EP3161318B1 - Method of pumping in a system of vacuum pumps and system of vacuum pumps - Google Patents

Method of pumping in a system of vacuum pumps and system of vacuum pumps Download PDF

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Publication number
EP3161318B1
EP3161318B1 EP14738765.8A EP14738765A EP3161318B1 EP 3161318 B1 EP3161318 B1 EP 3161318B1 EP 14738765 A EP14738765 A EP 14738765A EP 3161318 B1 EP3161318 B1 EP 3161318B1
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EP
European Patent Office
Prior art keywords
vacuum pump
rotary vane
lubricated rotary
auxiliary
vane vacuum
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Revoked
Application number
EP14738765.8A
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German (de)
French (fr)
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EP3161318A1 (en
Inventor
Didier MÜLLER
Jean Eric LARCHER
Théodore ILTCHEV
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Ateliers Busch SA
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Ateliers Busch SA
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Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA
Priority to PL14738765T priority Critical patent/PL3161318T3/en
Priority to PT147387658T priority patent/PT3161318T/en
Publication of EP3161318A1 publication Critical patent/EP3161318A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/30—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C2/34—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members
    • F04C2/344—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F04C2270/185—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation

Definitions

  • the present invention relates to a pumping method making it possible to reduce the consumption of electrical energy as well as to increase the performance in terms of final vacuum of a pumping system the main pump of which is a vacuum pump with lubricated vanes. Also, the present invention relates to a vacuum pump system which can be used to carry out the method according to the present invention.
  • Roots type booster pumps arranged upstream of the main lubricated vane pumps.
  • This type of system is bulky, works either with bypass valves with reliability problems, or by using means of measurement, control, adjustment or control.
  • these means of control, adjustment or slaving must be actively controlled, which necessarily results in an increase in the number of system components, its complexity and its cost.
  • the document US 2003/068233 A1 describes a pumping system for evacuating vacuum chambers from processes for the treatment of wafers in the semiconductor industry.
  • This system includes two pumps, a main and an auxiliary, of dry types arranged in series as well as a non-return valve mounted in an exhaust duct arranged in parallel to the auxiliary pump.
  • This system is characterized by a ratio of the volumes of the two pumps from 20 to 130.
  • the document EP 1,243,795 A1 discloses the combination of a dry primary pump (roots or claw) multi-stage and an additional dry pump (membrane or piston) and a non-return valve.
  • the effect obtained by this combination is to reduce the compression ratio in the last stage of the primary pump, when a certain level of vacuum is already reached in the enclosure to be evacuated, so that the temperature of the pump does not increase not too much and so does not lead to the destruction of it. This is a problem which can especially arise when gases with low thermal coefficient (Xenon, Argon, etc.) are used.
  • the object of the present invention is to propose a pumping method in a vacuum pump system making it possible to reduce the electrical energy necessary for the evacuation of a vacuum enclosure and its maintenance, as well as the drop in temperature of the outlet gas.
  • the present invention also aims to propose a pumping method in a vacuum pump system making it possible to obtain a higher flow rate at low pressure than that which can be obtained using a vacuum pump with lubricated vane alone. when pumping out a vacuum enclosure.
  • the present invention also aims to propose a pumping method in a vacuum pump system making it possible to obtain a better vacuum than that which can be obtained using a vacuum pump with vanes lubricated alone during pumping. of a vacuum enclosure.
  • a pumping method which is carried out within the framework of a vacuum pump system whose configuration consists essentially of a main vacuum pump with lubricated vanes provided with a gas inlet orifice connected to a vacuum enclosure and a gas outlet orifice leading into a duct which is fitted with a non-return valve, before opening into the atmosphere or into other devices.
  • the suction of an auxiliary vacuum pump with lubricated vanes is connected in parallel to this non-return valve, its outlet going to the atmosphere or joining the duct of the main pump after the non-return valve.
  • the method according to the present invention therefore essentially consists in starting an auxiliary vacuum pump with lubricated vanes simultaneously with the main vacuum pump with lubricated vanes and in operating the auxiliary vacuum pump with lubricated vanes continuously all the time. that the main vacuum pump with lubricated vanes pumps the gases contained in the vacuum enclosure through the gas inlet, but also all the time that the main vacuum pump with lubricated vanes maintains a defined pressure (p. e.g. the final vacuum) in the enclosure by driving the gases rising through its outlet.
  • the invention resides in the fact that the coupling of the main vacuum pump with lubricated vanes and the auxiliary vacuum pump with lubricated vanes does not require specific measurements and devices (e.g. pressure, temperature, current sensors, etc.), servos or data and calculation management. Consequently, the vacuum pump system suitable for implementing the pumping method according to the present invention comprises a minimum number of components, is very simple and costs considerably less than the existing systems.
  • the start-up of the auxiliary vacuum pump with lubricated vanes is controlled in an "all or nothing" manner. Piloting consists in controlling one or more parameters and, according to certain rules, starting or stopping the auxiliary vacuum pump with lubricated vanes.
  • the parameters, provided by suitable sensors, are p. ex. the motor current of the main vacuum pump with lubricated vanes, the temperature or pressure of the gases in the volume of the outlet pipe of the main vacuum pump with lubricated vanes, limited by the non-return valve, or a combination of these settings.
  • the sizing of the auxiliary vacuum pump with lubricated vanes is conditioned by the minimum energy consumption of its motor. It is normally single-stage. Its nominal flow rate is chosen according to the flow rate of the main vacuum pump with lubricated vanes, but also taking into account the size of the volume of the outlet pipe of the main vacuum pump with lubricated vanes, limited by the non-return valve. . This flow can be from 1/500 to 1/5 of the nominal flow of the main vacuum pump with lubricated vanes, but can also be lower or higher than these values.
  • the non-return valve, placed in the duct at the outlet of the main vacuum pump with lubricated vanes can be a standard element available commercially. It is sized according to the nominal flow rate of the main vacuum pump with lubricated vanes. In particular, provision is made for the non-return valve to close when the suction pressure of the main vacuum pump with lubricated vanes is between 500 mbar absolute and the final vacuum (eg 400 mbar).
  • the main vacuum pump with lubricated vanes is multi-stage.
  • the auxiliary vacuum pump with lubricated vanes is multi-stage.
  • the auxiliary vacuum pump with lubricated vane is preferably small.
  • the auxiliary vacuum pump with lubricated vanes discharges the gases into the oil separator of the main vacuum pump with lubricated vanes.
  • the auxiliary vacuum pump with lubricated vanes is integrated in the oil separator of the main vacuum pump with lubricated vanes.
  • the pressure is high, for example equal to atmospheric pressure. Due to the compression in the main vacuum pump with lubricated vanes, the pressure of the gases discharged at its outlet is higher than atmospheric pressure (if the gases at the outlet of the main pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
  • the second variant of the pumping method which is not part of the framework, that is to say in the case of piloting the auxiliary vacuum pump with lubricated vanes, there is an initial position for starting the pumping system.
  • the main vacuum pump with lubricated vanes pumps the gases from the vacuum chamber, parameters such as the current of its motor, the temperature and the pressure of the gases in the volume of the outlet duct begin to modify and reach threshold values detected by the sensors.
  • these parameters return to the initial ranges (outside the setpoints) with a time delay, the auxiliary vacuum pump with lubricated vanes is stopped.
  • Figure 1 shows a vacuum pump system SP suitable for implementing a pumping method according to an embodiment of the present invention.
  • This vacuum pump system SP comprises an enclosure 1, which is connected to the suction port 2 of a main vacuum pump with lubricated vanes 3.
  • the gas outlet port of the main vacuum pump with vanes lubricated 3 is connected to the duct 5.
  • a discharge check valve 6 is placed in the duct 5, which after this non-return valve continues in the gas outlet duct 8. The non-return valve 6, when it is closed, allows the formation of a volume 4, between the gas outlet orifice of the main vacuum pump 3 and itself.
  • the vacuum pump system SP also includes an auxiliary vacuum pump with lubricated vanes 7, connected in parallel to the non-return valve 6.
  • the suction port 9 of the auxiliary vacuum pump with lubricated vanes 7 is connected to the volume. 4 of the duct 5 and its delivery orifice 10 is connected to the duct 8.
  • the auxiliary vacuum pump with lubricated vanes 7 is also started.
  • the main vacuum pump with lubricated vane 3 draws the gases into the enclosure 1 through the duct 2 connected to its inlet and compresses them to discharge them afterwards on its outlet in the duct 5 and subsequently by the check valve. return 6.
  • the closing pressure of the non-return valve 6 is reached, it closes.
  • the pumping of the auxiliary vacuum pump with lubricated vanes 7 causes the pressure in the volume 4 to gradually decrease to its limit pressure.
  • the power consumed by the main vacuum pump with lubricated vanes 3 gradually decreases. This happens in a short period of time, for example for a certain cycle in 5-10 seconds.
  • Figure 2 represents a system of vacuum pumps SPP suitable for the implementation of a pumping method according to an embodiment not forming part of the present invention.
  • the system shown in figure 2 represents the “piloted” pumping system SPP, which also comprises suitable sensors 11, 12, 13 which control either the motor current (sensor 11) of the main vacuum pump with lubricated vanes 3, or the pressure (sensor 13 ) gases in the volume of the outlet pipe of the main vacuum pump with lubricated vanes, limited by the non-return valve 6, i.e. the temperature (sensor 12) of the gases in the volume of the pipe leaving the vacuum pump main with lubricated paddles, limited by the non-return valve 6, ie a combination of these parameters.
  • the threshold value can be a percentage of the maximum value measured during a drain cycle without switching on the auxiliary vacuum pump (eg 75%).
  • the threshold value can be a percentage (eg 80%) of the maximum value measured during an emptying cycle without setting the auxiliary vacuum pump.
  • the threshold value (eg 100 mbar) is defined according to the ratio of the flow rates of the two pumps, the main and auxiliary.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

