EP2567096B1 - Pompe à vide à vis - Google Patents

Pompe à vide à vis Download PDF

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Publication number
EP2567096B1
EP2567096B1 EP11718056.2A EP11718056A EP2567096B1 EP 2567096 B1 EP2567096 B1 EP 2567096B1 EP 11718056 A EP11718056 A EP 11718056A EP 2567096 B1 EP2567096 B1 EP 2567096B1
Authority
EP
European Patent Office
Prior art keywords
screw
vacuum pump
rotor
type vacuum
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP11718056.2A
Other languages
German (de)
English (en)
Other versions
EP2567096A2 (fr
Inventor
Thomas Dreifert
Magnus Janicki
Peter Birch
Roland Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2567096A2 publication Critical patent/EP2567096A2/fr
Application granted granted Critical
Publication of EP2567096B1 publication Critical patent/EP2567096B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a screw vacuum pump.
  • Screw vacuum pumps have two screw rotors in a pump chamber formed by a pump chamber.
  • the screw rotors are usually mounted on two sides and may have differently shaped pitch profiles.
  • the rotors may have a symmetrical or asymmetrical tooth profile, such as in " Wutz ", Handbook Vacuum Technology, 10th edition, 2010 pp. 270-277 described.
  • Such rotors usually have a built-in compression ratio, ie a ratio of the chamber volume of the suction-side chamber to the pressure-side chamber of less than 4. Higher compression ratios lead to very high power consumption at high suction pressures. This would require the use of disproportionately large drive motors (see “Wutz", loc. Cit., Page 276).
  • one-sided, or overhung rotors are known. This has the significant advantage that only one bearing must be provided. This is arranged on the pressure side, or on the side of the transmission. The second bearing, which is arranged on the suction side in the region of low pressures, can be omitted here. Flying rotors mounted on the fly must, however, have short rotors, otherwise there is a risk of contact between the rotors during operation. The relatively short length of the rotors has the consequence that the number of turns is small. Furthermore, overhung rotors have a relatively large diameter. The ratio of the rotor length to the distance between the rotor axes is usually less than 2.5.
  • a screw vacuum pump in which the built-in compression ratio can be increased up to 10 by varying the pitch of the screw rotors used or a variation of the tooth height of the screw rotors used.
  • the variation can be provided stepwise or continuously.
  • the object of the invention is to provide a screw vacuum pump with a "built-in compression ratio" of at least 4.5, wherein a simple heat dissipation is realized.
  • the screw vacuum pump according to the invention has a pump housing forming a pump chamber.
  • two screw rotors are arranged in the pump housing. Since the screw rotors according to the invention are long, it is in each case mounted on both sides screw rotors, so that each screw rotor two bearing elements are provided. Furthermore, the screw rotors have a relatively small diameter, so that the ratio of the length of the screw rotor to the spacing of the rotor axes is greater than 3.0, in particular greater than 3.5 and particularly preferably greater than 4.0. Furthermore, the screw rotors according to the invention have a variable pitch and at least 7, in particular at least 9 and particularly preferably at least 11 turns. The compression ratio according to the invention is at least 4.5, preferably at least 5.
  • the rotor has several windings on the pressure side, whose pitch varies only slightly or not. According to the invention, therefore, the slope in the region at half of the turns less than twice the slope at the rotor outlet. In particular, the slope in the region at half of the windings is smaller than the 2-fold pitch, particularly preferably smaller than the 1.5-fold pitch at the rotor outlet. Due to the small pitch change according to the invention on the pressure side of the rotors and the preferably correspondingly selected gap height, the compression takes place over a relatively long region of the rotor. This has the significant advantage according to the invention that better heat dissipation is possible.
  • the inventive design of the screw rotors with a high volume ratio built-in also has the advantage that at low pressures, the power consumption is low. As a result, a power consumption based on the pumping speed of less than 12 W / (m 3 h) for outlet pressures below 10 mbar can be realized.
  • the heat dissipation takes place exclusively via the pump housing.
  • the heat dissipation therefore preferably takes place exclusively via the pump housing.
  • a rotor internal cooling which is technically complex, must therefore not be provided.
  • the provision according to the invention of a plurality of turns with a small change in pitch in the pressure-side region of the rotors has the advantage that the noise development is markedly reduced. This is due to the fact that the compression takes place over a longer range and thus the pressure difference between the last chamber and the region of the gas outlet is lower. As a result, the re-venting is reduced, with the re-venting pressure waves that cause the noise. Due to the lower recirculation, the noise of free blowing is reduced by 3 to 6 dB (A). This has the significant advantage that a smaller sound-damping element can be provided. Due to the possibility of the construction volume of Damper to reduce, thus, the increase in the length of the vacuum pump due to the longer screw rotors can be at least partially compensated again.
  • the profile of the screw rotors is substantially symmetrical.
  • trapezoidal profiles, cycloidal profiles or involute profiles are preferred here.
  • the gap height i. H. in particular, the distance between the screw rotors and the housing inner wall is selected such that the compression extends over a relatively long area on the outlet side of the rotor.
  • Particularly preferred here in the cold state of the turbomolecular pump is a ratio cold gap height / axial distance> 2/1000.
  • the gap heights are preferably chosen such that, during final pressure operation, an average chamber pressure of 100 mbar is not reached until after about 20% of the rotor length, measured from the starting side.
  • the screw vacuum pump according to the invention has a rated speed of more than 5000 revolutions per minute.
  • a pressure relief valve may be provided. Instead of or in addition to the provision of a relief valve, it is possible to provide a speed control. By a corresponding lowering of the speed also over-compression can be avoided. By both measures, the power consumption at high intake pressures and thus the installed engine power can be effectively reduced.
  • the two in Fig. 1 shown screw rotors are arranged in a pump housing, not shown.
  • the pump housing of the pump chamber 10 is formed, in which the two screw rotors 12, 14 are arranged.
  • the two screw rotors have shaft projections 16, 18 on both sides, which are each rotatably supported by bearing elements 20 in the pump housing.
  • the second screw rotor is driven by a corresponding toothing (not shown) by the same drive motor, so that the two screw rotors 12, 14 are synchronized with each other and rotate in the opposite direction.
  • the screw rotors suck the medium to be delivered on a suction side (arrow 22) and eject the medium on a pressure side (arrow 24).
  • the pitch of the screw rotors is represented by the oblique lines 26.
  • the pitch varies over the length l of the rotor.
  • the slope is significantly lower than in the suction-side region 30.
  • the gradient in the pressure-side region 28 is inventively designed such that the slope in the region 31 at half of the turns at most twice the slope at Rotor outlet 24 is. This has the consequence that a relatively long pressure-side region 28 is formed by the slope changes only slightly.
  • the compression takes place over the majority of the pressure difference between inlet and outlet.
  • the heat to be dissipated is generated essentially in this area.
  • the heat is dissipated according to the invention by the housing surrounding the screw rotors 12, 14 in the pressure-side region.
  • the ratio of the length l of the screw rotors 12, 14 to the distance d of the rotor axes is therefore greater than 3.0 according to the invention.
  • Fig. 2 in the upper part of an inventive screw rotor 12 is shown, the screw rotor 12, 14 in Fig. 1 equivalent.
  • a screw rotor 32 is shown in the prior art.
  • the screw rotor 32 is shorter and has a smaller number of turns in the pressure-side area, in which the pitch changes only slightly.
  • a pressure curve as shown schematically by the line 34. It can be seen that in the pressure-side region 36 of the screw rotor 32, a strong increase in pressure occurs.
  • the pressure-side region 28 is significantly longer. Furthermore, the gap height is selected accordingly (cold gap height / axial distance> 2/1000 and hot gap height / axial distance> 12/1000). This results in the pressure increase corresponding to the line 38 in the diagram, which runs flatter.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (10)

