FR3008413B1 - Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs - Google Patents

Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs

Info

Publication number
FR3008413B1
FR3008413B1 FR1356831A FR1356831A FR3008413B1 FR 3008413 B1 FR3008413 B1 FR 3008413B1 FR 1356831 A FR1356831 A FR 1356831A FR 1356831 A FR1356831 A FR 1356831A FR 3008413 B1 FR3008413 B1 FR 3008413B1
Authority
FR
France
Prior art keywords
block
copolymers
nanodomaines
statistical
monomers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1356831A
Other languages
English (en)
Other versions
FR3008413A1 (fr
Inventor
Christophe Navarro
Chrystilla Reboul
Guillaume Fleury
Gilles Pecastaings
Georges Hadziioannou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arkema France SA
Universite des Sciences et Tech (Bordeaux 1)
Original Assignee
Arkema France SA
Universite des Sciences et Tech (Bordeaux 1)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1356831A priority Critical patent/FR3008413B1/fr
Application filed by Arkema France SA, Universite des Sciences et Tech (Bordeaux 1) filed Critical Arkema France SA
Priority to CN201480047816.8A priority patent/CN105492971B/zh
Priority to PCT/FR2014/051771 priority patent/WO2015004392A1/fr
Priority to EP14747091.8A priority patent/EP3019915A1/fr
Priority to KR1020167003522A priority patent/KR101779729B1/ko
Priority to SG11201600135PA priority patent/SG11201600135PA/en
Priority to JP2016524877A priority patent/JP6143955B2/ja
Priority to US14/904,325 priority patent/US20160154302A1/en
Publication of FR3008413A1 publication Critical patent/FR3008413A1/fr
Application granted granted Critical
Publication of FR3008413B1 publication Critical patent/FR3008413B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Graft Or Block Polymers (AREA)
  • Nanotechnology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
FR1356831A 2013-07-11 2013-07-11 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs Expired - Fee Related FR3008413B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1356831A FR3008413B1 (fr) 2013-07-11 2013-07-11 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs
PCT/FR2014/051771 WO2015004392A1 (fr) 2013-07-11 2014-07-10 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs
EP14747091.8A EP3019915A1 (fr) 2013-07-11 2014-07-10 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs
KR1020167003522A KR101779729B1 (ko) 2013-07-11 2014-07-10 블락 공중합체의 블락 각각에 존재하는 것들과 적어도 부분적으로 상이한 단량체의, 통계 또는 구배 공중합체를 이용한, 블락 공중합체의 나노도메인 수직배향 방법
CN201480047816.8A CN105492971B (zh) 2013-07-11 2014-07-10 通过无规共聚物控制嵌段共聚物介观结构的取向的方法
SG11201600135PA SG11201600135PA (en) 2013-07-11 2014-07-10 Method for the perpendicular orientation of nanodomains of block copolymers, using statistical or gradient copolymers, the monomers of which differ at least in part from those present in each of the blocks of the block copolymer
JP2016524877A JP6143955B2 (ja) 2013-07-11 2014-07-10 ブロックコポリマーのそれぞれのブロック中に存在するモノマーとは少なくとも部分的に異なるモノマーのランダムコポリマーまたはグラジエントコポリマーを使ったブロックコポリマー・ナノドメインの垂直配向方法
US14/904,325 US20160154302A1 (en) 2013-07-11 2014-07-10 Method for the perpendicular orientation of nanodomains of block copolymers, using statistical or gradient copolymers, the monomers of which differ at least in part from those present in each of the blocks of the block copolymer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1356831A FR3008413B1 (fr) 2013-07-11 2013-07-11 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs

Publications (2)

Publication Number Publication Date
FR3008413A1 FR3008413A1 (fr) 2015-01-16
FR3008413B1 true FR3008413B1 (fr) 2015-08-07

Family

ID=49293706

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1356831A Expired - Fee Related FR3008413B1 (fr) 2013-07-11 2013-07-11 Procede d'orientation perpendiculaire de nanodomaines de copolymeres a blocs par l'utilisation de copolymeres statistiques ou a gradient dont les monomeres sont au moins en partie differents de ceux presents respectivement dans chacun des blocs du copolymere a blocs

