GB2515017A - Process gas abatement - Google Patents

Process gas abatement Download PDF

Info

Publication number
GB2515017A
GB2515017A GB1310252.0A GB201310252A GB2515017A GB 2515017 A GB2515017 A GB 2515017A GB 201310252 A GB201310252 A GB 201310252A GB 2515017 A GB2515017 A GB 2515017A
Authority
GB
United Kingdom
Prior art keywords
diluent
combustion chamber
fuel
process gas
oxidant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1310252.0A
Other versions
GB2515017B (en
GB201310252D0 (en
Inventor
Andrew James Seeley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1310252.0A priority Critical patent/GB2515017B/en
Publication of GB201310252D0 publication Critical patent/GB201310252D0/en
Priority to CN201480033061.6A priority patent/CN105556211B/en
Priority to JP2016518580A priority patent/JP6422953B2/en
Priority to EP14728250.3A priority patent/EP3008385B1/en
Priority to PCT/GB2014/051631 priority patent/WO2014199123A1/en
Priority to US14/961,916 priority patent/US20160230989A1/en
Priority to KR1020157034852A priority patent/KR102315105B1/en
Priority to TW103119944A priority patent/TWI633926B/en
Publication of GB2515017A publication Critical patent/GB2515017A/en
Application granted granted Critical
Publication of GB2515017B publication Critical patent/GB2515017B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23LSUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L7/00Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23LSUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L2900/00Special arrangements for supplying or treating air or oxidant for combustion; Injecting inert gas, water or steam into the combustion chamber
    • F23L2900/07002Injecting inert gas, other than steam or evaporated water, into the combustion chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Air Supply (AREA)

Abstract

A process gas abatement apparatus and method are disclosed. The process gas abatement apparatus comprises a burner having a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure. The combustion chamber is operable to receive a fuel, oxidant and diluents. The fuel, oxidant and diluent are used to control combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream. The diluent is condensable in the treated exhaust stream so that it changes state. By providing a diluent in the form of an inert condensable the volume gain within the combustion chamber is reduced and a lower volume of gas need be brought up to atmospheric pressure by a discharge pump.

