EP3161318A1 - Method of pumping in a system of vacuum pumps and system of vacuum pumps - Google Patents

Method of pumping in a system of vacuum pumps and system of vacuum pumps

Info

Publication number
EP3161318A1
EP3161318A1 EP14738765.8A EP14738765A EP3161318A1 EP 3161318 A1 EP3161318 A1 EP 3161318A1 EP 14738765 A EP14738765 A EP 14738765A EP 3161318 A1 EP3161318 A1 EP 3161318A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
lubricated
vanes
vacuum
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14738765.8A
Other languages
German (de)
French (fr)
Other versions
EP3161318B1 (en
Inventor
Didier MÜLLER
Jean Eric LARCHER
Théodore ILTCHEV
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ateliers Busch SA
Original Assignee
Ateliers Busch SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51177037&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3161318(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA
Priority to PT147387658T priority Critical patent/PT3161318T/en
Priority to PL14738765T priority patent/PL3161318T3/en
Publication of EP3161318A1 publication Critical patent/EP3161318A1/en
Application granted granted Critical
Publication of EP3161318B1 publication Critical patent/EP3161318B1/en
Revoked legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/30—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C2/34—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members
    • F04C2/344—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F04C2270/185—Controlled or regulated

Definitions

  • the present invention relates to a pumping method for reducing the electrical energy consumption as well as to increasing the final vacuum performance of a pumping system whose main pump is a lubricated vane vacuum pump. Also, the present invention relates to a vacuum pump system that can be used to perform the method of the present invention.
  • the purpose of the present invention is to propose a pumping method in a vacuum pump system making it possible to reduce the electrical energy necessary for evacuating a vacuum chamber and maintaining it, as well as reducing the temperature of the vacuum chambers. outlet gas.
  • Another object of the present invention is to propose a method of pumping in a vacuum pump system which makes it possible to obtain a higher flow rate at low pressure than that which can be obtained by means of a vacuum pump with lubricated vanes alone. when pumping a vacuum chamber.
  • Another object of the present invention is to propose a method of pumping in a vacuum pump system which makes it possible to obtain a better vacuum than that which can be obtained by means of a vacuum pump with vanes lubricated alone during pumping. a vacuum chamber.
  • a pumping method which is carried out as part of a vacuum pump system whose configuration essentially consists of a main vacuum pump with lubricated vanes provided with a gas inlet port connected to a vacuum chamber and a gas outlet opening in a conduit which is provided with a check valve, before opening into the atmosphere or other devices.
  • the suction of an auxiliary vacuum pump with lubricated blades is connected in parallel with this non-return valve, its outlet going to the atmosphere or joining the conduit of the main pump after the non-return valve.
  • the method according to the present invention therefore consists of
  • the invention resides in the fact that the coupling of the main vacuum pump with lubricated vanes and the auxiliary vacuum pump with lubricated vanes does not require specific measurements and devices (eg pressure, temperature, current sensors, etc.), servocontrols or data management and calculation. Therefore, the vacuum pump system adapted for implementing the pumping method according to the present invention comprises a minimum number of components, is very simple and costs significantly less than existing systems.
  • the start-up of the auxiliary vacuum pump with lubricated vanes is controlled in an "all or nothing" manner.
  • the control consists of controlling one or more parameters and according to certain rules, start or stop the auxiliary vacuum pump with lubricated vanes.
  • the parameters provided by suitable sensors, are p. ex. the motor current of the lubricated vane main vacuum pump, the temperature or pressure of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the non-return valve, or a combination of these parameters.
  • the design of the auxiliary vacuum pump with lubricated blades is conditioned by the minimum energy consumption of its engine. It is normally single-stage. Its nominal flow rate is chosen as a function of the flow rate of the main vacuum pump with lubricated vanes, but also taking into account the size of the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the non-return valve . This flow rate may be 1/500 to 1/5 of the nominal flow rate of the main vacuum pump with lubricated blades, but may also be lower or higher than these values.
  • the non-return valve placed in the conduit at the outlet of the lubricated vane main vacuum pump, may be a standard commercially available element. It is dimensioned according to the nominal flow rate of the main vacuum pump with lubricated blades. In particular, it is expected that the check valve closes when the suction pressure of the main vacuum pump with lubricated blades is between 500 mbar absolute and the final vacuum (eg at 400 mbar).
  • the main vacuum pump with lubricated vanes is multi-stage.
  • the auxiliary vacuum pump with lubricated blades is multi-stage.
  • the auxiliary vacuum pump with lubricated vanes is preferably small.
  • the lubricated vane vacuum vacuum pump delivers the gases into the oil separator of the lubricated vane main vacuum pump.
  • the vacuum pump with lubricated vanes is integrated in the oil separator of the main vacuum pump with lubricated vanes.
  • the pressure is high, for example equal to the atmospheric pressure.
  • the pressure of the gases discharged at its outlet is higher than the atmospheric pressure (if the gases at the outlet of the main pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
  • the lubricated vane auxiliary vacuum pump In the case of controlling the lubricated vane auxiliary vacuum pump, there is an initial starting position of the pumping system when the sensors are in a defined state or give initial values. As the lubricated vane main vacuum pump pumps the gases from the vacuum chamber, the parameters such as its motor current, the temperature and the gas pressure in the volume of the outlet duct start to rise. modify and reach detected threshold values by the sensors. This causes the small auxiliary vacuum pump with lubricated vanes to start up. When these parameters return to the initial ranges (out of set points) with a time delay, the lubricated vacuum vane vacuum pump is stopped.
  • FIG. 1 schematically shows a vacuum pump system adapted for performing a pumping method according to a first embodiment of the present invention
  • FIG. 2 schematically shows a vacuum pump system adapted for carrying out a pumping method according to a second embodiment of the present invention.
  • Figure 1 shows a vacuum pump system SP adapted for implementing a pumping method according to a first embodiment of the present invention.
  • This vacuum pump system SP comprises an enclosure 1, which is connected to the suction port 2 of a main vacuum pump with pallets 3.
  • the outlet of the gases of the main vacuum pump with lubricated vanes 3 is connected to the duct 5.
  • a discharge nonreturn valve 6 is placed in the duct 5, which after this non-return valve continues in 8. The non-return valve 6, when closed, allows the formation of a volume 4, between the gas outlet port of the main vacuum pump 3 and itself.
  • the vacuum pump system SP also comprises an auxiliary vacuum pump with lubricated vanes 7, connected in parallel with the non-return valve 6.
  • the suction orifice 9 of the auxiliary vacuum pump with lubricated vanes 7 is connected to the volume 4 of the duct 5 and its discharge port 10 is connected to the duct 8.
  • the auxiliary vacuum pump with lubricated vanes 7 is also started up.
  • the main vacuum pump with lubricated vanes 3 draws the gases into the chamber 1 through the duct 2 connected to its inlet and compresses them to discharge them thereafter as it leaves the duct 5 and subsequently through the check valve. return 6.
  • the closing pressure of the non-return valve 6 is reached, it closes. From this moment, the pumping of the auxiliary vacuum pump with lubricated vanes 7 gradually lowers the pressure in the volume 4 to its limit pressure.
  • the power consumed by the main vacuum pump with lubricated blades 3 gradually decreases. This occurs in a short period of time, for example for a certain cycle in 5 to 10 seconds.
  • Figure 2 shows an SPP vacuum pump system adapted for implementing a pumping method according to a second embodiment of the present invention.
  • the system represented in FIG. 2 represents the "piloted" pump system SPP, which furthermore comprises suitable sensors 1 1, 12, 13 which control either the motor current (sensor 1 1) of the main vacuum pump with lubricated vanes 3, ie the pressure (sensor 13) of the gases in the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the nonreturn valve 6, that is the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the nonreturn valve 6, a combination of these parameters.
  • suitable sensors 1 1, 12, 13 which control either the motor current (sensor 1 1) of the main vacuum pump with lubricated vanes 3, ie the pressure (sensor 13) of the gases in the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the nonreturn valve 6, that is the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the nonreturn valve 6, a combination of
  • the threshold value can be a percentage of the maximum value measured during a dump cycle without starting the auxiliary vacuum pump (eg 75%).
  • the threshold value may be a percentage (eg 80%) of the maximum value measured during a dump cycle without setting in operation of the auxiliary vacuum pump.
  • the threshold value (eg 100 mbar) is defined according to the flow ratio of the two pumps, the main and the auxiliary.

