EP3132256A1 - Dispositif de détection d'un paramètre d'un gaz, procédé pour faire fonctionner un tel dispositif et système de mesure pour déterminer un paramètre d'un gaz - Google Patents

Dispositif de détection d'un paramètre d'un gaz, procédé pour faire fonctionner un tel dispositif et système de mesure pour déterminer un paramètre d'un gaz

Info

Publication number
EP3132256A1
EP3132256A1 EP15715256.2A EP15715256A EP3132256A1 EP 3132256 A1 EP3132256 A1 EP 3132256A1 EP 15715256 A EP15715256 A EP 15715256A EP 3132256 A1 EP3132256 A1 EP 3132256A1
Authority
EP
European Patent Office
Prior art keywords
layer
membrane
gas
cavity
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15715256.2A
Other languages
German (de)
English (en)
Inventor
Andreas Krauss
Christoph Schelling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3132256A1 publication Critical patent/EP3132256A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure

Definitions

  • Device for detecting a parameter of a gas Device for detecting a parameter of a gas, method for operating such a device and measuring system for determining a parameter of a gas
  • the present invention relates to a device for detecting a parameter of a gas, to a measuring system for determining a parameter of a gas, to a method for operating a device for detecting a parameter of a gas, to a corresponding device and to a corresponding computer program.
  • Exhaust gas sensors for the detection of oxygen or nitrogen oxides are currently produced almost exclusively in ceramic technology or LTCC (Low Temperature Cofired Ceramics, low-temperature incineration ceramics).
  • Active layers which are used as ionic conductor, are usually made of yttria stabilized zirconia (YSZ) and are combined with other layers, eg. Example, alumina-based insulating layers or conductive layers, for. B. of Pt, which is structured and burned on metal paste pressure.
  • pressure sensors are known, which can measure small differential pressures or absolute pressures via a deformable membrane with very high resolution, wherein in the absolute pressure measurement with a gas-tight cavity a constant amount of gas trapped is used.
  • Known processes for the production of cavities which would be suitable, inter alia, for use in the sensors are, for.
  • DE 102004036032 A1 discloses a method for producing a
  • a membrane above a region in the semiconductor substrate is formed with a first doping and by means of a second epitaxial layer, which is applied to the semiconductor substrate, a structured stabilizing element is attached to the semiconductor substrate ,
  • Apparatus for detecting a parameter of a gas a measuring system for determining a parameter of a gas, a method for operating a device for detecting a parameter of a gas, furthermore a device using this method, and finally a
  • An apparatus for detecting a parameter of a gas having a cavity for receiving the gas comprises two layers of an electrically conductive
  • Pressure sensing element a combined sensor consisting of a pressure sensor and a gas sensor based on an electrical voltage between the layers of the electrically conductive material can be realized.
  • a constructed according to the concept presented here sensor device allows an improvement of the detection of gases by means of
  • ion-conducting materials are directly and indirectly measurable, so z.
  • oxygen or noxious gases such as nitrogen oxides, in particular in the exhaust gas z.
  • a little effort-requiring measuring mode that integrates over time can be realized. This can take into account applicable emission standards which, instead of detecting momentary concentrations, incorporate integrated values, e.g. B. the
  • the proposed concept also allows for a reduction of
  • Power consumption and the heating of the sensors for example, by bringing in the operation of the device, only the ion-conducting layers and not the sensors as a composite on a heater to operating temperature.
  • a location of the sensors can be chosen freely, for example, with a long distance from unfavorable for a housing of the device, high exhaust gas temperatures of a
  • a device for detecting a parameter of a gas having the following features: at least one cavity for receiving the gas from an external space; at least one membrane for separating the cavity from the outer space, a first side of the membrane facing the outer space having a first layer of electrically conductive material and a cavity facing, the first side opposite, second side of the membrane a second layer of an electrically conductive material and wherein at least a portion of the membrane comprises an ion conducting material; and at least one pressure measuring element arranged on the membrane for detecting a gas pressure in the cavity.
  • the device may be a sensor device for determining a gas concentration, e.g. B. in the exhaust of a vehicle act.
  • one or more parameters of the gas can be detected, for example a size of a pumping current required for pumping the gas into the cavity and / or a gas pressure of the gas in the cavity.
  • the at least one cavity may be in the form of a well in a substrate for supporting individual ones
  • Elements of the device may be applied, for example, by an executed on a surface of the substrate etching.
  • the exterior space may refer to an environment outside the cavity.
  • the exterior space may extend between the membrane and a housing of the device or beyond. In the outer space can prevail an ambient pressure.
  • the diaphragm may be made of a material that permits elastic deformation and may be configured to form a bulge in the direction of the outside space in response to a gas pressure inside the cavity.
  • the membrane may be formed by means of the ion-conducting material to allow diffusion of the gas between the outer space and the cavity.
  • the first and second layers of an electrically conductive material may be metal layers, to which an electrical potential can be applied via electrical contact terminals arranged on them and / or at which an electrical potential can be tapped off via the contact terminals.
  • the pressure measuring element may, for example, be arranged and formed on the side of the membrane facing the outer space in order to detect the gas pressure piezoelectrically or piezoresistively. For example, it may be at the
  • Pressure measuring element act around a strain gauge or the
  • Pressure measuring element may have a strain gauge.