Description

PROCESS GAS ABATEMENT
FIELD OF THE INVENTION
The present invention relates to a process gas abatement apparatus and method.
BACKGROUND
Apparatus for treating an effluent gas stream from a manufacturing process tool operating at a sub-atmospheric pressure used in, for example, the semiconductor or flat panel display manufacturing industry are known. During such in manufacturing, residual perfluorinated compounds (PFCs) and other compounds exist in the effluent gas stream pumped from the process tool. PFCs are difficult to abate or remove from the effluent gas and their release into the environment is undesirable because they are known to have relatively high greenhouse activity.
One way of performing effluent gas abatement is to pump the effluent gas from the process tool to a higher sub-atmospheric pressure before being fed to a radiant burner. The radiant burner uses combustion to remove the PFCs and other compounds from the process gas stream. Typically, the effluent gas stream is a nitrogen stream containing PEGs and other compounds. A fuel gas is mixed with the effluent gas stream and that gas stream mixture is conveyed into a combustion chamber that is laterally surrounded by the exit surface of a forarninous gas burner. Fuel gas and air are simultaneously supplied to the foraniinous burner to affect flameless combustion at the exit surface, with the amount of air passing through the foraminous burner being sufficient to consume not only the fuel gas supplied to the burner, but also all the combustibles in the gas stream mixture injected into the combustion chamber. The resultant treated gas stream is exhausted from the radiant burner. Thereafter, the treated gas stream is pumped to atmospheric pressure before being vented.
Although techniques exist for processing the effluent gas stream, they each have their own shortcomings. Accordingly, it is desired to provide an improved technique for processing an effluent gas stream.
SUMMARY
According to a first aspect, there is provided a process gas abatement apparatus, comprising: a burner comprising: a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure, the combustion chamber being further operable to receive a fuel, oxidant and diluent, the fuel, oxidant and diluent controlling combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream, the diluent being condensable in the treated exhaust stream.
The first aspect recognises that with existing approaches, as mentioned above, the burner will be operated at a pressure between that of the process tool, but below atmospheric pressure. For example, the burner is typically operated at approximately 200mbar, with process gases being brought up to this pressure by means of a multi-stage dry pumping mechanism, with the combustion by-products being brought up to a second pressure, for example atmospheric pressure by means of second pump such as, for example, a liquid ring pump.
Typically, a hydrocarbon fuel provides the energy source for the combustive abatement within the combustion chamber and often this fuel is methane. This burns with the process gas F' to produce a treated process gas F' according to reaction (1) below: lop + OH4 + 202 = 002 + 2H20 +ljp' (1) If it is assumed that atmospheric pressure combustion properties also occur for sub-atmospheric combustion, then each standard litre per minute (slm) of methane can abate around 10 standard litres per minute of process exhaust. So with CH4 and pure oxygen, the volumetric gain between the volume of gas being input to the combustion chamber and the volume of gas being output by the combustion chamber is only 10% (i.e. 10 slm of process exhaust is input into the combustion chamber and 11 slm is output from the combustion chamber).
However, ordinarily, the 02 would be delivered as 20.9% by volume in air and hence would be accompanied by a substantial volume of N2. Using air is both a convenient source of 02 and also is helpful within the combustion chamber as the N2 helps to moderate the flame speed and temperature within the combustion chamber.
With air, burning as equation (2) below: 1OP+CH4+202+8N2=C02+8N2+2H20+10P' (2) However, the first aspect recognises that the volumetric gain between the volume of gas being input to the combustion chamber and the volume of gas being output by the combustion chamber almost doubles (i.e. 10 slm of process gas input into the combustion chamber and 19 slm output from the combustion chamber).
Accordingly a process gas abatement apparatus may be provided. The apparatus may comprise a burner. The burner may comprise a combustion chamber which receives a process or effluent gas stream from a manufacturing process tool. The effluent gas stream may be treated within the combustion chamber at a sub-atmospheric pressure. The combustion chamber may receive a fuel, oxidant and diluent. The fuel, oxidant and diluent may control combustion within the combustion chamber to treat the effluent gas stream and produce a treated exhaust stream. The diluent may be condensable in the treated exhaust stream.
The first aspect recognises that since the purpose of the N2 provided in existing approaches is to moderate the flame speed and temperature within the combustion chamber, it is only by convenience that N2 is used as it is ordinarily present in air. If this N2 could be replaced with a diluent in the form of, for example, an inert condensable, the volume gain within the combustion chamber will be reduced, which reduces the volume of the exhaust stream and reduces the volumetric load on the second pump. The volume gain reduces because the diluent shifts phase in the exhaust stream, thereby effectively removing the contribution of the diluent to the volume of the exhaust stream. This leads to considerable power saving since a lower volume of gas is output from the combustion chamber which would need to be brought up to the second pressure, for example atmospheric pressure, by means of the second pump.
In one embodiment, the diluent, when introduced to the combustion chamber, comprises a vapour. Accordingly, the diluent may be mixed in vapour form with the fuel and oxidant to effect combustion with the required characteristics in order to treat the effluent gas stream. The transition from, for example, an inert condensable vapour to a liquid within the exhaust stream enables the diluent to both contribute to the characteristics of the combustion whilst also reducing the volume gain because the diluent shifts phase in the exhaust stream, thereby i effectively removing the contribution of the diluent to the volume of the exhaust stream.
