FI20125958A - Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi - Google Patents

Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi

Info

Publication number
FI20125958A
FI20125958A FI20125958A FI20125958A FI20125958A FI 20125958 A FI20125958 A FI 20125958A FI 20125958 A FI20125958 A FI 20125958A FI 20125958 A FI20125958 A FI 20125958A FI 20125958 A FI20125958 A FI 20125958A
Authority
FI
Finland
Prior art keywords
thickness
optical properties
surface distance
measuring
measuring device
Prior art date
Application number
FI20125958A
Other languages
English (en)
Swedish (sv)
Other versions
FI125408B (fi
Inventor
Heimo Keränen
Original Assignee
Focalspec Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Focalspec Oy filed Critical Focalspec Oy
Priority to FI20125958A priority Critical patent/FI125408B/fi
Priority to PL13837251.1T priority patent/PL2901102T3/pl
Priority to EP13837251.1A priority patent/EP2901102B1/en
Priority to ES13837251T priority patent/ES2947564T3/es
Priority to PCT/FI2013/050898 priority patent/WO2014041254A1/en
Priority to US14/427,127 priority patent/US9476707B2/en
Publication of FI20125958A publication Critical patent/FI20125958A/fi
Application granted granted Critical
Publication of FI125408B publication Critical patent/FI125408B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
FI20125958A 2012-09-17 2012-09-17 Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi FI125408B (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20125958A FI125408B (fi) 2012-09-17 2012-09-17 Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
PL13837251.1T PL2901102T3 (pl) 2012-09-17 2013-09-17 Sposób i urządzenie pomiarowe do pomiaru odległości powierzchni, grubości i właściwości optycznych obiektu
EP13837251.1A EP2901102B1 (en) 2012-09-17 2013-09-17 Method and measuring device for measuring the distance of a surface, thickness and optical properties of an object
ES13837251T ES2947564T3 (es) 2012-09-17 2013-09-17 Método y dispositivo de medición para medir la distancia de una superficie, el grosor y las propiedades ópticas de un objeto
PCT/FI2013/050898 WO2014041254A1 (en) 2012-09-17 2013-09-17 Method and measuring device for measuring the distance of a surface, thickness and optical properties of an object
US14/427,127 US9476707B2 (en) 2012-09-17 2013-09-17 Method and measuring device for measuring the distance of a surface, thickness and optical properties of an object

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125958A FI125408B (fi) 2012-09-17 2012-09-17 Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
FI20125958 2012-09-17

Publications (2)

Publication Number Publication Date
FI20125958A true FI20125958A (fi) 2014-03-18
FI125408B FI125408B (fi) 2015-09-30

Family

ID=50277691

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125958A FI125408B (fi) 2012-09-17 2012-09-17 Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi

Country Status (6)

Country Link
US (1) US9476707B2 (fi)
EP (1) EP2901102B1 (fi)
ES (1) ES2947564T3 (fi)
FI (1) FI125408B (fi)
PL (1) PL2901102T3 (fi)
WO (1) WO2014041254A1 (fi)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI127908B (fi) * 2015-09-22 2019-05-15 Teknologian Tutkimuskeskus Vtt Oy Menetelmä ja laitteisto pinnan korkeuden mittaamiseksi
CN105890625B (zh) * 2016-04-05 2018-12-21 北京控制工程研究所 一种基于碳纳米管遮光罩的星敏感器的杂光测试方法
TWI616641B (zh) * 2017-02-23 2018-03-01 Method for measuring wafer thickness using near infrared ray
JP6821526B2 (ja) * 2017-08-15 2021-01-27 キヤノン株式会社 画像処理方法、画像処理装置、撮像装置、および、プログラム
US20200241117A1 (en) * 2017-09-28 2020-07-30 Pioneer Corporation Ranging device and optical scanning device
US11287626B2 (en) 2019-05-17 2022-03-29 Hong Kong Applied Science and Technology Research Institute Comoanv Limited Chromatic confocal system and a method for inspecting an object
FI130557B (fi) * 2020-09-29 2023-11-17 Lmi Tech Inc Laite kohteen etäisyyden, pinnan paksuuden ja optisten ominaisuuksien määrittämiseksi ja liittyvät menetelmät
CN113959349B (zh) * 2021-10-25 2022-04-19 湖南捷力泰科技有限公司 一种膜片质量检测装置及其方法
DE102022202778B4 (de) 2022-02-11 2024-05-16 Micro-Epsilon Optronic Gmbh System und Verfahren zur konfokal-chromatischen Linienabstandsmessung
WO2023151736A1 (de) 2022-02-11 2023-08-17 Micro-Epsilon Optronic Gmbh System und verfahren zur konfokal-chromatischen linienabstandsmessung

