds 150 times by mass, the dispersion stability of the abrasive grains may be reduced.

The abrasive particles (lapping abrasive) to be added to and dispersed in the aqueous lapping liquid of the present invention may be those which are commonly used. Examples include alumina, silica, titanium oxide, iron oxide, emery, chromium oxide, cerium oxide, zirconium oxide, boron nitride, silicon carbide, boron carbide, tungsten carbide, titanium carbide, zirconium carbide, titanium carbide, diamond, and the like. Normal,
The particle size is about 3 to 16 μm.

The amount of the abrasive added to the aqueous lapping liquid of the present invention is such that the content of the abrasive in the aqueous lapping agent after adding the abrasive is 10 to 60% by mass based on the total amount of the aqueous lapping agent. preferable. If the added amount of the abrasive grains is less than 10% by mass, the processing efficiency may be deteriorated. If the added amount is more than 60% by mass, the viscosity of the water-based lapping agent increases, the workability is deteriorated, and the dispersion stability of the abrasive particles is deteriorated. This is because it may be.

The aqueous wrapping liquid or aqueous wrapping agent of the present invention is used in a processing field where a wrapping agent has been conventionally used, that is,
It can be used in the field of cutting of brittle materials such as semiconductors, quartz, carbide tools, metal parts, glass and ceramics, or in the field of polishing. In the field of cutting, it can be used for various cutting methods such as a cutting method using an outer peripheral blade, a cutting method using an inner peripheral blade, a cutting method using a wire saw, and a cutting method using a blade saw. In the polishing process,
The shape of the workpiece can be used for processing not only planar shapes such as wafers, but also curved shapes such as lenses and complicated shapes such as gears and gears. It can also be used for so-called polishing, which is precision finishing.

In particular, in the polishing of a semiconductor wafer, since the cleanliness of the wafer after the polishing is required, the polyether compound represented by the general formula (2) is preferable as the component (B). Polyether compounds represented by formulas (3) to (6) are more preferred. As such a semiconductor wafer, for example,
Wafers made of silicon, gallium arsenide, gallium phosphide, indium phosphide, and the like are included.

[0049]

EXAMPLES The present invention will be described more specifically with reference to the following examples. In the following examples,% is based on mass unless otherwise specified. In the following tables, “EO” is an abbreviation for oxyethylene group, and “PO” is an abbreviation for oxypropylene group. Using the compounds shown below, aqueous wrap solutions of Examples 1 to 11 and Comparative Examples 1 to 8 were prepared at the compounding ratios shown in Table 1.

<A component: abrasive dispersant> (A-1) polyoxyethylene (4) isotridecyl ether (A-2) polyoxyethylene (8) isotridecyl ether (A-3) polyoxyethylene (30) isotridecyl ether (A-4) polyoxyethylene (10) polyoxypropylene (3) isotridecyl ether (block polymerization) (A-5) polyoxyethylene (10) polyoxypropylene (3) iso Tridecyl ether (random polymerization) (A-6) Polyoxyethylene (10) isotetradecyl ether

The isotridecyl alcohol as a raw material for A-1 to A-3 is an alcohol synthesized from a propylene tetramer by an oxo method. Isotridecyl alcohol, which is a raw material of A-4 and A-5, is an alcohol synthesized from an isobutene trimer by an oxo method. A-6 is an isoheptanol synthesized from a propylene dimer by the oxo method, by Guerbe.
It is an alcohol synthesized by dimerization by the t reaction.

<Abrasive Dispersant for Comparison> (A′-1) polyoxyethylene (8) nonylphenyl ether (A′-2) polyoxyethylene (7) C12 to C14
Saturated synthetic secondary alkyl ether (A'-3) polyoxyethylene (8) C12-C14
Linear oxoalkyl ether (A'-4) polyoxyethylene (8) lauryl ether (A'-5) polyoxyethylene (8) oleyl ether

<Component B: lubricating base oil> (B-1) HO- (EO) ₁₂ (PO) ₃₀ (EO) _12- H (B-2) HO- (EO) ₃ (PO) ₄₀ (EO) ) ₃ -H (B-3) HO- (PO) ₂₀ (EO) ₂₀ (PO) ₂₀ -H (B-4) (B-5) HO- (EO) _75- H (B-6) glycerin polyoxyethylene / polyoxypropylene random copolymer (EO content 55 mol%,
(B-7) Paraffin-based distilled and refined mineral oil (kinematic viscosity at 40 ° C: 1.7 mm ² / s, boiling point: 220 to 250 ° C) (B-8) Paraffin-based solvent-refined mineral oil (40 ° C) kinematic viscosity ^{32mm 2 / s) (B-} 9) bis in (dodecyl) benzene

<Component C: water> Deionized water <Component D: rust inhibitor> (D-1) Triethanolamine oleate (D-2) N-cyclohexyldiethanolamine dodecanedioate <Other components> Propylene Glycol (solvent)

[0055]

<Evaluation Test of Abrasive Dispersibility> A solution obtained by diluting the lapping liquid shown in Table 1 above by 50 times by mass with ion-exchanged water.
Take 0 ml into a 100 ml measuring cylinder with a stopper,
Alumina abrasive (Fujimi Incorporated FO # 1
20) was added. The graduated cylinder with a stopper was shaken up and down 100 times to disperse and suspend the components containing the alumina abrasive grains blended in the above lapping liquid to prepare a lapping agent. Thereafter, the graduated cylinder was allowed to stand, and the abrasive particle dispersibility was evaluated based on the time until the sedimented solid phase reached the maximum height. In addition, the evaluation judgment of the abrasive grain dispersibility was performed based on the following criteria. ：: Not completely settled even after 60 minutes or more after standing. ：: Settled 41 to 60 minutes after standing. Δ: sedimented 21 to 40 minutes after standing. X: Sedimented within 20 minutes after standing.