In one embodiment, the diluent comprises a liquid prior to being vaporised for introduction to the combustion chamber. It will be appreciated that this significantly simplifies storage of the diluent.
In one embodiment, the diluent condenses to a liquid in the treated exhaust stream. It will be appreciated that the phase from a vapour to a liquid causes a significant reduction in volume.
In one embodiment, the diluent is introduced into the combustion chamber with a first volumetric rate and occupies the treated exhaust stream with a second volumetric rate, the second volumetric rate being lower than the first volumetric rate.
In one embodiment, the diluent is provided at specified volumetric rate to control combustion conditions within the combustion chamber to treat the effluent gas stream.
In one embodiment, the diluent is combined with at least one of the fuel and oxidant prior to being introduced into the combustion chamber. It will be appreciated that this significantly simplifies storage of the diluent and/or the fuel and oxidant.
In one embodiment, at least one of the fuel and the oxidant is dissolved by the diluent prior to being introduced into the combustion chamber.
In one embodiment, both the fuel and the oxidant are dissolved by the diluent prior to being introduced into the combustion chamber.
In one embodiment, at least one of the fuel and the oxidant dissolved by the diluent is vaporised prior to being introduced into the combustion chamber.
In one embodiment, at least one of the fuel and the oxidant dissolved by the diluent and the diluent are co-vaporised prior to being introduced into the combustion chamber.
In one embodiment, the diluent comprises at least one of water, a perfluorocarbon and a hydrocarbon.
In one embodiment, the burner comprises a radiant burner and the combustion chamber has a porous sleeve through which the fuel, oxidant and diluent pass for combustion proximate to a combustion surface of the porous sleeve.
In one embodiment, the treated exhaust stream is provided to a liquid ring pump for compression to atmospheric pressure.
In one embodiment, the diluent condenses in the liquid ring pump. Hence, the liquid ring pump may also act as an efficient condenser.
In one embodiment, the liquid ring pump is operable to scrub the treated exhaust stream. Hence, the liquid ring pump may also act as an efficient scrubber.
According to a second aspect, there is provided a process gas abatement method, comprising: receiving an effluent gas stream to be treated from a in manufacturing process tool within a combustion chamber at a sub-atmospheric pressure, receiving a fuel, oxidant and diluent within the combustion chamber, the fuel, oxidant and diluent controlling combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream; and condensing the diluent in the treated exhaust stream.
In one embodiment, the step of receiving comprises introducing the diluent to the combustion chamber as a vapour.
In one embodiment, the diluent comprises a liquid prior to being vaporised for
introduction to the combustion chamber.
In one embodiment, step of condensing comprises condensing the diluent to a liquid in the treated exhaust stream.
In one embodiment, the step of receiving comprises introducing the diluent into the combustion chamber with a first volumetric rate and the step of condensing comprises occupying the treated exhaust stream with a second volumetric rate, the second volumetric rate being lower than the first volumetric rate.
In one embodiment, the step of receiving comprises providing the diluent at specified volumetric rate to control combustion conditions within the combustion chamber to treat the effluent gas stream.
In one embodiment, the method comprises the step of combining the diluent with at least one of the fuel and oxidant prior to being introduced into the combustion chamber.
In one embodiment, the method comprises the step of dissolving at least one of the fuel and the oxidant by the diluent prior to being introduced into the combustion.
In one embodiment, the method comprises the step of dissolving both the fuel and the oxidant by the diluent prior to being introduced into the combustion.
In one embodiment, the step of receiving comprises vaporising at least one of the fuel and the oxidant dissolved by the diluent prior to being introduced into the combustion chamber.
In one embodiment, the step of receiving comprises co-vaporising at least one of the fuel and the oxidant dissolved by the diluent and the diluent prior to being introduced into the combustion chamber.
In one embodiment, the diluent comprises at least one of water, a pertluorocarbon and a hydrocarbon.
In one embodiment, the burner comprises a radiant burner and the combustion chamber has a porous sleeve through which the fuel, oxidant and diluent pass for combustion proximate to a combustion surface of the porous sleeve.
In one embodiment, the method comprises providing the treated exhaust stream to a liquid ring pump for compression to atmospheric pressure.
In one embodiment, the step of condensing comprises condensing the diluent in the liquid ring pump.
In one embodiment, the method comprises the step of scrubbing the treated exhaust stream using the liquid ring pump.
Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate, and in combinations other than those explicitly set out in the claims.
Where an apparatus feature is described as being operable to provide a function, it will be appreciated that this includes an apparatus feature which provides that function or which is adapted or configured to provide that function.
BRIEF DESCRIPTION OF THE DRAWINGS
Embodiments of the present invention will now be described further, with reference to the accompanying drawings, in which: Figure 1 illustrates a process gas abatement apparatus according to one embodiment.
DESCRIPTION OF THE EMBODIMENTS
