JP4045362B2 - Multistage positive displacement vacuum pump - Google Patents

Multistage positive displacement vacuum pump Download PDF

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Publication number
JP4045362B2
JP4045362B2 JP2001327229A JP2001327229A JP4045362B2 JP 4045362 B2 JP4045362 B2 JP 4045362B2 JP 2001327229 A JP2001327229 A JP 2001327229A JP 2001327229 A JP2001327229 A JP 2001327229A JP 4045362 B2 JP4045362 B2 JP 4045362B2
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Prior art keywords
vacuum pump
stage
exhaust
dry vacuum
exhaust pipe
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JP2001327229A
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JP2003155988A (en
Inventor
浩司 柴山
祐一 山下
充 矢作
孝彦 田島
純一 相川
智成 田中
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Ulvac Inc
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Ulvac Inc
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Priority to JP2001327229A priority Critical patent/JP4045362B2/en
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to PCT/JP2002/009048 priority patent/WO2003023229A1/en
Priority to KR1020047002269A priority patent/KR100876318B1/en
Priority to CNB028157117A priority patent/CN100348865C/en
Priority to US10/486,189 priority patent/US20040173312A1/en
Priority to TW091120409A priority patent/TWI267581B/en
Publication of JP2003155988A publication Critical patent/JP2003155988A/en
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Publication of JP4045362B2 publication Critical patent/JP4045362B2/en
Priority to US12/070,265 priority patent/US20080145238A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明はドライ真空ポンプ、特に省エネルギー型のドライ真空ポンプに関する。
【０００２】
【従来の技術】
図６は従来例の多段式ルーツ型のドライ真空ポンプ１を示すものであるが、図において本体２内にはモータ３の回転軸によって回転駆動されるロータ５、６、７、８、９、１０が図７及び図８で示すように一対で成るが、これらが相反する方向に駆動される。最終段のロータ１０が排気する最後段の排気空間には、サイレンサ１２を備えた排気配管１１が接続されており、この排気配管１１の大気側端部には逆止弁１３が設けられている。公知のように、各ロータ１乃至１０の各対が相反する方向に回転することにより、吸気口４に接続される不図示の真空室を排気し、排気ガスは排気配管１１を通り逆止弁１３を開弁させて大気に吐出される。ロータは前段から後段に向かうにつれて容積を小さくし、また後段の２つのロータ９、１０は図７に示すように五葉とされている。このように後段のロータを小さくすることにより、この多段式ルーツ型のドライ真空ポンプ１の消費電力を小としている。すなわち、後段側では必要な排気容量が前段より小さくなっているので、排気容量に合わせてロータを小さくして消費電力を小さくしている。
【０００３】
