EP3161317A1 - Système de pompes à vide - Google Patents

Système de pompes à vide

Info

Publication number
EP3161317A1
EP3161317A1 EP15729446.3A EP15729446A EP3161317A1 EP 3161317 A1 EP3161317 A1 EP 3161317A1 EP 15729446 A EP15729446 A EP 15729446A EP 3161317 A1 EP3161317 A1 EP 3161317A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
main
auxiliary
outlet
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15729446.3A
Other languages
German (de)
English (en)
Other versions
EP3161317B1 (fr
Inventor
Thomas Dreifert
Roland Müller
Max PELIKAN
Dirk Schiller
Daniel SCHNEIDENBACH
Dirk STRATMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3161317A1 publication Critical patent/EP3161317A1/fr
Application granted granted Critical
Publication of EP3161317B1 publication Critical patent/EP3161317B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Definitions

  • the invention relates to a vacuum pump system.
  • Vacuum pumps and vacuum pump systems are often used to evacuate chambers in a short time. This is done using dry compressing vacuum pumps such as screw pumps, claw pumps or multi-stage roots pumps.
  • oil sealed vacuum pumps such as rotary vane pumps or ratchet pumps may also be used.
  • several pumps are arranged in series and / or parallel to each other in order to pump large volumes of gas in short periods of time.
  • Typical applications are lock chambers, as provided for example in coating plants.
  • the lock chamber must be pumped from atmospheric pressure to a transfer pressure in short periods. This is usually done in periods of 20 seconds to 120 seconds to a transfer pressure of 0.1 mbar to 10 mbar.
  • a valve which is arranged between the lock chamber and the vacuum pump system, be closed. The valve is closed for an idle time of about one to ten times the pump down time.
  • Another typical application is large process chambers, such as those used for heat treatment or refining of metals. In this application, typical pump down times are 2 minutes to 30 minutes. After the pump down time, the process chamber is at the desired low pressure level. However, it continues to flow a relatively low process gas flow, so that continuously a small gas flow must be demarcated. This is the holding time, which is approximately two to ten times the pumping time.
  • a screw pump is used to evacuate a chamber such as a lock chamber or a process chamber
  • a gap is provided between the rotor elements of the screw and the housing, which, since it is a dry-compacted vacuum pump, not by a lubricant is sealed.
  • the gap height depends in particular on the rotor temperature. Since there is always a backflow of the medium to be pumped through the gap, the optimum delivery rate of the pump is achieved only when the operating temperature and thus at a very small gap.
  • the pump In lock chambers, the pump must preferably be kept at nominal speed, otherwise they would have to be accelerated only at the end of the idle time. This would extend the pumping time.
  • the object of the invention is to provide a vacuum pump system in which a high, in particular maximum delivery rate of the vacuum pump, or of the vacuum pump system can be ensured in different operating conditions on the one hand and on the other hand, the energy consumption can be reduced.
  • the vacuum pump system according to the invention for evacuating a chamber which is in particular a lock or process chamber, has a main vacuum pump.
  • the inlet of the main vacuum pump which is in a particularly preferred embodiment is a screw pump, is indirectly or directly connected to the chamber to be evacuated, optionally in a connecting line between the inlet of the main vacuum pump and the chamber to be evacuated a switchable valve can be arranged ,
  • An auxiliary vacuum pump is connected downstream of the main vacuum pump in the conveying direction.
  • the main vacuum pump has an outlet on the outlet side, which is in particular a chamber or a room.
  • a main outlet and, on the other hand, an inlet of the auxiliary vacuum pump are connected to this outlet region. The outlet of the auxiliary vacuum pump is then connected to the main outlet.
  • the auxiliary vacuum pump is a side channel pump, and more preferably a roots pump.
  • the provision of a Roots pump has the advantage that it has only a very low energy consumption during the holding time.
  • a check valve is arranged in the main outlet. This check valve is arranged in the flow direction in the main outlet before the outlet of the auxiliary vacuum pump opens into the main outlet.
  • the non-return valve may be a mechanical check valve or a check valve which can be switched on or off.
  • the main vacuum pump which is in particular a screw pump
  • the auxiliary vacuum pump which is in particular a Roots pump
  • the pumps are connected to a common drive motor. As a result, manufacturing and energy costs can be reduced.
  • At least one conveying element of the main vacuum pump and at least one conveying element of the auxiliary vacuum pump are arranged on a common shaft.
  • both conveying elements of the main vacuum pump are arranged with one of the two conveying elements of the auxiliary vacuum pump on a common shaft.
  • the drive motor it is again particularly preferred for the drive motor to drive one of the two shafts and to ensure synchronous driving of the second shaft via an intermediate gear or directly meshing gears.
  • the main vacuum pump preferably has an internal compression which is> 2 and more preferably> 3.
  • the auxiliary vacuum pump preferably has no or very little internal compression, which is in particular ⁇ 2. It is particularly preferred that the auxiliary vacuum pump has no or at least approximately no internal compression. This simplifies the production; always a compression of the auxiliary pump is not worthwhile due to the large gradation to the main pump.
  • the pumping speed of the auxiliary vacuum pump is more preferable
  • the drawing shows a schematic sectional view of a preferred embodiment of the vacuum pump system according to the invention.
  • a screw pump 12 is arranged in a common housing 10.
  • the screw pump 12 has two helical rotor elements 18 each arranged on a rotor shaft 14, 16.
  • the two rotor shafts 16, 18 project through an intermediate wall 20 of the housing and each carry a rotor element 22 of a roots pump 24.
  • the left in the drawing shaft 14 is further connected to an electric drive motor 26.
  • the electric motor 26 drives the shaft 14.
  • the shaft 16 is driven by gears 28, which are each connected to one of the two shafts 14, 16.
  • An inlet 30 of the main vacuum pump 12 is connected, for example via a connecting line 31 with a not shown, to be evacuated chamber.
  • the screw pump 12 then conveys the medium into an outlet region 32 and an outlet chamber 32, respectively. From this, the medium passes through the main outlet 34.
  • a nonreturn valve 36 is also arranged in the main outlet 34.
  • a small volume of medium is drawn through an inlet 38 of the auxiliary vacuum pump 24 and expelled through an outlet 40 of the auxiliary vacuum pump.
  • the outlet 40 is connected to the main outlet 34, wherein the connection takes place in the flow direction in the main outlet 34 behind the check valve 36.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne un système de pompes à vide servant à faire le vide dans une chambre, en particulier une chambre de sas ou une chambre de processus. Ledit système de pompes à vide comporte une pompe à vide principale (12) réalisée de préférence sous la forme d'une pompe à vis. Une entrée (30) de la pompe à vis principale (12) est reliée à la chambre dans laquelle le vide doit être fait. Une pompe à vide auxiliaire (24) est disposée dans la direction de refoulement de la pompe à vide principale (12), laquelle est en particulier une pompe de type Roots. Une zone de sortie (32) de la pompe à vide principale (12) est reliée d'une part à une sortie principale (34) et d'autre part à une entrée (38) de la pompe à vide principale. En outre, une sortie (40) de la pompe à vide auxiliaire est reliée à la sortie principale (34).
EP15729446.3A 2014-06-26 2015-06-15 Système de pompes à vide Active EP3161317B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202014005279.4U DE202014005279U1 (de) 2014-06-26 2014-06-26 Vakuumpumpen-System
PCT/EP2015/063287 WO2015197396A1 (fr) 2014-06-26 2015-06-15 Système de pompes à vide

