EP3432681A1 - Élément chauffant céramique - Google Patents

Élément chauffant céramique Download PDF

Info

Publication number
EP3432681A1
EP3432681A1 EP17766152.7A EP17766152A EP3432681A1 EP 3432681 A1 EP3432681 A1 EP 3432681A1 EP 17766152 A EP17766152 A EP 17766152A EP 3432681 A1 EP3432681 A1 EP 3432681A1
Authority
EP
European Patent Office
Prior art keywords
wiring portion
ceramic
line width
thickness
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17766152.7A
Other languages
German (de)
English (en)
Other versions
EP3432681A4 (fr
EP3432681B1 (fr
Inventor
Yusuke Makino
Naoya Nakanishi
Atsutoshi Sugiyama
Hidefumi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of EP3432681A1 publication Critical patent/EP3432681A1/fr
Publication of EP3432681A4 publication Critical patent/EP3432681A4/fr
Application granted granted Critical
Publication of EP3432681B1 publication Critical patent/EP3432681B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/40Heating elements having the shape of rods or tubes
    • H05B3/42Heating elements having the shape of rods or tubes non-flexible
    • H05B3/48Heating elements having the shape of rods or tubes non-flexible heating conductor embedded in insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013Heaters using resistive films or coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017Manufacturing methods or apparatus for heaters