これにつき更に説明すれば、図９に示すように各ロータが同じ大きさであれば、図１２に示すように吸入圧力に対し排気速度は曲線ａのように変化するが、図１０に示すように前段の２つのロータは同じ大きさとし、中間段の２つをこれより小さく、後段の２つを更に小さくすれば、吸入圧力と排気速度との関係は曲線ｂのように変化する。更に図１１で示すように、後段の２つのロータを一層小さくすれば、図１２において曲線ｃで示すように排気速度は変化する。図１３はこれら図９、１０及び図１１の場合の吸入圧力に対する消費電力を示しているが、曲線ｃ′、ｂ′、ａ′で示すように、消費電力は図１１の場合が最も小さく、次いで図１０が続き、図９が最も大きい。
【０００４】
以上のようにして消費電力を小さくし、省エネルギーが行われるのであるが、消費電力を小さくする別の方式としては、モータ３を排気容量に応じて制御することにより消費電力を小さくすることも考えられている。
【０００５】
【発明が解決しようとする課題】
本発明は上述のような方法で得られる省エネルギー効果にとどまらず、より一層の省エネルギー効果が得られるドライ真空ポンプを提供することを課題とする。
【０００６】
【課題を解決するための手段】
上記課題は、最終段のロータが排気する最後段の排気空間に接続された主排気配管に大気への方向を順方向とする逆止弁を設けた多段式容積移送型ドライ真空ポンプにおいて、大気圧に近い中間段の排気空間または前記最後段の排気空間のいずれかに連なる副排気配管を設け、該副排気配管に接続され前記ドライ真空ポンプの運転中に前記排気空間を排気する補助ポンプであって、排気速度が前記ドライ真空ポンプの１〜２％である補助ポンプを前記逆止弁に並列に設けたことを特徴とする多段式容積移送型ドライ真空ポンプ、によって解決される。
【０００７】
【発明の実施の形態】
以下、本発明の実施の形態について図１〜図５を参照し説明する。なお、これら図においては従来例でその構造を明示したのでロータ等は簡略化して示す。
すなわち、図１に示す第１の実施の形態では、多段式ルーツ型のドライ真空ポンプ２０の本体２１内には、モータ２２により回転駆動されるそれぞれ一対のロータＲ1、Ｒ2、Ｒ3、Ｒ4、Ｒ5及びＲ6（例えば図８で示す形状とする）が設けられている。また本体２１の左端上壁部には吸気口２３が設けられており、最終段のロータＲ6が排気する最後段の排気空間２４は、サイレンサ２６および逆止弁２８を備えた主排気配管２５が接続されている。この逆止弁２８は大気側への方向を順方向としている。そして本発明の第１の実施の形態によれば、最後段の排気空間２４に接続された副排気配管２７にダイアフラムポンプで成る補助ポンプ３０が逆止弁２８と並列するように設けられている。
【０００８】
本発明の第１の実施の形態である多段式ルーツ型のドライ真空ポンプ２０は以上のように構成されるのであるが、次にこの作用について説明する。モータ２２を駆動すると、上述したように各ロータＲ1乃至Ｒ6により、それぞれが受け持つ排気空間の圧力の流体を下流側へと移送させる。よって、吸気口２３に接続された不図示の真空室は排気される。最後段の排気空間２４の圧力は大気圧に最も近いのであるが、本発明によれば排気空間２４の圧力は補助ポンプ３０の駆動により減圧され、最終段のロータＲ6による排気作用の負担は大幅に軽減される。すなわち、モータ２２の消費電力を従来よりも大幅に小とすることができる。例えば、定格消費電力３．７ｋＷのドライ真空ポンプ２０であれば、補助ポンプ３０の排気速度はこのドライ真空ポンプ２０の１％以下でも充分に上述の省エネルギー効果を得ることができる。もっともドライ真空ポンプ２０の使用条件によって異なり、例えばパージガスの流量やプロセスガスの流量によって上述の範囲内で変更される。なお、ドライ真空ポンプ２０の排気速度が１０００Ｌ／ｍｉｎ（６０ｍ3 ／ｈｒ）であるとすると、補助ポンプ３０の排気速度は１０乃至２０Ｌ／ｍｉｎですむ。この程度のダイアフラムポンプの定格電力は１００Ｗ程度である。図６の多段式ルーツ型のドライ真空ポンプ１を用いた場合には、定格消費電力を１．４乃至１．５ｋＷ程度まで小さくできるが、補助ポンプ３０を設けた本実施の形態である多段式ルーツ型のドライ真空ポンプ２０では、消費電力を約５００Ｗにまで低下させることができた。
【０００９】
図２は本発明の第２の実施の形態の多段式ルーツ型のドライ真空ポンプ２０′を示すものであるが、第１の実施の形態に対応する部分については同一の符号を付し、その詳細な説明は省略する。
【００１０】
すなわち本実施の形態によれば、第１の実施の形態と同様に最後段の排気空間２４は、サイレンサ２６および逆止弁２８を備えた主排気配管２５が接続されて大気へと連なる。更に、サイレンサ２６および逆止弁２８のバイパスとなるように主排気配管２５に副排気配管２７が接続され、補助ポンプ３０が逆止弁２８と並列に設けられる。この補助ポンプ３０の吐出口は配管４１を介して逆止弁２８の大気側に接続される。この実施の形態においては、補助ポンプ３０は主排気配管２５の逆止弁２８に並列して設けられているので、大容量のガスを排気する時は主排気配管２５に流れ、補助ポンプ３０が故障してもドライ真空ポンプ２０の性能は維持される。また、第１の実施の形態と同様な省エネルギー効果が得られることは明らかである。
