EP2430419A1 - Capteur haute pression - Google Patents

Capteur haute pression

Info

Publication number
EP2430419A1
EP2430419A1 EP10708540A EP10708540A EP2430419A1 EP 2430419 A1 EP2430419 A1 EP 2430419A1 EP 10708540 A EP10708540 A EP 10708540A EP 10708540 A EP10708540 A EP 10708540A EP 2430419 A1 EP2430419 A1 EP 2430419A1
Authority
EP
European Patent Office
Prior art keywords
sensor element
pressure
base body
membrane
connecting piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10708540A
Other languages
German (de)
English (en)
Inventor
Thomas Moelkner
Wilhelm Frey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2430419A1 publication Critical patent/EP2430419A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0672—Leakage or rupture protection or detection

Definitions

  • the invention relates to a high-pressure sensor with a sensor element for pressure detection and with a connection piece for coupling the sensor element to a measuring system.
  • a membrane is formed over a blind opening and in the main body of the connecting piece is a
  • the sensor element is mounted on the connection piece such that the membrane can be subjected to a measuring pressure via the pressure channel opening into the bag opening.
  • the sensor element and the connector are each made independently of each other from a metallic base body.
  • a blind opening is produced in the main body in order to expose a membrane in the opposite surface of the main body.
  • a functional layer is applied with circuit elements for signal detection, to which preferred methods of semiconductor technology are used.
  • a pressure channel is formed in the main body of the connector.
  • the connector can for example still be provided with a thread for coupling to the measuring system. The sensor element is then mounted on the connector so that the pressure channel opens into the rear sack opening of the sensor element, wherein the connection between the sensor element and the connector must be pressure-tight.
  • the sensor element is usually welded to the connection piece. It must be ensured that neither the pressure channel in the connector nor the bag opening of the sensor element are closed, dirty or unfavorably deformed, which makes it difficult to produce a welded joint with reproducible mechanical properties.
  • the compressive strength of the weld joint is influenced by the geometry of the weld and its contact surface with the sensor element and the fitting. Notches or depressions in the welded joint form starting points for cracks at high pressure loads, in particular during pulsation loads.
  • the field of application of such high-pressure sensors is therefore typically limited to pressure ranges less than 2200 bar.
  • clamping connections More reliable than a welded connection between the sensor element and the connecting piece are clamping connections. These are also suitable for use at pressures greater than 10,000 bar. However, the associated costs are very high, so that this assembly and connection technology is used only in very small series for special applications.
  • the sensor element and the connecting piece can also be produced in one piece from a metallic base body.
  • the circuit elements for signal detection can not be easily applied to the sensor membrane by methods of semiconductor technology due to the size of the components.
  • the blind opening in the main body of the sensor element according to the invention is tapered at least in a section tapering towards the membrane, while the sensor element facing the end of the pressure channel is tubular.
  • This tubular end of the pressure channel is pressed according to the invention in the bag opening, so that the tube wall is pressed at least in a peripheral region sealingly against the side wall of the bag opening.
  • the sealing of the mouth region between the pressure channel of the connecting piece and the blind opening of the sensor element is decoupled from the mechanical fixing of the sensor element on the connecting piece.
  • the sealing effect is achieved according to the invention by pressing the tubular end of the pressure channel into the conically shaped blind opening in the rear side of the sensor element.
  • Such clamping seals are particularly reliable in the high pressure range above 2200 bar.
  • the sealing effect is independent of a mechanical connection of the base body of sensor element and connector. Accordingly, the mechanical connection between the two basic bodies can be arranged at a distance from the mouth region between the pressure channel and the blind opening. Since this mechanical connection does not have to be pressure-tight, but merely serves to fix the sensor structure, any connection technique can be used for this purpose.
  • the tubular end of the pressure channel has a uniform circular cross-section over its entire length.