Abstract

Method of pumping and pumping system (SP, SPP) comprising: a lubricated-vanes main vacuum pump (3) with a gas inlet orifice (2) connected to a vacuum chamber (1) and a gas outlet orifice (4) opening into a pipe (5) before opening into the gas outlet (8) of the pumping system (SP, SPP), a non-return valve (6) positioned in the pipe (5) between the gas outlet orifice (4) and the gas outlet (8), and a lubricated-vanes auxiliary vacuum pump (7) connected in parallel with the non-return valve (6). The lubricated-vanes main vacuum pump (3) is set into operation in order to pump the gasses contained in the vacuum chamber (1) through the gas outlet orifice (4); simultaneously, a lubricated-vanes auxiliary vacuum pump (7) is set in operation and continues to be in operation for all of the time that the lubricated-vanes main vacuum pump (3) is pumping the gasses contained in the vacuum chamber (1) and/or for all of the time that the lubricated-vanes main vacuum pump (3) is maintaining a defined pressure in the vacuum chamber (1).

Description

Méthode de pompage dans un système de pompes à vide  Pumping method in a vacuum pump system
et système de pompes à vide  and vacuum pump system
Domaine technique de l'invention Technical field of the invention
La présente invention se rapporte à une méthode de pompage permettant de réduire la consommation d'énergie électrique ainsi qu'augmenter les performances en termes de vide final d'un système de pompage dont la pompe principale est une pompe à vide à palettes lubrifiées. Egalement, la présente invention se rapporte à un système de pompes à vide qui peut être utilisé pour réaliser la méthode selon la présente invention. The present invention relates to a pumping method for reducing the electrical energy consumption as well as to increasing the final vacuum performance of a pumping system whose main pump is a lubricated vane vacuum pump. Also, the present invention relates to a vacuum pump system that can be used to perform the method of the present invention.
Art antérieur Prior art
Les tendances générales d'augmentation des performances des pompes à vide, de réduction des coûts des installations et de la consommation d'énergie dans les industries ont apporté des évolutions significatives en termes de performances, d'économie d'énergie, d'encombrement, dans les entraînements, etc. The general trends of increasing the performance of vacuum pumps, reducing plant costs and energy consumption in the industry have brought significant changes in terms of performance, energy savings, space requirements, in training, etc.
L'état de la technique montre que pour améliorer le vide final et réduire la consommation d'énergie il faut rajouter des étages supplémentaires dans les pompes à vide de type Roots multi-étagées ou Claws multi-étagées. Pour les pompes à vide à vis il faut mettre des tours supplémentaires aux vis, et/ou augmenter le taux de compression interne. Pour les pompes à vide à palettes lubrifiées, il faut typiquement également rajouter un ou plusieurs étages supplémentaires en série afin d'augmenter le taux de compression interne. The state of the art shows that in order to improve the final vacuum and to reduce the energy consumption, it is necessary to add additional stages in the multi-stage Roots or multi-stage Claws vacuum pumps. For screw vacuum pumps it is necessary to put additional turns on the screws, and / or to increase the internal compression ratio. For lubricated vane vacuum pumps, it is typically also necessary to add one or more additional stages in series in order to increase the internal compression ratio.
L'état de la technique concernant les systèmes de pompes à vide qui visent l'amélioration du vide final et l'augmentation du débit montre des pompes booster de type Roots agencées en amont des pompes principales à palettes lubrifiées. Ce type de systèmes est encombrant, fonctionne soit avec des clapets by-pass présentant des problèmes de fiabilité, soit en employant des moyens de mesure, contrôle, réglage ou asservissement. Cependant, ces moyens de contrôle, réglage ou asservissement doivent être pilotés d'une manière active, ce qui résulte forcément en une augmentation du nombre de composants du système, de sa complexité et de son coût. The state of the art vacuum pump systems that aim at improving the final vacuum and increasing the flow rate shows Roots booster pumps arranged upstream of the main pumps with lubricated vanes. This type of system is bulky, works either with by-pass valves with reliability problems, or by using measuring, controlling, adjusting or servoing means. However, these means of control, adjustment or control must be actively controlled, which necessarily results in an increase in the number of components of the system, its complexity and cost.
Résumé de l'invention Summary of the invention
La présente invention a pour but de proposer une méthode de pompage dans un système de pompes à vide permettant de réduire l'énergie électrique nécessaire pour la mise sous vide d'une enceinte à vide et son maintien, ainsi que la baisse de la température des gaz de sortie. The purpose of the present invention is to propose a pumping method in a vacuum pump system making it possible to reduce the electrical energy necessary for evacuating a vacuum chamber and maintaining it, as well as reducing the temperature of the vacuum chambers. outlet gas.
La présente invention a aussi pour but de proposer une méthode de pompage dans un système de pompes à vide permettant d'obtenir un débit supérieur à basse pression à celui qui peut être obtenu à l'aide d'une pompe à vide à palettes lubrifiées seule lors du pompage d'une enceinte à vide. Another object of the present invention is to propose a method of pumping in a vacuum pump system which makes it possible to obtain a higher flow rate at low pressure than that which can be obtained by means of a vacuum pump with lubricated vanes alone. when pumping a vacuum chamber.
La présente invention a également pour but de proposer une méthode de pompage dans un système de pompes à vide permettant d'obtenir un meilleur vide que celui qui peut être obtenu à l'aide d'une pompe à vide à palettes lubrifiées seule lors du pompage d'une enceinte à vide. Another object of the present invention is to propose a method of pumping in a vacuum pump system which makes it possible to obtain a better vacuum than that which can be obtained by means of a vacuum pump with vanes lubricated alone during pumping. a vacuum chamber.
Ces buts de la présente invention sont atteints à l'aide d'une méthode de pompage qui est réalisée dans le cadre d'un système de pompes à vide dont la configuration consiste essentiellement en une pompe à vide principale à palettes lubrifiées munie d'un orifice d'entrée des gaz reliée à une enceinte à vide et d'un orifice de sortie des gaz donnant dans un conduit qui est muni d'un clapet anti-retour, avant de déboucher dans l'atmosphère ou dans d'autres appareils. L'aspiration d'une pompe à vide auxiliaire à palettes lubrifiées est branchée en parallèle à ce clapet anti-retour, sa sortie allant à l'atmosphère ou rejoignant le conduit de la pompe principale après le clapet anti-retour. Une telle méthode de pompage est notamment l'objet de la revendication indépendante 1 . Des différents modes de réalisation préférés de l'invention sont en outre l'objet des revendications dépendantes. These objects of the present invention are achieved by means of a pumping method which is carried out as part of a vacuum pump system whose configuration essentially consists of a main vacuum pump with lubricated vanes provided with a gas inlet port connected to a vacuum chamber and a gas outlet opening in a conduit which is provided with a check valve, before opening into the atmosphere or other devices. The suction of an auxiliary vacuum pump with lubricated blades is connected in parallel with this non-return valve, its outlet going to the atmosphere or joining the conduit of the main pump after the non-return valve. Such a method of pumping is in particular the subject of independent claim 1. Different preferred embodiments of the invention are furthermore the subject of the dependent claims.
