EP2507402A1 - Source de déposition linéaire - Google Patents

Source de déposition linéaire

Info

Publication number
EP2507402A1
EP2507402A1 EP10833707A EP10833707A EP2507402A1 EP 2507402 A1 EP2507402 A1 EP 2507402A1 EP 10833707 A EP10833707 A EP 10833707A EP 10833707 A EP10833707 A EP 10833707A EP 2507402 A1 EP2507402 A1 EP 2507402A1
Authority
EP
European Patent Office
Prior art keywords
deposition source
deposition
nozzles
crucible
heat resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10833707A
Other languages
German (de)
English (en)
Other versions
EP2507402A4 (fr
Inventor
Chad Conroy
Scott Wayne Priddy
Jacob A. Dahlstrom
Rich Bresnahan
David William Gotthold
John Patrin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/628,189 external-priority patent/US20100159132A1/en
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Priority claimed from PCT/US2010/039085 external-priority patent/WO2011065998A1/fr
Publication of EP2507402A1 publication Critical patent/EP2507402A1/fr
Publication of EP2507402A4 publication Critical patent/EP2507402A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00—Thermal insulation in general
    • F16L59/02—Shape or form of insulating materials, with or without coverings integral with the insulating materials
    • F16L59/029—Shape or form of insulating materials, with or without coverings integral with the insulating materials layered

Definitions

  • Linear deposition sources that are suitable for evaporating materials on a web substrate or on a rigid panel substrate include a boat-shaped crucible, which is typically formed of a refractory material for containing deposition source materials.
  • the crucible is placed in the interior of a vapor outlet tube.
  • the vapor outlet tube functions simultaneously as a vaporizing space and as a space to distribute the vapors.
  • One or more vapor outlet openings are arranged linearly along the source.
  • FIG. 1 A illustrates a perspective cross-sectional view of a linear deposition source according to the present teaching that includes a plurality of crucibles coupled to a plurality of conductance channels and then to a plurality of nozzles in a linear configuration.
  • FIG. IB illustrates a perspective cross-sectional view of a linear deposition source according to the present teaching that includes a plurality of crucibles coupled to a single conductance channel and then to the plurality of nozzles in a linear configuration.
  • FIG. 2A illustrates a cross-sectional view of the linear deposition sources described in connection with FIGS. 1 A and IB with the plurality of nozzles positioned so that they evaporate deposition material in an upward direction.
  • FIG. 2B illustrates a cross-sectional view of a linear deposition source according to the present teaching with the plurality of nozzles positioned so that they evaporate deposition material in a downward direction.
  • FIG. 2C illustrates a cross-sectional view of a linear deposition source according to the present teaching with the body including the plurality of nozzles positioned in a vertical direction.
  • FIG. 2D illustrates a cross-sectional view of another linear deposition source according to the present teaching with the body including the plurality of nozzles positioned in a vertical direction.
  • FIG. 3 A illustrates a perspective cross-sectional view of a linear deposition source according to the present teaching that includes a single crucible coupled to a plurality of conductance channels and then to a plurality of nozzles in a linear configuration.
  • FIG. 3B illustrates a perspective cross-sectional view of a linear deposition source according to the present teaching that includes a single crucible coupled to a single conductance channels and then to a plurality of nozzles in a linear configuration.
  • FIG. 4 illustrates a perspective cross-sectional view of a crucible for the linear deposition source of the present teaching that is formed of two types of materials.
  • FIG. 5A illustrates a perspective top view of a portion of the linear deposition source according to the present teaching that shows the three conductance channels coupled to three crucibles in the housing.
  • FIG. 5B illustrates a perspective top view of a portion of the linear deposition source according to the present teaching that shows a single conductance channel coupled to three crucibles in the housing.
  • FIG. 6 A is a perspective view of a portion of a resistive crucible heater for the linear deposition source of the present teaching that shows the inside and three sides of the heater where the crucible is positioned.
  • FIG. 6B is a perspective view of an outside of one of the plurality of crucible heaters for heating each of the plurality of crucibles.
  • FIG. 7 A is a side view of a linear deposition source according to the present teaching that shows conductance channel heaters for heating the plurality of conductance channels.
  • FIG. 7B is a perspective view of the rods comprising the conductance channel heaters.
  • FIG. 7C illustrates a perspective view of the body of a linear deposition source according to the present teaching that shows a coupling which joins the end of the rods to the body.
  • FIG. 8 illustrates the frame of the body that includes an expansion link.
  • FIG. 9 A is a perspective cross-sectional view of a heat shield for the plurality of crucibles and for the plurality of conductance channels of a linear deposition source according to the present teaching.
  • FIG. 9B is a full perspective view of the heat shield shown in FIG. 9A.
  • FIG. 9C illustrates a corner cross section of one embodiment of a heat shield according to the present invention.
  • FIG. 10 illustrates a top perspective view of a deposition source according to the present teaching that shows the plurality of nozzles in the body for emitting evaporated materials onto substrates or other workpieces.
  • FIG. 11 A illustrates a cross-sectional view of the body of the deposition source according to the present teaching that shows a column of nozzles coupled to a conductance channel with tubes that control the flow of deposition material to the nozzles.
  • FIG. 1 IB illustrates a cross-sectional view of the plurality of conductance channels of the deposition source according to the present teaching that shows a row of nozzles coupled to the plurality of conductance channels with tubes that control the flow of deposition material to the nozzles.
