EP2563490A1 - Flüssigkeitsverdampfer - Google Patents

Flüssigkeitsverdampfer

Info

Publication number
EP2563490A1
EP2563490A1 EP11717251A EP11717251A EP2563490A1 EP 2563490 A1 EP2563490 A1 EP 2563490A1 EP 11717251 A EP11717251 A EP 11717251A EP 11717251 A EP11717251 A EP 11717251A EP 2563490 A1 EP2563490 A1 EP 2563490A1
Authority
EP
European Patent Office
Prior art keywords
liquid
chamber
opening
channel
evaporator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11717251A
Other languages
German (de)
English (en)
French (fr)
Inventor
Jörg Müller
Winfred Kuipers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer AG
Krohne Messtechnik GmbH and Co KG
Original Assignee
Krohne Messtechnik GmbH and Co KG
Bayer Intellectual Property GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krohne Messtechnik GmbH and Co KG, Bayer Intellectual Property GmbH filed Critical Krohne Messtechnik GmbH and Co KG
Publication of EP2563490A1 publication Critical patent/EP2563490A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01BBOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • H01J49/049Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample with means for applying heat to desorb the sample; Evaporation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/80Apparatus for specific applications
    • H05B6/802Apparatus for specific applications for heating fluids
    • H05B6/804Water heaters, water boilers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40Concentrating samples
    • G01N1/4022Concentrating samples by thermal techniques; Phase changes

