EP3137771A1 - Method of pumping in a pumping system and vacuum pump system - Google Patents

Method of pumping in a pumping system and vacuum pump system

Info

Publication number
EP3137771A1
EP3137771A1 EP14721361.5A EP14721361A EP3137771A1 EP 3137771 A1 EP3137771 A1 EP 3137771A1 EP 14721361 A EP14721361 A EP 14721361A EP 3137771 A1 EP3137771 A1 EP 3137771A1
Authority
EP
European Patent Office
Prior art keywords
ejector
vacuum pump
pumping
return valve
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14721361.5A
Other languages
German (de)
French (fr)
Other versions
EP3137771B1 (en
Inventor
Didier MÜLLER
Jean-Eric Larcher
Théodore ILTCHEV
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ateliers Busch SA
Original Assignee
Ateliers Busch SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA
Priority to PL14721361T priority Critical patent/PL3137771T3/en
Priority to PT147213615T priority patent/PT3137771T/en
Publication of EP3137771A1 publication Critical patent/EP3137771A1/en
Application granted granted Critical
Publication of EP3137771B1 publication Critical patent/EP3137771B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type

Definitions

  • the present invention relates to a pumping method for reducing the electrical power consumption as well as the performance in terms of flow and final vacuum in a pumping system whose main pump is a lubricated vane vacuum pump.
  • the present invention relates to a pumping system that can be used to perform the method according to the present invention.
  • Roots booster pumps arranged upstream of the lubricated vane primary pumps.
  • This type of system is cumbersome, works either with by-pass valves having reliability problems, or by employing means of measurement, control, adjustment or control.
  • these control means, adjustment or servo must be controlled in an active manner, which necessarily results in an increase in the number of components of the system, its complexity and its cost.
  • the object of the present invention is to propose a pumping method in a pumping system making it possible to reduce the electrical energy necessary for evacuating a vacuum chamber and maintaining the vacuum in this chamber, as well as for performing a lowering of the temperature of the exit gases.
  • Another object of the present invention is to propose a method of pumping in a pumping system making it possible to obtain a higher flow rate at low pressure than that which can be obtained by means of a vacuum pump with vanes lubricated alone during the pumping a vacuum chamber.
  • Another object of the present invention is to propose a pumping method in a pumping system which makes it possible to obtain a better vacuum than that which can be obtained by means of a vacuum vane pump lubricated alone in a vacuum chamber. .
  • the method essentially consists in supplying the driving fluid and operating the ejector continuously all the time that the lubricated vacuum primary vacuum pump pumps the gases contained in the vacuum chamber by the gas inlet orifice, but also, all the time that the lubricated vane primary vacuum pump maintains a defined pressure (eg the final vacuum) in the chamber by pushing back the gases through its outlet.
  • a defined pressure eg the final vacuum
  • the invention resides in the fact that the coupling of the lubricated vanes primary vacuum pump and the ejector does not require specific measurements and devices (eg pressure sensors, temperature sensors, current, etc.), servocontrols or data and calculation management. Therefore, the pumping system adapted for the implementation of the pumping method according to the present invention comprises a minimum number of components, is very simple and costs significantly less than existing systems.
  • the ejector built into the pumping system can still operate without damage according to this method of pumping. Its dimensioning is conditioned by a minimum motor fluid consumption for the operation of the device. It is normally single-storey. Its nominal flow rate is chosen according to the volume of the outlet duct of the lubricated vane primary vacuum pump, limited by the non-return valve. This flow rate may be 1/500 to 1/20 of the nominal flow rate of the lubricated vane primary vacuum pump, but may also be lower or higher than these values.
  • the driving fluid for the ejector may be compressed air, but also other gases, for example nitrogen.
  • the non-return valve placed in the conduit at the outlet of the lubricated vane primary vacuum pump, may be a standard commercially available element. It is dimensioned according to the rated flow rate of the lubricated vane primary vacuum pump. In particular, it is expected that the check valve return closes when the suction pressure of the lubricated vane primary vacuum pump is between 500 mbar absolute and the final vacuum (eg 100 mbar).
  • the ejector is multi-stage.
  • the ejector may be made of high chemical resistance material substances and gas commonly used in the chemical industry, that of semiconductors, both in the single-stage ejector variant as in that of the multi-stage ejector.
  • the ejector is preferably small.
  • the ejector is integrated in a cartridge which incorporates the non-return valve.
  • the ejector is integrated in a cartridge which incorporates the non-return valve and this cartridge itself is housed in the oil separator of the lubricated vane primary vacuum pump.
  • the flow of gas at the pressure necessary for the operation of the ejector is controlled "all or nothing".
  • the control consists of measuring one or more parameters and putting the ejector into operation or stop it, according to certain predefined rules.
  • the parameters, provided by suitable sensors, are p. ex. the motor current of the lubricated vane vacuum pump, the temperature or pressure of the gases in the volume of the outlet duct of the lubricated vane primary vacuum pump, limited by the check valve, or a combination of these parameters.
  • the pressure is high, for example equal to the atmospheric pressure. Due to the compression in the lubricated vane primary vacuum pump, the pressure of the gases discharged at its outlet is higher than the atmospheric pressure (if the gases at the outlet of the primary pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
  • the lubricated vane primary vacuum pump consumes less and less energy for compression and produces less and less compression heat.
  • the flow of gas at the pressure necessary for the operation of the ejector is provided. by a compressor.
  • this compressor can be driven by the lubricated vane primary pump or, alternatively or additionally, independently, independent of the lubricated vane primary pump.
  • This compressor can draw atmospheric air or gases into the gas outlet duct after the non-return valve. The presence of such a compressor makes the lubricated vane vacuum pump systems independent of a source of compressed gas, which may meet certain industrial environments.
  • the compressor can supply the gas flow at the pressure
  • the compressor is part of the system both in the case of continuous operation of the ejector as in the case of its control according to the parameters, controlled by suitable sensors.
  • FIG. 1 schematically shows a pumping system adapted for carrying out a pumping method according to a first embodiment of the present invention
  • FIG. 2 schematically shows a pumping system adapted for the realization of a pumping method according to a second embodiment of the present invention.
  • FIG. 3 schematically shows a pumping system adapted for the realization of a pumping method according to a third embodiment of the present invention.
  • Figure 1 shows a pump system SP adapted for the implementation of a pumping method according to a first embodiment of the present invention.
  • This pumping system SP comprises an enclosure 1, which is connected to the suction port 2 of a lubricated vane primary vacuum pump 3.
  • the gas outlet port of the lubricated vane primary vacuum pump 3 is connected to the conduit 5.
  • a discharge check valve 6 is placed in the conduit 5, which after this non-return valve 6 continues in the gas outlet conduit 8.
  • the non-return valve 6, when closed allows the formation of a volume 4, between the gas outlet port of the primary vacuum pump 3 and itself.
  • the pumping system SP also comprises an ejector 7, connected in parallel with the non-return valve 6.
  • the suction orifice of the ejector is connected to the volume 4 of the conduit 5 and its discharge orifice is connected to the conduit 8.
  • the supply duct 9 provides the driving fluid for the ejector 7.
  • the driving fluid for the ejector 7 is injected through the feed duct 9. Then, the lubricated vane primary vacuum pump 3 sucks the gases in the pump. 1 enclosure through the conduit 2 connected to its inlet and compresses them to discharge thereafter at its outlet in the conduit 5 by the non-return valve 6. When the closing pressure of the non-return valve 6 is reached, it closes. From this moment the pumping of the ejector 7 gradually lowers the pressure in the volume 4 to the value of its limit pressure. In parallel, the power consumed by the lubricated vane primary vacuum pump 3 gradually decreases. This occurs in a short period of time, for example for a certain cycle in 5 to 10 seconds.
  • FIG. 2 represents a pumping system SP adapted for the implementation of a pumping method according to a second embodiment of the present invention.
  • the system represented in FIG. 2 furthermore comprises a compressor 10 which supplies the gas flow rate at the pressure necessary for the operation of the ejector 7.
  • this compressor 10 can aspire atmospheric air or gases in the gas outlet duct 8 after the non-return valve 6. Its presence makes the pumping system independent of a source of compressed gas, which can meet certain industrial environments.
  • the compressor 10 can be driven by the lubricated vane primary pump 3 or by its own electric motor, so completely independently of the pump 3. In all cases the energy consumption of the compressor 10 when it provides the flow rate of gas at the pressure needed to make
  • FIG. 3 shows a vacuum pump system SPP adapted for implementing a pumping method according to a third embodiment of the present invention.
  • the system represented in FIG. 3 corresponds to a controlled pumping system, which furthermore comprises sensors 1 1, 12, 13 which control p. ex. the motor current (sensor 1 1) of the lubricated vane primary vacuum pump 3, the pressure (sensor 13) of the gases in the volume of the outlet duct of the lubricated vane primary vacuum pump (limited by the check valve) 6), the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane primary vacuum pump (limited by the non-return valve 6) or a combination of these parameters.
  • the lubricated vane primary vacuum pump 3 starts to pump the gases from the vacuum chamber 1, these mentioned parameters (in particular the current of its engine, the temperature and the pressure of the gases in the volume of the duct output 4) begin to change and reach threshold values detected by the corresponding sensors 1 1, 12, 13. This causes the ejector 7 to turn on (after a certain time delay). When these parameters return to initial ranges (out of setpoints) the ejector is stopped (again after a certain delay).
  • the SSP driven pumping system may have as compressed gas source a distribution network or a compressor 10 under the conditions described in FIG. 2.

