CN107002680A - Pumping system and the pumping method using this pumping system for producing vacuum - Google Patents
Pumping system and the pumping method using this pumping system for producing vacuum Download PDFInfo
- Publication number
- CN107002680A CN107002680A CN201480082186.8A CN201480082186A CN107002680A CN 107002680 A CN107002680 A CN 107002680A CN 201480082186 A CN201480082186 A CN 201480082186A CN 107002680 A CN107002680 A CN 107002680A
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- pump
- pumping system
- main
- gas
- vacuum pump
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- 238000005086 pumping Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims description 21
- 239000007789 gas Substances 0.000 claims abstract description 57
- 210000000078 claw Anatomy 0.000 claims description 6
- 230000001050 lubricating effect Effects 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 230000009467 reduction Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013523 data management Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
- F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
- F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2/00—Rotary-piston machines or pumps
- F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
Abstract
Produce the pumping system (SP) of vacuum, include main vavuum pump, the main vavuum pump is the dry type screw type pump (3) with gas suction intake (2) and gas discharge outlet (4), the gas suction intake is connected to vacuum chamber (1), and the gas discharge outlet is led up in the side that the gas exhaust of the outside of pumping system exports (8) in gas emptying pipeline (5).The pumping system includes check-valves (6) and backing vacuum pump (7), the check-valves is positioned between the gas discharge outlet (4) and gas exhaust outlet (8), and the backing vacuum pump is parallel capacitances connected in parallel to the check-valves.The main vavuum pump (3) is activated, to pump gas contained in vacuum chamber (1), and by the discharge of these gases by its gas discharge outlet (4), while backing vacuum pump (7) is activated.In addition, backing vacuum pump (7) is persistently pumped during the whole time of gas contained during main vavuum pump (3) pumps vacuum chamber (1), and/or is persistently pumped during the whole time of the pressure in a restriction during main vavuum pump (3) maintains vacuum chamber (1).
Description
Technical field
The present invention relates to technical field of vacuum.More accurately, pumping system of the present invention on including dry type screw type pump
And utilize the pumping method of this pumping system.
Prior art
In the industry of chemical industry, pharmaceuticals industry, vacuum moulding machine industry, semi-conductor industry etc., vavuum pump is improved
Performance, reduction installation cost and the general purpose of energy expenditure led in terms of performance, energy saving, volume, driver
Cause significant development.
Prior art is shown, in order to improve final vacuum, it is necessary in multi-stage roots pump or the vavuum pump of multistage claw pumps
Addition supplement level.For the dry vacuum pump of screw type, it is known that, it is necessary to provide in additional rotation and/or the increase of screw rod
Portion's compression ratio.
The rotary speed of pump by the different successive phases in the evacuation procedure of vacuum chamber during limit pump operation and
Play a very important role.Using the internal compression rate (for example, its order of magnitude is between 2 and 20) of the available pump of in the market,
Pressure at aspiration end between atmospheric pressure between about 100 millibars when (in other words, during strong mass flowrate is operated),
If the rotary speed of pump can not be lowered, the electric power needed for the first pumping stages will be very high.Common solution
It is to use variable speed drive, it can drop according to standards such as different type pressures, maximum current, ultimate torque, temperature
Low velocity is pushed the speed, so as to reduce power or increase power.But, during the operation cycle of reduction rotary speed,
There is the reduction of flow rate under high pressure, flow rate is proportional to rotary speed.Caused by the velocity variations of variable speed drive
Extra cost and bigger volume.Another common solution is at certain in roots-type or the multistage vacuum pump of claw
Bypass type is used in a little levels or in the dry vacuum pump of screw type at some positions well limited along screw rod
Valve.This solution needs many parts and with integrity problem.
The prior art of pumping system on being intended to improve final vacuum and increase flow rate is main also comprising being disposed in
The booster pump of the roots-type of the upstream of dry pump.The system of this type is huge, and utilizes the bypass with integrity problem
Valve, or operated by using measurement, control, adjustment or servo-controlled means.However, control, adjustment or servo-controlled
These means must be controlled with active mode, and this necessarily causes the number, its complexity and its cost of the part of the system
Increase.
