PL2800946T3 - Układ do pomiarów optycznych i powiązany sposób - Google Patents

Układ do pomiarów optycznych i powiązany sposób

Info

Publication number
PL2800946T3
PL2800946T3 PL12813838T PL12813838T PL2800946T3 PL 2800946 T3 PL2800946 T3 PL 2800946T3 PL 12813838 T PL12813838 T PL 12813838T PL 12813838 T PL12813838 T PL 12813838T PL 2800946 T3 PL2800946 T3 PL 2800946T3
Authority
PL
Poland
Prior art keywords
optical measurement
related method
measurement
optical
Prior art date
Application number
PL12813838T
Other languages
English (en)
Inventor
Heimo KERÄNEN
Petri Lehtonen
Original Assignee
Helmee Imaging Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmee Imaging Oy filed Critical Helmee Imaging Oy
Publication of PL2800946T3 publication Critical patent/PL2800946T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/04—Interpretation of pictures
    • G01C11/06—Interpretation of pictures by comparison of two or more pictures of the same area
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
PL12813838T 2012-01-05 2012-12-20 Układ do pomiarów optycznych i powiązany sposób PL2800946T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20125014A FI125320B (en) 2012-01-05 2012-01-05 ORGANIZATION AND SIMILAR METHOD FOR OPTICAL MEASUREMENTS
EP12813838.5A EP2800946B1 (en) 2012-01-05 2012-12-20 Arrangement for optical measurements and related method
PCT/EP2012/076345 WO2013102572A1 (en) 2012-01-05 2012-12-20 Arrangement for optical measurements and related method

Publications (1)

Publication Number Publication Date
PL2800946T3 true PL2800946T3 (pl) 2021-10-25

Family

ID=47557081

Family Applications (1)

Application Number Title Priority Date Filing Date
PL12813838T PL2800946T3 (pl) 2012-01-05 2012-12-20 Układ do pomiarów optycznych i powiązany sposób

Country Status (8)

Country Link
US (1) US9423245B2 (pl)
EP (1) EP2800946B1 (pl)
JP (1) JP6291418B2 (pl)
CN (1) CN104040287B (pl)
ES (1) ES2875052T3 (pl)
FI (1) FI125320B (pl)
PL (1) PL2800946T3 (pl)
WO (1) WO2013102572A1 (pl)

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Also Published As

Publication number Publication date
JP6291418B2 (ja) 2018-03-14
CN104040287A (zh) 2014-09-10
JP2015508499A (ja) 2015-03-19
ES2875052T3 (es) 2021-11-08
WO2013102572A1 (en) 2013-07-11
EP2800946A1 (en) 2014-11-12
US9423245B2 (en) 2016-08-23
CN104040287B (zh) 2017-11-24
FI20125014A7 (fi) 2013-07-06
US20140376003A1 (en) 2014-12-25
FI125320B (en) 2015-08-31
EP2800946B1 (en) 2021-03-24

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