Definitions

  • the present disclosure relates to a ceramic heater for use in a warm water washing toilet seat, a fan heater, an electric water heater, a 24-hour bath, a soldering iron, a hair iron, etc.
  • the present disclosure relates to a ceramic heater having a structure in which a ceramic sheet having a heater wire is wrapped around an outer periphery of a support member.
  • a heat exchange unit having a resin container (heat exchanger) is used in a warm water washing toilet seat.
  • a tubular ceramic heater is mounted to the heat exchange unit to warm washing water stored in the heat exchanger.
  • a ceramic heater As for this type of ceramic heater, a ceramic heater has been known which is formed by wrapping a ceramic sheet, on which a heater wire is printed, around a cylindrical ceramic support member, and integrally firing the ceramic sheet and the support member (e. g., refer to Patent Document 1).
  • Patent Document 1 Japanese Patent No. 3038039
  • a ceramic heater for a warm water washing toilet seat is used in water at all times, and therefore is hardly energized and heated while it is in a dry state. Meanwhile, when water supply is cut off or piping is in trouble, there is a possibility that the ceramic heater is energized and heated in its dry state.
  • the cross-sectional area (e. g., line width, thickness) of a general heater wire is uniform, if the ceramic heater is heated in its dry state, the heater wire locally generates heat at a wrapping-ends meeting portion of the ceramic sheet, which may cause melting of a glass component present in the ceramic sheet near the heat-generating heater wire.
  • One aspect of the present disclosure is a ceramic heater including a support member made of ceramic, and a ceramic sheet which is wrapped around an outer periphery of the support member, and includes a heater wire.
  • the heater wire includes a plurality of wiring portions and a connection portion.
  • the plurality of wiring portions include a pair of outer wiring portions, and an inner wiring portion. Each outer wiring portion has a cross-sectional area larger than that of the inner wiring portion.
  • the plurality of wiring portions are configured to extend along the axial direction of the support member.
  • the connection portion is configured to connect adjacent wiring portions.
  • the pair of outer wiring portions are disposed on opposite sides from each other with a wrapping-ends meeting portion of the ceramic sheet therebetween.
  • the inner wiring portion is disposed, in the ceramic sheet, between the pair of outer wiring portions.
  • the cross-sectional area of each of the pair of outer wiring portions positioned on opposite sides from each other with the wrapping-ends meeting portion of the ceramic sheet therebetween is set to be larger than the cross-sectional area of the inner wiring portion disposed, in the ceramic sheet, between the pair of outer wiring portions, whereby electric resistance of the outer wiring portion becomes smaller than that of the inner wiring portion.
  • local heat generation of the heater wire can be suppressed at the wrapping-ends meeting portion where the outer wiring portions are positioned.
  • melting of a glass component present in the ceramic sheet near the outer wiring portions is suppressed, thereby inhibiting dielectric breakdown between the pair of outer wiring portions, and inhibiting breakage of the ceramic heater. Therefore, reliability of the ceramic heater can be improved.
  • a structure in which the line width of the outer wiring portion is larger than that of the inner wiring portion is considered. That is, when the line width of each of the pair of outer wiring portions is set to be larger than that of the inner wiring portion, electric resistance of the outer wiring portion becomes smaller than that of the inner wiring portion, whereby local heat generation of the heater wire can be suppressed.
  • the line width of the outer wiring portion may be set to be larger than 1.07 times and smaller than 2.4 times the line width of the inner wiring portion.
  • the line width of the outer wiring portion is set to be larger than 1.07 times the line width of the inner wiring portion, it is possible to suppress local heat generation of the outer wiring portion, and inhibit occurrence of dielectric breakdown between the pair of outer wiring portions positioned on opposite sides from each other with the wrapping-ends meeting portion therebetween.
  • the line width of the outer wiring portion is set to be smaller than 2.4 times the line width of the inner wiring portion, it is possible to suppress local temperature reduction in the outer wiring portion, thereby inhibiting reduction in thermal uniformity.
  • a structure in which the thickness of the outer wiring portion is larger than that of the inner wiring portion is considered. That is, when the thickness of each of the pair of outer wiring portions is set to be larger than that of the inner wiring portion, electric resistance of the outer wiring portion becomes smaller than that of the inner wiring portion.
  • the thickness of the outer wiring portion may be set to be larger than 1.25 times and smaller than 2.4 times the thickness of the inner wiring portion.
  • the thickness of the outer wiring portion is set to be larger than 1.25 times the thickness of the inner wiring portion, it is possible to suppress local heat generation of the outer wiring portion, and inhibit occurrence of dielectric breakdown between the pair of outer wiring portions positioned on opposite sides from each other with the wrapping-ends meeting portion therebetween.
  • the thickness of the outer wiring portion is set to be smaller than 2.4 times the thickness of the inner wiring portion, it is possible to suppress local temperature reduction in the outer wiring portion, thereby inhibiting reduction in thermal uniformity.
  • a ceramic heater including a support member made of ceramic, and a ceramic sheet which is wrapped around an outer periphery of the support member, and includes a heater wire.
  • the heater wire includes a plurality of wiring portions and a connection portion.
  • the plurality of wiring portions include a pair of outer wiring portions, and an inner wiring portion.
  • a center portion of each outer wiring portion has a cross-sectional area larger than that of the inner wiring portion.
  • the plurality of wiring portions are configured to extend along the axial direction of the support member.
  • the connection portion is configured to connect adjacent wiring portions.
  • the pair of outer wiring portions are disposed on opposite sides from each other with a wrapping-ends meeting portion of the ceramic sheet therebetween.
  • the inner wiring portion is disposed, in the ceramic sheet, between the pair of outer wiring portions.
  • the cross-sectional area of the center portion of each of the pair of outer wiring portions positioned on opposite sides from each other with the wrapping-ends meeting portion of the ceramic sheet therebetween is set to be larger than the cross-sectional area of the inner wiring portion disposed, in the ceramic sheet, between the pair of outer wiring portions, whereby electric resistance of the center portion of the outer wiring portion becomes smaller than that of the inner wiring portion.
  • local heat generation of the heater wire can be suppressed at the wrapping-ends meeting portion where the outer wiring portions are positioned.
  • melting of a glass component present in the ceramic sheet near the center portions of the outer wiring portions is suppressed, thereby inhibiting dielectric breakdown between the pair of outer wiring portions, and inhibiting breakage of the ceramic heater. Therefore, reliability of the ceramic heater can be improved.