<Abrasive Grain Redispersibility Evaluation Test> The graduated cylinder after the above abrasive grain dispersibility evaluation test was allowed to stand still for 24 hours. Thereafter, the measuring cylinder was turned upside down ten times to evaluate the redispersibility of the abrasive grains. In addition, evaluation judgment of abrasive grain re-dispersibility was performed based on the following criteria. ：: The abrasive grains are completely redispersed. Δ: Part of the precipitate remains. X: Almost no dispersion.

[0058]

As is clear from the results shown in Table 2, the water-based lapping agent of the present invention is characterized in that the lapping agent using a nonylphenylethoxylate-based abrasive particle dispersing agent in terms of abrasive particle dispersibility and abrasive particle redispersibility. Comparative Examples 1 and 6) and a lapping agent using other abrasive dispersants (Comparative Examples 2 to 5,
7 and 8).

<Cutting Test> Using a lapping agent having the same composition as that of the above-mentioned abrasive grain dispersibility evaluation test and abrasive grain redispersibility evaluation test, an artificial quartz (width 65 mm,
A 20 mm high, 170 mm long) and a silicon single crystal (102 mm in diameter, 190 mm in length) were cut (sliced) under the following conditions. Table 3 shows the results. Note that the processing time of the evaluation item is the time required for processing per workpiece. -Type of wire: SWP brass plating-Wire diameter: 0.16 mm-Wire tension: 1.5 kg-Number of wires: 106-Wire feeding amount: 20 m / min-Lapping agent temperature: 20 ° C

[0061]

<Polishing Test> Using the lapping agents of Examples 1 to 8 and Comparative Examples 1 to 5, polishing (lapping) was performed on a silicon wafer having a diameter of 102 mm, which was sliced by a silicon wafer lapping apparatus. Was. In addition, about 200 pieces of each lapping agent are polished, and the polished silicon wafer is
The occurrence rates of scratches, cracks, and minute cracks on the wafer surface were determined. Table 4 shows the results.

[0063]

<Biodegradability Test> According to the method for measuring biochemical oxygen consumption (BOD) of the industrial wastewater test method specified in JIS-K-0102, the abrasive dispersant (A), which is a component of (A) component, has a concentration of 0.1%. The BOD of a 1% aqueous solution was measured. However, JIS-
The number of days left in K-0102 is five days,
In this test, the number of days left was 14 days. Table 5 shows the results.

[0065]

[0066]

As described above, the aqueous wrapping liquid or aqueous wrapping agent of the present invention does not use an alkylphenol-based compound, so that there is no concern about the endocrine problem that chemical substances disturb the endocrine system of living organisms. It has excellent abrasive particle dispersibility, cutting workability and polishing workability equivalent to a lapping liquid or a lapping agent using an alkylphenol-based abrasive dispersant.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) C08K 5/00 C08K 5/00 C08L 71/00 C08L 71/00 Y C10M 101/02 C10M 101/02 129 / 16 129/16 133/14 133/14 145/26 145/26 149/14 149/14 173/00 173/00 H01L 21/304 622 H01L 21/304 622C // C10N 20:04 C10N 20:04 30: 04 30:04 30:12 30:12 40:00 40:00 Z 40:22 ZAB 40:22 ZAB F term (reference) 3C047 GG20 3C058 AA07 AC04 CA05 CA06 4H104 AA01C BB14C BB44C BE04C BG06C BH03C BH11C CB14C CE19C DA02A EB10 EB20 FA01 LA02 LA06 PA22 QA01 RA01 4J002 CH02W CH02X CH053 DH026 DJ006 DJ017 DK006 EG026 EG036 EH056 EN006 EP006 EV256 EW046 EW126 GH02 HA07

Claims (10)

[Claims] 1. Component (A) represented by the following general formula (1) A water-based lapping liquid comprising: an abrasive dispersant represented by the formula: a lubricating base oil as a component (B); and water as a component (C). 2. The aqueous lapping liquid according to claim 1, wherein the lubricating base oil as the component (B) is a paraffinic or naphthenic mineral oil. 3. The lubricating base oil as the component (B) is represented by the general formula (2): The aqueous lap liquid according to claim 1, which is a polyether compound represented by the following formula: 4. The aqueous lapping liquid according to claim 3, wherein the polyether compound represented by the general formula (2) has a number average molecular weight of 500 to 50,000. 5. The lubricating base oil as the component (B) is represented by the following general formulas (3) to (6): Any one or two of the polyether compounds represented by
The aqueous wrap liquid according to claim 1, which is a mixture of at least one kind. 6. The aqueous wrap liquid according to claim 1, further comprising a rust preventive as a component (D). 7. A water-based lapping agent characterized in that the water-based lapping liquid or the diluting liquid according to any one of claims 1 to 6 further contains abrasive grains. 8. The aqueous wrap liquid or aqueous wrap agent according to claim 1, which is used for cutting. 9. The water-based lap liquid or water-based lapping agent according to claim 1, which is used for polishing. 10. The water-based lapping liquid or water-based lapping agent according to claim 1, which is used for polishing semiconductors.