EP3161317A1 - Vacuum pump system - Google Patents

Vacuum pump system

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Publication number
EP3161317A1
EP3161317A1 EP15729446.3A EP15729446A EP3161317A1 EP 3161317 A1 EP3161317 A1 EP 3161317A1 EP 15729446 A EP15729446 A EP 15729446A EP 3161317 A1 EP3161317 A1 EP 3161317A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
main
auxiliary
outlet
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15729446.3A
Other languages
German (de)
French (fr)
Other versions
EP3161317B1 (en
Inventor
Thomas Dreifert
Roland Müller
Max PELIKAN
Dirk Schiller
Daniel SCHNEIDENBACH
Dirk STRATMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
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Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3161317A1 publication Critical patent/EP3161317A1/en
Application granted granted Critical
Publication of EP3161317B1 publication Critical patent/EP3161317B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Definitions

  • the invention relates to a vacuum pump system.
  • Vacuum pumps and vacuum pump systems are often used to evacuate chambers in a short time. This is done using dry compressing vacuum pumps such as screw pumps, claw pumps or multi-stage roots pumps.
  • oil sealed vacuum pumps such as rotary vane pumps or ratchet pumps may also be used.
  • several pumps are arranged in series and / or parallel to each other in order to pump large volumes of gas in short periods of time.
  • Typical applications are lock chambers, as provided for example in coating plants.
  • the lock chamber must be pumped from atmospheric pressure to a transfer pressure in short periods. This is usually done in periods of 20 seconds to 120 seconds to a transfer pressure of 0.1 mbar to 10 mbar.
  • a valve which is arranged between the lock chamber and the vacuum pump system, be closed. The valve is closed for an idle time of about one to ten times the pump down time.
  • Another typical application is large process chambers, such as those used for heat treatment or refining of metals. In this application, typical pump down times are 2 minutes to 30 minutes. After the pump down time, the process chamber is at the desired low pressure level. However, it continues to flow a relatively low process gas flow, so that continuously a small gas flow must be demarcated. This is the holding time, which is approximately two to ten times the pumping time.
  • a screw pump is used to evacuate a chamber such as a lock chamber or a process chamber
  • a gap is provided between the rotor elements of the screw and the housing, which, since it is a dry-compacted vacuum pump, not by a lubricant is sealed.
  • the gap height depends in particular on the rotor temperature. Since there is always a backflow of the medium to be pumped through the gap, the optimum delivery rate of the pump is achieved only when the operating temperature and thus at a very small gap.
  • the pump In lock chambers, the pump must preferably be kept at nominal speed, otherwise they would have to be accelerated only at the end of the idle time. This would extend the pumping time.
  • the object of the invention is to provide a vacuum pump system in which a high, in particular maximum delivery rate of the vacuum pump, or of the vacuum pump system can be ensured in different operating conditions on the one hand and on the other hand, the energy consumption can be reduced.
  • the vacuum pump system according to the invention for evacuating a chamber which is in particular a lock or process chamber, has a main vacuum pump.
  • the inlet of the main vacuum pump which is in a particularly preferred embodiment is a screw pump, is indirectly or directly connected to the chamber to be evacuated, optionally in a connecting line between the inlet of the main vacuum pump and the chamber to be evacuated a switchable valve can be arranged ,
  • An auxiliary vacuum pump is connected downstream of the main vacuum pump in the conveying direction.
  • the main vacuum pump has an outlet on the outlet side, which is in particular a chamber or a room.
  • a main outlet and, on the other hand, an inlet of the auxiliary vacuum pump are connected to this outlet region. The outlet of the auxiliary vacuum pump is then connected to the main outlet.
  • the auxiliary vacuum pump is a side channel pump, and more preferably a roots pump.
  • the provision of a Roots pump has the advantage that it has only a very low energy consumption during the holding time.
  • a check valve is arranged in the main outlet. This check valve is arranged in the flow direction in the main outlet before the outlet of the auxiliary vacuum pump opens into the main outlet.
  • the non-return valve may be a mechanical check valve or a check valve which can be switched on or off.
  • the main vacuum pump which is in particular a screw pump
  • the auxiliary vacuum pump which is in particular a Roots pump
  • the pumps are connected to a common drive motor. As a result, manufacturing and energy costs can be reduced.
  • At least one conveying element of the main vacuum pump and at least one conveying element of the auxiliary vacuum pump are arranged on a common shaft.
  • both conveying elements of the main vacuum pump are arranged with one of the two conveying elements of the auxiliary vacuum pump on a common shaft.
