DK3137771T3 - PROCEDURE FOR PUMPING IN A PUMP SYSTEM AND A SYSTEM OF VACUUM PUMPS - Google Patents

PROCEDURE FOR PUMPING IN A PUMP SYSTEM AND A SYSTEM OF VACUUM PUMPS Download PDF

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Publication number
DK3137771T3
DK3137771T3 DK14721361.5T DK14721361T DK3137771T3 DK 3137771 T3 DK3137771 T3 DK 3137771T3 DK 14721361 T DK14721361 T DK 14721361T DK 3137771 T3 DK3137771 T3 DK 3137771T3
Authority
DK
Denmark
Prior art keywords
pumping
procedure
vacuum pumps
pump system
pump
Prior art date
Application number
DK14721361.5T
Other languages
Danish (da)
Inventor
Jean-Eric Larcher
Théodore Iltchev
Didier Müller
Original Assignee
Ateliers Busch S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ateliers Busch S A filed Critical Ateliers Busch S A
Application granted granted Critical
Publication of DK3137771T3 publication Critical patent/DK3137771T3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
DK14721361.5T 2014-05-01 2014-05-01 PROCEDURE FOR PUMPING IN A PUMP SYSTEM AND A SYSTEM OF VACUUM PUMPS DK3137771T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/058948 WO2015165544A1 (en) 2014-05-01 2014-05-01 Method of pumping in a pumping system and vacuum pump system

Publications (1)

Publication Number Publication Date
DK3137771T3 true DK3137771T3 (en) 2020-06-08

Family

ID=50639522

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14721361.5T DK3137771T3 (en) 2014-05-01 2014-05-01 PROCEDURE FOR PUMPING IN A PUMP SYSTEM AND A SYSTEM OF VACUUM PUMPS

Country Status (15)

Country Link
US (1) US20170045051A1 (en)
EP (1) EP3137771B1 (en)
JP (1) JP6410836B2 (en)
KR (1) KR102235562B1 (en)
CN (1) CN106255828A (en)
AU (1) AU2014392229B2 (en)
BR (1) BR112016024380B1 (en)
CA (1) CA2944825C (en)
DK (1) DK3137771T3 (en)
ES (1) ES2797400T3 (en)
PL (1) PL3137771T3 (en)
PT (1) PT3137771T (en)
RU (1) RU2666379C2 (en)
TW (1) TWI698585B (en)
WO (1) WO2015165544A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3123030B1 (en) * 2014-03-24 2019-08-07 Ateliers Busch S.A. Method for pumping in a system of vacuum pumps and system of vacuum pumps
FR3094762B1 (en) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Dry type vacuum pump and pumping installation
CN113621936A (en) * 2021-10-12 2021-11-09 陛通半导体设备(苏州)有限公司 Working method of vacuum pump system in vacuum coating and vacuum pump system

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JPS52128885A (en) * 1976-04-22 1977-10-28 Fujitsu Ltd Treatment in gas phase
US4426450A (en) * 1981-08-24 1984-01-17 Fermentec Corporation Fermentation process and apparatus
DE3721611A1 (en) * 1987-06-30 1989-01-19 Alcatel Hochvakuumtechnik Gmbh MECHANICAL VACUUM PUMP WITH A SPRING-LOADED CHECK VALVE
SU1700283A1 (en) * 1989-05-05 1991-12-23 Предприятие П/Я А-3634 Vacuum pump
JPH08178438A (en) * 1994-12-21 1996-07-12 Yanmar Diesel Engine Co Ltd Engine heat pump
US5848538A (en) * 1997-11-06 1998-12-15 American Standard Inc. Oil and refrigerant pump for centrifugal chiller
KR100876318B1 (en) * 2001-09-06 2008-12-31 가부시키가이샤 아루박 Operation method of vacuum exhaust device and vacuum exhaust device
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
SE0201335L (en) * 2002-05-03 2003-03-25 Piab Ab Vacuum pump and ways to provide vacuum
US7254961B2 (en) * 2004-02-18 2007-08-14 Denso Corporation Vapor compression cycle having ejector
US7655140B2 (en) * 2004-10-26 2010-02-02 Cummins Filtration Ip Inc. Automatic water drain for suction fuel water separators
US8807158B2 (en) * 2005-01-20 2014-08-19 Hydra-Flex, Inc. Eductor assembly with dual-material eductor body
DE102005008887A1 (en) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Single-shaft vacuum displacement pump has two pump stages each with pump rotor and drive motor supported by the shaft enclosed by a stator housing
JP4745779B2 (en) * 2005-10-03 2011-08-10 神港精機株式会社 Vacuum equipment
DE102008019472A1 (en) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh vacuum pump
JP5389419B2 (en) * 2008-11-14 2014-01-15 株式会社テイエルブイ Vacuum pump device
GB2465374A (en) * 2008-11-14 2010-05-19 Mann & Hummel Gmbh Centrifugal separator with venturi
FR2952683B1 (en) * 2009-11-18 2011-11-04 Alcatel Lucent METHOD AND APPARATUS FOR PUMPING WITH REDUCED ENERGY CONSUMPTION
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US20120261011A1 (en) * 2011-04-14 2012-10-18 Young Man Cho Energy reduction module using a depressurizing vacuum apparatus for vacuum pump
FR2993614B1 (en) * 2012-07-19 2018-06-15 Pfeiffer Vacuum METHOD AND APPARATUS FOR PUMPING A CHAMBER OF PROCESSES

Also Published As

Publication number Publication date
PL3137771T3 (en) 2020-10-05
CA2944825C (en) 2021-04-27
JP2017515031A (en) 2017-06-08
CA2944825A1 (en) 2015-11-05
RU2016142607A3 (en) 2018-06-01
AU2014392229A1 (en) 2016-11-03
EP3137771A1 (en) 2017-03-08
PT3137771T (en) 2020-05-29
BR112016024380A2 (en) 2017-08-15
JP6410836B2 (en) 2018-10-24
RU2666379C2 (en) 2018-09-07
US20170045051A1 (en) 2017-02-16
AU2014392229B2 (en) 2018-11-22
BR112016024380B1 (en) 2022-06-28
KR102235562B1 (en) 2021-04-05
TWI698585B (en) 2020-07-11
ES2797400T3 (en) 2020-12-02
EP3137771B1 (en) 2020-05-06
CN106255828A (en) 2016-12-21
TW201608134A (en) 2016-03-01
RU2016142607A (en) 2018-06-01
WO2015165544A1 (en) 2015-11-05
KR20170005410A (en) 2017-01-13

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