【００１１】
図３は本発明の第３の実施の形態の多段式ルーツ型のドライ真空ポンプ２０′を示すものであるが、上記実施の形態に対応する部分については同一の符号を付し、その詳細な説明は省略する。すなわち、本実施の形態によれば、逆止弁２８のバイパスとな るように主排気配管２５に副排気配管２７が接続され、補助ポンプ３０は逆止弁２８に並列に設けられる。排気空間２４には、主排気配管２５を介して逆止弁２８および補助ポンプ３０が並列に接続されているので、上記実施の形態と同様な効果を奏することは明らかである。
【００１２】
図４に示す第４の実施の形態では、多段式ルーツ型のドライ真空ポンプ２０Ａの本体２１Ａ内には、モータ２２により回転駆動されるそれぞれ一対のロータＲ1、Ｒ2、Ｒ3、Ｒ4、Ｒ5及びＲ6が設けられている。また本体２１Ａの左端上壁部には吸気口２３が設けられており、最終段のロータＲ6が排気する最後段の排気空間２４は、サイレンサ２６および逆止弁２８を備えた主排気配管２５が接続されている。この逆止弁２８は大気側への方向を順方向としている。そして本発明の第４の実施の形態によれば、中間段の排気空間２４′に接続された副排気配管２７′にダイアフラムポンプで成る補助ポンプ３０′が逆止弁２８と並列するように設けられている。すなわち本体２１Ａには主排気配管２５とは別に副排気配管２７′が接続されている。なお、更に上流側の排気空間２４″に対応して副排気配管２７″を接続するようにしてもよい。
【００１３】
本発明の第４の実施の形態は以上のように構成されるのであるが、次にこの作用について説明する。モータ２２を駆動すると、上述したように各ロータＲ1乃至Ｒ6により、それぞれが受け持つ排気空間の圧力の流体を下流側へ移送する。よって、吸気口２３に接続された真空室は排気される。中間段の排気空間２４′の圧力は大気圧に近いのであるが、本発明の実施の形態でも補助ポンプ３０′の駆動により中間段の排気空間２４′が減圧される。よって、中間段のロータＲ5 以降の排気作用の負担は軽減される。すなわち、モータ２２の消費電力を従来よりも大幅に小とすることができる。
【００１４】
図５に示す第５の実施の形態では、多段式ルーツ型のドライ真空ポンプ２０Ｂの本体２１Ｂ内には、モータ２２により回転駆動されるそれぞれ一対のロータＲ1、Ｒ2、Ｒ3、Ｒ4、Ｒ5及びＲ6が設けられている。また本体２１Ｂの左端上壁部には吸気口２３が設けられており、最終段のロータＲ6が排気する最後段の排気空間２４は、サイレンサ２６および逆止弁２８を備えた主排気配管２５が接続されている。この逆止弁２８は大気側への方向を順方向としている。そして本発明の第５の実施の形態によれば、中間段の排気空間２４′に接続された副排気配管２７′にダイアフラムポンプで成る補助ポンプ３０′が逆止弁２８と並列するように設けられている。すなわち本体２１Ｂには主排気配管２５とは別に副排気配管２７′が接続されている。
【００１５】
本発明の第５の実施の形態は以上のように構成されるのであるが、次にこの作用について説明する。モータ２２を駆動すると、上述したように各ロータＲ1乃至Ｒ6 は、それぞれが受け持つ排気空間の圧力の流体を下流側へと移送する。よって、吸気口２３に接続された真空室は排気される。中間段の排気空間２４′の圧力は上流側より大気圧に近いのであるが、本発明の第５の実施の形態によれば補助ポンプ３０′の駆動により減圧される。よって、中間段のロータＲ4 以降の排気作用の負担は大幅に軽減される。すなわち、モータ２２の消費電力を従来よりも大幅に小とすることができる。
【００１６】
以上、本発明の各実施の形態について説明したが、勿論、本発明はこれらに限定されることなく、本発明の技術的思想に基づいて種々の変形が可能である。
【００１７】
例えば以上の実施の形態では、それぞれ対をなすロータＲ1乃至Ｒ6は全て同型同大としたが、これに代えて図６及び図１０、１１に示すように前段から後段に向かうにつれてロータの容積を小さくしてもよい。この場合には、以上の実施の形態よりも更に消費電力を小さくできることは明らかである。また、多段式ルーツ型のドライ真空ポンプに限らず、容積移送型のドライ真空ポンプ、例えばスクリュー型やクロー型でも同様の効果が得られる。
【００１８】
更にまた、以上の実施の形態では、補助ポンプとしてダイアフラムポンプを説明したが、これに限ることなく他のドライポンプ、例えばベーンポンプ、ピストンポンプ、スクロールポンプ等を用いてもよい。
【００１９】
また以上の実施の形態では、補助ポンプ３０、３０′は本体２１、２１′、２１Ａ、２１Ｂの周壁に形成した排気孔に配管を介して接続されたが、配管を介することなく、単に排気孔のみ形成し、本体内部に補助ポンプ機構を設けるようにしてもよい。