Domaine technique de l'inventionTechnical field of the invention

La présente invention se rapporte à une méthode de pompage permettant de réduire la consommation d'énergie électrique ainsi qu'augmenter les performances en termes de vide final d'un système de pompage dont la pompe principale est une pompe à vide à palettes lubrifiées. Egalement, la présente invention se rapporte à un système de pompes à vide qui peut être utilisé pour réaliser la méthode selon la présente invention.The present invention relates to a pumping method making it possible to reduce the consumption of electrical energy as well as to increase the performance in terms of final vacuum of a pumping system the main pump of which is a vacuum pump with lubricated vanes. Also, the present invention relates to a vacuum pump system which can be used to carry out the method according to the present invention.

Art antérieurPrior art

Les tendances générales d'augmentation des performances des pompes à vide, de réduction des coûts des installations et de la consommation d'énergie dans les industries ont apporté des évolutions significatives en termes de performances, d'économie d'énergie, d'encombrement, dans les entraînements, etc.The general trends of increasing the performance of vacuum pumps, reducing installation costs and energy consumption in industries have brought significant changes in terms of performance, energy saving, size, in training, etc.

L'état de la technique montre que pour améliorer le vide final et réduire la consommation d'énergie il faut rajouter des étages supplémentaires dans les pompes à vide de type Roots multi-étagées ou Claws multi-étagées. Pour les pompes à vide à vis il faut mettre des tours supplémentaires aux vis, et/ou augmenter le taux de compression interne. Pour les pompes à vide à palettes lubrifiées, il faut typiquement également rajouter un ou plusieurs étages supplémentaires en série afin d'augmenter le taux de compression interne.The state of the art shows that in order to improve the final vacuum and reduce the energy consumption, additional stages must be added in the multi-stage Roots or multi-stage Claws vacuum pumps. For screw vacuum pumps it is necessary to add additional turns to the screws, and / or to increase the internal compression rate. For lubricated vane vacuum pumps, it is also typically necessary to add one or more additional stages in series in order to increase the internal compression ratio.

