EP3894961A1 - Dispositif d'exposition de pièces en forme de plaques à un débit élevé - Google Patents

Dispositif d'exposition de pièces en forme de plaques à un débit élevé

Info

Publication number
EP3894961A1
EP3894961A1 EP19832544.1A EP19832544A EP3894961A1 EP 3894961 A1 EP3894961 A1 EP 3894961A1 EP 19832544 A EP19832544 A EP 19832544A EP 3894961 A1 EP3894961 A1 EP 3894961A1
Authority
EP
European Patent Office
Prior art keywords
processing
workpiece
unit
movement
tables
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19832544.1A
Other languages
German (de)
English (en)
Inventor
Steffen RÜCKER
Uwe Klowsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laser Imaging Systems GmbH
Original Assignee
Laser Imaging Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laser Imaging Systems GmbH filed Critical Laser Imaging Systems GmbH
Publication of EP3894961A1 publication Critical patent/EP3894961A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/02—Carriages for supporting the welding or cutting element
    • B23K37/0211—Carriages for supporting the welding or cutting element travelling on a guide member, e.g. rail, track
    • B23K37/0235—Carriages for supporting the welding or cutting element travelling on a guide member, e.g. rail, track the guide member forming part of a portal
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/086—Supply management, e.g. supply of components or of substrates

Definitions

  • the invention relates to a device for processing plate-shaped workpieces with high workpiece throughput, in particular for increasing the throughput in the direct exposure of photosensitive coatings on printed circuit boards or wafers for the subsequent etching of conductor tracks or electronic circuits.
  • Direct exposure systems are increasingly being used for the production of printed circuit boards and wafers.
  • the manufacturing processes are highly automated.
  • the throughput that can be achieved is an essential production parameter for direct exposure. The shorter the machine's inherent cycle time, the more efficiently the system can be used.
  • the machine's inherent cycle time results from the sum of handling time, exposure time and idle time.
  • the idle time includes processes such as workpiece transport on processing tables, target mark registration, workpiece alignment (alignment) and machine settings (adjustment).
  • the actual processing process is, for example, the exposure of the workpiece in direct exposure systems, e.g. a resist coated substrate, the exposure time being essentially fixed by the material properties, e.g. Resist sensitivity, and the available exposure energy.
  • the material properties e.g. Resist sensitivity
  • the available exposure energy In order to increase the material throughput, only handling times and idle times can be reduced.
  • Exposure systems for disk-shaped or plate-shaped workpieces are known from the prior art, which can expose a workpiece by electromagnetic radiation, predominantly in the visible or ultraviolet spectral range, with a laser beam or with an electron or particle steel with a predetermined pattern.
  • the exposure takes place only after the correct positional relationship has been established between the workpiece with markings (targets or targets) thereon and a predetermined pattern stored in the exposure device.
  • markings targets or targets
  • the exposure processes to be carried out with high spatial precision and the required handling and alignment times of the plate-shaped workpieces are the limiting factors for the increase in throughput on workpieces. Therefore, the aim is to carry out the handling and exposure steps overlap pend or at the same time and to shorten the idle times of the exposure process if the desired exposure of the front and back in the same device is carried out by turning the workpiece.
  • Such solutions are disclosed, for example, in the documents EP 0 951 054 A1, EP 0 722 123 B1, US 6 806 945 B2 and JP 2010-181519 A.
  • a disadvantage of these systems is that either two exposure devices with a turning device located between them or two exposure devices for simultaneous exposure of the top and bottom must be present.
  • JP 2009-092723 A A solution with a single light source for simultaneous exposure on both sides is known from JP 2009-092723 A, in which two beam paths are generated via a beam splitter and parallel mirror beams are used through mirror collimators, each through a photomask, for exposure of both sides of a substrate, whereby however, contact exposure is virtually required and the masks required for this are extremely expensive because they are hardly adaptable when changes in the exposure pattern are required.
  • the invention has for its object to provide a new possibility for processing plate-shaped workpieces, in which a particularly high throughput and improved accuracy is achieved with only one processing unit.
  • machining of the workpiece on both sides with the same processing unit should be possible without the need for intermediate storage and a reduction in the required base area of the entire processing machine compared to machines with the same throughput.
  • the object is achieved in a device for processing plate-shaped workpieces, which has a movable table system for receiving a plate-shaped workpiece and, above the movable table system, a registration unit for detecting target marks and a processing unit with a controllable processing path for processing the workpiece and a computer unit for control
  • a device for processing plate-shaped workpieces which has a movable table system for receiving a plate-shaped workpiece and, above the movable table system, a registration unit for detecting target marks and a processing unit with a controllable processing path for processing the workpiece and a computer unit for control
  • the computer unit is advantageously equipped with means for independently controlling the two tables with respect to the direction of travel, speed of the table movement and alternating entry and exit of the tables for the purpose of loading and unloading plate-shaped workpieces, in order to register plate-shaped workpieces from two opposite sides of the rail arrangement when registering the target marks the retraction movement and the line-by-line processing during the extension movement depending on the determined position of the target marks and a loading and unloading of the table, which is in each case fully extended from a processing housing.
  • the registration unit expediently has a linear orientation transverse to the table movement direction and has at least two sensor regions in order to spatially detect position marks at least in lateral edge regions of the tables or plate-shaped workpieces thereon when one of the tables passes under the registration unit.
  • the processing unit is expediently arranged parallel to the registration unit and has a controllable processing path transversely to the table movement direction in order to be able to carry out processing of the plate-shaped workpiece line by line.