【００２０】
【発明の効果】
以上述べたように、本発明の多段式容積移送型ドライ真空ポンプによれば、従来よりも大幅な省エネルギー効果を得ることができる。
【図面の簡単な説明】
【図１】本発明の第１の実施の形態による多段式ルーツ型のドライ真空ポンプとその関連部分を示す模式図である。
【図２】本発明の第２の実施の形態による多段式ルーツ型のドライ真空ポンプとその関連部分を示す模式図である。
【図３】本発明の第３の実施の形態による多段式ルーツ型のドライ真空ポンプとその関連部分を示す模式図である。
【図４】本発明の第４の実施の形態による多段式ルーツ型のドライ真空ポンプとその関連部分を示す模式図である。
【図５】本発明の第５の実施の形態による多段式ルーツ型のドライ真空ポンプとその関連部分を示す模式図である。
【図６】従来例の多段式ルーツ型のドライ真空ポンプの部分破断側面図である。
【図７】図６における［７］−［７］線方向断面図である。
【図８】図６における［８］−［８］線方向断面図である。
【図９】多段のロータの大きさが等しい場合を示す模式図である。
【図１０】前段、中間段、後段とでロータの大きさを変えた場合の模式図である。
【図１１】前段、中間段及び後段において図１０に比べ更に後段の２つのロータを小さくした場合を示す模式図である。
【図１２】図９、図１０及び図１１のロータを用いた場合の多段式ルーツ型のドライ真空ポンプの吸入圧力と排気速度との関係を示す特性図である。
【図１３】同吸入圧力と消費電力との関係を示すチャートである。
【符号の説明】
２０、２０′、２０”、２０Ａ、２０Ｂ・・・ドライ真空ポンプ、
２２・・・モータ、
２４・・・最後段の排気空間、
２４′、２４″・・・中間段の排気空間、
２５・・・主排気配管、
２７、２７′・・・副排気配管、
Ｒ１、Ｒ２、Ｒ３、Ｒ４、Ｒ５、Ｒ６・・・ロータ、
３０、３０′・・・補助ポンプ、[0001]
BACKGROUND OF THE INVENTION
The present invention is a dry vacuum pump, more particularly an energy saving type dry vacuum pump.
[0002]
[Prior art]
FIG. 6 shows a conventional multi-stage roots type dry vacuum pump 1, in which a rotor 5, 6, 7, 8, 9, 10 and 10 are paired as shown in FIGS. 7 and 8, but they are driven in opposite directions. An exhaust pipe 11 provided with a silencer 12 is connected to the last exhaust space exhausted by the last rotor 10, and a check valve 13 is provided at an end of the exhaust pipe 11 on the atmosphere side . . As is known, by each pair of the rotors 1 to 10 is rotating in the opposite direction, the vacuum chamber (not shown) connected to the intake port 4 and the exhaust, the exhaust gas passes through the non-return exhaust pipe 11 The valve 13 is opened and discharged to the atmosphere. The rotor has a smaller volume as it goes from the front stage to the rear stage, and the two rotors 9 and 10 in the rear stage have five leaves as shown in FIG. Thus, the power consumption of the multi-stage roots type dry vacuum pump 1 is reduced by reducing the rotor at the rear stage. That is, since the required exhaust capacity is smaller on the rear stage side than on the front stage, the rotor is made smaller in accordance with the exhaust capacity to reduce the power consumption.