  • the first layer of an electrically conductive material, the membrane and the second layer of an electrically conductive material may be formed to the gas at an applied voltage between the first layer and the second layer to pump through the membrane.
  • the first layer of an electrically conductive material, the membrane and the second layer of an electrically conductive material may be formed to generate an electrical voltage between the first layer and the second layer upon diffusion of the gas through the membrane. So can easily by means of a
  • the first layer of an electrically conductive material and / or the second layer of an electrically conductive material may comprise a gas-permeable noble metal.
  • a gas permeability of the membrane or the ion-conducting portion of the membrane can be advantageously obtained.
  • the first layer of an electrically conductive material and / or the second layer of an electrically conductive material may have a first electrical contact connection and a second electrical contact connection and be designed to be electrically conductive between the first electrical contact connection and the first second electrical contact terminal to heat at least a portion of the membrane.
  • a required for the heating of the membrane heat can be generated by applying different electrical potentials to the first and second electrical contact connection in a simple manner. So can be dispensed with a heating element in the device and thus costs and space can be saved.
  • the pressure measuring element can be arranged outside the portion of the membrane to be heated.
  • a measuring functionality of the pressure measuring element is not damaged by temperature fluctuations or the pressure measuring element
  • the first layer of an electrically conductive material and / or the second layer of an electrically conductive material may be formed meander-shaped, for example, a plane substantially parallel to the first and second sides of the membrane
  • the position of an electrically conductive material, which is used for heating the portion of the membrane have the meandering course. So can be provided in a simple and robust way for optimal heating of the membrane, a prolonged heating.
  • a non-gas-permeable material for the layers of an electrically conductive
  • the device may include a stop member for limiting deflection of the diaphragm.
  • the stop element may in particular be arranged on a bottom of the cavity.
  • the device may have at least one second pressure measuring element.
  • the second pressure measuring element may be arranged at a position deviating from a position of the pressure measuring element further position on the membrane.
  • a detection direction of the pressure measuring element may differ from a detection direction of the further pressure measuring element.
  • the detection direction may be a direction in which the pressure-measuring element undergoes a physical and / or chemical change in picking up a measured variable. If the pressure measuring element is designed, for example, as a strain gauge, the detection direction of a strain direction of
  • Embodiment allows an even more accurate determination of the gas pressure.
  • the device may comprise at least one further cavity for receiving the gas from an outer space, at least one further membrane for separating the further cavity from the one External space and at least one further arranged on the membrane
  • a first side of the further membrane facing the outer space may have a further first layer of an electrically conductive material and a further second layer of an electrically conductive material facing the further cavity facing the first side, second side of the further membrane. At least a portion of the further membrane may comprise the ion conducting material.
  • two or more sensor elements can be integrated on the device. By the sensor elements can be used independently for the measuring process, can easily a
  • a time-integrating mode for detecting the gas can be realized.
  • a measuring system for determining a parameter of a gas is also presented, wherein the measuring system has the following features: the device according to one of the above explained
  • Embodiments and an evaluation device, wherein the evaluation device is coupled to the first layer of an electrically conductive material and / or the second layer of an electrically conductive material and / or the pressure measuring element and is designed to be based on at least one electrical potential of the first layer and / or second position and / or based on the detected by the pressure measuring element gas pressure in the cavity to determine the parameter of the gas.
  • the evaluation device may be configured to determine the gas alternately or simultaneously based on the electrical potential and based on the gas pressure.
  • the evaluation device can be designed to determine the determination of the time-integral measurement Gas over a predetermined period, such as a ride of a vehicle repeatedly perform.
  • a method for operating a device for detecting a parameter of a gas wherein the device has at least one cavity for receiving the gas from an outer space, at least one membrane for separating the cavity from the outer space, wherein a first side of the membrane facing the outer space a first layer of an electrically conductive material and a cavity facing, the first side opposite, second side of the membrane has a second layer of an electrically conductive material and at least a portion of the membrane has an ion-conducting material, and at least one arranged on the diaphragm pressure measuring element for detecting a gas pressure in the cavity, and wherein the method comprises the following steps:
  • the electrical quantity if it is detected at the first layer and / or the second layer, may be, for example, an electric current intensity of a pumping current for pumping the gas through the membrane. If the electrical variable is detected by the pressure measuring element, this may be an electrical voltage based on an elastic deformation of the pressure measuring element.
  • the method may further comprise a step of re-applying the voltage between the first layer and the second layer to pump the gas out of the cavity through the membrane into the exterior space and, correspondingly, a step of re-detecting the electrical quantity at least at the first layer and / or the second layer and / or on the pressure sensing element to recapture the parameter of the gas.