  1. Pompe à vide à vis, comportant :
    un carter de pompe, formant une chambre d'aspiration (10),
    deux rotors à vis (12, 14), disposés dans la chambre d'aspiration (10), dont chacun est logé dans le carter de pompe par l'intermédiaire de deux éléments de palier (20), et dont le rapport de la longueur (l) du rotor à l'écartement entre les axes (d) des rotors est supérieur à 3,0,
    les rotors à vis (12, 14) présentant un pas variable, au moins 7 spires, et un rapport de compression intégré d'au moins 4,5,
    caractérisée en ce que le pas, dans la zone correspondant à la moitié des spires, est inférieur au double du pas au niveau de l'orifice de sortie (24) du rotor côté compression.
  2. Pompe à vide à vis selon la revendication 1, caractérisée en ce que chaque rotor à vis (12, 14) ne comprend qu'un pas de vis.
  3. Pompe à vide à vis selon l'une des revendications 1 ou 2, caractérisée en ce que le profil des rotors à vis (12, 14) est pour l'essentiel symétrique ou asymétrique.
  4. Pompe à vide à vis selon l'une des revendications 1-3, caractérisée en ce que, pour l'évacuation de la chaleur, exclusivement le carter de pompe est soumis à un refroidissement actif.
  5. Pompe à vide à vis selon l'une des revendications 1-4, caractérisée en ce que le rapport entre la longueur (l) du rotor et l'écartement entre les axes (d) du rotor est supérieur à 3,5, en particulier supérieur à 4.
  6. Pompe à vide à vis selon l'une des revendications 1-5, caractérisée en ce que sont prévues au moins 9, de préférence au moins 11 spires par rotor à vis (12, 14).
  7. Pompe à vide à vis selon l'une des revendications 1-6, caractérisée en ce que le rapport de compression est d'au moins 5, de préférence d'au moins 6.
  8. Pompe à vide à vis selon l'une des revendications 1-7, caractérisée en ce que les hauteurs de fente sont choisies de façon qu'il en résulte une pression en sortie de la pompe à vide d'au moins 5 Pa.
  9. Pompe à vide à vis selon l'une des revendications 1-8, caractérisée en ce que la vitesse de rotation maximale est supérieure à 5000 tours par minute.
  10. Pompe à vide à vis selon l'une des revendications 1-9, caractérisée en ce que, pour éviter une surcompression dans la zone côté compression (28), une ou plusieurs soupapes de surpression sont disposées, et/ou en ce que la vitesse de rotation du rotor peut être commandée par un organe de commande de la vitesse de rotation.
EP11718056.2A 2010-05-04 2011-05-03 Pompe à vide à vis Active EP2567096B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010019402A DE102010019402A1 (de) 2010-05-04 2010-05-04 Schrauben-Vakuumpumpe
PCT/EP2011/057042 WO2011138318A2 (fr) 2010-05-04 2011-05-03 Pompe à vide à vis