La méthode selon la présente invention consiste donc The method according to the present invention therefore consists of
essentiellement à faire fonctionner une pompe à vide auxiliaire à palettes lubrifiées en continu tout le temps que la pompe à vide principale à palettes lubrifiées pompe les gaz contenus dans l'enceinte à vide par l'orifice d'entrée de gaz, mais aussi tout le temps que la pompe à vide principale à palettes lubrifiées maintient une pression définie (p. ex. le vide final) dans l'enceinte en refoulant les gaz remontant par sa sortie. essentially to operate a continuously lubricated vacuum vane vacuum pump all the time that the lubricated vane main vacuum pump pumps the gases contained in the vacuum chamber through the gas inlet port, but also all the The main vacuum pump with lubricated vanes maintains a defined pressure (eg the final vacuum) in the chamber, displacing the rising gases through its outlet.
Selon un premier aspect, l'invention réside dans le fait que le couplage de la pompe à vide principale à palettes lubrifiées et de la pompe à vide auxiliaire à palettes lubrifiées ne nécessite pas de mesures et d'appareils spécifiques (p. ex. de capteurs de pression, de température, de courant, etc.), d'asservissements ou de gestion de données et calcul. Par conséquent, le système de pompes à vide adapté pour la mise en œuvre de la méthode de pompage selon la présente invention comprend un nombre minimal de composants, présente une grande simplicité et coûte nettement moins cher que les systèmes existants. According to a first aspect, the invention resides in the fact that the coupling of the main vacuum pump with lubricated vanes and the auxiliary vacuum pump with lubricated vanes does not require specific measurements and devices (eg pressure, temperature, current sensors, etc.), servocontrols or data management and calculation. Therefore, the vacuum pump system adapted for implementing the pumping method according to the present invention comprises a minimum number of components, is very simple and costs significantly less than existing systems.
Selon une deuxième variante de la méthode de la présente invention, pour répondre à des exigences spécifiques la mise en route de la pompe à vide auxiliaire à palettes lubrifiées est pilotée de manière « tout ou rien ». Le pilotage consiste à contrôler un ou plusieurs paramètres et suivant certaines règles mettre en route la pompe à vide auxiliaire à palettes lubrifiées ou l'arrêter. Les paramètres, fournis par des capteurs adéquats, sont p. ex. le courant du moteur de la pompe à vide principale à palettes lubrifiées, la température ou la pression des gaz dans le volume du conduit de sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour, ou une combinaison de ces paramètres. According to a second variant of the method of the present invention, in order to meet specific requirements, the start-up of the auxiliary vacuum pump with lubricated vanes is controlled in an "all or nothing" manner. The control consists of controlling one or more parameters and according to certain rules, start or stop the auxiliary vacuum pump with lubricated vanes. The parameters, provided by suitable sensors, are p. ex. the motor current of the lubricated vane main vacuum pump, the temperature or pressure of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the non-return valve, or a combination of these parameters.
Le dimensionnement de la pompe à vide auxiliaire à palettes lubrifiées est conditionné par la consommation d'énergie minimale de son moteur. Elle est normalement mono-étagée. Son débit nominal est choisi en fonction du débit de la pompe à vide principale à palettes lubrifiées, mais aussi en prenant en compte la taille du volume du conduit de sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour. Ce débit peut être de 1/500 à 1/5 du débit nominal de la pompe à vide principale à palettes lubrifiées, mais peut aussi être inférieur ou supérieur à ces valeurs. The design of the auxiliary vacuum pump with lubricated blades is conditioned by the minimum energy consumption of its engine. It is normally single-stage. Its nominal flow rate is chosen as a function of the flow rate of the main vacuum pump with lubricated vanes, but also taking into account the size of the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the non-return valve . This flow rate may be 1/500 to 1/5 of the nominal flow rate of the main vacuum pump with lubricated blades, but may also be lower or higher than these values.
Le clapet anti-retour, placé dans le conduit à la sortie de la pompe à vide principale à palettes lubrifiées peut être un élément standard disponible dans le commerce. Il est dimensionné suivant le débit nominal de la pompe à vide principale à palettes lubrifiées. En particulier, il est prévu que le clapet anti-retour se ferme quand la pression à l'aspiration de la pompe à vide principale à palettes lubrifiées se situe entre 500 mbar absolu et le vide final (p. ex. à 400 mbar). The non-return valve, placed in the conduit at the outlet of the lubricated vane main vacuum pump, may be a standard commercially available element. It is dimensioned according to the nominal flow rate of the main vacuum pump with lubricated blades. In particular, it is expected that the check valve closes when the suction pressure of the main vacuum pump with lubricated blades is between 500 mbar absolute and the final vacuum (eg at 400 mbar).
Selon une autre variante, la pompe à vide principale à palettes lubrifiées est multi-étagée. According to another variant, the main vacuum pump with lubricated vanes is multi-stage.
Selon une autre variante, la pompe à vide auxiliaire à palettes lubrifiées est multi-étagée. According to another variant, the auxiliary vacuum pump with lubricated blades is multi-stage.
La pompe à vide auxiliaire à palettes lubrifiées est de préférence de petite taille. The auxiliary vacuum pump with lubricated vanes is preferably small.
Selon une autre variante, la pompe à vide auxiliaire à palettes lubrifiées refoule les gaz dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées. In another variant, the lubricated vane vacuum vacuum pump delivers the gases into the oil separator of the lubricated vane main vacuum pump.
Selon encore une autre variante, la pompe à vide auxiliaire à palettes lubrifiées est intégrée dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées. According to yet another variant, the vacuum pump with lubricated vanes is integrated in the oil separator of the main vacuum pump with lubricated vanes.
Au départ d'un cycle de vidage de l'enceinte, la pression y est élevée, par exemple égale à la pression atmosphérique. Vu la compression dans la pompe à vide principale à palettes lubrifiées, la pression des gaz refoulés à sa sortie est plus haute que la pression atmosphérique (si les gaz à la sortie de la pompe principale sont refoulés directement à l'atmosphère) ou plus haute que la pression à l'entrée d'un autre appareil connecté en aval. Cela provoque l'ouverture du clapet anti-retour. At the start of a drain cycle of the chamber, the pressure is high, for example equal to the atmospheric pressure. Given the compression in the main vacuum pump with lubricated vanes, the pressure of the gases discharged at its outlet is higher than the atmospheric pressure (if the gases at the outlet of the main pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