L'état de la technique concernant les systèmes de pompes à vide qui visent l'amélioration du vide final et l'augmentation du débit montre des pompes booster de type Roots agencées en amont des pompes principales à palettes lubrifiées. Ce type de systèmes est encombrant, fonctionne soit avec des clapets by-pass présentant des problèmes de fiabilité, soit en employant des moyens de mesure, contrôle, réglage ou asservissement. Cependant, ces moyens de contrôle, réglage ou asservissement doivent être pilotés d'une manière active, ce qui résulte forcément en une augmentation du nombre de composants du système, de sa complexité et de son coût.The state of the art concerning vacuum pump systems which aim to improve the final vacuum and increase the flow rate shows Roots type booster pumps arranged upstream of the main lubricated vane pumps. This type of system is bulky, works either with bypass valves with reliability problems, or by using means of measurement, control, adjustment or control. However, these means of control, adjustment or slaving must be actively controlled, which necessarily results in an increase in the number of system components, its complexity and its cost.

Le document US 2003/068233 A1 décrit un système de pompage pour évacuer des enceintes à vide de procédés pour le traitement de wafers dans l'industrie des semi-conducteurs. Ce système comprend deux pompes, une principale et une auxiliaire, de types sèches agencées en série ainsi qu'un clapet anti-retour monté dans un conduit d'échappement agencé en paralèlle à la pompe auxiliaire. Ce sytème étant caractérisé par un ratio des volumes des deux pompes de 20 à 130.The document US 2003/068233 A1 describes a pumping system for evacuating vacuum chambers from processes for the treatment of wafers in the semiconductor industry. This system includes two pumps, a main and an auxiliary, of dry types arranged in series as well as a non-return valve mounted in an exhaust duct arranged in parallel to the auxiliary pump. This system is characterized by a ratio of the volumes of the two pumps from 20 to 130.

Un système de pompage similaire est aussi divulgué dans les documents DE 88 16 875 U1 et DE 38 42 886 A1 . Dans ces derniers les pompes primaire et secondaire sèches sont explicitement des pompes de type roots. Ces documents proposent de résoudre le problème posé par la présence du conduit supplémentaire d'évacuation muni du clapet anti-retour lors de l'évacuation de gaz rares ou dangereux par le remplacement de la pompe auxiliaire sèche de type roots et de fabrication usuelle par une pompe sèche de type roots munie d'un mécanisme de roue libre.A similar pumping system is also disclosed in the documents DE 88 16 875 U1 and DE 38 42 886 A1 . In the latter, the primary and secondary dry pumps are explicitly roots type pumps. These documents propose to solve the problem posed by the presence of the additional evacuation conduit provided with the non-return valve during the evacuation of rare or dangerous gases by replacing the dry auxiliary pump of the roots type and of usual manufacture by a roots type dry pump fitted with a freewheel mechanism.

Le document EP 1 243 795 A1 divulgue quant à lui la combinaison d'une pompe primaire sèche (roots ou claw) multi-étagée et d'une pompe additionnelle sèche (membrane ou piston) et d'un clapet anti-retour. L'effet obtenu par cette combinaison est de réduire le taux de compression dans le dernier étage de la pompe primaire, lorsqu'un certain niveau de vide est déjà atteint dans l'enceinte à évacuer, afin que la température de la pompe n'augmente pas trop et ainsi ne conduise pas à la destruction de celle-ci. C'est un problème qui peut surtout survenir lorsque des gaz à faible coefficient thermique (Xenon, Argon, etc.) sont utilisés.The document EP 1,243,795 A1 discloses the combination of a dry primary pump (roots or claw) multi-stage and an additional dry pump (membrane or piston) and a non-return valve. The effect obtained by this combination is to reduce the compression ratio in the last stage of the primary pump, when a certain level of vacuum is already reached in the enclosure to be evacuated, so that the temperature of the pump does not increase not too much and so does not lead to the destruction of it. This is a problem which can especially arise when gases with low thermal coefficient (Xenon, Argon, etc.) are used.

Résumé de l'inventionSummary of the invention

La présente invention a pour but de proposer une méthode de pompage dans un système de pompes à vide permettant de réduire l'énergie électrique nécessaire pour la mise sous vide d'une enceinte à vide et son maintien, ainsi que la baisse de la température des gaz de sortie.The object of the present invention is to propose a pumping method in a vacuum pump system making it possible to reduce the electrical energy necessary for the evacuation of a vacuum enclosure and its maintenance, as well as the drop in temperature of the outlet gas.

La présente invention a aussi pour but de proposer une méthode de pompage dans un système de pompes à vide permettant d'obtenir un débit supérieur à basse pression à celui qui peut être obtenu à l'aide d'une pompe à vide à palettes lubrifiées seule lors du pompage d'une enceinte à vide.The present invention also aims to propose a pumping method in a vacuum pump system making it possible to obtain a higher flow rate at low pressure than that which can be obtained using a vacuum pump with lubricated vane alone. when pumping out a vacuum enclosure.

La présente invention a également pour but de proposer une méthode de pompage dans un système de pompes à vide permettant d'obtenir un meilleur vide que celui qui peut être obtenu à l'aide d'une pompe à vide à palettes lubrifiées seule lors du pompage d'une enceinte à vide.The present invention also aims to propose a pumping method in a vacuum pump system making it possible to obtain a better vacuum than that which can be obtained using a vacuum pump with vanes lubricated alone during pumping. of a vacuum enclosure.