The content of the invention
It is an object of the present invention to the vacuum phase that can be produced in a vacuum chamber with the dry vacuum pump of single screw type
Than, it is allowed to obtain more preferable vacuum (0.0001 millibar of the order of magnitude).
The present invention also aims to by means of the dry vacuum pump of single screw type during pumping with realizing vacuum
The row's light or Emptying Rate that the vacuum of room is resulted in are compared, and obtain row's light or Emptying Rate bigger at low pressures.
The purpose of the present invention is similarly, it is allowed to empties vacuum chamber and maintains the reduction of the electric energy needed for vacuum, and real
The now reduction of the temperature of discharge gas.
Object of the present invention is to realize that the pumping system is included by means of the pumping system for producing vacuum
Main vavuum pump, the main vavuum pump is the dry type screw type pump with gas suction intake and gas discharge outlet, the gas
Suction intake is connected to vacuum chamber, and the gas discharge outlet leads on the direction that the gas exhaust of the outside of pumping system is exported
Into gas emptying pipeline.Pumping system is also included：
- check-valves, is positioned between the gas discharge outlet and gas exhaust outlet, and
- backing vacuum pump, is parallel capacitances connected in parallel to the check-valves.
The backing vacuum pump can be dry type screw type pump type, claw pumps type, multi-stage roots pump type, membrane pump class
Type, dry type rotating vane pump type or lubricating rotary vane pump type.
Similarly there is the present invention pumping method by the use of such as previous limited pumping system to be used as theme.The method
Comprise the steps of：
- main vavuum pump is activated, to pump gas contained in vacuum chamber, and the discharge of these gases is passed through into it
Gas discharge outlet；
- simultaneously, backing vacuum pump is activated；And
- backing vacuum pump continues pump during the whole time of gas contained during main vavuum pump pumps vacuum chamber
Send, and/or persistently pumped during main vavuum pump will maintain the whole time of the pressure limited in vacuum chamber.
In the method according to the invention, auxiliary pump not only empties the whole of vacuum chamber in the main vavuum pump of dry type screw type
Be operated continuously during the individual time, and dry type screw type main vavuum pump via the discharge end vent gas by it
It is operated continuously during the whole time for the pressure (for example, final vacuum) that a restriction will be maintained in vacuum chamber.
Due to the method according to the invention, specific measure or equipment can not needed (for example, pressure, temperature, electric current
Deng sensor), SERVO CONTROL or data management and the main vavuum pump that dry type screw type is performed in the case of need not calculating
With coupling for auxiliary pump.Therefore, the pumping system according to the pumping method of the present invention is adapted for carrying out compared to existing system energy
The part for only including minimal amount is reached, there can be big simplicity and can spend considerably few.
Due to the method according to the invention, the main vavuum pump of dry type screw type can according to the operator scheme of its own with
Single constant speed, power network are operated or rotated with variable velocity.Therefore, it is adapted for carrying out the pumping side according to the present invention
The complexity and cost of the pumping system of method can reduce more.
By its property, the auxiliary pump being integrated within the pumping system can always be operated according to the pumping method of the present invention
Without damaging.Its size for the minimal energy consumption that device is operated by being adapted.Its nominal flow rate is chosen
For the function of the volume of the emptying pipeline between main dry type screw-type vacuum pump and check-valves.This flow rate can advantageously be led
Want the 1/500 to 1/20 of the nominal flow rate of dry type screw-type vacuum pump, but also can be less than or more than these values, especially
The 1/500 to 1/10 or even 1/500 to 1/5 of the nominal flow rate of main vavuum pump.
The check-valves being placed in the pipeline in the downstream of main dry type screw-type vacuum pump can be obtained in normal business
Element.It sets yardstick according to the nominal flow rate of main dry type screw-type vacuum pump.In particular, it is therefore foreseen that, when main
Pressure at the aspiration end of dry type screw-type vacuum pump between 500 absolute millibars and final vacuum (for example, 100 absolute millibars) it
Between when, closure of check ring.