Overview Before discussing the embodiments in any more detail, first an overview will be provided. In embodiments, a sub-atmospheric combustion system is operated with a diluent which condenses in its exhaust stream in order to reduce the volume of exhaust emitted. This reduces the volume of exhaust which needs to be compressed to atmospheric pressure prior to be vented to atmosphere.
Process Gas Abatement Figure 1 illustrates a process gas abatement apparatus, generally 100, according to one embodiment. A first pump stage 10 evacuates a process chamber, such as a semiconductor process chamber, and takes a process or effluent gas stream P provided at a first pressure, such as 1 mbar and compresses the effluent gas stream F to an intermediate pressure, such as 100-200 mbar. The first pump stage 10 typically comprises a dry pump.
A radiant burner 20 or other combustion apparatus receives the effluent gas stream P at the intermediate pressure. In addition, the radiant burner 20 receives a fuel/oxidant mixture, in addition to a diluent D. The effluent gas stream F is provided into a combustion chamber that is laterally surrounded by the exit surface of a foraminous gas burner. The fuel/oxidant mixture is simultaneously supplied with the diluent D to the toraminous burner to affect flameless in combustion at the exit surface. The amount of oxidant passing through the foraminous burner is sufficient to consume not only the fuel supplied to the burner, but also all the combustibles in the effluent gas stream injected into the combustion chamber. The diluent D is provided with an amount sufficient to control the flame speed at the exit surface of the foraminous burner and to control the temperature and other combustion characteristics within the combustion chamber. The treated effluent gas stream P is exhausted from the radiant burner, together with the other by-products of the combustion within the combustion chamber. The diluent D condenses within the treated effluent gas stream.
The treated effluent gas stream P' is provided to a secondary pump stage 30, such as a liquid ring pump, which compresses the treated effluent gas stream F,, together with the other by-products of the combustion within the combustion chamber to a second pressure, such as atmospheric pressure, prior to being vented to atmosphere.
Example Operation
In this example, the effluent gas stream F is provided at a rate of 10 slm (standard litres per minute) from the tirst pump stage 10 to the radiant burner 20.
In order to treat the effluent gas stream F, the fuel/oxidant mixture is provided at a rate of 3 slm, together with the diluent D at a rate of 8 slm in order to adequately control the flame speed, temperature and other combustion characteristics within the combustion chamber in accordance with the reaction (3) to correctly treat the effluent gas stream P: lop + CH4 + 202 + 8D(g)= CO2 + 8D0)+ 2H2O + lop, (3) For example, such a radiant burner 20, operating at approximately 200 rnbar is fuelled with a hydrocarbon, for example methane, and oxygen. This is diluted to suitable concentration of diluent D. Since the diluent D condenses in the effluent gas stream P', it is typically a liquid in under ambient conditions and so is heated in order to be vaporised prior to being provided to the combustion chamber. The liquid diluent D can therefore be mixed with the fuel and/or with the oxidant in order to store these in a convenient manner prior to being introduced into the combustion chamber.
i Diluent In one example, the diluent D is conveniently water. An added advantage of the provision of substantial quantities of water vapour at flame temperature in the combustion chamber is that this provides additional reagent for F2 abatement in the effluent gas stream P according to equation (4) below: F2+ H20=2HF+ 1⁄402 (4) The excess 02 generated also helps since it reacts with deposition gases such as, for example, SiH4.
The fuel may be dissolved within the water for convenient storage. For example, an alcohol may be dissolved within the water to provide an aqueous solution, which is then vaporised prior to being introduced into the combustion chamber.
Likewise, the oxidant may be dissolved within the water for convenient storage.
For example, hydrogen peroxide may be dissolved within the water to provide an aqueous solution, which is then vaporised prior to being introduced into the combustion chamber. Similarly, both the fuel and oxidant may be dissolved within the water for convenient storage. If this is derived from a 70°C / 300mbar source, this would require approximately 2600 JIg to produce. The power to do this would be around: (8/22.4) x 18 x 2600/60 = 280 Watts.
This power may be derived from waste heat generated in the vacuum pump. In an integrated system, the water (and the pump) may be pre-heated electrically and the temperature maintained by the balance between evaporation and heat generation.
Considering the example above where there is around 10 slm of process gas F to be treated, typically, around 1 slm of CH4 and 2 slm of 02 will be required. To dilute this and provide similar combustion characteristics as would be achieved with air, around 8 slm of H20 as the diluent D will also be needed.
The water condenses within the treated effluent gas stream and so around 10 slm of processed effluent gas stream F', together with 1 slm of CO2 is provided.
This means that rather than 19 slm being provided to the secondary pump stage 30, only around 11 slm is provided, which considerably reduces the amount to be compressed and reduces the power consumption to achieve this.
The secondary pump stage 30 may be a liquid ring pump. Providing a liquid ring pump is particularly advantageous as this assists both the condensation of the diluent and can be used to scrub the gas stream provided.
Although the above example utilised water as the diluent, it will be appreciated that the diluent may be any suitable compound which condenses in the effluent gas stream such as, for example, a perfluorocarbon or a hydrocarbon.
Although illustrative embodiments of the invention have been disclosed in detail herein, with reference to the accompanying drawings, it is understood that the invention is not limited to the precise embodiment and that various changes and modifications can be effected therein by one skilled in the art without departing -12-from the scope of the invention as defined by the appended claims and their equivalents.