Ces buts de la présente invention sont atteints à l'aide d'une méthode de pompage qui est réalisée dans le cadre d'un système de pompes à vide dont la configuration consiste essentiellement en une pompe à vide principale à palettes lubrifiées munie d'un orifice d'entrée des gaz reliée à une enceinte à vide et d'un orifice de sortie des gaz donnant dans un conduit qui est muni d'un clapet anti-retour, avant de déboucher dans l'atmosphère ou dans d'autres appareils. L'aspiration d'une pompe à vide auxiliaire à palettes lubrifiées est branchée en parallèle à ce clapet anti-retour, sa sortie allant à l'atmosphère ou rejoignant le conduit de la pompe principale après le clapet anti-retour.These objects of the present invention are achieved using a pumping method which is carried out within the framework of a vacuum pump system whose configuration consists essentially of a main vacuum pump with lubricated vanes provided with a gas inlet orifice connected to a vacuum enclosure and a gas outlet orifice leading into a duct which is fitted with a non-return valve, before opening into the atmosphere or into other devices. The suction of an auxiliary vacuum pump with lubricated vanes is connected in parallel to this non-return valve, its outlet going to the atmosphere or joining the duct of the main pump after the non-return valve.

Une telle méthode de pompage est notamment l'objet de la revendication indépendante 1. Des différents modes de réalisation préférés de l'invention sont en outre l'objet des revendications dépendantes.Such a pumping method is in particular the subject of independent claim 1. Different preferred embodiments of the invention are further the subject of the dependent claims.

La méthode selon la présente invention consiste donc essentiellement à mettre en marche une pompe à vide auxiliaire à palettes lubrifiées de manière simultanée à la pompe à vide principale à palettes lubrifiées et à faire fonctionner la pompe à vide auxiliaire à palettes lubrifiées en continu tout le temps que la pompe à vide principale à palettes lubrifiées pompe les gaz contenus dans l'enceinte à vide par l'orifice d'entrée de gaz, mais aussi tout le temps que la pompe à vide principale à palettes lubrifiées maintient une pression définie (p.ex. le vide final) dans l'enceinte en refoulant les gaz remontant par sa sortie.The method according to the present invention therefore essentially consists in starting an auxiliary vacuum pump with lubricated vanes simultaneously with the main vacuum pump with lubricated vanes and in operating the auxiliary vacuum pump with lubricated vanes continuously all the time. that the main vacuum pump with lubricated vanes pumps the gases contained in the vacuum enclosure through the gas inlet, but also all the time that the main vacuum pump with lubricated vanes maintains a defined pressure (p. e.g. the final vacuum) in the enclosure by driving the gases rising through its outlet.

Selon un premier aspect, l'invention réside dans le fait que le couplage de la pompe à vide principale à palettes lubrifiées et de la pompe à vide auxiliaire à palettes lubrifiées ne nécessite pas de mesures et d'appareils spécifiques (p.ex. de capteurs de pression, de température, de courant, etc.), d'asservissements ou de gestion de données et calcul. Par conséquent, le système de pompes à vide adapté pour la mise en œuvre de la méthode de pompage selon la présente invention comprend un nombre minimal de composants, présente une grande simplicité et coûte nettement moins cher que les systèmes existants.According to a first aspect, the invention resides in the fact that the coupling of the main vacuum pump with lubricated vanes and the auxiliary vacuum pump with lubricated vanes does not require specific measurements and devices (e.g. pressure, temperature, current sensors, etc.), servos or data and calculation management. Consequently, the vacuum pump system suitable for implementing the pumping method according to the present invention comprises a minimum number of components, is very simple and costs considerably less than the existing systems.

Selon une deuxième variante de la méthode de pompage qui ne fait pas partie du cadre de la présente invention, pour répondre à des exigences spécifiques la mise en route de la pompe à vide auxiliaire à palettes lubrifiées est pilotée de manière « tout ou rien ». Le pilotage consiste à contrôler un ou plusieurs paramètres et suivant certaines règles mettre en route la pompe à vide auxiliaire à palettes lubrifiées ou l'arrêter. Les paramètres, fournis par des capteurs adéquats, sont p. ex. le courant du moteur de la pompe à vide principale à palettes lubrifiées, la température ou la pression des gaz dans le volume du conduit de sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour, ou une combinaison de ces paramètres.According to a second variant of the pumping method which is not part of the scope of the present invention, in order to meet specific requirements, the start-up of the auxiliary vacuum pump with lubricated vanes is controlled in an "all or nothing" manner. Piloting consists in controlling one or more parameters and, according to certain rules, starting or stopping the auxiliary vacuum pump with lubricated vanes. The parameters, provided by suitable sensors, are p. ex. the motor current of the main vacuum pump with lubricated vanes, the temperature or pressure of the gases in the volume of the outlet pipe of the main vacuum pump with lubricated vanes, limited by the non-return valve, or a combination of these settings.

Le dimensionnement de la pompe à vide auxiliaire à palettes lubrifiées est conditionné par la consommation d'énergie minimale de son moteur. Elle est normalement mono-étagée. Son débit nominal est choisi en fonction du débit de la pompe à vide principale à palettes lubrifiées, mais aussi en prenant en compte la taille du volume du conduit de sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour. Ce débit peut être de 1/500 à 1/5 du débit nominal de la pompe à vide principale à palettes lubrifiées, mais peut aussi être inférieur ou supérieur à ces valeurs.The sizing of the auxiliary vacuum pump with lubricated vanes is conditioned by the minimum energy consumption of its motor. It is normally single-stage. Its nominal flow rate is chosen according to the flow rate of the main vacuum pump with lubricated vanes, but also taking into account the size of the volume of the outlet pipe of the main vacuum pump with lubricated vanes, limited by the non-return valve. . This flow can be from 1/500 to 1/5 of the nominal flow of the main vacuum pump with lubricated vanes, but can also be lower or higher than these values.

