DK3198148T3 - PUMP SYSTEM FOR CREATING A VACUUM AND PROCEDURE FOR PUMPING WITH THIS PUMP SYSTEM - Google Patents

PUMP SYSTEM FOR CREATING A VACUUM AND PROCEDURE FOR PUMPING WITH THIS PUMP SYSTEM Download PDF

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Publication number
DK3198148T3
DK3198148T3 DK14777077.0T DK14777077T DK3198148T3 DK 3198148 T3 DK3198148 T3 DK 3198148T3 DK 14777077 T DK14777077 T DK 14777077T DK 3198148 T3 DK3198148 T3 DK 3198148T3
Authority
DK
Denmark
Prior art keywords
pump system
pumping
creating
vacuum
procedure
Prior art date
Application number
DK14777077.0T
Other languages
Danish (da)
Inventor
Jean-Eric Larcher
Théodore Iltchev
Didier Müller
Original Assignee
Ateliers Busch S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51627293&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DK3198148(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ateliers Busch S A filed Critical Ateliers Busch S A
Application granted granted Critical
Publication of DK3198148T3 publication Critical patent/DK3198148T3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
DK14777077.0T 2014-09-26 2014-09-26 PUMP SYSTEM FOR CREATING A VACUUM AND PROCEDURE FOR PUMPING WITH THIS PUMP SYSTEM DK3198148T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/070691 WO2016045753A1 (en) 2014-09-26 2014-09-26 Vacuum-generating pumping system and pumping method using this pumping system

Publications (1)

Publication Number Publication Date
DK3198148T3 true DK3198148T3 (en) 2020-04-06

Family

ID=51627293

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14777077.0T DK3198148T3 (en) 2014-09-26 2014-09-26 PUMP SYSTEM FOR CREATING A VACUUM AND PROCEDURE FOR PUMPING WITH THIS PUMP SYSTEM

Country Status (15)

Country Link
US (1) US20170298935A1 (en)
EP (1) EP3198148B1 (en)
JP (1) JP2017531125A (en)
KR (2) KR20170063839A (en)
CN (1) CN107002680A (en)
AU (1) AU2014406724B2 (en)
BR (1) BR112017005927B1 (en)
CA (1) CA2961977A1 (en)
DK (1) DK3198148T3 (en)
ES (1) ES2780873T3 (en)
PL (1) PL3198148T3 (en)
PT (1) PT3198148T (en)
RU (1) RU2670640C9 (en)
TW (1) TWI725943B (en)
WO (1) WO2016045753A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800021148A1 (en) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A VOLUMETRIC AUXILIARY PUMP FOR VACUUM GENERATION.
BE1027005B9 (en) 2019-01-30 2020-10-19 Atlas Copco Airpower Nv Method of controlling a compressor to an unloaded state
FR3094762B1 (en) 2019-04-05 2021-04-09 Pfeiffer Vacuum Dry type vacuum pump and pumping installation
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8816875U1 (en) * 1987-12-21 1991-04-11 Werner Rietschle Maschinen- Und Apparatebau Gmbh, 7860 Schopfheim, De
DE3842886A1 (en) * 1987-12-21 1989-07-06 Rietschle Masch App Vacuum pump stand
FR2647853A1 (en) * 1989-06-05 1990-12-07 Cit Alcatel DRY PRIMARY PUMP WITH TWO FLOORS
JP3723987B2 (en) * 1992-09-03 2005-12-07 松下電器産業株式会社 Vacuum exhaust apparatus and method
FR2822200B1 (en) * 2001-03-19 2003-09-26 Cit Alcatel PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES
DE10131516B4 (en) * 2001-07-02 2004-05-06 Boehringer Ingelheim Pharma Gmbh & Co. Kg Control unit for flow regulation
US20040173312A1 (en) 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
JP4045362B2 (en) * 2001-09-06 2008-02-13 株式会社アルバック Multistage positive displacement vacuum pump
JP3992176B2 (en) 2001-10-26 2007-10-17 株式会社アルバック Vacuum exhaust method and vacuum exhaust device
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP4365059B2 (en) 2001-10-31 2009-11-18 株式会社アルバック Operation method of vacuum exhaust system
JP4745779B2 (en) * 2005-10-03 2011-08-10 神港精機株式会社 Vacuum equipment
JP5438279B2 (en) * 2008-03-24 2014-03-12 アネスト岩田株式会社 Multistage vacuum pump and operation method thereof
TWI467092B (en) * 2008-09-10 2015-01-01 Ulvac Inc Vacuum pumping device
FR2952683B1 (en) * 2009-11-18 2011-11-04 Alcatel Lucent METHOD AND APPARATUS FOR PUMPING WITH REDUCED ENERGY CONSUMPTION
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
FR2993614B1 (en) * 2012-07-19 2018-06-15 Pfeiffer Vacuum METHOD AND APPARATUS FOR PUMPING A CHAMBER OF PROCESSES
GB2509182A (en) * 2012-12-21 2014-06-25 Xerex Ab Vacuum ejector with multi-nozzle drive stage and booster

Also Published As

Publication number Publication date
BR112017005927B1 (en) 2022-07-12
BR112017005927A2 (en) 2017-12-19
AU2014406724B2 (en) 2019-09-19
ES2780873T3 (en) 2020-08-27
RU2670640C9 (en) 2018-12-04
KR20170063839A (en) 2017-06-08
PL3198148T3 (en) 2020-08-10
CN107002680A (en) 2017-08-01
TWI725943B (en) 2021-05-01
KR20210102478A (en) 2021-08-19
AU2014406724A1 (en) 2017-04-13
TW201623801A (en) 2016-07-01
JP2017531125A (en) 2017-10-19
EP3198148B1 (en) 2020-02-26
PT3198148T (en) 2020-04-02
US20170298935A1 (en) 2017-10-19
EP3198148A1 (en) 2017-08-02
WO2016045753A1 (en) 2016-03-31
CA2961977A1 (en) 2016-03-31
RU2670640C1 (en) 2018-10-24

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