Claims (15)

  1. CLAIMS1. A process gas abatement apparatus, comprising: a burner comprising: a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure, said combustion chamber being further operable to receive a fuel, oxidant and diluent, said fuel, oxidant and diluent controlling combustion within said combustion chamber to treat said effluent gas stream to produce a treated exhaust stream, said diluent being condensable in said treated exhaust stream.
  2. 2. The process gas abatement apparatus of claim 1, wherein said diluent, when introduced to said combustion chamber, comprises a vapour.
  3. 3. The process gas abatement apparatus of claim 1 or 2, wherein said diluent comprises a liquid prior to being vaporised for introduction to said combustion chamber.
  4. 4. The process gas abatement apparatus of any preceding claim, wherein said diluent condenses to a liquid in said treated exhaust stream.
  5. 5. The process gas abatement apparatus of any preceding claim, wherein said diluent is introduced into said combustion chamber with a first volumetric rate and occupies said treated exhaust stream with a second volumetric rate, said second volumetric rate being lower than said first volumetric rate.
  6. 6. The process gas abatement apparatus of any preceding claim, wherein said diluent is combined with at least one of said fuel and oxidant prior to being introduced into said combustion chamber. -14-
  7. 7. The process gas abatement apparatus of any preceding claim, wherein at least one of said fuel and said oxidant is dissolved by said diluent prior to being introduced into said combustion chamber.
  8. 8. The process gas abatement apparatus of any preceding claim, wherein both said fuel and said oxidant are dissolved by said diluent prior to being introduced into said combustion chamber.
  9. 9. The process gas abatement apparatus of any preceding claim, wherein at least one of said fuel and said oxidant dissolved by said diluent is vaporised prior to being introduced into said combustion chamber.
  10. 10. The process gas abatement apparatus of any preceding claim, wherein at least one of said fuel and said oxidant dissolved by said diluent and said diluent are co-vaporised prior to being introduced into said combustion chamber.
  11. 11. The process gas abatement apparatus of any preceding claim, wherein said diluent comprises at least one of water, a pertluorocarbon and a hydrocarbon.
  12. 12. The process gas abatement apparatus of any preceding claim, wherein said treated exhaust stream is provided to a liquid ring pump for compression to atmospheric pressure.
  13. 13. The process gas abatement apparatus of claim 12, wherein said diluent condenses in said liquid ring pump.
  14. 14. The process gas abatement apparatus of claim 12 or 13, wherein said liquid ring pump is operable to scrub said treated exhaust stream.
  15. 15. A process gas abatement method, comprising: receiving an effluent gas stream to be treated from a manufacturing process tool within a combustion chamber at a sub-atmospheric pressure, receiving a fuel, oxidant and diluent within said combustion chamber, said fuel, oxidant and diluent controlling combustion within said combustion chamber to treat said effluent gas stream to produce a treated exhaust stream; and condensing said diluent in said treated exhaust stream.
GB1310252.0A 2013-06-10 2013-06-10 Process gas abatement Active GB2515017B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB1310252.0A GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement
PCT/GB2014/051631 WO2014199123A1 (en) 2013-06-10 2014-05-29 Process gas abatement
JP2016518580A JP6422953B2 (en) 2013-06-10 2014-05-29 Process gas abatement apparatus and abatement method
EP14728250.3A EP3008385B1 (en) 2013-06-10 2014-05-29 Process gas abatement
CN201480033061.6A CN105556211B (en) 2013-06-10 2014-05-29 The apparatus and method for producing gas reduction
US14/961,916 US20160230989A1 (en) 2013-06-10 2014-05-29 Process gas abatement
KR1020157034852A KR102315105B1 (en) 2013-06-10 2014-05-29 Process gas abatement
TW103119944A TWI633926B (en) 2013-06-10 2014-06-09 Process gas abatement apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1310252.0A GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement

