EP2885807B1 - Vorrichtung mit anode zur erzeugung von röntgenstrahlung - Google Patents

Vorrichtung mit anode zur erzeugung von röntgenstrahlung Download PDF

Info

Publication number
EP2885807B1
EP2885807B1 EP12774978.6A EP12774978A EP2885807B1 EP 2885807 B1 EP2885807 B1 EP 2885807B1 EP 12774978 A EP12774978 A EP 12774978A EP 2885807 B1 EP2885807 B1 EP 2885807B1
Authority
EP
European Patent Office
Prior art keywords
anode
target layer
electron beam
ray radiation
central portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP12774978.6A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2885807A1 (de
Inventor
Oliver Heid
Timothy Hughes
Thomas Kluge
Svetlana GOSSMANN-LEVCHUK
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2885807A1 publication Critical patent/EP2885807A1/de
Application granted granted Critical
Publication of EP2885807B1 publication Critical patent/EP2885807B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission

Definitions

  • the present invention relates to a device for generating X-radiation according to claim 1.
  • X-ray tubes for generating X-radiation are known from the prior art.
  • X-ray tubes have a cathode for emitting electrons. The emitted electrons are accelerated by a high voltage to an anode. In the anode, the electrons are decelerated and thereby generate X-ray Bremsstrahlung and characteristic X-rays.
  • X-ray Bremsstrahlung has a broad spectral distribution, while characteristic X-radiation has a discrete line spectrum. In the X-ray radiated from the X-ray tube both types of radiation are superimposed.
  • characteristic X-ray radiation with discrete energies is better suited than X-ray Bremsstrahlung. It is known to filter X-radiation with metallic filters in order to reduce the brake radiation component. However, such filters also dampen the proportion of characteristic X-rays.
  • the object of the present invention is to provide an improved device for generating X-radiation. This object is achieved by a device having the features of claim 1. Preferred developments are specified in the dependent claims.
  • An anode for generating X-radiation has a holder and a target layer held by the holder.
  • the target layer comprises a center section and an edge section.
  • the anode is exposed to an electron beam directed at the center portion of the target layer.
  • the edge portion is arranged with respect to the direction of the electron beam laterally adjacent to the central portion.
  • the edge portion in the direction of the electron beam has a greater thickness than the center portion.
  • the edge portion of the target layer of this anode is used for filtering X-rays generated in the center portion of the target layer of the anode. This improves the monochromaticity of the X-radiation generated by the anode.
  • the edge portion of the anode is raised in a direction opposite to the direction of the electron beam over the central portion. Then, X-ray radiation generated in the middle section of the target layer can be radiated counter to the beam direction of the electron beam and thereby pass through a part of the edge section of the target layer of the anode, whereby an attenuation of a continuous wavelength component of the X-radiation occurs.
  • the edge portion is arranged annularly around the center section.
  • the edge section can then perform filtering in different spatial directions of emitted X-ray radiation.
  • the target layer is formed of the same material.
  • the target layer has a material with an atomic number between 42 and 74.
  • these materials are particularly well suited for the generation of X-radiation.
  • the target layer comprises tungsten.
  • tungsten is well suited to the generation and filtering of X-radiation.
  • the center section has a thickness between 50 nm and 10 ⁇ m.
  • this thickness range has proven to be particularly suitable.
  • the center section perpendicular to the direction of the electron beam has a diameter between 1 mm and 20 mm.
  • these values have proven to be particularly suitable.
  • a device for generating X-ray radiation has a cathode for emitting an electron beam and an anode of the aforementioned type.
  • the anode is arranged such that an electron beam emitted by the cathode strikes the middle section of the target layer.
  • X-ray radiation generated in the middle section of the target layer of the anode in this device is filtered by the edge section of the target layer of the anode, whereby a monochromaticity of the generated X-radiation is improved.
  • the anode is arranged such that an electron beam emitted by the cathode strikes the center section of the target layer perpendicularly.
  • this results in a symmetrical and compact design of the device.
  • this has a window for discharging X-radiation generated in the target layer.
  • the window is arranged such that X-ray radiation generated in the middle section of the target layer and directed through the window penetrates previously the edge section of the target layer.
  • the X-ray radiation generated in the center section of the target layer is then filtered when penetrating the edge section of the target layer, thereby increasing monochromaticity of this X-radiation.
