CA2797608A1 - Liquid evaporator - Google Patents
Liquid evaporator Download PDFInfo
- Publication number
- CA2797608A1 CA2797608A1 CA2797608A CA2797608A CA2797608A1 CA 2797608 A1 CA2797608 A1 CA 2797608A1 CA 2797608 A CA2797608 A CA 2797608A CA 2797608 A CA2797608 A CA 2797608A CA 2797608 A1 CA2797608 A1 CA 2797608A1
- Authority
- CA
- Canada
- Prior art keywords
- liquid
- chamber
- opening
- channel
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 97
- 238000001704 evaporation Methods 0.000 claims abstract description 44
- 230000008020 evaporation Effects 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 13
- 238000005516 engineering process Methods 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 238000004452 microanalysis Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims description 2
- 238000004458 analytical method Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005070 sampling Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000012935 Averaging Methods 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000012864 cross contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
- B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
- B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
- H01J49/049—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample with means for applying heat to desorb the sample; Evaporation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/80—Apparatus for specific applications
- H05B6/802—Apparatus for specific applications for heating fluids
- H05B6/804—Water heaters, water boilers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4022—Concentrating samples by thermal techniques; Phase changes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electromagnetism (AREA)
- Thermal Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010018830A DE102010018830A1 (de) | 2010-04-29 | 2010-04-29 | Flüssigkeitsverdampfer |
| DE102010018830.1 | 2010-04-29 | ||
| PCT/EP2011/056593 WO2011134968A1 (de) | 2010-04-29 | 2011-04-26 | Flüssigkeitsverdampfer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2797608A1 true CA2797608A1 (en) | 2011-11-03 |
Family
ID=44359508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2797608A Pending CA2797608A1 (en) | 2010-04-29 | 2011-04-26 | Liquid evaporator |
Country Status (7)
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6103764B2 (ja) * | 2013-05-14 | 2017-03-29 | 国立大学法人福井大学 | 試料溶液の質量分析方法及びその装置 |
| CN103529149A (zh) * | 2013-10-28 | 2014-01-22 | 徐继承 | 一种防堵塞的低压液化气体检验用进样蒸发器 |
| CN103543228A (zh) * | 2013-10-28 | 2014-01-29 | 徐继承 | 一种含有大气平衡装置的低压液化气体检验用进样蒸发器 |
| CN104392883A (zh) * | 2014-10-22 | 2015-03-04 | 常州博锐恒电子科技有限公司 | 一种注入机固体进料方法 |
| CN116647901A (zh) | 2017-12-22 | 2023-08-25 | 华为技术有限公司 | 无线唤醒包发送与接收方法与装置 |
| CN109289948B (zh) * | 2018-10-08 | 2020-02-18 | 重庆大学 | 一种光热定向操控液滴迁移聚合装置及其使用方法 |
| CN109444248B (zh) * | 2018-11-20 | 2020-10-30 | 中国地质大学（武汉） | 一种基于激光的溶液剥蚀进样分析方法 |
| NL2023927B1 (en) | 2019-10-01 | 2021-06-01 | Berkin Bv | In-flow evaporator |
| CN115155077B (zh) * | 2022-07-04 | 2023-08-18 | 枣庄学院 | 多组分液体微量蒸发装置 |
| US11938414B1 (en) * | 2022-10-04 | 2024-03-26 | Honeywell Federal Manufacturing & Technologies, Llc | Microfluidic film evaporation with femtosecond laser-patterned surface |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6653626B2 (en) | 1994-07-11 | 2003-11-25 | Agilent Technologies, Inc. | Ion sampling for APPI mass spectrometry |
| FR2753533B1 (fr) * | 1996-09-17 | 1998-10-09 | Commissariat Energie Atomique | Procede et dispositif de caracterisation d'une modification au cours du temps de l'etat de condensation de gouttelettes sur une cible |
| US5917185A (en) * | 1997-06-26 | 1999-06-29 | Iowa State University Research Foundation, Inc. | Laser vaporization/ionization interface for coupling microscale separation techniques with mass spectrometry |
| JP3925000B2 (ja) * | 1999-09-06 | 2007-06-06 | 株式会社日立製作所 | 噴霧器及びそれを用いた分析装置 |
| DE10049856A1 (de) * | 2000-10-09 | 2002-03-07 | Siemens Ag | Vorrichtung zum kontinuierlichen Verdampfen kleiner Mengen einer Flüssigkeit |
| US20040099310A1 (en) * | 2001-01-05 | 2004-05-27 | Per Andersson | Microfluidic device |
| JP2003035699A (ja) * | 2001-07-19 | 2003-02-07 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | 超音速分子ジェット分光分析方法及び装置 |
| DE10242797A1 (de) * | 2002-09-14 | 2004-03-25 | Degussa Ag | Verfahren und Vorrichtung zur Phasenumwandlung von Stoffen |
| UA79331C2 (en) * | 2002-11-08 | 2007-06-11 | Oleksandr V Vladimirov | Method for manufacturing gas-discharge electron lamps (variants) |
| DE10335451A1 (de) | 2003-08-02 | 2005-03-10 | Bayer Materialscience Ag | Verfahren zur Entfernung von flüchtigen Verbindungen aus Stoffgemischen mittels Mikroverdampfer |
| WO2007109214A2 (en) | 2006-03-20 | 2007-09-27 | Rasirc | Vaporizer for delivery of low vapor pressure gasses |
| EP1959476A1 (de) | 2007-02-19 | 2008-08-20 | Technische Universität Hamburg-Harburg | Massenspektrometer |
| ITRM20070105A1 (it) * | 2007-02-26 | 2008-08-27 | Univ Roma | Impianto di distillazione di acqua per uso iniettabile |
| JP2009069088A (ja) * | 2007-09-18 | 2009-04-02 | Fujitaro Imasaka | レーザー蒸発法に基づくパルス試料導入方法 |
| WO2012040493A2 (en) * | 2010-09-22 | 2012-03-29 | California Institute Of Technology | A lateral flow microfluidic assaying device and related method |
-
2010
- 2010-04-29 DE DE102010018830A patent/DE102010018830A1/de not_active Withdrawn
-
2011
- 2011-04-26 JP JP2013506637A patent/JP2013527443A/ja active Pending
- 2011-04-26 CA CA2797608A patent/CA2797608A1/en active Pending
- 2011-04-26 WO PCT/EP2011/056593 patent/WO2011134968A1/de active Application Filing
- 2011-04-26 US US13/643,514 patent/US20130077943A1/en not_active Abandoned
- 2011-04-26 CN CN2011800324679A patent/CN103108682A/zh active Pending
- 2011-04-26 EP EP11717251A patent/EP2563490A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011134968A1 (de) | 2011-11-03 |
| JP2013527443A (ja) | 2013-06-27 |
| US20130077943A1 (en) | 2013-03-28 |
| DE102010018830A1 (de) | 2011-11-03 |
| CN103108682A (zh) | 2013-05-15 |
| EP2563490A1 (de) | 2013-03-06 |
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