[0003]
If further described per this, if the rotor is the same size as shown in FIG. 9, the pumping speed with respect to the suction pressure as shown in FIG. 12 will vary as shown by curve a, as shown in FIG. 10 front two rotors same size Satoshi, two interstage medium less than this, if two of the rear stage even smaller, the relationship between the suction pressure and the pumping speed is varied as shown by the curve b in . As further shown in Figure 11, if even smaller two rotors of the rear-stage exhaust speed as shown by a curve c in FIG. 12 is changed. FIG. 13 shows the power consumption with respect to the suction pressure in the cases of FIGS. 9, 10 and 11. As shown by the curves c ′, b ′ and a ′, the power consumption is the smallest in the case of FIG. FIG. 10 then continues and FIG. 9 is the largest.
[0004]
To reduce the power consumption as described above, although the energy saving is made, as another method of reducing power consumption, also possible to reduce the power consumption by controlling in accordance with the motor 3 to the exhaust volume It is considered.
[0005]
[Problems to be solved by the invention]
This invention makes it a subject to provide the dry vacuum pump which can obtain the further energy saving effect not only in the energy saving effect obtained by the above methods .
[0006]
[Means for Solving the Problems]
The above-mentioned problem is large in a multi-stage positive displacement dry vacuum pump in which a check valve whose forward direction is the atmosphere is provided in the main exhaust pipe connected to the last exhaust space exhausted by the last stage rotor. An auxiliary pump that is connected to either the intermediate exhaust space close to the atmospheric pressure or the last exhaust space and that is connected to the auxiliary exhaust piping and exhausts the exhaust space during operation of the dry vacuum pump. The problem is solved by a multistage positive displacement dry vacuum pump characterized in that an auxiliary pump whose exhaust speed is 1 to 2% of that of the dry vacuum pump is provided in parallel with the check valve.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to FIGS. In these drawings, since the structure is clearly shown in the conventional example, the rotor and the like are shown in a simplified manner.
That is, in the first embodiment shown in FIG. 1, a multi-stage In the main body 21 of the Roots-type dry vacuum pump 20, the rotor R 1 of the pair, respectively Re their Ru is rotated by the motor 22, R 2, R 3 , R 4 , R 5 and R 6 (for example, the shape shown in FIG. 8) are provided. Further and air intake port 23 is provided on the left upper wall portion of the body 21, the exhaust space 24 of the last stage rotor R 6 in the final stage to exhaust, main exhaust pipe provided with a silencer 26 and a check valve 28 25 is connected . The check valve 28 has a forward direction toward the atmosphere. And according to a first embodiment of the present invention, provided we are as auxiliary pump 30 comprising a diaphragm pump to a secondary exhaust pipe 27 connected to the top rear stage of the exhaust space 24 is parallel with the check valve 28 Yes.
[0008]
The multi-stage roots type dry vacuum pump 20 according to the first embodiment of the present invention is configured as described above. Next, this operation will be described. When the motor 22 is driven, as described above, the rotors R 1 to R 6 transfer the fluid of the pressure of the exhaust space that each of the rotors R 1 to R 6 has to the downstream side. Therefore, a vacuum chamber (not shown) connected to the intake port 23 is exhausted. Although the pressure in the last exhaust space 24 is closest to the atmospheric pressure, according to the present invention, the pressure in the exhaust space 24 is reduced by driving the auxiliary pump 30, and the burden of exhaust action by the last rotor R 6 is reduced. It is greatly reduced. That is, the power consumption of the motor 22 can be significantly reduced as compared with the conventional case. For example, if the dry vacuum pump 20 has a rated power consumption of 3.7 kW, the above-described energy saving effect can be sufficiently obtained even if the pumping speed of the auxiliary pump 30 is 1% or less of the dry vacuum pump 20. However, it varies depending on the use conditions of the dry vacuum pump 20, and is changed within the above-mentioned range depending on, for example, the flow rate of the purge gas or the flow rate of the process gas. If the exhaust speed of the dry vacuum pump 20 is 1000 L / min (60 m 3 / hr), the exhaust speed of the auxiliary pump 30 can be 10 to 20 L / min. The rated power of the diaphragm pump of this level is about 100W. When the multi-stage roots type dry vacuum pump 1 of FIG. 6 is used, the rated power consumption can be reduced to about 1.4 to 1.5 kW, but the multi-stage type according to the present embodiment provided with the auxiliary pump 30 is used. With the roots type dry vacuum pump 20, the power consumption could be reduced to about 500W.