  • the registration unit is advantageously equipped with cameras for detecting positions of the target marks of the plate-shaped workpiece, whereby the position of the workpiece can be recognized by means of the computer unit and before settings of the workpiece size, and a signal for ending the retracting movement and initiating the extending movement of one of the tables for carrying out the specified processing can be generated.
  • the computer unit expediently has a delay device for reversing the direction of the entry to extension movement of the tables, with which the direction reversal can only be triggered as a function of the distance between the registration unit and the processing unit when a rear edge of the plate-shaped workpiece has the processing path of the processing unit or the detection area of the registration unit exceeded, depending on which of the two was passed last.
  • the computer unit contains different speed regimes during the retracting and extending movement of the tables, which are based on a scanning speed of the registration unit and a predefined processing speed of the Processing unit are adapted, wherein the average speed of the entry movement is selected higher than the average speed of the exit movement.
  • the registration unit advantageously has flash lighting in order to limit the scanning of the target marks to those areas of the tables or plate-shaped workpieces thereon in which target marks are to be expected.
  • one of the tables within the processing housing is provided for scanning the target marks by means of the registration unit during the entry movement and for processing line by line during the extending movement, while at the same time the other of the tables in the extended state outside the processing housing loading and unloading the workpieces.
  • two grippers working parallel to the direction of table movement are provided for loading and unloading a table on each output side of the rail arrangement outside the processing housing.
  • the device according to the invention is advantageously equipped with a transport system for providing the plate-shaped workpieces for machining on both sides outside the machining housing and within an outer machine housing, with which the workpieces machined on one side can be transferred from one to the other output side of the rail arrangement with the aid of a turning movement.
  • two articulated arm robots are available in a first expedient embodiment, which have a two-sided, rotatable gripper head, which is formed by rotating the gripper head for the removal of a finished workpiece and placing a not yet finished workpiece, and one-sided by transfer Machined workpieces from one articulated arm robot to another are provided for an inherent turning movement.
  • a second preferred embodiment of a transport system has a roller conveyor which is arranged on one side and which is supplemented with a double arrangement of grippers movable transversely to the table movement for removing a finished workpiece and for placing a workpiece that has not yet been finished.
  • a turning device is advantageously integrated in the roller conveyor as a fork-shaped turning flap, which can be pivoted on a longitudinal side of the turning flap in the roller plane of the roller conveyor, the plate-shaped workpiece being conveyed by means of conveyor rollers of the roller conveyor. derers in the fork openings of the fork-shaped flap retractable and after a pivoting movement of the flap is extendable from the fork openings.
  • the turning device is preferably designed as a fork-shaped flap in such a way that it can be pivoted on its long side in the roller plane and can be locked in a 90 ° position to the conveying plane, the plate-shaped workpiece by means of the conveyor rollers of the roller conveyor through a slot between the pivotable long side and fork elements fork-shaped flap can be moved through without a turn.
  • movable grippers for loading and unloading the respectively extended table are present on each output side of the rail arrangement of the table system, for loading and unloading the respectively extended table, which are used for the simultaneous removal of a machined workpiece and placement of an unfinished or not finished workpiece on each output side of the rail arrangement Double arrangement of grippers operated in parallel are formed.
  • the registration unit and the processing unit are preferably arranged as a parallel double unit located directly next to one another in the middle above the rail arrangement of the table system in order to scan and process the two tables from both sides with one and the same registration unit and processing unit, with the “On -The-Fly “registration and processing regimes recorded during the table retraction movement and locations of the target marks that differ from a processing pattern to be carried out are to be taken into account immediately during the table extension movement in order to take into account the deviations in the position of the target marks for the alignment of the processing pattern by including the deviations in adapt the data of the processing pattern.
  • the registration unit can alternatively be divided into two registration devices, which are arranged on both sides of the processing unit, so that the regimen of registration “on the fly” and processing for both tables can be implemented simultaneously, but alternatively alternately.
  • the registration unit for the target mark scanning expediently has at least two cameras arranged on a line transverse to the table movement direction, the position along the line being adjustable depending on the expected position of the target marks on the workpiece.
  • the cameras are preferably equipped with a flash device to enable images to be taken when the table is moving quickly with short shutter speeds.
  • the cameras equipped with a flash device with short shutter speeds for fast table movement in the longitudinal direction are also available for taking pictures across the table. Movement with slow or stopped table movement provided, if several target marks are not attached in the edge area of the table or workpiece and the other table is in the processing regime.
  • the processing unit is preferably designed as a line-wise scanning exposure unit in order to provide photosensitive layers with an exposure pattern.
  • the exposure unit expediently has a controllable light source for illuminating workpieces with a laser beam scanned by means of a polygon mirror.
  • the processing unit can advantageously be designed as a laser processing unit in order to process workpieces by means of a controlled laser beam by laser ablation or laser cutting.
  • the processing unit is designed as a material deposition unit in order to process workpieces by means of controlled material application.
  • the processing unit can expediently be designed as a laser processing unit according to LIFT technology in order to apply solid materials from donor layer substrates by controlled laser-induced forward transfer as coating patterns to workpieces, or it is designed as an ink-jet unit to transfer transiently liquid materials by means of controllable nozzles to be applied as a coating sample to workpieces.
  • the invention is based on the basic idea that the throughput when machining workpieces with fixed process parameters can only be increased if the machining unit is running almost continuously with the desired machining processes, e.g. Exposure processes, is busy and the handling and non-productive times are shortened in particular by the fact that the target mark registration and the alignment of the workpiece to the machining pattern are carried out in a similar manner continuously and parallel to the machining process and the workpiece change requires the shortest possible machining breaks.