  • the method of operating the device may be implemented as a pulse width modulation method, wherein the step of applying the electrical voltage between the first layer and the second layer alternately with a step of applying an electrical voltage across the first layer or the second layer for heating the
  • Section of the membrane is executed.
  • an advantageous combined heating of the membrane and determination of the measured value of the gas can be carried out by means of one and the same device element.
  • the approach presented here also provides a device which is designed to implement the steps of a variant of a method presented here
  • a device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon.
  • the device may have an interface, which may be formed in hardware and / or software.
  • the interfaces can be part of a so-called system ASIC, for example, which contains a wide variety of functions of the device.
  • the interfaces are their own integrated circuits or at least partially consist of discrete components.
  • the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.
  • a computer program product or computer program with program code which is stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical disk Memory may be stored and for carrying out, implementing and / or controlling the steps of the method according to one of the above
  • FIG. 1 shows a cross section of an apparatus for detecting a parameter of a gas, according to an embodiment of the present invention.
  • FIG. 2 is a plan view of an apparatus for detecting a parameter of a gas according to another embodiment of the present invention
  • FIG. 3 is a block diagram of a measuring system for determining a
  • FIG. 4 is a flowchart of a method for operating a device for detecting a parameter of a gas, according to an embodiment of the present invention.
  • FIG. 1 shows a schematic representation of a cross-section of an apparatus 100 for detecting a parameter of a gas, according to an embodiment of the present invention.
  • the device 100 may be installed in a vehicle and configured to provide a concentration of
  • the device 100 may also be referred to as a sensor device or a sensor.
  • the Device 100 has a substrate 102 in which a chamber or cavity 104 is applied.
  • the cavity 104 is covered by a membrane 106.
  • the membrane 106 separates the cavity 104 from an exterior space 108.
  • a first side 110 of the membrane 106 faces the exterior space 108, and a second side 112 of the membrane 106 opposite the first side 110 faces the cavity 104.
  • the first side 110 of the membrane 106 has a first layer 114 of an electrically conductive material, and the second side 112 of the membrane 106 has a second layer 116 of an electrically conductive material.
  • a pressure measuring element 118 Spaced from the first layer 114 of an electrically conductive material is a pressure measuring element 118 for detecting a gas pressure in the cavity 104 on the first side 110 of the membrane 106.
  • the pressure measuring element 118 thus forms a pressure sensor element of the device 100.
  • the substrate 102 is formed of silicon. Alternatively, other materials suitable for MEMS technologies may be used.
  • the substrate 102 u. a. as a carrier, in particular for the membrane 106 and the pressure measuring element 118.
  • the pressure measuring element 118 here not shown here-also needed for a pressure measurement
  • a temperature sensor e.g. a thermosensor
  • thermoelectric elements As a temperature sensor but also other elements of the sensor can be used, e.g. the resistance of a heater or a position 114 or 116 designed as a heater
  • the cavity 104 has been machined out of a surface or main side 120 of the substrate 102, for example by means of an etching process.
  • a region of the surface 120 of the substrate 102 surrounding the cavity 104 is covered by an insulating layer 122.
  • the cavity 104 is formed as a cuboidal trough having a flat rectangular bottom 124 and a wall 126 perpendicular to the bottom 124.
  • the cavity 104 is formed flat in that dimensions of the bottom 124 exceed a height of the wall 126.
  • the chamber 104 is made as flat as possible to
  • the minimum size of the chamber or cavity 104 may further be determined by reliability aspects, for example, a required minimum size for a pumping element to ensure a function even with deposits.
  • the membrane 106 has a rectangular shape corresponding to the bottom 124 of the cavity 104, dimensions of the membrane 106 being greater than the dimensions of the bottom 124 of the cavity 104. As the illustration in FIG.
  • a circumferential edge region of the membrane 106 is fixed to the insulating layer 122 of the substrate 102 on an edge region of the substrate 102 which surrounds the cavity 104 and thus separates the cavity 104 from the outer space 108.
  • the membrane 106 is formed from an elastic material and can in response to a prevailing in the cavity 104 relative to the outer space 108 pressure in the direction of the cavity 104 and in the direction of
  • Exterior 108 arches. To permit transport of the gas through the membrane 106, at least a portion of the membrane 106 has
  • the layers 114, 116 are positioned congruently centered on the respective sides 110, 112 of the membrane 106 parallel to a plane in which the membrane 106 extends.
  • the layers 114, 116 have in the plane of the membrane 106 smaller dimensions than the membrane 106 us in particular as the cavity 104 and are thus spaced from the substrate 102.
  • Embodiments also other metals and / or gas-permeable substances and non-metals for the layers 114, 116 are used.
  • the first layer 114 and the second layer 116 of electrically conductive material are used as electrodes for generating a pumping current for pumping gas through the membrane 106 from the outer space 108 into the cavity 104 and / or the cavity 104 inserted into the outer space 108.
  • both layers 114, 116 each have at least one electrical contact connection 127.
  • the device 100 is formed using the layers 114, 116 in the above-mentioned embodiment to generate an electrical voltage between the first layer 114 and the second layer 116 upon diffusion of the gas through the membrane 106.
  • the pressure sensing element 118 is configured as a strain gauge and configured to provide an electrical voltage based on elastic deformation of the diaphragm 106 due to pump flow based gas transport into the cavity 104 or cavity 104 to create.
  • the embodiment of the device 100 shown in FIG. 1 has a stop element 128.
  • the stopper member 128 is shown in the illustration