Quand ce clapet anti-retour est ouvert, l'action de la pompe à vide auxiliaire à palettes lubrifiées sur les paramètres de fonctionnement de la pompe à vide principale à palettes lubrifiées est très faiblement ressentie. En revanche, quand le clapet anti-retour se ferme à une certaine pression (parce que la pression dans l'enceinte a entretemps baissé), l'action de la pompe à vide auxiliaire à palettes lubrifiées provoque une réduction progressive de la différence de pression entre l'enceinte et le conduit après le clapet. La pression à la sortie de la pompe à vide principale à palettes lubrifiées devient celle à l'entrée de la petite pompe à vide auxiliaire à palettes lubrifiées, celle de sa sortie étant toujours la pression dans le conduit après le clapet antiretour. Plus la pompe à vide auxiliaire à palettes lubrifiées pompe, plus la pression à la sortie de la pompe à vide principale à palettes lubrifiées, dans le volume fermé, limité par le clapet anti-retour, se réduit et par conséquent la différence de pression entre l'enceinte et la sortie de la pompe à vide principale à palettes lubrifiées baisse. When this non-return valve is open, the action of the auxiliary vacuum pump with lubricated blades on the operating parameters of the main vacuum pump with lubricated blades is very weakly felt. On the other hand, when the check valve closes at a certain pressure (because the pressure in the chamber has meanwhile dropped), the action of the auxiliary vacuum pump with lubricated vanes causes a progressive reduction of the pressure difference. between the enclosure and the duct after the valve. The pressure at the outlet of the main vacuum pump with lubricated vanes becomes that at the inlet of the small auxiliary vacuum pump with lubricated vanes, that of its outlet always being the pressure in the conduit after the check valve. The more the vacuum pump with lubricated vane pumps, the more the pressure at the outlet of the main vacuum pump with lubricated vane, in the closed volume, limited by the non-return valve, is reduced and consequently the pressure difference between the enclosure and the outlet of the main vacuum pump with lubricated vanes drop.
Cette différence réduite rend les fuites internes dans la pompe à vide principale à palettes lubrifiées plus faibles et engendre une baisse plus importante de la pression dans l'enceinte ce qui améliore le vide final. En plus, la pompe à vide principale à palettes lubrifiées consomme de moins en moins d'énergie pour la compression et produit de moins en moins de chaleur de compression. This reduced difference makes the internal leakage in the lower main vacuum pump with lubricated vanes and causes a greater drop in the pressure in the chamber which improves the final vacuum. In addition, the main vacuum pump with lubricated blades consumes less and less energy for compression and produces less and less compression heat.
Dans le cas de pilotage de la pompe à vide auxiliaire à palettes lubrifiées, il existe une position initiale de démarrage du système de pompage quand les capteurs sont dans un état défini ou bien donnent des valeurs initiales. Au fur et à mesure que la pompe à vide principale à palettes lubrifiées pompe les gaz de l'enceinte à vide, les paramètres tels le courant de son moteur, la température et la pression des gaz dans le volume du conduit de sortie commencent à se modifier et atteignent des valeurs de seuil détectées par les capteurs. Cela provoque la mise en marche de la petite pompe à vide auxiliaire à palettes lubrifiées. Quand ces paramètres repassent dans les plages initiales (hors consignes) avec une temporisation, la pompe à vide auxiliaire à palettes lubrifiées est arrêtée. In the case of controlling the lubricated vane auxiliary vacuum pump, there is an initial starting position of the pumping system when the sensors are in a defined state or give initial values. As the lubricated vane main vacuum pump pumps the gases from the vacuum chamber, the parameters such as its motor current, the temperature and the gas pressure in the volume of the outlet duct start to rise. modify and reach detected threshold values by the sensors. This causes the small auxiliary vacuum pump with lubricated vanes to start up. When these parameters return to the initial ranges (out of set points) with a time delay, the lubricated vacuum vane vacuum pump is stopped.
D'un autre côté, il est aussi évident que l'étude du concept mécanique cherche à réduire le volume entre l'orifice de sortie des gaz de la pompe à vide principale à palettes lubrifiées et le clapet anti-retour dans le but de pouvoir y faire baisser la pression plus vite. On the other hand, it is also obvious that the mechanical design study seeks to reduce the volume between the gas outlet of the lubricated vaned vacuum pump and the check valve for the purpose of lower the pressure faster.
Brève description des dessins Brief description of the drawings
Les particularités et les avantages de la présente invention apparaîtront avec plus de détails dans le cadre de la description qui suit avec des exemples de réalisation donnés à titre illustratif et non limitatif en référence aux dessins ci-annexés qui représentent : The features and advantages of the present invention will appear in more detail in the context of the description which follows with exemplary embodiments given by way of nonlimiting illustration with reference to the attached drawings which represent:
- la figure 1 représente de manière schématique un système de pompes à vide adapté pour la réalisation d'une méthode de pompage selon un premier mode de réalisation de la présente invention ; et - Figure 1 schematically shows a vacuum pump system adapted for performing a pumping method according to a first embodiment of the present invention; and
- la figure 2 représente de manière schématique un système de pompes à vide adapté pour la réalisation d'une méthode de pompage selon un deuxième mode de réalisation de la présente invention. - Figure 2 schematically shows a vacuum pump system adapted for carrying out a pumping method according to a second embodiment of the present invention.
Description détaillée des modes de réalisation de l'invention DETAILED DESCRIPTION OF THE EMBODIMENTS OF THE INVENTION
Figure 1 représente un système de pompes à vide SP adapté pour la mise en œuvre d'une méthode de pompage selon un premier mode de réalisation de la présente invention. Figure 1 shows a vacuum pump system SP adapted for implementing a pumping method according to a first embodiment of the present invention.
Ce système de pompes à vide SP comporte une enceinte 1 , laquelle est reliée à l'orifice d'aspiration 2 d'une pompe à vide principale à palettes lubrifiées 3. L'orifice de sortie des gaz de la pompe à vide principale à palettes lubrifiées 3 est relié au conduit 5. Un clapet anti-retour de refoulement 6 est placé dans le conduit 5, qui après ce clapet anti-retour continue en conduit de sortie des gaz 8. Le clapet anti-retour 6, lorsqu'il est fermé, permet la formation d'un volume 4, compris entre l'orifice de sortie des gaz de la pompe à vide principale 3 et lui-même. This vacuum pump system SP comprises an enclosure 1, which is connected to the suction port 2 of a main vacuum pump with pallets 3. The outlet of the gases of the main vacuum pump with lubricated vanes 3 is connected to the duct 5. A discharge nonreturn valve 6 is placed in the duct 5, which after this non-return valve continues in 8. The non-return valve 6, when closed, allows the formation of a volume 4, between the gas outlet port of the main vacuum pump 3 and itself.
Le système de pompes à vide SP comporte aussi une pompe à vide auxiliaire à palettes lubrifiées 7, branchée en parallèle au clapet anti-retour 6. L'orifice d'aspiration 9 de la pompe à vide auxiliaire à palettes lubrifiées 7 est relié au volume 4 du conduit 5 et son orifice de refoulement 10 est relié au conduit 8. The vacuum pump system SP also comprises an auxiliary vacuum pump with lubricated vanes 7, connected in parallel with the non-return valve 6. The suction orifice 9 of the auxiliary vacuum pump with lubricated vanes 7 is connected to the volume 4 of the duct 5 and its discharge port 10 is connected to the duct 8.