  • Exposure processes e.g. Exposure processes
  • this problem is solved in that two tables are arranged in one plane on a common linear guide in order to reduce the workpiece change time to a table change time during the passage through the processing unit. Both tables move independently of each other along the same guide rails of the linear guide and can approach each other up to a predetermined minimum distance, the same direction of movement with the same or drive in the opposite direction and at the same or different speeds.
  • a machining path progressing line by line transverse to the table movement direction preferably with a laser scanner
  • the registration unit consists of cameras (two or more cameras with area or linear sensors) that can be moved transversely to the table movement direction in order to be able to detect edges or target marks of the workpieces in any position.
  • the registration times can be aligned with the proven line-by-line processing, preferably exposure with a scanned laser line, by strip-by-point target mark recordings, full-screen evaluations of the entire workpiece for the detection of the target marks can be avoided and the processing pattern can match the position of the workpiece recorded by the target mark registration by means of electronic alignment of the processing data getting produced.
  • the cameras should have dynamic properties (high image recording frequency) that allow a seamless detection of the workpiece during the table movement (in the y direction) and thus a flying target mark detection during ongoing operation of the table movement for the immediately subsequent processing process (“on-the- Fly “registration).
  • the mechanical throughput of the processing unit is increased in that the processing unit is loaded from two sides with two separately controllable, alternately moving tables.
  • each workpiece first passes through both the registration unit and the machining unit with a permissible registration speed (sequence varies depending on the table entry side) and after reversing the direction, the machining / exposure takes place on the way back at a specified machining speed.
  • the processing speed is determined, for example, in the exposure of a photosensitive resist coating by the above-mentioned predetermined exposure time.
  • the dimensions of the registration and processing unit in the y direction have a significant influence on the total travel of the tables.
  • the present invention would have to travel longer distances Plan tables compared to a preferred polygon scanner that has a beam with an extent of significantly less than 0.5 mm in the y direction and therefore has only a minimal influence on the required table travel.
  • the additional travel path of the tables for other processing units would have to be assessed as liquid or droplet jets, e.g. when applying materials using ink-jet technology, for example paints, varnishes, adhesives, resists and solder markers, etc.
  • different device-adapted handling systems make it possible to carry out the machining of a workpiece on both sides in a workpiece pass through the same processing system, for which the loading of the processing unit on both sides can be used particularly advantageously by a handling unit which is preferably installed inside a machine housing and which supports the table-to-table.
  • Table transport of the workpiece machined on one side is realized with its inherent rotation, while other workpieces are loaded and machined in parallel on one side of the device that can be loaded on both sides.
  • machining of a workpiece on both sides with the same machining unit with a single workpiece pass is particularly effective, so that no intermediate storage and no second, downstream machining unit are required, compared to machines with the same throughput, a reduction in the required footprint of the entire machining process machine is reached.
  • Fig. 1 two schematic representations of the processing device according to the invention with bilateral, alternating loading with plate-shaped workpieces, with a) the registration and processing of the workpiece on the left and the workpiece change on the right and b) the registration and processing of the workpiece on the right and the left side Workpiece change illustrated;
  • Fig. 3 a timing diagram for the course of registration and processing and a table-to-table transport with rotation of the workpiece for the rear processing;
  • FIG. 4 a two-part representation (in partial illustrations a and b) of a schematic sequence process of an alternative to FIG. 2 workpiece handling by means of a roller conveyor;
  • Fig. 5 a detailed representation for the turning device with arrows for the sequence of movements.
  • Fig. 7 Representation of a modified to Fig. 1 machining process, in which a) the registration and processing of the workpiece on the left and the workpiece change on the right and b) the registration and processing of the workpiece on the right and the workpiece change on the left are illustrated, whereby a separate registration device for the target marks of the workpieces is provided on each output side of the rail arrangement in the processing housing in order to be able to carry out a registration on the other table in parallel for processing on one table; 8 shows a representation of an advantageous embodiment of a registration unit for recording target marks in two strip-shaped areas along the workpiece edges;
  • FIG. 10 shows a representation of a further advantageous embodiment of a registration unit for recording target marks in three strip-shaped areas
  • FIG. 11 a two-part illustration (in partial illustrations a and b) of the loading and unloading process of the two tables according to the embodiment of FIG. 4 in an advantageous embodiment with two grippers guided in parallel.
  • a processing device 1 for processing plate-shaped work pieces 6 comprises - as shown schematically in Fig. 1 - a movable table system 2 for receiving and moving the workpiece 6 and above the movable table system 2 a registration unit 3 for detecting target marks 33 (only 8 and 10) and a processing unit 4, which is designed as a transversely to the table movement direction the workpiece 6 line-wise scanning processing station, and contains a computer unit 5 for control of the alignment between the processing unit 4 and workpiece 6 and local differentiation a predetermined processing as a function of the position of the workpiece 6 determined on the basis of the registered target marks 33.
  • the movable table system 2 has two similar tables 21 and 22 on a common rail arrangement 23 (in the sense of a common linear guide) with a linear rail area preferably formed from two rails in a plane below the registration unit 3 and the processing unit 4, so that the tables 21 , 22 alternately rectilinearly along a table movement direction (y-direction) can be moved independently of one another along the same guide rails of the table system 2 designed as a linear guide and during the movement have the same direction of movement with the same or different sense of direction and with the same or different speeds and in each case completely under registration unit 3 and processing unit 4 can be moved through.
  • the registration unit 3 has a linear orientation transversely to the table movement direction and has at least two sensor areas in order to spatially position marks at least in lateral edges of the tables 21, 22 or the workpieces 6 thereon when one of the tables 21, 22 passes under the registration unit 3 capture.
