EP3434897B1 - Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung - Google Patents

Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung Download PDF

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Publication number
EP3434897B1
EP3434897B1 EP18195959.4A EP18195959A EP3434897B1 EP 3434897 B1 EP3434897 B1 EP 3434897B1 EP 18195959 A EP18195959 A EP 18195959A EP 3434897 B1 EP3434897 B1 EP 3434897B1
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EP
European Patent Office
Prior art keywords
gas
pressure
compressor
working
volume
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP18195959.4A
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German (de)
English (en)
French (fr)
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EP3434897A1 (de
Inventor
Jens HÖHNE
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Pressure Wave Systems GmbH
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Pressure Wave Systems GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/022—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/12—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/024—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/033—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect

Definitions

  • the invention relates to a compressor device, a cooling device equipped therewith and a method for operating the compressor device.
  • pulse tube coolers or Gifford-McMahon coolers are used for cooling magnetic resonance tomographs, cryopumps, etc.
  • Gas and especially helium compressors are used in combination with rotary or rotary valves.
  • the rate at which compressed helium is introduced and re-circulated to the cooling device is in the range of 1 Hz.
  • a problem with conventional screw or piston compressors is that oil from the compressor enters the working gas and thus the cooling device can contaminate.
  • acoustic compressors or high-frequency compressors in which one or more pistons are caused by a magnetic field in linear resonant vibrations. These resonant frequencies are in the range of a few 10 Hz and are therefore not suitable for use with pulse tube coolers and Gifford-McMahon coolers to produce very low temperatures in the lower than 10 K range.
  • a membrane compressor or pump which has a working space which is subdivided into a gas volume and a liquid volume by an elastic, gas- and liquid-tight membrane.
  • a liquid pump liquid is periodically pressed into the liquid volume of the working space, whereby the elastic membrane expands in the direction of gas volume and this compresses - compressor function - or pushing out of the gas volume - pump function.
  • the disadvantage here is that the gas-, liquid-tight and pressure-resistant sealing of the elastic membrane in the working space is relatively expensive. Particularly in the area of sealing, the membrane is heavily loaded, so that either very expensive materials must be used or a shorter life has to be accepted.
  • CH 457 147 A also shows a membrane compressor and mentions the lack of tightness of the membrane to helium.
  • DE 20 2007 018538 U1 shows a multi-stage diaphragm suction pump whose pumping chambers work in parallel or serially.
  • a heat pump and a refrigerator with a compressor device are known.
  • the compressor device comprises a compressor chamber in which a balloon is arranged.
  • the balloon is periodically pressurized with liquid so that the gas surrounding the balloon is periodically compressed and relaxed again.
  • the disadvantage here is that the balloon envelope can scrape or rub in certain operating conditions on the hard and possibly edged inner surface of the compressor chamber. As a result, due to the pressure conditions hole or cracking in the balloon envelope occur.
  • the permeability - permeability - of the balloon envelope for helium as a working gas is too large, so you quickly lose substantial amounts of helium. Thus, the service life of such systems with balloon is unsatisfactory.
  • a diaphragm pump for liquids which can also serve as a "gas compression pump".
  • a liquid must be introduced between the membrane and pump valves, ie a liquid is provided in the gas space. It is thus a compression device with a liquid stamp. A physical separation between compressed gas and hydraulic fluid therefore does not take place.
  • DE 10 2008 060598 A1 shows an apparatus for compressing a gas, comprising two cylinder filled with a hydraulic fluid or a working gas. The hydraulic fluid is preferably pumped back and forth between these cylinders with a hydraulic pump. Again, the physical separation between gas and liquid is not sufficient.
