EP3008385B1 - Prozessgasreduzierung - Google Patents
Prozessgasreduzierung Download PDFInfo
- Publication number
- EP3008385B1 EP3008385B1 EP14728250.3A EP14728250A EP3008385B1 EP 3008385 B1 EP3008385 B1 EP 3008385B1 EP 14728250 A EP14728250 A EP 14728250A EP 3008385 B1 EP3008385 B1 EP 3008385B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- diluent
- combustion chamber
- process gas
- fuel
- oxidant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L7/00—Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L2900/00—Special arrangements for supplying or treating air or oxidant for combustion; Injecting inert gas, water or steam into the combustion chamber
- F23L2900/07002—Injecting inert gas, other than steam or evaporated water, into the combustion chambers
Definitions
- the present invention relates to a process gas abatement method.
- Apparatus for treating an effluent gas stream from a manufacturing process tool operating at a sub-atmospheric pressure used in, for example, the semiconductor or flat panel display manufacturing industry are known.
- PFCs perfluorinated compounds
- One way of performing effluent gas abatement is to pump the effluent gas from the process tool to a higher sub-atmospheric pressure before being fed to a radiant burner such as disclosed in US2010061908 .
- the radiant burner uses combustion to remove the PFCs and other compounds from the process gas stream.
- the effluent gas stream is a nitrogen stream containing PFCs and other compounds.
- a fuel gas is mixed with the effluent gas stream and that gas stream mixture is conveyed into a combustion chamber that is laterally surrounded by the exit surface of a foraminous gas burner.
- Fuel gas and air are simultaneously supplied to the foraminous burner to affect flameless combustion at the exit surface, with the amount of air passing through the foraminous burner being sufficient to consume not only the fuel gas supplied to the burner, but also all the combustibles in the gas stream mixture injected into the combustion chamber.
- the resultant treated gas stream is exhausted from the radiant burner. Thereafter, the treated gas stream is pumped to atmospheric pressure before being vented.
- US 4,886,444 discloses a process gas abatement method according to the preamble of claim 1.
- a process gas abatement apparatus comprising: a burner comprising: a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure, the combustion chamber being further operable to receive a fuel, oxidant and condensable diluent, the fuel, oxidant and diluent controlling combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream, the diluent being condensable in the treated exhaust stream.
- the burner will be operated at a pressure between that of the process tool, but below atmospheric pressure.
- the burner is typically operated at approximately 200mbar, with process gases being brought up to this pressure by means of a multi-stage dry pumping mechanism, with the combustion by-products being brought up to a second pressure, for example atmospheric pressure by means of second pump such as, for example, a liquid ring pump.
- second pump such as, for example, a liquid ring pump.
- the first embodiment recognises that the volumetric gain between the volume of gas being input to the combustion chamber and the volume of gas being output by the combustion chamber almost doubles (i.e. 10 slm of process gas input into the combustion chamber and 19 slm output from the combustion chamber).
- the apparatus may comprise a burner.
- the burner may comprise a combustion chamber which receives a process or effluent gas stream from a manufacturing process tool.
- the effluent gas stream may be treated within the combustion chamber at a sub-atmospheric pressure.
- the combustion chamber may receive a fuel, oxidant and diluent.
- the fuel, oxidant and diluent may control combustion within the combustion chamber to treat the effluent gas stream and produce a treated exhaust stream.
- the diluent may be condensable in the treated exhaust stream.
- the first embodiment recognises that since the purpose of the N 2 provided in existing approaches is to moderate the flame speed and temperature within the combustion chamber, it is only by convenience that N 2 is used as it is ordinarily present in air. If this N 2 could be replaced with a diluent in the form of, for example, an inert condensable, the volume gain within the combustion chamber will be reduced, which reduces the volume of the exhaust stream and reduces the volumetric load on the second pump. The volume gain reduces because the diluent shifts phase in the exhaust stream, thereby effectively removing the contribution of the diluent to the volume of the exhaust stream. This leads to considerable power saving since a lower volume of gas is output from the combustion chamber which would need to be brought up to the second pressure, for example atmospheric pressure, by means of the second pump.
- the second pressure for example atmospheric pressure
- the diluent when introduced to the combustion chamber, comprises a vapour.
- the diluent may be mixed in vapour form with the fuel and oxidant to effect combustion with the required characteristics in order to treat the effluent gas stream.