  • a structure in which the line width of the center portion of the outer wiring portion is larger than that of the inner wiring portion is considered. That is, when the line width of the center portion of each of the pair of outer wiring portions is set to be larger than that of the inner wiring portion, electric resistance of the center portion of the outer wiring portion becomes smaller than that of the inner wiring portion, whereby local heat generation of the heater wire can be suppressed.
  • the line width of the center portion may be set to be larger than 1.07 times and not larger than 2.0 times the line width of the inner wiring portion.
  • the line width of the center portion is set to be larger than 1.07 times the line width of the inner wiring portion, it is possible to suppress local heat generation of the outer wiring portion, and inhibit occurrence of dielectric breakdown between the pair of outer wiring portions positioned on opposite sides from each other with the wrapping-ends meeting portion therebetween.
  • the line width of the center portion is set to be not larger than 2.0 times the line width of the inner wiring portion, it is possible to suppress local temperature reduction in the outer wiring portion, thereby inhibiting reduction in thermal uniformity.
  • the above-described ceramic heater includes the support member made of ceramic, and the ceramic sheet wrapped around the outer periphery of the support member.
  • ceramic that forms the support member and the ceramic sheet may include alumina, aluminum nitride, silicon nitride, boron nitride, zirconia, titania, and mullite.
  • the support member and the ceramic sheet may contain alumina.
  • a ceramic heater having excellent heat resistance, chemical resistance, and strength can be produced at reduced costs.
  • the ceramic sheet includes a heater element (heater wire) formed of tungsten, molybdenum, tantalum, or the like.
  • the heater wire may contain, as a main component, at least one of tungsten and molybdenum. In this case, the heater wire can be reliably adhered to the ceramic sheet, whereby reliability of the ceramic heater is further improved.
  • a ceramic heater 11 according to the present embodiment is used in, for example, a heat exchanger of a heat exchange unit of a warm water washing toilet seat, for the purpose of warming washing water.
  • the ceramic heater 11 includes: a cylindrical ceramic heater body 13 made of ceramic; and an annular flange 15 made of metal, externally fitted to the heater body 13.
  • the flange 15 is an annular member formed by bending a metal plate such as a stainless-steel plate.
  • the flange 15 has a recessed (cup-shaped) center portion.
  • a space surrounded by an outer peripheral surface 14 of the heater body 13 and an inner surface of the flange 15 serves as a glass reservoir 35.
  • the glass reservoir 35 is filled with glass 33, and the heater body 13 and the flange 15 are welded and fixed via the glass 33.
  • the glass 33 is shown by hatching.
  • the heater body 13 is composed of: a cylindrical support member 17 made of ceramic; and a ceramic sheet 19 wrapped around the outer periphery of the support member 17.
  • the support member 17 and the ceramic sheet 19 are formed by using ceramic such as alumina (Al 2 O 3 ).
  • the thermal expansion coefficient of alumina is within a range of 50 ⁇ 10 -7 /K to 90 ⁇ 10 -7 /K, and is 70 ⁇ 10 -7 /K (30°C to 380°C) in the present embodiment.
  • the support member 17 has an outer diameter set to 12 mm, an inner diameter set to 8 mm, and a length set to 65 mm.
  • the ceramic sheet 19 has a thickness set to 0.5 mm, and a length set to 60 mm.
  • the ceramic sheet 19 does not completely cover the outer periphery of the support member 17. Therefore, a slit 21 is formed at a wrapping-ends meeting portion 20 of the ceramic sheet 19.
  • the slit 21 extends along an axial direction of the support member 17, and exposes an outer peripheral surface of the support member 17.
  • the slit 21 of the present embodiment has a width set to 1 mm, and a depth set to 0.5 mm.
  • a heater wire 41 having a meandering pattern and a pair of internal terminals 42 are formed inside the ceramic sheet 19, a heater wire 41 having a meandering pattern and a pair of internal terminals 42 are formed.
  • the heater wire 41 and the internal terminals 42 contain tungsten (W) as a main component.
  • the internal terminals 42 are electrically connected to external terminals 43 (refer to FIG. 1 ) formed on an outer peripheral surface of the ceramic sheet 19, through via conductors (not shown) or the like.
  • the heater wire 41 includes: a plurality of wiring portions 44 extending along the axial direction of the support member 17; and connection portions 45 each connecting adjacent wiring portions 44 to each other.
  • the plurality of wiring portions 44 include a pair of outer wiring portions 46, and a plurality of inner wiring portions 47.
  • the pair of outer wiring portions 46 are disposed on opposite sides from each other with the wrapping-ends meeting portion 20 (refer to FIG. 3 ) of the ceramic sheet 19 therebetween.
  • a first end (upper end in FIG. 4 ) of each outer wiring portion 46 is connected to an internal terminal 42, and a second end (lower end in FIG. 4 ) of the outer wiring portion 46 is connected to an inner wiring portion 47 via a connection portion 45.
  • the internal terminals 42 are disposed between the pair of outer wiring portions 46 when the ceramic sheet 19 is viewed in the thickness direction.
  • each inner wiring portion 47 is disposed between the pair of outer wiring portions 46.
  • a first end (upper end in FIG. 4 ) of each inner wiring portion 47 is connected to a first end of an adjacent inner wiring portion 47 via a connection portion 45.
  • a second end (lower end in FIG. 4 ) of each inner wiring portion 47 is connected to a second end of an adjacent inner wiring portion 47 or to a second end of an adjacent outer wiring portion 46, via a connection portion 45.
  • Each outer wiring portion 46 of the present embodiment has a line width W1 set to 0.66 mm and a thickness set to 15 ⁇ m.
  • Each inner wiring portion 47 of the present embodiment has a line width W2 set to 0.60 mm and a thickness set to 15 ⁇ m.
  • each connection portion 45 of the present embodiment has a line width W3 set to 0.60 mm and a thickness set to 15 ⁇ m. That is, the line width W1 of the outer wiring portion 46 is larger than the line width W2 of the inner wiring portion 47 and the line width W3 of the connection portion 45.
  • the line width W1 of the outer wiring portion 46 is set to be 1.1 times the line width W2 of the inner wiring portion 47 and the line width W3 of the connection portion 45.
  • the line width W2 of the inner wiring portion 47 is equal to the line width W3 of the connection portion 45. Since the thickness of the outer wiring portion 46 is equal to the thickness of the inner wiring portion 47 and to the thickness of the connection portion 45, the cross-sectional area of the outer wiring portion 46 is larger than the cross-sectional area of the inner wiring portion 47 and the cross-sectional area of the connection portion 45.
  • a clayey slurry containing alumina as a main component is put in a conventionally known extruder (not shown), and the slurry is molded into a tubular member. Then, the molded tubular member is dried, and thereafter is subjected to pre-firing in which the cylindrical member is heated to a predetermined temperature (e. g., about 1000°C), thereby obtaining the support member 17 (refer to FIG. 5A ).
