EP2404326A2 - Verfahren zur herstellung eines dünnschicht-photovoltaik-systems und dünnschicht-photovoltaik-system - Google Patents

Verfahren zur herstellung eines dünnschicht-photovoltaik-systems und dünnschicht-photovoltaik-system

Info

Publication number
EP2404326A2
EP2404326A2 EP10702684A EP10702684A EP2404326A2 EP 2404326 A2 EP2404326 A2 EP 2404326A2 EP 10702684 A EP10702684 A EP 10702684A EP 10702684 A EP10702684 A EP 10702684A EP 2404326 A2 EP2404326 A2 EP 2404326A2
Authority
EP
European Patent Office
Prior art keywords
layer
thin
compound semiconductor
semiconductor layer
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10702684A
Other languages
German (de)
English (en)
French (fr)
Inventor
Dieter Ostermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zylum Beteiligungs GmbH and Co Patente II KG
Original Assignee
Zylum Beteiligungs GmbH and Co Patente II KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zylum Beteiligungs GmbH and Co Patente II KG filed Critical Zylum Beteiligungs GmbH and Co Patente II KG
Publication of EP2404326A2 publication Critical patent/EP2404326A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10018Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising only one glass sheet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10761Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing vinyl acetal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10788Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing ethylene vinylacetate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/0296Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03925Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIIBVI compound materials, e.g. CdTe, CdS
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/07Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the Schottky type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1828Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
    • H01L31/1836Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe comprising a growth substrate not being an AIIBVI compound
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2327/00Polyvinylhalogenides
    • B32B2327/12Polyvinylhalogenides containing fluorine
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02551Group 12/16 materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02568Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02587Structure
    • H01L21/0259Microstructure
    • H01L21/02601Nanoparticles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02623Liquid deposition
    • H01L21/02628Liquid deposition using solutions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Definitions

