EP3658520A1 - Harte pzt-keramik, piezoelektrisches vielschichtbauelement und verfahren zur herstellung eines piezolektrischen vielschichtbauelements - Google Patents

Harte pzt-keramik, piezoelektrisches vielschichtbauelement und verfahren zur herstellung eines piezolektrischen vielschichtbauelements

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Publication number
EP3658520A1
EP3658520A1 EP18732297.9A EP18732297A EP3658520A1 EP 3658520 A1 EP3658520 A1 EP 3658520A1 EP 18732297 A EP18732297 A EP 18732297A EP 3658520 A1 EP3658520 A1 EP 3658520A1
Authority
EP
European Patent Office
Prior art keywords
ceramic
multilayer component
pzt
piezoelectric
sites
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18732297.9A
Other languages
German (de)
English (en)
French (fr)
Inventor
Denis OROSEL
Markus Puff
Bernhard Döllgast
Alexander Glazunov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
TDK Electronics AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Electronics AG filed Critical TDK Electronics AG
Publication of EP3658520A1 publication Critical patent/EP3658520A1/de
Withdrawn legal-status Critical Current

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    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
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    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3296—Lead oxides, plumbates or oxide forming salts thereof, e.g. silver plumbate
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/74—Physical characteristics
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    • C04B2235/768—Perovskite structure ABO3
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
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    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper

Definitions

  • PZT ceramics having piezoelectric properties withstand high electrical and mechanical stresses.
  • Hard PZT ceramics can be used in particular for
  • piezoelectric transformers used.
  • PZT material systems used in piezoelectric
  • the object of at least one embodiment is to specify a hard PZT ceramic with improved properties.
  • Other objects are the provision of a piezoelectric multilayer component with the PZT ceramic and a
  • ABO 3 comprising A sites and B sites, wherein the PZT ceramic has an Mn and Nb doping at the B sites and the ratio Nb / Mn is ⁇ 2.
  • Such a system has a structure ABO 3 , wherein for the pure lead zirconate titanate Pb occupies the A-site and (Zr x Tii- x ) the B-site. If further elements are present in the ceramic, then one speaks of dopings, which may be present on the A-squares and / or on the B squares.
  • the formula ABO 3 describes the crystal structure of the PZT ceramic wherein A in the basic composition is 2-valent and B 4-valent.
  • a PZT ceramic having Mn and Nb doping at the B sites and the ratio Nb / Mn ⁇ 2 can be obtained in their manufacture without significant degradation of hard piezoelectric properties during sintering. Thus, a retention of the
  • the PZT ceramic has the
  • a xA comprises the doping elements Al xA i to Aa xAa , where a is the number of doping elements on the A-sites and a ⁇ 1.
  • a> 1 or b> 1 doping elements Al, A2, and so on to Aa or Bl, B2, and so on to Bb on the respective places available a can be for example 2, b can also be 2, for example.
  • Al to Aa are independently selected from a group comprising Na, K, Nd, La, Ba, Sr, Ca, Bi and Ag.
  • Bl to Bb are independently selected from a group comprising Fe, Zn, Ge, Sn, Al, Ga, Sb and Cu.
  • the A-sites may be doped with Na and / or K.
  • the B-sites can be doped in particular with Cu.
  • x in the above formula stands for the proportion of the respective element, ie doping element. Further, 0.9 ⁇ x Zr / x Ti ⁇ 1.2, 0.4 ⁇ y ⁇ 0.6, 0.0001 ⁇ xA ⁇ 0.05 for each AI to Aa, 0.0001 ⁇ xB ⁇ 0.05 for each Bl to Bb and 0 ⁇ z ⁇ 0.25.
  • xZr / xTi can be equal to 1
  • y can in particular be equal to 0.5.
  • a piezoelectric multilayer component which comprises a stack of ceramic layers and
  • the ceramic layers contain a PZT hard ceramic according to the above.
  • the piezoelectric multilayer component can be designed monolithic.
  • the ceramic layers are
  • Ceramic layers contain a PZT ceramic as described above, the multilayer component has a high
  • the at least two electrodes contain according to a
  • Embodiment elemental copper In particular, the at least two electrodes may consist of elemental copper. They can therefore also be referred to as copper inner electrodes. Copper is a cheap one
  • Electrode material which can contribute to the low-cost production of such a multilayer component.
  • the piezoelectric is piezoelectric
  • the piezoelectric transformer may be
  • the method comprises the steps of preparing a powdery starting mixture in
  • Stoichiometric ratio containing starting materials, the oxides and / or carbonates of Pb, Zr, Ti, Mn, Nb, at least one of the group Na, K, Nd, La, Ba, Sr, Ca, Bi and Ag and at least one of the group Fe, Zn, Ge, Sn, Al, Ga, Sb and Cu include, producing green sheets from the
  • the starting materials according to one embodiment are in powder form, are mixed and used to prepare the
  • the green sheets are produced by preparing the pulverulent starting mixture and grinding it again and tempering it.
  • the green sheets are stacked one above the other such that electrode layers are sandwiched between two green sheets.
  • Electrode layers can be used in particular copper electrodes. According to one embodiment, at a temperature
  • Density can be produced, which has a low dielectric loss and a high electromechanical coupling efficiency.
  • the sintering may be carried out in an inert gas atmosphere according to an embodiment. Furthermore, the sintering can also be carried out under reducing conditions.
  • the method can be used to produce a multilayer component whose geometry is maintained during sintering and whose piezoelectric
  • FIG. 1 shows a schematic sectional view of a
  • Figure 1 shows the schematic sectional view of a
  • piezoelectric multilayer component This contains ceramic layers 10 which are stacked on top of each other. Between two ceramic layers 10 are
  • Electrodes 20 for example copper inner electrodes, which are contacted via external electrodes 30.
  • Multi-layer component is a monolithic multilayer component. This can be called piezoelectric Transformer can be used. In particular, it may be a plasma generator.
  • the ceramic layers 10 contain a PZT hard ceramic which has an ABO 3 structure and is deposited on the B-
  • Places has a doping with Mn and Nb.
  • the ratio Nb / Mn is ⁇ 2.
  • the PZT ceramic can
  • All of the doping elements mentioned above in relation to the general formula on the A-squares and B-squares are also possible.
  • all A-seats and all B-seats are occupied.
  • Coupling factors k p and d33 are in acceptable ranges for use in devices such as piezoelectric transformers or plasma generators.
  • Embodiments limited. Rather, the includes