  • a predetermined temperature e. g., about 1000°C
  • first and second ceramic green sheets 51 and 52 which will become the ceramic sheet 19, are formed.
  • a known formation method such as a doctor blade method can be adopted.
  • a conductive paste tungsten paste in the present embodiment
  • an unfired electrode 53 which will become the heater wire 41 and the internal terminals 42, is formed on the surface of the first ceramic green sheet 51 (refer to FIG. 5B ).
  • the line width of the unfired electrode 53 is adjusted to be, for example, a width obtained by adding an amount of shrinkage at firing to the line width of the heater wire 41.
  • the second ceramic green sheet 52 is stacked on the printed surface (surface on which the unfired electrode 53 is formed) of the first ceramic green sheet 51, and a pressing force is applied in the sheet stacking direction. As a result, the ceramic green sheets 51 and 52 are unified, thereby forming a green-sheet stacked body 54 (refer to FIG. 5C ). Further, using the paste printing apparatus, a conductive paste is printed on the surface of the second ceramic green sheet 52. As a result, an unfired electrode 55, which will become the external terminals 43, is formed on the surface of the second ceramic green sheet 52.
  • a ceramic paste (alumina paste) is applied to one side of the green-sheet stacked body 54, and the green-sheet stacked body 54 is wrapped around the outer peripheral surface of the support member 17 so as to be adhered to the support member 17 (refer to FIG. 5D ).
  • the size of the green-sheet stacked body 54 is adjusted so that the opposing ends of the green-sheet stacked body 54 do not overlap each other.
  • a drying process, a degreasing process, etc. are performed according to conventionally known techniques, and thereafter, co-firing is performed in which the green-sheet stacked body 54 (the ceramic green sheets 51 and 52, and the unfired electrodes 53 and 55) is heated to a predetermined temperature (e.
  • alumina in the ceramic green sheets 51 and 52 and tungsten in the conductive paste are simultaneously sintered, whereby the green-sheet stacked body 54 becomes the ceramic sheet 19, the unfired electrode 53 becomes the heater wire 41 and the internal terminals 42, and the unfired electrode 55 becomes the external terminals 43. Thereafter, the external terminals 43 are plated with nickel to obtain the heater body 13.
  • a plate member made of stainless steel is press-formed using a die, thereby forming the cup-shaped flange 15. Then, the flange 15 is externally fitted to the heater body 13 at a predetermined position. Thereafter, the heater body 13 and the flange 15 are welded and fixed via the glass 33 to complete the ceramic heater 11.
  • a ceramic heater was prepared which includes a ceramic sheet having a line width of each outer wiring portion being 0.60 mm, a line width of each inner wiring portion being 0.60 mm, and a value of a ratio of the line width of the outer wiring portion to the line width of the inner wiring portion being 1.0.
  • a ceramic heater in which the line width of each outer wiring portion was equal to the line width of each inner wiring portion was prepared.
  • This ceramic heater was regarded as a sample 1A.
  • a ceramic heater having a line width of each outer wiring portion being 0.64 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 1.07 was prepared as a sample 1B.
  • a ceramic heater having a line width of each outer wiring portion being 0.60 mm, a line width of each inner wiring portion being 0.55 mm, and a value of the ratio being 1.09 was prepared as a sample 1C.
  • a ceramic heater having a line width of each outer wiring portion being 0.69 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 1.15 was prepared as a sample 1E.
  • a ceramic heater having a line width of each outer wiring portion being 1.20 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 2.0 was prepared as a sample 1F.
  • a ceramic heater having a line width of each outer wiring portion being 1.44 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 2.4 was prepared as a sample 1G.
  • a nichrome wire was soldered to a pair of internal terminals (heater wire) included in the ceramic sheet of each of the measurement samples (samples 1A to 1G), and each measurement sample, in its dry state, was placed on a base. Then, a voltage (AC 240V) was applied across the pair of internal terminals for 6 minutes, and the surface temperature of the ceramic sheet was measured by a thermocamera. In addition, it was observed whether local heat generation occurred at the outer wiring portions and whether dielectric breakdown occurred between the pair of outer wiring portions. If dielectric breakdown occurred, the occurrence time was measured and recorded. The results are shown on Table 1.
  • sample 1A it was found that, in all the five samples, local heat generation occurred, and dielectric breakdown occurred with a spark after 1 min and 50 sec had passed.
  • sample 1B it was found that local heat generation occurred in all the five samples, and dielectric breakdown occurred in two samples among the five samples.
  • samples 1C to 1G neither local heat generation nor dielectric breakdown was found in any of the five samples throughout observation for 6 minutes.
  • sample 1G it was found that the temperature at the wrapping-ends meeting portion of the ceramic sheet was reduced, leading to reduction in thermal uniformity.
  • each of outer wiring portions 63 as components of a heater wire 62 has: a line width W4, at a center portion 64, set to 0.66 mm; a line width W5, at a portion 65 other than the center portion 64, set to 0.60 mm; and a thickness set to 15 ⁇ m.
  • the "center portion 64 of the outer wiring portion 63" is a region, of a center portion of the outer wiring portion 63, which occupies not larger than one-third of the length of the outer wiring portion 63.
  • each of inner wiring portions 66 as components of the heater wire 62 has a line width W6 set to 0.60 mm, and a thickness set to 15 ⁇ m.
  • each of connection portions 67 as components of the heater wire 62 also has a line width W7 set to 0.60 mm, and a thickness set to 15 ⁇ m. That is, the line width W4 of the center portion 64 of the outer wiring portion 63 is larger than the line width W5 of the other portion 65 of the outer wiring portion 63, the line width W6 of the inner wiring portion 66, and the line width W7 of the connection portion 67. Specifically, the line width W4 of the center portion 64 is set to be 1.1 times the line width W5 of the other portion 65, the line width W6 of the inner wiring portion 66, and the line width W7 of the connection portion 67.
  • the cross-sectional area of the center portion 64 is larger than the cross-sectional area of the other portion 65, the cross-sectional area of the inner wiring portion 66, and the cross-sectional area of the connection portion 67.
  • the line width of the outer wiring portion 63 gradually increases from the other portion 65 to the center portion 64.
  • a ceramic heater was prepared which includes a ceramic sheet having a line width of the center portion of each outer wiring portion being 0.60 mm, a line width of each inner wiring portion being 0.55 mm, and a value of a ratio of the line width of the center portion to the line width of the inner wiring portion being 1.09.
  • This ceramic heater was regarded as a sample 1C'.
  • a ceramic heater having a line width of the center portion being 0.66 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 1.1 that is, a ceramic heater identical to the ceramic heater of the present embodiment, was prepared as a sample 1D'.