Abstract

The present invention relates to a method of pumping in a pumping system (SP, SPP) comprising: a primary lubricated vane screw vacuum pump (3) with a gas inlet opening (2) linked to a vacuum chamber (1) and a gas outlet opening (4) that opens into a conduit (5) before opening into the gas outlet (8) of the pumping system (SP, SPP), a check valve (6) positioned in the conduit (5) between the gas outlet opening (4) and the gas outlet (8), and an ejector (7) connected in parallel with the check valve (6). According to said method, the primary lubricated vane screw vacuum pump (3) is operated in order to pump the gases contained in the vacuum pump (1) through the gas outlet opening (4); simultaneously, the ejector (7) is supplied with motive medium, and the ejector (7) continues to be supplied with motive medium throughout the time that the primary lubricated vane vacuum pump (3) is pumping the gases contained in the vacuum chamber (1) and/or throughout the time that the primary lubricated vane vacuum pump (3) is maintaining a predefined pressure in the vacuum chamber (1). The present invention also relates to a pumping system (SP, SPP) suitable for being used for implementing said method.

Description

Méthode de pompage dans un système de pompage  Pumping method in a pumping system
et système de pompes à vide  and vacuum pump system
Domaine technique de l'invention Technical field of the invention
La présente invention se rapporte à une méthode de pompage permettant de réduire la consommation d'énergie électrique ainsi que les performances en termes de débit et vide final dans un système de pompage dont la pompe principale est une pompe à vide à palettes lubrifiées. The present invention relates to a pumping method for reducing the electrical power consumption as well as the performance in terms of flow and final vacuum in a pumping system whose main pump is a lubricated vane vacuum pump.
Egalement, la présente invention se rapporte à un système de pompage qui peut être utilisé pour réaliser la méthode selon la présente invention. Also, the present invention relates to a pumping system that can be used to perform the method according to the present invention.
Art antérieur Prior art
Les tendances générales d'augmentation des performances des pompes à vide, de réduction des coûts des installations et de la consommation d'énergie dans les industries ont apporté des évolutions significatives en termes de performances, d'économie d'énergie, d'encombrement, dans les entraînements, etc. The general trends of increasing the performance of vacuum pumps, reducing plant costs and energy consumption in the industry have brought significant changes in terms of performance, energy savings, space requirements, in training, etc.
L'état de la technique montre que pour améliorer le vide final et réduire la consommation d'énergie il faut rajouter des étages supplémentaires dans les pompes à vide de type Roots multi-étagées ou Claws multi-étagées. Pour les pompes à vide à vis il faut mettre des tours supplémentaires aux vis, et/ou augmenter le taux de compression interne. Pour les pompes à vide à palettes lubrifiées il faut également rajouter un ou plusieurs étages The state of the art shows that in order to improve the final vacuum and to reduce the energy consumption, it is necessary to add additional stages in the multi-stage Roots or multi-stage Claws vacuum pumps. For screw vacuum pumps it is necessary to put additional turns on the screws, and / or to increase the internal compression ratio. For vacuumed vane vacuum pumps, one or more stages must also be added
supplémentaires en série et augmenter le taux de compression interne. additional serial and increase the internal compression ratio.
L'état de la technique concernant les systèmes de pompage qui visent l'amélioration du vide final et l'augmentation du débit montre des pompes booster de type Roots agencées en amont des pompes primaires à palettes lubrifiées. Ce type de systèmes est encombrant, fonctionne soit avec des clapets by-pass présentant des problèmes de fiabilité, soit en employant des moyens de mesure, contrôle, réglage ou asservissement. Cependant, ces moyens de contrôle, réglage ou asservissement doivent être pilotés d'une manière active, ce qui résulte forcément en une augmentation du nombre de composants du système, de sa complexité et de son coût. The state of the art concerning pumping systems aimed at improving the final vacuum and increasing the flow rate shows Roots booster pumps arranged upstream of the lubricated vane primary pumps. This type of system is cumbersome, works either with by-pass valves having reliability problems, or by employing means of measurement, control, adjustment or control. However, these control means, adjustment or servo must be controlled in an active manner, which necessarily results in an increase in the number of components of the system, its complexity and its cost.
Résumé de l'invention Summary of the invention
La présente invention a pour but de proposer une méthode de pompage dans un système de pompage permettant de réduire l'énergie électrique nécessaire pour la mise sous vide d'une enceinte à vide et le maintien du vide dans cette enceinte, ainsi que de réaliser une baisse de la température des gaz de sortie. The object of the present invention is to propose a pumping method in a pumping system making it possible to reduce the electrical energy necessary for evacuating a vacuum chamber and maintaining the vacuum in this chamber, as well as for performing a lowering of the temperature of the exit gases.
La présente invention a aussi pour but de proposer une méthode de pompage dans un système de pompage permettant d'obtenir un débit supérieur à basse pression à celui qui peut être obtenu à l'aide d'une pompe à vide à palettes lubrifiées seule lors du pompage d'une enceinte à vide. Another object of the present invention is to propose a method of pumping in a pumping system making it possible to obtain a higher flow rate at low pressure than that which can be obtained by means of a vacuum pump with vanes lubricated alone during the pumping a vacuum chamber.
La présente invention a également pour but de proposer une méthode de pompage dans un système de pompage permettant d'obtenir un meilleur vide que celui qui peut être obtenu à l'aide d'une pompe à vide à palettes lubrifiées seule dans une enceinte à vide. Another object of the present invention is to propose a pumping method in a pumping system which makes it possible to obtain a better vacuum than that which can be obtained by means of a vacuum vane pump lubricated alone in a vacuum chamber. .
Ces buts de la présente invention sont atteints à l'aide d'une méthode de pompage qui est réalisée dans le cadre d'un système de pompage dont la configuration consiste essentiellement en une pompe à vide primaire à palettes lubrifiées munie d'un orifice d'entrée des gaz relié à une enceinte à vide et d'un orifice de sortie des gaz donnant dans un conduit qui est muni d'un clapet anti-retour avant de déboucher dans l'atmosphère ou dans d'autres appareils. L'aspiration d'un éjecteur est branchée en parallèle à ce clapet antiretour, sa sortie allant à l'atmosphère ou rejoignant le conduit de la pompe primaire après le clapet anti-retour. Une telle méthode de pompage est notamment l'objet de la revendication indépendante 1 . Des différents modes de réalisation préférés de l'invention sont en outre l'objet des revendications dépendantes. These objects of the present invention are achieved by means of a pumping method which is carried out in the context of a pumping system whose configuration consists essentially of a lubricated vane primary vacuum pump provided with an orifice a gas inlet connected to a vacuum chamber and a gas outlet opening in a conduit which is provided with a check valve before opening into the atmosphere or other devices. The suction of an ejector is connected in parallel with the non-return valve, its outlet going to the atmosphere or joining the conduit of the primary pump after the non-return valve. Such a method of pumping is in particular the subject of independent claim 1. Different preferred embodiments of the invention are furthermore the subject of the dependent claims.
La méthode consiste essentiellement à alimenter en fluide moteur et faire fonctionner l'éjecteur en continu tout le temps que la pompe à vide primaire à palettes lubrifiées pompe les gaz contenus dans l'enceinte à vide par l'orifice d'entrée de gaz, mais aussi tout le temps que la pompe à vide primaire à palettes lubrifiées maintient une pression définie (p. ex. le vide final) dans l'enceinte en refoulant les gaz remontant par sa sortie. The method essentially consists in supplying the driving fluid and operating the ejector continuously all the time that the lubricated vacuum primary vacuum pump pumps the gases contained in the vacuum chamber by the gas inlet orifice, but Also, all the time that the lubricated vane primary vacuum pump maintains a defined pressure (eg the final vacuum) in the chamber by pushing back the gases through its outlet.