  • the drive motor it is again particularly preferred for the drive motor to drive one of the two shafts and to ensure synchronous driving of the second shaft via an intermediate gear or directly meshing gears.
  • the main vacuum pump preferably has an internal compression which is> 2 and more preferably> 3.
  • the auxiliary vacuum pump preferably has no or very little internal compression, which is in particular ⁇ 2. It is particularly preferred that the auxiliary vacuum pump has no or at least approximately no internal compression. This simplifies the production; always a compression of the auxiliary pump is not worthwhile due to the large gradation to the main pump.
  • the pumping speed of the auxiliary vacuum pump is more preferable
  • the drawing shows a schematic sectional view of a preferred embodiment of the vacuum pump system according to the invention.
  • a screw pump 12 is arranged in a common housing 10.
  • the screw pump 12 has two helical rotor elements 18 each arranged on a rotor shaft 14, 16.
  • the two rotor shafts 16, 18 project through an intermediate wall 20 of the housing and each carry a rotor element 22 of a roots pump 24.
  • the left in the drawing shaft 14 is further connected to an electric drive motor 26.
  • the electric motor 26 drives the shaft 14.
  • the shaft 16 is driven by gears 28, which are each connected to one of the two shafts 14, 16.
  • An inlet 30 of the main vacuum pump 12 is connected, for example via a connecting line 31 with a not shown, to be evacuated chamber.
  • the screw pump 12 then conveys the medium into an outlet region 32 and an outlet chamber 32, respectively. From this, the medium passes through the main outlet 34.
  • a nonreturn valve 36 is also arranged in the main outlet 34.
  • a small volume of medium is drawn through an inlet 38 of the auxiliary vacuum pump 24 and expelled through an outlet 40 of the auxiliary vacuum pump.
  • the outlet 40 is connected to the main outlet 34, wherein the connection takes place in the flow direction in the main outlet 34 behind the check valve 36.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A vacuum pump system for evacuating a chamber, in particular a lock chamber or process chamber, comprises a main vacuum pump (12) preferably designed as a screw pump. An inlet (30) of the main vacuum pump (12) is connected to the chamber that is to be evacuated. An auxiliary vacuum pump (24), especially a Roots pump, is disposed in the pumping direction of the main vacuum pump (12). An outlet zone (32) of the main vacuum pump (12) is connected to a main outlet (34) and to an inlet (38) of the auxiliary vacuum pump. Furthermore, an outlet (40) of the auxiliary vacuum pump is connected to the main outlet (34).

Description

Vakuumpumpen-Svstem  Vacuum-Svstem
Die Erfindung betrifft ein Vakuumpumpen-System. The invention relates to a vacuum pump system.
Vakuumpumpen und Vakuumpumpen-Systeme werden häufig eingesetzt, um Kammern in kurzer Zeit zu evakuieren. Dies erfolgt unter Verwendung von trockenverdichtenden Vakuumpumpen wie beispielsweise Schraubenpumpen, Klauenpumpen oder Multi-Stage-Roots-Pumpen. Gegebenenfalls können auch ölgedichtete Vakuumpumpen wie Drehschiebepumpen oder Sperrschiebepumpen verwendet werden. Häufig werden auch mehrere Pumpen in Reihe und/oder parallel zueinander angeordnet, um in kurzen Zeiträumen große Gasvolumina pumpen zu können. Vacuum pumps and vacuum pump systems are often used to evacuate chambers in a short time. This is done using dry compressing vacuum pumps such as screw pumps, claw pumps or multi-stage roots pumps. Optionally, oil sealed vacuum pumps such as rotary vane pumps or ratchet pumps may also be used. Frequently, several pumps are arranged in series and / or parallel to each other in order to pump large volumes of gas in short periods of time.