  • a ceramic heater having a line width of the center portion being 0.69 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 1.15 was prepared as a sample 1E'.
  • a ceramic heater having a line width of the center portion being 1.20 mm, a line width of each inner wiring portion being 0.60 mm, and a value of the ratio being 2.0 was prepared as a sample 1F'.
  • a ceramic heater 111 according to the present embodiment is used in, for example, a heat exchanger of a heat exchange unit of a warm water washing toilet seat, for the purpose of warming washing water.
  • the ceramic heater 111 includes: a cylindrical ceramic heater body 113 made of ceramic; and an annular flange 115 made of metal, externally fitted to the heater body 113.
  • the flange 115 is an annular member formed by bending a metal plate such as a stainless-steel plate.
  • the flange 115 has a recessed (cup-shaped) center portion.
  • a space surrounded by an outer peripheral surface 114 of the heater body 113 and an inner surface of the flange 115 serves as a glass reservoir 135.
  • the glass reservoir 135 is filled with glass 133, and the heater body 113 and the flange 115 are welded and fixed via the glass 133.
  • the glass 133 is shown by hatching.
  • the heater body 113 is composed of: a cylindrical support member 117 made of ceramic; and a ceramic sheet 119 wrapped around the outer periphery of the support member 117.
  • the support member 117 and the ceramic sheet 119 are formed by using ceramic such as alumina (Al 2 O 3 ).
  • the thermal expansion coefficient of alumina is within a range of 50 ⁇ 10 -7 /K to 90 ⁇ 10 -7 /K, and is 70 ⁇ 10 -7 /K (30°C to 380°C) in the present embodiment.
  • the support member 117 has an outer diameter set to 12 mm, an inner diameter set to 8 mm, and a length set to 65 mm.
  • the ceramic sheet 119 has a thickness set to 0.5 mm, and a length set to 60 mm.
  • the ceramic sheet 119 does not completely cover the outer periphery of the support member 117. Therefore, a slit 121 is formed at a wrapping-ends meeting portion 120 of the ceramic sheet 119.
  • the slit 121 extends along an axial direction of the support member 117, and exposes an outer peripheral surface of the support member 117.
  • the slit 121 of the present embodiment has a width set to 1 mm, and a depth set to 0.5 mm.
  • a heater wire 141 having a meandering pattern and a pair of internal terminals 142 are formed inside the ceramic sheet 119.
  • the heater wire 141 and the internal terminals 142 contain tungsten (W) as a main component.
  • the internal terminals 142 are electrically connected to external terminals 143 (refer to FIG. 7 ) formed on an outer peripheral surface of the ceramic sheet 119, through via conductors (not shown) or the like.
  • the heater wire 141 includes: a plurality of wiring portions 144 extending along the axial direction of the support member 117; and connection portions 145 each connecting adjacent wiring portions 144 to each other.
  • the wiring portions 144 include a pair of outer wiring portions 146, and a plurality of inner wiring portions 147.
  • the outer wiring portions 146 are disposed on opposite sides from each other with a wrapping-ends meeting portion 120 (refer to FIG. 9 ) of the ceramic sheet 119 therebetween.
  • a first end (upper end in FIG. 10 ) of each outer wiring portion 146 is connected to an internal terminal 142, and a second end (lower end in FIG. 10 ) of each outer wiring portion 146 is connected to an inner wiring portion 147 via a connection portion 145.
  • the internal terminals 142 are disposed between the pair of outer wiring portions 146 when the ceramic sheet 119 is viewed in the thickness direction.
  • each inner wiring portion 147 is disposed between the pair of outer wiring portions 146.
  • a first end (upper end in FIG. 10 ) of each inner wiring portion 147 is connected to a first end of an adjacent inner wiring portion 147 via a connection portion 145.
  • a second end (lower end in FIG. 10 ) of each inner wiring portion 147 is connected to a second end of an adjacent inner wiring portion 147 or to a second end of an adjacent outer wiring portion 146, via a connection portion 145.
  • Each outer wiring portion 146 of the present embodiment has a thickness T1 set to 20 ⁇ m, and a line width set to 0.60 mm.
  • Each inner wiring portion 147 of the present embodiment has a thickness T2 set to 15 ⁇ m, and a line width set to 0.60 mm.
  • each connection portion 145 of the present embodiment has a thickness set to 15 ⁇ m, and a line width set to 0.60 mm. That is, the thickness T1 of the outer wiring portion 146 is larger than the thickness T2 of the inner wiring portion 147 and the thickness of the connection portion 145.
  • the thickness T1 of the outer wiring portion 146 is set to be 1.33 times the thickness T2 of the inner wiring portion 147 and the thickness of the connection portion 145.
  • the thickness T2 of the inner wiring portion 147 is equal to the thickness of the connection portion 145. Since the line width of the outer wiring portion 146 is equal to the line width of the inner wiring portion 147 and to the line width of the connection portion 145, the cross-sectional area of the outer wiring portion 146 is larger than the cross-sectional area of the inner wiring portion 147 and the cross-sectional area of the connection portion 145.
  • a clayey slurry containing alumina as a main component is put in a conventionally known extruder (not shown), and the slurry is molded into a tubular member. Then, the molded tubular member is dried, and thereafter is subjected to pre-firing in which the cylindrical member is heated to a predetermined temperature (e. g., about 1000°C), thereby obtaining the support member 117 (refer to FIG. 11A ).
  • a predetermined temperature e. g., about 1000°C
  • first and second ceramic green sheets 151 and 152 which will become the ceramic sheet 119, are formed.
  • a known formation method such as a doctor blade method can be adopted.
  • a printing process is performed by using a conventionally known paste printing apparatus (not shown), to print a conductive paste (tungsten paste in the present embodiment) on the surface of the first ceramic green sheet 151.
  • the conductive paste is printed dividedly in two times to make the thickness T1 of the outer wiring portion 146 larger than the thickness T2 of the inner wiring portion 147.
  • the conductive paste is printed on the surface of the first ceramic green sheet 151, thereby forming a first electrode 153 as an unfired electrode which forms the heater wire 141 and the internal terminals 142 (refer to FIG. 11B ).
  • the line width of the first electrode 153 is adjusted to be, for example, a width obtained by adding an amount of shrinkage at firing to the line width of the heater wire 141.
  • the conductive paste is printed on portions, of the first electrode 153, which will become the outer wiring portions 146, thereby forming a second electrode 154 which forms portions of the outer wiring portions 146 (refer to FIG. 11B ).
  • the line width of the second electrode 154 is adjusted to be narrower than that of the first electrode 153, for example.
  • a second ceramic green sheet 152 is stacked on the printed surface (surface on which the first electrode 153 and the second electrode 154 are formed) of the first ceramic green sheet 151, and a pressing force is applied in the sheet stacking direction.
  • the ceramic green sheets 151 and 152 are unified, thereby forming a green-sheet stacked body 155 (refer to FIG. 11C ).
  • the conductive paste is printed on the surface of the second ceramic green sheet 152.