Selon un premier aspect, l'invention réside dans le fait que le couplage de la pompe à vide primaire à palettes lubrifiées et de l'éjecteur ne nécessite pas de mesures et appareils spécifiques (p. ex. de capteurs de pression, de température, de courant, etc.), d'asservissements ou de gestion de données et calcul. Par conséquent, le système de pompage adapté pour la mise en œuvre de la méthode de pompage selon la présente invention comprend un nombre minimal de composants, présente une grande simplicité et coûte nettement moins cher que les systèmes existants. According to a first aspect, the invention resides in the fact that the coupling of the lubricated vanes primary vacuum pump and the ejector does not require specific measurements and devices (eg pressure sensors, temperature sensors, current, etc.), servocontrols or data and calculation management. Therefore, the pumping system adapted for the implementation of the pumping method according to the present invention comprises a minimum number of components, is very simple and costs significantly less than existing systems.
Par sa nature, l'éjecteur intégré dans le système de pompage peut toujours fonctionner sans dommages suivant la présente méthode de pompage. Son dimensionnement est conditionné par une consommation de fluide moteur minimale pour le fonctionnement du dispositif. Il est normalement mono-étagé. Son débit nominal est choisi en fonction du volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées, limité par le clapet antiretour. Ce débit peut être de 1/500 à 1/20 du débit nominal de la pompe à vide primaire à palettes lubrifiées, mais peut aussi être inférieur ou supérieur à ces valeurs. Le fluide moteur pour l'éjecteur peut être de l'air comprimé, mais aussi d'autres gaz, par exemple l'azote. By its nature, the ejector built into the pumping system can still operate without damage according to this method of pumping. Its dimensioning is conditioned by a minimum motor fluid consumption for the operation of the device. It is normally single-storey. Its nominal flow rate is chosen according to the volume of the outlet duct of the lubricated vane primary vacuum pump, limited by the non-return valve. This flow rate may be 1/500 to 1/20 of the nominal flow rate of the lubricated vane primary vacuum pump, but may also be lower or higher than these values. The driving fluid for the ejector may be compressed air, but also other gases, for example nitrogen.
Le clapet anti-retour, placé dans le conduit à la sortie de la pompe à vide primaire à palettes lubrifiées peut être un élément standard disponible dans le commerce. Il est dimensionné suivant le débit nominal de la pompe à vide primaire à palettes lubrifiées. En particulier, il est prévu que le clapet anti- retour se ferme quand la pression à l'aspiration de la pompe à vide primaire à palettes lubrifiées se situe entre 500 mbar absolu et le vide final (p. ex. 100 mbar). The non-return valve, placed in the conduit at the outlet of the lubricated vane primary vacuum pump, may be a standard commercially available element. It is dimensioned according to the rated flow rate of the lubricated vane primary vacuum pump. In particular, it is expected that the check valve return closes when the suction pressure of the lubricated vane primary vacuum pump is between 500 mbar absolute and the final vacuum (eg 100 mbar).
Selon une autre variante, l'éjecteur est multi-étagé. According to another variant, the ejector is multi-stage.
Selon encore une autre variante, l'éjecteur peut être réalisé en matière à résistance chimique élevée aux substances et gaz communément utilisés dans l'industrie chimique, celle des semi-conducteurs, aussi bien dans la variante éjecteur mono-étagé que dans celle de l'éjecteur multi-étagé. According to yet another variant, the ejector may be made of high chemical resistance material substances and gas commonly used in the chemical industry, that of semiconductors, both in the single-stage ejector variant as in that of the multi-stage ejector.
L'éjecteur est de préférence de petite taille. The ejector is preferably small.
Selon une autre variante, l'éjecteur est intégré dans une cartouche qui incorpore le clapet anti-retour. According to another variant, the ejector is integrated in a cartridge which incorporates the non-return valve.
Selon encore une autre variante, l'éjecteur est intégré dans une cartouche qui incorpore le clapet anti-retour et cette cartouche elle-même est logée dans le séparateur d'huile de la pompe à vide primaire à palettes lubrifiées. According to yet another variant, the ejector is integrated in a cartridge which incorporates the non-return valve and this cartridge itself is housed in the oil separator of the lubricated vane primary vacuum pump.
Selon encore une autre variante de la méthode de la présente invention, pour répondre à des exigences spécifiques, le débit de gaz à la pression nécessaire pour le fonctionnement de l'éjecteur est piloté de manière « tout ou rien ». En effet, le pilotage consiste à mesurer un ou plusieurs paramètres et à mettre l'éjecteur en fonctionnement ou l'arrêter, en fonction de certaines règles prédéfinies. Les paramètres, fournis par des capteurs adéquats, sont p. ex. le courant du moteur de la pompe à vide à palettes lubrifiées, la température ou la pression des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées, limité par le clapet antiretour, ou une combinaison de ces paramètres. According to yet another variant of the method of the present invention, to meet specific requirements, the flow of gas at the pressure necessary for the operation of the ejector is controlled "all or nothing". Indeed, the control consists of measuring one or more parameters and putting the ejector into operation or stop it, according to certain predefined rules. The parameters, provided by suitable sensors, are p. ex. the motor current of the lubricated vane vacuum pump, the temperature or pressure of the gases in the volume of the outlet duct of the lubricated vane primary vacuum pump, limited by the check valve, or a combination of these parameters.
Au départ d'un cycle de vidage de l'enceinte, la pression y est élevée, par exemple égale à la pression atmosphérique. Vu la compression dans la pompe à vide primaire à palettes lubrifiées, la pression des gaz refoulés à sa sortie est plus haute que la pression atmosphérique (si les gaz à la sortie de la pompe primaire sont refoulés directement à l'atmosphère) ou plus haute que la pression à l'entrée d'un autre appareil connecté en aval. Cela provoque l'ouverture du clapet anti-retour. At the start of a drain cycle of the chamber, the pressure is high, for example equal to the atmospheric pressure. Due to the compression in the lubricated vane primary vacuum pump, the pressure of the gases discharged at its outlet is higher than the atmospheric pressure (if the gases at the outlet of the primary pump are discharged directly to the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
Quand ce clapet anti-retour est ouvert, l'action de l'éjecteur est très faiblement ressentie, comme la pression à son entrée est presque égale à celle de sa sortie. En revanche, quand le clapet anti-retour se ferme à une certaine pression (parce que la pression dans l'enceinte a entretemps baissé), l'action de l'éjecteur provoque une réduction progressive de la différence de pression entre l'enceinte et le conduit après le clapet anti-retour. La pression à la sortie de la pompe à vide primaire à palettes lubrifiées devient celle à l'entrée de l'éjecteur, celle de sa sortie étant toujours la pression dans le conduit après le clapet anti-retour. Plus l'éjecteur pompe, plus la pression à la sortie de la pompe à vide primaire à palettes lubrifiées, dans le volume fermé (limité par le clapet anti-retour) se réduit et par conséquent la différence de pression entre l'enceinte et la sortie de la pompe à vide primaire à palettes lubrifiées baisse. Cette faible différence réduit les fuites internes dans la pompe à vide primaire à palettes lubrifiées et engendre en même temps une baisse de la pression dans l'enceinte, ce qui permet d'améliorer le vide final. En plus, la pompe à vide primaire à palettes lubrifiées consomme de moins en moins d'énergie pour la compression et produit de moins en moins de chaleur de compression. When this check valve is open, the action of the ejector is very weakly felt, as the pressure at its entrance is almost equal to that of its output. On the other hand, when the check valve closes at a certain pressure (because the pressure in the chamber has meanwhile dropped), the action of the ejector causes a gradual reduction of the pressure difference between the chamber and the duct after the check valve. The pressure at the outlet of the lubricated vane primary vacuum pump becomes that at the inlet of the ejector, that of its outlet always being the pressure in the conduit after the non-return valve. The more the pump ejector, the higher the pressure at the outlet of the lubricated vane vacuum pump, in the closed volume (limited by the non-return valve) is reduced and therefore the pressure difference between the enclosure and the output of the vacuum pump with lubricated vanes lowered. This small difference reduces internal leakage in the lubricated vane vacuum pump and at the same time lowers the pressure in the enclosure, improving the final vacuum. In addition, the lubricated vane primary vacuum pump consumes less and less energy for compression and produces less and less compression heat.