  • Stop element 128 as the insulating layer 122 comprise an electrically insulating material.
  • the stopper member may be made conductive so that upon contact between the conductive layer 116 and the stopper member 128, e.g. the pumping process is interrupted.
  • the cavity can also be made so that during normal operation of the sensor there is a contact between 116 and 128 and that due to an impermissibly high internal pressure, a bulging of the membrane to a
  • the second or lower layer 116 of the electrically conductive material is meander-shaped in a plane parallel to the plane of the membrane 106 and is additionally used here as a heating element for heating one between the layers 114, 116 lying portion 130 of the membrane 106 is inserted.
  • this has a second electrical contact terminal 132.
  • the pressure measuring element 118 is disposed outside of the heated portion 130 of the membrane 106.
  • the exemplary sensor 100 shown in FIG. 1 comprises the membrane 106, which divides the interior or cavity 104 and, according to exemplary embodiments, further interior spaces 104 in the form of a closed or limited diffusion-open cavity and the exterior space 108, as well as the element 106
  • outside space 108 is arranged. At least the part 130 of the membrane 106 made of ion-conductive material is designed to be heated.
  • the strain gauge 118 is disposed outside the heated region 130 of the membrane 106.
  • the device 100 may also have further strain gauges 118, which may be arranged on the membrane 106 at further positions deviating from a position of the first strain gage 118.
  • the gas or a plurality of gases is defined from the outer space 108 in the interior or the cavity 104 of the sensor 100 is moved and / or vice versa.
  • This "pumping" of gas provides pressure differences between the inner space 104 and the outer space 108 provided by the pressure sensor 118 here in the form of
  • the cavity 104 is covered by the membrane 106.
  • Membrane 106 is detected by the measuring element 118 z. B. piezoelectric or piezoresistive detected.
  • the here central portion 130 of the membrane 106 is heated by the membrane heater here in the form of the lower electrode 116.
  • the two electrodes 114, 116 above and below the ion-conducting membrane 106 is by applying an electric current gas, in particular
  • the pressure changes, which can be measured by the bending of the membrane 106.
  • the lower electrode 116 has a meandering shape and is simultaneously used as a heater for the membrane 106. In this pumping of gas to the outside, a higher pumping current flow, so that a short regeneration time can be achieved until the start of a next measurement.
  • the pumping of the gas into the closed chamber 104 via the ion-conducting element 106 leads there to a pressure increase, over the
  • Pressure measuring element 118 is measured piezoelectric or piezoresistive. When measuring pumping current and pressure, the gas concentration is measured. In an advantageous mode of operation of the sensor 100, the gas is first pumped into the chamber 104 and then out of the chamber 104, and both processes are measured. This allows the function of the complete
  • Sensors 100 are monitored in the sense of a self-test.
  • the gas accumulates in the chamber 104 until with the pressure sensor 118, the amount of gas pumped into the chamber 104 can be determined with sufficient accuracy.
  • the gas in the interior 104 is then pumped outward again, this process with an integration of the pumping current, so the flow of pumped pump, provides additional information about the amount of gas previously accumulated in the chamber 104.
  • Sensor element 100 may be operated at ambient temperature or at a constant but only slightly above ambient temperature, e.g. B. on the heat dissipation from the heated membrane 106 or via a second heater.
  • the heating in the membrane 106 can also determine the presence of gas in the chamber 104 and possibly also on the basis of different behavior with temperature changes of its composition.
  • a pressure increase which can be measured with the sensor element 118.
  • a function check or integrity check of the sensor 100 can be carried out at the same time.
  • a defined increase in temperature must be at a defined, possibly previously determined via a calibration,
  • Heater for the membrane 106 used simultaneously as the lower electrode 116 This is here by the execution of the second electrically conductive layer 116 as a gas-permeable noble metal layer, for. B. of Pt or of a Pt-Rh alloy achieved.
  • the heatable second electrically conductive layer 116 is structured in a meandering shape and has the two electrical
  • connections 127, 132 can be used either for heating by connecting to the two terminals 127, 132 a
  • this metal layer 116 can be made very low, so that the applied Heating voltage is very small and compared to the counterelectrode formed here by the first electrically conductive layer 114 has a nearly constant potential. As a result, only slight charging or polarization effects are formed in the membrane 130 on the side 112, which leads to a smaller influence on the measuring accuracy.
  • Pulse width modulation method may be applied in the off-phase, a potential to the lower electrode 116 or a voltage applied to the lower electrode 116 potential can be measured.
  • all electrodes which are connected to the heated, ion-conducting layer 106 are switched to high impedance, in order to avoid charging or Polarrisations bine through potential differences to the heater 116 down.
  • the second electrically conductive layer 116 may be used exclusively as an electrode and a separate heater for heating the membrane 106 may be installed.
  • Fig. 2 shows a plan view of another embodiment of the
  • Device 100 for detecting a parameter of a gas As the
  • the substrate 102 of the exemplary embodiment shown in FIG. 2 has four cavities 104 which are formed in the substrate 102 in a square and uniformly spaced from one another. Each of the four cavities 104 is in turn covered by a first electrically conductive layer 114 and a second electrically conductive layer 116 having at least partially ion-conducting membrane 106.
  • a construction of each portion 104 of the device 100 having a cavity corresponds to that of the single-cavity embodiment shown in FIG. 1 and also comprises the same elements, with the difference that in the exemplary sensor 100 shown in FIG Assigned plurality of four here again designed as strain gauges pressure measuring elements 118.
