EP3019915A1 - Verfahren zur senkrechten ausrichtung von nanodomänen von blockcopolymeren mittels statistischer oder gradientencopolymere, deren monomere sich zumindest teilweise von jenen in jedem der blöcke des blockcopolymer vorhandenen unterscheiden - Google Patents

Verfahren zur senkrechten ausrichtung von nanodomänen von blockcopolymeren mittels statistischer oder gradientencopolymere, deren monomere sich zumindest teilweise von jenen in jedem der blöcke des blockcopolymer vorhandenen unterscheiden

Info

Publication number
EP3019915A1
EP3019915A1 EP14747091.8A EP14747091A EP3019915A1 EP 3019915 A1 EP3019915 A1 EP 3019915A1 EP 14747091 A EP14747091 A EP 14747091A EP 3019915 A1 EP3019915 A1 EP 3019915A1
Authority
EP
European Patent Office
Prior art keywords
block
copolymer
random
copolymers
monomers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14747091.8A
Other languages
English (en)
French (fr)
Inventor
Christophe Navarro
Chrystilla REBOUL
Guillaume FLEURY
Gilles PECASTAINGS
Georges Hadziioannou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Arkema France SA
Universite de Bordeaux
Institut Polytechnique de Bordeaux
Original Assignee
Centre National de la Recherche Scientifique CNRS
Arkema France SA
Universite de Bordeaux
Institut Polytechnique de Bordeaux
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Arkema France SA, Universite de Bordeaux, Institut Polytechnique de Bordeaux filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP3019915A1 publication Critical patent/EP3019915A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Definitions