Publications (2)

Publication Number Publication Date
EP2567096A2 EP2567096A2 (fr) 2013-03-13
EP2567096B1 true EP2567096B1 (fr) 2014-12-17

Family

ID=44626185

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11718056.2A Active EP2567096B1 (fr) 2010-05-04 2011-05-03 Pompe à vide à vis

Country Status (7)

Country Link
EP (1) EP2567096B1 (fr)
JP (1) JP5860035B2 (fr)
KR (1) KR101855398B1 (fr)
CN (1) CN102884324B (fr)
DE (1) DE102010019402A1 (fr)
TW (1) TWI568935B (fr)
WO (1) WO2011138318A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105917100A (zh) * 2014-01-15 2016-08-31 伊顿公司 优化增压器性能的方法
DE102016216279A1 (de) 2016-08-30 2018-03-01 Leybold Gmbh Vakuumpumpen-Schraubenrotor
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe
DE202018000178U1 (de) * 2018-01-12 2019-04-15 Leybold Gmbh Kompressor
CN109162927A (zh) * 2018-08-28 2019-01-08 安徽省华欣能源装备科技有限公司 一种螺杆压缩机的支承装置
CN109139471B (zh) * 2018-09-03 2019-07-02 东北大学 一种具备过压排气功能的卧式无油螺杆真空泵

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DE2329800A1 (de) * 1972-07-06 1974-01-17 H & H Licensing Corp Verfahren und vorrichtung zum verdichten von gasfoermigen medien in schraubenkompressoren
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JP3049793B2 (ja) * 1991-03-04 2000-06-05 松下電器産業株式会社 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH094580A (ja) * 1995-06-16 1997-01-07 Dia Shinku Kk スクリュー真空ポンプ
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
JP2000136786A (ja) * 1998-10-30 2000-05-16 Teijin Seiki Co Ltd 真空ポンプ
EP1070848B1 (fr) * 1999-07-19 2004-04-14 Sterling Fluid Systems (Germany) GmbH Machine à déplacement positif pour des fluides compressibles
JP2001182679A (ja) * 1999-12-22 2001-07-06 Asuka Japan:Kk スクリュー流体機械
GB9930556D0 (en) * 1999-12-23 2000-02-16 Boc Group Plc Improvements in vacuum pumps
JP2001193677A (ja) * 2000-01-11 2001-07-17 Asuka Japan:Kk スクリュー流体機械
CH694339A9 (de) * 2000-07-25 2005-03-15 Busch Sa Atel Zwillingsschraubenrotoren und solche enthaltende Ve rdraengermaschinen.
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
KR200273392Y1 (ko) 2002-01-11 2002-05-03 남기일 가변 리이드를 가지는 스크류형 진공펌프
JP2004263629A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi スクリュー真空ポンプ
DE10334484A1 (de) * 2003-07-29 2005-03-24 Steffens, Ralf, Dr. Trockenverdichtende Spindelvakuumpumpe
CN2893231Y (zh) * 2005-09-15 2007-04-25 梁伯顺 变螺距螺杆真空泵
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
CN201159172Y (zh) * 2008-02-01 2008-12-03 梁伯顺 螺杆真空泵的改进结构

Also Published As

Publication number Publication date
CN102884324B (zh) 2016-06-08
JP2013525690A (ja) 2013-06-20
KR101855398B1 (ko) 2018-05-08
WO2011138318A3 (fr) 2012-08-16
CN102884324A (zh) 2013-01-16
EP2567096A2 (fr) 2013-03-13
JP5860035B2 (ja) 2016-02-16
TWI568935B (zh) 2017-02-01
WO2011138318A2 (fr) 2011-11-10
TW201200733A (en) 2012-01-01
DE102010019402A1 (de) 2011-11-10
KR20130100911A (ko) 2013-09-12

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