EP1571340B1 - Pompe à vide à déplacement positif avec compression interne - Google Patents

Pompe à vide à déplacement positif avec compression interne Download PDF

Info

Publication number
EP1571340B1
EP1571340B1 EP04005342A EP04005342A EP1571340B1 EP 1571340 B1 EP1571340 B1 EP 1571340B1 EP 04005342 A EP04005342 A EP 04005342A EP 04005342 A EP04005342 A EP 04005342A EP 1571340 B1 EP1571340 B1 EP 1571340B1
Authority
EP
European Patent Office
Prior art keywords
suction
pressure
vacuum pump
internal compression
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04005342A
Other languages
German (de)
English (en)
Other versions
EP1571340A1 (fr
Inventor
Johannes Dr. Eickhoff
Heiner Dr. Kösters
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sterling Industry Consult GmbH
Original Assignee
Sterling Industry Consult GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sterling Industry Consult GmbH filed Critical Sterling Industry Consult GmbH
Priority to AT04005342T priority Critical patent/ATE508280T1/de
Priority to DE502004012468T priority patent/DE502004012468D1/de
Priority to EP04005342A priority patent/EP1571340B1/fr
Publication of EP1571340A1 publication Critical patent/EP1571340A1/fr
Application granted granted Critical
Publication of EP1571340B1 publication Critical patent/EP1571340B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the invention relates to a dry displacement vacuum pump according to the preamble of claim 1.
  • a dry displacement vacuum pump is known from EP 1 111 243 A2 or off US 5,951,266 ( Figure 10).
  • the invention is therefore an object of the invention to provide a dry-running Verdrängervakuumpumpe according to the preamble of claim 1, which shows an improved performance without the mentioned difficulties at higher suction pressures.
  • the solution according to the invention consists in the features of claim 1 and preferably in those of the subclaims.
  • a dry displacement vacuum pump has a plurality of chambers arranged one behind the other, the volume of which decreases for the purpose of internal compression from the suction side to the pressure side. It is assumed that the chambers have leak openings, namely in particular the inevitable gap between the displacers and the housing and between the displacers.
  • the measure according to the invention consists in that the leak-opening cross-section of at least one suction-side chamber is greater than that of a pressure-side chamber, the different leak-opening cross-section being based at least in part on different gap width.
  • the higher suction-side leakage losses at high intake pressure cause a reduction in internal compression and thus a reduction in the problems associated with heat generation and power consumption.
  • Molecular flow occurs when the mean free path of the molecules is not significantly less than the characteristic cross-sectional dimension of the opening. Viscous flow occurs when the mean free path is much smaller than the cross-sectional dimension.
  • Knudsen flow designates the transition region between the two types of flow mentioned.
  • the teaching according to the invention generally results in the fact that the gap widths between the displacer and the housing and between displacer pairs in the suction-side region of the pump are made substantially larger than in the pressure-side region, with the gaps being as narrow as possible in the pressure-side region, as is generally the case ,
  • the invention effectively avoids the over-compression even in the range of 200 to 300 millibars and thereby makes oversizing of cooling and drive unnecessary.
  • a high internal compression is possible, which reduces power and cooling at low suction pressures or increases the pumping speed.
  • the displacer is equipped with a high geometric compression ratio
  • the internal compression at the suction side is so low in the medium and high pressure ranges (over 200 millibars) that the effective internal compression and thus the power consumption are significantly lower than the theoretical compression due to the geometric Verdränger2020 calculated, remaining.
  • this decreases the pumping speed at high pressures; however, at low pressures, where it is mainly needed, a much higher pumping speed can be achieved with low drive power.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (3)

  1. Pompe à vide volumétrique sèche, comportant plusieurs chambres, qui sont fermées en laissant des ouvertures de fuite et disposées les unes derrière les autres et dont les volumes diminuent à partir du côté aspiration vers le côté pression, caractérisée en ce que la section des ouvertures de fuite d'au moins une chambre du côté aspiration est supérieure à celle d'une chambre du côté pression, et en ce que la section différente des ouvertures de fuite est basée au moins en partie sur la largeur de fente différente.
  2. Pompe à vide selon la revendication 1, caractérisée en ce qu'il s'agit d'une pompe à broche hélicoïdale et les chambres sont formées sur les mêmes broches.
  3. Pompe à vide selon la revendication 1 ou 2, caractérisée en ce qu'elle est configurée pour une vitesse de rotation plus faible en présence d'une pression moyenne et élevée du côté aspiration qu'en présence d'une faible pression du côté aspiration.
EP04005342A 2004-03-05 2004-03-05 Pompe à vide à déplacement positif avec compression interne Expired - Lifetime EP1571340B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT04005342T ATE508280T1 (de) 2004-03-05 2004-03-05 Trockene verdrängervakuumpumpe mit innerer verdichtung
DE502004012468T DE502004012468D1 (de) 2004-03-05 2004-03-05 Trockene Verdrängervakuumpumpe mit innerer Verdichtung
EP04005342A EP1571340B1 (fr) 2004-03-05 2004-03-05 Pompe à vide à déplacement positif avec compression interne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04005342A EP1571340B1 (fr) 2004-03-05 2004-03-05 Pompe à vide à déplacement positif avec compression interne

Publications (2)

Publication Number Publication Date
EP1571340A1 EP1571340A1 (fr) 2005-09-07
EP1571340B1 true EP1571340B1 (fr) 2011-05-04

Family

ID=34746023

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04005342A Expired - Lifetime EP1571340B1 (fr) 2004-03-05 2004-03-05 Pompe à vide à déplacement positif avec compression interne

Country Status (3)

Country Link
EP (1) EP1571340B1 (fr)
AT (1) ATE508280T1 (fr)
DE (1) DE502004012468D1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117419337B (zh) * 2023-11-10 2024-07-26 中国矿业大学 带有稳火装置的瓦斯脉动燃烧器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1111243A2 (fr) * 1999-12-23 2001-06-27 The BOC Group plc Pompe à vide à vis

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2619468B2 (ja) * 1988-04-06 1997-06-11 株式会社日立製作所 無給油式スクリュー流体機械
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US20030126733A1 (en) * 2002-01-07 2003-07-10 Bush James W. Method to rough size coated components for easy assembly

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1111243A2 (fr) * 1999-12-23 2001-06-27 The BOC Group plc Pompe à vide à vis

Also Published As

Publication number Publication date
EP1571340A1 (fr) 2005-09-07
DE502004012468D1 (de) 2011-06-16
ATE508280T1 (de) 2011-05-15

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