  • the free end of the pressure channel is sealingly pressed against the side wall of the bag opening.
  • a better sealing effect in comparison can be achieved if the tubular end of the pressure channel has a conical reduction and the conical slope of this reduction is greater than the conical slope of the blind opening.
  • the contact area between the tube wall and the side wall of the blind opening can be increased overall.
  • the mounting of the sensor element on the connecting piece is simplified.
  • the mechanical connection between the basic bodies of sensor element and connecting piece can be produced in any desired manner.
  • the basic body sits per the sensor element on the base body of the connecting piece and is welded in the edge region of the connecting surface with this.
  • the high-pressure sensor 10 shown in the single figure comprises a sensor element 1 for pressure detection and a connecting piece 2 for coupling the sensor element 1 to a measuring system not shown here.
  • Both the sensor element 1 and the connecting piece 2 are each made of a metallic
  • a blind opening 12 has been generated to expose a membrane 13 in the opposite surface of the base body 1 1.
  • This bag opening 12 has a conically tapering opening portion 121 on the membrane 13, which merges into a cylindrical end portion 122.
  • a functional layer 14 was applied with circuit elements for detecting the membrane deformations.
  • a passage channel is formed as a pressure channel 22 with a tubular extension 23.
  • the circular cross-section of the pressure channel 22 tapers in the middle region of the main body 21 except for the cross-sectional area of its tubular extension 23.
  • an external thread 24 is formed in the outside of the connecting piece 2, so that the high-pressure sensor 10 into a corresponding connection opening of
  • Measuring system can be screwed.
  • the sensor element 1 was mounted on the connecting piece 2 such that the pressure channel 22 opens into the blind opening 12 under the membrane 13.
  • the membrane 13 can be acted upon by the pressure channel 22 with a measuring pressure, the tubular end 23 of the pressure channel 22 was pressed into the blind hole 12 of the sensor element 1, so that the free end 231 of the cylindrical tube wall sealingly tapering towards the conical to the membrane 13 Section of the side wall of the sack opening 12 is pressed.
  • This clamp seal withstands very high pressures.
  • the blind opening 12 in the main body 1 1 of the sensor element 1 and the tubular end 23 of the pressure channel 22 are dimensioned and configured so that the above-described sealing effect is given when the main body 1 1 of the sensor element 1 on the main body 21 of the connector 2 sits ,
  • This arrangement is fixed in the illustrated embodiment of the invention by a at the connecting surface of the two base body 1 1 and 21 circumferential weld 25.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un concept de construction de capteurs haute pression, qui permet de fabriquer d'une manière simple et économique des capteurs haute pression fiables, même pour des plages de pression supérieures à 2200 bar. Un tel capteur haute pression (10) comprend un élément capteur (1) destiné à détecter la pression et une pièce de raccordement (2) pour l'accouplement de l'élément capteur (1) à un système de mesure. Dans le corps de base (11) de l'élément capteur (1), une membrane (13) est réalisée au moyen d'une ouverture borgne (12), et dans le corps de base (21) de la pièce de raccordement (2) est réalisé un canal de pression (22). L'élément capteur (1) est monté sur la pièce de raccordement (2) de sorte que la membrane (13) puisse être soumise à une pression de mesure dans le canal de pression (22) débouchant sur l'ouverture borgne (12). Selon l'invention, l'ouverture borgne (12) dans le corps de base (11) de l'élément capteur (1) s'étend, au moins dans une section, de manière conique sur la membrane (13), et l'extrémité (23) tournée vers l'élément capteur (1) du canal de pression (22) est tubulaire. Cette extrémité tubulaire (23) du canal de pression (22) est insérée dans l'ouverture borgne (12) de sorte que la paroi du tuyau soit pressée, au moins dans une zone périphérique, contre la paroi latérale de l'ouverture borgne (12) de façon étanche.
EP10708540A 2009-05-11 2010-03-12 Capteur haute pression Withdrawn EP2430419A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009002990A DE102009002990A1 (de) 2009-05-11 2009-05-11 Hochdrucksensor
PCT/EP2010/053201 WO2010130478A1 (fr) 2009-05-11 2010-03-12 Capteur haute pression

Publications (1)

Publication Number Publication Date
EP2430419A1 true EP2430419A1 (fr) 2012-03-21

Family

ID=42184084

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10708540A Withdrawn EP2430419A1 (fr) 2009-05-11 2010-03-12 Capteur haute pression

Country Status (5)

