EP2691960A1 - Herstellung von transparenten elektroden aus metallisierten kohlenstoffnanoröhren - Google Patents

Herstellung von transparenten elektroden aus metallisierten kohlenstoffnanoröhren

Info

Publication number
EP2691960A1
EP2691960A1 EP12715189.2A EP12715189A EP2691960A1 EP 2691960 A1 EP2691960 A1 EP 2691960A1 EP 12715189 A EP12715189 A EP 12715189A EP 2691960 A1 EP2691960 A1 EP 2691960A1
Authority
EP
European Patent Office
Prior art keywords
carbon nanotubes
inclusive
substrate
layer
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12715189.2A
Other languages
English (en)
French (fr)
Inventor
Karell SAINT-AUBIN
Caroline Celle
Jean-Pierre Simonato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP2691960A1 publication Critical patent/EP2691960A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/04Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of carbon-silicon compounds, carbon or silicon

Definitions

  • the invention relates to a method of forming an electrically conductive and transparent layer in the visible wavelength domain on the surface of a substrate.
  • Thin films or conductive and transparent films are used in many fields such as the field of photovoltaics, touch screens, in particular liquid crystal displays (LCD), or light emitting diodes (OLED).
  • LCD liquid crystal displays
  • OLED light emitting diodes
  • these layers or films are most often made of indium oxide / tin oxide (ITO) because the latter has a low electrical resistance associated with a high transmittance in the visible wavelength range. .
  • ITO indium oxide / tin oxide
  • films or thin layers made of this type of oxide are rather fragile and have a cracking problem, which restricts their use in applications where the substrates on which they are deposited are non-flexible.
  • is a material that is increasingly rare and more and more expensive.
  • Carbon nanotubes have excellent mechanical, electronic and thermal properties.
  • Carbon nanotubes in the form of a 2D network are therefore widely used in the form of transparent conductive film. Nevertheless, although the electrical performance of carbon nanotubes is greater than the intrinsic performance of the material itself (carbon), the nanotube networks ultimately have lower performance because the contacts between the CNTs induce significant electrical resistances.
  • the density of carbon nanotubes in the network is very high, which results in a low transmittance of visible wavelengths.
  • This solution consists in creating a two-dimensional network of a mixture of carbon nanotubes and metal nanowires, in particular gold nanowires.
  • This solution consists of functionalizing the surface of the carbon nanotubes with palladium by an electroless plating process.
  • This method involves bringing purified carbon nanotubes and a palladium salt together to reduce palladium cations on the surface of the carbon nanotubes.
  • the carbon nanotubes are covered non-continuously with a metal, in this case palladium.
  • the aim of the invention is to overcome the drawbacks of the prior art by proposing a method of forming a thin layer having a very high transmittance in the wavelength range of the visible, which is simple to implement, and which does not require the creation of metal nanofilts.
  • the invention proposes a method for forming an electrically conductive and transparent layer in the visible wavelength range, that is to say having a transmittance greater than or equal to 85% of these waves. on at least one surface of a substrate, characterized in that: the substrate is of electrically nonconductive material,
  • step b) forming, by electroplating, on the outer surface of the carbon nanotubes deposited in step a), a metal layer having a thickness between 0.1, inclusive, and 10 inclusive nm.
  • the substrate is made of a material chosen from glass, silicon, quartz and transparent polymers.
  • Transparent polymers that can be used are polyethylene terephthalate (PET), ethylene polynaphthalate (PEN), polycarbonate (PC), and polymethyl methacrylate (PMMA).
  • step a) comprises the following steps:
  • step a2) is a filtration deposition step
  • the dispersion is filtered through a membrane on which the nanotubes are retained. These nanotubes are then deposited on the surface of the substrate by transfer.
  • the dispersion of carbon nanotubes may further comprise a film-forming agent and / or a surfactant.
  • the deposition step a) is a step of synthesizing the carbon nanotubes directly on the surface of the substrate.
  • step b) is a step of forming a layer of a metal chosen from aluminum (Al), chromium (Cr), cobalt (Co), nickel (Ni ), copper (Cu), zinc (Zn), palladium (Pd), rhodium (Rh), platinum (Pt), silver (Ag), tin (Sn), tungsten (W) ), gold (Au), titanium (Ti), manganese (Mn), cadmium (Cd), ruthenium (Ru), iridium (Ir), praseodymium (Pr), and mixtures of at least two of these, preferably selected from silver or gold.
  • a metal chosen from aluminum (Al), chromium (Cr), cobalt (Co), nickel (Ni ), copper (Cu), zinc (Zn), palladium (Pd), rhodium (Rh), platinum (Pt), silver (Ag), tin (Sn), tungsten (W) ), gold (Au), titanium (Ti
  • the method of the invention may further comprise a step of doping the carbon nanotubes by soaking the substrate obtained in step a) in a solution containing the dopant or a dopant precursor, preferably a precursor of the dopant, preferably SOCl 2 or HNO 3.
  • the invention also proposes a substrate of a non-electrically conductive material covered on at least one of its surfaces with a layer of carbon nanotubes, at a carbon nanotube density of between 0.1, inclusive, and 40, inclusive, carbon nanotubes per ⁇ 2 of surface, preferably between 0.1, inclusive, and 10, inclusive, carbon nanotubes per ⁇ 2 of surface, said carbon nanotubes being metallized at the surface with a a metal layer having a thickness of between 0.1, inclusive, and 10, inclusive, nanometers, and said metal layer being in contact with the surface.