Typische Anwendungen sind Schleusenkammern, wie sie beispielsweise in Beschichtungsanlagen vorgesehen sind. Die Schleusenkammer muss hierbei in kurzen Zeiträumen von Atmosphärendruck auf einen Übergabedruck abgepumpt werden. Dies erfolgt üblicherweise in Zeiträumen von 20 Sekunden bis 120 Sekunden auf einen Übergabedruck von 0,1 mbar bis 10 mbar. Im Anschluss kann ein Ventil, das zwischen der Schleusenkammer und dem Vakuumpumpen-System angeordnet ist, geschlossen werden. Das Ventil ist über eine Leerlaufzeit, die etwa das Ein- bis Zehnfache der Abpumpzeit beträgt, geschlossen. Eine weitere typische Anwendung sind große Prozesskammern, wie sie beispielsweise zur Wärmebehandlung oder Veredelung von Metallen verwendet werden. In diesem Anwendungsfall sind typische Abpumpzeiten 2 Minuten bis 30 Minuten. Nach der Abpumpzeit ist die Prozesskammer auf dem gewünschten niedrigen Druckniveau. Es fließt jedoch weiterhin ein relativ niedriger Prozessgasstrom, so dass kontinuierlich ein kleiner Gasstrom abgegrenzt werden muss. Hierbei handelt es sich um die Haltezeit, die ungefähr das Zweifache bis Zehnfache der Abpumpzeit beträgt. Typical applications are lock chambers, as provided for example in coating plants. The lock chamber must be pumped from atmospheric pressure to a transfer pressure in short periods. This is usually done in periods of 20 seconds to 120 seconds to a transfer pressure of 0.1 mbar to 10 mbar. Subsequently, a valve, which is arranged between the lock chamber and the vacuum pump system, be closed. The valve is closed for an idle time of about one to ten times the pump down time. Another typical application is large process chambers, such as those used for heat treatment or refining of metals. In this application, typical pump down times are 2 minutes to 30 minutes. After the pump down time, the process chamber is at the desired low pressure level. However, it continues to flow a relatively low process gas flow, so that continuously a small gas flow must be demarcated. This is the holding time, which is approximately two to ten times the pumping time.
Sowohl bei Schleusenkammern als auch bei entsprechend großen Prozesskammern ist es zur Realisierung kurzer Abpumpzeiten erforderlich, dass das Vakuumpumpensystem sehr groß dimensioniert ist. Während der Leerlaufzeit bzw. während der Haltezeit sind die großen Saugvermögen der Pumpsysteme jedoch nicht notwendig. Dies führt zu einer hohen Stromaufnahme und somit einem hohen Energieverbrauch. Both in lock chambers and in correspondingly large process chambers, it is necessary to realize short pump-down times that the vacuum pump system is very large dimensions. During the idling time or during the holding time, however, the high pumping system's high pumping speeds are not necessary. This leads to a high power consumption and thus a high energy consumption.
Wird beispielsweise eine Schraubenpumpe zur Evakuierung einer Kammer wie einer Schleusenkammer oder einer Prozesskammer eingesetzt, so besteht die Problematik, dass zwischen den Rotorelementen der Schraube und dem Gehäuse ein Spalt vorgesehen ist, der, da es sich um eine trockenverdichtete Vakuumpumpe handelt, nicht durch ein Schmiermittel abgedichtet ist. Die Spalthöhe hängt hierbei insbesondere von der Rotortemperatur ab. Da durch den Spalt stets ein Rückströmen des zu fördernden Mediums erfolgt, wird die optimale Förderleistung der Pumpe erst bei Erreichen der Betriebstemperatur und somit bei einem sehr geringen Spalt erzielt. Sobald ein Solldruck in einer Prozesskammer erzielt ist, wäre es je nach Pumptyp möglich, die Drehzahl der Pumpe und somit die Pumpleistung zu reduzieren oder gegebenenfalls die Pumpe sogar auszuschalten. Dies hat jedoch den Nachteil, dass, sobald der Druck in der Prozesskammer den Solldruck wieder übersteigt, zunächst die Pumpe wieder auf Betriebstemperatur gebracht werden muss, bevor die volle Pumpleistung erzielt wird . Dies würde zu nicht akzeptablen Druckschwankungen in der Prozesskammer führen. Es ist erforderlich, dass die Vakuumpumpe bei Überschreiten eines Solldrucks in der Prozesskammer unmittelbar wieder mit voller Pumpleistung betrieben werden kann, um ein ungewolltes Ansteigen des Drucks in der Prozesskammer und zu starke Druckschwankungen in der Prozesskammer zu vermeiden. If, for example, a screw pump is used to evacuate a chamber such as a lock chamber or a process chamber, there is the problem that a gap is provided between the rotor elements of the screw and the housing, which, since it is a dry-compacted vacuum pump, not by a lubricant is sealed. The gap height depends in particular on the rotor temperature. Since there is always a backflow of the medium to be pumped through the gap, the optimum delivery rate of the pump is achieved only when the operating temperature and thus at a very small gap. Once a set pressure is achieved in a process chamber, it would be possible depending on the pump type to reduce the speed of the pump and thus the pump power or possibly even turn off the pump. However, this has the disadvantage that, as soon as the pressure in the process chamber again exceeds the target pressure, the pump must first be brought back to operating temperature before the full pumping power is achieved. This would lead to unacceptable pressure fluctuations in the process chamber. It is necessary that the Vacuum pump when a target pressure in the process chamber is exceeded can be operated directly with full pump power again to avoid an unwanted increase in pressure in the process chamber and excessive pressure fluctuations in the process chamber.