According to another variant, auxiliary pump can have Gao Naihua to the material and gas that are generally used in semi-conductor industry
The property learned.
Auxiliary pump preferably has small size.
Preferably, according to the pumping method using the pumping system according to the present invention, backing vacuum pump is always main true
Pumped in volume between the gas discharge outlet and check-valves of empty pump.
Another variant of the method according to the invention, in order to meet particular requirement, the actuating of backing vacuum pump is with " complete
(tout) or without (rien) " mode controlled.Control includes one or more parameters of measurement, and comes in accordance with some rules
Actuating backing vacuum pump stops it.The parameter provided by suitable sensor is, for example, main dry type screw-type vacuum pump
The electric current of motor, the pressure of gas at its exhaust end (that is, in the space of the upstream of the check-valves in emptying pipeline) or
The combination of temperature or these parameters.
The yardstick of backing vacuum pump aims at the minimal energy consumption of its motor.Its nominal flow rate is selected as mainly
The function of the flow rate of dry type screw-type vacuum pump, but also consider gas emptying pipeline institute circle between main vavuum pump and check-valves
Fixed volume.This flow rate is not only able to be the 1/500 to 1/20 of the nominal flow rate of main dry type screw-type vacuum pump, and can
It is less than or more than these values.
Since the circulation of the emptying of room, the pressure of there is high, for example, equal to atmospheric pressure.In view of main dry
Compression in formula screw-type vacuum pump, the pressure superatmospheric power of the gas discharged in its exit is (if main pump goes out
Mouthful at gas be vented directly in air) or higher than downstream connection another equipment porch pressure.This is caused
The opening of check-valves.
When this check-valves is opened, because the pressure at its aspiration end is no better than the pressure at its discharge end, very
Slightly feel the action of backing vacuum pump.On the other hand, when check-valves is closed under a certain pressure (because the pressure in room
Power simultaneously decline), the action of backing vacuum pump cause the upstream of vacuum chamber and valve empty pipeline between pressure gap by
Gradually reduce.The pressure in the exit of main dry type screw-type vacuum pump becomes the pressure of the porch of backing vacuum pump, and it is exported
The pressure at place is always the pressure in the pipeline after check-valves.Vacuum valve is aided in pump more, main dry type screw-type vacuum pump
Exit (in the space that the check-valves by closing is limited) pressure decline it is more, therefore, room and main dry type screw rod
Pressure gap between the outlet of type vavuum pump is reduced.
The difference of this pettiness reduces the internal leakage in main dry type screw-type vacuum pump, and causes the drop of the pressure in room
Low, which improve final vacuum.It is used to compress in addition, main dry type screw-type vacuum pump consumes less energy, and produces more
Few compression heat.
On the other hand, also, it will be apparent that the research of mechanic concept is sought to reduce the gas of main dry type screw-type vacuum pump
Space between exhaust outlet and check-valves, it, which is aimed at, can more quickly reduce the pressure of there.
Brief description of the drawings
Shown in the context that the feature and advantage of the present invention will be later described with more details, this describes refer to the attached drawing
Example embodiment is provided with illustration and non-limiting way：
- Fig. 1 represents to be adapted for carrying out the pump of pumping method according to the first embodiment of the invention in a schematic way
Send system；And
- Fig. 2 represents to be adapted for carrying out the pump of pumping method according to the second embodiment of the invention in a schematic way
Send system.
Embodiment
Fig. 1 represents to be adapted for carrying out the pump for being used to produce vacuum of pumping method according to the first embodiment of the invention
Send system SP.
This pumping system SP includes room 1, and room 1 is connected to the suction for the main vavuum pump being made up of dry type screw type pump 3
End 2.The gas discharge outlet of main dry type screw-type vacuum pump 3 is connected to emptying pipeline 5.Non-return drain valve 6 is placed on
Empty in pipeline 5, emptying pipeline 5 is gone successively to after this check-valves in gas outlet pipe road 8.Check-valves 6 is closed when it
When allow the formation of the gas discharge outlet of main vavuum pump 3 and volume 4 contained between its own.