  • the substrate is made of a material chosen from glass, silicon, quartz and transparent polymers.
  • the metal it is preferably chosen from aluminum (Al), chromium (Cr), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), palladium ( Pd), rhodium (Rh), platinum (Pt), silver (Ag), tin (Sn), tungsten (W), gold (Au), titanium (Ti), manganese (Mn), cadmium (Cd), ruthenium (Ru), iridium (Ir), praseodymium (Pr), and mixtures and alloys of at least two of these.
  • the metal is selected from silver or gold.
  • the layer formed on the substrate advantageously comprises doped carbon nanotubes.
  • the invention also proposes an electrode characterized in that it comprises a device according to the invention.
  • the invention proposes a method of manufacturing an electrode characterized in that it comprises a step of forming an electrically conductive and transparent layer in the visible wavelength range, on at least one surface of a substrate, by the method according to the invention.
  • the carbon nanotubes are single-wall carbon nanotubes and metal type.
  • FIG. 1 schematically represents a perspective view of a substrate coated with a layer, according to the invention, transparent in the visible and near-infrared wavelength range and electrically conductive, consisting of covered carbon nanotubes. selectively of a metal layer, and obtained by the method according to the invention
  • FIG. 2 schematically represents a sectional view of a carbon nanotube coated with a metal and constituting the transparent layer in the wavelength range of the visible and the near infrared and electrically conductive after treatment by the method according to FIG. 'invention.
  • the carbon nanotubes may be single-walled carbon nanotubes (SWCNT) or multi-walled carbon nanotubes (MWCNT), and in particular double-walled carbon nanotubes (DWCNT).
  • SWCNT single-walled carbon nanotubes
  • MWCNT multi-walled carbon nanotubes
  • DWCNT double-walled carbon nanotubes
  • the single-walled carbon nanotubes are said to be either metallic or semiconductors and the multi-wall carbon nanotubes are said to be metallic.
  • single-walled carbon nanotubes are used.
  • These carbon nanotubes are produced, in a manner known per se, by arc discharge (arc discharge), chemical vapor deposition (CVD) or laser ablation (laser ablation).
  • the carbon nanotubes used in the invention have diameters of between 1 and 200 nm and lengths of between 1 and 3000 ⁇ , limits included.
  • the metals used in the invention are all conductive materials which can in particular constitute an electrode, in particular an anode. These materials are preferably materials comprising at least 90% of metal in the chemical sense.
  • metal in the invention refers to a material comprising at least 90% of all metals and their alloys, in particular aluminum (Al), chromium (Cr), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), palladium (Pd), rhodium (Rh), platinum (Pt), silver (Ag), tin (Sn), tungsten (W), gold (Au), titanium (Ti), manganese (Mn), cadmium (Cd), ruthenium (Ru), iridium (Ir), and lead (Pb) and all mixtures of one or more of these metals, optionally doped.
  • the substrate In order to selectively cover the carbon nanotubes with metal, the substrate must be made of an electrically nonconductive material in order to locate the metal deposition on the carbon nanotube conducting paths.
  • the substrate may be glass, silicon, quartz and transparent polymer.
  • the invention provides a method which comprises a step a) of deposition, on the surface, denoted 5 in FIG. 1, of a substrate, denoted 1 in FIG. 1, of an electrically nonconductive material, as defined herein. above, of carbon nanotubes, denoted 4 in FIG. 2, at a density which is between 0.1, inclusive, and 40, inclusive, carbon nanotubes per ⁇ 2 of surface 5.
  • the density of the nanotubes (4) is between 1, inclusive, and 10, inclusive, carbon nanotubes 4 per ⁇ 2 of surface 5.
  • the carbon nanotubes 4 can be either directly synthesized on the surface 5 or deposited, from a suspension of carbon nanotubes 4 in a solvent on the surface 5 by a spin coating process (spin coating). (dip-coating), soaking, filtration or nebulization.
  • spin coating spin coating
  • dip-coating dip-coating
  • soaking filtration or nebulization.
  • the solvent may be any solvent that does not interfere with or deteriorate the carbon nanotubes or their physical and chemical properties or the substrate.
  • the technique for depositing carbon nanotubes on the surface 5 is preferably, in the invention, the technique of nebulization.
  • the carbon nanotubes 4 deposited on the surface 5 form a network.
  • the second step of the process of the invention is then to selectively deposit a metal layer denoted 6 in FIG. 2 on the network of carbon nanotubes forming the layer denoted 2 in FIG.
  • the deposition of the metal layer is by electroplating ('electroplating').
  • the metal deposited on the carbon nanotubes 4 depends on the final application, in the invention, silver or gold will preferably be used.
  • the electroplating deposit apparatus contains a voltage source connected to an anode and to the network of carbon nanotubes deposited on the substrate, and optionally to a reference electrode, and a tray for containing the electroplating solution and a switch.
  • the electroplating bath used will preferably contain 1 g / l of silver cyanide, 45 g / l of potassium cyanide, 30 g / l of potassium carbonate and 10% by weight of potassium hydroxide. hypochlorous acid relative to the total mass of the bath.
  • the electroplating bath will preferably comprise 4 g / l of gold cyanide, 40 g / l of citric acid and 40 g / l of potassium citrate.