Country Status (8)

Country Link
US (1) US20160154302A1 (fr)
EP (1) EP3019915A1 (fr)
JP (1) JP6143955B2 (fr)
KR (1) KR101779729B1 (fr)
CN (1) CN105492971B (fr)
FR (1) FR3008413B1 (fr)
SG (1) SG11201600135PA (fr)
WO (1) WO2015004392A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3045642A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede de reduction du temps de structuration de films ordonnes de copolymere a blocs
FR3045643A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymere a blocs
FR3045644A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs
FR3045645B1 (fr) * 2015-12-18 2019-07-05 Arkema France Procede de reduction des defauts dans un film ordonne de copolymeres a blocs
KR102396957B1 (ko) 2017-08-22 2022-05-13 에스케이이노베이션 주식회사 중성층 형성용 랜덤 공중합체 및 이를 포함하는 패턴 형성용 적층체, 이를 이용한 패턴 형성 방법

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2784111B1 (fr) * 1998-10-06 2003-08-01 Atochem Elf Sa Polymerisatin radicalaire en presence de plusieurs radicaux libres stables
CN1283692C (zh) * 2002-07-12 2006-11-08 天津大学 聚乙二醇－b－聚乳酸两亲性二嵌段共聚物的制备方法
JP4024669B2 (ja) * 2002-12-24 2007-12-19 株式会社カネカ 末端に重合性炭素―炭素二重結合を持つ基を有するビニル系重合体の安定化方法
US9028859B2 (en) * 2006-07-07 2015-05-12 Advanced Cardiovascular Systems, Inc. Phase-separated block copolymer coatings for implantable medical devices
US8080615B2 (en) * 2007-06-19 2011-12-20 Micron Technology, Inc. Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
US7763319B2 (en) * 2008-01-11 2010-07-27 International Business Machines Corporation Method of controlling orientation of domains in block copolymer films
US7989026B2 (en) * 2008-01-12 2011-08-02 International Business Machines Corporation Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films
US7521094B1 (en) * 2008-01-14 2009-04-21 International Business Machines Corporation Method of forming polymer features by directed self-assembly of block copolymers
US7850107B2 (en) * 2008-12-15 2010-12-14 Loftness Specialized Equipment, Inc. Rotor for tree mulching machine
KR101535227B1 (ko) * 2008-12-31 2015-07-08 삼성전자주식회사 블록 공중합체를 이용한 미세 패턴 형성 방법
US8623458B2 (en) * 2009-12-18 2014-01-07 International Business Machines Corporation Methods of directed self-assembly, and layered structures formed therefrom
JP6035017B2 (ja) * 2010-10-04 2016-11-30 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ 下層組成物および下層を像形成する方法
US8673541B2 (en) * 2010-10-29 2014-03-18 Seagate Technology Llc Block copolymer assembly methods and patterns formed thereby
WO2012084558A1 (fr) * 2010-12-23 2012-06-28 Asml Netherlands B.V. Procédés pour fournir des gabarits d'orientation à motifs pour des polymères auto-assemblables destinés à être utilisés dans un dispositif lithographique
JP5973763B2 (ja) * 2012-03-28 2016-08-23 東京エレクトロン株式会社 自己組織化可能なブロック・コポリマーを用いて周期パターン形成する方法及び装置

Also Published As

Publication number Publication date
US20160154302A1 (en) 2016-06-02
JP6143955B2 (ja) 2017-06-07
KR20160040579A (ko) 2016-04-14
JP2016525592A (ja) 2016-08-25
CN105492971B (zh) 2019-09-10
SG11201600135PA (en) 2016-02-26
CN105492971A (zh) 2016-04-13
EP3019915A1 (fr) 2016-05-18
WO2015004392A1 (fr) 2015-01-15
KR101779729B1 (ko) 2017-09-18
FR3008413A1 (fr) 2015-01-16

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