Definitions

  • the present invention is a liquid evaporator and a method for the evaporation of liquids.
  • Liquid evaporators are used to transfer liquids into the gas phase and are used in various applications.
  • US7618027B2 discloses a liquid evaporator for producing a high-purity gas having a low vapor pressure, the gas being used in the field of microelectronics.
  • WO05 / 016512A1 discloses a liquid evaporator which can be used in a process for removing a volatile compound from a mixture of substances.
  • Liquid vaporizers also find wide application in analytics, where a sample amount of a liquid to be analyzed is first transferred to the gas phase to make it accessible for analysis.
  • US7309859B2 discloses a liquid evaporator which can be used in an ion source for mass spectrometers.
  • liquid evaporators are preferably designed as stationary heated systems, which liquid samples are supplied continuously in small quantities.
  • a high heat capacity of the evaporator is generally required, combined with a high thermal mass. This results in a high energy demand and - due to the generally spatially extended construction of the evaporator - a correspondingly high power requirement and, consequently, possibly also long dead times between sampling and evaporation.
  • sample volumes mean less time for evaporation and thus higher temporal resolution, which can detect changes in sample composition.
  • liquid evaporator must be adapted to the small amount of sample in order to fully exploit the benefits of a smaller amount of sample.
  • the sample volume to be evaporated is preferably less than 100 ⁇ , particularly preferably less than 10 ⁇ l, very particularly preferably less than 1 ⁇ .
  • the amount of sample evaporated shall be representative of the liquid from which it is withdrawn.
  • the liquid evaporator should be inexpensive to manufacture and in operation, have a low energy requirement for evaporation and ensure rapid evaporation.
  • the liquid evaporator should either have self-cleaning capabilities, so that liquids can be vaporized with solutes, which may leave a precipitate, or be designed as disposable items.
  • this object is achieved by a method for evaporating at least part of a liquid according to claim 1 and by a liquid evaporator according to claim 7, which is designed to carry out the method.
  • Preferred embodiments can be found in the dependent claims.
  • a first subject of the present invention is therefore a method for vaporizing at least a portion of a liquid, characterized in that a liquid is passed through an opening at an opening, the opening leading to a vapor chamber at a temperature above the vaporization temperature of the liquid is held, and the liquid is heated in the region of the opening by electromagnetic radiation, so that at least a portion of the liquid evaporates and the steam enters the heated steam chamber.
  • a second object of the present invention is a liquid evaporator at least comprising a body into which a channel and a chamber are connected, which are connected to each other through an opening, wherein the channel is designed so that a liquid can be passed by the opening and an adjacent to the opening, optionally the opening miter stiider evaporation area with electromagnetic radiation can be irradiated,
  • the inventive method and the evaporator according to the invention use the energy of electromagnetic radiation to evaporate a sample amount of a liquid by local heating.
  • a liquid is passed through a channel which leads past an opening to a chamber.
  • the area of the opening is accessible to electromagnetic radiation, i. it can be irradiated with electromagnetic radiation.
  • the evaporation zone - the liquid is heated locally by means of electromagnetic radiation so strongly that a sample amount evaporates.
  • the vaporized sample passes through the opening in a chamber - hereinafter also referred to steam chamber, which can be heated to a temperature above the evaporation temperature of the liquid, so that the vapor does not condense in the chamber.
  • the electromagnetic radiation is preferably supplied to the evaporation point from outside the liquid evaporator. Therefore, the evaporation point is preferably provided with a cover which is at least partially transparent to the electromagnetic radiation used.
  • An at least partially transparent cover is to be understood as meaning a cover which preferably allows a large part of the electromagnetic radiation to pass through and absorbs and / or reflects only a small part, so that a large part of the radiated energy reaches the evaporation point and here for heating a sample quantity Available. A high transparency and thus low absorption of the cover also causes the cover does not heat itself.
  • the evaporation region is designed so that it absorbs a high proportion of the electromagnetic radiation and converts it into heat.
  • the channel inner walls can be made of a material that absorbs a large part of the radiated energy and converts it into heat.
  • the evaporation zone which is prepared for indirect heating of the liquid, is also referred to below as the absorber.
  • the radiation source used is tuned to the liquid to be evaporated to allow direct heating of the liquid.
  • the direct heating has the advantage that the environment of the liquid is heated only slightly, thus minimizing negative effects of a heated environment on the analysis (lower temporal resolution, contamination, damage, etc.).
  • a laser beam is preferably used. Particular preference is given to using a pulsed, focused laser beam.
  • the laser pulse length is preferably chosen such that the thermal time constants of absorber and / or liquid to be evaporated are large compared to this pulse length. This means that even a single pulse is sufficient to evaporate a sample amount.
  • the amount of vaporized liquid can be varied by varying the length of the laser pulse and its power.
  • a pulse sequence can also be used. Since the timing of the evaporation can be set very precisely, the synchronization of the steam generation with a sampling in an analyzer and thereby a correlation measurement with increased sensitivity are possible.
  • this method allows targeted to evaporate and analyze segments from a sample flow, in particular also time-varying sample compositions but also e.g. defined by the liquid carried unmixed or undissolved components (emulsions, cells) defined or selectively.
  • the laser beam is preferably supplied to the evaporation region by means of a cover which is at least partially transparent to the laser beam via a free jet or a fiber optic.
  • the transition from the channel to the steam chamber is designed so that the liquid can not flow unhindered into the chamber due to the capillary forces prevailing in the opening.
  • the suppression of liquid leakage is preferably ensured by a sufficiently large difference between the cross section of the chamber dimension at the location of the opening and the length of the interface to the channel and its cross section.
  • the inner walls of the channel and chamber can be provided, at least in the opening region, with layers of different surface energies. If the liquid to be evaporated is, for example, an aqueous solution, the opening region of the channel can be made hydrophilic and that of the chamber hydrophobic.
  • the channel preferably has a curvature in the region of the evaporation.
  • the curvature causes different flow velocities in the area of the inner and the outer curve. It will be Dean vortex generates, which lead to a flow perpendicular to the flow direction and liquid elements from the channel center to the channel edge in the opening area.
