FR2848664B1 - Detecteur de position, forme et reflectivite d'une surface - Google Patents

Detecteur de position, forme et reflectivite d'une surface

Info

Publication number
FR2848664B1
FR2848664B1 FR0216237A FR0216237A FR2848664B1 FR 2848664 B1 FR2848664 B1 FR 2848664B1 FR 0216237 A FR0216237 A FR 0216237A FR 0216237 A FR0216237 A FR 0216237A FR 2848664 B1 FR2848664 B1 FR 2848664B1
Authority
FR
France
Prior art keywords
reflectivity
shape
position detector
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0216237A
Other languages
English (en)
Other versions
FR2848664A1 (fr
Inventor
Pascal Yvon Joffre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MICRO MODULE
Original Assignee
MICRO MODULE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MICRO MODULE filed Critical MICRO MODULE
Priority to FR0216237A priority Critical patent/FR2848664B1/fr
Publication of FR2848664A1 publication Critical patent/FR2848664A1/fr
Application granted granted Critical
Publication of FR2848664B1 publication Critical patent/FR2848664B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/95—Lidar systems specially adapted for specific applications for meteorological use
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
FR0216237A 2002-12-11 2002-12-11 Detecteur de position, forme et reflectivite d'une surface Expired - Fee Related FR2848664B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0216237A FR2848664B1 (fr) 2002-12-11 2002-12-11 Detecteur de position, forme et reflectivite d'une surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0216237A FR2848664B1 (fr) 2002-12-11 2002-12-11 Detecteur de position, forme et reflectivite d'une surface

Publications (2)

Publication Number Publication Date
FR2848664A1 FR2848664A1 (fr) 2004-06-18
FR2848664B1 true FR2848664B1 (fr) 2005-03-11

Family

ID=32338962

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0216237A Expired - Fee Related FR2848664B1 (fr) 2002-12-11 2002-12-11 Detecteur de position, forme et reflectivite d'une surface

Country Status (1)

Country Link
FR (1) FR2848664B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102575985A (zh) * 2009-10-08 2012-07-11 Vtt技术研究中心 用于确定物品及其表面的特性的测量仪器和方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004011189B4 (de) * 2004-03-04 2011-05-05 Carl Mahr Holding Gmbh Optischer Messkopf
FR2876791B1 (fr) * 2004-10-19 2007-02-16 Micro Module Sarl Multimetre electro-optique
DE102008033942B3 (de) * 2008-07-18 2010-04-08 Luphos Gmbh Faseroptisches Mehrwellenlängeninterferometer (MWLI) zur absoluten Vermessung von Abständen und Topologien von Oberflächen in großem Arbeitsabstand
KR20120053276A (ko) * 2010-11-17 2012-05-25 삼성전자주식회사 적외선 센서 모듈
GB2497792A (en) * 2011-12-21 2013-06-26 Taylor Hobson Ltd Metrological apparatus comprising a confocal sensor
FI125408B (fi) 2012-09-17 2015-09-30 Focalspec Oy Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
GB2507813B (en) * 2012-11-13 2017-06-21 Focalspec Oy Apparatus and method for inspecting seals of items
US11170971B2 (en) * 2018-07-24 2021-11-09 Kla Corporation Multiple working distance height sensor using multiple wavelengths

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806776A (en) * 1980-03-10 1989-02-21 Kley Victor B Electrical illumination and detecting apparatus
IT1198660B (it) * 1983-08-02 1988-12-21 Ottica Ist Naz Profilometro ottico multifocale per dispersione
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
FR2805342B1 (fr) * 2000-02-21 2002-07-12 Sabban Joseph Cohen Capteur de numerisation 3d optique haute resolution a faible angle de triangulation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102575985A (zh) * 2009-10-08 2012-07-11 Vtt技术研究中心 用于确定物品及其表面的特性的测量仪器和方法
CN102575985B (zh) * 2009-10-08 2015-10-14 弗科斯派克有限公司 用于确定物品及其表面的特性的测量仪器和方法

Also Published As

Publication number Publication date
FR2848664A1 (fr) 2004-06-18

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Legal Events

Date Code Title Description
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Effective date: 20120831