Dans le cas de pilotage de l'éjecteur, il existe une position initiale de démarrage du système de pompage quand les capteurs sont dans un état défini ou bien donnent des valeurs initiales. Au fur et à mesure que la pompe à vide primaire à palettes lubrifiées pompe les gaz de l'enceinte à vide les paramètres tels le courant de son moteur, la température et la pression des gaz dans le volume du conduit de sortie commencent à se modifier et atteignent des valeurs de seuil détectées par les capteurs. Cela provoque la mise en marche de l'éjecteur. Quand ces paramètres repassent dans les plages initiales (hors consignes) avec une temporisation, l'éjecteur est arrêté. In the case of control of the ejector, there is an initial position of starting the pump system when the sensors are in a defined state or give initial values. As the lubricated vane vacuum pump pumps the gases in the vacuum chamber, parameters such as its motor current, the temperature and the gas pressure in the volume of the outlet pipe begin to change. and reach threshold values detected by the sensors. This causes the ejector to start. When these parameters return to the initial ranges (out of setpoints) with a timer, the ejector is stopped.
Selon encore une autre variante de la présente invention, le débit de gaz à la pression nécessaire pour le fonctionnement de l'éjecteur est fourni par un compresseur. De manière notable, ce compresseur peut être entraîné par la pompe primaire à palettes lubrifiées ou, alternativement ou en addition, de manière autonome, indépendante de la pompe primaire à palettes lubrifiées. Ce compresseur peut aspirer l'air atmosphérique ou des gaz dans le conduit de sortie de gaz après le clapet anti-retour. La présence d'un tel compresseur rend les systèmes de pompes à vide à palettes lubrifiées indépendants d'une source de gaz comprimé, ce qui peut répondre à certains environnements industriels. Le compresseur peut fournir le débit de gaz à la pression According to yet another variant of the present invention, the flow of gas at the pressure necessary for the operation of the ejector is provided. by a compressor. Notably, this compressor can be driven by the lubricated vane primary pump or, alternatively or additionally, independently, independent of the lubricated vane primary pump. This compressor can draw atmospheric air or gases into the gas outlet duct after the non-return valve. The presence of such a compressor makes the lubricated vane vacuum pump systems independent of a source of compressed gas, which may meet certain industrial environments. The compressor can supply the gas flow at the pressure
nécessaire pour le fonctionnement de plusieurs éjecteurs, faisant partie respectivement de plusieurs systèmes de pompes à vide avec comme pompes primaires des pompes à palettes lubrifiées. Le compresseur fait partie du système aussi bien dans le cas de fonctionnement en continu de l'éjecteur que dans le cas de son pilotage suivant les paramètres, contrôlés par des capteurs adéquats. necessary for the operation of several ejectors, respectively forming part of several vacuum pump systems with as primary pumps lubricated vane pumps. The compressor is part of the system both in the case of continuous operation of the ejector as in the case of its control according to the parameters, controlled by suitable sensors.
D'un autre côté, il est aussi évident que l'étude du concept mécanique cherche à réduire le volume entre l'orifice de sortie des gaz de la pompe à vide primaire à palettes lubrifiées et le clapet anti-retour dans le but d'y descendre la pression plus vite. On the other hand, it is also obvious that the mechanical design study seeks to reduce the volume between the gas outlet of the lubricated vane primary vacuum pump and the non-return valve for the purpose of go down the pressure faster.
Brève description des dessins Brief description of the drawings
Les particularités et les avantages de la présente invention apparaîtront avec plus de détails dans le cadre de la description qui suit avec des exemples de réalisation donnés à titre illustratif et non limitatif en référence aux dessins ci-annexés qui représentent : The features and advantages of the present invention will appear in more detail in the context of the description which follows with exemplary embodiments given by way of nonlimiting illustration with reference to the attached drawings which represent:
- la figure 1 représente de manière schématique un système de pompage adapté pour la réalisation d'une méthode de pompage selon un premier mode de réalisation de la présente invention ; et - Figure 1 schematically shows a pumping system adapted for carrying out a pumping method according to a first embodiment of the present invention; and
- la figure 2 représente de manière schématique un système de pompage adapté pour la réalisation d'une méthode de pompage selon un deuxième mode de réalisation de la présente invention. - la figure 3 représente de manière schématique un système de pompage adapté pour la réalisation d'une méthode de pompage selon un troisième mode de réalisation de la présente invention. - Figure 2 schematically shows a pumping system adapted for the realization of a pumping method according to a second embodiment of the present invention. - Figure 3 schematically shows a pumping system adapted for the realization of a pumping method according to a third embodiment of the present invention.
Description détaillée des modes de réalisation de l'invention DETAILED DESCRIPTION OF THE EMBODIMENTS OF THE INVENTION
Figure 1 représente un système de pompage SP adapté pour la mise en œuvre d'une méthode de pompage selon un premier mode de réalisation de la présente invention. Figure 1 shows a pump system SP adapted for the implementation of a pumping method according to a first embodiment of the present invention.
Ce système de pompage SP comporte une enceinte 1 , laquelle est reliée à l'orifice d'aspiration 2 d'une pompe à vide primaire à palettes lubrifiées 3. L'orifice de sortie des gaz de la pompe à vide primaire à palettes lubrifiées 3 est relié au conduit 5. Un clapet anti-retour de refoulement 6 est placé dans le conduit 5, qui après ce clapet anti-retour 6 continue en conduit de sortie des gaz 8. Le clapet anti-retour 6, lorsqu'il est fermé, permet la formation d'un volume 4, compris entre l'orifice de sortie des gaz de la pompe à vide primaire 3 et lui-même. Le système de pompage SP comporte aussi un éjecteur 7, branché en parallèle au clapet anti-retour 6. L'orifice d'aspiration de l'éjecteur est relié au volume 4 du conduit 5 et son orifice de refoulement est relié au conduit 8. Le conduit d'alimentation 9 fournit le fluide moteur pour l'éjecteur 7. This pumping system SP comprises an enclosure 1, which is connected to the suction port 2 of a lubricated vane primary vacuum pump 3. The gas outlet port of the lubricated vane primary vacuum pump 3 is connected to the conduit 5. A discharge check valve 6 is placed in the conduit 5, which after this non-return valve 6 continues in the gas outlet conduit 8. The non-return valve 6, when closed , allows the formation of a volume 4, between the gas outlet port of the primary vacuum pump 3 and itself. The pumping system SP also comprises an ejector 7, connected in parallel with the non-return valve 6. The suction orifice of the ejector is connected to the volume 4 of the conduit 5 and its discharge orifice is connected to the conduit 8. The supply duct 9 provides the driving fluid for the ejector 7.