  • the steam chamber has a gas outlet, through which the steam can leave the liquid evaporator according to the invention.
  • the chamber can be provided with further connections, which allow, in particular, an evacuation and possibly also rinsing of the chamber between the sampling intervals, in order to avoid carrying over samples from one evaporation process to the next.
  • this can also be done specifically after several evaporations in order to increase the available gas quantity and / or the pressure for the injection or to enable an averaging over several sample volumes directly before the analysis.
  • the steam chamber can be heated via a heating element, which is preferably operated electrically.
  • the structures are preferably arranged to prevent the passage of particles through the gas outlet (see Fig. 2), that is, they preferably shield the opening and the gas outlet from each other.
  • the energy input to the evaporation is preferably optically, so contactless and the B eMapung the chamber does not have to be directly integrated into this, the evaporation system is easy to prepare and can in principle be easily replaced when dirty.
  • the liquid evaporator according to the invention is designed as a disposable article.
  • the body of the liquid evaporator according to the invention are introduced into the channel and chamber, may be made in one piece or in several pieces. Preferably, it is made in one piece.
  • the liquid evaporator is a microsystem, the structures of which are realized by microfabrication techniques.
  • the technologies of microsystems technology based on the structuring of silicon and / or glass substrates with high aspect ratio (eg narrow trenches ( ⁇ ⁇ ) with great depth ( ⁇ 100 ⁇ )) with structural accuracies in the micrometer range with wet-chemical, preferably plasma etching combined with in the coefficient of thermal expansion adapted sodium-containing glass substrates (for example, Pyrex ®), which are provided with simple etched structures, and preferably directly with the so-called anodic bonding, alternatively acting as a solder alloy (AuSi) Au thin film are joined hermetically together.
  • wet-chemical, preferably plasma etching combined with in the coefficient of thermal expansion adapted sodium-containing glass substrates (for example, Pyrex ®), which are provided with simple etched structures, and preferably directly with the so-called anodic bonding, alternatively acting as a solder alloy (AuSi) Au thin film
  • Metallic structures with a high aspect ratio can be realized by galvanic growth in thick photoresists (> ⁇ ⁇ ) with comparable accuracy (UV-LIGA).
  • thin-film technologies such as high vacuum evaporation and sputtering, PVD processes or chemical vapor deposition (CVD processes) preferably in plasma in combination with photolithography and etching techniques can be on these substrates functional layers such as metallization, hydrophobic or hydrophilic surfaces and integrate functional elements such as valve seals and diaphragms, heating elements, temperature, pressure and flow sensors in a fully process-compatible technology.
  • the structures of the liquid evaporator according to the invention are preferably produced in a silicon-glass technology, silicon being used for the body and glass for the transparent cover.
  • This combination preferably hermetically connected by Anodic B onden, allows a highly accurate structuring of the different components of the system, especially in silicon (photoetching, DRIE, coating).
  • Silicon like glass, is chemically and thermally stable, and in contrast to glass, a good heat conductor with low heat capacity (heated chamber with uniform temperature) and a good optical absorber for common laser wavelengths. The heat losses by dissipation through the glass substrate are low.
  • the combination of silicon and glass allows a local entry of the optical energy into the channel edge as well as a thermal decoupling of the channel and the steam chamber.
  • the steam chamber and the liquid sample channel are preferably separated by horizontal and vertical cuts in the good heat-conducting body.
  • the mechanical stability with low heat transfer is achieved by a transparent cover e.g. made of glass or a polymer.
  • liquid evaporator according to the invention of polymer materials, e.g. To realize by injection molding techniques.
  • a composite material is preferably used, e.g. a polymer in which carbon (carbon black, carbon nanotubes) is dispersed to increase the absorption of electromagnetic radiation and the thermal conductivity.
  • a system implemented in this way is also particularly suitable for the analysis or generation of small sample volumes (nL liquid, in the gas phase).
  • the sample volume to be evaporated is preferably less than 100 ⁇ , more preferably less than 10 ⁇ L, most preferably less than 1 ⁇ ⁇ .
  • the liquid evaporator according to the invention is preferably suitable as a sample evaporator in a microanalysis system.
  • the present invention accordingly also relates to the use of the liquid evaporator according to the invention in a microanalysis system, for example in a micro gas chromatograph or a micromass spectrometer, as is for example, in the article "Complex MEMS: A fully integrated TOF micro mass spectrometer” published in Sensors and Actuators A: Physical, 138 (1) (2007), pages 22-27.
  • Fig. 1 shows a perspective view of a liquid evaporator according to the invention from above.
  • the liquid evaporator comprises a body 6, in which a channel 5 and a chamber 9 are introduced. Channel 5 and chamber 9 are connected to each other via an opening 4.
  • the channel 5 has a curvature 10 in the region of the opening 4. A liquid is passed through the channel 5 at the opening 4.
  • the transition from the opening 4 to the chamber 9 is designed so that the liquid can not flow into the directly adjacent region 9 due to the capillary forces prevailing in the opening.
  • the liquid In the area of the opening, the liquid is irradiated by means of electromagnetic radiation and thus heated. The irradiation takes place in the present case from the direction of the observer (from above). By the irradiation, the liquid is heated and it evaporates a part which passes as a jet of steam through the opening 4 in the chamber 9. Below the chamber 9 is a heating element with which the chamber can be heated (not shown in Fig. 1, see Fig. 3).
  • FIG. 2 shows the liquid evaporator of Fig. 1, in the chamber 9 lamellar structures 12 are introduced.
  • the lamellar structures are preferably heated by heat conduction through the heating element below the chamber 9 (not shown in FIG. 2, see FIG. 3).
  • FIG. 3 shows the liquid evaporator according to the invention from FIG. 1 in cross section along a straight line from A to B.
  • a transparent cover 2 can be seen in FIG. 3, which extends over the entire body 6 extends.
  • a heating element 8 is mounted below the steam chamber. The irradiation of the liquid takes place through the transparent cover, preferably by means of a focused laser beam 1.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Sampling And Sample Adjustment (AREA)
EP11717251A 2010-04-29 2011-04-26 Flüssigkeitsverdampfer Withdrawn EP2563490A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010018830A DE102010018830A1 (de) 2010-04-29 2010-04-29 Flüssigkeitsverdampfer
PCT/EP2011/056593 WO2011134968A1 (de) 2010-04-29 2011-04-26 Flüssigkeitsverdampfer