Dès la mise en route de la pompe à vide principale à palettes lubrifiées 3, la pompe à vide auxiliaire à palettes lubrifiées 7 est elle aussi mise en route. La pompe à vide principale à palettes lubrifiées 3 aspire les gaz dans l'enceinte 1 par le conduit 2 branché à son entrée et les comprime pour les refouler par la suite à sa sortie dans le conduit 5 et par la suite par le clapet anti-retour 6. Lorsque la pression de fermeture du clapet anti-retour 6 est atteinte, il se ferme. A partir de ce moment, le pompage de la pompe à vide auxiliaire à palettes lubrifiées 7 fait baisser progressivement la pression dans le volume 4 jusqu'à sa pression limite. En parallèle, la puissance consommée par la pompe à vide principale à palettes lubrifiées 3 baisse progressivement. Cela se produit en un court laps de temps, par exemple pour un certain cycle en 5 à 10 secondes. As soon as the main vacuum pump with lubricated vanes 3 is started up, the auxiliary vacuum pump with lubricated vanes 7 is also started up. The main vacuum pump with lubricated vanes 3 draws the gases into the chamber 1 through the duct 2 connected to its inlet and compresses them to discharge them thereafter as it leaves the duct 5 and subsequently through the check valve. return 6. When the closing pressure of the non-return valve 6 is reached, it closes. From this moment, the pumping of the auxiliary vacuum pump with lubricated vanes 7 gradually lowers the pressure in the volume 4 to its limit pressure. In parallel, the power consumed by the main vacuum pump with lubricated blades 3 gradually decreases. This occurs in a short period of time, for example for a certain cycle in 5 to 10 seconds.
Avec un ajustement judicieux du débit de la pompe à vide auxiliaire à palettes lubrifiées 7 et de la pression de fermeture du clapet anti-retour 6 en fonction du débit de la pompe à vide principale à palettes lubrifiées 3 et le volume de l'enceinte 1 , il est en outre possible de réduire le temps avant la fermeture du clapet anti-retour 6 par rapport à la durée du cycle de vidage et donc réduire l'énergie électrique du moteur de la pompe à vide auxiliaire à palettes lubrifiées 7 pendant le temps avant la fermeture du clapet anti-retour 6. En revanche, l'avantage de la simplicité crédite une excellente fiabilité du système ainsi qu'un prix inférieur en comparaison avec des pompes similaires équipées d'automate programmable et ou de variateur, vannes pilotées, capteurs, etc. With a judicious adjustment of the flow rate of the vacuum pump with lubricated vanes 7 and the closing pressure of the non-return valve 6 as a function of the flow rate of the main vacuum pump with lubricated vanes 3 and the volume of the chamber 1 it is also possible to reduce the time before closing the check valve 6 with respect to the duration of the emptying cycle and thus reduce the electrical energy of the engine of the vacuum pump auxiliary vacuum lubricated 7 for the time before the closure of the check valve 6. On the other hand, the advantage of simplicity credits an excellent reliability of the system as well as a lower price in comparison with similar pumps. equipped with PLC and / or dimmer, controlled valves, sensors, etc.
Figure 2 représente un système de pompes à vide SPP adapté pour la mise en œuvre d'une méthode de pompage selon un deuxième mode de réalisation de la présente invention. Figure 2 shows an SPP vacuum pump system adapted for implementing a pumping method according to a second embodiment of the present invention.
Par rapport au système montré à la figure 1 , le système représenté à la figure 2 représente le système de pompage « piloté » SPP, qui comprend en outre des capteurs adéquats 1 1 , 12, 13 qui contrôlent soit le courant du moteur (capteur 1 1 ) de la pompe principale à vide à palettes lubrifiées 3, soit la pression (capteur 13) des gaz dans le volume du conduit de sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour 6, soit la température (capteur 12) des gaz dans le volume du conduit à sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour 6, soit une combinaison de ces paramètres. With respect to the system shown in FIG. 1, the system represented in FIG. 2 represents the "piloted" pump system SPP, which furthermore comprises suitable sensors 1 1, 12, 13 which control either the motor current (sensor 1 1) of the main vacuum pump with lubricated vanes 3, ie the pressure (sensor 13) of the gases in the volume of the outlet duct of the main vacuum pump with lubricated vanes, limited by the nonreturn valve 6, that is the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane main vacuum pump, limited by the nonreturn valve 6, a combination of these parameters.
En effet, quand la pompe à vide principale à palettes lubrifiées 3 commence à pomper les gaz de l'enceinte à vide 1 , les paramètres tels le courant de son moteur, la température et la pression des gaz dans le volume du conduit de sortie 4 commencent à se modifier et atteignent des valeurs de seuil détectées par les capteurs. Pour le courant du moteur, la valeur de seuil peut être un pourcentage de la valeur maximale mesurée lors d'un cycle de vidage sans mise en marche de la pompe à vide auxiliaire (p. ex. 75%). Pour la température des gaz, mesurée à un endroit bien défini dans le volume du conduit de sortie 4 la valeur de seuil peut être un pourcentage (p. ex. 80%) de la valeur maximale mesurée lors d'un cycle de vidage sans mise en marche de la pompe à vide auxiliaire. Pour la pression des gaz, la valeur de seuil (p. ex. 100 mbar) est définie en fonction du rapport des débits des deux pompes, la principale et l'auxiliaire. Après des temporisations adaptées, spécifiques à chaque paramètre, la mise en marche de la pompe à vide auxiliaire à palettes lubrifiées 7 est déclenchée. Quand ces paramètres repassent dans des plages initiales (hors consignes) avec des temporisations adaptées, spécifiques à chaque paramètre, la pompe à vide auxiliaire à palettes lubrifiées 7 est arrêtée. Certainement, la présente invention est sujette à de nombreuses variations quant à sa mise en œuvre. Bien que divers modes de réalisation aient été décrits, on comprend bien qu'il n'est pas concevable d'identifier de manière exhaustive tous les modes possibles. Il est bien sûr envisageable de remplacer un moyen décrit par un moyen équivalent sans sortir du cadre de la présente invention. Toutes ces modifications font partie des connaissances communes d'un homme du métier dans le domaine de la technologie du vide. Indeed, when the main vacuum pump with lubricated vanes 3 begins to pump the gases from the vacuum chamber 1, the parameters such as the current of its engine, the temperature and the pressure of the gases in the volume of the outlet duct 4 begin to change and reach threshold values detected by the sensors. For the motor current, the threshold value can be a percentage of the maximum value measured during a dump cycle without starting the auxiliary vacuum pump (eg 75%). For the gas temperature, measured at a defined point in the volume of the outlet duct 4, the threshold value may be a percentage (eg 80%) of the maximum value measured during a dump cycle without setting in operation of the auxiliary vacuum pump. For gas pressure, the threshold value (eg 100 mbar) is defined according to the flow ratio of the two pumps, the main and the auxiliary. After appropriate delays, specific to each parameter, the start of the auxiliary vacuum pump with lubricated vanes 7 is triggered. When these parameters return to initial ranges (out of set points) with appropriate timers, specific to each parameter, the vacuum pump with lubricated vanes 7 is stopped. Certainly, the present invention is subject to many variations as for its implementation. Although various embodiments have been described, it is well understood that it is not conceivable to exhaustively identify all possible modes. It is of course conceivable to replace a means described by equivalent means without departing from the scope of the present invention. All these modifications are part of the common knowledge of a person skilled in the field of vacuum technology.