Dès la mise en route de la pompe à vide primaire à palettes lubrifiées 3, le fluide moteur pour l'éjecteur 7 est injecté par le conduit d'alimentation 9. Ensuite, la pompe à vide primaire à palettes lubrifiées 3 aspire les gaz dans l'enceinte 1 par le conduit 2 branché à son entrée et les comprime pour les refouler par la suite à sa sortie dans le conduit 5 par le clapet anti-retour 6. Lorsque la pression de fermeture du clapet anti-retour 6 est atteinte, il se ferme. A partir de ce moment le pompage de l'éjecteur 7 fait baisser progressivement la pression dans le volume 4 jusqu'à la valeur de sa pression limite. En parallèle, la puissance consommée par la pompe à vide primaire à palettes lubrifiées 3 baisse progressivement. Cela se produit en un court laps de temps, par exemple pour un certain cycle en 5 à 10 secondes. Avec un ajustement judicieux du débit de l'éjecteur 7 et de la pression de fermeture du clapet anti-retour 6 en fonction du débit de la pompe à vide primaire à palettes lubrifiées 3 et le volume de l'enceinte 1 , il est en outre possible de réduire le temps avant la fermeture du clapet anti-retour 6 par rapport à la durée du cycle de vidage et donc réduire les pertes en fluide moteur pendant ce temps de fonctionnement de l'éjecteur 7 sans effet sur le pompage. Par ailleurs, ces « pertes » qui sont infimes, sont prises en compte dans le bilan de la consommation d'énergie. En revanche, l'avantage de la simplicité crédite une excellente fiabilité du système ainsi qu'un prix inférieur en comparaison avec des pompes similaires équipées d'automate As soon as the lubricated vane primary vacuum pump 3 is put into operation, the driving fluid for the ejector 7 is injected through the feed duct 9. Then, the lubricated vane primary vacuum pump 3 sucks the gases in the pump. 1 enclosure through the conduit 2 connected to its inlet and compresses them to discharge thereafter at its outlet in the conduit 5 by the non-return valve 6. When the closing pressure of the non-return valve 6 is reached, it closes. From this moment the pumping of the ejector 7 gradually lowers the pressure in the volume 4 to the value of its limit pressure. In parallel, the power consumed by the lubricated vane primary vacuum pump 3 gradually decreases. This occurs in a short period of time, for example for a certain cycle in 5 to 10 seconds. With a judicious adjustment of the flow of the ejector 7 and the closing pressure of the non-return valve 6 as a function of the flow rate of the lubricated vane vacuum pump 3 and the volume of the chamber 1, it is also it is possible to reduce the time before closing the non-return valve 6 with respect to the duration of the emptying cycle and thus reduce the losses of engine fluid during this operating time of the ejector 7 without effect on the pumping. Moreover, these "losses" which are minute, are taken into account in the balance of energy consumption. On the other hand, the advantage of simplicity credits an excellent reliability of the system as well as a lower price in comparison with similar pumps equipped with automaton
programmable et ou de variateur, vannes pilotées, capteurs, etc. programmable and / or dimmer, pilot operated valves, sensors, etc.
Figure 2 représente un système de pompage SP adapté pour la mise en œuvre d'une méthode de pompage selon un deuxième mode de réalisation de la présente invention. FIG. 2 represents a pumping system SP adapted for the implementation of a pumping method according to a second embodiment of the present invention.
Par rapport au système représenté à la figure 1 , le système représenté à la figure 2 comprend en outre un compresseur 10 qui fournit le débit de gaz à la pression nécessaire pour le fonctionnement de l'éjecteur 7. En effet, ce compresseur 10 peut aspirer de l'air atmosphérique ou des gaz dans le conduit de sortie des gaz 8 après le clapet anti-retour 6. Sa présence rend le système de pompage indépendant d'une source de gaz comprimé, ce qui peut répondre à certains environnements industriels. Le compresseur 10 peut être entraîné par la pompe primaire à palettes lubrifiées 3 ou bien par son propre moteur électrique, donc de manière complètement indépendante de la pompe 3. Dans tous les cas la consommation d'énergie du compresseur 10 quand il fournit le débit de gaz à la pression nécessaire afin de faire With respect to the system shown in FIG. 1, the system represented in FIG. 2 furthermore comprises a compressor 10 which supplies the gas flow rate at the pressure necessary for the operation of the ejector 7. Indeed, this compressor 10 can aspire atmospheric air or gases in the gas outlet duct 8 after the non-return valve 6. Its presence makes the pumping system independent of a source of compressed gas, which can meet certain industrial environments. The compressor 10 can be driven by the lubricated vane primary pump 3 or by its own electric motor, so completely independently of the pump 3. In all cases the energy consumption of the compressor 10 when it provides the flow rate of gas at the pressure needed to make
fonctionner l'éjecteur 7 est largement plus petite par rapport au gain réalisé sur la consommation d'énergie de la pompe principale 3. operate the ejector 7 is much smaller compared to the gain on the energy consumption of the main pump 3.
Figure 3 représente un système de pompes à vide SPP adapté pour la mise en œuvre d'une méthode de pompage selon un troisième mode de réalisation de la présente invention. Par rapport aux systèmes montrés aux figures 1 et 2, le système représenté à la figure 3 correspond à un système de pompage piloté, qui comprend en outre des capteurs 1 1 , 12, 13 qui contrôlent p. ex. le courant du moteur (capteur 1 1 ) de la pompe à vide primaire à palettes lubrifiées 3, la pression (capteur 13) des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées (limité par le clapet anti-retour 6), la température (capteur 12) des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées (limité par le clapet anti-retour 6) ou une combinaison de ces paramètres. En effet, quand la pompe à vide primaire à palettes lubrifiées 3 commence à pomper les gaz de l'enceinte à vide 1 , ces paramètres cités (notamment le courant de son moteur, la température et la pression des gaz dans le volume du conduit de sortie 4) commencent à se modifier et atteignent des valeurs de seuil détectées par les capteurs 1 1 , 12, 13 correspondants. Cela provoque la mise en marche de l'éjecteur 7 (après une certaine temporisation). Quand ces paramètres repassent dans des plages initiales (hors consignes) l'éjecteur est arrêté (de nouveau après une certaine temporisation). Bien évidemment, le système de pompage piloté SSP peut avoir comme source de gaz comprimé un réseau de distribution ou bien un compresseur 10 dans les conditions décrites en figure 2. Figure 3 shows a vacuum pump system SPP adapted for implementing a pumping method according to a third embodiment of the present invention. With respect to the systems shown in FIGS. 1 and 2, the system represented in FIG. 3 corresponds to a controlled pumping system, which furthermore comprises sensors 1 1, 12, 13 which control p. ex. the motor current (sensor 1 1) of the lubricated vane primary vacuum pump 3, the pressure (sensor 13) of the gases in the volume of the outlet duct of the lubricated vane primary vacuum pump (limited by the check valve) 6), the temperature (sensor 12) of the gases in the volume of the outlet duct of the lubricated vane primary vacuum pump (limited by the non-return valve 6) or a combination of these parameters. In fact, when the lubricated vane primary vacuum pump 3 starts to pump the gases from the vacuum chamber 1, these mentioned parameters (in particular the current of its engine, the temperature and the pressure of the gases in the volume of the duct output 4) begin to change and reach threshold values detected by the corresponding sensors 1 1, 12, 13. This causes the ejector 7 to turn on (after a certain time delay). When these parameters return to initial ranges (out of setpoints) the ejector is stopped (again after a certain delay). Of course, the SSP driven pumping system may have as compressed gas source a distribution network or a compressor 10 under the conditions described in FIG. 2.
Certainement, la présente invention est sujette à de nombreuses variations quant à sa mise en œuvre. Bien que divers modes de réalisation aient été décrits, on comprend bien qu'il n'est pas concevable d'identifier de manière exhaustive tous les modes possibles. Il est bien sûr envisageable de remplacer un moyen décrit par un moyen équivalent sans sortir du cadre de la présente invention. Toutes ces modifications font partie des connaissances communes d'un homme du métier dans le domaine de la technologie du vide. Certainly, the present invention is subject to many variations as to its implementation. Although various embodiments have been described, it is well understood that it is not conceivable to exhaustively identify all possible modes. It is of course conceivable to replace a means described by equivalent means without departing from the scope of the present invention. All these modifications are part of the common knowledge of a person skilled in the field of vacuum technology.