Pumping system SP also includes backing vacuum pump 7, and backing vacuum pump 7 is parallel capacitances connected in parallel to check-valves 6.Backing vacuum pump
Aspiration end be connected to the space 4 of emptying pipeline 5, and its discharge end is connected to pipeline 8.
The actuating of main dry type screw-type vacuum pump 3 is utilized, backing vacuum pump 7 is activated in itself.Main dry type spiral shell
Rod-type vavuum pump 3 compresses subsequently to exist by the gas that is connected in the suction room 1 of pipeline 2 of its porch, and by them
They are discharged into emptying pipeline 5 by its exit, through check-valves 6.When reaching the closing presure of check-valves 6, it is closed.From
Now start, the pumping of backing vacuum pump 7 causes the pressure in space 4 little by little to drop to the value of its pressure limit.Concurrently,
The power consumed by main dry type screw type pump 3 is gradually lowered.This occurs in short cycle, for example, certain of 5 to 10 seconds
In individual circulation.
Using the ingenious adjustment of the flow rate of backing vacuum pump 7 and using by based on the ingenious adjustment of the closing presure of check-valves 6
The function of the flow rate of dry type screw-type vacuum pump 3 and the volume of room 1 is wanted, can be additionally relative to the duration of emptying circulation
The time before closing to reduce check-valves 6, and therefore reduce the energy consumed during this operating time of auxiliary pump 7
Amount, without influence pumping.On the other hand, the fabulous reliability of the advantage imparting system of simplicity.
According to the first possibility, backing vacuum pump 7 is dry type screw type pump in itself.Therefore, main pump and auxiliary pump can
It is same type, this simplifies operation and processing.In addition, this combination of pump allow pumping system SP be used to can only using it is dry
In all applications of formula screw type pump.
According to other possibilities, backing vacuum pump 7 be claw pumps, multi-stage roots pump, membrane pump, dry type rotating vane pump or
Lubricating rotary vane pump.All these combinations of pump have the advantages that related to the particular community of the individual pump of each type.
Fig. 2 represents to be adapted for carrying out the pumping system SPP of pumping method according to the second embodiment of the invention.
Relative to the system shown in Fig. 1, the in check pumping system SPP of system representation shown in Fig. 2, it is also included
Suitable sensor 11,12,13, it checks the electric current (sensor 11) or main of the motor of main dry type screw-type vacuum pump 3
The pressure (sensor 13) of gas in the space limited by check-valves 6 of the discharge line of dry type screw-type vacuum pump or
The temperature of gas in the space limited by check-valves 6 of the discharge line in the exit of main dry type screw-type vacuum pump
The combination of (sensor 12) or these parameters.In fact, when main dry type screw-type vacuum pump 3 begins pumping the gas of vacuum chamber 1
During body, the electric current of such as its motor, the temperature of gas in the space 4 of discharge line and the parameter of pressure start to change and reached
The threshold value detected to sensor.After a time delay, this causes the startup of backing vacuum pump 7.When these parameters are returned
During to initial range (beyond setting value), backing vacuum pump is stopped with a time delay.
In Fig. 2 second embodiment of the invention, backing vacuum pump can be dry type screw type type, claw class
Type, multi-stage roots type, diaphragm type, dry type pivoting leaf type or lubricating rotary leaf type, such as of the invention first in Fig. 1
In embodiment.
Although having been described for different embodiments, will fully understand, it is impossible to limit mode be susceptible to it is all can
Can embodiment.Certainly, without departing from the scope of the present invention, it is contemplated that replacing described with equivalent arrangements
Means.A part for the general knowledge of all these technical staff formed in technical field of vacuum that retrofit.
Claims (18)
1. the pumping system (SP) for producing vacuum, the pumping system includes main vavuum pump, the main vavuum pump is that have
The dry type screw type pump (3) of gas suction intake (2) and gas discharge outlet (4), the gas suction intake (2) is connected to very
Empty room (1), the side that gas exhaust of the gas discharge outlet (4) in the outside of the pumping system exports (8) leads up to gas
Empty in pipeline (5),
The pumping system is characterised by：The pumping system is included：
- check-valves (6), is positioned between the gas discharge outlet (4) and gas exhaust outlet (8), and
- backing vacuum pump (7), is parallel capacitances connected in parallel to the check-valves.