Claims

Revendications claims
1 . Méthode de pompage dans un système de pompes à vide (SP, SPP) comprenant: 1. A pumping method in a vacuum pump system (SP, SPP) comprising:
- une pompe à vide principale à palettes lubrifiées (3) avec un orifice d'entrée des gaz (2) relié à une enceinte à vide (1 ) et un orifice de sortie des gaz (4) donnant dans un conduit (5) avant de déboucher dans la sortie des gaz (8) du système de pompes à vide (SP, SPP), a main vacuum pump with lubricated vanes (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) giving into a duct (5) before to exit into the gas outlet (8) of the vacuum pump system (SP, SPP),
- un clapet anti-retour (6) positionné dans le conduit (5) entre l'orifice de sortie des gaz (4) et la sortie des gaz (8), et a non-return valve (6) positioned in the duct (5) between the gas outlet (4) and the gas outlet (8), and
- une pompe à vide auxiliaire à palettes lubrifiées (7) branchée en parallèle au clapet anti-retour (6), la méthode étant caractérisée en ce que la pompe à vide principale à palettes lubrifiées (3) est mise en marche afin de pomper les gaz contenus dans l'enceinte à vide (1 ) par l'orifice de sortie des gaz (4) ; de manière simultanée, la pompe à vide auxiliaire à palettes lubrifiées (7) est mise en marche ; et la pompe à vide auxiliaire à palettes lubrifiées (7) continue de fonctionner tout le temps que la pompe à vide principale à palettes lubrifiées (3) pompe les gaz contenus dans l'enceinte à vide (1 ) et/ou tout le temps que la pompe à vide principale à palettes lubrifiées (3) maintient une pression définie dans l'enceinte à vide (1 ). an auxiliary vacuum pump with lubricated vanes (7) connected in parallel with the non-return valve (6), the method being characterized in that the main vacuum pump with lubricated vanes (3) is switched on in order to pump the gases contained in the vacuum chamber (1) through the gas outlet (4); at the same time, the lubricated vacuum vane vacuum pump (7) is started; and the auxiliary vacuum pump with lubricated vanes (7) continues to operate all the time that the main vacuum pump with lubricated vanes (3) pumps the gases contained in the vacuum chamber (1) and / or all the time that the main vacuum pump with lubricated vanes (3) maintains a defined pressure in the vacuum chamber (1).
2. Méthode de pompage selon la revendication 1 , caractérisée en ce que la sortie de la pompe à vide auxiliaire à palettes lubrifiées (7) rejoint la sortie des gaz (8) après le clapet anti-retour (6). Pumping method according to claim 1, characterized in that the outlet of the lubricated vane vacuum vacuum pump (7) joins the gas outlet (8) after the non-return valve (6).
3. Méthode de pompage selon la revendication 1 ou 2, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est dimensionnée afin d'avoir une consommation d'énergie minimale de son moteur. 3. Pumping method according to claim 1 or 2, characterized in that the lubricated vacuum vane vacuum pump (7) is sized to have a minimum energy consumption of its engine.
4. Méthode de pompage selon l'une quelconque des revendications 1 à 3, caractérisée en ce que le débit nominal de la pompe à vide auxiliaire à palettes lubrifiées (7) est choisi en fonction du volume du conduit de sortie (5) de la pompe à vide principale à palettes lubrifiées (3) qui est limité par le clapet anti-retour (6). Pumping method according to one of claims 1 to 3, characterized in that the nominal capacity of the lubricated vane vacuum vacuum pump (7) is selected as a function of the volume of the outlet duct (5) of the main vacuum pump with lubricated vanes (3) which is limited by the non-return valve (6).
5. Méthode de pompage selon la revendication 4, caractérisée en ce que le débit de la pompe à vide auxiliaire à palettes lubrifiées est de 1/500 à 1/5 du débit nominal de la pompe à vide principale à palettes lubrifiées (3). 5. A pumping method according to claim 4, characterized in that the flow rate of the lubricated vane vacuum vacuum pump is 1/500 to 1/5 the nominal flow rate of the lubricated vane main vacuum pump (3).
6. Méthode de pompage selon l'une quelconque des revendications 1 à 6, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est mono-étagée ou multi-étagée. 6. Pumping method according to any one of claims 1 to 6, characterized in that the vacuum pump with lubricated vanes (7) is single-stage or multi-stage.
7. Méthode de pompage selon l'une quelconque des revendications 1 à 7, caractérisée en ce que le clapet anti-retour (6) se ferme quand la pression à l'aspiration de la pompe à vide principale à palettes lubrifiées (3) se situe entre 500 mbar absolu et le vide final. Pump method according to one of Claims 1 to 7, characterized in that the non-return valve (6) closes when the suction pressure of the lubricated vane main vacuum pump (3) is reached. is between 500 mbar absolute and the final vacuum.
8. Méthode de pompage selon l'une quelconque des revendications 1 à 7, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) refoule les gaz dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées (3). Pumping method according to one of Claims 1 to 7, characterized in that the lubricated vane vacuum pump (7) discharges the gases into the oil separator of the main vacuum pump with lubricated vanes ( 3).
9. Méthode de pompage selon l'une quelconque des revendications 1 à 8, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est intégrée dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées (3). Pumping method according to one of Claims 1 to 8, characterized in that the lubricated vane vacuum pump (7) is integrated in the oil separator of the main vacuum pump with lubricated vanes (3). ).