Bei Schleusenkammern muss die Pumpe vorzugsweise auf Nenndrehzahl gehalten werden, da sie sonst zum Ende der Leerlaufzeit erst beschleunigt werden müsste. Dies würde den Abpumpvorgang zeitlich verlängern. In lock chambers, the pump must preferably be kept at nominal speed, otherwise they would have to be accelerated only at the end of the idle time. This would extend the pumping time.
Die Problematik, dass die Pumpe aufgrund von Dichtspalten auf Betriebstemperatur gehalten werden muss, um ein maximales Fördervolumen zu gewährleisten, besteht auch bei anderen trockenverdichtenden Vakuumpumpen, wie Klauenpumpen, Roots-Pumpen und dergleichen. The problem that the pump must be kept at operating temperature due to sealing gaps in order to ensure a maximum delivery volume, there is also in other dry-compressing vacuum pumps, such as claw pumps, Roots pumps and the like.
Zur Reduzierung des Energieverbrauchs von Pumpen und Pumpensystemen während der Leerlauf- bzw. Haltezeit sind unterschiedliche Lösungsansätze bekannt: To reduce the energy consumption of pumps and pump systems during idle or hold time, different approaches are known:
Es besteht die Möglichkeit, Vakuumpumpen mit hohem eingebauten Volumenverhältnis einzusetzen. Die technisch realisierbaren Volumenverhältnisse sind jedoch durch die Fertigungstechnik, den Bauaufwand und durch Anforderungen an die Robustheit und Dichtheit der Pumpstufen beschränkt. Insbesondere kann hierdurch nur eine geringe Reduzierung der Energieaufnahme erzielt werden. Zudem sind Lösungen erforderlich, die beim Abpumpvorgang auf hohe innere Verdichtung eine Überkompression vermeiden . It is possible to use vacuum pumps with a high built-in volume ratio. However, the technically feasible volume ratios are limited by the manufacturing technology, the construction cost and by the requirements for the robustness and tightness of the pumping stages. In particular, this can only be achieved a small reduction in energy consumption. In addition, solutions are required that avoid over-compression during the pumping process to high internal compression.
Des Weiteren ist eine Kombination von Vorvakuumpumpen mit den in Reihe geschalteten Roots-Pumpen bekannt. Durch diese Lösung kann ein großes Volumenverhältnis der gesamten Pumpkombination erreicht werden. Nachteilig ist allerdings, dass die Roots-Pumpe bei hohen Ansaugdrücken von beispielsweise ca. 100 mbar und mehr, nur wenig Unterstützung für die Vorpumpe liefert. Dies liegt darin begründet, dass ansonsten ein sehr großer Motor an der Roots-Pumpe installiert werden müsste und die Pumpe thermisch stark belastet würde. Furthermore, a combination of backing pumps with the Roots pumps connected in series is known. By this solution, a large volume ratio of the entire pump combination can be achieved. The disadvantage, however, is that the Roots pump at high intake pressures of, for example, about 100 mbar and more, little support for the Forepump delivers. This is due to the fact that otherwise a very large engine would have to be installed on the Roots pump and the pump would be thermally heavily loaded.
Aufgabe der Erfindung ist es, ein Vakuumpumpen-System zu schaffen, bei dem in unterschiedlichen Betriebszuständen einerseits eine hohe insbesondere maximale Förderleistung der Vakuumpumpe, bzw. des Vakuumpumpen- Systems gewährleistet werden kann und andererseits der Energieverbrauch reduziert werden kann. The object of the invention is to provide a vacuum pump system in which a high, in particular maximum delivery rate of the vacuum pump, or of the vacuum pump system can be ensured in different operating conditions on the one hand and on the other hand, the energy consumption can be reduced.
Die Lösung der Aufgabe erfolgt erfindungsgemäß durch ein Vakuumpumpen- System gemäß Anspruch 1. The object is achieved according to the invention by a vacuum pump system according to claim 1.