  • the process of the invention may also comprise a step of synthesis of carbon nanotubes 4.
  • It may also include a step of manufacturing a dispersion of carbon nanotubes 4.
  • the network of carbon nanotubes formed on the surface 5, and before metallization can be doped to improve the contact between the metal layer and the nanotubes with a dopant or a precursor of a dopant such as SOCl 2 or HNO 3.
  • a dopant or a precursor of a dopant such as SOCl 2 or HNO 3.
  • These doped nanotubes have on the surface electroattracting atoms (for example oxygen, chlorine) which delocalise the electrons of the carbon.
  • the invention also proposes a device which comprises a substrate 1 coated on at least one of its surfaces 5 with a layer 2 transparent to the visible and electrically conductive wavelengths.
  • the wavelengths of the visible are defined in the invention as wavelengths of 380 to 780 nm.
  • electrically conductive corresponds to a resistance per square smaller than 100 ⁇ ⁇ .
  • the layer 2 is formed of a network of carbon nanotubes 7, the carbon nanotubes 7 being each constituted by carbon nanotubes 4 covered with a layer of metal 6.
  • the density of carbon nanotubes 4 in the network formed on the surface 5 is between 0.1, inclusive, and 40, inclusive, carbon nanotubes per ⁇ of surface area 5. Below 0.1 nanotubes of carbon per ⁇ 2 of surface 5, the nanotubes may not touch each other and therefore not form a conductive layer.
  • the layer formed loses transmittance.
  • the density of carbon nanotubes 4 forming the network on the surface 5 of the substrate 1 is between 1, inclusive, and 40, inclusive, carbon nanotubes.
  • the carbon nanotubes 4 are covered with a layer 6 of metal.
  • the metal may be any metal which will occur to those skilled in the art, such as aluminum (Al), chromium (Cr), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), palladium (Pd), rhodium (Rh), platinum (Pt), silver (Ag), Petain (Sn), tungsten (W), gold (Au), titanium (Ti), manganese (Mn), cadmium (Cd), ruthenium (Ru), iridium (Ir), lead (Pb), or any mixture of one or more of these metals, optionally doped or containing impurities.
  • the metal which covers the carbon nanotubes 4 forming the network on the surface of the substrate of the device of the invention is silver or gold.
  • a dopant may also be present in the network of carbon nanotubes 4 deposited on the surface 5 of the substrate 1.
  • this dopant is oxygen or chlorine.
  • a particularly preferred device according to the invention is an electrode which comprises the device of the invention.
  • the substrate is a soda-lime glass substrate.
  • Single-wall carbon nanotubes are produced by the electric arc method.
  • a dispersion of 0.05 g / l of carbon nanotubes in N-methylpyrrolidone (NMP) is then produced.
  • the dispersion is sonicated for 90 minutes and then centrifuged twice at 14,500 rpm.
  • the carbon nanotubes are then deposited on the surface of a substrate by nebulization for 5 seconds of said dispersion.
  • This time, according to the density of carbon nanotubes can be between 5 and 300 seconds.
  • the initial square resistance of the substrate coated on one of its surfaces of the network of carbon nanotubes at a density of 5 NTC / ⁇ 2 is 1.0 ⁇ 10 3 square ohms and a 97% transmittance measured by spectrophotometry. UV-visible.
  • the substrate on which the carbon nanotubes are deposited is then introduced into an electroplating bath containing 1 g of silver cyanide, 45 g / l of potassium cyanide, 30 g / l of potassium carbonate and 10% by weight. of hypochloric acid relative to the total mass of the bath.
  • the carbon nanotube array is connected to the power supply of the electroplating deposit apparatus to serve as a cathode.
  • the anode of the electroplating apparatus is silver and the reference electrode is Ag / AgCl.
  • a current density of 10 mA / cm 2 is used.
  • the thickness of the silver layer deposited in the nanotubes is
  • the device obtained then has a square resistance of 25 ⁇ ⁇ and a transmittance of 95%.
  • a network of single-walled carbon nanotubes is deposited by nebulization on the surface of a PET substrate by nebulization of a dispersion of single-walled nanotubes, as in Example 1.
  • the density of deposited carbon nanotubes is 5 carbon nanotubes / ⁇ 2 .
  • the substrate obtained is treated for 24 hours with nitric acid to oxidize the carbon nanotubes and modify the contact resistance of the network formed by these nanotubes.
  • the initial square resistance of the substrate obtained is 3.0 ⁇ 10 2 ⁇ ⁇ and the transmittance of this substrate is 97%.
  • Example 2 Then proceed as in Example 1 or deposit on the carbon nanotubes of a silver layer.
  • the thickness of the silver layer deposited on the surface of the carbon nanotubes is 3 nm.
  • the electroplating bath used in this example was the same as that used in Example 1.
  • the device obtained in this example has a square resistance of 20 O D and a transmittance of 95%.
  • the density of carbon nanotubes on the surface of the substrate was 10 carbon nanotubes per ⁇ 2 .
  • the initial square resistance of the substrate obtained at this stage was 200 ⁇ ⁇ and its transmittance was 92%.
  • the substrate obtained was then introduced into an electroplating bath and connected to the supply of the electroplating apparatus to serve as a cathode.
  • the anode of the apparatus was gold and the electroplating bath contained 4 g / L of gold cyanide, 40 g / L of citric acid and 40 g / L of potassium citrate.
  • a current density of 5 mA / cm is applied.
  • the thickness of the gold layer deposited on the carbon nanotubes was 1 nm.
  • the device obtained has a square resistance of 150 ⁇ ⁇ and a transmittance of 92%.
  • the devices obtained in Examples 1 to 3 can be used as electrodes, and more particularly as anodes.