10. Système de pompes à vide (SP, SPP) comprenant : - une pompe à vide principale à palettes lubrifiées (3) avec un orifice d'entrée des gaz (2) relié à une enceinte à vide (1 ) et un orifice de sortie des gaz (4) donnant dans un conduit (5) avant de déboucher dans la sortie des gaz (8) du système de pompes à vide (SP, SPP), 10. Vacuum pump system (SP, SPP) comprising: a main vacuum pump with lubricated vanes (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) giving into a duct (5) before to exit into the gas outlet (8) of the vacuum pump system (SP, SPP),
- un clapet anti-retour (6) positionné dans le conduit (5) entre l'orifice de sortie des gaz (4) et la sortie des gaz (8), et a non-return valve (6) positioned in the duct (5) between the gas outlet (4) and the gas outlet (8), and
- une pompe à vide auxiliaire à palettes lubrifiées (7) branchée en parallèle au clapet anti-retour (6), le système de pompes à vide (SP, SPP) étant caractérisé en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est agencée pour pouvoir être mise en marche tout le temps que la pompe à vide principale à palettes lubrifiées (3) pompe les gaz contenus dans l'enceinte à vide (1 ) et/ou tout le temps que la pompe à vide principale à palettes lubrifiées (3) maintient une pression définie dans l'enceinte à vide (1 ). - an auxiliary vacuum pump with lubricated vanes (7) connected in parallel with the non-return valve (6), the vacuum pump system (SP, SPP) being characterized in that the auxiliary vacuum pump with lubricated vanes (7) ) is arranged to be able to be started all the time that the main vacuum pump with lubricated vanes (3) pumps the gases contained in the vacuum chamber (1) and / or all the time that the main vacuum pump to lubricated pallets (3) maintains a defined pressure in the vacuum chamber (1).
1 1 . Système de pompes à vide selon la revendication 16, caractérisée en ce que la sortie de la pompe à vide auxiliaire à palettes lubrifiées (7) rejoint la sortie des gaz (8) après le clapet anti-retour (6). 1 1. Vacuum pump system according to Claim 16, characterized in that the outlet of the lubricated vane auxiliary vacuum pump (7) joins the outlet of the gases (8) after the non-return valve (6).
12. Système de pompes à vide selon la revendication 16 ou 17, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est dimensionnée afin d'avoir une consommation d'énergie minimale de son moteur. Vacuum pump system according to Claim 16 or 17, characterized in that the lubricated vane vacuum pump (7) is dimensioned in order to have a minimum energy consumption of its motor.
13. Système de pompes à vide selon l'une quelconque des revendications 16 à 18, caractérisée en ce que le débit nominal de la pompe à vide auxiliaire à palettes lubrifiées (7) est choisi en fonction du volume du conduit de sortie (5) de la pompe à vide principale à palettes lubrifiées (3) qui est limité par le clapet anti-retour (6). Vacuum pump system according to one of Claims 16 to 18, characterized in that the nominal capacity of the lubricated vane vacuum vacuum pump (7) is selected as a function of the volume of the outlet pipe (5). the main vacuum pump with lubricated vanes (3) which is limited by the non-return valve (6).
14. Système de pompes à vide selon la revendication 19, caractérisée en ce que le débit de la pompe à vide auxiliaire à palettes lubrifiées est de 1/500 à 1/5 du débit nominal de la pompe à vide principale à palettes lubrifiées (3). Vacuum pump system according to Claim 19, characterized in that the flow rate of the lubricated vane vacuum vacuum pump is 1/500 to 1/5 of the nominal flow rate of the lubricated vane main vacuum pump (3). ).
15. Système de pompes à vide selon l'une quelconque des revendications 10 à 14, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est mono-étagée ou multi-étagée. Vacuum pump system according to one of Claims 10 to 14, characterized in that the auxiliary vacuum pump with lubricated vanes (7) is single-stage or multi-stage.
16. Système de pompes à vide selon l'une quelconque des revendications 10 à 15, caractérisée en ce que le clapet anti-retour (6) se ferme quand la pression à l'aspiration de la pompe à vide principale à palettes lubrifiées (3) se situe entre 500 mbar absolu et le vide final. Vacuum pump system according to one of Claims 10 to 15, characterized in that the non-return valve (6) closes when the suction pressure of the main vacuum pump with lubricated vanes (3) ) is between 500 mbar absolute and the final vacuum.
17. Système de pompes à vide selon l'une quelconque des revendications 10 à 16, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) refoule les gaz dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées (3). Vacuum pump system according to one of Claims 10 to 16, characterized in that the lubricated vane vacuum pump (7) discharges the gases into the oil separator of the main vane vacuum pump. lubricated (3).
18. Système de pompes à vide selon l'une quelconque des revendications 10 à 17, caractérisée en ce que la pompe à vide auxiliaire à palettes lubrifiées (7) est intégrée dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées (3). Vacuum pump system according to one of Claims 10 to 17, characterized in that the auxiliary vacuum pump with lubricated vanes (7) is integrated in the oil separator of the main vacuum pump with lubricated vanes. (3).
EP14738765.8A 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps Revoked EP3161318B1 (en)

