EP2986752A2 - Couche de protection contre l'oxydation à base de chrome - Google Patents

Couche de protection contre l'oxydation à base de chrome

Info

Publication number
EP2986752A2
EP2986752A2 EP14722542.9A EP14722542A EP2986752A2 EP 2986752 A2 EP2986752 A2 EP 2986752A2 EP 14722542 A EP14722542 A EP 14722542A EP 2986752 A2 EP2986752 A2 EP 2986752A2
Authority
EP
European Patent Office
Prior art keywords
layer
chromium
oxidation protection
layers
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14722542.9A
Other languages
German (de)
English (en)
Other versions
EP2986752B1 (fr
Inventor
Juergen Ramm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Surface Solutions AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions AG Truebbach filed Critical Oerlikon Surface Solutions AG Truebbach
Publication of EP2986752A2 publication Critical patent/EP2986752A2/fr
Application granted granted Critical
Publication of EP2986752B1 publication Critical patent/EP2986752B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness

Definitions

  • the present invention relates to a chromium-based oxidation protection layer for substrates which are exposed to high temperatures.
  • oxidation protection layers are used, for example, in gas turbine parts, gas turbine blades, plates of combustion chambers or the like. There, it is described how layers are applied by means of so-called plasma spraying out of a suspension onto the substrates.
  • plasma spraying out of a suspension onto the substrates have u.a. the disadvantage that they can only be applied relatively thick and also have stresses which can have a negative effect on the adhesion.
  • Oxidation-resistant and poorly heat-conductive materials are also used in connection with pistons, as disclosed, for example, in DE10 2009 035841.
  • the object is achieved by a chromium-containing layer system.
  • the chromium may be present as metallic chromium or in compounds for example as chromium oxide and or chromium nitride.
  • the layer and / or the layer system may contain other chemical elements, such as aluminum, metallic or in combination.
  • an intermediate layer is first applied to the substrate on which then a top layer is deposited.
  • the layer system is applied by means of vapor deposition.
  • PVD and / or CVD method in question.
  • part of the layers of the layer system by means of PVD and the other part of the layers of the layer system by means of CVD.
  • sputtering and / or evaporation can be applied under vacuum conditions.
  • CONFIRMATION COPY Evaporation is to be mentioned as particularly preferred, the spark vaporization, in which by means of an arc material from a target surface is locally evaporated.
  • a 3 ⁇ thick CrN intermediate layer is applied to a substrate on which a 3pm thick AlCrO layer is applied.
  • the AlCrO layer can also be deposited as a multilayer layer, for example, with different compositions for the Einzell Anlagenen can be deposited.
  • a 3.5 ⁇ thick CrN intermediate layer is applied to a substrate on which a 3.5 ⁇ thick AlCrO layer is applied.
  • a 1.7 ⁇ thick CrN intermediate layer is applied to a 1.7 ⁇ thick AlCrO layer is applied to a substrate.
  • a 5 ⁇ thick CrN intermediate layer is applied to a substrate on which a 5 ⁇ thick CrO / N multilayer (CrO / CrN multilayer) is applied.
  • the coating temperature may be 450C.
  • a CrN / CrON multilayer is applied to a CrN / intermediate layer provided on the substrate (see the calotte cut in FIG. 1).
  • the thickness of the CrN intermediate layer is about 2.4 ⁇ and the thickness of the multilayer about 3 ⁇ .
  • the multilayer is a multilayer consisting of 36 individual layers, of which 18 CrN individual layers and 18 CrON individual layers (see FIG. 1).
  • each individual layer required about 2 minutes, so that the duration for the coating of the multilayer was about 72 minutes.
  • a coating temperature of about 230 ° C was maintained.
  • the number of individual layers and their thickness of the application can be selected adjusted. The result is a thin, highly resistant and protective against oxidation protective layer, suitable, inter alia, for substrates which are exposed to high temperatures in the application and should be protected from oxidation.
  • CrN was used as an intermediate layer. According to the invention, however, it is also possible to use other layers as intermediate layers, for example metallic chromium. It is also possible first to apply metallic chromium to the substrate surface, followed by a thicker CrN layer onto which a CrN / CrON multilayer composed of thinner individual layers is then applied.
  • a chromium-based oxidation protection layer for substrates exposed to high temperatures, the layer comprising a chromium-containing layer system comprising a base layer and a functional layer and wherein the base layer is between the substrate and the functional layer, and wherein the base layer at least substantially contains chromium nitride and the functional layer contains chromium oxide.
  • the base layer is chromium nitride, but may also be aluminum chromium nitride for some applications.
  • the functional layer contains at least for the most part aluminum chromium oxide or preferably the functional layer consists of aluminum chromium oxide.
  • the functional layer has a multilayered layer structure which comprises alternatingly deposited individual layers A and B, wherein the composition of the A single layers differs from the composition of the B individual layers.
  • the layer thickness of the base layer is preferably greater than 1 ⁇ , for some application preferably between 1, 5 and 10 ⁇ or even more preferably between 2 ⁇ and 7 m.
  • the ratio between the layer thickness of the functional layer and the layer thickness of the base layer is preferably between 0.5 and 2, or for some applications preferably between 0.25 and 1.5.
  • An oxidation protection layer according to the invention is also a chromium-based oxidation protection layer for substrates which are exposed to high temperatures, wherein the layer comprises a chromium-containing layer system comprising a functional layer, and wherein the functional layer comprises a multilayered layer structure comprising alternatingly deposited single layers A and B, wherein the Composition of the A single layers differs from the composition of the B individual layers, and wherein the A single layers contain at least for the most part aluminum chromium nitride or preferably chromium nitride and the B individual layers at least substantially aluminum chromium oxide or chromium oxide or preferably aluminum chromium oxynitride or more preferably chromium oxynitride.
  • the A single layers contain at least for the most part aluminum chromium nitride or preferably chromium nitride and the B individual layers at least for the most part aluminum chromium oxide or chromium oxide or preferably aluminum chromium oxynitride or more preferably chromium oxynitride.
  • a single layers consist of chromium nitride and the B single layers of aluminum chromium oxide or preferably of aluminum chromium oxynitride, or particularly preferred
  • the multilayered layer structure may also comprise a single layer C deposited between an A monolayer and a B monolayer, the composition of the C monolayer differing respectively from the composition of the A monolayer and the composition of the single monolayer, and wherein the C monolayer is at least contains mostly aluminum chromium oxynitride or preferably chromium oxynitride.
  • a single layer preferably consists of aluminum chromium oxynitride or even more preferably chromium oxynitride.
  • the multilayered layer structure in each case between each individual layer A and each individual layer B, which are alternately deposited on the other, comprises a single layer C whose nitrogen content is greater than the nitrogen content in the directly adjacent single layer B and smaller than that Nitrogen content in the directly adjacent single layer A.
  • each individual layer A and / or B is preferably between 50 nm and 100 nm.
  • the method is a PVD method, for example a sputtering method or, for some applications, preferably a spark evaporation method.
  • the process temperature during the coating process should not be higher than 450 ° C.