- the transition from, for example, an inert condensable vapour to a liquid within the exhaust stream enables the diluent to both contribute to the characteristics of the combustion whilst also reducing the volume gain because the diluent shifts phase in the exhaust stream, thereby effectively removing the contribution of the diluent to the volume of the exhaust stream.
- the diluent comprises a liquid prior to being vaporised for introduction to the combustion chamber. It will be appreciated that this significantly simplifies storage of the diluent.
- the diluent condenses to a liquid in the treated exhaust stream. It will be appreciated that the phase from a vapour to a liquid causes a significant reduction in volume.
- the diluent is introduced into the combustion chamber with a first volumetric rate and occupies the treated exhaust stream with a second volumetric rate, the second volumetric rate being lower than the first volumetric rate.
- the diluent is provided at specified volumetric rate to control combustion conditions within the combustion chamber to treat the effluent gas stream.
- the diluent is combined with at least one of the fuel and oxidant prior to being introduced into the combustion chamber. It will be appreciated that this significantly simplifies storage of the diluent and/or the fuel and oxidant.
- At least one of the fuel and the oxidant is dissolved by the diluent prior to being introduced into the combustion chamber.
- both the fuel and the oxidant are dissolved by the diluent prior to being introduced into the combustion chamber.
- At least one of the fuel and the oxidant dissolved by the diluent is vaporised prior to being introduced into the combustion chamber.
- At least one of the fuel and the oxidant dissolved by the diluent and the diluent are co-vaporised prior to being introduced into the combustion chamber.
- the diluent comprises at least one of water, a perfluorocarbon and a hydrocarbon.
- the burner comprises a radiant burner and the combustion chamber has a porous sleeve through which the fuel, oxidant and diluent pass for combustion proximate to a combustion surface of the porous sleeve.
- the treated exhaust stream is provided to a liquid ring pump for compression to atmospheric pressure.
- the diluent condenses in the liquid ring pump.
- the liquid ring pump may also act as an efficient condenser.
- the liquid ring pump is operable to scrub the treated exhaust stream.
- the liquid ring pump may also act as an efficient scrubber.
- a sub-atmospheric combustion system is operated with a diluent which condenses in its exhaust stream in order to reduce the volume of exhaust emitted. This reduces the volume of exhaust which needs to be compressed to atmospheric pressure prior to be vented to atmosphere.
- FIG. 1 illustrates a process gas abatement apparatus, generally 100, according to one embodiment.
- a first pump stage 10 evacuates a process chamber, such as a semiconductor process chamber, and takes a process or effluent gas stream P provided at a first pressure, such as 1 mbar and compresses the effluent gas stream P to an intermediate pressure, such as 100-200 mbar.
- the first pump stage 10 typically comprises a dry pump.
- a radiant burner 20 or other combustion apparatus receives the effluent gas stream P at the intermediate pressure.
- the radiant burner 20 receives a fuel/oxidant mixture, in addition to a diluent D.
- the effluent gas stream P is provided into a combustion chamber that is laterally surrounded by the exit surface of a foraminous gas burner.
- the fuel/oxidant mixture is simultaneously supplied with the diluent D to the foraminous burner to affect flameless combustion at the exit surface.
- the amount of oxidant passing through the foraminous burner is sufficient to consume not only the fuel supplied to the burner, but also all the combustibles in the effluent gas stream injected into the combustion chamber.
- the diluent D is provided with an amount sufficient to control the flame speed at the exit surface of the foraminous burner and to control the temperature and other combustion characteristics within the combustion chamber.
- the treated effluent gas stream P' is exhausted from the radiant burner, together with the other by-products of the combustion within the combustion chamber.
- the diluent D condenses within the treated effluent gas stream.
- the treated effluent gas stream P' is provided to a secondary pump stage 30, such as a liquid ring pump, which compresses the treated effluent gas stream P', together with the other by-products of the combustion within the combustion chamber to a second pressure, such as atmospheric pressure, prior to being vented to atmosphere.
- a secondary pump stage 30 such as a liquid ring pump, which compresses the treated effluent gas stream P', together with the other by-products of the combustion within the combustion chamber to a second pressure, such as atmospheric pressure, prior to being vented to atmosphere.
- the effluent gas stream P is provided at a rate of 10 slm (standard litres per minute) from the first pump stage 10 to the radiant burner 20.