2. pumping system according to claim 1, it is characterised in that the backing vacuum pump (7) is from dry type screw type pump, pawl
Selected in formula pump, multi-stage roots pump, membrane pump, dry type rotating vane pump and lubricating rotary vane pump.
3. pumping system according to claim 1 or 2, it is characterised in that the backing vacuum pump (7) is dry type screw type
Pump.
4. pumping system according to claim 1 or 2, it is characterised in that the backing vacuum pump (7) is claw pumps.
5. pumping system according to claim 1 or 2, it is characterised in that the backing vacuum pump (7) is multi-stage roots pump.
6. pumping system according to claim 1 or 2, it is characterised in that the backing vacuum pump (7) is membrane pump.
7. pumping system according to claim 1 or 2, it is characterised in that the backing vacuum pump (7) is dry type rotating vane
Pump.
8. pumping system according to claim 1 or 2, it is characterised in that the backing vacuum pump (7) is lubricating rotary blade
Pump.
9. pumping system according to any one of the preceding claims, it is characterised in that the backing vacuum pump (7) is designed
Into can be pumped during the whole time of gas contained during the main vavuum pump (3) pumps the vacuum chamber (1), and/or
Pumped during the whole time for the pressure that a restriction will be maintained in the vacuum chamber (1) in the main vavuum pump (3).
10. pumping system according to any one of the preceding claims, it is characterised in that the backing vacuum pump (7) is included
Discharge end, the discharge end is connected to gas emptying pipeline (5) in the downstream of the check-valves (6).
11. pumping system according to any one of the preceding claims, it is characterised in that the mark of the backing vacuum pump (7)
Flow rate is claimed to be selected as the volume that gas emptying pipeline (5) is limited between the main vavuum pump (3) and the check-valves (6)
Function.
12. pumping system according to any one of the preceding claims, it is characterised in that the mark of the backing vacuum pump (7)
Title flow rate is the 1/500 to 1/20 of the nominal flow rate of the main vavuum pump (3).
13. pumping system according to any one of the preceding claims, it is characterised in that the backing vacuum pump (7) is single
Level or multistage.
14. pumping system according to any one of the preceding claims, it is characterised in that the check-valves (6) is configured to
Pressure at the aspiration end of the main vavuum pump (3) is closed when being less than 500 absolute millibars.
15. pumping system according to any one of the preceding claims, it is characterised in that the backing vacuum pump (7) be by
Have what the material of high chemical resistance was made to the material and gas generally used in semi-conductor industry.
16. one kind is existed using the pumping method of pumping system according to any one of the preceding claims (SP), its feature
In,
- main the vavuum pump (3) is activated, to pump gas contained in the vacuum chamber (1), and these gases are discharged
Pass through the gas discharge outlet (4) of the main vavuum pump (3)；
- simultaneously, the backing vacuum pump (7) is activated；And
The whole time of-backing vacuum pump (7) gas contained in the main vavuum pump (3) pumps the vacuum chamber (1)
Period persistently pumps, and/or the main vavuum pump (3) will be maintained in the vacuum chamber (1) one restriction pressure it is whole
Persistently pumped during time.
17. pumping method according to claim 16, it is characterised in that the backing vacuum pump (7) is with the main vavuum pump
(3) the flow rate pumping of 1/500 to 1/20 order of magnitude of nominal flow rate.