  • the sensor areas preferably formed by compact cameras 31, which can be area cameras or line cameras, for example.
  • the processing unit 4 is advantageously designed as a processing station arranged parallel to the registration unit 3, which has a controllable processing path transverse to the table movement direction, preferably in the form of a scanned processing beam, in order to carry out line-by-line processing of the plate-shaped workpiece 6.
  • a controllable processing path transverse to the table movement direction, preferably in the form of a scanned processing beam, in order to carry out line-by-line processing of the plate-shaped workpiece 6.
  • linearly scanned laser beams but also electron beams or particle beams come into consideration as controllable machining paths.
  • These can particularly preferably be used in a line-wise scanning exposure unit 41 (see FIG. 2 or 4) for direct exposure.
  • the processing unit 4 can also have another processing station which can be controlled linearly line by line, such as e.g. a laser cutting device or other laser processing systems, e.g.
  • a laser ablation unit or a LIFT system i.e. Engl .: Laser Induced Forward Transfer System (not shown, see e.g. https://www.hiperlam.eu/technologies) or an ink jet unit 42 (only shown in Fig. 7) or other material storage systems.
  • the computer unit 5 is equipped with means for the independent control of the two tables 21, 22 with respect to the direction of direction, the speed of the table movement and the alternate entry and exit of the tables 21, 22 for the purpose of loading and unloading, around plate-shaped workpieces 6 from two opposite sides of the rail arrangement 23 a registration of the target marks 33 in the entry movement and line-by-line processing in the exit movement, the processing after an alignment between the processing unit 4 and the workpiece 6 and with local differentiation according to a pre-given processing pattern by the computer unit 5 as a function of one the registered target 33 determined position of the workpiece 6 is controlled.
  • the computer unit 5 takes care of loading and unloading one of the tables 21 or 22, which alternately extends completely out of a processing housing 7, the processing housing 7 surrounding a room equipped with clean room conditions, which processing unit 1 contains the registration unit 3 and processing unit 4 as well as a space in front of the respective exit area of the rail arrangement 23 of at least one table length.
  • the machining housing 7 has cleaning elements (so-called cleaners 71) for the surface cleaning of the workpieces 6 at the two opposite exit areas of the tables 21, 22.
  • cleaners 71 cleaning elements for the surface cleaning of the workpieces 6 at the two opposite exit areas of the tables 21, 22.
  • partial illustration a shows the process in which the first table 21 is already loaded with an unprocessed workpiece 61 and moves along the rail arrangement 23 into the processing housing 7, passing through the cleaner 71 and firstly the registration unit 3 and along the bold dashed entry direction immediately passes through the processing unit 4 completely.
  • the unprocessed workpiece 61 must pass through both units 3 and 4 and at least all of its parts have left the registration unit 3 and processing unit 4, while the table 21 may not have been completely passed through, as shown as a finely dotted silhouette of table 21 and workpiece 61, if the table 21 has a larger area than the unmachined workpiece 61. Valuable time can thereby be saved, the greater the surface difference between table 21 and workpiece 61.
  • the registration unit 3 contains cameras 31 (two or more cameras with area or linear sensors) which can move in the x direction, in order to be able to detect any position on the unprocessed workpiece 61.
  • the unprocessed workpieces 61, their size and the number of target marks 33 located thereon are precisely known, so that the cameras 31 are movable, but are fixedly preset for scanning the target marks 33 of a specific workpiece batch.
  • a movement of the cameras 31 can also be omitted if either a combination of area or line cameras can capture the entire width of the table 21, 22 without gaps.
  • the cameras 31 In order for the target marks 33 to be scanned immediately as they pass through (“on the fly”), the cameras 31 must have dynamic properties (high image recording frequency) which enable the unprocessed workpiece 61 to be continuously captured during the movement in the table movement direction (y direction) allowed.
  • the “on-the-fly” registration here means that the position data of the target marks 33 and thus the position of the unmachined workpiece 61 directly for the alignment between unmachined workpiece 61 and machining pattern by adapting the machining data for machining in the machining unit 4 by the Computer unit 5 are processed.
  • the computer controls Unit 5 reverses its direction of movement and it traverses the processing unit 4 and the registration unit 3 backwards, represented by the bold-dotted movement line, the unprocessed workpiece 61 being processed line by line in the processing unit 4.
  • the second table 22 on the right side of the partial illustration a) has been unloaded from a workpiece 62 machined on one side and loaded with a new unmachined workpiece 61.
  • the second table 22 is thus ready for processing even before the first table 21 has left the processing housing 7 and can, when the first table 21 has received its processing, move into the processing housing 7, pass through the cleaner 71 and the table 21 Follow at a minimal distance. This process is shown in partial illustration b) of FIG. 1.
  • the second table 22 moves into the machining housing 7 in accordance with the bold dashed line of motion, first passes through the machining unit 4 without being machined, and then is scanned “on the fly” with respect to the positions of the target marks 33 during the passage of the registration unit 3 .
  • the second table 22 must then pass through the registration unit 3 again until the unprocessed workpiece 61 has left the registration unit 3 completely (with all of its parts). Thereafter, the direction of movement of the first table 21 is reversed and the computer unit 5 ensures the adapted and aligned processing of the machining pattern in the machining unit 4.
  • the first table 21 When retracting the second table 22, the first table 21 has left the machining housing 7 on the opposite side at the same time and has been unloaded from the one-sided machined workpiece 62 and loaded with a new unworked workpiece 61, and is thus ready for retraction, exactly then begins when the second table 22, after reversing its direction, runs through the line-by-line processing in the processing unit 4. After completion of the processing on the second table 22, the process follows again in accordance with partial illustration a) of FIG. 1 and then continues with the process in accordance with partial illustration b), etc.