  • an unfired electrode 156 which will become the external terminals 143, is formed on the surface of the second ceramic green sheet 152.
  • a wrapping process is performed in which a ceramic paste (alumina paste) is applied to one side of the green-sheet stacked body 155, and the green-sheet stacked body 155 is wrapped around the outer peripheral surface of the support member 117 so as to be adhered to the support member 117 (refer to FIG. 11D ).
  • the size of the green-sheet stacked body 155 is adjusted so that the opposing ends of the green-sheet stacked body 155 do not overlap each other.
  • the green-sheet stacked body 155 (the ceramic green sheets 151 and 152, the first electrode 153, the second electrode 154, and the unfired electrode 156) is heated to a predetermined temperature (e.g., about 1400°C to 1600°C) at which alumina and tungsten in the green-sheet stacked body 155 can be sintered.
  • a predetermined temperature e.g., about 1400°C to 1600°C
  • the green-sheet stacked body 155 becomes the ceramic sheet 119
  • the electrodes 153 and 154 become the heater wire 141 and the internal terminal 142, respectively
  • the unfired electrode 156 becomes the external terminals 143.
  • the external terminals 143 are plated with nickel to obtain the heater body 113.
  • a plate member made of stainless steel is press-formed using a die, thereby forming the cup-shaped flange 115.
  • the flange 115 is externally fitted to the heater body 113 at a predetermined position. Thereafter, the heater body 113 and the flange 115 are welded and fixed via the glass 133 to complete the ceramic heater 111.
  • a ceramic heater was prepared which includes a ceramic sheet having a thickness of each outer wiring portion being 15 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of a ratio of the thickness of the outer wiring portion to the thickness of the inner wiring portion being 1.0.
  • a ceramic heater in which the thickness of each outer wiring portion is equal to the thickness of each inner wiring portion was prepared.
  • This ceramic heater was regarded as a sample 2A.
  • a ceramic heater having a thickness of each outer wiring portion being 18 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 1.2 was prepared as a sample 2B.
  • a ceramic heater having a thickness of each outer wiring portion being 15 ⁇ m, a thickness of each inner wiring portion being 12 ⁇ m, and a value of the ratio being 1.25 was prepared as a sample 2C.
  • a ceramic heater having a thickness of each outer wiring portion being 19 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 1.27 was prepared as a sample 2D.
  • a ceramic heater having a thickness of the outer wiring portion being 25 ⁇ m, a thickness of the inner wiring portion being 15 ⁇ m, and a value of the ratio being 1.67 was prepared as a sample 2F.
  • a ceramic heater having a thickness of each outer wiring portion being 30 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 2.0 was prepared as a sample 2G.
  • a ceramic heater having a thickness of each outer wiring portion being 36 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 2.4 was prepared as a sample 2H. As for each of the samples 2A to 2H, five samples were prepared.
  • a nichrome wire was soldered to a pair of internal terminals (heater wire) included in the ceramic sheet of each of the measurement samples (samples 2A to 2H), and each measurement sample, in its dry state, was placed on a base. Then, a voltage (AC 240V) was applied across the pair of internal terminals for 6 minutes, and the surface temperature of the ceramic sheet was measured by a thermocamera. In addition, it was observed whether local heat generation occurred at the outer wiring portions and whether dielectric breakdown occurred between the pair of outer wiring portions. If dielectric breakdown occurred, the occurrence time was measured and recorded. The results are shown on Table 3.
  • the sample 2A it was found that, in all the five samples, local heat generation occurred, and dielectric breakdown occurred with a spark after 1 min and 50 sec had passed.
  • the sample 2B it was found that local heat generation occurred in all the five samples, and dielectric breakdown occurred in two samples among the five samples.
  • the sample 2C occurrence of dielectric breakdown was not found, but local heat generation was found in one sample among the five samples.
  • the samples 2D to 2H neither local heat generation nor dielectric breakdown was found in any of the five samples throughout observation for 6 minutes. However, in the sample 2H, it was found that the temperature at the wrapping-ends meeting portion of the ceramic sheet was reduced, leading to reduction in thermal uniformity.
  • each of outer wiring portions 163 as components of a heater wire 162 included in a ceramic sheet 161 has: a thickness T3, of a center portion 164, set to 20 ⁇ m; a thickness, of a portion 165 other than the center portion 164, set to 15 ⁇ m; and a line width set to 0.60 mm.
  • the "center portion 164 of the outer wiring portion 163" is a region, of a center portion of the outer wiring portion 163, which occupies not larger than one-third of the length of the outer wiring portion 163.
  • Each of inner wiring portions 166 as components of the heater wire 162 has a thickness T4 set to 15 ⁇ m, and a line width set to 0.60 mm.
  • each of connection portions 167 as components of the heater wire 162 also has a thickness set to 15 ⁇ m, and a line width set to 0.60 mm. That is, the thickness T3 of the center portion 164 of the outer wiring portion 163 is larger than the thickness of the other portion 165 of the outer wiring portion 163, the thickness T4 of the inner wiring portion 166, and the thickness of the connection portion 167. Specifically, the thickness T3 of the center portion 164 is set to be 1.33 times the thickness of the other portion 165, the thickness T4 of the inner wiring portion 166, and the thickness of the connection portion 167.
  • the cross-sectional area of the center portion 164 is larger than the cross-sectional area of the other portion 165, the cross-sectional area of the inner wiring portion 166, and the cross-sectional area of the connection portion 167.
  • the conductive paste is printed dividedly in two times, to make the thickness T3 of the center portion 164 larger than the thickness T4 of the inner wiring portion 166. Specifically, first, the conductive paste is printed on the surface of a ceramic green sheet which will become the ceramic sheet 161, thereby forming a first electrode as an unfired electrode which forms the heater wire 162. Next, the conductive paste is printed on portions, of the first electrode, which will become the center portions 164, thereby forming a second electrode which form portions of the center portions 164.
  • the line width of the second electrode is adjusted so as to be narrower than that of the first electrode, for example.
  • a ceramic heater was prepared which includes a ceramic sheet having a thickness of the center portion of each outer wiring portion being 15 ⁇ m, a thickness of each inner wiring portion being 12 ⁇ m, and a value of a ratio of the thickness of the center portion to the thickness of the inner wiring portion being 1.25.
  • This ceramic heater was regarded as a sample 2C'.
  • a ceramic heater having a thickness of the center portion being 20 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 1.33 was prepared as a sample 2E'.
  • a ceramic heater having a thickness of the center portion being 25 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 1.67 was prepared as a sample 2F'.