Abstract

La présente invention concerne une couche de protection contre l'oxydation à base de chrome pour des substrats qui sont exposés à des températures élevées. La couche comprend un système de couches contenant du chrome, lequel comprend une couche de base et une couche fonctionnelle, la couche de base se trouvant entre le substrat et la couche fonctionnelle, la couche de base contenant au moins en majeure partie du nitrure de chrome et la couche fonctionnelle contenant de l'oxyde de chrome. La présente invention concerne en outre une couche de protection contre l'oxydation à base de chrome pour des substrats qui sont exposés à des températures élevées. La couche comprend un système de couches contenant du chrome, lequel comprend une couche fonctionnelle, la couche fonctionnelle présentant une structure multicouche qui comprend des couches individuelles A et B déposées alternativement, la composition des couches individuelles A étant différente de la composition des couches individuelles B, et les couches individuelles A contenant au moins en majeure partie du nitrure de chrome-aluminium ou de préférence du nitrure de chrome, et les couches individuelles B contenant au moins en majeure partie de l'oxyde de chrome-aluminium ou de l'oxyde de chrome, ou de préférence du nitrure de chrome-aluminium ou de préférence encore de l'oxynitrure de chrome.
EP14722542.9A 2013-04-16 2014-04-14 Couche de protection contre l'oxydation à base de chrome Active EP2986752B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361812350P 2013-04-16 2013-04-16
PCT/EP2014/000991 WO2014170005A2 (fr) 2013-04-16 2014-04-14 Couche de protection contre l'oxydation à base de chrome

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EP2986752A2 true EP2986752A2 (fr) 2016-02-24
EP2986752B1 EP2986752B1 (fr) 2021-04-07

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CN106435489B (zh) * 2016-11-30 2019-01-11 西北有色金属研究院 一种铌基表面抗氧化自愈合Cr/NiCr涂层的制备方法
CN107747093B (zh) * 2017-10-10 2019-10-29 岭南师范学院 一种柔性硬质复合涂层及其制备方法和涂层刀具
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KR102236892B1 (ko) 2021-04-07
CN105143498A (zh) 2015-12-09
CA2912584A1 (fr) 2014-10-23
BR112015026344B1 (pt) 2022-05-31
AR096030A1 (es) 2015-12-02
CA2912584C (fr) 2023-07-04
WO2014170005A2 (fr) 2014-10-23
EP2986752B1 (fr) 2021-04-07
US10174416B2 (en) 2019-01-08
CN105143498B (zh) 2018-11-09
US20160060746A1 (en) 2016-03-03
BR112015026344A2 (pt) 2017-07-25
JP2016520719A (ja) 2016-07-14
KR20160007535A (ko) 2016-01-20
MX2015014649A (es) 2016-06-23
WO2014170005A3 (fr) 2015-03-12
JP7002195B2 (ja) 2022-01-20

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