EP2723923B1 - Pièces de pompe à vide ne comprenant pas de couche de conversion - Google Patents

Pièces de pompe à vide ne comprenant pas de couche de conversion Download PDF

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Publication number
EP2723923B1
EP2723923B1 EP12728262.2A EP12728262A EP2723923B1 EP 2723923 B1 EP2723923 B1 EP 2723923B1 EP 12728262 A EP12728262 A EP 12728262A EP 2723923 B1 EP2723923 B1 EP 2723923B1
Authority
EP
European Patent Office
Prior art keywords
components
alloys
aluminum
titanium
zirconium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12728262.2A
Other languages
German (de)
English (en)
Other versions
EP2723923A1 (fr
Inventor
Michael Froitzheim
Joseph HEPPEKAUSEN
Andy PONTOLAENG
Lutz Hüsemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Henkel AG and Co KGaA
Leybold GmbH
Original Assignee
Henkel AG and Co KGaA
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Henkel AG and Co KGaA, Leybold GmbH filed Critical Henkel AG and Co KGaA
Publication of EP2723923A1 publication Critical patent/EP2723923A1/fr
Application granted granted Critical
Publication of EP2723923B1 publication Critical patent/EP2723923B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D9/00Electrolytic coating other than with metals
    • C25D9/04Electrolytic coating other than with metals with inorganic materials
    • C25D9/06Electrolytic coating other than with metals with inorganic materials by anodic processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

Definitions

  • the invention relates to conversion-layer-free components of vacuum pumps made of valve metals and their alloys.
  • DE 101 63 864 A1 relates to a process for coating articles of valve metals or their alloys with a thin barrier layer of the metal and oxide ceramic layer thereon, the surface of which is coated with fluoropolymers, characterized in that the fluoropolymers in the form of a solution are impregnated by vacuum impregnation into the capillary system Insert oxide ceramic layer and dried after removing the non-wetting solution components.
  • the group of valve metals aluminum, magnesium, titanium, niobium or zirconium and their alloys.
  • this document also defines other components of vacuum pumps made of valve metals, such as rotors and stators of turbomolecular pumps.
  • pure aluminum and AlMn alloys AlMnCu; AlMg 1 ; AlMg 1.5 ; E-AlMgSi; AlMgSi 0.5 ; AlZnMgCu 0.5 ; AlZnMgCu 1.5 ; G-AlSi 1.2 ; G-AlSi 5 MW; G-AlSi 8 Cu 3 ; G-AlCu 4 Ti; G-AlCu 4 TiMg understood.
  • the magnesium casting alloys of the ASTM designations AS41, AM60, AZ61, AZ63, AZ81 are also suitable for the purposes of the invention.
  • the oxide ceramic layer is formed essentially by a conversion layer of the surface of the component, so that here virtually a portion of the substrate material is removed and converted into the oxidation barrier layer.
  • EP 1 818 428 A1 For example, there is known a method of electrolytic ceramic coating for metal and an electrolyte for use in electrolytic ceramic coating of metals and metallic materials.
  • EP 1 050 606 A1 discloses a method of making hard protective coatings on particles made from aluminum alloys.
  • WO 2005/014892 A2 describes a method for producing a coating on a plastic component of a vacuum pump.
  • a metallic layer is applied to the component and the coating electrolytic plasma oxidation of the metallic layer.
  • valve metal objects in particular components of vacuum pumps with an oxide ceramic layer formed from the metal, which has a thin barrier layer as an interface to the metal, provided with a further polymeric coating, which is formed on the basis of parylenes.
  • DE 10 2005 040 648 A1 also describes the composition of this surface coating and an application method.
  • WO 03/029529 A1 WO 2006/047501 A2 and WO 2006/047526 A2 describe the production of an article with a corrosion, heat and abrasion resistant ceramic coating of titanium and / or zirconia applied by the DC or AC anodization on the aluminum and / or titanium article.
  • the objects underlying this prior art are not defined further. Also, no information on the chemical resistance, in particular the resistance to citric acid or hydrochloric and / or Flußsääuredämpfe present.
  • the object of the present invention is to provide conversion-layer-free components of vacuum pumps made of valve metals and their alloys, which in addition to corrosion, heat and abrasion resistance have a galvanically generated conversion coating coating, which is also resistant to chemicals, especially resistant to citric acid or hydrochloric acid vapors. This is particularly important in the manufacture of components of vacuum pumps that come in contact with aggressive gases, such as HCl and / or HF vapor / gas, especially in the vacuum range.
  • the solution of the above object consists in a first embodiment of conversion-free components of vacuum pumps made of valve metals and their alloys, which is characterized in that the surface of a galvanically produced coating of at least one oxide and / or an oxifluoride of an element of the group consisting of boron, germanium , Aluminum, magnesium, titanium, niobium, hafnium and / or zirconium and mixtures thereof and / or an oxifluoride of the group consisting of Aluminum, titanium and / or zirconium has a layer thickness in the range of 5 to 50 microns.
  • the solution of the abovementioned object utilizes contoured covering of surfaces, as is possible with known conversion layers such as KEPLA-Coat® or anodization layers.
  • conversion layers such as KEPLA-Coat® or anodization layers.
  • the deposited layers can have a hardness of about 700 HV.
  • Components according to the invention of vacuum pumps made of valve metals and their alloys include, in particular, rotors, stators, stator disk halves, threaded steps, housings and bearing shells.
  • valve metals is in accordance with the prior art here for metals of the group aluminum, magnesium, titanium, niobium and / or zirconium and their alloys.
  • the special alloys of aluminum, magnesium and titanium mentioned in the introduction to the description are also particularly preferred for the purposes of the present invention.
  • At least one oxide and / or oxifluorides of the group consisting of aluminum, titanium and / or zirconium are particularly preferably selected.
  • an embodiment of the present invention is that the thickness of the surface coating is 5 to 50 ⁇ m. Particularly preferred according to the present invention, the thickness of the surface coating is 15 to 30 microns. If the thickness of the surface coating is chosen to be too thin, adequate protection against corrosion, heat, abrasion and chemicals is not guaranteed. If, however, the thickness of the surface coating chosen too large, so appropriate coatings tend to flake off. In addition, correspondingly thick layers are uneconomical.
  • a sample plate of AlMgSi 1 with the dimensions of 100 x 50 x 1.5 mm was at 400 volts for 5 minutes in a WO 03/029529 .
  • WO 2006/047501 A2 and WO 2006/047526 A2 electrolytes coated anodically over a period of 5 minutes. The determined layer thickness was about 10 ⁇ m.
  • a sample sheet as described in Example 2 was coated analogously within 10 minutes.
  • the determined layer thickness was about 12 ⁇ m.
  • test panels coated according to Examples 1 and 2 were exposed to a hydrochloric acid atmosphere which forms over an initial charge of 15% strength by weight hydrochloric acid master.
  • the oxide ceramic layer on the sample plates was examined for detachment after 144 h and after 300 h of the test period. The oxide ceramic layer on the sample plates was intact after this exposure time.
  • test panels coated according to Examples 1 and 2 were exposed to citric acid solutions at concentrations of 2%, 3.5% and 5%.
  • the oxide ceramic layer on the sample plates was after 90h trial period for deletions examined.
  • the oxide ceramic layer on the sample plates was intact after this exposure time.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Physical Vapour Deposition (AREA)