  • the invention relates to a method for producing a thin-film photovoltaic system, a thin-film photovoltaic Systerti and its use, in particular in a photovoltaic module for the conversion of solar energy into electrical energy.
  • a reaction cell for photoelectrochemical production of hydrogen gas is known.
  • a filled with an aqueous electrolyte housing is provided in which a first of a doped semiconductor material, for example. TiO 2 or SrTiÜ 3 , existing electrode and a second, made of a noble or semi-precious metal or one with respect to the first electrode oppositely doped semiconductor existing electrode are provided.
  • the two electrodes are electrically conductively connected to each other and are irradiated during operation by a light source.
  • the electrodes are arranged such that the reaction cell is divided into two chambers, which are connected to one another in an ion-conducting manner.
  • a gas outlet opening dissipates the hydrogen which forms within the reaction chamber.
  • a semiconductor for detection of UV radiation.
  • a semiconductor is provided as a substrate having a metal chalcogenide compound semiconductor material as an optical absorber material for QV radiation, wherein the Semiconductor forms a Schottky contact with a metal.
  • the semiconductor thus provided with a nanocrystalline metal chalcogenide compound semiconductor layer is conductively connected on one side to an electrical contact layer or to a metallic substrate and on the other side to a metal layer which is at least partially transparent to UV radiation.
  • PV photovoltaic
  • TiO 2 metal chalcogenide compound semiconductor layer
  • metal layer is described in WO 2009/0112397 A2.
  • the core of the invention described there is a superficially nanostructured silver layer in which a plasmon resonance is induced when visible light is incident.
  • practical investigations have shown that this does not contribute effectively to charge carrier separation, since the induced oscillation extends parallel and not perpendicular to the extent of the Schottky barrier between silver layer and TiO 2 layer.
  • a plasmon resonance is achieved only at an exactly set angle of incidence of the incident light.
  • the present invention seeks to provide a comparatively simple and inexpensive method for producing a thin-film photovoltaic system, which is suitable for use in a solar cell.
  • the aim is to be able to generate large-area PV modules in the most effective and cost-effective way possible.
  • __ The above object is achieved by a method for producing a thin-film photovoltaic system according to the preamble of claim 1, characterized in that the Metallchalkogenid-Veritatiwhileiterschient by applying a nanoscale particles with a diameter of about 3 to about 30 ran containing dispersion on a transparent substrate material, wherein the layer thickness of the metal chalcogenide compound semiconductor layer deposited on the substrate material is about 150 nm to about 2000 nm.
  • the invention is thus distinguished by a modification of the layer structure known from the prior art and its suitable integration into known technical solutions for the production of solar modules.
  • the process is relatively easy to carry out and allows the cost-effective production of - even large-scale - PV modules.
  • comparatively inexpensive materials such as palladium (instead of
  • FIGS. 1 shows a schematic plan view of a thin-film PV system based on a monocell having the photosensitive region and a TCO (transparent conductive oxide) connection and a connection of the metallic Schottky contact connection,
  • TCO transparent conductive oxide
  • PV multi-cell the three in series, switched
  • FIG. 4 shows a schematic plan view of a thin-film PV system in series connection
  • FIG. 5 shows a schematic plan view of a thin-sliced PV
  • FIG. 6 shows a schematic plan view of a thin-film PV system in series and parallel connection with bypass diodes
  • FIG. 7 shows a schematic cross section through a thin-film PV double cell
  • PV arrangement in the form of a laminate composite with an adhesive film 9 shows a schematic cross section through a thin-film PV arrangement in an insulating glass composite with a rear glass pane
  • FIG. 10 shows a current-voltage characteristic of a flat doped TiO 2 layer of typically 150 nm on a glass substrate with TCO coating (Pilkington tea glass) and a thin platinum Schottky electrode with a layer thickness of 20 nm.
  • Figure 1 shows a schematic plan view of a simple thin film PV system (1) based on a mono cell with the photosensitive region (3) and the TCO (transparent conductive oxide) terminal (4) and a metallic Schottky contact (5).
  • TCO transparent conductive oxide
  • n-doped TiO 2 with a thin platinum Schottky electrode is selected as the semiconductor material, a voltage of about 0.4 volts can be achieved at the terminals (4, 5) in this way, with a typical efficiency of 3 to 12%
  • Such a monocell is not suitable for large-area formats, since conventional TCO layers (ITO (indium tin oxide), ATO (antimony tin oxide), FTO (fluorine doped tin oxide), ZnO (ceramics), semitransparent metallic thin films of gold, thin films on Based on single-wall carbon nanotubes or silver wire thin films) have comparatively high surface resistivities and achieve values below 10 ⁇ / m 2 only with simultaneously lower transparency for daylight.
  • the TEC glass # 8/3 from Pilkington Specialty Gla ⁇ ⁇ s Products, Toledo, OH 43697-0799, USA has an electrical sheet resistance of ⁇ 9 ⁇ / m 2 with a daylight transmittance of 77%.
  • busbars ie electrically highly conductive lines, which are usually arranged in the edge region, help to reduce the current load.
  • Busbars in the form of silver, silver aluminum or aluminum pastes are applied according to the required design by means of screen printing, stencil printing, dispenser, inkjet, aerosol jet or brush, followed by a heat treatment.