  • Each of the four regions 104 of the device 100 having a cavity 104 forms, as it were, one of four identical sensor elements 200 of the sensor 100. As shown in Fig. 2, for each cavity 104 having portion of the sensor 100 centered on each of the four sides of the rectangular cavity 104 each have a pressure sensing element 118 at a junction between the membrane 106 and the insulating layer 122 of the substrate 102 and spaced from the respective electrically conductive layer 114.
  • strain gauges 118 arranged on opposite sides of the cavity 104 each have a common detection direction 202 marked by a directional arrow, which is transverse to a further common detection direction 204 of the other two on opposite sides of the cavity 104 marked by a directional arrow arranged strain gauge 118 extends.
  • the sensor 100 is suitable for use for the compensation of pressure fluctuations and for integrating measurements. This is realized by, for example, a first of
  • Sensor elements 200 z. B. measures only the ambient pressure, a second or a second and third of the sensor elements 200 offset by pumping time, but overlapping, measures the gas concentration or measure and a fourth of the sensor elements 200 is pumped empty. Ideally, the function of the sensor elements 200 will rotate after a certain time. In case of failure of one of the elements 200 can advantageously be further evaluated in an emergency operation.
  • one of the four sensor elements 200 or another sensor element can be used as a reference pressure sensor without pumping function. It can also have multiple or all of the sensor elements 200 have the same functionality in time-shifted operation, wherein z. B. a first of the sensor elements 200 gas in its chamber 104 pumps, a second of the sensor elements 200 is pumped empty in this time and a third of the sensor elements 200 as
  • Reference element for the fluctuating pressure in the outer space 108 is used.
  • - measuring elements at least the temperature and also an exhaust gas mass flow can be measured in order to be able to infer the actual flow mass of the exhaust gas and thus the gas concentration.
  • a pumping method for pumping gas through the membranes 106 and a pressure measuring method by means of the pressure measuring elements 118 can be increased. Due to the redundancy of the sensor elements 200 increases the reliability of the example used in the onboard diagnostics of a vehicle sensor 100. To a further increase in accuracy can also at least temporarily and or during a calibration some elements in a same mode (eg pure pressure measurement or pumps up to a certain pressure) so as to each time calibration parameters for each
  • an evaluation unit can respond appropriately, for. to issue a warning.
  • FIG. 2 exemplified redundant design of the device 100 with a plurality of smaller chambers 104 and sensors 200 offers in addition to the above-mentioned advantage that the individual elements 200 are operated alternately in regular operation, the possibility for a functional test of the sensor 100 the To be able to operate sensor elements 200 temporarily simultaneously.
  • the function check can take place by comparing the measurement results of the individual sensors 200 after the simultaneous operation.
  • stop elements for restricting the movement of the membrane 106 are also arranged in the cavities 104 in the embodiment 100 of the device 100 shown in FIG not visible in the illustration in FIG. 2).
  • the measuring system 300 comprises an exemplary embodiment of the device 100 explained with reference to FIG. 1 as well as an evaluation device 302 coupled to the device 100 and is used in a vehicle 304 for determining a noxious gas concentration in an exhaust gas 306 of the vehicle 304.
  • the vehicle 304 may be a road-bound vehicle such as a passenger car or a truck.
  • a line system 308 of the vehicle 304 is a partial flow of the gas or
  • the evaluation device 302 is coupled to the first layer of an electrically conductive material and / or the second layer of an electrically conductive material and / or the pressure measuring element of the device 100 (not explicitly shown in the illustration in FIG. 3) and designed to determine the pollutant gas concentration in the exhaust gas 306 based on at least one electrical potential of the first layer and / or the second layer and / or based on the gas pressure detected in the cavity of the device 100 by the pressure measuring element.
  • the measuring system 300 can be located at any position in the
  • Vehicle 304 for example, also far away from an engine compartment 310 of the vehicle 304th
  • the device 100 illustrated in FIGS. 1 to 3 may be a miniaturized combined gas and gas turbine based on MEMS technology
  • Pressure sensor act A production of the sensor 100 presented here takes place according to embodiments via a modified
  • Pressure sensor manufacturing process In the sensor manufacturing can under
  • B. YSZ high temperature method can be used, for.
  • 4 shows a flowchart of one embodiment of a method 400 for operating a device for detecting a parameter of a gas. The method 400 may be carried out to operate a sensor as presented with reference to FIGS. 1 to 3 discussed above.
  • a step 402 an electrical voltage is applied between a first layer and a second layer of electrically conductive material of the sensor to move gas through an ion-conducting membrane arranged between the first and the second layer from an outer space into a cavity of the sensor arranged below the membrane to pump.
  • a step 404 an electrical variable is detected at the first layer and / or the second layer and / or at a pressure measuring element of the sensor arranged on the membrane in order to detect the parameter of the gas.
  • the voltage is again applied between the first layer and the second layer to pump the gas through the membrane from the cavity into the outer space. This is followed by a step 408 of re-detecting the electrical quantity at the first layer and / or the second layer and / or at the first layer
  • Pressure measuring element to recapture the parameter of the gas.
  • the method 400 may be implemented as a
  • Pulse width modulation method are executed.
  • the step 402 of the application of the electrical voltage or the step 406 of the renewed application of the electrical voltage alternately with a step of
  • Main application option is a lambda probe
  • an exemplary embodiment comprises an "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