Das erfindungsgemäße Vakuumpumpen-System zur Evakuierung einer Kammer, bei der es sich insbesondere um eine Schleusen- oder Prozesskammer handelt, weist eine Hauptvakuumpumpe auf. Der Einlass der Hauptvakuumpumpe, bei der es sich in besonders bevorzugter Ausführungsform um eine Schraubenpumpe handelt, ist mit der zu evakuierenden Kammer mittelbar oder unmittelbar verbunden, wobei gegebenenfalls in einer Verbindungsleitung zwischen dem Einlass der Hauptvakuumpumpe und der zu evakuierenden Kammer ein schaltbares Ventil angeordnet sein kann. Mit der Hauptvakuumpumpe ist in Förderrichtung nachgeordnet eine Hilfsvakuumpumpe verbunden. Die Hauptvakuumpumpe weist auslassseitig einen Auslassbereich auf, bei dem es sich insbesondere um eine Kammer bzw. einen Raum handelt. Mit diesem Auslassbereich sind einerseits ein Hauptauslass und andererseits ein Einlass der Hilfsvakuumpumpe verbunden. Der Auslass der Hilfsvakuumpumpe ist sodann mit dem Hauptauslass verbunden. The vacuum pump system according to the invention for evacuating a chamber, which is in particular a lock or process chamber, has a main vacuum pump. The inlet of the main vacuum pump, which is in a particularly preferred embodiment is a screw pump, is indirectly or directly connected to the chamber to be evacuated, optionally in a connecting line between the inlet of the main vacuum pump and the chamber to be evacuated a switchable valve can be arranged , An auxiliary vacuum pump is connected downstream of the main vacuum pump in the conveying direction. The main vacuum pump has an outlet on the outlet side, which is in particular a chamber or a room. On the one hand, a main outlet and, on the other hand, an inlet of the auxiliary vacuum pump are connected to this outlet region. The outlet of the auxiliary vacuum pump is then connected to the main outlet.
Vorzugsweise handelt es sich bei der Hilfsvakuumpumpe um eine Seitenkanalpumpe und besonders bevorzugt um eine Roots-Pumpe. Insbesondere das Vorsehen einer Roots-Pumpe hat den Vorteil, dass diese während der Haltezeit nur eine sehr geringe Energieaufnahme aufweist. Preferably, the auxiliary vacuum pump is a side channel pump, and more preferably a roots pump. In particular, the provision of a Roots pump has the advantage that it has only a very low energy consumption during the holding time.
Um ein Zurückströmen von Medium, das von der Hilfsvakuumpumpe in den Hauptauslass gepumpt wurde, zurück in den Auslassbereich der Hauptvakuumpumpe zu vermeiden, ist in dem Hauptauslass ein Rückschlagventil angeordnet. Dieses Rückschlagventil ist in Strömungsrichtung in dem Hauptauslass angeordnet, bevor in den Hauptauslass der Auslass der Hilfsvakuumpumpe einmündet. Bei dem Rückschlagventil kann es sich um ein mechanisches oder auch um ein regel- bzw. schaltbares Rückschlagventil handeln. In order to prevent backflow of medium, which has been pumped by the auxiliary vacuum pump into the main outlet, back into the outlet region of the main vacuum pump, a check valve is arranged in the main outlet. This check valve is arranged in the flow direction in the main outlet before the outlet of the auxiliary vacuum pump opens into the main outlet. The non-return valve may be a mechanical check valve or a check valve which can be switched on or off.
Vorzugsweise sind die Hauptvakuumpumpe, bei der es sich insbesondere um eine Schraubenpumpe handelt, und die Hilfsvakuumpumpe, bei der es sich insbesondere um eine Roots-Pumpe handelt, in einem gemeinsamen Gehäuse angeordnet. Hierdurch ist eine sehr kompakte Bauweise möglich. Des Weiteren ist es bevorzugt, dass die Pumpen mit einem gemeinsamen Antriebsmotor verbunden sind. Hierdurch können Herstellungs- und Energiekosten reduziert werden. Preferably, the main vacuum pump, which is in particular a screw pump, and the auxiliary vacuum pump, which is in particular a Roots pump, are arranged in a common housing. This makes a very compact design possible. Furthermore, it is preferred that the pumps are connected to a common drive motor. As a result, manufacturing and energy costs can be reduced.