  • Conventional bus bar systems are capable of conducting currents in the ampere-range up to several 10 amps, depending on the thickness and width of the busbar, without substantial heating.
  • FIG. 1 schematically shows a busbar on the left for contacting the TCO layer with the terminal 4, and a busbar on the right for contacting the metallic one
  • the TCO layer can be contacted at two opposite busbars and the metallic layer at the two 90 ° opposite edges, and the TCO layer can be provided with a busbar at all four edges and the metallic layer can be electrically contacted at the back ,
  • FIG. 2 shows a schematic cross section through a simple thin-film PV system 1.
  • a glass substrate 12 can be used with a pyrolytically deposited TCO layer 6, such as the TEC glass # 8/3 or 15 / 3.3 or 15/4 from Pilkington Specialty Glass Products, or it can be electrically conductive and substantially transparent in a vacuum coated glasses or using SoIGeI or Galvank TCO coating systems.
  • the TCO layer 6 is removed in the right edge region by means of laser ablation or grinding or sandblasting or etching (ie the layer is patterned), preferably by means of laser ablation or etching, since such processes do not cause microcracks and since a laser ablation process is currently already 10 to 100 cm a / sec Ablations Republic is feasible and can be very well adjusted to the layer to be ablated or layer sequence. This also applies to the etching-technical structuring.
  • the two busbar contact lines 10, 11 can first be applied to a glass substrate, and then the TCO layer 6 is applied over its entire area and patterned by, for example, laser ablation or etching.
  • the nanocrystalline semiconductive thin film 7 based on a semiconductor of the group TiO 2 , TiO 2 , SrTiO 3 , Cu 2 S, ZnO, VJO 3 , CdS, MoS 2 , CdSeS, SnO 2 , Pb 3 O 4 , CdSe, preferably TiO 2 , applied.
  • the dry layer thickness is according to the invention 150 nm to about 2500 nm, but preferably 500 nm to 1000 nm.
  • dipcoating can be used in Labormafistab.
  • knife coating, roll coating, curtain coating, printing or spraying is preferred as the coating method.
  • This layer can also be produced in a structured manner. This can be done by a previous coverage of the bus bar areas (10, 11) or a subsequent etching-technical structuring or laser ablation.
  • the metallic Schottky contact 8 in the form of a thin layer of some 10 nm based on a metal from the group Ru, Rh, Pd, Ag, 0s, Ir, Pt, Au, Al, Cr, Cu, Ni, Mo, Pb, Ta, W, in particular Pt, Pd, Au or Ni, applied.
  • a metal from the group Ru, Rh, Pd, Ag, 0s, Ir, Pt, Au, Al, Cr, Cu, Ni, Mo, Pb, Ta, W, in particular Pt, Pd, Au or Ni, applied.
  • a metal from the group Ru, Rh, Pd, Ag, 0s, Ir, Pt, Au, Al, Cr, Cu, Ni, Mo, Pb, Ta, W, in particular Pt, Pd, Au or Ni, applied.
  • platinum, gold, palladium and nickel preference was given to experiments with platinum, gold, palladium and nickel.
  • This layer must also be structured.
  • a masking etching technique or also laser ablation can be used.
  • a vacuum method in the sense of a sputtering process or a vapor deposition process is very well suited, since only a few-10 nm layer thickness are required. It can However, a number of other methods such as a chemical or galvanic deposition are used.
  • This metal layer 8 which can also be referred to as a Schotüky electrode, can in principle be connected to the bus bar 11 in a narrow embodiment.
  • the main criterion here is the voltage drop due to an excessively high surface resistance.
  • a reinforcing and highly electrically conductive second layer 9 is arranged on the electrode 8.
  • This additional layer 9 must also be structured. The structuring can take place by means of masking etching or by means of laser ablation.
  • the second layer 9 can be manufactured by means of screen printing, stencil printing, dispensing, inkjet or aerosoljet.
  • the glass substrate 12 is irradiated in Figure 2 from below with the sun 15 of the sun 14.
  • the glass substrate 12 may be provided with an antireflection surface 13 in the form of a prism surface or antireflection coating.
  • the photovoltaically generated voltage of typically about 0.4 volts can be tapped at the busbars 10, 11 with the contacting 4, 5.
  • the glass substrate 2 is usually used in the form of a tempered float glass or the like in the form of a tempered glass (TVG) or an E-pane safety glass (ESG).
  • TVG tempered glass
  • ESG E-pane safety glass
  • a low-iron white glass or solar glass are preferably used.
  • FIG. 3 shows a schematic cross-section through a thin-film PV multi-cell 2 consisting of three series-connected single cells 16, 17, 18.
  • the additional metallic layer 9 can be omitted and the metallic one Layer 8 can take over the series connection (not shown in detail).
  • the number of series connected in series can be adapted to the respective application.
  • busbars 10, 11 can be applied before the attachment of the TCO layer ⁇ .
  • the busbar 11 can also be dispensed with in principle if the metallically highly conductive second layer 9 assumes the busbar function, as shown in FIG.
  • Figure 4 shows a schematic plan view of a
  • Thin film PV-Syster ⁇ in series 19 in series 19.
  • elongated cells 16, 17, 18 are used in series as set forth in FIG.
  • the number of cells can be tuned to the particular application and the required voltage. The narrower the individual cells are carried out, the lower the requirements placed on the electrical conductivity of the TCO layer 6. Also on the electrical conductivity of the layers 8, 9 then less demands are made.
  • Figure 5 shows a schematic plan view of a thin film PV system in series and parallel connection (20).
  • the vertically drawn cells 16, 17, 18 are separated in cell lines 22, 23, 24, 25 and the cell lines 22,