  • FIG. 12 illustrates a perspective view of a nozzle comprising one of the plurality of nozzles for a linear deposition source according to the present teaching.
  • the present teaching relates generally to apparatus and methods for producing a flux of source material vapor for deposition on a substrate. Some aspects of the present teaching relate to linear deposition sources that are suitable for producing a flux of source material vapor for depositing material on a web substrate, a rigid panel substrate, or another type of an elongated workpiece. Other aspects of the present teaching relate to linear deposition sources that are suitable for producing a flux of source material vapor for depositing material on a substrate holder that supports a plurality of conventional substrates, such as semiconductor substrates.
  • the methods and apparatus relate to deposition by evaporation.
  • evaporation means to convert the source material to a vapor and includes the normal use of several terms in the art, such as evaporation, vaporization, and sublimation.
  • the source material being converted to a vapor can be in any state of matter.
  • the apparatus and method of the present teaching are used to co-evaporate two or more different materials onto a substrate, such as a web substrate or a rigid panel substrate.
  • the apparatus and method of the present teaching are used to evaporate a single material onto a substrate, such as a web substrate or a rigid panel substrate. Using a single deposition material in multiple or partitioned crucibles will add redundancy and will increase the flux rate.
  • One application of the present teaching relates to methods and apparatus for co-deposition of copper, indium, and gallium onto a web substrate or a rigid panel substrate.
  • Compounds of copper indium diselenide (CIS compounds) that have gallium substituted for all or part of the indium are known as copper indium gallium diselenide compounds (CIGS compounds).
  • CIS compounds copper indium diselenide
  • CIGS compounds are commonly used to fabricate photovoltaic cells.
  • CIGS compounds are commonly used as absorber layers in thin-film solar cells. These CIGS compounds have a direct band gap which permits strong absorption of solar radiation in the visible region of the electromagnetic spectrum.
  • CIGS photovoltaic cells have been demonstrated to have high conversion efficiencies and good stability as compared to commonly used photovoltaic cells with other types of absorber layer compounds, such as cadmium telluride (CdTe) and amorphous silicon (a- Si).
  • CdTe cadmium telluride
  • a- Si amorphous silicon
  • CIGS absorbing layers are typically p-type compound semiconductor layers with good crystallinity. Good crystallinity is generally required to achieve desired charge transport properties necessary for high efficiency photovoltaic operation. In practice, the CIGS absorbing layer must be at least partially crystallized in order to achieve high efficiency photovoltaic operation. Crystallized CIGS compounds have a crystallographic structure which can be characterized as either chalcopyrite or sphalerite depending on the deposition temperature used to form the CIGS compound.
  • CIGS compounds can be formed by various techniques.
  • One method for forming CIGS compounds uses chemical precursors. The chemical precursors are deposited in thin films and are then subsequently annealed to form the desired CIGS layer. When CIGS precursor materials are deposited at a low temperature, the resulting CIGS thin films are amorphous or only weakly crystallized. The CIGS thin films are then annealed at elevated temperatures to improve the crystallization of the CIGS compound in order to provide the desired charge transport properties.
  • Another method for forming CIGS compounds uses vacuum evaporation.
  • CIGS photovoltaic cells fabricated by co-evaporation can have high photovoltaic conversion efficiencies compared to CIGS photovoltaic cells fabricated with precursor materials.
  • copper, indium, gallium, and selenium are co-evaporated onto a substrate.
  • Co-evaporation allows for precise control of the thin film stoichiometry and allows for compositional grading in the thin film light-absorbing layer. Therefore, co- evaporation can be used to precisely tailor the bandgap in order to achieve optimum photovoltaic performance.
  • co-evaporation of copper, indium, gallium, and selenium is a process technique that can be difficult to use on an industrial scale because it is difficult to evaporate materials uniformly over large surface areas.
  • One aspect of the present teaching is to provide deposition sources, systems, and methods of operating such sources and systems to efficiently and controllably provide multiple vaporized source materials for fabrication of numerous types of devices, such as CIGS photovoltaic cells.
  • Another aspect of the present teaching is to provide deposition sources, systems, and methods of operating such sources and systems to efficiently and controllably provide a single vaporized source material for fabrication of numerous types of devices, such as organic light-emitting diode (OLED) devices.
  • OLED organic light-emitting diode
  • FIG. 1 A illustrates a perspective cross-sectional view of a linear deposition source 100 according to the present teaching that includes a plurality of crucibles 102 coupled to a plurality of conductance channels 104 and then to a plurality of nozzles 106 in a linear configuration.
  • Each of the plurality of crucibles 102 contains an evaporation source material, which may be the same or a different source material.
  • An input of each of the plurality of conductance channels 104 is coupled to an output of a respective one of the plurality of crucibles 102.
  • the plurality of conductance channels 104 is designed so that there is no intermixing of evaporated materials while the evaporated materials are being transported in the plurality of conductance channels 104.
  • a housing 108 contains the plurality of crucibles 102.
  • the housing 108 is formed of stainless steel or a similar material.
  • fluid cooling channels are positioned along the housing 108.
  • the housing 108 also includes a sealing flange 110 that attaches the housing 108 to a vacuum chamber (not shown).
  • One feature of the linear deposition source 100 is that the crucibles are outside of the vacuum chamber and, therefore, they are easily refilled and serviced, thereby increasing availability.