L'invention concerne un dispositif (100) pour détecter un paramètre d'un gaz. Ledit dispositif (100) comprend au moins une cavité (104) pour accueillir le gaz provenant d'une chambre extérieure (108), au moins une membrane (106) pour séparer la cavité (104) vis-à-vis de la chambre extérieure (108), et au moins un élément de mesure de pression (118) disposé contre la membrane (106) pour la détection d'une pression de gaz dans la cavité (104). Une première face (110) de la membrane (106), tournée vers la chambre extérieure (108), présente une première couche (114) d'un matériau électriquement conducteur et une deuxième face (112) de la membrane (106), opposée à la première face (110) et tournée vers la cavité (104), présente une deuxième couche (116) d'un matériau électriquement conducteur. Au moins une section de la membrane (103) présente un matériau conducteur d'ions.
EP15715256.2A 2014-04-17 2015-04-09 Dispositif de détection d'un paramètre d'un gaz, procédé pour faire fonctionner un tel dispositif et système de mesure pour déterminer un paramètre d'un gaz Withdrawn EP3132256A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014207480.0A DE102014207480A1 (de) 2014-04-17 2014-04-17 Vorrichtung zum Erfassen eines Parameters eines Gases, Verfahren zum Betreiben einer derartigen Vorrichtung und Messsystem zum Bestimmen eines Parameters eines Gases
PCT/EP2015/057716 WO2015158599A1 (fr) 2014-04-17 2015-04-09 Dispositif de détection d'un paramètre d'un gaz, procédé pour faire fonctionner un tel dispositif et système de mesure pour déterminer un paramètre d'un gaz