Bei einer besonders bevorzugten Ausführungsform sind zumindest ein Förderelement der Hauptvakuumpumpe und zumindest ein Förderelement der Hilfsvakuumpumpe auf einer gemeinsamen Welle angeordnet. Insbesondere wenn als Hauptvakuumpumpe eine Schraubenpumpe und als Hilfsvakuumpumpe eine Roots-Pumpe vorgesehen sind, ist es besonders bevorzugt, dass beide Förderelemente der Hauptvakuumpumpe mit jeweils einem der beiden Förderelemente der Hilfsvakuumpumpe auf einer gemeinsamen Welle angeordnet sind. Hierdurch ist eine sehr kompakte und energiesparende Bauweise realisiert. Besonders bevorzugt ist es hierbei wiederum, dass der Antriebsmotor eine der beiden Wellen antreibt und über ein zwischengeschaltetes Getriebe oder unmittelbar ineinander greifende Zahnräder ein synchrones Antreiben der zweiten Welle gewährleistet ist. Die Hauptvakuumpumpe weist vorzugsweise eine innere Verdichtung auf, die >2 und besonders bevorzugt >3 ist. Die Hilfsvakuumpumpe weist vorzugsweise keine oder eine sehr geringe innere Verdichtung auf, die insbesondere <2 ist. Besonders bevorzugt ist es, dass die Hilfsvakuumpumpe keine oder zumindest annähernd keine innere Verdichtung aufweist. Dies vereinfacht die Fertigung; eine immer Verdichtung der Hilfspumpe ist aufgrund der großen Abstufung zur Hauptpumpe wenig lohnenswert. In a particularly preferred embodiment, at least one conveying element of the main vacuum pump and at least one conveying element of the auxiliary vacuum pump are arranged on a common shaft. In particular, when a screw pump is provided as the main vacuum pump and a Roots pump as the auxiliary vacuum pump, it is particularly preferred that both conveying elements of the main vacuum pump are arranged with one of the two conveying elements of the auxiliary vacuum pump on a common shaft. As a result, a very compact and energy-saving design is realized. In this case, it is again particularly preferred for the drive motor to drive one of the two shafts and to ensure synchronous driving of the second shaft via an intermediate gear or directly meshing gears. The main vacuum pump preferably has an internal compression which is> 2 and more preferably> 3. The auxiliary vacuum pump preferably has no or very little internal compression, which is in particular <2. It is particularly preferred that the auxiliary vacuum pump has no or at least approximately no internal compression. This simplifies the production; always a compression of the auxiliary pump is not worthwhile due to the large gradation to the main pump.
Das Saugvermögen der Hilfsvakuumpumpe ist in bevorzugter The pumping speed of the auxiliary vacuum pump is more preferable
Ausführungsform kleiner als — , insbesondere kleiner als - des Embodiment smaller than -, in particular smaller than - the
10 5 10 5
Saugvermögens der Hauptvakuumpumpe. Hierdurch ergibt sich eine hohe innere Verdichtung der Gesamtpumpe (Hauptpumpe und Hilfspumpe) und damit eine geringe Leistungsaufnahme. Suction capacity of the main vacuum pump. This results in a high internal compression of the entire pump (main pump and auxiliary pump) and thus a low power consumption.
Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform, unter Bezugnahme auf die anliegende Zeichnung näher erläutert. The invention will be explained in more detail with reference to a preferred embodiment, with reference to the accompanying drawings.
Die Zeichnung zeigt eine schematische Schnittansicht einer bevorzugten Ausführungsform des erfindungsgemäßen Vakuumpumpen-Systems. The drawing shows a schematic sectional view of a preferred embodiment of the vacuum pump system according to the invention.
In der schematischen Darstellung einer bevorzugten Ausführungsform der Erfindung ist in einem gemeinsamen Gehäuse 10 eine Schraubenpumpe 12 angeordnet. Die Schraubenpumpe 12 weist zwei jeweils auf einer Rotorwelle 14, 16 angeordnete schraubenförmige Rotorelemente 18 auf. In the schematic illustration of a preferred embodiment of the invention, a screw pump 12 is arranged in a common housing 10. The screw pump 12 has two helical rotor elements 18 each arranged on a rotor shaft 14, 16.
Die beiden Rotorwellen 16, 18 ragen durch eine Zwischenwand 20 des Gehäuses hindurch und tragen jeweils ein Rotorelement 22 einer Roots-Pumpe 24. Die in der Zeichnung linke Welle 14 ist ferner mit einem elektrischen Antriebsmotor 26 verbunden. The two rotor shafts 16, 18 project through an intermediate wall 20 of the housing and each carry a rotor element 22 of a roots pump 24. The left in the drawing shaft 14 is further connected to an electric drive motor 26.