- such a radiant burner 20 operating at approximately 200 mbar is fuelled with a hydrocarbon, for example methane, and oxygen. This is diluted to suitable concentration of diluent D.
- a hydrocarbon for example methane, and oxygen.
- the diluent D condenses in the effluent gas stream P', it is typically a liquid under ambient conditions and so is heated in order to be vaporised prior to being provided to the combustion chamber.
- the liquid diluent D can therefore be mixed with the fuel and/or with the oxidant in order to store these in a convenient manner prior to being introduced into the combustion chamber.
- the diluent D is conveniently water.
- the excess O 2 generated also helps since it reacts with deposition gases such as, for example, SiH 4 .
- the fuel may be dissolved within the water for convenient storage.
- an alcohol may be dissolved within the water to provide an aqueous solution, which is then vaporised prior to being introduced into the combustion chamber.
- the oxidant may be dissolved within the water for convenient storage.
- hydrogen peroxide may be dissolved within the water to provide an aqueous solution, which is then vaporised prior to being introduced into the combustion chamber.
- This power may be derived from waste heat generated in the vacuum pump.
- the water (and the pump) may be pre-heated electrically and the temperature maintained by the balance between evaporation and heat generation.
- the secondary pump stage 30 may be a liquid ring pump. Providing a liquid ring pump is particularly advantageous as this assists both the condensation of the diluent and can be used to scrub the gas stream provided.
- the diluent may be any suitable compound which condenses in the effluent gas stream such as, for example, a perfluorocarbon or a hydrocarbon.
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
- Air Supply (AREA)
Claims (16)
- Prozeßgas-Nachbehandlungsverfahren, das umfaßt:Aufnehmen eines zu behandelnden Abgasstroms aus einemHerstellungsprozeßwerkzeug innerhalb einer Verbrennungskammer bei einem unteratmosphärischen Druck, Aufnahme eines Brennstoffs, Oxidationsmittels und eines kondensierbaren Verdünnungsmittels (D) innerhalb der Verbrennungskammer (20), wobei der Brennstoff, das Oxidationsmittel und das Verdünnungsmittel die Verbrennung innerhalb der Verbrennungskammer (20) zur Behandlung des Abgasstroms steuern, um einen behandelten Abgasstrom zu erzeugen, und wobei das Verfahren gekennzeichnet ist durchKondensieren des Verdünnungsmittels (D) in dem behandelten Abgasstrom.
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 1, mit dem Schritt des Einleitens des Verdünnungsmittels (D) in die Verbrennungskammer (20) als Dampf.
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 1 oder 2, wobei das Verdünnungsmittel (D) eine Flüssigkeit ist, bevor es zum Einleiten in die Verbrennungskammer (20) verdampft wird.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, wobei der Kondensationsschritt das Kondensieren des Verdünnungsmittels (D) in eine Flüssigkeit in dem behandelten Abgasstrom umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, wobei der Schritt des Aufnehmens eines Brennstoffs, Oxidationsmittels und eines kondensierbaren Verdünnungsmittels (D) das Einleiten des Verdünnungsmittels (D) in die Verbrennungskammer (20) mit einer ersten volumetrischen Rate umfaßt, und der Schritt des Kondensierens das Belegen des behandelten Abgasstroms mit einer zweiten volumetrischen Rate umfaßt, wobei die zweite volumetrische Rate kleiner als die erste volumetrische Rate ist.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, wobei der Schritt des Aufnehmens eines Brennstoffs, Oxidationsmittels und eines kondensierbaren Verdünnungsmittels (D) das Bereitstellen des Verdünnungsmittels (D) mit einer spezifizierten volumetrischen Rate zur Steuerung der Verbrennungsbedingungen innerhalb der Verbrennungskammer (20) zum Behandeln des Abgassstroms umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, das den Schritt des Kombinierens des Verdünnungsmittels (D) mit mindestens einem von dem Brennstoff und dem Oxidationsmittel vor dem Einleiten in die Verbrennungskammer (20) umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 7, mit dem Schritt des Auflösens von mindestens einem von dem Brennstoff und dem Oxidationsmittel durch das Verdünnungsmittel (D) vor dem Einleiten in die Verbrennungskammer (20).
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 7 oder Anspruch 8, mit dem Schritt des Auflösens sowohl des Brennstoffs als auch des Oxidationsmittels durch das Verdünnungsmittel (D) vor dem Einleiten in die Verbrennungskammer (20).