Country Link
US (1) US20120067131A1 (fr)
EP (1) EP2430419A1 (fr)
JP (1) JP2012526290A (fr)
DE (1) DE102009002990A1 (fr)
WO (1) WO2010130478A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE534411C2 (sv) * 2009-11-02 2011-08-09 Stanley Wissmar Elektronisk Finger Ring och tillverkning av densamme
JP6725852B2 (ja) * 2018-09-14 2020-07-22 ミツミ電機株式会社 半導体センサ装置
CN115200772A (zh) * 2022-07-19 2022-10-18 上海捷氢科技股份有限公司 压力传感器及质子交换膜燃料电池系统

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JPS57187632A (en) * 1981-05-14 1982-11-18 Toshiba Corp Semiconductor pressure conversion device
JPS62259030A (ja) * 1986-05-02 1987-11-11 Omron Tateisi Electronics Co 半導体圧力センサ
US4780699A (en) * 1987-02-06 1988-10-25 Solartron Electronics, Inc. Input/output terminal assembly for flexure-type pressure transducers
DE3919411A1 (de) * 1989-03-07 1990-12-20 Pfister Gmbh Drucksensor und zugehoeriges herstellverfahren
JP2519113Y2 (ja) * 1990-12-27 1996-12-04 カヤバ工業株式会社 液圧センサの取付構造
JP3264689B2 (ja) * 1992-04-07 2002-03-11 三菱電機株式会社 半導体圧力センサ用の圧力検出回路
US5325720A (en) * 1993-10-07 1994-07-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method for making a dynamic pressure sensor and a pressure sensor made according to the method
DE19637763A1 (de) * 1996-09-16 1998-03-19 Trw Fahrzeugelektrik Drucksensoreinheit, insbesondere für die Kraftfahrzeugtechnik
JP3337391B2 (ja) * 1997-02-07 2002-10-21 株式会社オティックス 自動車用ディーゼルエンジンの燃料噴射系のメタルシール構造
IT1295031B1 (it) * 1997-09-18 1999-04-27 Abb Kent Taylor Spa Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante
JP3899174B2 (ja) * 1998-01-14 2007-03-28 長野計器株式会社 圧力センサ
JPH11201846A (ja) * 1998-01-12 1999-07-30 Mitsubishi Electric Corp 半導体圧力検出装置
JP2000121469A (ja) * 1998-10-16 2000-04-28 Mitsubishi Electric Corp 圧力センサ
US6453747B1 (en) * 2000-01-12 2002-09-24 Peter A. Weise Hermetic pressure transducer
JP2001208626A (ja) * 2000-01-24 2001-08-03 Mitsubishi Electric Corp 半導体圧力センサ装置
JP3502807B2 (ja) * 2000-04-14 2004-03-02 長野計器株式会社 圧力センサ
JP2002071495A (ja) * 2000-08-28 2002-03-08 Saginomiya Seisakusho Inc 圧力センサのダイヤフラム部材取付構造およびダイヤフラム部材取付方法
DE10052079A1 (de) * 2000-10-19 2002-05-02 Endress Hauser Gmbh Co Druckmeßanordnung
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DE102005009351B4 (de) * 2004-03-03 2013-05-23 Denso Corporation Drucksensor und Verfahren zu seinem Zusammenbau
CN101233400B (zh) * 2005-08-10 2011-05-04 堀场斯泰克株式会社 静电电容式压力计的膜片安装结构
JP2008064529A (ja) * 2006-09-06 2008-03-21 Denso Corp 圧力センサ
JP4719727B2 (ja) * 2007-09-05 2011-07-06 長野計器株式会社 圧力センサの製造方法および圧力センサ
DE102007053859A1 (de) * 2007-11-09 2009-05-14 Endress + Hauser Gmbh + Co. Kg Druck-Messeinrichtung

Non-Patent Citations (1)

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Title
See references of WO2010130478A1 *

Also Published As

Publication number Publication date
DE102009002990A1 (de) 2010-11-18
US20120067131A1 (en) 2012-03-22
JP2012526290A (ja) 2012-10-25
WO2010130478A1 (fr) 2010-11-18

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