Der Elektromotor 26 treibt die Welle 14 an. Die Welle 16 wird über Zahnräder 28, die jeweils mit einer der beiden Wellen 14, 16 verbunden sind, angetrieben. The electric motor 26 drives the shaft 14. The shaft 16 is driven by gears 28, which are each connected to one of the two shafts 14, 16.
Ein Einlass 30 der Hauptvakuumpumpe 12 ist beispielsweise über eine Verbindungsleitung 31 mit einer nicht dargestellten, zu evakuierenden Kammer verbunden. Die Schraubenpumpe 12 fördert das Medium sodann in einen Auslassbereich 32 bzw. eine Auslasskammer 32. Aus dieser gelangt das Medium durch den Hauptauslass 34. In dem Hauptauslass 34 ist ferner ein Rückschlagventil 36 angeordnet. An inlet 30 of the main vacuum pump 12 is connected, for example via a connecting line 31 with a not shown, to be evacuated chamber. The screw pump 12 then conveys the medium into an outlet region 32 and an outlet chamber 32, respectively. From this, the medium passes through the main outlet 34. A nonreturn valve 36 is also arranged in the main outlet 34.
Insbesondere im Haltebetrieb wird ein geringes Volumen an Medium durch einen Einlass 38 der Hilfsvakuumpumpe 24 angesogen und durch einen Auslass 40 der Hilfsvakuumpumpe ausgestoßen. Der Auslass 40 ist mit dem Hauptauslass 34 verbunden, wobei die Verbindung in Strömungsrichtung in dem Hauptauslass 34 hinter dem Rückschlagventil 36 erfolgt. In particular, in the hold mode, a small volume of medium is drawn through an inlet 38 of the auxiliary vacuum pump 24 and expelled through an outlet 40 of the auxiliary vacuum pump. The outlet 40 is connected to the main outlet 34, wherein the connection takes place in the flow direction in the main outlet 34 behind the check valve 36.

Claims

Patentansprüche claims
1. Vakuumpumpen-System zur Evakuierung einer Kammer, insbesondere einer Schleusen- oder Prozesskammer, mit einer Hauptvakuumpumpe (12), deren Einlass (30) mit der zu evakuierenden Kammer verbunden ist, einer der Hauptvakuumpumpe (12) in Förderrichtung nachgeordneten Hilfsvakuumpumpe (24), wobei die Hauptvakuumpumpe (12) einen Auslassbereich (32) aufweist, der einerseits mit einem Hauptauslass (34) und andererseits mit einem Einlass (38) der Hilfsvakuumpumpe (24) verbunden ist und wobei ein Auslass (40) der Hilfsvakuumpumpe mit dem Hauptauslass (34) verbunden ist. 1. Vacuum pump system for evacuating a chamber, in particular a lock or process chamber, with a main vacuum pump (12) whose inlet (30) is connected to the chamber to be evacuated, one of the main vacuum pump (12) downstream in the conveying direction auxiliary vacuum pump (24). in which the main vacuum pump (12) has an outlet region (32) which is connected on one side to a main outlet (34) and on the other side to an inlet (38) of the auxiliary vacuum pump (24) and wherein an outlet (40) of the auxiliary vacuum pump is connected to the main outlet (32). 34) is connected.
2. Vakuumpumpen-System nach Anspruch 1, dadurch gekennzeichnet, dass im Hauptauslass (34) ein Rückschlagventil (36) angeordnet ist, das ein Zurückströmen von Medium in den Auslassbereich (32) verhindert. 2. Vacuum pump system according to claim 1, characterized in that in the main outlet (34) a check valve (36) is arranged, which prevents a backflow of medium into the outlet region (32).
3. Vakuumpumpen-System nach Anspruch 2, dadurch gekennzeichnet, dass der Auslass (40) der Hilfsvakuumpumpe (24) in Strömungsrichtung nach dem Rückschlagventil (36) mit dem Hauptauslass (34) verbunden ist. 3. Vacuum pump system according to claim 2, characterized in that the outlet (40) of the auxiliary vacuum pump (24) in the flow direction after the check valve (36) with the main outlet (34) is connected.
4. Vakuumpumpen-System nach einem der Ansprüche 1 - 3, dadurch gekennzeichnet, dass die Hauptvakuumpumpe (12) und die Hilfsvakuumpumpe (24) in einem gemeinsamen Gehäuse (10) angeordnet sind. 4. Vacuum pump system according to one of claims 1 - 3, characterized in that the main vacuum pump (12) and the auxiliary vacuum pump (24) are arranged in a common housing (10).