Le clapet anti-retour, placé dans le conduit à la sortie de la pompe à vide principale à palettes lubrifiées peut être un élément standard disponible dans le commerce. Il est dimensionné suivant le débit nominal de la pompe à vide principale à palettes lubrifiées. En particulier, il est prévu que le clapet anti-retour se ferme quand la pression à l'aspiration de la pompe à vide principale à palettes lubrifiées se situe entre 500 mbar absolu et le vide final (p.ex. à 400 mbar).The non-return valve, placed in the duct at the outlet of the main vacuum pump with lubricated vanes can be a standard element available commercially. It is sized according to the nominal flow rate of the main vacuum pump with lubricated vanes. In particular, provision is made for the non-return valve to close when the suction pressure of the main vacuum pump with lubricated vanes is between 500 mbar absolute and the final vacuum (eg 400 mbar).

Selon une autre variante, la pompe à vide principale à palettes lubrifiées est multi-étagée.According to another variant, the main vacuum pump with lubricated vanes is multi-stage.

Selon une autre variante, la pompe à vide auxiliaire à palettes lubrifiées est multi-étagée.According to another variant, the auxiliary vacuum pump with lubricated vanes is multi-stage.

La pompe à vide auxiliaire à palettes lubrifiées est de préférence de petite taille.The auxiliary vacuum pump with lubricated vane is preferably small.

Selon une autre variante, la pompe à vide auxiliaire à palettes lubrifiées refoule les gaz dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées.According to another variant, the auxiliary vacuum pump with lubricated vanes discharges the gases into the oil separator of the main vacuum pump with lubricated vanes.

Selon encore une autre variante, la pompe à vide auxiliaire à palettes lubrifiées est intégrée dans le séparateur d'huile de la pompe à vide principale à palettes lubrifiées.According to yet another variant, the auxiliary vacuum pump with lubricated vanes is integrated in the oil separator of the main vacuum pump with lubricated vanes.

Au départ d'un cycle de vidage de l'enceinte, la pression y est élevée, par exemple égale à la pression atmosphérique. Vu la compression dans la pompe à vide principale à palettes lubrifiées, la pression des gaz refoulés à sa sortie est plus haute que la pression atmosphérique (si les gaz à la sortie de la pompe principale sont refoulés directement à l'atmosphère) ou plus haute que la pression à l'entrée d'un autre appareil connecté en aval. Cela provoque l'ouverture du clapet anti-retour.At the start of an emptying cycle of the enclosure, the pressure is high, for example equal to atmospheric pressure. Due to the compression in the main vacuum pump with lubricated vanes, the pressure of the gases discharged at its outlet is higher than atmospheric pressure (if the gases at the outlet of the main pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.

Quand ce clapet anti-retour est ouvert, l'action de la pompe à vide auxiliaire à palettes lubrifiées sur les paramètres de fonctionnement de la pompe à vide principale à palettes lubrifiées est très faiblement ressentie. En revanche, quand le clapet anti-retour se ferme à une certaine pression (parce que la pression dans l'enceinte a entretemps baissé), l'action de la pompe à vide auxiliaire à palettes lubrifiées provoque une réduction progressive de la différence de pression entre l'enceinte et le conduit après le clapet. La pression à la sortie de la pompe à vide principale à palettes lubrifiées devient celle à l'entrée de la petite pompe à vide auxiliaire à palettes lubrifiées, celle de sa sortie étant toujours la pression dans le conduit après le clapet anti-retour. Plus la pompe à vide auxiliaire à palettes lubrifiées pompe, plus la pression à la sortie de la pompe à vide principale à palettes lubrifiées, dans le volume fermé, limité par le clapet anti-retour, se réduit et par conséquent la différence de pression entre l'enceinte et la sortie de la pompe à vide principale à palettes lubrifiées baisse.When this non-return valve is open, the action of the auxiliary vacuum pump with lubricated vanes on the operating parameters of the main vacuum pump with lubricated vanes is very slightly felt. On the other hand, when the non-return valve closes at a certain pressure (because the pressure in the chamber has meanwhile dropped), the action of the auxiliary vacuum pump with lubricated vanes causes a gradual reduction in the pressure difference between the enclosure and the duct after the valve. The pressure at the outlet of the main vacuum pump with lubricated vanes becomes that at the inlet of the small auxiliary vacuum pump with lubricated vanes, that of its outlet is always the pressure in the duct after the non-return valve. The more the auxiliary vacuum pump with lubricated vanes pumps, the lower the pressure at the outlet of the main vacuum pump with lubricated vanes, in the closed volume, limited by the non-return valve, and consequently the pressure difference between the enclosure and the output of the main vacuum pump with lubricated vane drop.

Cette différence réduite rend les fuites internes dans la pompe à vide principale à palettes lubrifiées plus faibles et engendre une baisse plus importante de la pression dans l'enceinte ce qui améliore le vide final. En plus, la pompe à vide principale à palettes lubrifiées consomme de moins en moins d'énergie pour la compression et produit de moins en moins de chaleur de compression.This reduced difference makes the internal leaks in the main vacuum pump with lubricated vanes weaker and causes a greater drop in the pressure in the enclosure which improves the final vacuum. In addition, the main vacuum pump with lubricated vane consumes less and less energy for compression and produces less and less compression heat.

Selon la deuxième variante de la méthode de pompage qui ne fait pas partie du cadre, c'est-à-dire dans le cas de pilotage de la pompe à vide auxiliaire à palettes lubrifiées, il existe une position initiale de démarrage du système de pompage quand les capteurs sont dans un état défini ou bien donnent des valeurs initiales. Au fur et à mesure que la pompe à vide principale à palettes lubrifiées pompe les gaz de l'enceinte à vide, les paramètres tels le courant de son moteur, la température et la pression des gaz dans le volume du conduit de sortie commencent à se modifier et atteignent des valeurs de seuil détectées par les capteurs. Cela provoque la mise en marche de la petite pompe à vide auxiliaire à palettes lubrifiées. Quand ces paramètres repassent dans les plages initiales (hors consignes) avec une temporisation, la pompe à vide auxiliaire à palettes lubrifiées est arrêtée.According to the second variant of the pumping method which is not part of the framework, that is to say in the case of piloting the auxiliary vacuum pump with lubricated vanes, there is an initial position for starting the pumping system. when the sensors are in a defined state or else give initial values. As the main vacuum pump with lubricated vanes pumps the gases from the vacuum chamber, parameters such as the current of its motor, the temperature and the pressure of the gases in the volume of the outlet duct begin to modify and reach threshold values detected by the sensors. This causes the small auxiliary vacuum pump with lubricated vanes to start. When these parameters return to the initial ranges (outside the setpoints) with a time delay, the auxiliary vacuum pump with lubricated vanes is stopped.