[0009]
FIG. 2 shows a multi-stage roots-type dry vacuum pump 20 'according to a second embodiment of the present invention. The parts corresponding to the first embodiment are denoted by the same reference numerals, and Detailed description is omitted.
[0010]
That is, according to the present embodiment, as in the first embodiment, the exhaust gas space 24 at the last stage is connected to the main exhaust pipe 25 having the silencer 26 and the check valve 28 connected to the atmosphere. Further, the sub-exhaust pipe 27 is connected to the main exhaust pipe 25 so as to bypass the silencer 26 and the check valve 28, the auxiliary pump 30 is found provided in parallel with the check valve 28. The discharge port of the auxiliary pump 30 is connected to the atmosphere side of the check valve 28 via a pipe 41. In this embodiment, since the auxiliary pump 30 is found provided in parallel to the check valve 28 of the main exhaust pipe 25, when evacuating the large gas flows to the main exhaust pipe 25, the auxiliary pump 30 Even if a failure occurs, the performance of the dry vacuum pump 20 is maintained. Further, it is clear that the same energy saving effect as that of the first embodiment can be obtained.
[0011]
FIG. 3 shows a multi-stage roots type dry vacuum pump 20 'according to a third embodiment of the present invention. The parts corresponding to those of the above-mentioned embodiment are denoted by the same reference numerals and detailed description thereof is omitted. Description is omitted. That is, according to this embodiment, the main exhaust pipe 25 auxiliary exhaust pipe 27 is connected to so that such a bypass check valve 28, the auxiliary pump 30 is found connected in parallel with the check valve 28. Since the check valve 28 and the auxiliary pump 30 are connected in parallel to the exhaust space 24 via the main exhaust pipe 25, it is obvious that the same effect as that of the above embodiment can be obtained.
[0012]
Figure In the fourth embodiment shown in 4, multistage In the main body 21A of the Roots dry vacuum pump 20A, the rotor R 1 of the pair, respectively Re their Ru is rotated by the motor 22, R 2, R 3 , R 4 , R 5 and R 6 are provided. Further and air intake port 23 is provided on the left upper wall portion of the main body 21A, the exhaust space 24 of the last stage rotor R 6 in the final stage to exhaust, main exhaust pipe provided with a silencer 26 and a check valve 28 25 is connected . The check valve 28 has a forward direction toward the atmosphere. And according to the fourth embodiment of the present invention, provided such auxiliary pump 30 comprising a diaphragm pump to a 'secondary exhaust pipe 27 connected to the' exhaust space 24 of the intermediate stage 'is parallel with the check valve 28 are et al. That is, a sub exhaust pipe 27 ′ is connected to the main body 21 </ b> A separately from the main exhaust pipe 25. Further, a sub exhaust pipe 27 "may be connected corresponding to the upstream exhaust space 24".
[0013]
The fourth embodiment of the present invention is configured as described above. Next, this operation will be described. When the motor 22 is driven, the fluid of the pressure in the exhaust space that each of the rotors R 1 to R 6 has is transferred to the downstream side as described above. Thus, a vacuum chamber connected to the air intake port 23 is evacuated. Although the pressure in the intermediate-stage exhaust space 24 'is close to atmospheric pressure, the intermediate-stage exhaust space 24' is decompressed by driving the auxiliary pump 30 'in the embodiment of the present invention. Therefore, the burden of the exhaust action after the intermediate stage rotor R 5 is reduced. That is, the power consumption of the motor 22 than the prior art can be significantly small.