Claims (5)

  1. Composants de pompe à vide sans couches de conversion, en métaux de soupape ou des alliages de ceux-ci, caractérisés en ce que leurs surfaces présentent un revêtement d'au moins un oxyde d'un élément du groupe consistant en bore, germanium, aluminium, magnésium, titane, niobium, hafnium et/ou zirconium, et des mélanges de ceux-ci, et/ou un oxyfluorure du groupe consistant en aluminium, titane et/ou zirconium, préparés par revêtement galvanique, et ayant une épaisseur de couche comprise dans la gamme allant de 5 à 50 µm.
  2. Composants selon la revendication 1, incluant des rotors, des stators, des demi-disques de stators, des étages à filetage, des boîtiers, et des coussinets.
  3. Composants selon la revendication 1 ou 2, caractérisés en ce que ledit métal de soupape est choisi parmi l'aluminium, le magnésium, le titane, le niobium, et /ou le zirconium et leurs alliages.
  4. Composants selon l'une quelconque des revendications 1 à 3, caractérisés en ce que l'épaisseur du revêtement de surface est de 15 à 30 µm.
  5. Procédé pour préparer des composants de pompe à vide sans couches de conversion, en métaux de soupape ou des alliages de ceux-ci, préparés par revêtement galvanique, caractérisé par l'étape consistant à
    (a) procurer une solution d'anodisation contenant, outre l'eau, au moins un autre composant choisi dans le groupe de fluorures et oxyfluorures complexes, dispersibles dans l'eau, d'éléments du groupe consistant en bore, germanium, aluminium, magnésium, titane, niobium, hafnium et/ou zirconium, et des mélanges de ceux-ci,
    (b) mettre une cathode en contact avec ladite solution d'anodisation,
    (c) introduire les composants en tant qu'anodes dans ladite solution d'anodisation, et
    (d) appliquer une tension électrique entre l'anode et la cathode pour appliquer un revêtement de surface auxdits composants.
EP12728262.2A 2011-06-24 2012-06-15 Pièces de pompe à vide ne comprenant pas de couche de conversion Active EP2723923B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011105455A DE102011105455A1 (de) 2011-06-24 2011-06-24 Konversionsschichtfreie Bauteile von Vakuumpumpen
PCT/EP2012/061491 WO2012175429A1 (fr) 2011-06-24 2012-06-15 Pièces exemptes de couches de conversion pour des pompes à vide

