EP3161318A1 - Method of pumping in a system of vacuum pumps and system of vacuum pumps - Google Patents
Method of pumping in a system of vacuum pumps and system of vacuum pumpsInfo
- Publication number
- EP3161318A1 EP3161318A1 EP14738765.8A EP14738765A EP3161318A1 EP 3161318 A1 EP3161318 A1 EP 3161318A1 EP 14738765 A EP14738765 A EP 14738765A EP 3161318 A1 EP3161318 A1 EP 3161318A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- lubricated
- vanes
- vacuum
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000007789 gas Substances 0.000 claims description 40
- 238000005265 energy consumption Methods 0.000 claims description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013523 data management Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2/00—Rotary-piston machines or pumps
- F04C2/30—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C2/34—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members
- F04C2/344—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/026—Lubricant separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
- F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/18—Pressure
- F04C2270/185—Controlled or regulated
Definitions
- the present invention relates to a pumping method for reducing the electrical energy consumption as well as to increasing the final vacuum performance of a pumping system whose main pump is a lubricated vane vacuum pump. Also, the present invention relates to a vacuum pump system that can be used to perform the method of the present invention.
- the purpose of the present invention is to propose a pumping method in a vacuum pump system making it possible to reduce the electrical energy necessary for evacuating a vacuum chamber and maintaining it, as well as reducing the temperature of the vacuum chambers. outlet gas.
- Another object of the present invention is to propose a method of pumping in a vacuum pump system which makes it possible to obtain a higher flow rate at low pressure than that which can be obtained by means of a vacuum pump with lubricated vanes alone. when pumping a vacuum chamber.
- Another object of the present invention is to propose a method of pumping in a vacuum pump system which makes it possible to obtain a better vacuum than that which can be obtained by means of a vacuum pump with vanes lubricated alone during pumping. a vacuum chamber.
- a pumping method which is carried out as part of a vacuum pump system whose configuration essentially consists of a main vacuum pump with lubricated vanes provided with a gas inlet port connected to a vacuum chamber and a gas outlet opening in a conduit which is provided with a check valve, before opening into the atmosphere or other devices.
- the suction of an auxiliary vacuum pump with lubricated blades is connected in parallel with this non-return valve, its outlet going to the atmosphere or joining the conduit of the main pump after the non-return valve.
- the method according to the present invention therefore consists of
- the invention resides in the fact that the coupling of the main vacuum pump with lubricated vanes and the auxiliary vacuum pump with lubricated vanes does not require specific measurements and devices (eg pressure, temperature, current sensors, etc.), servocontrols or data management and calculation. Therefore, the vacuum pump system adapted for implementing the pumping method according to the present invention comprises a minimum number of components, is very simple and costs significantly less than existing systems.
- the start-up of the auxiliary vacuum pump with lubricated vanes is controlled in an "all or nothing" manner.
- the control consists of controlling one or more parameters and according to certain rules, start or stop the auxiliary vacuum pump with lubricated vanes.
- the parameters provided by suitable sensors, are p. ex. the motor current of the lubricated vane main vacuum pump, the temperature or pressure of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the non-return valve, or a combination of these parameters.
- the design of the auxiliary vacuum pump with lubricated blades is conditioned by the minimum energy consumption of its engine. It is normally single-stage. Its nominal flow rate is chosen as a function of the flow rate of the main vacuum pump with lubricated vanes, but also taking into account the size of the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the non-return valve . This flow rate may be 1/500 to 1/5 of the nominal flow rate of the main vacuum pump with lubricated blades, but may also be lower or higher than these values.
- the non-return valve placed in the conduit at the outlet of the lubricated vane main vacuum pump, may be a standard commercially available element. It is dimensioned according to the nominal flow rate of the main vacuum pump with lubricated blades. In particular, it is expected that the check valve closes when the suction pressure of the main vacuum pump with lubricated blades is between 500 mbar absolute and the final vacuum (eg at 400 mbar).
- the main vacuum pump with lubricated vanes is multi-stage.
- the auxiliary vacuum pump with lubricated blades is multi-stage.
- the auxiliary vacuum pump with lubricated vanes is preferably small.
- the lubricated vane vacuum vacuum pump delivers the gases into the oil separator of the lubricated vane main vacuum pump.
- the vacuum pump with lubricated vanes is integrated in the oil separator of the main vacuum pump with lubricated vanes.
- the pressure is high, for example equal to the atmospheric pressure.