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PT147387658T PT3161318T (en) 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps
PL14738765T PL3161318T3 (en) 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps

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PCT/EP2014/063725 WO2015197138A1 (en) 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps

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EP (1) EP3161318B1 (en)
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KR (1) KR102223057B1 (en)
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AU (3) AU2014398770A1 (en)
BR (1) BR112016030498B1 (en)
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CA2953455C (en) 2022-03-29
RU2017102492A (en) 2018-07-27
AU2019204608B2 (en) 2021-07-22
AU2014398770A1 (en) 2017-01-19
US20170122321A1 (en) 2017-05-04
KR102223057B1 (en) 2021-03-05
KR20170028381A (en) 2017-03-13
BR112016030498A2 (en) 2017-08-22
JP6608394B2 (en) 2019-11-20
RU2666720C2 (en) 2018-09-11
WO2015197138A1 (en) 2015-12-30
PT3161318T (en) 2020-03-06
TWI734588B (en) 2021-07-21
DK3161318T3 (en) 2020-03-09
PL3161318T3 (en) 2020-08-10
TW202043623A (en) 2020-12-01
CA2953455A1 (en) 2015-12-30
US20200318640A1 (en) 2020-10-08
BR112016030498B1 (en) 2022-06-28
US10760573B2 (en) 2020-09-01
TW201608135A (en) 2016-03-01
JP2017523339A (en) 2017-08-17
RU2017102492A3 (en) 2018-07-27
US11725662B2 (en) 2023-08-15
EP3161318B1 (en) 2020-02-05
CN106662108A (en) 2017-05-10
ES2774438T3 (en) 2020-07-21
TWI710702B (en) 2020-11-21
AU2017100332A4 (en) 2017-04-27

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