  • a body 112 including the plurality of conductance channels 104 and the plurality of nozzles 106 extends past the sealing flange 110 of the housing 108.
  • fluid cooling channels are positioned along the body 112.
  • the source 100 includes three crucibles 102 in a linear configuration with inputs of respective ones of the three conductance channels 104 being coupled to outputs of respective ones of the three crucibles 102.
  • the nozzles 106 are positioned at a plurality of locations along each of the plurality of conductance channels 104.
  • FIG. 1A is a cross-sectional view, only the middle conductance channel 104, and one half the nozzles 106 are shown in FIG. 1 A.
  • the plurality of crucibles can include at least one crucible formed inside another crucible as described in connection with FIG. 4.
  • the plurality of crucibles 102 contains evaporation material suitable for the particular fabrication process.
  • each of the plurality of crucibles 102 contains a different evaporation material.
  • each of the three crucibles can contain one of copper, indium, and gallium so as to provide a material source for efficiently co-evaporating a functional absorbing layer of a CIGS based photovoltaic device.
  • at least two of the plurality of crucibles contains the same deposition material.
  • each of the three crucibles can contain a single material system for depositing contacts for OLED devices.
  • One or more crucible heaters 114 are positioned in thermal communication with the plurality of crucibles 102.
  • the crucible heaters 114 are designed and positioned to increase the temperature of the plurality of crucibles 102 so that each of the plurality of crucibles 102 evaporates its respective deposition source material into a respective one of the plurality of conductance channels 104.
  • Some crucible heaters 114 are required to heat the evaporation source material to very high temperatures.
  • Such crucible heaters can be formed of graphite, silicon carbide, refractory materials, or other very high melting point materials.
  • the crucible heaters 114 can be one single heater or can be a plurality of heaters.
  • each of a plurality of crucible heaters is individually controllable so that a respective one of the plurality of crucible heaters is in thermal communication with a respective one of each of the plurality of crucibles 102.
  • the crucible heaters 114 can be any type of heater.
  • the crucible heaters 114 can be resistive heaters as shown in FIG. 1A.
  • One embodiment of a resistive heater is described in more detail in connection with FIGS. 6 A and 6B.
  • the crucible heaters 114 can also be one of numerous types of RF induction heaters and/or infrared heaters. In many embodiments, all the crucible heaters 114 are the same type of heater. However, in some embodiments, two or more of the crucible heaters 114 are different types of heaters that have different thermal properties for evaporating different deposition source materials.
  • the crucible heaters 114 or separate conductance channel heaters are positioned in thermal communication with at least one of the plurality of conductance channels 104 so that the temperature of each of the plurality of conductance channels 104 is raised above the condensation point of deposition source materials passing through the particular conductance channel.
  • Conductance channel heaters are described in connection with FIGS. 7 A, 7B and 7C.
  • numerous types of heaters can be used to heat the plurality of conductance channels 104, such as resistive heaters, RF induction heaters, and/or infrared heaters.
  • the conductance channel heater can be a single heater or can be a plurality of heaters. More than one type of heater can be used.
  • the conductance channel heater has the capability of controlling a temperature of one of the plurality of conductance channels 104 relative to another one of the plurality of conductance channels 104.
  • FIG. IB illustrates a perspective cross-sectional view of a linear deposition source 101 according to the present teaching that includes a plurality of crucibles 102 coupled to a single conductance channel 104' and then to the plurality of nozzles 106 in a linear configuration.
  • the linear deposition source 101 is similar to the linear deposition source 100 described in connection with FIG. 1 A except that the body 112 includes only one conductance channel 104'.
  • Each of the plurality of crucibles 102 contains an evaporation source material, which may be the same or a different source material.
  • An input of the conductance channel 104' is coupled to an output of the plurality of crucibles 102.
  • the plurality of nozzles 106 extends past the sealing flange 110 of the housing 108.
  • the source 100 includes three crucibles 102 in a linear configuration with the input of the conductance channel 104' being coupled to the outputs of the three crucibles 102.
  • the nozzles 106 are positioned at a plurality of locations along the conductance channel 104'.
  • Crucible heaters 114 are used to increase the temperature of the three crucibles 102 so the crucibles evaporate the deposition material into the conductance channel 104'.
  • the crucible heaters 114 or a separate conductance channel heater is positioned in thermal communication with the conductance channel 104' so that the temperature of the conductance channel 104' is raised above the condensation point of deposition source materials passing through the conductance channel 104'.
  • the conductance channel heater is described in connection with FIGS. 7 A, 7B and 7C.
  • numerous types of heaters can used to heat the conductance channel 104', such as resistive heaters, RF induction heaters, and/or infrared heaters.
  • each of the plurality of nozzles 106 is coupled to an output of the conductance channel 104' so that evaporated deposition material is transported from the plurality of crucibles 102 through the conductance channel 104' to the plurality of nozzles 106 where the evaporated deposition material is ejected from the plurality of nozzles 106 to form a deposition flux.
  • FIG. 2A illustrates a cross-sectional view of the linear deposition sources
  • the linear deposition source of the present teaching is that the plurality of nozzles 106 can be positioned in any orientation relative to the plurality of crucibles 102.
  • the heater for the plurality of conductance channels 104 or for the single conductance channel 104' is designed to prevent the evaporated source material from condensing independent of the orientation of the plurality of nozzles 106.
  • FIG. 2B illustrates a cross-sectional view of a linear deposition source 150 according to the present teaching with the plurality of nozzles 106 positioned so that they evaporate deposition material in a downward direction.