- the pressure of the gases discharged at its outlet is higher than the atmospheric pressure (if the gases at the outlet of the main pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
- the lubricated vane auxiliary vacuum pump In the case of controlling the lubricated vane auxiliary vacuum pump, there is an initial starting position of the pumping system when the sensors are in a defined state or give initial values. As the lubricated vane main vacuum pump pumps the gases from the vacuum chamber, the parameters such as its motor current, the temperature and the gas pressure in the volume of the outlet duct start to rise. modify and reach detected threshold values by the sensors. This causes the small auxiliary vacuum pump with lubricated vanes to start up. When these parameters return to the initial ranges (out of set points) with a time delay, the lubricated vacuum vane vacuum pump is stopped.
- FIG. 1 schematically shows a vacuum pump system adapted for performing a pumping method according to a first embodiment of the present invention
- FIG. 2 schematically shows a vacuum pump system adapted for carrying out a pumping method according to a second embodiment of the present invention.
- Figure 1 shows a vacuum pump system SP adapted for implementing a pumping method according to a first embodiment of the present invention.
- This vacuum pump system SP comprises an enclosure 1, which is connected to the suction port 2 of a main vacuum pump with pallets 3.
- the outlet of the gases of the main vacuum pump with lubricated vanes 3 is connected to the duct 5.
- a discharge nonreturn valve 6 is placed in the duct 5, which after this non-return valve continues in 8. The non-return valve 6, when closed, allows the formation of a volume 4, between the gas outlet port of the main vacuum pump 3 and itself.
- the vacuum pump system SP also comprises an auxiliary vacuum pump with lubricated vanes 7, connected in parallel with the non-return valve 6.
- the suction orifice 9 of the auxiliary vacuum pump with lubricated vanes 7 is connected to the volume 4 of the duct 5 and its discharge port 10 is connected to the duct 8.
- the auxiliary vacuum pump with lubricated vanes 7 is also started up.
- the main vacuum pump with lubricated vanes 3 draws the gases into the chamber 1 through the duct 2 connected to its inlet and compresses them to discharge them thereafter as it leaves the duct 5 and subsequently through the check valve. return 6.
- the closing pressure of the non-return valve 6 is reached, it closes. From this moment, the pumping of the auxiliary vacuum pump with lubricated vanes 7 gradually lowers the pressure in the volume 4 to its limit pressure.
- the power consumed by the main vacuum pump with lubricated blades 3 gradually decreases. This occurs in a short period of time, for example for a certain cycle in 5 to 10 seconds.
- Figure 2 shows an SPP vacuum pump system adapted for implementing a pumping method according to a second embodiment of the present invention.
- the system represented in FIG. 2 represents the "piloted" pump system SPP, which furthermore comprises suitable sensors 1 1, 12, 13 which control either the motor current (sensor 1 1) of the main vacuum pump with lubricated vanes 3, ie the pressure (sensor 13) of the gases in the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the nonreturn valve 6, that is the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the nonreturn valve 6, a combination of these parameters.
- suitable sensors 1 1, 12, 13 which control either the motor current (sensor 1 1) of the main vacuum pump with lubricated vanes 3, ie the pressure (sensor 13) of the gases in the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the nonreturn valve 6, that is the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the nonreturn valve 6, a combination of
- the threshold value can be a percentage of the maximum value measured during a dump cycle without starting the auxiliary vacuum pump (eg 75%).
- the threshold value may be a percentage (eg 80%) of the maximum value measured during a dump cycle without setting in operation of the auxiliary vacuum pump.