[0014]
Figure In the fifth embodiment shown in 5, the main body 21B of the dry vacuum pump 20B of the multistage roots-type, a pair of rotors R 1, respectively Re their Ru is rotated by the motor 22, R 2, R 3 , R 4 , R 5 and R 6 are provided. Further and air intake port 23 is provided on the left upper wall portion of the main body 21B, the exhaust space 24 of the last stage rotor R 6 in the final stage to exhaust, main exhaust pipe provided with a silencer 26 and a check valve 28 25 is connected . The check valve 28 has a forward direction toward the atmosphere. According to the fifth embodiment of the present invention, the auxiliary pump 30 'formed of a diaphragm pump is provided in parallel with the check valve 28 in the auxiliary exhaust pipe 27' connected to the intermediate exhaust space 24 '. are et al. That is, a sub exhaust pipe 27 ′ is connected to the main body 21 B separately from the main exhaust pipe 25.
[0015]
The fifth embodiment of the present invention is configured as described above. Next, this operation will be described. When the motor 22 is driven, as described above, each of the rotors R 1 to R 6 transfers the fluid of the pressure in the exhaust space that each of the rotors R 1 to R 6 has to the downstream side. Thus, a vacuum chamber connected to the air intake port 23 is evacuated. Exhaust space 24 of the intermediate stage 'pressure is is closer than upstream side to atmospheric pressure, if the auxiliary pump 30 according to a fifth embodiment of the present invention' by Ri is reduced to drive the. Therefore, the burden of exhaust action after the intermediate stage rotor R 4 is greatly reduced. That is, the power consumption of the motor 22 than the prior art can be significantly small.
[0016]
As mentioned above, although each embodiment of this invention was described, of course, this invention is not limited to these, A various deformation | transformation is possible based on the technical idea of this invention.
[0017]
For example, in the above embodiment, the rotors R 1 to R 6 that make a pair are all the same type and size, but instead of this, as shown in FIGS. The volume may be reduced. In this case, it is clear that the power consumption can be further reduced as compared with the above embodiment. The same effect can be obtained not only with a multi-stage roots type dry vacuum pump but also with a volume transfer type dry vacuum pump such as a screw type or a claw type.
[0018]
Furthermore, in the above embodiment, the diaphragm pump has been described as the auxiliary pump. However, the present invention is not limited to this, and other dry pumps such as a vane pump, a piston pump, and a scroll pump may be used.
[0019]
In the above embodiment, the auxiliary pumps 30 and 30 'are connected to the exhaust holes formed in the peripheral walls of the main bodies 21, 21', 21A, and 21B through the pipes. Only an auxiliary pump mechanism may be provided inside the main body.
[0020]
【The invention's effect】
As described above, according to the multi-stage positive displacement type dry vacuum pump of the present invention, it is possible than before to obtain significant energy saving effect.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a multistage roots type dry vacuum pump and related parts according to a first embodiment of the present invention.
FIG. 2 is a schematic diagram showing a multi-stage roots-type dry vacuum pump and related parts according to a second embodiment of the present invention.
FIG. 3 is a schematic diagram showing a multi-stage roots type dry vacuum pump and related parts according to a third embodiment of the present invention.
FIG. 4 is a schematic diagram showing a multi-stage roots-type dry vacuum pump and related parts according to a fourth embodiment of the present invention.
FIG. 5 is a schematic diagram showing a multistage roots type dry vacuum pump and related parts according to a fifth embodiment of the present invention.
FIG. 6 is a partially cutaway side view of a conventional multi-stage roots type dry vacuum pump.
7 is a cross-sectional view taken along the line [7]-[7] in FIG. 6;
8 is a cross-sectional view taken along the line [8]-[8] in FIG.
FIG. 9 is a schematic diagram showing a case where multistage rotors have the same size.
FIG. 10 is a schematic view when the size of the rotor is changed between the front stage, the intermediate stage, and the rear stage.
FIG. 11 is a schematic diagram showing a case where two rotors at the rear stage are further reduced in the front stage, the intermediate stage, and the rear stage as compared with FIG. 10;
12 is a characteristic diagram showing the relationship between the suction pressure and the exhaust speed of a multi-stage roots type dry vacuum pump when the rotors of FIGS. 9, 10 and 11 are used. FIG.
FIG. 13 is a chart showing a relationship between the suction pressure and power consumption.