  • the linear deposition source 150 of FIG. 2B is similar to the linear deposition sources 100 and lOldescribed in connection with FIG. 2A. However, the plurality of nozzles 106 is positioned with their outlet apertures facing downward in the direction of the plurality of crucibles 102.
  • FIG. 2C illustrates a cross-sectional view of a linear deposition source 152 according to the present teaching with the body 112' including the plurality of nozzles 106 positioned in a vertical direction.
  • the linear deposition source 1 2 is similar to the linear deposition sources 100 and 101 described in connection with FIG. 2A except that the linear deposition source 152 includes an angled coupling 154 that changes the orientation of the body 112' relative to the normal direction from the sealing flange 110.
  • the angled coupling 154 can position the body 112' at any angle relative to the normal direction of the sealing flange 110.
  • one feature of the linear deposition source of the present teaching is that the body 112' including the plurality of nozzles 106 can be positioned in any orientation relative to the housing 108 comprising the plurality of crucibles 102.
  • the heater for the plurality of conductance channels 104 (FIG. 1) is designed to prevent the evaporated source material from condensing independent of the orientation of the body 112'.
  • FIG. 2D illustrates a cross-sectional view of another linear deposition source 156 according to the present teaching with the body 112" including the plurality of nozzles 106 positioned in a vertical direction.
  • the linear deposition source 156 is similar to the linear deposition source 152 described in connection with FIG. 2C except that the linear deposition source 156 includes a T-shaped coupling 158 that changes the orientation of the body 112" relative to the normal direction from the sealing flange 110.
  • the body 112" extends in the vertical direction on both sides of the T-shaped coupling 158.
  • FIG. 3A illustrates a perspective cross-sectional view of a linear deposition 200 source according to the present teaching that includes a single crucible 202 coupled to a plurality of conductance channels 204 and then to a plurality of nozzles 206 in a linear configuration.
  • the linear deposition source 200 is similar to the linear deposition source 100 that is described in connection with FIGS. 1 and 2. However, the source 200 includes only one crucible 202.
  • the single crucible 202 is positioned in a housing 208 as described in connection with FIG. 1.
  • the single crucible 202 can have a single compartment that is designed for one type of deposition source material. Such a crucible coupled to the plurality of conductance channels 204 will have relatively high deposition flux throughput.
  • the single crucible 202 can have a plurality of partitions 210 that partially isolate sections of the crucible 202 where each of the partially isolated sections is dimensioned for positioning one of a plurality of deposition source materials.
  • the plurality of deposition source materials can be the same material or can be a different material. Using the same source material in each of the partially isolated sections will add redundancy and will increase the flux rate.
  • an input of each of the plurality of conductance channels 204 is positioned proximate one of the plurality of partially isolated sections.
  • a heater 212 is positioned in thermal communication with the single crucible 202.
  • the heater 212 increases the temperature of the crucible 202 so that the crucible evaporates the at least one deposition material into the plurality of conductance channels 204 or into the single conductance channel 204' (FIG. 3B).
  • the heater 212 or a second heater is positioned in thermal communication with at least one of the plurality of conductance channels 204 or with the single conductance channel 204' in order to raise the temperature of the plurality of conductance channels 204 or the single conductance channel 204' so that evaporated deposition source materials do not condense.
  • Some heaters 212 can raise the temperature of at least one of the plurality of conductance channels 204 relative to another one of the plurality of conductance channels 204.
  • a heat shield 214 is positioned proximate to the crucible 202 and to the plurality of conductance channels 204 to provide at least partial thermal isolation of the crucible 202 and of the plurality of conductance channels 204.
  • the heat shield 214 is designed and positioned to control the temperature of one section of the crucible 202 relative to another section of the crucible 202.
  • the heat shield 214 is designed and positioned in order to provide at least partial thermal isolation of at least one of the plurality of conductance channels 204 relative to at least one other conductance channels 204 so that different temperatures can be maintained in at least two of the plurality of conductance channels 204.
  • at least two of the plurality of conductance channels 204 can be shielded with heat shielding material having different thermal properties.
  • the plurality of nozzles 206 are coupled to the plurality of conductance channels 204. Evaporated deposition materials are transported from the single crucible 202 through the plurality of conductance channels 204 to the plurality of nozzles 206 where the evaporated deposition material is ejected from the plurality of nozzles 206 to form a deposition flux.
  • FIG. 3B illustrates a perspective cross-sectional view of a linear deposition
  • the linear deposition source 200 includes a single crucible 202 coupled to a single conductance channels 204' and then to a plurality of nozzles 206 in a linear configuration.
  • the linear deposition source 200 is similar to the linear deposition source 200 that is described in connection with FIG. 3 A. However, the source 201 includes only one conductance channel 204'.
  • the linear sources of the present teaching are well suited for evaporating one or more different deposition source materials on large area workpieces, such as web substrates and rigid panel substrates.
  • the linear geometry of the sources makes them well suited for processing wide and large area workpieces, such as web substrates and rigid panel substrates used for photovoltaic cells because the source can provide efficient and highly controllable vaporized material over a relatively large area.
  • linear deposition sources of the present teaching are relatively compact. Another feature of the linear deposition sources of the present teaching is that they uses common heaters and common heat shielding materials for each the plurality of deposition sources and for each of the plurality of conductance channels, which improves many equipment performance metrics, such as the size, equipment cost, and operating costs.