Publications (1)

Publication Number Publication Date
EP3132256A1 true EP3132256A1 (fr) 2017-02-22

Family

ID=52823638

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15715256.2A Withdrawn EP3132256A1 (fr) 2014-04-17 2015-04-09 Dispositif de détection d'un paramètre d'un gaz, procédé pour faire fonctionner un tel dispositif et système de mesure pour déterminer un paramètre d'un gaz

Country Status (6)

Country Link
US (1) US20170038273A1 (fr)
EP (1) EP3132256A1 (fr)
JP (1) JP2017514129A (fr)
CN (1) CN106461492A (fr)
DE (1) DE102014207480A1 (fr)
WO (1) WO2015158599A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10132934B2 (en) 2014-09-17 2018-11-20 Stmicroelectronics S.R.L. Integrated detection device, in particular detector of particles such as particulates or alpha particles
DE102015214387B4 (de) * 2015-07-29 2017-07-27 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum und Verfahren zur Herstellung desselben
DE102015214391A1 (de) * 2015-07-29 2017-02-02 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum und Verfahren zur Herstellung desselben
DE102015217305A1 (de) * 2015-09-10 2017-03-16 Robert Bosch Gmbh Mikromechanisches Festkörperelektrolyt-Sensorelement und Verfahren zu seiner Herstellung
EP3368874A4 (fr) * 2015-10-28 2019-06-05 Hewlett-Packard Development Company, L.P. Capteur de pression relative
US10753815B2 (en) 2015-10-28 2020-08-25 Hewlett-Packard Development Company, L.P. Relative pressure sensor
DE102015223654A1 (de) * 2015-11-30 2017-06-01 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
JP6730069B2 (ja) * 2016-04-14 2020-07-29 ローム株式会社 窒素酸化物系ガスセンサ、および酸素ポンプ
DE102017212422A1 (de) * 2017-07-20 2019-01-24 Robert Bosch Gmbh Drucksensoranordnung und Verfahren zu deren Herstellung
DE102017122605A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Drucksensor auf keramischen Substrat
DE102017122631A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Drucksensor auf keramischen Druckstutzen
DE102017122607A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Mediengetrennter Drucktransmitter
US11002700B2 (en) 2017-11-21 2021-05-11 Honeywell International Inc. High temperature gas sensor
US10782196B2 (en) * 2018-02-19 2020-09-22 Stmicroelectronics S.R.L. Strain gauge with mechanically decoupled temperature sensor
DE102021104607A1 (de) * 2021-02-26 2022-09-01 Robert Bosch Gesellschaft mit beschränkter Haftung Drucksensor und Verfahren zum Betreiben eines Drucksensors