  • the two tables 21, 22 are moved as close as possible to one another in one plane on the common rail arrangement 23. Both tables 21, 22 move independently of one another in each case from one of the two web ends of the rail arrangement 23 in the y direction and can move towards one another to a predetermined minimum distance during the table movement, the same or different Drive speeds and have the same or different sense of direction along the same direction of movement.
  • Fig. 2 is shown in eight partial illustrations a) to h) the process flow of machining workpieces 6 - here using the example of a circuit board exposure - with an associated handling system 8, which in addition to the parallel processing shown in Fig. 1, a utilization of the Machining device 1 allowed for front and back machining of the workpieces 6.
  • Fig. 2 contains in all partial images the processing device 1 shown in Fig. 1 in a variant in which - without restricting the generality of the possible machining processes - the processing unit 4 as an exposure unit 41 with a controllable light source for exposing workpieces 6, preferably is formed with a laser beam scanned by means of a polygon mirror, the rail arrangement 23, as shown in FIG. 1, protruding from the processing housing 7 in order to enable the loading and unloading of the tables 21 and 22 alternately.
  • the processing unit 4 as an exposure unit 41 with a controllable light source for exposing workpieces 6, preferably is formed with a laser beam scanned by means of a polygon mirror, the rail arrangement 23, as shown in FIG. 1, protruding from the processing housing 7 in order to enable the loading and unloading of the tables 21 and 22 alternately.
  • a handling system 8 is provided outside the machining housing 7 for the workpiece loading on both sides thereof, which is accommodated in an outer machine housing 9 surrounding the machining device 1 including the table system 2 with the protruding rail arrangement 23 and comprises two similar articulated arm robots 81, each one the tables 21, 22 are assigned and on the tables 21, 22 ensure the unloading of workpieces 62 exposed on one side and the loading of new unexposed workpieces 61.
  • the handling system 8 contains two identical articulated arm robots 81, which can load or unload workpieces 6 at one end of the rail arrangement 23 on the extended table 21 or 22.
  • Each articulated arm robot 81 has an articulated arm 811 (preferably multi-membered) articulated arm 811 and a rotatable double-sided head 812, which is equipped with two grippers 84 arranged on opposite surfaces, which contain, for example, a vacuum system.
  • the articulated arm robots 81 are arranged such that they each access the assigned table 21 or 22 and can come into contact with the other articulated arm robot 81.
  • the two articulated arm robots 81 make contact with one another, the one articulated arm robot 81 can be one-sided with its grippers 84 arranged on the double-sided head 812 in a middle position halfway to the other articulated arm robot 81 Hand over the machined workpiece 62, which the other articulated arm robot 81 takes over in the “mirrored direction”.
  • the machining device 1 within the machine housing 9 is shown in a snapshot in which a workpiece 62 which has already been exposed (on one side) on the first table 21 has left the machining housing 7 along the rail arrangement 23.
  • a new unexposed workpiece 61 is picked up on one surface of the double-sided head 812, the head 812 is rotated and pivoted over the first table 21.
  • a workpiece 62 exposed on one side is moved on the second table 22 through the registration unit 3 and exposure unit 4 in order to scan the target marks 33 in the direction of travel marked with the hollow arrow.
  • the articulated arm robot 81 places a workpiece 63 that has been exposed on both sides and has just been removed from the second table 22 into a workpiece stack 64.
  • this articulated arm robot 81 pivots, as drawn on the right-hand side of partial illustration b), into the central position halfway to the articulated arm robot 81 of the first table 21.
  • the articulated arm robot 81 on the first table 21 has stopped above the first table 21 in accordance with the left-hand side of partial illustration b), carries the unexposed workpiece 61 on the upper surface of the double-sided head 812 and is lowered with the lower surface onto the first table 21 to record a workpiece 62 that has already been exposed on one side.
  • the line-wise exposure takes place on the second table 22 in the extension direction of the table 22.
  • partial illustration c) of FIG. 2 the exposure on the second table 22 is completed and the table 22 is moved out of the processing housing 7 at an increased speed.
  • the articulated arm robot 81 on the first table 21 has rotated the head 812 again by 180 ° after picking up the workpiece 62 exposed on one side and places the unexposed workpiece 61 on the first table 21.
  • the articulated arm 811 pivots with the workpiece 62 on the other surface of the double-sided head 812, which is exposed on one side, from the first table 21 to the middle position halfway to the other articulated arm robot 81, which is waiting there without a load, and docks on the available surface of the double-sided head 812 to transfer the single-sided workpiece 62.
  • the work piece 63 exposed on both sides has left the processing housing 7 lying on the second table 22 and the first table 21 moves from the other side into the processing housing 7 to the registration unit 3.
  • the articulated arm robot 81 belonging to the second table 22 pivots to the workpiece 63 exposed on both sides on the second table 22 and thereby rotates its head 812 so that it can take up the workpiece 63 exposed on both sides with its free surface.
  • the first table 21 with the unexposed workpiece 61 placed in the processing housing 7 has passed the registration unit 3 and almost passed the exposure unit 41, the registration of the target marks 33 being carried out in the registration unit 3.
  • partial illustration f) shows, after at least the unexposed workpiece 61 has completely passed through the exposure unit 41, the first table 21 reverses its direction of movement and begins the exposure process in the exposure unit 41 during the extension movement.