D'un autre côté, il est aussi évident que l'étude du concept mécanique cherche à réduire le volume entre l'orifice de sortie des gaz de la pompe à vide principale à palettes lubrifiées et le clapet anti-retour dans le but de pouvoir y faire baisser la pression plus vite.On the other hand, it is also obvious that the study of the mechanical concept seeks to reduce the volume between the gas outlet of the main vacuum pump with lubricated vanes and the non-return valve in order to be able to lower the pressure there faster.

Brève description des dessinsBrief description of the drawings

Les particularités et les avantages de la présente invention apparaîtront avec plus de détails dans le cadre de la description qui suit avec des exemples de réalisation donnés à titre illustratif et non limitatif en référence aux dessins ci-annexés qui représentent :

  • la figure 1 représente de manière schématique un système de pompes à vide adapté pour la réalisation d'une méthode de pompage selon un mode de réalisation de la présente invention ; et
  • la figure 2 représente de manière schématique un système de pompes à vide adapté pour la réalisation d'une méthode de pompage selon un mode de réalisation ne faisant pas partie de la présente invention.
The features and advantages of the present invention will appear in more detail in the context of the description which follows with examples of embodiment given by way of illustration and not limitation with reference to the attached drawings which represent:
  • the figure 1 shows schematically a vacuum pump system suitable for carrying out a pumping method according to an embodiment of the present invention; and
  • the figure 2 shows schematically a vacuum pump system suitable for carrying out a pumping method according to an embodiment not forming part of the present invention.

Description détaillée des modes de réalisation de l'inventionDetailed description of the embodiments of the invention

Figure 1 représente un système de pompes à vide SP adapté pour la mise en œuvre d'une méthode de pompage selon un mode de réalisation de la présente invention. Figure 1 shows a vacuum pump system SP suitable for implementing a pumping method according to an embodiment of the present invention.

Ce système de pompes à vide SP comporte une enceinte 1, laquelle est reliée à l'orifice d'aspiration 2 d'une pompe à vide principale à palettes lubrifiées 3. L'orifice de sortie des gaz de la pompe à vide principale à palettes lubrifiées 3 est relié au conduit 5. Un clapet anti-retour de refoulement 6 est placé dans le conduit 5, qui après ce clapet anti-retour continue en conduit de sortie des gaz 8. Le clapet anti-retour 6, lorsqu'il est fermé, permet la formation d'un volume 4, compris entre l'orifice de sortie des gaz de la pompe à vide principale 3 et lui-même.This vacuum pump system SP comprises an enclosure 1, which is connected to the suction port 2 of a main vacuum pump with lubricated vanes 3. The gas outlet port of the main vacuum pump with vanes lubricated 3 is connected to the duct 5. A discharge check valve 6 is placed in the duct 5, which after this non-return valve continues in the gas outlet duct 8. The non-return valve 6, when it is closed, allows the formation of a volume 4, between the gas outlet orifice of the main vacuum pump 3 and itself.

Le système de pompes à vide SP comporte aussi une pompe à vide auxiliaire à palettes lubrifiées 7, branchée en parallèle au clapet anti-retour 6. L'orifice d'aspiration 9 de la pompe à vide auxiliaire à palettes lubrifiées 7 est relié au volume 4 du conduit 5 et son orifice de refoulement 10 est relié au conduit 8.The vacuum pump system SP also includes an auxiliary vacuum pump with lubricated vanes 7, connected in parallel to the non-return valve 6. The suction port 9 of the auxiliary vacuum pump with lubricated vanes 7 is connected to the volume. 4 of the duct 5 and its delivery orifice 10 is connected to the duct 8.

Dès la mise en route de la pompe à vide principale à palettes lubrifiées 3, la pompe à vide auxiliaire à palettes lubrifiées 7 est elle aussi mise en route. La pompe à vide principale à palettes lubrifiées 3 aspire les gaz dans l'enceinte 1 par le conduit 2 branché à son entrée et les comprime pour les refouler par la suite à sa sortie dans le conduit 5 et par la suite par le clapet anti-retour 6. Lorsque la pression de fermeture du clapet anti-retour 6 est atteinte, il se ferme. A partir de ce moment, le pompage de la pompe à vide auxiliaire à palettes lubrifiées 7 fait baisser progressivement la pression dans le volume 4 jusqu'à sa pression limite. En parallèle, la puissance consommée par la pompe à vide principale à palettes lubrifiées 3 baisse progressivement. Cela se produit en un court laps de temps, par exemple pour un certain cycle en 5 à 10 secondes.As soon as the main vacuum pump with lubricated vanes 3 is started, the auxiliary vacuum pump with lubricated vanes 7 is also started. The main vacuum pump with lubricated vane 3 draws the gases into the enclosure 1 through the duct 2 connected to its inlet and compresses them to discharge them afterwards on its outlet in the duct 5 and subsequently by the check valve. return 6. When the closing pressure of the non-return valve 6 is reached, it closes. From this moment, the pumping of the auxiliary vacuum pump with lubricated vanes 7 causes the pressure in the volume 4 to gradually decrease to its limit pressure. In parallel, the power consumed by the main vacuum pump with lubricated vanes 3 gradually decreases. This happens in a short period of time, for example for a certain cycle in 5-10 seconds.