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 8 oder Anspruch 9, wobei der Schritt des Aufnehmens eines Brennstoffs, Oxidationsmittels und eines kondensierbaren Verdünnungsmittels (D) das Verdampfen von mindestens einem von dem Brennstoff und dem Oxidationsmittel nach dem Auflösen durch das Verdünnungsmittel (D) vor dem Einleiten in die Verbrennungskammer (20) umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 8 oder Anspruch 9, wobei der Schritt des Aufnehmens eines Brennstoffs, Oxidationsmittels und eines kondensierbaren Verdünnungsmittels (D) das gemeinsame Verdampfen von mindestens einem von dem Brennstoff und dem Oxidationsmittel nach dem Auflösen durch das Verdünnungsmittel (D) vor dem Einleiten in die Verbrennungskammer umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, wobei das Verdünnungsmittel mindestens eines von Wasser, einem Perfluorcarbon, und einem Kohlenwasserstoff umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, mit dem Schritt des Bereitstellens eines Brenners, wobei der Brenner ein Flammstrahlbrenner ist und die Verbrennungskammer eine poröse Hülse aufweist, durch welche der Brennstoff, das Oxidationsmittel und das Verdünnungsmittel für die Verbrennung nahe einer Verbrennungsoberfläche der porösen Hülse hindurchtreten.
- Prozeßgas-Nachbehandlungsverfahren nach irgendeinem vorhergehenden Anspruch, wobei das Verfahren nach Bereitstellen des behandelten Abgasstroms in eine Flüssigkeitsringpumpe zur Verdichtung auf atmosphärischen Druck umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 14, wobei der Schritt des Kondensierens das Kondensieren des Verdünnungsmittels in der Flüssigkeitsringpumpe umfaßt.
- Prozeßgas-Nachbehandlungsverfahren nach Anspruch 14 oder 15, mit dem Schritt des Waschens des behandelten Abgasstroms unter Verwendung der Flüssigkeitsringpumpe umfaßt.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1310252.0A GB2515017B (en) | 2013-06-10 | 2013-06-10 | Process gas abatement |
PCT/GB2014/051631 WO2014199123A1 (en) | 2013-06-10 | 2014-05-29 | Process gas abatement |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3008385A1 EP3008385A1 (de) | 2016-04-20 |
EP3008385B1 true EP3008385B1 (de) | 2018-03-14 |
Family
ID=48875984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14728250.3A Active EP3008385B1 (de) | 2013-06-10 | 2014-05-29 | Prozessgasreduzierung |
Country Status (8)
Country | Link |
---|---|
US (1) | US20160230989A1 (de) |
EP (1) | EP3008385B1 (de) |
JP (1) | JP6422953B2 (de) |
KR (1) | KR102315105B1 (de) |
CN (1) | CN105556211B (de) |
GB (1) | GB2515017B (de) |
TW (1) | TWI633926B (de) |
WO (1) | WO2014199123A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6595148B2 (ja) * | 2017-05-29 | 2019-10-23 | カンケンテクノ株式会社 | 排ガスの減圧除害装置 |
GB2579197B (en) * | 2018-11-22 | 2021-06-09 | Edwards Ltd | Abatement method |
GB2594078A (en) * | 2020-04-16 | 2021-10-20 | Edwards Ltd | Flammable gas dilution |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886444A (en) * | 1987-06-19 | 1989-12-12 | L'air Liquide | Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2742562B2 (ja) * | 1988-10-11 | 1998-04-22 | 千代田化工建設株式会社 | 有毒性排ガスの燃焼処理方法 |
JP3486022B2 (ja) * | 1995-10-16 | 2004-01-13 | ジャパン・エア・ガシズ株式会社 | 排ガス処理装置 |
US6261524B1 (en) * | 1999-01-12 | 2001-07-17 | Advanced Technology Materials, Inc. | Advanced apparatus for abatement of gaseous pollutants |
JP2001104751A (ja) * | 1999-10-04 | 2001-04-17 | Mitsubishi Electric Corp | 排ガス除害装置 |