  • the window is arranged such that the X-ray radiation which is conducted through penetrates the edge section of the target layer on average over a length of between 10 ⁇ m and 100 ⁇ m. It has been found that such a penetration length leads to an advantageous increase in the monochromaticity of the X-radiation, without overly attenuating the intensity of the X-radiation as a whole.
  • the window is arranged so that with respect to the direction of the electron beam backward X-ray radiation can be discharged through the window.
  • rear-directed X-radiation relative to forward X-ray radiation has a higher proportion of characteristic X-radiation, so that the X-ray radiation emitted from the device has a particularly high monochromaticity after filtering through the edge portion of the target layer of the anode.
  • the device has a collector, which is intended to catch electrons of the electron beam, which have penetrated the anode.
  • a circuit between the cathode and the collector of the device can be closed by the collector, thereby improving the energy efficiency of the device.
  • FIG. 1 shows an X-ray spectrum 100 in a graph. On a horizontal axis, an energy 101 is plotted in keV. On a vertical axis, a photon flux 102 in 1 / (keV ⁇ mA ⁇ mm 2 ⁇ s) is plotted.
  • a first spectrum 110 indicates the spectral distribution of X-radiation emitted through a tungsten target layer of an anode of an X-ray tube and filtered through a 2 mm thick aluminum filter.
  • the first spectrum 110 has a continuous portion of Bremsstrahlung 111.
  • the first spectrum 110 has maxima at discrete energy values formed by characteristic x-ray radiation 112.
  • FIG. 2 shows by means of a graph 200 an attenuation of X-ray radiation through a filter made of tungsten.
  • the energy 101 is plotted in keV.
  • an absorption coefficient 202 in cm -1 is plotted.
  • FIG. 2 shows a curve 210 of the linear absorption coefficient of tungsten. It can be seen that the linear absorption coefficient of tungsten decreases with increasing energy. However, the absorption coefficient curve 210 has a K-edge 213 (K-edge) at which the falling absorption coefficient curve 210 increases in an abrupt manner. The K-edge 213 occurs at an energy 101 corresponding to a binding energy of electrons located in the K-shell of tungsten atoms.
  • Is X-ray radiation with the in FIG. 1 Filtered first tungsten spectrum shown by an additional filter 110, so there is an additional attenuation of this X-ray radiation. Due to the K-edge 213 in the absorption coefficient curve 210 of tungsten, higher energy components of the first spectrum 110 are attenuated more than the range of the K ⁇ 1 line and the K ⁇ 2 line of the characteristic X-ray radiation 112 of the first spectrum 110. This increases the relative intensity of the first spectrum mentioned lines in the spectrum of the filtered X-radiation.
  • FIG. 1 shows on the basis of a second spectrum 120, the spectral distribution of the X-ray radiation of the first spectrum 110 after an additional filtering 110 with a tungsten filter of 50 microns thickness. It can be seen that the proportion of the bremsstrahlung 121 of the second spectrum 120 is greatly reduced compared to the fraction of the bremsstrahlung 111 of the first spectrum 110 is. The proportion of characteristic X-ray radiation 122 of the second spectrum 120 is less strongly attenuated than the proportion of characteristic X-ray radiation 112 of the first spectrum 110. As a result, the second spectrum 120 has a higher monochromaticity than the first spectrum 110.
  • FIG. 3 shows a highly schematic representation of a section through an apparatus 300 for generating X-radiation.
  • Components of the device 300 for generating X-ray radiation shown can be arranged, for example, in a vacuum tube.
  • the X-ray generating device 300 may also be called an X-ray tube.
  • the device 300 for generating X-ray radiation has a cathode 310.
  • the cathode 310 is designed to emit electrons to produce an electron beam 320.
  • the cathode 310 may emit the electrons, for example by thermal emission or by field emission.
  • the electron beam 320 formed by the electrons emitted by the cathode 310 is accelerated in a beam direction 325 by a high voltage (not shown).
  • the device 300 for generating X-ray radiation further comprises an anode 400.
  • the anode 400 has a holder 410 and a target layer 420 held by the holder 410.
  • the target layer 420 in turn, comprises a center section 430 and an edge section 440.
  • the edge section 440 is offset laterally with respect to the beam direction 325 from the center section 430.
  • the middle section 430 and the edge section 440 are preferably formed of the same material.
  • the center section 430 and the edge section 440 of the target layer 420 are preferably made of a material having an atomic number between 42 and 74. More preferably, the center section 430 and the edge section 440 of the target layer 420 made of tungsten.
  • the holder 410 may be made of diamond, for example.
  • the anode 400 has a front side 421 and a back side 422.