  • the associated articulated arm robot 81 takes the second table 22 opens the workpiece 63 exposed on both sides and then - as can be seen in partial illustration g) - rotates the head 812 by 180 ° in order to place the workpiece 62 exposed by the articulated arm robot 81 of the first table 21 on the second table 22.
  • the exposure procedure is completed in part figure g) on the first table 21 and the first table 21 is then moved out of the processing housing 7 at an increased speed.
  • the procedure described above is shown again as a local-time scheme to illustrate the close control of the movement of the tables 21, 22, which is shown as a black by a zigzag line.
  • the time axis t is drawn vertically along the spatial center line of the registration unit 3 and processing unit 4 and reveals the different speeds of the tables 21 and 22, the registration taking place in each case at the steepest rises, that is to say at higher table speeds, while the exposure in the Areas with a flatter rise, i.e. at a slower speed.
  • the tables 21 and 22 each come to a standstill (monotonically constant).
  • FIG. 3 clarifies with a twisted arrow ribbon in a stylistically simplified manner that with a handling system 8, e.g. by means of articulated arm robots 81 (according to FIG. 2) or roller conveyors 82 (according to FIG. 4), table-to-table transport as well as the workpiece rotation by means of a turning device 83 (eg according to FIG. 2, partial illustration d) as workpiece transfer between the double-sided Heads 812 of the two articulated arm robots 81 or according to FIGS. 4 and 5 by a fork-shaped reversing flap 831) for processing (exposure) of the workpieces 6 on both sides.
  • a handling system 8 e.g. by means of articulated arm robots 81 (according to FIG. 2) or roller conveyors 82 (according to FIG. 4), table-to-table transport as well as the workpiece rotation by means of a turning device 83 (eg according to FIG. 2, partial illustration d) as workpiece transfer between the double-sided Heads 812 of the
  • this registration and exposure procedure is for two workpieces 6 with the filled numberings 1 and 2 for front A and back B are shown completely.
  • the workpieces 6 with the hollow numbers 3 and 4 illustrate the parallel processes of the next workpieces 6.
  • the workpieces with the reference numerals 61, 62, 63 a distinction is made between unexposed workpiece 61, workpiece 62 exposed on one side and workpiece 63 exposed on both sides.
  • FIG. 4 shows in two partial illustrations a) and b) a handling system 8 that can be used alternatively to FIG. 2 in the form of roller conveyors 82.
  • the processing device 1 is constructed in the same way as in FIG. 1, but - again without restricting the generality - the processing unit 4 is designed as an exposure unit 41.
  • a complete handling system 8 is arranged around this machining device 1 in an outer machine housing 9, which can be used as an alternative to that in FIG. 2 in cooperation with the machining device 1, around the workpieces 62 exposed on one side in the same machining device 1 of a rear side Apply exposure without stacking them.
  • the handling system 8 contains a roller conveyor 82 which transports workpieces 62 exposed on one side from the first table 21 to the second table 22, two Double arrangements of two grippers 85 and 86 each, which carry out a parallel loading and unloading of the respective table 21 or 22, and a turning device 83, which is provided on the way along the roller conveyor 82, in order to move during a table-to-table Transport of the workpieces 62 exposed on one side to rotate the exposed upper side downward and thus to expose the workpieces 6 on both sides in one machine pass using the processing device 1 twice.
  • the partial illustration a) represents the parallel processes with respect to the first table 21 and the second table 22.
  • the first table 21 extended from the processing housing 7 an exchange of the (one-sided) exposed workpiece 62 takes place against an unexposed workpiece 61, the exposure process takes place at the same time on the second table 22, the second table 22 closely following the first table 21 when it exited and thereby scanning the target marks 33 (only shown in FIG. 8) in FIG Registration unit 3 had enabled.
  • the first table 21 is unloaded and loaded with two grippers 85 and 86 which can be moved in parallel (in the x direction), the gripper 85 picking up and lifting (for example pneumatically) an unexposed workpiece 61 which has already been provided on the roller conveyor 82 by the workpiece stack 64 and at the same time the gripper 86 picks up and lifts the workpiece 62, which is exposed on one side and is lying on the first table 21, in the same way.
  • Both grippers 85, 86 then move in the x direction (transversely to the direction of table movement) until the gripper 85 places the unexposed workpiece 61 in the correct position on the table 21 and the gripper 86 the workpiece 62, which is exposed on one side, opposite the roller conveyor 82 lying side of the table 21 can pass.
  • the second table 22 has already moved through the exposure unit 41 as a result of its movement along the same rail arrangement 23 in the same direction of movement with the same sense of direction at a predetermined speed, possibly different to table 21, and ends its extension movement by leaving the processing housing 7.
  • This state is achieved in partial illustration b) of FIG. 4.
  • the first table 21 has already followed at a short distance and has thereby passed through the registration unit 3 and the exposure unit 41, with the registration unit 3 exclusively having done its task of target mark scanning “on the fly”, in order for in the exposure unit 41 after the reversal of the direction of the first table 21 to provide the exposure pattern calculated in the computer unit 5 in accordance with the target mark deviations.
  • the workpiece 63 exposed on both sides is removed from the extended second table 22 and the workpiece 62 exposed on one side, which was transported by the roller conveyor 82 from the first table 21 and which has been turned on the way to the second table 22, is placed in parallel therewith.
  • the workpiece 62, which is exposed on one side, is rotated by the turning device 83, which is integrated in the roller conveyor 82 in the gaps of divided rollers and is designed as a fork-shaped reversing flap 831 rotated on one long side.
  • An enlarged detailed view of this preferred embodiment is shown in Lig. 5 and is described in more detail below.