  • a ceramic heater having a thickness of the center portion being 30 ⁇ m, a thickness of each inner wiring portion being 15 ⁇ m, and a value of the ratio being 2.0 was prepared as a sample 2G'.
  • each outer wiring portion 163 when the thickness T3 of the center portion 164 of each outer wiring portion 163 is larger than the thickness T4 of each inner wiring portion 166, electric resistance of the center portion 164 becomes smaller than that of the inner wiring portion 166. Therefore, at the wrapping-ends meeting portion 168 of the ceramic sheet 161, where the outer wiring portions 163 are positioned, local heat generation of the heater wire 162 can be suppressed. As a result, melting of the glass component present in the ceramic sheet 161 near the center portions 164 of the outer wiring portions 163 is suppressed, thereby inhibiting dielectric breakdown between the pair of outer wiring portions 163, and inhibiting breakage of the ceramic heater. Therefore, reliability of the ceramic heater can be improved. [Other embodiments] The above-described embodiments may be modified as follows.
  • the line width W3 of the connection portion 45 may be larger than the line width W1 of the outer wiring portion 46 and the line width W2 of the inner wiring portion 47.
  • the line width W7 of the connection portion 67 may be larger than the line width W4 of the center portion 64 of the outer wiring portion 63, the line width W5 of the other portion 65 of the outer wiring portion 63, and the line width W6 of the inner wiring portion 66.
  • one center portion 64 is formed in one outer wiring portion 63.
  • two or more wide portions each having the same line width as the center portion 64 may be formed in one outer wiring portion.
  • the respective wide portions may be disposed apart from each other along the direction in which the outer wiring portion extends, or may be disposed in contact with each other along the direction in which the outer wiring portion extends.
  • the support member 17 of the ceramic heater 11 and the support member 117 of the ceramic heater 111 are tubular in shape.
  • these support members each may have a rod shape. That is, the ceramic heaters may be used in equipment (e. g., a fan heater) other than a warm water washing toilet seat.
  • the flange made of stainless steel is used.
  • a flange made of alumina may be used, for example.
  • the ceramic heater 11 and the ceramic heater 111 are configured such that an AC voltage is applied across the pair of internal terminals 42 and across the pair of internal terminals 142, respectively.
  • a DC voltage may be applied across the pair of internal terminals 42 and across the pair of internal terminals 142.
  • the conductive paste is printed dividedly in two times to make the thickness T1 of the outer wiring portion 146 larger than the thickness T2 of the inner wiring portion 147.
  • the conductive paste may be printed dividedly in three or more times to make the thickness T1 of the outer wiring portion 146 larger than the thickness T2 of the inner wiring portion 147.
  • the conductive paste is printed dividedly in two times to make the thickness T3 of the center portion 164 larger than the thickness T4 of the inner wiring portion 166.
  • the conductive paste may be printed dividedly in three or more times to make the thickness T3 of the center portion 164 larger than the thickness T4 of the inner wiring portion 166.
  • the conductive paste is printed on the surface of the first ceramic green sheet 151 to form the unfired electrode (first electrode 153) which forms almost the entirety of the heater wire 141 (region excluding upper-layer portions of the outer wiring portions 146). Thereafter, the conductive paste is printed on portions, of the first electrode 153, which will become the outer wiring portions 146, to form the unfired electrode (second electrode 154) which forms the upper-layer portions of the outer wiring portions 146.
  • the conductive paste may be printed on portions, of the surface of the first ceramic green sheet 151, which will become the outer wiring portions 146, to form the unfired electrode which forms lower-layer portions of the outer wiring portions 146.
  • the conductive paste may be printed on the unfired electrode and the surface of the first ceramic green sheet 151 to form the unfired electrode which forms almost the entirety of the heater wire 141 (region excluding the lower-layer portions of the outer wiring portions 146).
  • the entirety of the heater wire 141 may be formed by performing printing of the conductive paste only one time by using an ink-jet apparatus or the like.
  • the conductive paste is printed on the surface of the ceramic green sheet to form the unfired electrode (first electrode) which forms almost the entirety of the heater wire 162 (region excluding upper-layer portions of the center portions 164). Thereafter, the conductive paste is printed on portions, of the first electrode, which will become the center portions 164, to form the unfired electrode (second electrode) which forms the upper-layer portions of the center portions 164.
  • the conductive paste may be printed on portions, of the surface of the ceramic green sheet, which will become the center portions 164 to form the unfired electrode which forms lower-layer portions of the center portions 164.
  • the conductive paste may be printed on the unfired electrode and the surface of the ceramic green sheet to form the unfired electrode which forms almost the entirety of the heater wire 162 (region excluding the lower-layer portions of the center portions 164).
  • the entirety of the heater wire 162 may be formed by performing printing of the conductive paste only one time by using an ink-jet apparatus or the like.
  • the line width of the second electrode 154 which will become the outer wiring portions 146 is adjusted to be narrower than that of the first electrode 153 which also will become the outer wiring portions 146.
  • the line width of the second electrode 154 may be equal to that of the first electrode 153, or may be larger than that of the first electrode 153.
  • the line width of the second electrode which will become the center portions 164 is adjusted to be narrower than the first electrode which also will become the center portions 164.
  • the line width of the second electrode may be equal to that of the first electrode, or may be larger than that of the first electrode.
  • the ceramic heaters 11 and 111 each correspond to an example of a ceramic heater
  • the support members 17 and 117 each correspond to an example of a support member
  • the ceramic sheets 19, 61, 119, and 161 each correspond to an example of a ceramic sheet.
  • the wrapping-ends meeting portions 20, 120, and 168 each correspond to an example of a wrapping-ends meeting portion
  • the heater wires 41, 62, 141, and 162 each correspond to an example of a heater wire
  • the wiring portions 44 and 144 each correspond to an example of a wiring portion
  • the connection portions 45, 67, 145, and 167 each correspond to an example of a connection portion.
  • the outer wiring portions 46, 63, 146, and 163 each correspond to an example of an outer wiring portion
  • the inner wiring portions 47, 66, 147, and 166 each correspond to an example of an inner wiring portion
  • the center portions 64 and 164 of the outer wiring portions each correspond to an example of a center portion of an outer wiring portion.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
EP17766152.7A 2016-03-16 2017-02-09 Élément chauffant céramique Active EP3432681B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016051823 2016-03-16
JP2016051824 2016-03-16
PCT/JP2017/004800 WO2017159144A1 (fr) 2016-03-16 2017-02-09 Élément chauffant céramique