  • US 1 580 479 A describes a diaphragm pump with two chambers (or bellows) without working fluid, which are mutually compressed or relaxed via a yoke separating the chambers.
  • a compressor device with a metal bellows is known as a compressor element, with the exception of hydrogen for all possible working gases is impermeable.
  • the working gas can also be kept oil-free due to the metal bellows.
  • the efficiency due to the interaction with the working fluid balance tank is unsatisfactory.
  • the common pumping device is used twice. In each flow direction of the working fluid is a compression of the working gas; in the one flow direction in the first compressor stage and in the opposite flow direction in the second compressor stage. This increases the efficiency of the compressor device. Characterized in that the high and low pressure gas line are designed so that they act as a gas storage due to their volume, the operating frequency of a compressor operated with the device cooler can be decoupled from the pumping frequency of the pumping device.
  • the compressor device according to the present invention may be configured as a non-conveying compressor device.
  • a predetermined amount of working gas is alternately compressed and relaxed in the two stages. There is no working gas supplied from the outside.
  • a low-pressure gas storage and a high-pressure gas storage may be explicitly provided in the low-pressure or high-pressure gas line.
  • a working fluid preferably hydraulic oil according to DIN 51524 is used, which is additionally dehydrated or anhydrous.
  • the hydraulic oil is in a closed system of pumping device, working fluid equalizing device and fluid volume in the compressor chamber, so that during operation no water from the environment can be absorbed by the hydraulic oil.
  • water can also be used as the working fluid.
  • Water as a working fluid is also advantageous because, in the event of defects in a downstream cryogenic cooler, water which has penetrated can be removed more easily than hydraulic oil which has penetrated into a downstream cooler.
  • water is suitable as a working medium in explosion-protected applications, since water is non-flammable and non-explosive. In addition, water is non-toxic and therefore environmentally friendly.
  • helium, neon or nitrogen is preferably used as working gas.
  • Fig. 1 shows an embodiment of the compressor device according to the invention with a first and a second compressor stage 2-1, 2-2, in the form of a non-promotional compressor device.
  • Each of the two compressor devices 2-1, 2-2 has a gas-tight closed compressor chamber 4-1, 4-2.
  • a metal bellows 6-1, 6-2 is arranged in each of the two compressor rooms 4-1, 4-2.
  • the metal bellows 6-1, 6-2 divide the compressor chambers 4-1, 4-2 into first and second gas volumes 8-1, 8-2 for a working gas 10 and into first and second fluid volumes 12-1, 12-2, respectively for a working liquid 14.
  • the gas volumes 8-1, 8-2 are inside the metal bellows 6-1, 6-2, and the liquid volumes are outside the bellows 6-1, 6-2.
  • the gas volumes 8-1, 8-2 are respectively connected to a high pressure working gas port 18-1, 18-2 and a low pressure working gas port 20-1, 20-2.
  • the low pressure working gas ports 20-1, 20-2 are provided with check valves 22 which are permeable toward the compressor stages 2-1, 2-2.
  • the high pressure working gas ports 18-1, 18-2 are also provided with check valves 22 which have opposite directions of passage as the check valves 22 at the low pressure working gas ports 20-1, 20-2.
  • the high pressure working gas ports 18-1, 18-2 are connected via the check valves 22 to a common high pressure gas line 24, and the low pressure working gas ports 20-1, 20-2 are connected to a low pressure gas line 26 via the check valves 22.
  • the check valves 22 in the high-pressure working gas ports 18-1, 18-2 are in the direction of common high-pressure gas line 24 and the check valves 22 on the low-pressure working gas ports 20-1, 20-2 are in the direction of compressor stages 2-1, 2-2 permeable.
  • the common high pressure gas line 24 and the common low pressure gas line 26 terminate in a motorized rotary valve 28 which alternately the high pressure gas line 24 and the low pressure gas line 26 with a cooling device 30, for.
  • the high and low pressure gas line 24, 26 act due to their volume as a gas storage or there are explicitly a low-pressure gas storage 27 and a high-pressure gas storage 25 in the low-pressure or high-pressure gas line 26, 24 are provided.
  • the check valves 22 at the two high pressure working gas ports 18-1, 18-2 are each followed by heat exchangers 32-1, 32-2 for cooling the compressed working gas.