  • FIG. 4 illustrates a perspective cross-sectional view of a crucible 300 for the linear deposition source of the present teaching that is formed of two types of materials.
  • the crucible 300 includes at least one crucible positioned inside another crucible.
  • the crucible 300 includes an inner crucible 302 nested inside an outer crucible 304.
  • two types of materials can be used to contain the deposition material in order to improve the performance of the crucible.
  • at least one crucible is nested inside at least two other crucibles.
  • the outer crucible 304 is formed of a material, such as graphite that is more durable, but still capable of high temperature operation. The more durable material protects the pyrolytic boron nitride from damage.
  • the inner crucible is formed of quartz and the outer crucible is formed of alumina. The combination of a quartz inner crucible and an alumina outer crucible has relatively high performance and is relatively inexpensive.
  • FIG. 5A illustrates a perspective top view of a portion of the linear deposition source 100 according to the present teaching that shows the three conductance channels 104 coupled to three crucibles 102 in the housing 108.
  • An input 118 of each of the three conductance channels 104 is coupled to an output of a respective one of the three crucibles 102.
  • the three conductance channels 104 are designed so that there is no significant intermixing of evaporated materials from any of the three crucibles 102 while the evaporated materials are being transported through the plurality of conductance channels 104.
  • FIG. 5B illustrates a perspective top view of a portion of the linear deposition source 101 according to the present teaching that shows a single conductance channel 104' coupled to three crucibles 102 in the housing 108.
  • An input 118 of the conductance channel 104' is coupled to an output of each of the three crucibles 102 as shown in FIGS 1 A and IB or is coupled to an output the single crucible 202 as shown in FIGS 3A and 3B.
  • FIG. 6 A is a perspective view of a portion of a resistive crucible heater
  • the crucible heater 400 for the linear deposition source of the present teaching that shows the inside and three sides of the crucible heater 400 where the crucible 102 (FIG. 1) is positioned.
  • the crucible heater 400 can be fixed in the housing 108 (FIG. 1) or can removably attached to the housing 108.
  • the crucible heater 400 includes a plurality of resistive heating elements 402 on the bottom and sides that surround the crucible 102.
  • the resistive heating elements 402 are a plurality of spaced apart graphite bus bars 402 that are linear strips of graphite material.
  • Support rods 404 structurally connect the graphite bus bars 402 together and also electrically insulating the bus bars 402.
  • the resistive heating elements 402 can include serpentine graphite springs positioned between opposite ends of the heating elements 402. Electrical wires are fed through the housing 108 of the source 100 to connect the graphite bus bars 402 to a power supply (not shown).
  • the graphite bus bars 402 include screws 406 for securely attaching the electrical wires.
  • FIG. 6B is a perspective view of an outside of one of the plurality of crucible heaters 400 for heating each of the plurality of crucibles 102 (FIG. 1).
  • the perspective view shown in FIG. 6B is similar to the perspective view shown in FIG. 6A, but it shows all four sides of the crucible heater 400.
  • the rods 130 are positioned proximate to the conductance channels 104 in the longitudinal direction of the body 112 along the length of the conductance channels 104.
  • the rods 130 can be formed of any type of high temperature resistive material such as graphite, silicon carbide, refractory materials, or other very high melting point materials.
  • the rods 130 are electrically connected to an output of a power supply (not shown) that generates a current which flows through the rods 130, thereby increasing the temperature of the rods 130.
  • the rods 130 can be electrically connected to the output of the power supply using a spring or a wire harness that provides for enough movement to allow for thermal expansion of the rods 130 during normal operation. Heat generated in the rods 130 by current from the power supply radiates into the conductance channels 104, thereby raising the temperature of the conductance channels 104 so that evaporated source material transporting through the plurality of conductance channels 104 does not condense.
  • FIG. 7A also shows a plurality of coupling 132 that attach segments of the rods 130 together.
  • the length of the body 112 is so long that coupling multiple segments of rods 130 together is more cost effective, reliable, and easier to manufacture.
  • One skilled in the art will appreciate that there are numerous types of couplings that can be used to couple together multiple segments of rods 130. For example, a threaded coupling can be used to couple two rod segments together.
  • the coupling 132 provide a continuous electrical connection with a relatively constant resistance through the entire length of the rods 130.
  • FIG. 8 illustrates the frame 500 of the body 112 (FIG. 1) that includes an expansion link 502.
  • the plurality of conductance channels 104 is removed from the space inside the frame 500 of the body 112 in order to view the expansion link 502.
  • the expansion link 502 is sometimes used because the body 112 experiences significant thermal expansion and contraction during normal operation.
  • the coefficient of thermal expansion of the rods 130 and the plurality of conductance channels 104 can be significantly different from the coefficient of thermal expansion of the frame 500 and other components in the body 112.
  • FIG. 9A is a perspective cross-sectional view of a heat shield 600 for the plurality of crucibles 102 (FIGS. 1A and IB) and for the plurality of conductance channels 104 of a linear deposition source according to the present teaching.
  • FIG. 9B is a full perspective view of the heat shield 600 shown in FIG. 9A.
  • the heat shield 600 can be made of any one of numerous types of heat shielding material.
  • the heat shield 600 is formed of a carbon fiber carbon composite material.
  • FIG. 9C illustrates a corner cross section of one embodiment of a heat shield 650 according to the present invention. Only the top and one side surface are shown in FIG. 9C to more easily illustrate the various layers in the heat shield 650.