  • the number of columns 16, 17, 18 and the number of lines 22, 23, 24, 25 can be adapted to the respective application.
  • the Ge total voltage that can be tapped at the contacts 4, 5, is determined by the number of columns 16, 17, 18, that is, the number of cells connected in series.
  • the individual cells have to be prepared very uniformly and with little scattering in the essential parameters, since there is the danger of backward thrusts and concomitant destruction of cells.
  • Figure 6 shows a schematic plan view of a
  • bypass diodes 26 in series connected cells 22, 23,
  • the protective diodes or bypass diodes 26 are shown on the glass substrate.
  • these diodes 26 may be contacted directly on the glass in the form of SMD diodes 26, but they may also be applied to the glass in a flash and, in this case, the individual cells connected in series would have to be provided with separate contacts.
  • FIG. 7 shows a schematic cross section through a thin-film PV double cell 27.
  • the thin-film PV arrangement using the Schot ⁇ ky diode effect and the possible pairings semiconductor to metal only low voltages can be achieved.
  • TCO-TiO 2 (n-doped) -Pt about 0.4 volts are generated photovoltaic. Such voltages are too low for many applications and usually cause high currents, which are difficult to process with conventional thin-film structures.
  • the double cell arranged in z-direction is a relatively simple way to increase the cell voltage through the series connection of these two superimposed cells and of course the efficiency, the additional costs Ratio are considered low.
  • a second TCO layer 28 is additionally arranged on the first metal layer 8 of the first cell for the purpose of improving the electrical conductivity and on this layer the second semiconductive layer 29 and the second metal layer 30 are arranged and the previously usual electrically good conductive second metal layer 9 is performed as in the single cell to the contact 5 or a possible busbar 11.
  • the preferred semiconducting nanoscale TiO 2 layers have a good absorption in the UV range, in the choice of the metallic layers the lowest possible UV absorption is to be respected, or to increase the efficiency a glass substrate 12 with the lowest possible UV absorption selected.
  • the thickness of the first and the second and optionally the third semiconducting layer 7, 29 can be adapted to a uniform energy yield, so that the individual.
  • the multi-cell stacked variants can also be used in series and parallel circuit systems.
  • FIG. 8 shows a schematic cross section through a thin-film PV arrangement in the form of a laminate composite with an adhesive composite film 38.
  • an adhesive film 38 in the form of an ethylene vinyl acetate (EVA) film or a polyvinyl butyral (PVB) film is provided for lamination to a back substrate 39.
  • EVA films having a polymeric sandwich laminate 39 and a relatively simple table bleacher are commonly used in the facade glass sector Typically at least 370 microns thick or twice and three times as thick PVB films used in conjunction with a glass substrate 39.
  • the sandwich laminate 39 may in this case a -Laminate "off" eiriex 'thin PVF film with a thin PET film and it can be also a thin aluminum film may be interposed therebetween as a water vapor barrier layer.
  • a typical example of such a film is a ⁇ cosolar film from Isovolta called.
  • the advantage of using such a backside substrate 39 is lower weight compared to a 3 to 6 mm thick glass and in the simpler La ⁇ nier perspectives.
  • the glass substrate 39 is used in the form of an at least partially tempered glass (TVG) or a toughened safety glass (ESG).
  • TVG at least partially tempered glass
  • ESG toughened safety glass
  • FIG. 9 shows a schematic cross section through a thin-film PV arrangement in an insulating glass composite with a rear glass pane 31.
  • the thin-film PV array is arranged on the level 2, ie the inside of the glass pane 12.
  • the thin-film PV array can also be arranged on the level 3, ie the inside of the glass pane 31, but then reflects the Inside the disc 12 light and would be this side with a
  • Antireflection layer too " provided too strong Reduction of the incoming sun rays 15 of the sun 14 to avoid.
  • the insulating glass composite of two glass panes 12, 31 is produced according to the prior art, ie with a running spacer profile 32 with desiccant 33 filled therein and with openings 36 in the spacer to the insulating glass interior 37.
  • the spacer is bonded to the two sheets of glass 12, 31 with a prearear sealant 34 such as butylene or polyisobutylene (PIB) and circumferentially sealed with a secondary sealant 35.
  • a prearear sealant 34 such as butylene or polyisobutylene (PIB)
  • PIB polyisobutylene
  • Silicone or polydimetylsiloxanes (PDMS) or polyurethanes (PU) or polysulfide (PS) can be used as the secondary sealing agent 35.
  • the insulating glass interior 37 may be filled with an inert inert gas such as argon or xenon or krypton with the pressure which is also given outside of the insulating glass system.
  • an inert inert gas such as argon or xenon or krypton
  • connections 4, 5 can also be made in multiple designs by means of the bus bar system 10, 11. It is important to ensure that there is no water vapor diffusion between the busbar lines and the glass. Further, should be less than the primary and secondary sealants 34, 35, all layers 6, I 1 8, 28, 29, 30 are removed, since such layers can be infiltrated and can occur a diffusion 'of water vapor in the insulating interior 37th
  • Syster ⁇ s may replace the glass 12 by a composite security Glass thin film PV system as outlined in Figure 8 can be used.
  • FIG. 10 shows a current-voltage characteristic of a flat doped TiO 2 layer of typically 150 nm on a glass substrate. with TCO coating (Pilkington tea-glass) and a thin platinum Schottky electrode of 20 Layer thickness shown.