Avec un ajustement judicieux du débit de la pompe à vide auxiliaire à palettes lubrifiées 7 et de la pression de fermeture du clapet anti-retour 6 en fonction du débit de la pompe à vide principale à palettes lubrifiées 3 et le volume de l'enceinte 1, il est en outre possible de réduire le temps avant la fermeture du clapet anti-retour 6 par rapport à la durée du cycle de vidage et donc réduire l'énergie électrique du moteur de la pompe à vide auxiliaire à palettes lubrifiées 7 pendant le temps avant la fermeture du clapet anti-retour 6. En revanche, l'avantage de la simplicité crédite une excellente fiabilité du système ainsi qu'un prix inférieur en comparaison avec des pompes similaires équipées d'automate programmable et ou de variateur, vannes pilotées, capteurs, etc.With a judicious adjustment of the flow rate of the auxiliary vacuum pump with lubricated vanes 7 and of the closing pressure of the non-return valve 6 according to the flow rate of the main vacuum pump with lubricated vanes 3 and the volume of enclosure 1, it is also possible to reduce the time before closing the non-return valve 6 with respect to the duration of the emptying cycle and therefore reduce the electrical energy of the motor of the auxiliary vacuum pump to paddles lubricated 7 during the time before the non-return valve closes 6. On the other hand, the advantage of simplicity credits an excellent reliability of the system as well as a lower price in comparison with similar pumps equipped with programmable automaton and or drive, pilot operated valves, sensors, etc.

Figure 2 représente un système de pompes à vide SPP adapté pour la mise en oeuvre d'une méthode de pompage selon un mode de réalisation ne faisant pas partie de la présente invention. Figure 2 represents a system of vacuum pumps SPP suitable for the implementation of a pumping method according to an embodiment not forming part of the present invention.

Par rapport au système montré à la figure 1, le système représenté à la figure 2 représente le système de pompage « piloté » SPP, qui comprend en outre des capteurs adéquats 11, 12, 13 qui contrôlent soit le courant du moteur (capteur 11) de la pompe principale à vide à palettes lubrifiées 3, soit la pression (capteur 13) des gaz dans le volume du conduit de sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour 6, soit la température (capteur 12) des gaz dans le volume du conduit à sortie de la pompe à vide principale à palettes lubrifiées, limité par le clapet anti-retour 6, soit une combinaison de ces paramètres.Compared to the system shown in figure 1 , the system shown in figure 2 represents the “piloted” pumping system SPP, which also comprises suitable sensors 11, 12, 13 which control either the motor current (sensor 11) of the main vacuum pump with lubricated vanes 3, or the pressure (sensor 13 ) gases in the volume of the outlet pipe of the main vacuum pump with lubricated vanes, limited by the non-return valve 6, i.e. the temperature (sensor 12) of the gases in the volume of the pipe leaving the vacuum pump main with lubricated paddles, limited by the non-return valve 6, ie a combination of these parameters.

En effet, quand la pompe à vide principale à palettes lubrifiées 3 commence à pomper les gaz de l'enceinte à vide 1, les paramètres tels le courant de son moteur, la température et la pression des gaz dans le volume du conduit de sortie 4 commencent à se modifier et atteignent des valeurs de seuil détectées par les capteurs. Pour le courant du moteur, la valeur de seuil peut être un pourcentage de la valeur maximale mesurée lors d'un cycle de vidage sans mise en marche de la pompe à vide auxiliaire (p. ex. 75%). Pour la température des gaz, mesurée à un endroit bien défini dans le volume du conduit de sortie 4 la valeur de seuil peut être un pourcentage (p. ex. 80%) de la valeur maximale mesurée lors d'un cycle de vidage sans mise en marche de la pompe à vide auxiliaire. Pour la pression des gaz, la valeur de seuil (p. ex. 100 mbar) est définie en fonction du rapport des débits des deux pompes, la principale et l'auxiliaire. Après des temporisations adaptées, spécifiques à chaque paramètre, la mise en marche de la pompe à vide auxiliaire à palettes lubrifiées 7 est déclenchée. Quand ces paramètres repassent dans des plages initiales (hors consignes) avec des temporisations adaptées, spécifiques à chaque paramètre, la pompe à vide auxiliaire à palettes lubrifiées 7 est arrêtée. Certainement, la présente invention est sujette à de nombreuses variations quant à sa mise en œuvre. Bien que divers modes de réalisation aient été décrits, on comprend bien qu'il n'est pas concevable d'identifier de manière exhaustive tous les modes possibles. Il est bien sûr envisageable de remplacer un moyen décrit par un moyen équivalent sans sortir du cadre de la présente invention. Toutes ces modifications font partie des connaissances communes d'un homme du métier dans le domaine de la technologie du vide.In fact, when the main vacuum pump with lubricated vanes 3 starts to pump the gases from the vacuum chamber 1, parameters such as the current of its motor, the temperature and the pressure of the gases in the volume of the outlet duct 4 begin to change and reach threshold values detected by the sensors. For the motor current, the threshold value can be a percentage of the maximum value measured during a drain cycle without switching on the auxiliary vacuum pump (eg 75%). For the gas temperature, measured at a well-defined location in the volume of the outlet duct 4, the threshold value can be a percentage (eg 80%) of the maximum value measured during an emptying cycle without setting the auxiliary vacuum pump. For gas pressure, the threshold value (eg 100 mbar) is defined according to the ratio of the flow rates of the two pumps, the main and auxiliary. After suitable delays, specific to each parameter, the starting of the auxiliary vacuum pump with lubricated vane 7 is started. When these parameters return to initial ranges (outside the setpoints) with suitable time delays, specific to each parameter, the auxiliary vacuum pump with lubricated vanes 7 is stopped. Certainly, the present invention is subject to numerous variations as to its implementation. Although various embodiments have been described, it is understood that it is not conceivable to exhaustively identify all the possible modes. It is of course conceivable to replace a means described by an equivalent means without departing from the scope of the present invention. All these modifications are part of the common knowledge of a person skilled in the art in the field of vacuum technology.