  • the heat shield 650 includes an outer layer 652 on the top and bottom surfaces and on the side surfaces.
  • the outer layer 652 can be rigid, durable, and can have a relatively high level of corrosion protection.
  • a reflective material can be deposited on the outer surface of at least some of the outer layers 652 to improve the thermal properties of the heat shield 650.
  • the outer layer 652 is carbon fiber board.
  • the outer layer 652 can be carbon fiber board with a thickness that is in a range of 0.02 to 0.08 inches thick.
  • the carbon fiber board is coated with a conductive material, such as a metal carbide on at least one surface.
  • the heat shield 650 also includes a plurality of heat resistant material layers 654 on the top and bottom surfaces and on the side surfaces. In some
  • the heat resistant material layers 654 can be heat resistance tiles. For example, there can be more than five, more than ten, or more than 20 heat resistant material layers 654 positioned on the top, bottom, and/or side surfaces of the heat shield 650. In some embodiments, at least some of the plurality of heat resistant material layers 654 has a thickness that is in the range of 0.001 inches to 0.020 inches thick. In some embodiments, a reflective material is positioned on at least one outer surface of at least one of the plurality of heat resistant material layers 654.
  • the heat resistant material layers 654 are one of various types of refractory metal foil layers.
  • the heat resistant material layers are graphite material layers. Numerous types of graphite material layers can be used.
  • the graphite material layers can be formed of Grafoil®, or any other type of flexible graphite material that is made from pure, natural graphite flake. Grafoil® is well suited for uses as a heat shielding material because it is resistant to heat, fire, corrosion and aggressive chemicals.
  • the heat shield 650 includes a rigid material 656 that is positioned between some of the plurality of heat resistant material layers 654.
  • the rigid material 656 is typically thicker than the heat resistant material layers 654.
  • the rigid material 656 provides mechanical strength and corrosion protection to the heat shield.
  • Numerous types of rigid materials can be used that can be the same as or different than the rigid material positioned on the outer surface of at least one of the plurality of heat resistant material layers 654.
  • the rigid material can be one of many types of carbon fiber board, such as carbon fiber cloth with a carbon matrix that is commonly referred to in the industry as CFC or carbon/carbon.
  • the carbon fiber board has a thickness that is in a range of 0.02 and 0.08 inches thick.
  • the carbon fiber board is coated with a conductive material, such as a metal carbide on at least one surface.
  • the rigid material can be a non fiber- reinforced graphite board.
  • the heat shield 650 includes top and bottom surfaces that includes the following layers: (1) at least one layer of rigid material coated with a refractory ceramic material, for example, one or two layers of Niobium carbide coated carbon fiber board or similar materials; (2) a plurality of refractory metal foil and/or graphite layers, for example, 2-20 refractory metal foil and/or graphite layers; (3) at least one layer of rigid material, for example, one or two layers of carbon fiber board; (4) a plurality of refractory metal foil and/or graphite layers, for example, 2-20 refractory metal foil and/or graphite layers; and (5) at least one layer of rigid material coated with a refractory ceramic material, for example, one or two layers of Niobium carbide coated carbon fiber board or similar materials.
  • a first section 602 of the heat shield 600 is positioned proximate to each of the plurality of crucibles 102 in order to provide at least partial thermal isolation of each of the plurality of crucibles 102.
  • the first section 602 of the heat shield 600 isolates the individual crucibles 102 so that significantly different crucible temperatures can be maintained during processing if necessary. Maintaining significantly different crucible temperatures is important for some deposition processes because each of the plurality of crucibles 102 can then be heated to its optimum temperature for the particular source material. Heating the crucibles 102 to their optimum temperature for the particular source material reduces negative heating effects, such as spitting of deposition material. In addition, heating the crucibles 102 to their optimum temperature for the particular source material can significantly reduce the operating costs of the deposition source.
  • the first section 602 of the heat shield 600 can include a plurality of separate heat shields where a respective one of the plurality of separate heat shields 600 surrounds a respective one of the plurality of crucibles 102.
  • Each of the plurality of separate heat shields can be the same or can be a different heat shield.
  • crucibles that are used to heat higher temperature deposition source materials can be formed of different or thicker heat shielding materials with different thermal properties.
  • the second section 604 of the heat shield 600 is positioned proximate to the plurality of conductance channels 104 in order to provide at least partial thermal isolation of the plurality of conductance channels 104 from the plurality of crucibles 102.
  • Each of the plurality of conductance channels 104 can be shielded by a separate heat shield or a single heat shield can be used.
  • the second section 604 of the heat shield 600 is positioned in order to provide at least partial thermal isolation of at least one of the plurality of conductance channels 104 relative to at least one other conductance channel.
  • the design and positioning of the second section 604 of the heat shield 600 can be chosen to allow a different operating temperature in at least one of the plurality of conductance channels 104 relative to at least one other of the plurality of conductance channels 104.
  • at least two of the plurality of conductance channels 104 can be shielded with heat shielding material having different thermal properties.
  • at least two of the plurality of conductance channels 104 can be shielded by different heat shielding materials, different heat shielding thickness, and/or different proximities of the heat shielding material to particular conductance channels.
  • the heat shield 600 is exposed to very high temperatures during normal operation.
  • Some heat shields according to the present teachings are constructed with at least one surface being formed of a low emissivity material or having a low emissivity coating that reduces the emission of thermal radiation.