Claims

Revendications claims
1 . Méthode de pompage dans un système de pompage (SP, SPP) comprenant: 1. Pumping method in a pumping system (SP, SPP) comprising:
- une pompe à vide primaire à palettes lubrifiées (3) avec un orifice d'entrée des gaz (2) relié à une enceinte à vide (1 ) et un orifice de sortie des gaz (4) donnant dans un conduit (5) avant de déboucher dans la sortie des gaz (8) du système de pompage (SP, SPP), - a lubricated vane primary vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) in a front conduit (5) to open into the gas outlet (8) of the pumping system (SP, SPP),
- un clapet anti-retour (6) positionné dans le conduit (5) entre l'orifice de sortie des gaz (4) et la sortie des gaz (8), et a non-return valve (6) positioned in the duct (5) between the gas outlet (4) and the gas outlet (8), and
- un éjecteur (7) branché en parallèle au clapet anti-retour (6), la méthode étant caractérisée en ce que la pompe à vide primaire à palettes lubrifiées (3) est mise en marche afin de pomper les gaz contenus dans l'enceinte à vide (1 ) par l'orifice de sortie des gaz (4) ; de manière simultanée, l'éjecteur (7) est alimenté en fluide moteur ; et l'éjecteur (7) continue d'être alimenté en fluide moteur tout le temps que la pompe à vide primaire à palettes lubrifiées (3) pompe les gaz contenus dans l'enceinte à vide (1 ) et/ou tout le temps que la pompe à vide primaire à palettes lubrifiées (3) maintient une pression définie dans l'enceinte à vide (1 ). - an ejector (7) connected in parallel with the non-return valve (6), the method being characterized in that the lubricated vane primary vacuum pump (3) is started in order to pump the gases contained in the enclosure empty (1) through the gas outlet (4); simultaneously, the ejector (7) is supplied with motor fluid; and the ejector (7) continues to be supplied with motor fluid all the time that the lubricated vane primary vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and / or all the time that the lubricated vane primary vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).
2. Méthode de pompage selon la revendication 1 , caractérisée en ce que la sortie de l'éjecteur (7) rejoint le conduit (5) après le clapet anti-retour (6). 2. Pumping method according to claim 1, characterized in that the outlet of the ejector (7) joins the conduit (5) after the non-return valve (6).
3. Méthode de pompage selon la revendication 1 ou 2, caractérisée en ce que l'éjecteur (7) est dimensionné afin d'avoir une consommation de fluide moteur minimale. 3. A pumping method according to claim 1 or 2, characterized in that the ejector (7) is dimensioned to have a minimum motor fluid consumption.
4. Méthode de pompage selon l'une quelconque des revendications 1 à 3, caractérisée en ce que le débit nominal de l'éjecteur (7) est choisi en fonction du volume du conduit de sortie (5) de la pompe à vide primaire à palettes lubrifiées (3) qui est limité par le clapet anti-retour (6). Pumping method according to one of Claims 1 to 3, characterized in that the nominal flow rate of the ejector (7) is chosen as a function of the volume of the outlet pipe (5) of the primary vacuum pump. lubricated pallets (3) which is limited by the non-return valve (6).
5. Méthode de pompage selon la revendication 4, caractérisée en ce que le débit de l'éjecteur est de 1/500 à 1/20 du débit nominal de la pompe à vide primaire à palettes lubrifiées (3). 5. Pumping method according to claim 4, characterized in that the flow of the ejector is 1/500 to 1/20 of the nominal flow rate of the lubricated vane primary vacuum pump (3).
6. Méthode de pompage selon l'une quelconque des revendications 1 à 5, caractérisée en ce que le fluide moteur de l'éjecteur (7) est de l'air comprimé et/ou de l'azote. 6. Pumping method according to any one of claims 1 to 5, characterized in that the driving fluid of the ejector (7) is compressed air and / or nitrogen.
7. Méthode de pompage selon l'une quelconque des revendications 1 à 6, caractérisée en ce que l'éjecteur (7) est mono-étagé ou multi-étagé. 7. Pump method according to any one of claims 1 to 6, characterized in that the ejector (7) is single-stage or multi-stage.
8. Méthode de pompage selon l'une quelconque des revendications 1 à 7, caractérisée en ce que le clapet anti-retour (6) se ferme quand la pression à l'aspiration de la pompe à vide primaire à palettes lubrifiées (3) se situe entre 500 mbar absolu et le vide final. Pumping method according to one of Claims 1 to 7, characterized in that the non-return valve (6) closes when the suction pressure of the lubricated vane primary vacuum pump (3) is reached. is between 500 mbar absolute and the final vacuum.
9. Méthode de pompage selon l'une quelconque des revendications 1 à 8, caractérisée en ce que l'éjecteur (7) est fabriqué en matière à résistance chimique élevée aux substances et gaz communément utilisés dans l'industrie chimique et/ou l'industrie des semi-conducteurs. Pumping method according to one of claims 1 to 8, characterized in that the ejector (7) is made of a material with high chemical resistance to substances and gases commonly used in the chemical industry and / or semiconductor industry.
10. Méthode de pompage selon l'une quelconque des 10. Pumping method according to any one of
revendications 1 à 9, caractérisée en ce que l'éjecteur (7) est intégré dans une cartouche qui incorpore le clapet anti-retour (6). Claims 1 to 9, characterized in that the ejector (7) is integrated in a cartridge which incorporates the non-return valve (6).
1 1 . Méthode de pompage selon la revendication 10, caractérisée en ce que la cartouche elle-même est logée dans le séparateur d'huile de la pompe à vide primaire à palettes lubrifiées. 1 1. Pumping method according to claim 10, characterized in that the cartridge itself is housed in the oil separator of the lubricated vane primary vacuum pump.
12. Méthode de pompage selon l'une quelconque des 12. Pumping method according to any one of
revendications 1 à 1 1 , caractérisée en ce que le débit de gaz à la pression nécessaire pour le fonctionnement de l'éjecteur (7) est fourni par un Claims 1 to 1 1, characterized in that the gas flow rate at the pressure necessary for the operation of the ejector (7) is provided by a
compresseur (10). compressor (10).
13. Méthode de pompage selon la revendication 12, caractérisée en ce que le compresseur (10) est entraîné par la pompe primaire à palettes lubrifiées (3). Pumping method according to claim 12, characterized in that the compressor (10) is driven by the lubricated vane primary pump (3).
14. Méthode de pompage selon la revendication 12, caractérisée en ce que le compresseur (10) est entraîné de manière autonome, indépendante de la pompe primaire à palettes lubrifiées (3). Pumping method according to claim 12, characterized in that the compressor (10) is driven independently, independent of the lubricated vane primary pump (3).
15. Méthode de pompage selon l'une quelconque des 15. Pumping method according to any one of
revendications 12 à 14, caractérisée en ce que le compresseur (10) aspire l'air atmosphérique ou des gaz dans le conduit de sortie de gaz (8) après le clapet anti-retour (6). Claims 12 to 14, characterized in that the compressor (10) draws atmospheric air or gases into the gas outlet duct (8) after the non-return valve (6).
16. Méthode de pompage selon l'une quelconque des 16. Pumping method according to any one of
revendications 1 à 15, caractérisée en ce qu'au moins un paramètre de fonctionnement est mesuré et utilisé pour mettre en marche ou arrêter l'éjecteur (7). Claims 1 to 15, characterized in that at least one operating parameter is measured and used to start or stop the ejector (7).
17. Méthode de pompage selon la revendication 16, caractérisée en ce que le au moins un paramètre de fonctionnement est le courant du moteur de la pompe à vide à palettes lubrifiées 3, la pression des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées limité par le clapet anti-retour 6, la température des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées limité par le clapet antiretour 6 ou une combinaison de ces paramètres. Pumping method according to claim 16, characterized in that the at least one operating parameter is the motor current of the lubricated vane vacuum pump 3, the pressure of the gases in the volume of the outlet pipe of the pump. characterized by the non-return valve 6, the temperature of the gases in the volume of the outlet duct of the lubricated vane vacuum pump limited by the non-return valve 6 or a combination of these parameters.