  • the two compressor stages 2-1, 2-1 are constructed analogously, ie, the gas volumes 8-1, 8-2 and the liquid volumes 12-1, 12-2 are equal.
  • the two working fluid ports 16-1, 16-2 are connected to a common electromotive pumping device 34 which alternately supplies working fluid 14 into the first and second fluid volumes 12-1, 12-2 of the first and second compressor stages 2-1, 2-2 pumps. Ie. either working fluid 14 is pumped from the second fluid volume 12-2 into the first fluid volume 12-1 or vice versa.
  • FIGS. 2a to 2e illustrate the various phases of operation of the compressor device Fig. 1 ,
  • the in Fig. 2a phase shown is pumped by the common pumping device 34 working fluid 14 from the second fluid volume 12-2 of the second compressor stage 2-2 in the first fluid volume 12-1 in the first compressor stage 2-1.
  • the first metal bellows 6-1 is compressed and the working gas 10 therein is pressed into the high pressure gas reservoir 25 via the first high pressure working gas port 18-1, the first heat exchanger 32-1 and the common high pressure gas line 24.
  • the second metal bellows 6-2 expands through working gas 10, which flows back out of the low-pressure working gas reservoir 27 via the low-pressure gas line 26 and the second low-pressure working gas connection 20-2.
  • the rotary valve 28 connects the cooling device 30 via the low pressure gas line 26 with the low pressure gas storage 27th
  • the working fluid flow is reversed and the pumping device 34 now pumps working fluid 14 from the first fluid volume 12-1 of the first compressor stage 2-1 in the second fluid volume 12-2 in the second compressor stage 2-2.
  • the second metal bellows 6-2 is compressed and the working gas 10 therein is compressed and pressed into the high pressure gas reservoir 25 via the second high pressure working gas port 18-1, the second heat exchanger 32-2 and the common high pressure gas line 24.
  • the first metal bellows 6-1 expands through working gas 10 flowing back from the low-pressure gas reservoir 27 via the low-pressure gas line 26 and the first low-pressure working gas port 20-1.
  • Fig. 2e phase shown is again the first phase and the compression takes place in the first compressor stage 2-1.
  • Fig. 2a and 2e differ only in that in Fig. 2e the first metal bellows 6-1 still relaxed and the second metal bellows 6-2 is still compressed.
  • Fig. 2a is the compression in the first compressor stage 2-1 completed and the first metal bellows 6-1 is compressed, while the second metal bellows 6-2 is relaxed.
  • the rotational frequency of the rotary valve 28 is decoupled from the frequency of the compression in the two compressor stages.
  • the rotational frequency of the rotary valve 28 may be synchronized with the frequency of the compressor strokes.
  • the high-pressure and low-pressure gas storage 25, 27 could be dispensed with.
  • Hydraulic oils according to DIN 51524 are suitable as working fluids. These H, HL, HLP and HVLP oils are oils which are well tolerated with common sealants such as NBR (acrylonitrile butadiene rubber) etc. NBR, however, is not sufficiently helium-tight. HF oils are often incompatible with commonly used sealing materials ( http://de.wikipedia.org/wiki/List_of_Plastic_materials ).
  • water can also be used as the working fluid.
  • Water as a working fluid is also advantageous because in the event of defects, water that has penetrated into a downstream cryocooler can be removed more easily than hydraulic oil that has entered a downstream cooler.
  • water is suitable as a working medium in explosion-protected applications, since water is non-flammable and non-explosive. In addition, water is non-toxic and therefore environmentally friendly.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
EP18195959.4A 2014-09-08 2015-09-08 Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung Active EP3434897B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014217897.5A DE102014217897A1 (de) 2014-09-08 2014-09-08 Kompressorvorrichtung, eine damit ausgerüstete Kühlvorrichtung und ein Verfahren zum Betreiben der Kompressorvorrichtung und der Kühlvorrichtung
PCT/EP2015/070507 WO2016038041A1 (de) 2014-09-08 2015-09-08 Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung
EP15774869.0A EP3191712B1 (de) 2014-09-08 2015-09-08 Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP15774869.0A Division-Into EP3191712B1 (de) 2014-09-08 2015-09-08 Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung
EP15774869.0A Division EP3191712B1 (de) 2014-09-08 2015-09-08 Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung

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EP3434897A1 EP3434897A1 (de) 2019-01-30
EP3434897B1 true EP3434897B1 (de) 2019-12-11

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EP18195959.4A Active EP3434897B1 (de) 2014-09-08 2015-09-08 Kompressorvorrichtung, eine damit ausgerüstete kühlvorrichtung und ein verfahren zum betreiben der kompressorvorrichtung und der kühlvorrichtung

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Country Status (6)

Country Link
US (1) US11028841B2 (enExample)
EP (2) EP3191712B1 (enExample)
JP (1) JP6594959B2 (enExample)
CN (1) CN107094367B (enExample)
DE (1) DE102014217897A1 (enExample)
WO (1) WO2016038041A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6975077B2 (ja) * 2018-03-07 2021-12-01 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の給電系統
US20220010934A1 (en) * 2020-07-10 2022-01-13 University Of Maryland, College Park System and method for efficient isothermal compression
DE102021002178A1 (de) * 2021-04-24 2022-10-27 Hydac Technology Gmbh Fördereinrichtung
DE102022115715A1 (de) 2022-06-23 2023-12-28 Pressure Wave Systems Gmbh Kompressorvorrichtung und Kühlvorrichtung mit Kompressorvorrichtung
KR20250168383A (ko) * 2023-03-21 2025-12-02 매그노키네틱스 엘티디 유압 기체 압축기
DE102024100650A1 (de) * 2024-01-10 2025-07-10 Pressure Wave Systems Gmbh Wärmepumpe
CN118257715A (zh) * 2024-05-28 2024-06-28 宁波润华全芯微电子设备有限公司 一种化学品供液泵系统及供液方法