Publications (3)

Publication Number Publication Date
GB201310252D0 GB201310252D0 (en) 2013-07-24
GB2515017A true GB2515017A (en) 2014-12-17
GB2515017B GB2515017B (en) 2017-09-20

Family

ID=48875984

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1310252.0A Active GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement

Country Status (8)

Country Link
US (1) US20160230989A1 (en)
EP (1) EP3008385B1 (en)
JP (1) JP6422953B2 (en)
KR (1) KR102315105B1 (en)
CN (1) CN105556211B (en)
GB (1) GB2515017B (en)
TW (1) TWI633926B (en)
WO (1) WO2014199123A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579197A (en) * 2018-11-22 2020-06-17 Edwards Ltd Abatement

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110546433A (en) * 2017-05-29 2019-12-06 北京康肯环保设备有限公司 Method and apparatus for reducing pressure and removing harmful gas
GB2594078A (en) * 2020-04-16 2021-10-20 Edwards Ltd Flammable gas dilution

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768109A2 (en) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Exhaust gas treatment unit and process
WO2000062905A1 (en) * 1999-04-20 2000-10-26 Advanced Technology Materials, Inc. Advanced apparatus and method for abattment of gaseous pollutants
EP1103297A1 (en) * 1999-11-26 2001-05-30 Hitachi, Ltd. Method and apparatus for treating perfluorocompound gas
US20020134233A1 (en) * 2001-03-21 2002-09-26 Chae Seung-Ki Method and apparatus for reducing PFC emission during semiconductor manufacture
US20020159924A1 (en) * 1999-10-18 2002-10-31 Arno Jose I. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
WO2006013355A1 (en) * 2004-08-04 2006-02-09 The Boc Group Plc Gas abatement

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616884B1 (en) * 1987-06-19 1991-05-10 Air Liquide PROCESS FOR THE TREATMENT OF GASEOUS EFFLUENTS FROM THE MANUFACTURE OF ELECTRONIC COMPONENTS AND AN INCINERATION APPARATUS FOR IMPLEMENTING SAME
JP2742562B2 (en) * 1988-10-11 1998-04-22 千代田化工建設株式会社 Combustion treatment method for toxic exhaust gas
JP2001104751A (en) * 1999-10-04 2001-04-17 Mitsubishi Electric Corp Waste gas detoxification apparatus
JP2001185539A (en) * 1999-12-24 2001-07-06 Toshiba Corp System and method for collecting gas
US6579085B1 (en) * 2000-05-05 2003-06-17 The Boc Group, Inc. Burner and combustion method for the production of flame jet sheets in industrial furnaces
US7338629B2 (en) * 2001-02-02 2008-03-04 Consolidated Engineering Company, Inc. Integrated metal processing facility
JP2003056830A (en) * 2001-08-10 2003-02-26 Ebara Corp Processing apparatus for waste gas
US6568185B1 (en) * 2001-12-03 2003-05-27 L'air Liquide Societe Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Combination air separation and steam-generation processes and plants therefore
AT411019B (en) * 2002-03-19 2003-09-25 Tribovent Verfahrensentwicklg METHOD FOR PROCESSING RESIDUES FROM THE PULP AND PAPER INDUSTRY
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
GB0521944D0 (en) * 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
JP2007197271A (en) * 2006-01-27 2007-08-09 Canon Inc Fuel reforming apparatus
GB0611968D0 (en) * 2006-06-16 2006-07-26 Boc Group Plc Method and apparatus for the removal of fluorine from a gas system
EP2115360A4 (en) * 2007-03-02 2010-09-15 Air Prod & Chem Method and apparatus for oxy-fuel combustion
DE102007015309B4 (en) * 2007-03-27 2023-01-05 Ansaldo Energia Switzerland AG Operating procedure for a turbo group
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
JP2013044479A (en) * 2011-08-24 2013-03-04 Japan Pionics Co Ltd Method for purifying exhaust gas containing silicon chloride compound