Publications (2)

Publication Number Publication Date
EP2723923A1 EP2723923A1 (fr) 2014-04-30
EP2723923B1 true EP2723923B1 (fr) 2017-09-06

Family

ID=46319764

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12728262.2A Active EP2723923B1 (fr) 2011-06-24 2012-06-15 Pièces de pompe à vide ne comprenant pas de couche de conversion

Country Status (8)

Country Link
US (1) US20140154503A1 (fr)
EP (1) EP2723923B1 (fr)
JP (1) JP5957075B2 (fr)
KR (1) KR20140043129A (fr)
CN (1) CN103620091A (fr)
DE (1) DE102011105455A1 (fr)
TW (1) TWI560327B (fr)
WO (1) WO2012175429A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10933592B2 (en) 2016-06-29 2021-03-02 Valinge Innovation Ab Method and device for inserting a tongue

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109707628A (zh) * 2018-12-17 2019-05-03 陈鑫 真空泵的铝合金泵体结构及用于该泵体加工的珩磨头

Family Cites Families (16)

* Cited by examiner, † Cited by third party
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JP4332297B2 (ja) * 1997-12-17 2009-09-16 アイル・コート・リミテツド アルミニウム合金からつくられた物品上に硬質保護用コーティングを施す方法
KR100417580B1 (ko) * 2000-12-29 2004-02-05 주식회사 엘지이아이 스크롤 압축기용 베어링 제조방법
ATE389045T1 (de) 2001-09-29 2008-03-15 Oerlikon Heberlein Temco Wattw Verfahren und vorrichtung zur herstellung von kontengarn
US7578921B2 (en) * 2001-10-02 2009-08-25 Henkel Kgaa Process for anodically coating aluminum and/or titanium with ceramic oxides
US7820300B2 (en) * 2001-10-02 2010-10-26 Henkel Ag & Co. Kgaa Article of manufacture and process for anodically coating an aluminum substrate with ceramic oxides prior to organic or inorganic coating
US6916414B2 (en) * 2001-10-02 2005-07-12 Henkel Kommanditgesellschaft Auf Aktien Light metal anodization
US7452454B2 (en) 2001-10-02 2008-11-18 Henkel Kgaa Anodized coating over aluminum and aluminum alloy coated substrates
DE10163864A1 (de) * 2001-12-22 2003-07-10 Leybold Vakuum Gmbh Beschichtung von Gegenständen
JP4694771B2 (ja) * 2003-03-12 2011-06-08 財団法人国際科学振興財団 ポンプおよびポンプ部材の製造方法
DE202004010821U1 (de) * 2003-07-23 2004-12-23 The Boc Group Plc, Windlesham Vakuumpumpenbauteil
GB0317126D0 (en) * 2003-07-23 2003-08-27 Boc Group Plc Coating
US20080093223A1 (en) * 2004-11-05 2008-04-24 Nobuaki Yoshioka Method for electrolytically depositing a ceramic coating on a metal, electrolyte for such electrolytic ceramic coating method, and metal member
DE102005040648A1 (de) 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Beschichtete Gegenstände
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
US9701177B2 (en) * 2009-04-02 2017-07-11 Henkel Ag & Co. Kgaa Ceramic coated automotive heat exchanger components
CN102362015B (zh) * 2009-04-10 2014-06-18 株式会社爱发科 构成机械增压泵、涡轮分子泵或干式泵的部件的表面处理方法及通过该表面处理方法处理过的机械增压泵、涡轮分子泵或干式泵

Non-Patent Citations (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10933592B2 (en) 2016-06-29 2021-03-02 Valinge Innovation Ab Method and device for inserting a tongue

Also Published As

Publication number Publication date
TW201303090A (zh) 2013-01-16
US20140154503A1 (en) 2014-06-05
DE102011105455A1 (de) 2013-01-10
EP2723923A1 (fr) 2014-04-30
TWI560327B (en) 2016-12-01
KR20140043129A (ko) 2014-04-08
JP2014520211A (ja) 2014-08-21
CN103620091A (zh) 2014-03-05
WO2012175429A1 (fr) 2012-12-27
JP5957075B2 (ja) 2016-07-27

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