  • two grippers 85, 86 are in turn movable in parallel in the x direction, as is the case on the side of the first table 21, and are preferably equipped with pneumatic elements, the gripper 86 receiving the workpiece 63 exposed on both sides and the gripper 85 lifts the workpiece 62 exposed on one side from the roller conveyor 82 and both are moved in the same direction in the x-direction until the workpiece 62 exposed on one side can be placed in the correct position on the second table 22 and the workpiece 63 exposed on both sides the separate section of the roller conveyor 82 is found as a deposit so that both workpieces 62 and 63 can be deposited and the next cycle begins according to partial illustration a) of FIG. 4.
  • FIG. 5 shows a preferred embodiment of the turning device 83 mentioned in relation to FIG. 4.
  • This turning device 83 is designed as a fork-shaped turning flap 831 which can be pivoted through 180 ° about a longitudinal axis of rotation 832 lying in the plane of the roller conveyor 82. In the lying state, the fork-shaped reversing flap 831 can be half-sunk into the gaps of the divided rollers of the roller conveyor 82, so that an incoming workpiece 62 that is exposed on one side can run into the open fork of the reversing flap 831.
  • the fork-shaped flap 831 is pivoted about its one longitudinal edge with the axis of rotation 832 until the flap 831 on the continued roller conveyor 82 is immersed in gaps that are also present between divided rollers of the roller conveyor 82 and the workpiece 62, which is exposed on one side, is now exposed Side down - is again placed on the rollers of the roller conveyor 82 and can run freely.
  • This type of workpiece turning has the decisive advantage that the workpiece 62, which is exposed on one side, does not remain at the location of the axis of rotation 832 during the turning process, but is moved on almost at the same speed during the rotation. There is therefore no transport delay, which means that the handling times are reversed by one-sided exposed workpiece 62 are not enlarged in the process of changing the table for the back exposure.
  • the only limiting factor of this turning device 83 for the throughput of workpieces 62 to be rotated is the time interval of pivoting with the workpiece 62 and folding back without a workpiece, since no further workpiece 62 may enter the area of the reversing flap 831 for this time interval. However, this time interval is kept clear solely by the duration of the exposure process, so that the limitation here has no effect on the transport route.
  • FIG. 6 shows yet another modification of the reversing flap 831 in order to also allow workpieces 62 to be transported further without a turn.
  • a continuous slot 833 is machined between the longitudinal axis of rotation 832 and the fork-shaped reversing flap 831, which slot lies precisely in the plane of the roller top of the roller conveyor 82.
  • the turning flap 831 then only has to be pivoted through 90 ° for the unturned further transport of workpieces 62 and thus has to be erected vertically.
  • the slot 833 is thus released and the workpiece 62 can pass through the turning device 83 unimpeded and unchanged.
  • FIG. 7 shows a machining device 1 modified in comparison with FIG. 1 in the sequence representation positions analogous to FIG. 1.
  • the modification of Fig. 7 is that the registration unit 3 consists of two separate registration devices 34, each of which is directly assigned to the outputs of the processing housing 7, while the processing unit 4 is in the center of the processing device 1, as in the previous examples, but In this exemplary embodiment, it is designed as an ink jet unit 42 with which coloring or other controlled material coatings, such as, for example, also LIFT deposits, can be implemented.
  • the tables 21 and 22 are unloaded and loaded in the same chronological order as described for FIG. 1. Due to the two-part registration unit 3, the separate registration devices 34 for each of the tables 21 and 22 are effective immediately at the start of the entry movement.
  • the first table 21, as shown in dashed lines in partial illustration a), can already pick up the target marks 33 when the second table 22 is still in the processing process.
  • the difference between the dashed starting position and the solid advanced position of the first table 21 roughly corresponds to the time saved in idle time, which occurs due to the earlier start time of the first table 21 when the second table 22 begins to be processed. In fact, however, it is somewhat smaller since the registration of the first table 21 takes place at a higher speed than the processing speed of the second table 22, so that the real one Start time of the first table 21 is later so that the first table 21 does not catch up with the second table 22 during processing.
  • the registration can be reorganized, so that a slower scanning of the target marks 33 or even stopping the first table 21 would be possible if the target marks 33 in more than two rows (each at the edges of the Workpiece 6) are attached.
  • the first table 21 could even stop in order to move one or two cameras 31 along an adjustment device in the x direction so that all available target marks 33 can be recorded.
  • Target marks 33 would be detected at several positions in the x-direction at some y-positions of the table movement and could be scanned by one or two cameras 31 (movable during registration) without the additional cross-scanning causing additional idle times.
  • FIGS. 8 and 9 schematically show the preferred functional principle of the registration unit 3.
  • the target marks 33 on the workpiece 6 are present in only two tracks along the workpiece edges in the table movement direction (y direction), so that the registration task can be met with two cameras 31.
  • the cameras 31 are mounted on camera adjustment devices 32 so that they can be adjusted transversely to the table movement direction, that is to say in the x direction, to the dimensions of the workpieces 6 and to any position of the target marks 33 applied thereon.
  • the setting is only required once per workpiece lot or machining job and the setting remains unchanged in the registration process.
  • two or more cameras 31 with area or linear sensors are used as scanning or detector units in the registration unit 3.
  • a position-triggered recording method is used with the cameras 31, ie on previously Given the positions of the first table 21, an illumination flash is generated during the movement, which “freezes” the camera image. Typical flash times are less than 5 ps. The image data are then read out and a new image prepared.
  • Circular marks or through holes are preferably used as target marks 33.
  • the timing and distortion of the target mark image to be observed is shown in FIG. 9.
  • a target mark distortion resulting from the table movement must be taken into account to the extent that the integration time of the sensors of the cameras 31 is not chosen too short, the integration time being set by the corresponding flash duration.