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS594463U (ja) * 1982-07-02 1984-01-12 株式会社フジクラ 酸素濃度検出装置
JP3052410B2 (ja) * 1991-03-20 2000-06-12 株式会社日本自動車部品総合研究所 固体電解質ガスセンサの製造方法
JP3105680B2 (ja) * 1993-01-14 2000-11-06 株式会社日立製作所 半導体差圧センサ及びそれを用いた差圧伝送器
JP4404595B2 (ja) * 1998-02-20 2010-01-27 日本特殊陶業株式会社 ガスセンサ用制御回路ユニット
JP2000193637A (ja) * 1998-12-24 2000-07-14 Matsushita Electric Ind Co Ltd 炭化水素センサ
GB9919906D0 (en) * 1999-08-24 1999-10-27 Central Research Lab Ltd Gas sensor and method of manufacture
JP4365668B2 (ja) * 2003-11-27 2009-11-18 パナソニック株式会社 固体電解質型ガスセンサー、固体電解質型ガスセンサー構造体及びガス濃度測定装置
DE102004036032A1 (de) 2003-12-16 2005-07-21 Robert Bosch Gmbh Verfahren zur Herstellung eines Halbleiterbauelements sowie ein Halbleiterbauelement, insbesondere ein Membransensor
NO329120B1 (no) * 2005-12-22 2010-08-30 Statkraft Dev As Fremgangsmate og system for a utfore vedlikehold pa en membran som har halvgjennomtrengelige egenskaper
FR2897937B1 (fr) * 2006-02-24 2008-05-23 Commissariat Energie Atomique Capteur de pression a jauges resistives
JP5248439B2 (ja) * 2009-07-28 2013-07-31 アルプス電気株式会社 半導体圧力センサ及びその製造方法
DE102012201304A1 (de) * 2012-01-31 2013-08-01 Robert Bosch Gmbh Mikromechanische Feststoffelektrolyt-Sensorvorrichtung und entsprechendes Herstellungsverfahren

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2015158599A1 *

Also Published As

Publication number Publication date
CN106461492A (zh) 2017-02-22
US20170038273A1 (en) 2017-02-09
JP2017514129A (ja) 2017-06-01
WO2015158599A1 (fr) 2015-10-22
DE102014207480A1 (de) 2015-10-22

Similar Documents

Publication Publication Date Title
EP3132256A1 (fr) Dispositif de détection d'un paramètre d'un gaz, procédé pour faire fonctionner un tel dispositif et système de mesure pour déterminer un paramètre d'un gaz
DE102013204197A1 (de) Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
DE112010002225T5 (de) Vorrichtung zum Erfassen der Gaskonzentration/der Feuchtigkeit
EP3596453B1 (fr) Procédé de fonctionnement d'un capteur de détection d'au moins une propriété d'un gaz à mesurer dans un espace de gaz à mesurer
WO2014072112A1 (fr) Procédé pour faire fonctionner un élément détecteur d'électrolyte solide contenant une cellule de pompage
DE102004008233A1 (de) Gassensorelement mit Empfindlichkeits-regenerierungsschaltung und Verfahren zur Herstellung eines Gassensorelements
EP1471349B1 (fr) Capteur potentiométrique pour la mesure de pH
DE102012206476A1 (de) Verfahren zum Betrieb eines Sensorelements zur Erfassung eines Sauerstoffanteils eines Gases in einem Messgasraum
EP3622281B1 (fr) Procédé de détermination de la température d'un capteur de gaz à électrolyte solide
EP3064937A1 (fr) Procédé de fonctionnement d'une sonde lambda large bande
DE102012224374A1 (de) Verfahren zur Diagnose einer elektrischen Leitung zu einer Elektrode eines Sensorelements zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
EP2795305A1 (fr) Élément capteur mesurant la pression d'air
DE102017209300A1 (de) Verfahren zur Bestimmung eines Zustandes mindestens einer Komponente eines Sensors zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
DE112017002435T5 (de) Gassensor
DE102015201396A1 (de) Sensor zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
DE102014205383A1 (de) Verfahren zum Betrieb einer Sensorvorrichtung
DE102008001223A1 (de) Beheizte Sprungsonde mit vereinfachter elektrischer Kontaktierung
DE102016205799A1 (de) Fluidzustands-Erfassungsvorrichtung
EP3818367B1 (fr) Procédé pour faire fonctionner un capteur destiné à détecter au moins une fraction d'un composant d'un gaz de mesure avec de l'oxygène lié dans un gaz de mesure
DE102012215817A1 (de) Kalibrierverfahren zum Kalibrieren eines Feuchtesensors zur Erfassung mindestens eines Feuchteparameters eines Gasgemischs
DE102008001335A1 (de) Sensorelement mit verbesserter Temperaturstabilisierung
DE102011005694A1 (de) Verfahren zur in-situ-Kalibrierung eines Sensorelements
WO2023099253A1 (fr) Procédé d'activation d'un capteur permettant de déterminer au moins une proportion d'un gaz dans une chambre de gaz de mesure
WO2015189055A1 (fr) Procédé pour faire fonctionner un dispositif de détection
DE102021213479A1 (de) Verfahren zum Betreiben eines Sensors zum Bestimmen mindestens eines Anteils eines Gases in einem Messgasraum

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20161117

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20190411