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
EP10702684A 2009-02-06 2010-02-05 Verfahren zur herstellung eines dünnschicht-photovoltaik-systems und dünnschicht-photovoltaik-system Withdrawn EP2404326A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009007908A DE102009007908A1 (de) 2009-02-06 2009-02-06 Verfahren zur Herstellung eines Dünnschicht-Photovoltaik-Systems und Dünnschicht-Photovoltaik-System
PCT/EP2010/051406 WO2010089364A2 (de) 2009-02-06 2010-02-05 Verfahren zur herstellung eines dünnschicht-photovoltaik-systems und dünnschicht-photovoltaik-system

Publications (1)

Publication Number Publication Date
EP2404326A2 true EP2404326A2 (de) 2012-01-11

Family

ID=42260326

Family Applications (2)

Application Number Title Priority Date Filing Date
EP10152747A Withdrawn EP2216832A3 (de) 2009-02-06 2010-02-05 Verfahren zur Herstellung eines Dünnschicht-Photovoltaik-Systems und Dünnschicht-Photovoltaik-System
EP10702684A Withdrawn EP2404326A2 (de) 2009-02-06 2010-02-05 Verfahren zur herstellung eines dünnschicht-photovoltaik-systems und dünnschicht-photovoltaik-system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP10152747A Withdrawn EP2216832A3 (de) 2009-02-06 2010-02-05 Verfahren zur Herstellung eines Dünnschicht-Photovoltaik-Systems und Dünnschicht-Photovoltaik-System

Country Status (7)

Country Link
US (1) US8389318B2 (ja)
EP (2) EP2216832A3 (ja)
JP (1) JP2010183083A (ja)
KR (1) KR101112980B1 (ja)
CN (1) CN101834231A (ja)
DE (1) DE102009007908A1 (ja)
WO (1) WO2010089364A2 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102903787A (zh) * 2011-07-29 2013-01-30 刘莹 一种制备肖特基结单面电极太阳能电池铝背电极的设备
BR112014010178A2 (pt) * 2011-10-28 2017-06-27 Univ Georgetown processo e sistema para gerar uma fotorresposta de junções de schottky de mos2
KR101349586B1 (ko) 2012-03-06 2014-01-14 엘지이노텍 주식회사 태양전지 모듈
US9099578B2 (en) 2012-06-04 2015-08-04 Nusola, Inc. Structure for creating ohmic contact in semiconductor devices and methods for manufacture
CN102945891B (zh) * 2012-11-01 2015-07-01 桂林师范高等专科学校 FeS2/Ag2S/TiO2复合薄膜的制备方法
WO2014145348A1 (en) * 2013-03-15 2014-09-18 Nusola Inc. Infrared photovoltaic device
CN103606576B (zh) * 2013-10-21 2016-06-08 溧阳市东大技术转移中心有限公司 一种太阳能电池
US11213848B2 (en) * 2015-12-11 2022-01-04 Vitro Flat Glass Llc Nanoparticle coater
CN106567039B (zh) * 2016-10-17 2019-06-25 中国石油大学(华东) 一种MoS2/Ag/MoS2半导体薄膜材料及其制备方法
CN107731352B (zh) * 2017-07-14 2019-10-18 无锡舒玛天科新能源技术有限公司 柔性电子玻璃透明导电氧化物薄膜电路制备方法
CN112768560A (zh) * 2021-01-07 2021-05-07 成都中建材光电材料有限公司 一种对双玻光伏组件图案刻蚀的方法
CN115075443B (zh) * 2022-08-22 2022-11-29 天津耀皮工程玻璃有限公司 大版面内拼接薄膜bipv建筑幕墙发电玻璃