  • an inner or outer surface of the heat shield 600 can be coated with a low emissivity coating or any other type of coating that reduced heat transfer. Any such coating is usually designed to maintain constant emissivity over the operational lifetime of the source.
  • the heat shield 600 also expands and contracts at different rates compared to the housing 108 and the body 112 and compared to components in the housing 108 and body 112.
  • the heat shield 600 is movably attached to at least one of the housing 108 and the frame 500 (FIG. 8) of the body 112 so that it can move relative to at least one of the housing 108 and the frame 500 during normal operation.
  • an expansion link is used to allow the heat shield 600 to expand and contract relative to other source components.
  • the heat shield 600 includes a plurality of layers of heat shielding materials that are tolerant to thermal expansion and contraction. For example, a plurality of heat shielding tiles can be used to increase the tolerance to thermal expansion and contraction.
  • FIG. 10 illustrates a top perspective view of a deposition source 100 according to the present teaching that shows the plurality of nozzles 106 in the body 112 for emitting evaporated materials onto substrates or other workpieces.
  • An input of each of the plurality of nozzles 106 is coupled to an output of a respective one of the plurality of conductance channels 104 as described in connection with FIG. 5 A or is coupled to output of the conductance channels 104' as described in connection with FIG. 5B.
  • FIG. 10 illustrates a top perspective view of a deposition source 100 according to the present teaching that shows the plurality of nozzles 106 in the body 112 for emitting evaporated materials onto substrates or other workpieces.
  • An input of each of the plurality of nozzles 106 is coupled to an output of a respective one of the plurality of conductance channels 104 as described in connection with FIG. 5 A or is coupled to output of the conductance channels 104' as described in connection with FIG. 5B.
  • the evaporated deposition materials are transported without intermixing from the plurality of crucibles 102 through the plurality of conductance channels 104 to the plurality of nozzles 106 where the evaporated deposition material is ejected from the plurality of nozzles 106 to form a deposition flux.
  • the source 100 shown in FIG. 10 illustrates seven groups of nozzles 106 where each group includes three nozzles.
  • a deposition source according to the present teaching can include any number of groups of nozzles and any number of nozzles within each group.
  • the spacing of the plurality of nozzles 106 can be uniform or non-uniform.
  • the plurality of nozzles 106 can be non-uniformly spaced in order to achieve certain process goals.
  • the spacing of the plurality of nozzles 106 is chosen to improve uniformity of the deposition flux.
  • the spacing of the nozzles 106 near the edge of the body 112 is closer than the spacing of the nozzles 106 proximate to a center of the body 112 as shown in FIG. 10 in order to compensate for reduced deposition flux near the edges of the body 112.
  • the exact spacing can be chosen so that the source 100 generates a substantially uniform deposition material flux proximate to the substrate or workpiece.
  • the spacing of the plurality of nozzles 106 is chosen to obtain high material utilization in order to lower the operating cost of the deposition source 100 and to increase the process time and availability between service intervals. Also, in some embodiments, the spacing of the plurality of nozzles 106 is chosen to provide a desired overlap of deposition flux from the plurality of nozzles 106 in order to achieve a predetermine mixture of evaporated materials.
  • At least one of the plurality of nozzles 106 is positioned at an angle relative to the normal angle from the top surface 160 of the conductance channels 104 that is chosen to provide a desired overlap of deposition flux from the plurality of nozzles 106 to achieve a predetermine mixture of evaporated materials.
  • the length of the tube 170 corresponding to one of the plurality of nozzles 106 can be different from the length of the tube corresponding to at least one other of the plurality of nozzles 106.
  • the emissivity at the top of the tubes 170 is lower than the emissivity at the bottom of the tubes 170 to provide a desired thermal gradient.
  • the dimensions of the tubes 170 determine the amount of deposition material that is supplied from the conductance channel 104 to the corresponding nozzles 106.
  • the positioning of the tubes 170 such as the distance that the tubes 170 are positioned in the conductance channel 104, also determines the amount of deposition material that is supplied from the conductance channel 104 to the corresponding nozzle 106.
  • At least one of the plurality of nozzles 106 extends above the top surface of the conductance channel 104 in order to prevent vapor condensation and material accumulation building up over time.
  • Nozzles can also be positioned to achieve a desired deposition flux distribution pattern.
  • Individual nozzle heaters can be positioned proximate to one or more of the plurality of nozzles 106 to control the temperature of the vaporized material emanating from the nozzles 106 to prevent condensation and material accumulation.
  • FIG. 1 IB illustrates a cross-sectional view of the plurality of conductance channels 104 of the deposition source 100 according to the present teaching that shows a row of nozzles 106 coupled to the plurality of conductance channels 104 with tubes 170 that control the flow of deposition material to the nozzles 104.
  • FIG. 1 IB shows three conductance channels with tubes.
  • the tubes can have different lengths as shown in FIG. 1 IB.
  • One aspect of the present teachings is that the nozzles 106 are heated by the conductance channel heaters (rods 130 in FIGS. 7A-C) and by the associated conductance channel 104.
  • FIG. 12 illustrates a perspective view of a nozzle 106 comprising one of the plurality of nozzles for the linear sources 100 and 101 according to the present teaching.
  • the nozzle 106 includes a tapered outside surface and/or a tapered inside surface to provide a desired thermal gradient for the evaporated material.