Claims (14)

  1. Pumping method in a system of vacuum pumps (SP, SPP) comprising:
    - a main lubricated rotary vane vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) leading into a conduit (5) before coming out into the gas outlet (8) of the system of vacuum pumps (SP, SPP),
    - a non-return valve (6) positioned in the conduit (5) between the gas outlet port (4) and the gas outlet (8), and
    - an auxiliary lubricated rotary vane vacuum pump (7) which has its motor and which is connected in parallel to the non-return valve (6),
    the method being characterized in that
    the main lubricated rotary vane vacuum pump (3) is activated in order to pump the gases contained in the vacuum chamber (1) through the gas outlet port (4);
    simultaneously the auxiliary lubricated rotary vane vacuum pump (7) is activated; and
    the auxiliary lubricated rotary vane vacuum pump (7) continues to operate all the while that the main lubricated rotary vane vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main lubricated rotary vane vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).
  2. Pumping method according to claim 1, characterized in that the outlet of the auxiliary lubricated rotary vane vacuum pump (7) rejoins the gas outlet (8) after the non-return valve (6).
  3. Pumping method according to claim 1 or 2, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) is dimensioned so as to have a minimal consumption of energy by its motor.
  4. Pumping method according to any one of the claims 1 to 3, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) is single-staged or multi-staged.
  5. Pumping method according to any one of the claims 1 to 4, characterized in that the non-return valve (6) closes when the pressure at the suction end of the main lubricated rotary vane vacuum pump (3) is between 500 mbar absolute and the final vacuum.
  6. Pumping method according to any one of the claims 1 to 5, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) discharges the gases into the oil separator of the main lubricated rotary vane vacuum pump (3).
  7. Pumping method according to any one of the claims 1 to 6, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) is integrated in the oil separator of the main lubricated rotary vane vacuum pump (3).
  8. System of vacuum pumps (SP, SPP) comprising:
    - a main lubricated rotary vane vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) leading into a conduit (5) before coming out into the gas outlet (8) of the system of vacuum pumps (SP, SPP),
    - a non-return valve (6) positioned in the conduit (5) between the gas outlet port (4) and the gas outlet (8), and
    - an auxiliary lubricated rotary vane vacuum pump (7) which has its motor and which is connected in parallel to the non-return valve (6),
    the system of vacuum pumps (SP, SPP) being characterized in that
    the auxiliary lubricated rotary vane vacuum pump (7) is designed to go into operation at the same time with the main lubricated rotary vane vacuum pump (3) and to remain in operation all the while that the main lubricated rotary vane vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main lubricated rotary vane vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).
  9. System of vacuum pumps according to claim 8, characterized in that the outlet of the auxiliary lubricated rotary vane vacuum pump (7) rejoins the gas outlet (8) after the non-return valve (6).
  10. System of vacuum pumps according to claim 8 or 9, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) is dimensioned so as to have a minimal consumption of energy by its motor.
  11. System of vacuum pumps according to any one of the claims 8 to 10, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) is single-staged or multi-staged.
  12. System of vacuum pumps according to any one of the claims 8 to 11, characterized in that the non-return valve (6) closes when the pressure at the suction end of the main lubricated rotary vane vacuum pump (3) is between 500 mbar absolute and the final vacuum.
  13. System of vacuum pumps according to any one of the claims 8 to 12, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) discharges the gases into the oil separator of the main lubricated rotary vane vacuum pump (3).
  14. System of vacuum pumps according to any one of the claims 8 to 13, characterized in that the auxiliary lubricated rotary vane vacuum pump (7) is integrated in the oil separator of the main lubricated rotary vane vacuum pump (3).
EP14738765.8A 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps Revoked EP3161318B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL14738765T PL3161318T3 (en) 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps
PT147387658T PT3161318T (en) 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/063725 WO2015197138A1 (en) 2014-06-27 2014-06-27 Method of pumping in a system of vacuum pumps and system of vacuum pumps

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EP3161318A1 EP3161318A1 (en) 2017-05-03
EP3161318B1 true EP3161318B1 (en) 2020-02-05

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US (2) US10760573B2 (en)
EP (1) EP3161318B1 (en)
JP (1) JP6608394B2 (en)
KR (1) KR102223057B1 (en)
CN (1) CN106662108A (en)
AU (3) AU2014398770A1 (en)
BR (1) BR112016030498B1 (en)
CA (1) CA2953455C (en)
DK (1) DK3161318T3 (en)
ES (1) ES2774438T3 (en)
PL (1) PL3161318T3 (en)
PT (1) PT3161318T (en)
RU (1) RU2666720C2 (en)
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TWI734588B (en) 2021-07-21
BR112016030498A2 (en) 2017-08-22
CA2953455C (en) 2022-03-29
KR20170028381A (en) 2017-03-13
ES2774438T3 (en) 2020-07-21
WO2015197138A1 (en) 2015-12-30
TWI710702B (en) 2020-11-21
BR112016030498B1 (en) 2022-06-28
TW202043623A (en) 2020-12-01
US20200318640A1 (en) 2020-10-08
DK3161318T3 (en) 2020-03-09
PT3161318T (en) 2020-03-06
KR102223057B1 (en) 2021-03-05
CA2953455A1 (en) 2015-12-30
CN106662108A (en) 2017-05-10
EP3161318A1 (en) 2017-05-03
AU2019204608A1 (en) 2019-07-18
AU2019204608B2 (en) 2021-07-22
AU2014398770A1 (en) 2017-01-19
RU2017102492A3 (en) 2018-07-27
US11725662B2 (en) 2023-08-15
JP2017523339A (en) 2017-08-17
RU2017102492A (en) 2018-07-27
JP6608394B2 (en) 2019-11-20
AU2017100332A4 (en) 2017-04-27
US10760573B2 (en) 2020-09-01
RU2666720C2 (en) 2018-09-11
PL3161318T3 (en) 2020-08-10
TW201608135A (en) 2016-03-01
US20170122321A1 (en) 2017-05-04

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