18. the pumping method according to claim 16 or 17, it is characterised in that when the aspiration end of the main vavuum pump (3)
When the pressure at place is less than 500 absolute millibars, the check-valves (6) is closed.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/070691 WO2016045753A1 (en) | 2014-09-26 | 2014-09-26 | Vacuum-generating pumping system and pumping method using this pumping system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107002680A true CN107002680A (en) | 2017-08-01 |
Family
ID=51627293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480082186.8A Pending CN107002680A (en) | 2014-09-26 | 2014-09-26 | Pumping system and the pumping method using this pumping system for producing vacuum |
Country Status (15)
| Country | Link |
|---|---|
| US (1) | US20170298935A1 (en) |
| EP (1) | EP3198148B1 (en) |
| JP (1) | JP2017531125A (en) |
| KR (2) | KR20210102478A (en) |
| CN (1) | CN107002680A (en) |
| AU (1) | AU2014406724B2 (en) |
| BR (1) | BR112017005927B1 (en) |
| CA (1) | CA2961977A1 (en) |
| DK (1) | DK3198148T3 (en) |
| ES (1) | ES2780873T3 (en) |
| PL (1) | PL3198148T3 (en) |
| PT (1) | PT3198148T (en) |
| RU (1) | RU2670640C9 (en) |
| TW (1) | TWI725943B (en) |
| WO (1) | WO2016045753A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114787517A (en) * | 2019-12-19 | 2022-07-22 | 莱宝法国有限责任公司 | Lubricant sealed vacuum pump, lubricant filter and method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201800021148A1 (en) * | 2018-12-27 | 2020-06-27 | D V P Vacuum Tech S P A | VOLUMETRIC AUXILIARY PUMP FOR VACUUM GENERATION. |
| BE1027005B9 (en) | 2019-01-30 | 2020-10-19 | Atlas Copco Airpower Nv | Method of controlling a compressor to an unloaded state |
| FR3094762B1 (en) | 2019-04-05 | 2021-04-09 | Pfeiffer Vacuum | Dry type vacuum pump and pumping installation |
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- 2014-09-26 CA CA2961977A patent/CA2961977A1/en active Pending
- 2014-09-26 EP EP14777077.0A patent/EP3198148B1/en not_active Revoked
- 2014-09-26 JP JP2017516050A patent/JP2017531125A/en active Pending
- 2014-09-26 BR BR112017005927-4A patent/BR112017005927B1/en active IP Right Grant
- 2014-09-26 US US15/512,883 patent/US20170298935A1/en not_active Abandoned
- 2014-09-26 DK DK14777077.0T patent/DK3198148T3/en active
- 2014-09-26 WO PCT/EP2014/070691 patent/WO2016045753A1/en active Application Filing
- 2014-09-26 AU AU2014406724A patent/AU2014406724B2/en active Active
- 2014-09-26 RU RU2017114347A patent/RU2670640C9/en active
- 2014-09-26 PL PL14777077T patent/PL3198148T3/en unknown
- 2014-09-26 CN CN201480082186.8A patent/CN107002680A/en active Pending
- 2014-09-26 ES ES14777077T patent/ES2780873T3/en active Active
- 2014-09-26 PT PT147770770T patent/PT3198148T/en unknown
- 2014-09-26 KR KR1020177011372A patent/KR20170063839A/en not_active IP Right Cessation
-
2015
- 2015-09-21 TW TW104131132A patent/TWI725943B/en active
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| US20030068233A1 (en) * | 2001-10-09 | 2003-04-10 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201623801A (en) | 2016-07-01 |
| PL3198148T3 (en) | 2020-08-10 |
| AU2014406724A1 (en) | 2017-04-13 |
| KR20210102478A (en) | 2021-08-19 |
| EP3198148A1 (en) | 2017-08-02 |
| WO2016045753A1 (en) | 2016-03-31 |
| BR112017005927A2 (en) | 2017-12-19 |
| US20170298935A1 (en) | 2017-10-19 |
| JP2017531125A (en) | 2017-10-19 |
| RU2670640C1 (en) | 2018-10-24 |
| PT3198148T (en) | 2020-04-02 |
| KR20170063839A (en) | 2017-06-08 |
| TWI725943B (en) | 2021-05-01 |
| AU2014406724B2 (en) | 2019-09-19 |
| EP3198148B1 (en) | 2020-02-26 |
| ES2780873T3 (en) | 2020-08-27 |
| DK3198148T3 (en) | 2020-04-06 |
| RU2670640C9 (en) | 2018-12-04 |
| BR112017005927B1 (en) | 2022-07-12 |
| CA2961977A1 (en) | 2016-03-31 |
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