  • the nozzle 106 is designed so that it provides the required heat conduction to prevent the evaporated source material from condensing.
  • the aperture 180 is designed to eject a desired plume of evaporated material.
  • a generally round aperture 108 is shown in the nozzle 106 of FIG. 12.
  • the aperture 180 can be round, oval, rectangle, square, or a slit.
  • the outlet of the aperture 180 is shown with a radius shape.
  • the aperture 180 can use any one of numerous outlet shapes to achieve the desired processing goals.
  • the outlet shape can be chamfered, radiused or sumo style (i.e. reverse draft or other type of restricted nozzle shape).
  • At least one of the plurality of nozzles 106 has an aperture 180 that is shaped to pass a non-uniform deposition flux.
  • at least some of the plurality of apertures 180 can be shaped to pass non-uniform deposition flux that combines to form a desired deposition flux pattern.
  • the desired combined deposition flux pattern can be a uniform deposition flux pattern over a predetermined area.
  • Deposition material from each of the plurality of crucibles 102 transports through the conductance channel 104' in the body 112.
  • deposition material from each of the plurality of crucibles 102 transports through respective conductance channels 104 in the body 112 without intermixing the deposition materials evaporated from any of plurality of crucibles 102.
  • the conductance channels 104 are heated so that the vaporized deposition material does not condense before emanating from the nozzles 106.
  • the conductance channels 104 can be separately heated so as to achieve different temperatures for at least two of the plurality of conductance channels 104.
  • Each of the plurality of conductance channels 104 can be shielded so that different temperatures can be maintained in different conductance channels 104.
  • Many methods include providing movable components and space for thermal expansion of heater and heat shielding material proximate to the plurality of crucibles 102 and proximate to the plurality of conductance channels 104.
  • Evaporated deposition material is transported from the conductance channel 104' or from each of the plurality of conductance channels 104 to respective ones of the plurality of nozzles 106.
  • the evaporated deposition material is transported from the conductance channel 104' or from each of the plurality of conductance channels 104 to a respective one of the plurality of nozzles 106 through a respective one of a plurality of tubes 170 or other structures that control the flow of the deposition material.
  • the flow of the deposition material through the plurality of nozzles 106 is controlled by using tubes with varying length, geometry, and/or position of the tube inlet relative to the
  • the length, geometry, and/or position of the tube inlet relative to the conductance channel 104 are chosen to achieve certain process goals such as uniform deposition flux and/or high deposition material utilization.
  • the plurality of nozzles 106 then passes the evaporated deposition material, thereby forming a deposition flux.
  • the method can include selecting a spacing of the plurality of nozzles 106 to achieve certain process goals, such as uniform deposition flux from the plurality of nozzles 106 and/or high deposition material utilization.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention porte sur une source de déposition, qui comprend un creuset pour contenir un matériau de déposition et un corps comprenant un canal de conductance. Une entrée du canal de conductance est couplée à une sortie du creuset. Un élément chauffant chauffe le creuset de telle sorte que le creuset évapore le matériau de déposition dans le canal de conductance. Un blindage thermique comprenant une pluralité de couches de matériau résistant à la chaleur est positionné autour d'au moins l'un de l'élément chauffant et du corps. Une pluralité de buses sont couplées à une sortie du canal de conductance de telle sorte qu'un matériau de déposition évaporé est transporté à partir du creuset, à travers le canal de conductance, vers la pluralité de buses, où le matériau de déposition évaporé est éjecté à partir de la pluralité de buses de façon à former un flux de déposition.
EP10833707.2A 2009-11-30 2010-06-17 Source de déposition linéaire Withdrawn EP2507402A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/628,189 US20100159132A1 (en) 2008-12-18 2009-11-30 Linear Deposition Source
PCT/US2010/039085 WO2011065998A1 (fr) 2008-12-18 2010-06-17 Source de déposition linéaire

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EP2507402A1 true EP2507402A1 (fr) 2012-10-10
EP2507402A4 EP2507402A4 (fr) 2013-10-23

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EP10833708.0A Withdrawn EP2507403A4 (fr) 2009-11-30 2010-06-17 Source de déposition linéaire

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KR (2) KR20120101425A (fr)
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DE102014007522A1 (de) * 2014-05-23 2015-11-26 Manz Ag Trägeranordnung für eine Verdampferquelle
KR102260617B1 (ko) * 2014-07-07 2021-06-07 (주)선익시스템 복수의 도가니가 장착된 증발원을 갖는 박막 증착장치
US20170159167A1 (en) * 2014-07-07 2017-06-08 Sunic System Ltd. Thin Film Deposition Apparatus Having Plurality of Crucibles
KR102260572B1 (ko) * 2014-07-07 2021-06-07 (주)선익시스템 복수의 증발원을 갖는 박막 증착장치
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KR102154099B1 (ko) * 2015-07-13 2020-09-09 어플라이드 머티어리얼스, 인코포레이티드 증발 소스
KR102369676B1 (ko) * 2017-04-10 2022-03-04 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
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Publication number Publication date
EP2507402A4 (fr) 2013-10-23
KR20120104559A (ko) 2012-09-21
CN102686765A (zh) 2012-09-19
TW201142055A (en) 2011-12-01
EP2507403A1 (fr) 2012-10-10
KR20120101425A (ko) 2012-09-13
TW201118961A (en) 2011-06-01
EP2507403A4 (fr) 2013-10-23
CN102712993A (zh) 2012-10-03

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