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  • Non-Insulated Conductors (AREA)
EP12715189.2A 2011-03-28 2012-03-27 Herstellung von transparenten elektroden aus metallisierten kohlenstoffnanoröhren Withdrawn EP2691960A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1100907A FR2973263B1 (fr) 2011-03-28 2011-03-28 Elaboration d'electrodes transparentes en nanotubes de carbone metallises
PCT/IB2012/051453 WO2012131578A1 (fr) 2011-03-28 2012-03-27 Elaboration d'electrodes transparentes en nanotubes de carbone metallises

Publications (1)

Publication Number Publication Date
EP2691960A1 true EP2691960A1 (de) 2014-02-05

Family

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EP12715189.2A Withdrawn EP2691960A1 (de) 2011-03-28 2012-03-27 Herstellung von transparenten elektroden aus metallisierten kohlenstoffnanoröhren

Country Status (3)

Country Link
EP (1) EP2691960A1 (de)
FR (1) FR2973263B1 (de)
WO (1) WO2012131578A1 (de)

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Publication number Priority date Publication date Assignee Title
CN116230294B (zh) * 2023-02-27 2023-12-01 宁波碳源新材料科技有限公司 一种二次掺杂碳纳米管透明导电薄膜及其制备方法

Family Cites Families (5)

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Publication number Priority date Publication date Assignee Title
WO2007061428A2 (en) * 2004-12-27 2007-05-31 The Regents Of The University Of California Components and devices formed using nanoscale materials and methods of production
US20100038251A1 (en) * 2008-08-14 2010-02-18 Snu R&Db Foundation Carbon nanotube network-based nano-composites
KR101091744B1 (ko) 2009-04-15 2011-12-08 한국과학기술연구원 메탈와이어를 이용한 전도성필름 제조방법 및 전도성필름
WO2010151244A1 (en) * 2009-06-22 2010-12-29 Hewlett-Packard Development Company, L.P. Transparent conductive material
CN101989136B (zh) * 2009-08-07 2012-12-19 清华大学 触摸屏及显示装置

Non-Patent Citations (2)

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Also Published As

Publication number Publication date
WO2012131578A1 (fr) 2012-10-04
FR2973263B1 (fr) 2013-08-02
FR2973263A1 (fr) 2012-10-05

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