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE91837C (enExample) *
US1580479A (en) * 1924-12-27 1926-04-13 Frankenfield Budd Diaphragm pump
US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2772543A (en) * 1953-03-24 1956-12-04 Berry Frank Multiple hydraulic compressor in a refrigeration system
DE1077367B (de) * 1959-02-12 1960-03-10 Basf Ag Verfahren und Vorrichtung zum Umwaelzen von heissen Gasen
US3205679A (en) * 1961-06-27 1965-09-14 Air Prod & Chem Low temperature refrigeration system having filter and absorber means
CH457147A (de) * 1967-01-20 1968-05-31 Hannes Keller Unterwassertechn Membrankompressor oder -pumpe
US4553397A (en) * 1981-05-11 1985-11-19 Soma Kurtis Method and apparatus for a thermodynamic cycle by use of compression
US4551979A (en) * 1981-05-11 1985-11-12 Soma Kurtis Method and apparatus for a thermodynamic cycle by use of distillation
US4617801A (en) * 1985-12-02 1986-10-21 Clark Robert W Jr Thermally powered engine
JPH0776641B2 (ja) * 1986-05-16 1995-08-16 ダイキン工業株式会社 極低温冷凍機
US4673415A (en) * 1986-05-22 1987-06-16 Vbm Corporation Oxygen production system with two stage oxygen pressurization
DE3801160A1 (de) * 1988-01-16 1989-09-21 Filox Gmbh Kolbenmembranpumpe mit oelmotor
JPH062971A (ja) * 1992-06-22 1994-01-11 Aisin Seiki Co Ltd スターリング機関一体型圧縮機
US5381675A (en) * 1993-09-07 1995-01-17 Siegel; Israel Force-sparing balanced bellows refrigeration device
US5375430A (en) * 1993-10-05 1994-12-27 Siegel; Israel Gravity powered shoe air conditioner
US6192695B1 (en) * 1997-11-14 2001-02-27 Tgk Co., Ltd. Refrigerating cycle
JP2001330329A (ja) * 2000-05-23 2001-11-30 Cryodevice Inc リニア圧縮機
US6378312B1 (en) * 2000-05-25 2002-04-30 Cryomech Inc. Pulse-tube cryorefrigeration apparatus using an integrated buffer volume
DE10245694A1 (de) 2002-09-30 2004-04-15 Luther, Gerhard, Dr.rer.nat. Verfahren und Vorrichtung zur Realisierung einer Wärmepumpe oder einer Kältemaschine mittels kombinierter Verdichtung und Verflüssigung durch eine Verdrängungsblase
US7249465B2 (en) * 2004-03-29 2007-07-31 Praxair Technology, Inc. Method for operating a cryocooler using temperature trending monitoring
DE102004020168A1 (de) * 2004-04-24 2005-11-17 Bruker Biospin Gmbh Magnetresonanzapparatur mit gemeinsamem Kompressor
DE102005034907A1 (de) 2005-07-26 2007-02-01 Linde Ag Verdichter, insbesondere Kolbenverdichter
FR2903456B1 (fr) * 2006-07-07 2008-10-17 Siemens Automotive Hydraulics Pompe transfert a plusieurs pistons
CN2856477Y (zh) 2006-07-13 2007-01-10 孔照根 柱塞式气泵改良结构
JP2008286109A (ja) * 2007-05-17 2008-11-27 Toyota Industries Corp 固定容量型ピストン式圧縮機における冷媒吸入構造
US8049351B2 (en) * 2007-06-15 2011-11-01 E-Net, Llc Turbine energy generating system
DE102007057945B4 (de) 2007-12-01 2009-11-05 Knf Neuberger Gmbh Mehrstufige Membran-Saugpumpe
US9518577B2 (en) * 2008-06-27 2016-12-13 Lynntech, Inc. Apparatus for pumping a fluid
US11078897B2 (en) * 2008-06-27 2021-08-03 Lynntech, Inc. Apparatus for pumping fluid
DE102008060598A1 (de) * 2008-12-05 2010-06-10 Thermea. Energiesysteme Gmbh Vorrichtung und Verfahren zur Verdichtung oder Kompression eines Gases
JP5356983B2 (ja) * 2009-11-18 2013-12-04 大陽日酸株式会社 極低温冷凍装置及びその運転方法
EP2531729B1 (en) * 2010-02-02 2020-03-04 Dajustco Ip Holdings Inc. Diaphragm pump with hydraulic fluid control system
WO2012134608A2 (en) * 2011-03-31 2012-10-04 Carrier Corporation Expander system
GB201209243D0 (en) * 2012-05-25 2012-07-04 Oxford Instr Nanotechnology Tools Ltd Apparatus for reducing vibrations in a pulse tube refrigerator
US9234480B2 (en) * 2012-07-04 2016-01-12 Kairama Inc. Isothermal machines, systems and methods
DE102012213293B4 (de) 2012-07-27 2018-03-29 Pressure Wave Systems Gmbh Kompressorvorrichtung sowie eine damit ausgerüstete Kühlvorrichtung und eine damit ausgerüstete Kältemaschine
US9512835B2 (en) * 2012-11-01 2016-12-06 Alloy Bellows and Precision Welding, Inc. High pressure bellows assembly
US20160069359A1 (en) * 2013-04-12 2016-03-10 Edward John Hummelt Pressure vessel having plurality of tubes for heat exchange
DE102013213575A1 (de) * 2013-07-11 2015-01-15 Mahle International Gmbh Wärmerückgewinnungssystem für einen Verbrennungsmotor
GB2534015B (en) * 2013-09-19 2020-03-25 Halliburton Energy Services Inc Collecting and removing condensate from a gas extraction system
KR101885017B1 (ko) * 2014-07-10 2018-08-02 이글 고오교 가부시키가이샤 액체 공급 시스템
JP6353732B2 (ja) * 2014-08-04 2018-07-04 日本ピラー工業株式会社 ベローズポンプ装置
WO2016021350A1 (ja) * 2014-08-08 2016-02-11 日本ピラー工業株式会社 ベローズポンプ装置
JP6362535B2 (ja) * 2014-12-25 2018-07-25 日本ピラー工業株式会社 ベローズポンプ装置
CN106322807B (zh) * 2015-07-03 2021-05-28 开利公司 喷射器热泵
CN108351134A (zh) * 2015-11-20 2018-07-31 开利公司 带喷射器的热泵
US10551093B2 (en) * 2016-03-16 2020-02-04 Sumitomo Heavy Industries, Ltd. Cryocooler and rotary valve mechanism

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP2017528644A (ja) 2017-09-28
EP3191712B1 (de) 2019-03-13
EP3434897A1 (de) 2019-01-30
US20170175729A1 (en) 2017-06-22
WO2016038041A1 (de) 2016-03-17
CN107094367B (zh) 2019-10-25
EP3191712A1 (de) 2017-07-19
JP6594959B2 (ja) 2019-10-23
CN107094367A (zh) 2017-08-25
DE102014217897A1 (de) 2016-03-10
US11028841B2 (en) 2021-06-08

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