  • the present invention relates to a method of perpendicular orientation of nano-domains of block copolymers on a substrate by the use of a sub-layer of random or gradient copolymers whose monomers are at least partly different from those present respectively in each of the blocks of the block copolymer
  • This method is advantageously used in lithography.
  • ⁇ is equal to 0.04 for the PS / PMMA pair, to 393K, while for PS / PDMS (poly (dimethylsiloxane)) it is 0.191, for PS / P2VP (poly (2 vinyl pyridine)) it is 0.178, for PS / PEO (polyethylene oxide) it is 0.077 and for PDMS / PLA (poly (lactic acid)) it is 1.1 .
  • This parameter associated with the strong contrast during the etching between PLA and PDMS, allows a better definition of the domains and thus to go to sizes of domains lower than 22 nm.
  • PLA Another block of interest that can be advantageously associated with the PDMS is PLA.
  • Poly lactic acid is distinguished by its degradability which makes it easy to degrade by chemical or plasma during the step of creating the copolymer mask (it is twice as sensitive to etching as the PS, this which means that it can be degraded much more easily). It is easier to synthesize and inexpensive.
  • the invention relates to a method for controlling the orientation of a block copolymer mesostructure by means of a random or gradient copolymer whose constituent monomers are at least partly different from those respectively present in each of the blocks of the copolymer. blocks, comprising the following steps:
  • the statistical or gradient copolymers used in the invention may be of any type provided that their constituent monomers are at least partly different. those present respectively in each block of the block copolymer used in the invention.
  • one of the constituent monomers of the random copolymers of the invention is once polymerized miscible in one of the block copolymer blocks used in the invention.
  • the random copolymers may be obtained by any route including polycondensation, ring-opening polymerization, anionic, cationic or radical polymerization, the latter being controllable or not.
  • the polymers are prepared by radical polymerization or telomerization, this can be controlled by any known technique such as NMP ("Nitroxide Mediated Polymerization"), RAFT ("Reversible Addition and Fragmentation Transfer”), ATRP ("Atom Transfer Radical Polymerization”). "), INIFERTER (" Initiator-Transfer-
  • ITP Iodine Transfer Polymerization
  • the polymers are preferably prepared by radical polymerization, and more particularly by controlled radical polymerization, more particularly by controlled nitroxide polymerization.
  • nitroxides derived from alkoxyamines derived from the stable free radical (1) are preferred.
  • the radical R 1 has a molar mass greater than 15.034 g / mol.
  • the radical R 1 can be a halogen atom such as chlorine, bromine or iodine, a linear, branched or cyclic, saturated or unsaturated hydrocarbon-based group such as an alkyl or phenyl radical, or an ester - COOR or an alkoxyl group -OR, or a phosphonate group -PO (OR) 2 > as long as it has a molar mass greater than 15.0342.
  • the monovalent radical R- ⁇ is said in position ⁇ with respect to the nitrogen atom of the nitroxide radical.
  • the remaining valences of the carbon atom and the nitrogen atom in the formula (1) can be linked to various radicals such as a hydrogen atom, a hydrocarbon radical such as an alkyl, aryl or aryl radical. -alkyl, comprising from 1 to 10 carbon atoms. It is not excluded that the carbon atom and the nitrogen atom in the formula (1) are connected to each other via a divalent radical, so as to form a ring. Preferably, however, the remaining valencies of the carbon atom and the nitrogen atom of the formula (1) are attached to monovalent radicals.
  • the radical R 1 has a molar mass greater than 30 g / mol.
  • the radical R 1 may, for example, have a molar mass of between 40 and 450 g / mol.
  • the radical R 1 may be a radical comprising a phosphoryl group, said radical R 1 may be represented by the formula: R ⁇
  • R and R which may be the same or different, may be selected from alkyl, cycloalkyl, alkoxyl, aryloxyl, aryl, aralkyloxy, perfluoroalkyl, aralkyl, and may include from 1 to 20 carbon atoms.
  • R 1 and / or R 1 may also be a halogen atom such as a chlorine or bromine or fluorine or iodine atom.
  • the radical R 1 may also comprise at least one aromatic ring as for the phenyl radical or the naphthyl radical, the latter may be substituted, for example by an alkyl radical comprising from 1 to 4 carbon atoms.
  • alkoxyamines derived from the following stable radicals are preferred:
  • alkoxyamines used in controlled radical polymerization must allow good control of the sequence of monomers. Thus they do not all allow good control of certain monomers.
  • the alkoxyamines derived from TEMPO only make it possible to control a limited number of monomers, the same goes for the alkoxyamines derived from 2,2,5-tri-methyl-4-phenyl-3-azahexane-3-nitroxide. (TIPNO).
  • alkoxyamines derived from nitroxides corresponding to formula (1) particularly those derived from nitroxides corresponding to formula (2) and even more particularly those derived from N-tert-butyl-1-diethylphosphono-2, 2-dimethylpropyl. nitroxide allow to expand to a large number of monomer controlled radical polymerization of these monomers.
  • alkoxyamines also influences the economic factor. The use of low temperatures will be preferred to minimize industrial difficulties.
  • Alkoxyamines derived from nitroxides corresponding to formula (1), particularly those derived from nitroxides corresponding to formula (2) and even more particularly those derived from N-tert-butyl-1-diethylphosphono-2, 2-dimethylpropyl nitroxide, will thus be preferred.