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3415678A (en) * 1966-05-26 1968-12-10 Melpar Inc Process for producing thin film rectifying junctions with graded cdse-znse film
DE2631880A1 (de) * 1975-07-18 1977-03-31 Futaba Denshi Kogyo Kk Halbleiterbauelement mit schottky- sperrschicht und verfahren zu seiner herstellung
US4139857A (en) * 1975-07-18 1979-02-13 Futaba Denshi Kogyo Kabushiki Kaisha Schottky barrier type solid-state element
US4401839A (en) * 1981-12-15 1983-08-30 Atlantic Richfield Company Solar panel with hardened foil back layer
JPS58207679A (ja) * 1982-05-28 1983-12-03 Toshiba Corp 太陽電池パネルの製造方法
JPS62221167A (ja) * 1986-03-24 1987-09-29 Seiji Wakamatsu 多層型薄膜太陽電池
DE3801989A1 (de) * 1988-01-23 1989-07-27 Licentia Gmbh Isolierglasscheibe
DE4301128A1 (de) * 1993-01-18 1994-07-21 Schueco Int Kg Fassadenelement
DE19951207A1 (de) 1999-10-15 2001-04-19 Twlux Halbleitertechnologien B Halbleiterbauelement
JP2002121683A (ja) * 2000-10-12 2002-04-26 Seiko Epson Corp 酸化チタン膜の製造方法、酸化チタン膜および太陽電池
JP2002314107A (ja) * 2001-04-10 2002-10-25 Seiko Epson Corp 受光層および太陽電池
US7227196B2 (en) * 2003-05-20 2007-06-05 Burgener Ii Robert H Group II-VI semiconductor devices
US20050000565A1 (en) * 2003-05-22 2005-01-06 Tingying Zeng Self-assembly methods for the fabrication of McFarland-Tang photovoltaic devices
DE102004012303B3 (de) 2004-03-11 2005-07-14 Dieter Ostermann Photoelektrochemische Reaktionszelle und Vorrichtung zur Umsetzung von Lichtenergie mit dieser Reaktionszelle
DE102004030411A1 (de) * 2004-06-23 2006-01-19 Kuraray Specialities Europe Gmbh Solarmodul als Verbundsicherheitsglas
EP1684362A3 (en) * 2004-12-02 2006-08-02 Technische Universiteit Delft Process for the production of thin layers, preferably for a photovoltaic cell
JP2006310680A (ja) * 2005-05-02 2006-11-09 Kaneka Corp 薄膜太陽電池モジュール
AU2007214967A1 (en) 2006-02-13 2007-08-23 Solexant Corporation Photovoltaic device with nanostructured layers
EP2140498B1 (en) * 2007-04-18 2018-04-04 Nanoco Technologies Limited Fabrication of electrically active films based on multiple layers
KR100934732B1 (ko) * 2007-06-01 2009-12-30 한국기계연구원 양자점을 이용한 태양전지 및 이의 제조방법
KR20090010500A (ko) * 2007-07-23 2009-01-30 엘지전자 주식회사 칼코게나이드계 화합물 박막을 구비한 태양전지
US8551558B2 (en) * 2008-02-29 2013-10-08 International Business Machines Corporation Techniques for enhancing efficiency of photovoltaic devices using high-aspect-ratio nanostructures
US8592675B2 (en) * 2008-02-29 2013-11-26 International Business Machines Corporation Photovoltaic devices with enhanced efficiencies using high-aspect-ratio nanostructures
DE102008013586A1 (de) 2008-03-11 2009-10-08 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Ausgabe von akustischen Signalen
DE102008001528B4 (de) * 2008-05-02 2018-05-03 Evonik Degussa Gmbh Photovoltaisches Element, Verfahren zu seiner Herstellung und seine Verwendung
US20100236614A1 (en) * 2009-02-06 2010-09-23 Los Alamos National Security, Llc Hybrid photovoltaics based on semiconductor nanocrystals and amorphous silicon