Publications (3)

Publication Number Publication Date
EP3432681A1 true EP3432681A1 (fr) 2019-01-23
EP3432681A4 EP3432681A4 (fr) 2019-11-13
EP3432681B1 EP3432681B1 (fr) 2024-05-29

Family

ID=59851113

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17766152.7A Active EP3432681B1 (fr) 2016-03-16 2017-02-09 Élément chauffant céramique

Country Status (5)

Country Link
EP (1) EP3432681B1 (fr)
JP (1) JP6811177B2 (fr)
KR (1) KR20180125993A (fr)
CN (1) CN108781482B (fr)
WO (1) WO2017159144A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6792539B2 (ja) * 2017-10-31 2020-11-25 日本特殊陶業株式会社 流体加熱用のセラミックヒータ

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62142189U (fr) * 1986-02-28 1987-09-08
JPS62167396U (fr) * 1986-04-11 1987-10-23
JPH0522859Y2 (fr) * 1987-11-25 1993-06-11
JP3038039B2 (ja) 1991-05-01 2000-05-08 日本特殊陶業株式会社 セラミックスヒータ及びその製造方法
KR100361113B1 (ko) * 1994-08-18 2003-02-05 닛뽕도구슈우도오교오가부시끼가이샤 세라믹 히터용 알루미나기 소결재료
JP2000058237A (ja) * 1998-06-05 2000-02-25 Ngk Spark Plug Co Ltd セラミックヒ―タ及びそれを用いた酸素センサ
JP2000266718A (ja) * 1999-03-15 2000-09-29 Ngk Spark Plug Co Ltd 酸素センサ
JP4181281B2 (ja) * 1999-09-08 2008-11-12 日本特殊陶業株式会社 酸素センサ
JP2001194942A (ja) * 2000-01-12 2001-07-19 Ricoh Co Ltd 画像形成装置
JP3921327B2 (ja) * 2000-04-14 2007-05-30 京セラ株式会社 セラミックヒータ及びその製造方法
JP2004319459A (ja) * 2003-03-27 2004-11-11 Kyocera Corp セラミックヒータおよびそれを用いた酸素センサ用ヒータ
JP4340143B2 (ja) * 2003-12-24 2009-10-07 京セラ株式会社 セラミックヒータ
CN2731893Y (zh) * 2004-03-26 2005-10-05 京瓷株式会社 陶瓷加热器以及使用该陶瓷加热器的氧传感器
JP4762539B2 (ja) * 2004-12-28 2011-08-31 日本特殊陶業株式会社 ガスセンサ
JP2006228713A (ja) * 2005-01-20 2006-08-31 Ngk Spark Plug Co Ltd セラミックヒータ、熱交換ユニット、温水洗浄便座、及びセラミックヒータの製造方法
CN2935695Y (zh) * 2006-01-17 2007-08-15 京瓷株式会社 陶瓷加热器及采用它的加热用烙铁
DE202008003136U1 (de) * 2008-03-05 2008-07-31 Leister Process Technologies Elektrischer Heizkeil
CN201390777Y (zh) * 2008-08-01 2010-01-27 王青松 内加热式热浸镀锌设备用加热棒
CN202206568U (zh) * 2011-09-07 2012-04-25 厦门格睿伟业电子科技有限公司 改进的陶瓷加热管
CN202210874U (zh) * 2011-09-07 2012-05-02 厦门格睿伟业电子科技有限公司 一种升温快速的陶瓷加热棒
JP2014163867A (ja) * 2013-02-27 2014-09-08 Ngk Spark Plug Co Ltd ガスセンサ、ヒータ素子
JP5939265B2 (ja) * 2014-02-11 2016-06-22 株式会社デンソー セラミックヒータ及びこれを用いたガスセンサ素子
CN203813250U (zh) * 2014-04-15 2014-09-03 国家电网公司 一种配电箱、土建站箱门
CN204652688U (zh) * 2015-04-08 2015-09-16 厦门格睿伟业电子科技有限公司 一种陶瓷加热管

Also Published As

Publication number Publication date
JPWO2017159144A1 (ja) 2018-03-22
WO2017159144A1 (fr) 2017-09-21
KR20180125993A (ko) 2018-11-26
EP3432681A4 (fr) 2019-11-13
EP3432681B1 (fr) 2024-05-29
CN108781482B (zh) 2021-08-27
CN108781482A (zh) 2018-11-09
JP6811177B2 (ja) 2021-01-13

Similar Documents

Publication Publication Date Title
US11004715B2 (en) Substrate supporting device
KR100787082B1 (ko) 기판 처리 장치
US20110240625A1 (en) Ceramic Heater
KR102103705B1 (ko) 세라믹스 부재
CN107275091B (zh) 固体电解电容器
JP5766348B2 (ja) 管状ヒーター
EP3059408B1 (fr) Dispositif de chauffage de type en nid d'abeilles et son procédé d'utilisation
KR102274098B1 (ko) 세라믹스 히터
CN108886840B (zh) 陶瓷加热器
EP3432681B1 (fr) Élément chauffant céramique
CN108884737B (zh) 蜂窝型加热装置及其使用方法
JP2022543587A (ja) 静電チャックヒーター及びその製造方法
KR20190025670A (ko) 세라믹 히터
CN217178882U (zh) 热交换单元以及具备其的清洗装置
JP3568194B2 (ja) 半導体熱処理用セラミックヒーター
TWI602202B (zh) Highly conductive base metal or alloy low ohmic chip resistor manufacturing method
JP6313155B2 (ja) ヒータ
JP6831222B2 (ja) セラミックヒータ
JPH07299811A (ja) ドクターブレード装置、それを用いたセラミックグリーンシートの製造方法および積層型セラミック電気・電子部品
JP6711708B2 (ja) ヒータ
JP3678882B2 (ja) セラミックヒータ
JPH09161956A (ja) セラミックヒーターの製造方法
JPH0578916B2 (fr)
JP2000150116A (ja) セラミックヒ―タ
JPH09161955A (ja) セラミックヒーターの製造方法

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20180410

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
REG Reference to a national code

Ref country code: DE

Ref legal event code: R079

Free format text: PREVIOUS MAIN CLASS: H05B0003100000

Ipc: H05B0003480000

A4 Supplementary search report drawn up and despatched

Effective date: 20191010

RIC1 Information provided on ipc code assigned before grant

Ipc: H05B 3/48 20060101AFI20191004BHEP

Ipc: H05B 3/18 20060101ALI20191004BHEP

Ipc: H05B 3/10 20060101ALI20191004BHEP

Ipc: H05B 3/46 20060101ALI20191004BHEP

Ipc: H05B 3/14 20060101ALI20191004BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20210528

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: NITERRA CO., LTD.

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20240131

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602017082289

Country of ref document: DE

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20240529

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240929

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240529

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240529

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240529

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240830

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1691679

Country of ref document: AT

Kind code of ref document: T

Effective date: 20240529