[Explanation of symbols]
20, 20 ', 20 ", 20A, 20B ... dry vacuum pump,
22 ... motor,
24: exhaust space at the last stage,
24 ', 24 "... exhaust space in the middle stage,
25 ... main exhaust pipe ,
27, 27 '... sub exhaust pipe ,
R1, R2, R3, R4, R5, R6 ... rotor,
30, 30 '... auxiliary pump,

Claims (4)

最終段のロータが排気する最後段の排気空間に接続された主排気配管に大気への方向を順方向とする逆止弁を設けた多段式容積移送型ドライ真空ポンプにおいて、
大気圧に近い中間段の排気空間または前記最後段の排気空間のいずれかに連なる副排気配管を設け、該副排気配管に接続され前記ドライ真空ポンプの運転中に前記排気空間を排気する補助ポンプであって、排気速度が前記ドライ真空ポンプの１〜２％である補助ポンプを前記逆止弁に並列に設けたことを特徴とする多段式容積移送型ドライ真空ポンプ。In the multistage positive displacement dry vacuum pump provided with a check valve whose forward direction is to the atmosphere on the main exhaust pipe connected to the last exhaust space exhausted by the last stage rotor,
Auxiliary pump for providing a sub exhaust pipe connected to either the intermediate stage exhaust space close to atmospheric pressure or the last stage exhaust space, and exhausting the exhaust space during operation of the dry vacuum pump connected to the sub exhaust pipe A multi-stage volumetric transfer type dry vacuum pump, wherein an auxiliary pump having an exhaust speed of 1 to 2% of the dry vacuum pump is provided in parallel with the check valve. 前記副排気配管を前記最後段の排気空間または前記主排気配管に接続して設けたことを特徴とする請求項1記載の多段式容積移送型ドライ真空ポンプ。  2. The multistage positive displacement dry vacuum pump according to claim 1, wherein the sub exhaust pipe is connected to the last exhaust space or the main exhaust pipe. 前記副排気配管の大気側の端部を前記主排気配管に設けられた前記逆止弁の大気側に接続したことを特徴とする請求項１または請求項２のいずれか１項記載の多段式容積移送型ドライ真空ポンプ。  The multistage system according to any one of claims 1 and 2, wherein an end portion on the atmosphere side of the auxiliary exhaust pipe is connected to an atmosphere side of the check valve provided in the main exhaust pipe. Volumetric dry vacuum pump. 前記多段式容積移送型ドライ真空ポンプの後段部の少なくとも１個のロータを前段部のロータより小さくして前記後段部の排気空間の容積を前記前段部の排気空間の容積より小さくしたことを特徴とする請求項１乃至請求項３のいずれか１項記載の多段式容積移送型ドライ真空ポンプ。  At least one rotor in the rear stage of the multistage positive displacement vacuum pump is made smaller than the rotor in the front stage so that the volume of the exhaust space in the rear stage is smaller than the volume of the exhaust space in the front stage. The multistage volumetric transfer type dry vacuum pump according to any one of claims 1 to 3.
JP2001327229A 2001-09-06 2001-10-25 Multistage positive displacement vacuum pump Expired - Lifetime JP4045362B2 (en)

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JP2001327229A JP4045362B2 (en) 2001-09-06 2001-10-25 Multistage positive displacement vacuum pump
KR1020047002269A KR100876318B1 (en) 2001-09-06 2002-09-05 Operation method of vacuum exhaust device and vacuum exhaust device
CNB028157117A CN100348865C (en) 2001-09-06 2002-09-05 Vacuum exhaust appts. and drive method of vacuum appts.
US10/486,189 US20040173312A1 (en) 2001-09-06 2002-09-05 Vacuum exhaust apparatus and drive method of vacuum apparatus
PCT/JP2002/009048 WO2003023229A1 (en) 2001-09-06 2002-09-05 Vacuum pumping system and method of operating vacuum pumping system
TW091120409A TWI267581B (en) 2001-09-06 2002-09-09 Vacuum exhaust device and method for operating such vacuum exhaust device
US12/070,265 US20080145238A1 (en) 2001-09-06 2008-02-15 Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus

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