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010089364A2 *

Also Published As

Publication number Publication date
WO2010089364A2 (de) 2010-08-12
JP2010183083A (ja) 2010-08-19
EP2216832A3 (de) 2011-07-06
KR20100090667A (ko) 2010-08-16
WO2010089364A3 (de) 2011-08-04
CN101834231A (zh) 2010-09-15
EP2216832A2 (de) 2010-08-11
US20100200047A1 (en) 2010-08-12
KR101112980B1 (ko) 2012-02-24
DE102009007908A1 (de) 2010-08-12
US8389318B2 (en) 2013-03-05

Similar Documents

Publication Publication Date Title
WO2010089364A2 (de) Verfahren zur herstellung eines dünnschicht-photovoltaik-systems und dünnschicht-photovoltaik-system
EP2855146A1 (de) Dachscheibe mit einem integrierten photovoltaik-modul
EP2758993B1 (de) Dünnschichtsolarmodul mit serienverschaltung und verfahren zur serienverschaltung von dünnschichtsolarzellen
EP0630524A1 (de) Klimastabiles dünnschichtsolarmodul
WO2001039277A1 (de) Diodenstruktur, insbesondere für dünnfilmsolarzellen
DE102009022125A1 (de) Isolierglasverbund mit schräg angeordneten Photovoltaik Zellen und Verfahren zur Herstellung und Anwendung
EP2537065A1 (de) Elektrochrome verglasung mit seriell verschalteten zellen, sowie herstellungsverfahren hierfür
WO2011039000A2 (de) Dünnschicht-bauelement auf glas, ein verfahren zu dessen herstellung und dessen verwendung
EP2855180A1 (de) Dachscheibe mit einem integrierten photovoltaik-modul
EP2850661A1 (de) Heterokontakt-solarzelle und verfahren zu deren herstellung
DE102004032810B4 (de) Photovoltaische Solarzelle mit einer Schicht mit Licht streuenden Eigenschaften und Solarmodul
WO2002037576A2 (de) Halbleitereinrichtung und verfahren zu deren herstellung
WO2020239175A1 (de) Wafer-solarzelle, solarmodul und verfahren zur herstellung der wafer-solarzelle
DE102010017246A1 (de) Solarzellenmodul und Herstellungsverfahren hierfür
DE102011001937A1 (de) Siliziumsolarzelle mit einem Heterojunction-pn-Übergang und Verfahren zu deren Herstellung
DE102013203414A1 (de) Solarmodul und Verfahren zu dessen Herstellung
EP2751850B1 (de) Verfahren zum verbinden von solarzellen
DE102010006681A1 (de) Photovoltaikzelle, Photovoltaikmodul, Verfahren zum Herstellen einer Photovoltaikzelle und eines Photovoltaikmoduls
WO2023193848A1 (de) 3t-tandem-solarzelle, tandem-solarzellenmodul und verfahren zur herstellung
DE102021123652A1 (de) Tandem-Solarzelle
WO2014005802A1 (de) Verfahren zur abdichtung eines kontaktloches eines photovoltaik-moduls
DE102011109079A1 (de) Dünnschicht-Solarzellenmodul und Herstellungsverfahren dafür
EP2442360A2 (de) Verfahren zur Herstellung von Verbindungen in einem Dünnschichtfotovoltaikmodul und Dünnschichtfotovoltaikmodul
DE102009006962A1 (de) Photovoltaikmodul
EP2202803A2 (de) Wirkungsgradoptimierte CdS/CdTe Module

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110708

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20130903