EP2901102C0 - Procédé et dispositif de mesure pour mesurer la distance d'une surface, l'épaisseur et les propriétés optiques d'un objet - Google Patents

Procédé et dispositif de mesure pour mesurer la distance d'une surface, l'épaisseur et les propriétés optiques d'un objet

Info

Publication number
EP2901102C0
EP2901102C0 EP13837251.1A EP13837251A EP2901102C0 EP 2901102 C0 EP2901102 C0 EP 2901102C0 EP 13837251 A EP13837251 A EP 13837251A EP 2901102 C0 EP2901102 C0 EP 2901102C0
Authority
EP
European Patent Office
Prior art keywords
measuring
thickness
distance
optical properties
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP13837251.1A
Other languages
German (de)
English (en)
Other versions
EP2901102A1 (fr
EP2901102A4 (fr
EP2901102B1 (fr
Inventor
Heimo Keränen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LMI Technologies Inc
Original Assignee
LMI Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LMI Technologies Inc filed Critical LMI Technologies Inc
Publication of EP2901102A1 publication Critical patent/EP2901102A1/fr
Publication of EP2901102A4 publication Critical patent/EP2901102A4/fr
Application granted granted Critical
Publication of EP2901102B1 publication Critical patent/EP2901102B1/fr
Publication of EP2901102C0 publication Critical patent/EP2901102C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
EP13837251.1A 2012-09-17 2013-09-17 Procédé et dispositif de mesure pour mesurer la distance d'une surface, l'épaisseur et les propriétés optiques d'un objet Active EP2901102B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125958A FI125408B (fi) 2012-09-17 2012-09-17 Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
PCT/FI2013/050898 WO2014041254A1 (fr) 2012-09-17 2013-09-17 Procédé et dispositif de mesure pour mesurer la distance d'une surface, l'épaisseur et les propriétés optiques d'un objet

Publications (4)

Publication Number Publication Date
EP2901102A1 EP2901102A1 (fr) 2015-08-05
EP2901102A4 EP2901102A4 (fr) 2016-04-20
EP2901102B1 EP2901102B1 (fr) 2023-06-07
EP2901102C0 true EP2901102C0 (fr) 2023-06-07

Family

ID=50277691

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13837251.1A Active EP2901102B1 (fr) 2012-09-17 2013-09-17 Procédé et dispositif de mesure pour mesurer la distance d'une surface, l'épaisseur et les propriétés optiques d'un objet

Country Status (6)

Country Link
US (1) US9476707B2 (fr)
EP (1) EP2901102B1 (fr)
ES (1) ES2947564T3 (fr)
FI (1) FI125408B (fr)
PL (1) PL2901102T3 (fr)
WO (1) WO2014041254A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI127908B (en) * 2015-09-22 2019-05-15 Teknologian Tutkimuskeskus Vtt Oy Method and apparatus for measuring surface height
CN105890625B (zh) * 2016-04-05 2018-12-21 北京控制工程研究所 一种基于碳纳米管遮光罩的星敏感器的杂光测试方法
TWI616641B (zh) * 2017-02-23 2018-03-01 Method for measuring wafer thickness using near infrared ray
JP6821526B2 (ja) * 2017-08-15 2021-01-27 キヤノン株式会社 画像処理方法、画像処理装置、撮像装置、および、プログラム
EP3674749A4 (fr) * 2017-09-28 2021-04-28 Pioneer Corporation Dispositif de mesure de distance et dispositif de balayage optique
US11287626B2 (en) 2019-05-17 2022-03-29 Hong Kong Applied Science and Technology Research Institute Comoanv Limited Chromatic confocal system and a method for inspecting an object
FI130557B (en) * 2020-09-29 2023-11-17 Lmi Tech Inc DEVICE FOR DETERMINING TARGET DISTANCE, SURFACE THICKNESS AND OPTICAL PROPERTIES AND RELATED METHODS
CN113959349B (zh) * 2021-10-25 2022-04-19 湖南捷力泰科技有限公司 一种膜片质量检测装置及其方法
DE102022202778B4 (de) 2022-02-11 2024-05-16 Micro-Epsilon Optronic Gmbh System und Verfahren zur konfokal-chromatischen Linienabstandsmessung
WO2023151736A1 (fr) 2022-02-11 2023-08-17 Micro-Epsilon Optronic Gmbh Système et procédé de mesure confocale-chromatique de distance linéaire

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2906641A1 (de) 1979-02-21 1980-08-28 Freudenberg Carl Fa Verfahren zur optisch-elektrischen messung des abstandes zwischen einer messeinrichtung und einem pruefling
US4936676A (en) * 1984-11-28 1990-06-26 Honeywell Inc. Surface position sensor
JPH1194543A (ja) 1997-07-09 1999-04-09 Yeda Res & Dev Co Ltd カラーコード形光学式プロフイル測定用の三角測量方法及びシステム
IL121267A0 (en) 1997-07-09 1998-01-04 Yeda Res & Dev Method and device for determining the profile of an object
US6573998B2 (en) 1997-11-06 2003-06-03 Cynovad, Inc. Optoelectronic system using spatiochromatic triangulation
KR100406843B1 (ko) * 2001-04-06 2003-11-21 (주) 인텍플러스 색정보를 이용한 실시간 3차원 표면형상 측정방법 및 장치
AU2003236291A1 (en) * 2002-03-28 2003-10-27 Matsuuradenkosha Company Limited Evaluation method and device for gel state or sol-gel state change of object
FR2848664B1 (fr) 2002-12-11 2005-03-11 Micro Module Detecteur de position, forme et reflectivite d'une surface
TWI245114B (en) * 2004-10-11 2005-12-11 Ind Tech Res Inst Apparatus for measuring imaging spectrograph
US20060232790A1 (en) 2005-04-18 2006-10-19 Lee Chase Confocal measurement method and apparatus in a paper machine
JP2007147299A (ja) * 2005-11-24 2007-06-14 Kobe Steel Ltd 変位測定装置及び変位測定方法
US20070263228A1 (en) 2006-05-12 2007-11-15 Voith Paper Patent Gmbh Device and process for optical distance measurement
FI119259B (fi) 2006-10-18 2008-09-15 Valtion Teknillinen Pinnan ja paksuuden määrittäminen
US20080137061A1 (en) 2006-12-07 2008-06-12 Christopher John Rush Displacement Measurement Sensor Using the Confocal Principle
JPWO2008099778A1 (ja) 2007-02-14 2010-05-27 株式会社ニコン スリット走査共焦点顕微鏡
FI124299B (fi) 2009-10-08 2014-06-13 Focalspec Oy Mittalaite ja menetelmä kohteen ja kohteen pinnan ominaisuuksien mittaamiseksi
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統

Also Published As

Publication number Publication date
WO2014041254A1 (fr) 2014-03-20
US9476707B2 (en) 2016-10-25
EP2901102A1 (fr) 2015-08-05
US20150219454A1 (en) 2015-08-06
EP2901102A4 (fr) 2016-04-20
FI125408B (fi) 2015-09-30
EP2901102B1 (fr) 2023-06-07
ES2947564T3 (es) 2023-08-11
PL2901102T3 (pl) 2023-11-20
FI20125958A (fi) 2014-03-18

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