  • the constituent monomers of the random copolymers will be chosen from vinyl, vinylidene, diene, olefinic, allylic or (meth) acrylic monomers. These monomers are chosen more particularly from vinylaromatic monomers such as styrene or substituted styrenes, in particular Alpha-methylstyrene, acrylic monomers such as acrylic acid or its salts, alkyl acrylates, cycloalkyl acrylates or aryl acrylates such as methyl acrylate, ethyl acrylate, butyl acrylate, ethylhexyl acrylate or phenyl, hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate, alkyl ether acrylates such as 2-methoxyethyl acrylate, alkoxy- or aryloxy-polyalkylene glycol acrylates such as methoxypolyethylene glycol acrylates, ethoxypolyethylene glycol acrylates,
  • the constituent monomers of the random copolymers will be chosen from styrene or (meth) acrylic monomers, and more particularly styrene and methyl methacrylate.
  • the number-average molecular mass of the random copolymers used in the invention may be between 500 g / mol and 100 000 g / mol and preferably between 1000 g / mol and 20 000 g / mol, and even more particularly between 2000 g / mol and 10000 g / mol with a dispersity index of 1.00 to 10 and preferably from 1.05 to 3, more particularly between 1.05 and 2.
  • the block copolymers used in the invention may be of any type (diblock, triblock, multiblock, gradient, star) provided that their constituent monomers are of a different chemical nature from those present in the copolymers. statistics used in the invention.
  • the block copolymers used in the invention may be prepared by any synthetic route such as anionic polymerization, polycondensation of oligomers, ring opening polymerization, or controlled radical polymerization.
  • PLA polytrimethyl carbonate
  • PCL polycaprolactone
  • the block copolymers used in the invention will be chosen from the following: PLA-PDMS, PLA-PDMS-PLA, PTMC-PDMS-PTMC, PCL-PDMS-PCL, PTMC-PCL, PTMC-PCL-PTMC, PCL -PTMC PCL. And more particularly PLA-PDMS-PLA, PTMC-PDMS-PTMC.
  • block copolymers one of whose blocks contains styrene and at least one X comonomer, the other block containing methyl methacrylate and at least one Y comonomer
  • X being chosen from among the entities hydrogenated or partially hydrogenated styrene, cyclohexadiene, cyclohexene, cyclohexane, styrene substituted with one or more fluorinated alkyl groups, or mixtures thereof in a mass proportion of X ranging from 1 to 99% and preferably from 10 to 80% relative to block containing styrene
  • Y being selected from the following: fluorinated alkyl (meth) acrylate, particularly trifluoroethyl methacrylate, dimethyl aminoethyl (meth) acrylate, globular (meth) acrylates such as isobornyl (meth) acrylates, halogenated isobornyl, halogenated
  • naphthyl (meth) acrylate polyhedral oligomeric silsesquioxane (meth) acrylate which may contain a fluorinated group, or mixtures thereof, in mass proportions of Y ranging from 1 to 99% and preferably from 10 to 80% relative to the block containing methyl methacrylate.
  • the number-average molecular weight of the block copolymers used in the invention measured by SEC with polystyrene standards, it may be between 2000 g / mol and 80 000 g / mol and preferably between 4000 g / mol and 20 000 g / mol, and even more particularly between 6000 g / mol and 15000 g / mol with a dispersity index of 1.00 to 2 and preferably 1.05 and 1.4.
  • the different mesostructures of the block copolymers depend on the volume fractions of the blocks.
  • block copolymers having high values of x will have a strong phase separation of the blocks. Indeed, this parameter is relative to the interactions between the strings of each of the blocks.
  • a high value of ⁇ means that the blocks move as far apart as possible, which will result in a good resolution of the blocks, and therefore a low line roughness.
  • Flory-Huggins parameter block copolymer systems that are high (that is to say greater than 0.1 to 298 K) and more particularly polymer blocks containing heteroatoms (atoms other than C and H) will thus be favored. , and even more particularly Si atoms.
  • Treatments adapted to the phase segregation inherent to self-assembly of block copolymers may be thermal annealing, typically above the glass transition temperature (Tg) of the blocks, ranging from 10 to 150 ° C above the highest Tg, exposure to solvent vapors, or combination of these two treatments.
  • Tg glass transition temperature
  • it is a heat treatment whose temperature will be a function of the chosen blocks. If appropriate, for example when the blocks are judiciously chosen, a simple evaporation of the solvent will suffice, at room temperature, to promote the self-assembly of the block copolymer.
  • the process of the invention is applicable to the following substrates: silicon, silicon having a native or thermal oxide layer, hydrogenated or halogenated silicon, germanium, hydrogenated or halogenated germanium, platinum and platinum oxides, tungsten and tungsten oxides, gold, titanium nitrides, graphenes.
  • the surface is mineral and more preferably silicon. Even more preferably, the surface is silicon having a native or thermal oxide layer.
  • the process of the invention used to control the orientation of a block copolymer mesostructure by means of a random copolymer consists in depositing preferably the randomly dissolved or dispersed statistical copolymers in a suitable solvent according to techniques known to the art. skilled in the art such as the so-called “spin coating” technique, “Doctor Blade””knifeSystem”,”slot die System” but any other technique can be used such as a dry deposit, that is to say without going through a prior dissolution.
  • the method of the invention will aim to form a random copolymer layer typically less than 10 nm and preferably less than 5 nm.