US6423284B1 (en) * | 1999-10-18 | 2002-07-23 | Advanced Technology Materials, Inc. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
JP3994605B2 (ja) * | 1999-11-26 | 2007-10-24 | 株式会社日立製作所 | Pfcガスの処理方法及び処理装置 |
JP2001185539A (ja) * | 1999-12-24 | 2001-07-06 | Toshiba Corp | ガス回収システムおよびガス回収方法 |
US6579085B1 (en) * | 2000-05-05 | 2003-06-17 | The Boc Group, Inc. | Burner and combustion method for the production of flame jet sheets in industrial furnaces |
US7338629B2 (en) * | 2001-02-02 | 2008-03-04 | Consolidated Engineering Company, Inc. | Integrated metal processing facility |
US6602323B2 (en) * | 2001-03-21 | 2003-08-05 | Samsung Electronics Co., Ltd. | Method and apparatus for reducing PFC emission during semiconductor manufacture |
JP2003056830A (ja) * | 2001-08-10 | 2003-02-26 | Ebara Corp | 排ガス処理装置 |
US6568185B1 (en) * | 2001-12-03 | 2003-05-27 | L'air Liquide Societe Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Combination air separation and steam-generation processes and plants therefore |
AT411019B (de) * | 2002-03-19 | 2003-09-25 | Tribovent Verfahrensentwicklg | Verfahren zum aufarbeiten von rückständen aus der zellstoff- und papierindustrie |
GB0416385D0 (en) * | 2004-07-22 | 2004-08-25 | Boc Group Plc | Gas abatement |
GB0417378D0 (en) * | 2004-08-04 | 2004-09-08 | Boc Group Plc | Gas abatement |
GB0521944D0 (en) * | 2005-10-27 | 2005-12-07 | Boc Group Plc | Method of treating gas |
JP2007197271A (ja) * | 2006-01-27 | 2007-08-09 | Canon Inc | 燃料改質装置 |
GB0611968D0 (en) * | 2006-06-16 | 2006-07-26 | Boc Group Plc | Method and apparatus for the removal of fluorine from a gas system |
WO2008109482A2 (en) * | 2007-03-02 | 2008-09-12 | Air Products And Chemicals, Inc. | Method and apparatus for oxy-fuel combustion |
DE102007015309B4 (de) * | 2007-03-27 | 2023-01-05 | Ansaldo Energia Switzerland AG | Betriebsverfahren für eine Turbogruppe |
GB0706544D0 (en) * | 2007-04-04 | 2007-05-09 | Boc Group Plc | Combustive destruction of noxious substances |
GB0902234D0 (en) * | 2009-02-11 | 2009-03-25 | Edwards Ltd | Method of treating an exhaust gas stream |
JP2013044479A (ja) * | 2011-08-24 | 2013-03-04 | Japan Pionics Co Ltd | 塩化珪素化合物を含む排ガスの浄化方法 |
-
2013
- 2013-06-10 GB GB1310252.0A patent/GB2515017B/en active Active
-
2014
- 2014-05-29 EP EP14728250.3A patent/EP3008385B1/de active Active
- 2014-05-29 KR KR1020157034852A patent/KR102315105B1/ko active IP Right Grant
- 2014-05-29 US US14/961,916 patent/US20160230989A1/en not_active Abandoned
- 2014-05-29 WO PCT/GB2014/051631 patent/WO2014199123A1/en active Application Filing
- 2014-05-29 CN CN201480033061.6A patent/CN105556211B/zh active Active
- 2014-05-29 JP JP2016518580A patent/JP6422953B2/ja active Active
- 2014-06-09 TW TW103119944A patent/TWI633926B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886444A (en) * | 1987-06-19 | 1989-12-12 | L'air Liquide | Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process |
Also Published As
Publication number | Publication date |
---|---|
CN105556211A (zh) | 2016-05-04 |
GB2515017A (en) | 2014-12-17 |
GB2515017B (en) | 2017-09-20 |
JP6422953B2 (ja) | 2018-11-14 |
WO2014199123A1 (en) | 2014-12-18 |
JP2016526648A (ja) | 2016-09-05 |
TW201509509A (zh) | 2015-03-16 |
TWI633926B (zh) | 2018-09-01 |
CN105556211B (zh) | 2017-10-24 |
EP3008385A1 (de) | 2016-04-20 |
KR102315105B1 (ko) | 2021-10-19 |
US20160230989A1 (en) | 2016-08-11 |
KR20160019428A (ko) | 2016-02-19 |
GB201310252D0 (en) | 2013-07-24 |
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