  • the front side 421 of the anode 400 faces the cathode 310.
  • the anode 400 is arranged such that the electron beam 320 emanating from the cathode 310 strikes approximately perpendicular to a central region of the middle section 430 of the target layer 420.
  • the electron beam 320 impinging on the middle section 430 of the target layer 420 of the anode 400 is decelerated in the middle section 430 of the target layer 420, whereby x-ray radiation 330 is produced.
  • This X-ray radiation 330 is emitted in several or all spatial directions, inter alia in a radiation direction 335.
  • the emission direction 335 is preferably oriented backwards relative to the beam direction 325 of the electron beam 320. This means that the emission direction 335 from the middle section 430 of the target layer 420 of the anode 400 points into the half-space in which the cathode 310 is arranged.
  • the device 300 for generating X-ray radiation has a window 350 which serves to emit X-ray radiation 330 emitted in the emission direction 335 out of the device 300.
  • the window 350 may be made of aluminum or beryllium, for example.
  • the middle section 430 of the target layer 420 has a diameter 432 perpendicular to the beam direction 325.
  • the diameter 432 may for example be between 1 mm and 20 mm.
  • the middle section 430 of the target layer 420 has a thickness 431.
  • the thickness 431 may, for example, be between 50 nm and 10 ⁇ m.
  • the edge section 440 of the target layer 420 which is arranged externally around the center section 430 in the illustrated example, has a diameter 442 that is greater than the diameter 432 of the center section 430.
  • the edge portion 440 the target layer 420 in the beam direction 325 has a thickness 441 which is greater than the thickness 431 of the central portion 430.
  • the edge section 440 is raised on the front side 421 (ie, opposite to the beam direction 325) over the middle section 430 of the target layer 420.
  • Thickness 441 and diameter 442 of the edge portion 440 of the target layer 420, the diameter 432 of the middle portion 430 of the target layer 420, and the position of the window 350 are matched to each other such that X-rays 330 radiated from the center portion 430 of the target layer 420 of the anode 400 in the emission direction 335 Path to the window 350 penetrates a part of the edge portion 440 of the target layer 420 serving as a filter area 450.
  • the x-ray radiation 330 penetrates the filter region 450 of the edge section 440 in the middle to a penetration length 455, which may be between 10 ⁇ m and 100 ⁇ m, for example. During the penetration of the filter region 450, the x-ray radiation 330 is filtered so that its monochromaticity increases, as shown in FIG FIGS. 1 and 2 was explained.
  • the device 300 for generating X-ray radiation further comprises a collector 340, which is arranged in the beam direction 325 behind the anode 400.
  • the collector 340 serves to collect electrons of the electron beam 320 that have penetrated the anode 400.
  • the electrons collected by the collector 340 may be recirculated in an electrical circuit, thereby improving the energy efficiency of the X-ray generating device 300.
  • FIG. 4 shows a schematic perspective view of the target layer 420 of the anode 400 of the device 300 for generating X-ray radiation Fig. 3 , It can be seen that the edge portion 440 is arranged annularly around the middle portion 430 of the target layer 420.
  • This formation of the target layer 420 has the advantage that the anode 400 in the device 300 for generating X-radiation around a to the electron beam 320 parallel axis of rotation can be rotated. This results in a more uniform heating and wear of the target layer 420 of the anode 400 during operation of the device 300 for generating X-radiation. However, the rotation of the anode 400 can also be dispensed with.
  • FIG. 5 shows a schematic perspective view of a target layer 1420 according to a second embodiment.
  • the target layer 1420 of FIG. 5 For example, the target layer 420 of the anode 400 of the X-ray generating device 300 of FIG. 3 replace.
  • the target layer 1420 again comprises a center section 1430 and a peripheral section 1440.
  • the target layer 1420 has a front side 1421 and a rear side 1422.
  • the target layer 1420 is designed to be held by the holder 410 of the anode 400 in such a way that the electron beam 320 generated by the cathode 310 strikes the front side 1421 of the middle section 1430.
  • the edge portion 1440 of the target layer 1420 is the FIG. 5 not annularly disposed around the entire center portion 1430 of the target layer 1420. Rather, the edge portion 1440 has the shape of a circular ring sector, which is arranged only in a limited angular range laterally adjacent to the center portion 1430 of the target layer 1420.
  • the edge section 1440 is arranged next to the middle section 1430 of the target layer 1420 such that x-ray radiation 330 generated in the center section 1430 of the target layer 1420 penetrates the edge section 1440 of the target layer 1420 in the emission direction 335.
  • the anode 400 is not rotated.