  • the signals are triggered as follows.
  • the scale A (“Ruler”) is part of the positioning system of the first and the second table 21, 22.
  • a control electronics for position detection can record current positions of the table 21, 22 during the movement by external trigger signals (positions (I), (II ), (III) along the clock signal, scale A, the positioning system of the tables 21, 22).
  • a trigger signal “measurement request” (measure request) is generated and at the expected target position (target 33 is in the detection area (FOV) of the respective camera 31) position (I) is stored in position recording signal B.
  • the same trigger signal is transferred to the camera electronics (frame grabber) as image readout signal C.
  • the camera 31 thereby receives the shutter signal E and then opens the shutter (shutter) for image recording.
  • a camera 31 with a so-called “global shutter” is preferably used.
  • the flash control signal D triggers a short flash of light to illuminate the target 33 of the workpiece 6.
  • the rising edge of the flash control signal D generates a second trigger signal which is used to store the table position ( II) leads.
  • the falling edge of the flash control signal D finally generates a third trigger signal, which is used for storing the table position (III).
  • the integration time E of the camera 31 is always set longer than the maximum possible flash duration of the flash control signal D.
  • the image recording for the target mark 33 present on the workpiece 6 is distorted in terms of time and geometry because the table 21, 22 is moving in parallel .
  • the actual target mark position for the position of the target 33 on the workpiece 6 is calculated as follows:
  • Target mark position "determined position in the image field” - sum of the distortions from the time delay of the flash trigger + mark center shift from half the flash duration
  • target marks 33 are used for the processing. These are arranged at the corners of each quadrant.
  • three surface cameras 31 are then used according to FIG. 10, of which at least the middle camera 31 within a correspondingly large image field (FOV) must be able to capture four target marks 33 at the same time if these lie next to one another at the interface of all four quadrants .
  • the registration scheme runs here in the three strips of the target marks 33 as well as for the two-strip variant.
  • FIG. 11 shows the arrangement of two grippers 85 and 86 movable next to one another, which is used for the handling system 8 based on roller conveyors 82 already described in FIG. 4 with regard to the sequence process, in a detailed representation.
  • the desired shortening of handling in the area of unloading and loading of tables 21 and 22 is organized in such a way that the grippers 85, 86 can be moved along the x direction (transverse to the table movement direction) and the movement length is designed to be greater than a table width is. Only the unloading and loading process of the first table 21 is described below; the procedure applies analogously to the second table 22.
  • the one-sided machined workpiece 62 leaves the table area and is moved via the roller conveyor 82, while the unmachined workpiece 61 is moved to the predetermined level of the first table 21, in order to be preferably stored there again synchronously with the one-sided machined workpiece 62.
  • the handling when unloading and loading the two tables 21 and 22 is parallelized so that no additional downtime arises.

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Abstract

L'objet de l'invention est de fournir une nouvelle possibilité d'usinage de pièces (6) en forme de plaques, pour laquelle un débit particulièrement élevé et une précision améliorée peuvent être atteints au moyen d'une seule unité d'usinage (4). À cet effet, selon l'invention, un système (2) de tables mobile présente deux tables (21, 22) similaires sur un ensemble de rails (23) commun, une zone de rail linéaire étant située au-dessous d'une unité d'enregistrement (3) et d'une unité d'usinage (4), de sorte que les tables (21, 22) peuvent être déplacées en alternance de manière rectiligne le long de l'ensemble de rails (23) commun dans une direction de déplacement de table identique intégralement sous l'unité d'enregistrement (3) et l'unité d'usinage (4) et peuvent être commandées indépendamment l'une de l'autre par une unité de calcul (5).
EP19832544.1A 2018-12-12 2019-12-11 Dispositif d'exposition de pièces en forme de plaques à un débit élevé Pending EP3894961A1 (fr)

Applications Claiming Priority (2)

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DE102018132001.9A DE102018132001A1 (de) 2018-12-12 2018-12-12 Vorrichtung zum Belichten von plattenförmigen Werkstücken mit hohem Durchsatz
PCT/DE2019/101076 WO2020119863A1 (fr) 2018-12-12 2019-12-11 Dispositif d'exposition de pièces en forme de plaques à un débit élevé

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EP3894961A1 true EP3894961A1 (fr) 2021-10-20

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US (1) US11656556B2 (fr)
EP (1) EP3894961A1 (fr)
JP (1) JP7438219B2 (fr)
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CN (1) CN113287066A (fr)
DE (1) DE102018132001A1 (fr)
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WO2016124712A2 (fr) * 2015-02-05 2016-08-11 Mycronic AB Procédé récurrent pour le transfert vers l'avant induit par laser et pour le rendement élevé et le recyclage d'un matériau donneur grâce à la réutilisation d'une pluralité de plaques de substrats cibles ou grâce au transfert vers l'avant d'un motif de points donneurs discrets
JP5773095B1 (ja) * 2015-02-10 2015-09-02 ウシオ電機株式会社 光照射装置および光照射方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115055320A (zh) * 2022-08-19 2022-09-16 佛山协智领航科技有限公司 一种用于家具制造的表面喷漆设备
CN115055320B (zh) * 2022-08-19 2022-11-22 佛山协智领航科技有限公司 一种用于家具制造的表面喷漆设备

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JP2022512416A (ja) 2022-02-03
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US11656556B2 (en) 2023-05-23
WO2020119863A1 (fr) 2020-06-18
DE102018132001A1 (de) 2020-06-18
US20220057721A1 (en) 2022-02-24

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