18. Système de pompage (SP, SPP) comprenant : 18. A pumping system (SP, SPP) comprising:
- une pompe à vide primaire à palettes lubrifiées (3) avec un orifice d'entrée des gaz (2) relié à une enceinte à vide (1 ) et un orifice de sortie des gaz (4) donnant dans un conduit (5) avant de déboucher dans la sortie des gaz (8) du système de pompes à vide (SP), - a lubricated vane primary vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) in a front conduit (5) to exit into the gas outlet (8) of the vacuum pump system (SP),
- un clapet anti-retour (6) positionné dans le conduit (5) entre l'orifice de sortie des gaz (4) et la sortie des gaz (8), et a non-return valve (6) positioned in the duct (5) between the gas outlet (4) and the gas outlet (8), and
- un éjecteur (7) branché en parallèle au clapet anti-retour (6), le système de pompage (SP, SPP) étant caractérisé en ce que l'éjecteur (7) est agencé pour pouvoir être alimenté en fluide moteur tout le temps que la pompe à vide primaire à palettes lubrifiées (3) pompe les gaz contenus dans l'enceinte à vide (1 ) et/ou tout le temps que la pompe à vide primaire à palettes lubrifiées (3) maintient une pression définie dans l'enceinte à vide (1 ). - an ejector (7) connected in parallel with the non-return valve (6), the pumping system (SP, SPP) being characterized in that the ejector (7) is arranged to be able to be supplied with motor fluid all the time the lubricated vane primary vacuum pump (3) pumps the gases contained in the vacuum vessel (1) and / or the entire time that the lubricated vane primary vacuum pump (3) maintains a defined pressure in the vacuum enclosure (1).
19. Système de pompage selon la revendication 18, caractérisée en ce que la sortie de l'éjecteur (7) rejoint le conduit (5) après le clapet anti-retour (6). Pumping system according to claim 18, characterized in that the outlet of the ejector (7) joins the duct (5) after the non-return valve (6).
20. Système de pompage selon la revendication 18 ou 19, caractérisée en ce que l'éjecteur (7) est dimensionné afin d'avoir une consommation de fluide moteur minimale. 20. Pump system according to claim 18 or 19, characterized in that the ejector (7) is dimensioned to have a minimum motor fluid consumption.
21 . Système de pompage selon l'une quelconque des revendications 18 à 20, caractérisée en ce que le débit nominal de l'éjecteur (7) est choisi en fonction du volume du conduit de sortie (5) de la pompe à vide primaire à palettes lubrifiées (3) qui est limité par le clapet anti-retour (6). 21. Pumping system according to one of Claims 18 to 20, characterized in that the nominal flow rate of the ejector (7) is chosen as a function of the volume of the outlet duct (5) of the lubricated vane primary vacuum pump. (3) which is limited by the non-return valve (6).
22. Système de pompage selon la revendication 21 , caractérisée en ce que le débit de l'éjecteur est de 1/500 à 1/20 du débit nominal de la pompe à vide primaire à palettes lubrifiées (3). 22. Pumping system according to claim 21, characterized in that the flow of the ejector is 1/500 to 1/20 of the nominal flow rate of the lubricated vane primary vacuum pump (3).
23. Système de pompage selon l'une quelconque des revendications 18 à 22, caractérisée en ce que le fluide moteur de l'éjecteur (7) est de l'air comprimé et/ou de l'azote. 23. Pumping system according to any one of claims 18 to 22, characterized in that the driving fluid of the ejector (7) is compressed air and / or nitrogen.
24. Système de pompage selon l'une quelconque des revendications 18 à 23, caractérisée en ce que l'éjecteur (7) est mono-étagé ou multi-étagé. 24. Pump system according to any one of claims 18 to 23, characterized in that the ejector (7) is single-stage or multi-stage.
25. Système de pompage selon l'une quelconque des revendications 18 à 24, caractérisée en ce que le clapet anti-retour (6) se ferme quand la pression à l'aspiration de la pompe à vide primaire à palettes lubrifiées (3) se situe entre 500 mbar absolu et le vide final. Pumping system according to one of Claims 18 to 24, characterized in that the non-return valve (6) closes when the suction pressure of the lubricated vane primary vacuum pump (3) is reached. is between 500 mbar absolute and the final vacuum.
26. Système de pompage selon l'une quelconque des revendications 18 à 25, caractérisée en ce que l'éjecteur (7) est fabriqué en matière à résistance chimique élevée aux substances et gaz communément dans l'industrie chimique et/ou l'industrie des semi-conducteurs. 26. Pumping system according to any one of claims 18 to 25, characterized in that the ejector (7) is made of material with high chemical resistance to substances and gas commonly in the chemical industry and / or industry semiconductors.
27. Système de pompage selon l'une quelconque des revendications 18 à 26, caractérisée en ce que l'éjecteur (7) est intégré dans une cartouche qui incorpore le clapet anti-retour (6). 27. Pumping system according to any one of claims 18 to 26, characterized in that the ejector (7) is integrated in a cartridge which incorporates the non-return valve (6).
28. Système de pompage selon la revendication 27, caractérisée en ce que la cartouche elle-même est logée dans le séparateur d'huile de la pompe à vide primaire à palettes lubrifiées. 28. Pumping system according to claim 27, characterized in that the cartridge itself is housed in the oil separator of the lubricated vanes vacuum primary pump.
29. Système de pompage selon l'une quelconque des revendications 18 à 28, caractérisée en ce que le système comprend un compresseur (1 ) qui fournit le débit de gaz à la pression nécessaire pour le fonctionnement de l'éjecteur (7). Pumping system according to one of claims 18 to 28, characterized in that the system comprises a compressor (1) which supplies the gas flow rate at the pressure necessary for the operation of the ejector (7).
30. Système de pompage selon la revendication 29, caractérisée en ce que le compresseur (10) est entraîné par la pompe primaire à palettes lubrifiées (3). Pumping system according to Claim 29, characterized in that the compressor (10) is driven by the lubricated vane primary pump (3).
31 . Système de pompage selon la revendication 29, caractérisée en ce que le compresseur (10) est entraîné de manière autonome, indépendante de la pompe primaire à palettes lubrifiées (3). 31. Pumping system according to claim 29, characterized in that the compressor (10) is independently driven independently of the lubricated vane primary pump (3).
32. Système de pompage selon l'une quelconque des revendications 29 à 31 , caractérisée en ce que le compresseur (10) aspire l'air atmosphérique ou des gaz dans le conduit de sortie de gaz (8) après le clapet anti-retour (6). Pumping system according to one of claims 29 to 31, characterized in that the compressor (10) draws atmospheric air or gases into the gas outlet pipe (8) after the non-return valve ( 6).
33. Système de pompage selon l'une quelconque des revendications 18 à 32, caractérisée en qu'il comprend au moins un capteur (1 1 , 12, 13) pour mesurer au moins un paramètre de fonctionnement et pour l'utiliser afin de mettre en marche ou arrêter l'éjecteur (7). 33. Pumping system according to any one of claims 18 to 32, characterized in that it comprises at least one sensor (1 1, 12, 13) for measuring at least one operating parameter and for using it to put operating or stopping the ejector (7).
34. Système de pompage selon la revendication 34, caractérisée en ce que le au moins un paramètre de fonctionnement est le courant du moteur de la pompe à vide à palettes lubrifiées 3, la pression des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées limité par le clapet anti-retour 6, la température des gaz dans le volume du conduit de sortie de la pompe à vide primaire à palettes lubrifiées limité par le clapet antiretour 6 ou une combinaison de ces paramètres. 34. Pumping system according to claim 34, characterized in that the at least one operating parameter is the motor current of the lubricated vane vacuum pump 3, the pressure of the gases in the volume of the outlet pipe of the pump. characterized by the non-return valve 6, the temperature of the gases in the volume of the outlet duct of the lubricated vane vacuum pump limited by the non-return valve 6 or a combination of these parameters.
EP14721361.5A 2014-05-01 2014-05-01 Method of pumping in a pumping system and vacuum pump system Active EP3137771B1 (en)