Landscapes

  • X-Ray Techniques (AREA)
EP12774978.6A 2012-09-21 2012-09-21 Vorrichtung mit anode zur erzeugung von röntgenstrahlung Not-in-force EP2885807B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2012/068616 WO2014044316A1 (de) 2012-09-21 2012-09-21 Vorrichtung mit anode zur erzeugung von röntgenstrahlung

Publications (2)

Publication Number Publication Date
EP2885807A1 EP2885807A1 (de) 2015-06-24
EP2885807B1 true EP2885807B1 (de) 2017-08-16

Family

ID=47044994

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12774978.6A Not-in-force EP2885807B1 (de) 2012-09-21 2012-09-21 Vorrichtung mit anode zur erzeugung von röntgenstrahlung

Country Status (7)

Country Link
US (1) US20150228441A1 (ko)
EP (1) EP2885807B1 (ko)
JP (1) JP2015533015A (ko)
KR (1) KR20150056806A (ko)
CN (1) CN104641447B (ko)
RU (1) RU2636752C2 (ko)
WO (1) WO2014044316A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3751594B1 (de) * 2019-06-11 2024-08-28 Siemens Healthineers AG Röntgenröhre

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3117726A1 (de) * 1981-05-05 1982-12-02 Siemens AG, 1000 Berlin und 8000 München Drehanoden-roentgenroehre

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE654089C (de) * 1935-10-15 1937-12-16 Boris Rajewsky Dr Hochleistungsroentgenroehre mit rotierender Antikathode und mehrfacher Ausnutzung des Prinzips der projektiven Brennfleckverkuerzung
CH494520A (de) * 1968-12-16 1970-07-31 Siemens Ag Röntgengerät
DE2203403A1 (de) * 1972-01-25 1973-08-09 Siemens Ag Roentgen-strahlenquelle
GB2044985A (en) * 1979-03-15 1980-10-22 Emi Ltd X-ray tube
JPS6421850A (en) * 1987-07-15 1989-01-25 Japan Aviation Electron X-ray target
JP2747693B2 (ja) * 1987-09-08 1998-05-06 バブコツク日立株式会社 微小焦点ｘ線装置
US4975621A (en) * 1989-06-26 1990-12-04 Union Carbide Corporation Coated article with improved thermal emissivity
DE3923571A1 (de) * 1989-07-17 1991-01-24 Licentia Gmbh Roentgenroehre und verfahren zu deren herstellung
US5204891A (en) * 1991-10-30 1993-04-20 General Electric Company Focal track structures for X-ray anodes and method of preparation thereof
DE19510047C2 (de) * 1995-03-20 1998-11-05 Siemens Ag Anode für eine Röntgenröhre
JPH09213248A (ja) * 1995-12-05 1997-08-15 General Electric Co <Ge> 炭素−炭素複合体を製造する方法
US6052434A (en) * 1996-12-27 2000-04-18 Toth; Thomas L. X-ray tube target for reduced off-focal radiation
US6163593A (en) * 1998-08-21 2000-12-19 Varian Medical Systems, Inc. Shaped target for mammography
US6021174A (en) * 1998-10-26 2000-02-01 Picker International, Inc. Use of shaped charge explosives in the manufacture of x-ray tube targets
DE19900468A1 (de) * 1999-01-08 2000-07-20 Siemens Ag Röntgenröhre mit optimiertem Elektronenauftreffwinkel
US6584172B2 (en) * 2000-04-03 2003-06-24 General Electric Company High performance X-ray target
US7649981B2 (en) * 2003-10-15 2010-01-19 Varian Medical Systems, Inc. Multi-energy x-ray source
EP2027593A1 (en) * 2006-05-22 2009-02-25 Philips Intellectual Property & Standards GmbH X-ray tube whose electron beam is manipulated synchronously with the rotational anode movement
US7983394B2 (en) * 2009-12-17 2011-07-19 Moxtek, Inc. Multiple wavelength X-ray source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3117726A1 (de) * 1981-05-05 1982-12-02 Siemens AG, 1000 Berlin und 8000 München Drehanoden-roentgenroehre