Publications (1)

Publication Number Publication Date
EP2563490A1 true EP2563490A1 (de) 2013-03-06

Family

ID=44359508

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11717251A Withdrawn EP2563490A1 (de) 2010-04-29 2011-04-26 Flüssigkeitsverdampfer

Country Status (7)

Country Link
US (1) US20130077943A1 (enrdf_load_stackoverflow)
EP (1) EP2563490A1 (enrdf_load_stackoverflow)
JP (1) JP2013527443A (enrdf_load_stackoverflow)
CN (1) CN103108682A (enrdf_load_stackoverflow)
CA (1) CA2797608A1 (enrdf_load_stackoverflow)
DE (1) DE102010018830A1 (enrdf_load_stackoverflow)
WO (1) WO2011134968A1 (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6103764B2 (ja) * 2013-05-14 2017-03-29 国立大学法人福井大学 試料溶液の質量分析方法及びその装置
CN103529149A (zh) * 2013-10-28 2014-01-22 徐继承 一种防堵塞的低压液化气体检验用进样蒸发器
CN103543228A (zh) * 2013-10-28 2014-01-29 徐继承 一种含有大气平衡装置的低压液化气体检验用进样蒸发器
CN104392883A (zh) * 2014-10-22 2015-03-04 常州博锐恒电子科技有限公司 一种注入机固体进料方法
CN116647901A (zh) 2017-12-22 2023-08-25 华为技术有限公司 无线唤醒包发送与接收方法与装置
CN109289948B (zh) * 2018-10-08 2020-02-18 重庆大学 一种光热定向操控液滴迁移聚合装置及其使用方法
CN109444248B (zh) * 2018-11-20 2020-10-30 中国地质大学(武汉) 一种基于激光的溶液剥蚀进样分析方法
NL2023927B1 (en) 2019-10-01 2021-06-01 Berkin Bv In-flow evaporator
CN115155077B (zh) * 2022-07-04 2023-08-18 枣庄学院 多组分液体微量蒸发装置
US11938414B1 (en) * 2022-10-04 2024-03-26 Honeywell Federal Manufacturing & Technologies, Llc Microfluidic film evaporation with femtosecond laser-patterned surface

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US20040099310A1 (en) * 2001-01-05 2004-05-27 Per Andersson Microfluidic device

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FR2753533B1 (fr) * 1996-09-17 1998-10-09 Commissariat Energie Atomique Procede et dispositif de caracterisation d'une modification au cours du temps de l'etat de condensation de gouttelettes sur une cible
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JP3925000B2 (ja) * 1999-09-06 2007-06-06 株式会社日立製作所 噴霧器及びそれを用いた分析装置
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JP2003035699A (ja) * 2001-07-19 2003-02-07 Kitakyushu Foundation For The Advancement Of Industry Science & Technology 超音速分子ジェット分光分析方法及び装置
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Also Published As

Publication number Publication date
US20130077943A1 (en) 2013-03-28
JP2013527443A (ja) 2013-06-27
CA2797608A1 (en) 2011-11-03
WO2011134968A1 (de) 2011-11-03
DE102010018830A1 (de) 2011-11-03
CN103108682A (zh) 2013-05-15

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