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Power Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
EP18732297.9A 2017-07-26 2018-06-12 Harte pzt-keramik, piezoelektrisches vielschichtbauelement und verfahren zur herstellung eines piezolektrischen vielschichtbauelements Withdrawn EP3658520A1 (de)

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DE102017116925.3A DE102017116925B4 (de) 2017-07-26 2017-07-26 Harte PZT-Keramik, piezoelektrisches Vielschichtbauelement und Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements
PCT/EP2018/065499 WO2019020265A1 (de) 2017-07-26 2018-06-12 Harte pzt-keramik, piezoelektrisches vielschichtbauelement und verfahren zur herstellung eines piezolektrischen vielschichtbauelements

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DE102019135497B4 (de) * 2019-12-20 2021-11-11 Nova Plasma Ltd Piezoelektrischer Plasmagenerator und Verfahren zum Betrieb eines piezoelektrischen Plasmagenerators
CN111704461B (zh) * 2020-05-22 2022-06-07 江苏波速传感器有限公司 一种高居里点低温共烧压电陶瓷配方及制备方法
CN113716958B (zh) * 2021-09-06 2022-03-01 无锡邦能超声科技有限公司 一种压电陶瓷材料及高机电转换效率的换能器

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3718486C2 (de) * 1987-06-02 1994-06-30 Siemens Ag Verwendung einer Piezokeramik für einen elektroakustischen Wandler
JP3783534B2 (ja) * 2000-08-18 2006-06-07 株式会社村田製作所 圧電磁器焼結体および圧電磁器素子
JP3812936B2 (ja) 2000-12-28 2006-08-23 ボッシュ株式会社 セラミック材料及びそれを用いた圧電素子
DE10245130A1 (de) 2002-09-27 2004-04-08 Epcos Ag Piezoelektrischer Transformator mit Cu-Innenelektroden
JP4265217B2 (ja) 2002-10-31 2009-05-20 株式会社村田製作所 圧電磁器組成物、圧電トランス、圧電トランスインバータ回路、及び圧電磁器組成物の製造方法
EP1702905A1 (en) 2005-03-09 2006-09-20 TDK Corporation Piezoelectric ceramic composition, production method thereof, piezoelectric element and fabrication method thereof
US7494602B2 (en) 2005-04-11 2009-02-24 Piezotech, Llc Compositions for high power piezoelectric ceramics
US20060229187A1 (en) * 2005-04-11 2006-10-12 De Liufu Compositions for high power piezoelectric ceramics
CN101189743B (zh) * 2005-06-03 2011-04-13 株式会社村田制作所 压电元件
JP5646989B2 (ja) 2008-03-21 2014-12-24 日本碍子株式会社 圧電／電歪素子及びその製造方法
JP5392603B2 (ja) 2009-03-13 2014-01-22 株式会社村田製作所 圧電セラミック電子部品の製造方法
JP2010258199A (ja) 2009-04-24 2010-11-11 Ngk Spark Plug Co Ltd 圧電素子及びその製造方法
US8456066B2 (en) 2009-07-10 2013-06-04 Ngk Insulators, Ltd. Piezoelectric / electrostrictive material, piezoelectric / electrostrictive ceramic composition, piezoelectric / electrostrictive element, and piezoelectric motor
DE102011117709A1 (de) * 2011-11-04 2013-05-08 Epcos Ag Keramikmaterial, Verfahren zur Herstellung desselben und elektrokeramisches Bauelement umfassend das Keramikmaterial
DE102013100617B4 (de) 2013-01-22 2016-08-25 Epcos Ag Vorrichtung zur Erzeugung eines Plasmas und Handgerät mit der Vorrichtung
JP6237407B2 (ja) * 2014-03-28 2017-11-29 三菱マテリアル株式会社 Ｍｎ及びＮｂドープのＰＺＴ系圧電体膜の形成方法
EP3125318B1 (en) * 2014-03-28 2020-08-19 Mitsubishi Materials Corporation Composition for forming manganese- and niobium-doped pzt piezoelectric film
DE102015113656A1 (de) 2015-08-18 2017-02-23 Epcos Ag Plasmagenerator und Verfahren zur Einstellung eines Ionenverhältnisses
DE102016107405A1 (de) 2016-04-21 2017-10-26 Epcos Ag Piezokeramik, Verfahren zu dessen Herstellung und elektrokeramisches Bauelement umfassend die Piezokeramik

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DE102017116925A1 (de) 2019-01-31
JP7033615B2 (ja) 2022-03-10
CN110914219A (zh) 2020-03-24
US20200131093A1 (en) 2020-04-30
CN110914219B (zh) 2022-10-18
US11608301B2 (en) 2023-03-21
DE102017116925B4 (de) 2021-04-22
WO2019020265A1 (de) 2019-01-31

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