Also Published As

Publication number Publication date
WO2014044316A1 (de) 2014-03-27
CN104641447B (zh) 2017-03-29
US20150228441A1 (en) 2015-08-13
CN104641447A (zh) 2015-05-20
RU2636752C2 (ru) 2017-11-28
RU2015114805A (ru) 2016-11-10
KR20150056806A (ko) 2015-05-27
EP2885807A1 (de) 2015-06-24
JP2015533015A (ja) 2015-11-16

Similar Documents

Publication Publication Date Title
EP1102302B1 (de) Monochromatische Röntgenstrahlenquelle
DE10120335C2 (de) Ionenmobilitätsspektrometer mit nicht-radioaktiver Ionenquelle
EP1783809A2 (de) Nanofocus-Röntgenröhre
DE69125591T2 (de) Röntgen-röhre
DE102008046288B4 (de) Elektronenstrahlsteuerung eines Röntgenstrahlers mit zwei oder mehr Elektronenstrahlen
DE2154888A1 (de) Roentgenroehre
DE202005017496U1 (de) Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre
DE102007046278A1 (de) Röntgenröhre mit Transmissionsanode
DE2533348B2 (de) Target zur Umwandlung eines Elektronenstrahlbfindels hoher kinetischer Energie in Rftntgen-Bremsstrahlung
EP3251127A1 (de) Streustrahlenraster
EP0021441B1 (de) Elektronenbeschleuniger zur Röntgenstrahlentherapie
DE112019003777T5 (de) Röntgenreflexionsquelle mit hoher helligkeit
DE2441968C3 (de) Röntgenröhre zur Erzeugung monochromatischer Röntgenstrahlung
WO2005096341A1 (de) Anodenmodul für eine flüssigmetallanoden-röntgenquelle sowie röntgenstrahler mit einem anodenmodul
DE2727275B2 (de) Elektronenbeschleuniger mit einem dem Elektronenstrahl ausgesetzten Target
DE102013220189A1 (de) Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung
WO2013007484A1 (de) Monochromatische röntgenquelle
EP2885807B1 (de) Vorrichtung mit anode zur erzeugung von röntgenstrahlung
DE102012103974A1 (de) Vorrichtung und Verfahren zur Erzeugung zumindest eines Röntgenstrahlen abgebenden Brennflecks
EP3213337B1 (de) Metallstrahlröntgenröhre
DE69007627T2 (de) Röntgenbildverstärkerröhre mit Selektivfilter.
DE102012011309B4 (de) Röntgenstrahlröhre vom Transmissionstyp und Röntgenstrahlröhre vom Reflektionstyp
DE102012216977B4 (de) Vorrichtung zur Erzeugung von Röntgenstrahlung
DE102005053324B4 (de) Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre
DE102018010288B4 (de) Target für eine Strahlungsquelle, Strahlungsquelle zum Erzeugen invasiver elektromagnetischer Strahlung und Verfahren zum Herstellen eines Targets für eine Strahlungsquelle

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20150227

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20160801

REG Reference to a national code

Ref country code: DE

Ref legal event code: R079

Ref document number: 502012011054

Country of ref document: DE

Free format text: PREVIOUS MAIN CLASS: H01J0035080000

Ipc: G21K0001100000

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIC1 Information provided on ipc code assigned before grant

Ipc: G21K 1/10 20060101AFI20170223BHEP

Ipc: H01J 35/08 20060101ALI20170223BHEP

INTG Intention to grant announced

Effective date: 20170321

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

Owner name: SIEMENS AKTIENGESELLSCHAFT

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 919809

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170915

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 6

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502012011054

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: SIEMENS SCHWEIZ AG, CH

Ref country code: CH

Ref legal event code: PCOW

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20170912

Year of fee payment: 6

Ref country code: IT

Payment date: 20170928

Year of fee payment: 6

Ref country code: FR

Payment date: 20170918

Year of fee payment: 6

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20170816

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171116

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171216

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171116

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20180110

Year of fee payment: 6

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502012011054

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20170930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170921

26N No opposition filed

Effective date: 20180517

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170930

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170921

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170930

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 919809

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170921

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170921

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502012011054

Country of ref document: DE

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20180921

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20120921

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190402

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180921

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180921

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170816