5. Vakuumpumpen-System nach einem der Ansprüche 1 - 4, dadurch gekennzeichnet, dass die Hauptvakuumpumpe (12) und die Hilfsvakuumpumpe (24) mit einem gemeinsamen Antriebsmotor (26) verbunden sind. 5. Vacuum pump system according to one of claims 1 - 4, characterized in that the main vacuum pump (12) and the auxiliary vacuum pump (24) are connected to a common drive motor (26).
6. Vakuumpumpen-System nach einem der Ansprüche 1 - 5, dadurch gekennzeichnet, dass die Hauptvakuumpumpe (12) als Schraubenpumpe ausgebildet ist. 6. Vacuum pump system according to one of claims 1-5, characterized in that the main vacuum pump (12) is designed as a screw pump.
7. Vakuumpumpen-System nach einem der Ansprüche 1 - 6, dadurch gekennzeichnet, dass die Hilfsvakuumpumpe (24) als Roots-, Klauenoder Seitenkanalpumpe ausgebildet ist. 7. Vacuum pump system according to one of claims 1-6, characterized in that the auxiliary vacuum pump (24) is designed as Roots-, claw or side channel pump.
8. Vakuumpumpen-System nach einem der Ansprüche 1 - 7, dadurch gekennzeichnet, dass zumindest ein Förderelement (18) der Hauptvakuumpumpe (12) und zumindest ein Förderelement (22) der Hilfsvakuumpumpe (24) auf einer gemeinsamen Welle (14, 16) angeordnet ist. 8. Vacuum pump system according to one of claims 1-7, characterized in that arranged at least one conveying element (18) of the main vacuum pump (12) and at least one conveying element (22) of the auxiliary vacuum pump (24) on a common shaft (14, 16) is.
9. Vakuumpumpen-System nach Anspruch 8, dadurch gekennzeichnet, dass die beiden Förderelemente (18) der Hauptvakuumpumpe (12) mit jeweils einem der beiden Förderelemente (22) der Hilfsvakuumpumpe (24) auf jeweils einer gemeinsamen Welle (14, 16) angeordnet sind. 9. Vacuum pump system according to claim 8, characterized in that the two conveying elements (18) of the main vacuum pump (12) each having one of the two conveying elements (22) of the auxiliary vacuum pump (24) are each arranged on a common shaft (14, 16) ,
10. Vakuumpumpen-System nach Anspruch 8 oder 9, dadurch gekennzeichnet, dass der Antriebsmotor (26) eine der beiden Wellen (14) antreibt. 10. Vacuum pump system according to claim 8 or 9, characterized in that the drive motor (26) drives one of the two shafts (14).
11. Vakuumpumpen-System nach einem der Ansprüche 1 - 10, dadurch gekennzeichnet, dass die Hauptvakuumpumpe (12) eine innere Verdichtung von mindestens >2 aufweist. 11. Vacuum pump system according to one of claims 1-10, characterized in that the main vacuum pump (12) has an internal compression of at least> 2.
12. Vakuumpumpen-System nach einem der Ansprüche 1 - 11, dadurch gekennzeichnet, dass die Hilfsvakuumpumpe (24) eine innere Verdichtung von weniger als 2, insbesondere aber keine innere Verdichtung aufweist. 12. Vacuum pump system according to one of claims 1-11, characterized in that the auxiliary vacuum pump (24) has an internal compression of less than 2, but in particular no internal compression.
13. Vakuumpumpen-System nach einem der Ansprüche 1 - 12, dadurch gekennzeichnet, dass das Saugvermögen der Hilfsvakuumpumpe (24) kleiner als — , insbesondere kleiner als - des Saugvermögens in der 13. Vacuum pump system according to one of claims 1 - 12, characterized in that the pumping speed of the auxiliary vacuum pump (24) is smaller than -, in particular smaller than - the pumping speed in the
10 5  10 5
Hauptvakuumpumpe (12) ist.  Main vacuum pump (12) is.
EP15729446.3A 2014-06-26 2015-06-15 Vacuum pump system Active EP3161317B1 (en)

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DE202014005279.4U DE202014005279U1 (en) 2014-06-26 2014-06-26 Vacuum system
PCT/EP2015/063287 WO2015197396A1 (en) 2014-06-26 2015-06-15 Vacuum pump system

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WO2015197396A1 (en) 2015-12-30
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JP2017520715A (en) 2017-07-27
US20170122319A1 (en) 2017-05-04
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KR20170010410A (en) 2017-01-31
US10465686B2 (en) 2019-11-05

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