- the threshold value (eg 100 mbar) is defined according to the flow ratio of the two pumps, the main and the auxiliary.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL14738765T PL3161318T3 (en) | 2014-06-27 | 2014-06-27 | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
PT147387658T PT3161318T (en) | 2014-06-27 | 2014-06-27 | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2014/063725 WO2015197138A1 (en) | 2014-06-27 | 2014-06-27 | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3161318A1 true EP3161318A1 (en) | 2017-05-03 |
EP3161318B1 EP3161318B1 (en) | 2020-02-05 |
Family
ID=51177037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14738765.8A Revoked EP3161318B1 (en) | 2014-06-27 | 2014-06-27 | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
Country Status (15)
Country | Link |
---|---|
US (2) | US10760573B2 (en) |
EP (1) | EP3161318B1 (en) |
JP (1) | JP6608394B2 (en) |
KR (1) | KR102223057B1 (en) |
CN (1) | CN106662108A (en) |
AU (3) | AU2014398770A1 (en) |
BR (1) | BR112016030498B1 (en) |
CA (1) | CA2953455C (en) |
DK (1) | DK3161318T3 (en) |
ES (1) | ES2774438T3 (en) |
PL (1) | PL3161318T3 (en) |
PT (1) | PT3161318T (en) |
RU (1) | RU2666720C2 (en) |
TW (2) | TWI710702B (en) |
WO (1) | WO2015197138A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015197138A1 (en) * | 2014-06-27 | 2015-12-30 | Ateliers Busch Sa | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
JP6785695B2 (en) * | 2016-06-08 | 2020-11-18 | 株式会社荏原製作所 | Dry vacuum pump with abatement function |
WO2018220943A1 (en) * | 2017-05-30 | 2018-12-06 | 株式会社アルバック | Vacuum pump |
CN107559200B (en) * | 2017-11-01 | 2024-06-14 | 广东肯富来泵业股份有限公司 | Balanced Roots vacuum pump system and control method thereof |
CN107701482A (en) * | 2017-11-15 | 2018-02-16 | 益发施迈茨工业炉(上海)有限公司 | The auxiliary starting system and method for vacuum drying oven motor |
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JPS63104693A (en) * | 1986-10-22 | 1988-05-10 | Nissho:Kk | Treatment of industrial waste |
JPH0442557Y2 (en) * | 1986-12-25 | 1992-10-07 | ||
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DE3819692A1 (en) * | 1988-06-09 | 1989-12-14 | Provac Gmbh & Co | Dry-running slide vane rotary vacuum pump |
SU1700283A1 (en) * | 1989-05-05 | 1991-12-23 | Предприятие П/Я А-3634 | Vacuum pump |
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JPH0436091A (en) * | 1990-05-29 | 1992-02-06 | Shimadzu Corp | Oil-sealed rotary vacuum pump |
KR100190310B1 (en) * | 1992-09-03 | 1999-06-01 | 모리시따 요오이찌 | Two stage primary dry pump |
DE4327583A1 (en) * | 1993-08-17 | 1995-02-23 | Leybold Ag | Vacuum pump with oil separator |
JP3386202B2 (en) * | 1993-09-08 | 2003-03-17 | 株式会社アルバック | Two-stage oil rotary vacuum pump |
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FR2822200B1 (en) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES |
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2014
- 2014-06-27 WO PCT/EP2014/063725 patent/WO2015197138A1/en active Application Filing
- 2014-06-27 PL PL14738765T patent/PL3161318T3/en unknown
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- 2014-06-27 PT PT147387658T patent/PT3161318T/en unknown
- 2014-06-27 CN CN201480080173.7A patent/CN106662108A/en active Pending
- 2014-06-27 JP JP2016574254A patent/JP6608394B2/en active Active
- 2014-06-27 KR KR1020177002586A patent/KR102223057B1/en active IP Right Grant
- 2014-06-27 RU RU2017102492A patent/RU2666720C2/en active
- 2014-06-27 CA CA2953455A patent/CA2953455C/en active Active
- 2014-06-27 US US15/321,839 patent/US10760573B2/en active Active
- 2014-06-27 ES ES14738765T patent/ES2774438T3/en active Active
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- 2014-06-27 AU AU2014398770A patent/AU2014398770A1/en not_active Abandoned
-
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-
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Also Published As
Publication number | Publication date |
---|---|
TWI734588B (en) | 2021-07-21 |
BR112016030498A2 (en) | 2017-08-22 |
CA2953455C (en) | 2022-03-29 |
KR20170028381A (en) | 2017-03-13 |
ES2774438T3 (en) | 2020-07-21 |
WO2015197138A1 (en) | 2015-12-30 |
TWI710702B (en) | 2020-11-21 |
EP3161318B1 (en) | 2020-02-05 |
BR112016030498B1 (en) | 2022-06-28 |
TW202043623A (en) | 2020-12-01 |
US20200318640A1 (en) | 2020-10-08 |
DK3161318T3 (en) | 2020-03-09 |
PT3161318T (en) | 2020-03-06 |
KR102223057B1 (en) | 2021-03-05 |
CA2953455A1 (en) | 2015-12-30 |
CN106662108A (en) | 2017-05-10 |
AU2019204608A1 (en) | 2019-07-18 |
AU2019204608B2 (en) | 2021-07-22 |
AU2014398770A1 (en) | 2017-01-19 |
RU2017102492A3 (en) | 2018-07-27 |
US11725662B2 (en) | 2023-08-15 |
JP2017523339A (en) | 2017-08-17 |
RU2017102492A (en) | 2018-07-27 |
JP6608394B2 (en) | 2019-11-20 |
AU2017100332A4 (en) | 2017-04-27 |
US10760573B2 (en) | 2020-09-01 |
RU2666720C2 (en) | 2018-09-11 |
PL3161318T3 (en) | 2020-08-10 |
TW201608135A (en) | 2016-03-01 |
US20170122321A1 (en) | 2017-05-04 |
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