Priority Applications (2)

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PL14721361T PL3137771T3 (en) 2014-05-01 2014-05-01 Method of pumping in a pumping system and vacuum pump system
PT147213615T PT3137771T (en) 2014-05-01 2014-05-01 Method of pumping in a pumping system and vacuum pump system

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PCT/EP2014/058948 WO2015165544A1 (en) 2014-05-01 2014-05-01 Method of pumping in a pumping system and vacuum pump system

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US (1) US20170045051A1 (en)
EP (1) EP3137771B1 (en)
JP (1) JP6410836B2 (en)
KR (1) KR102235562B1 (en)
CN (1) CN106255828A (en)
AU (1) AU2014392229B2 (en)
BR (1) BR112016024380B1 (en)
CA (1) CA2944825C (en)
DK (1) DK3137771T3 (en)
ES (1) ES2797400T3 (en)
PL (1) PL3137771T3 (en)
PT (1) PT3137771T (en)
RU (1) RU2666379C2 (en)
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PL3137771T3 (en) 2020-10-05
CA2944825C (en) 2021-04-27
JP2017515031A (en) 2017-06-08
CA2944825A1 (en) 2015-11-05
RU2016142607A3 (en) 2018-06-01
AU2014392229A1 (en) 2016-11-03
PT3137771T (en) 2020-05-29
DK3137771T3 (en) 2020-06-08
BR112016024380A2 (en) 2017-08-15
JP6410836B2 (en) 2018-10-24
RU2666379C2 (en) 2018-09-07
US20170045051A1 (en) 2017-02-16
AU2014392229B2 (en) 2018-11-22
BR112016024380B1 (en) 2022-06-28
KR102235562B1 (en) 2021-04-05
TWI698585B (en) 2020-07-11
ES2797400T3 (en) 2020-12-02
EP3137771B1 (en) 2020-05-06
CN106255828A (en) 2016-12-21
TW201608134A (en) 2016-03-01
RU2016142607A (en) 2018-06-01
WO2015165544A1 (en) 2015-11-05
KR20170005410A (en) 2017-01-13

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