Publications (2)

Publication Number Publication Date
EP3161317A1 true EP3161317A1 (fr) 2017-05-03
EP3161317B1 EP3161317B1 (fr) 2020-12-30

Family

ID=53404546

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15729446.3A Active EP3161317B1 (fr) 2014-06-26 2015-06-15 Système de pompes à vide

Country Status (7)

Country Link
US (1) US10465686B2 (fr)
EP (1) EP3161317B1 (fr)
JP (1) JP6615132B2 (fr)
KR (1) KR101878088B1 (fr)
CN (1) CN106662106A (fr)
DE (1) DE202014005279U1 (fr)
WO (1) WO2015197396A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9982666B2 (en) * 2015-05-29 2018-05-29 Agilient Technologies, Inc. Vacuum pump system including scroll pump and secondary pumping mechanism
US10094381B2 (en) * 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
CN109162925A (zh) * 2018-10-31 2019-01-08 浙江羿阳太阳能科技有限公司 一种用于铸锭炉的防回流真空泵
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage

Family Cites Families (23)

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GB8808608D0 (en) * 1988-04-12 1988-05-11 Boc Group Plc Dry pump with booster
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KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
KR20010066569A (ko) * 1999-12-31 2001-07-11 양재신 가변유량 오일펌프
GB0004404D0 (en) 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
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JP2005155540A (ja) * 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ
DE102005008887A1 (de) 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
KR100656070B1 (ko) * 2005-12-28 2006-12-11 두산인프라코어 주식회사 휠로더의 유압펌프 제어장치
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
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DE102012220442A1 (de) 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems

Also Published As

Publication number Publication date
CN106662106A (zh) 2017-05-10
WO2015197396A1 (fr) 2015-12-30
KR101878088B1 (ko) 2018-07-12
EP3161317B1 (fr) 2020-12-30
JP2017520715A (ja) 2017-07-27
US20170122319A1 (en) 2017-05-04
JP6615132B2 (ja) 2019-12-11
DE202014005279U1 (de) 2015-10-05
KR20170010410A (ko) 2017-01-31
US10465686B2 (en) 2019-11-05

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