  • the block copolymer used in the process of the invention will then be deposited according to a similar technique, then subjected to the treatment allowing the segregation of the phases inherent to the self-assembly of the block copolymers.
  • the block copolymers deposited on the surfaces treated by the process of the invention are preferably di-block copolymers or linear or star-shaped triblock copolymers.
  • the surfaces treated by the process of the invention will be used in lithography, membrane preparation applications.
  • toluene In a stainless steel reactor equipped with a mechanical stirrer and a jacket are introduced toluene, as well as monomers such as styrene (S), methyl methacrylate (MMA), and hydroxy functionalized alkoxyamine .
  • S styrene
  • MMA methyl methacrylate
  • Table 1 The mass ratios between the various styrene (S) and methyl methacrylate (MMA) monomers are described in Table 1.
  • the mass load of toluene is set at 30% relative to the reaction medium.
  • the reaction mixture is stirred and degassed by bubbling nitrogen at room temperature for 30 minutes.
  • the temperature of the reaction medium is then raised to 115 ° C.
  • the temperature is maintained at 115 ° C. throughout the polymerization until reaching a monomer conversion of about 70%. Samples are taken at regular intervals to determine the kinetics of gravimetric polymerization (measurement of dry extract).
  • the reaction medium When the 70% conversion is reached, the reaction medium is cooled to 60 ° C and the solvent and residual monomers are evaporated under vacuum. After evaporation, the methyl ethyl ketone is added to the reaction medium in an amount such that a polymer solution of the order of 25 ⁇ 6 mass is produced.
  • This polymer solution is then introduced dropwise into a beaker containing a non-solvent (heptane), so as to precipitate the polymer.
  • a non-solvent heptane
  • the precipitated polymer is recovered as a white powder after filtration and drying.
  • EXAMPLE 3 Synthesis of the PLA-PDMS-PLA Triblock Copolymer
  • the products used for this synthesis are an HO-PDMS-OH initiator and homopolymer marketed by Sigma-Aldrich, a racemic lactic acid, in order to avoid any problem related to crystallization. , an organic catalyst to avoid metal contamination problems, triazabicyclodecene (TBD) and toluene.
  • TBD triazabicyclodecene
  • the volume fractions of the blocks were determined to obtain PLA cylinders in a PDMS matrix, i.e., about 70% PDMS and 30% PLA.
  • Example 4 Self-assembly of a triblock copolymer PLA-b-PDMS-b-PLA
  • the block copolymer described in this study was chosen according to the needs of the lithography, that is to say the cylinders in a matrix, used as masks for the creation of cylindrical holes in a substrate after etching and degradation. .
  • the desired morphology is therefore PLA cylinders in a PDMS matrix.
  • 1st step Grafting a layer of random copolymer.
  • a random copolymer brush prepared according to Example 2 is first deposited on the substrate in order to modify the surface energy, and therefore the preferential interactions between the blocks and the interfaces.
  • the random copolymer is solubilized in a suitable solvent, PGMEA (Propylene Glycol Monomethyl Ether Acetate).
  • PGMEA Polypropylene Glycol Monomethyl Ether Acetate
  • the concentration of the solution can vary from 0.5 to 5%, and more precisely from 1 to 3%.
  • the chain attached density is limited by the length of the chains of the random copolymer, by its molecular weight and by its radius of gyration; thus having a concentration higher than 5% is not necessary.
  • the solution is filtered through 0.2 ⁇ m filters.
  • the substrate is cut and cleaned with the same solvent, PGMEA, and then dried with compressed air. Then, the substrate is deposited on the spin, and 100yL of solution are deposited on the substrate. The spin is finally started. After the deposition is complete, and the solvent evaporated, the film is placed in a vacuum oven for 48 hours at 170 ° C. so that the grafting proceeds.
  • the film is rinsed with PGMEA so removing the excess of random copolymer not grafted to the substrate, and then dried with compressed air.
  • the block copolymer in Example 3 is solubilized in PGMEA.
  • the concentration of the solution is between 0.5 and 10%, and more precisely between 1 and 4%.
  • the thickness of the film depends on the concentration of the solution, the higher the concentration and the thicker the film. So the concentration is the parameter to vary according to the desired film thickness.
  • the solution is filtered through 0.2 ⁇ m filters.
  • the grafted substrate is deposited on the spin, and then 100 ⁇ L of solution containing the block copolymer of Example 3 are deposited on the substrate.
  • the spin is started.
  • a thermal annealing of one and a half hours at 180 ° C is then used to help the self-organization of the meso structure.
  • Example 2 on the self-organization of the block copolymer of Example 3.
  • Example 2 on the self-organization of the block copolymer of Example 3.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Graft Or Block Polymers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
EP14747091.8A 2013-07-11 2014-07-10 Verfahren zur senkrechten ausrichtung von nanodomänen von blockcopolymeren mittels statistischer oder gradientencopolymere, deren monomere sich zumindest teilweise von jenen in jedem der blöcke des blockcopolymer vorhandenen unterscheiden Withdrawn EP3019915A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1356831A FR3008413B1 (fr) 2013-07-11 2013-07-11 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs
PCT/FR2014/051771 WO2015004392A1 (fr) 2013-07-11 2014-07-10 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs

Publications (1)

Publication Number Publication Date
EP3019915A1 true EP3019915A1 (de) 2016-05-18

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EP14747091.8A Withdrawn EP3019915A1 (de) 2013-07-11 2014-07-10 Verfahren zur senkrechten ausrichtung von nanodomänen von blockcopolymeren mittels statistischer oder gradientencopolymere, deren monomere sich zumindest teilweise von jenen in jedem der blöcke des blockcopolymer vorhandenen unterscheiden

Country Status (8)

Country Link
US (1) US20160154302A1 (de)
EP (1) EP3019915A1 (de)
JP (1) JP6143955B2 (de)
KR (1) KR101779729B1 (de)
CN (1) CN105492971B (de)
FR (1) FR3008413B1 (de)
SG (1) SG11201600135PA (de)
WO (1) WO2015004392A1 (de)

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FR3045642A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede de reduction du temps de structuration de films ordonnes de copolymere a blocs
FR3045644A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs
FR3045645B1 (fr) * 2015-12-18 2019-07-05 Arkema France Procede de reduction des defauts dans un film ordonne de copolymeres a blocs
FR3045643A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymere a blocs
KR102396957B1 (ko) * 2017-08-22 2022-05-13 에스케이이노베이션 주식회사 중성층 형성용 랜덤 공중합체 및 이를 포함하는 패턴 형성용 적층체, 이를 이용한 패턴 형성 방법

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Also Published As

Publication number Publication date
JP2016525592A (ja) 2016-08-25
SG11201600135PA (en) 2016-02-26
FR3008413B1 (fr) 2015-08-07
KR20160040579A (ko) 2016-04-14
KR101779729B1 (ko) 2017-09-18
CN105492971B (zh) 2019-09-10
FR3008413A1 (fr) 2015-01-16
CN105492971A (zh) 2016-04-13
US20160154302A1 (en) 2016-06-02
WO2015004392A1 (fr) 2015-01-15
JP6143955B2 (ja) 2017-06-07

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