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Publication number Priority date Publication date Assignee Title
DE2906641A1 (de) 1979-02-21 1980-08-28 Freudenberg Carl Fa Verfahren zur optisch-elektrischen messung des abstandes zwischen einer messeinrichtung und einem pruefling
US4936676A (en) * 1984-11-28 1990-06-26 Honeywell Inc. Surface position sensor
IL121267A0 (en) 1997-07-09 1998-01-04 Yeda Res & Dev Method and device for determining the profile of an object
EP0890822A3 (en) 1997-07-09 2000-04-05 YEDA RESEARCH AND DEVELOPMENT Co. LTD. A triangulation method and system for color-coded optical profilometry
US6573998B2 (en) 1997-11-06 2003-06-03 Cynovad, Inc. Optoelectronic system using spatiochromatic triangulation
KR100406843B1 (ko) * 2001-04-06 2003-11-21 (주) 인텍플러스 색정보를 이용한 실시간 3차원 표면형상 측정방법 및 장치
KR100848988B1 (ko) * 2002-03-28 2008-07-30 타카이 토후 앤 소이 밀크 이큅먼트 컴퍼니 리미티드 식품의 겔 상태 또는 졸-겔 상태 변화의 평가 방법
FR2848664B1 (fr) 2002-12-11 2005-03-11 Micro Module Detecteur de position, forme et reflectivite d'une surface
TWI245114B (en) * 2004-10-11 2005-12-11 Ind Tech Res Inst Apparatus for measuring imaging spectrograph
US20060232790A1 (en) 2005-04-18 2006-10-19 Lee Chase Confocal measurement method and apparatus in a paper machine
JP2007147299A (ja) * 2005-11-24 2007-06-14 Kobe Steel Ltd 変位測定装置及び変位測定方法
US20070263228A1 (en) 2006-05-12 2007-11-15 Voith Paper Patent Gmbh Device and process for optical distance measurement
FI119259B (fi) 2006-10-18 2008-09-15 Valtion Teknillinen Pinnan ja paksuuden määrittäminen
US20080137061A1 (en) 2006-12-07 2008-06-12 Christopher John Rush Displacement Measurement Sensor Using the Confocal Principle
EP2124085A4 (en) 2007-02-14 2010-04-28 Nikon Corp CONFOCAL SLOTTED SCANNING MICROSCOPE
FI124299B (fi) * 2009-10-08 2014-06-13 Focalspec Oy Mittalaite ja menetelmä kohteen ja kohteen pinnan ominaisuuksien mittaamiseksi
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統

Also Published As

Publication number Publication date
FI125408B (fi) 2015-09-30
EP2901102A4 (en) 2016-04-20
WO2014041254A1 (en) 2014-03-20
ES2947564T3 (es) 2023-08-11
US9476707B2 (en) 2016-10-25
US20150219454A1 (en) 2015-08-06
EP2901102A1 (en) 2015-08-05
EP2901102B1 (en) 2023-06-07
PL2901102T3 (pl) 2023-11-20
EP2901102C0 (en) 2023-06-07

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