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768109A2 (en) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Exhaust gas treatment unit and process
WO2000062905A1 (en) * 1999-04-20 2000-10-26 Advanced Technology Materials, Inc. Advanced apparatus and method for abattment of gaseous pollutants
US20020159924A1 (en) * 1999-10-18 2002-10-31 Arno Jose I. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
EP1103297A1 (en) * 1999-11-26 2001-05-30 Hitachi, Ltd. Method and apparatus for treating perfluorocompound gas
US20020134233A1 (en) * 2001-03-21 2002-09-26 Chae Seung-Ki Method and apparatus for reducing PFC emission during semiconductor manufacture
WO2006013355A1 (en) * 2004-08-04 2006-02-09 The Boc Group Plc Gas abatement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579197A (en) * 2018-11-22 2020-06-17 Edwards Ltd Abatement
GB2579197B (en) * 2018-11-22 2021-06-09 Edwards Ltd Abatement method

Also Published As

Publication number Publication date
KR102315105B1 (en) 2021-10-19
GB2515017B (en) 2017-09-20
TW201509509A (en) 2015-03-16
JP6422953B2 (en) 2018-11-14
US20160230989A1 (en) 2016-08-11
KR20160019428A (en) 2016-02-19
EP3008385B1 (en) 2018-03-14
CN105556211A (en) 2016-05-04
GB201310252D0 (en) 2013-07-24
TWI633926B (en) 2018-09-01
JP2016526648A (en) 2016-09-05
WO2014199123A1 (en) 2014-12-18
CN105556211B (en) 2017-10-24
EP3008385A1 (en) 2016-04-20

Similar Documents

Publication Publication Date Title
US6361706B1 (en) Method for reducing the amount of perfluorocompound gas contained in exhaust emissions from plasma processing
EP3008385B1 (en) Process gas abatement
CN1917932A (en) Method and apparatus for treating a fluorocompound-containing gas stream
US20160166868A1 (en) Plasma abatement using water vapor in conjunction with hydrogen or hydrogen containing gases
US20090194408A1 (en) Conversion of carbon dioxide into useful organic products by using plasma technology
TWI400354B (en) Method of treating a gas stream
US20190282948A1 (en) Semiconductor processing system
JP2020119934A (en) Rare gas recovery system and rare gas recovery method
KR20210086486A (en) Apparatus for producing ammonia using nitrogen monoixde
CN111874863A (en) Solar photocatalytic hydrogen production fuel cell power generation system
JP2022507799A (en) Perfluorinated compound abatement method
JP2003236338A (en) Method and device for treating gas containing organic halide
CN109638331B (en) Fuel cell hybrid power generation system based on methanol
PT1937392E (en) Method of treating a gas stream
US20240167173A1 (en) Power generation system and method for generating electricity from gaseous flowback
CN100402422C (en) Method capable of reducing energy consumption of reaction for preparing super active carbon
Park The transition of electron energy distribution function according to Ar/O2 gas ratio in capacitively coupled plasmas
Scheiner Concentration Dependent Ionization Dynamics in Torr Pressure N2-NH3 CCPs
US20210146296A1 (en) Method for operating a reactor facility
Litch et al. Vibrationally Excited Fluxes to Wafers in Plasma Processing
CN114599918A (en) Optimization of operating conditions in abatement apparatus
Saksono et al. Fixation of air nitrogen to ammonia and nitrate using cathodic plasma and anodic plasma in the air plasma electrolysis method
Xu et al. Decomposition of high-density toluene in water-vapor-mixed Nitrogen/Air using dielectric barrier discharge
AU2002360902A1 (en) Method and device for converting a fuel
Choi et al. Characteristic analysis of hydroxyl radical generated by atmospheric pressure discharge