EP2398723A1 - Dispositif de séparation d'éléments en forme de disque - Google Patents

Dispositif de séparation d'éléments en forme de disque

Info

Publication number
EP2398723A1
EP2398723A1 EP10707818A EP10707818A EP2398723A1 EP 2398723 A1 EP2398723 A1 EP 2398723A1 EP 10707818 A EP10707818 A EP 10707818A EP 10707818 A EP10707818 A EP 10707818A EP 2398723 A1 EP2398723 A1 EP 2398723A1
Authority
EP
European Patent Office
Prior art keywords
belt
belt conveyor
section
disc
shaped elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10707818A
Other languages
German (de)
English (en)
Inventor
Boris Matzner
Bernhard Brain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMB Apparate und Maschinenbau GmbH
Original Assignee
AMB Apparate und Maschinenbau GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AMB Apparate und Maschinenbau GmbH filed Critical AMB Apparate und Maschinenbau GmbH
Publication of EP2398723A1 publication Critical patent/EP2398723A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/12—Suction bands, belts, or tables moving relatively to the pile
    • B65H3/124—Suction bands or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00—Feeding articles separated from piles; Feeding articles to machines
    • B65H5/22—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device
    • B65H5/222—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device by suction devices
    • B65H5/224—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device by suction devices by suction belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/30—Orientation, displacement, position of the handled material
    • B65H2301/33—Modifying, selecting, changing orientation
    • B65H2301/332—Turning, overturning
    • B65H2301/3321—Turning, overturning kinetic therefor
    • B65H2301/33214—Turning, overturning kinetic therefor about an axis perpendicular to the direction of displacement and parallel to the surface of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/30—Orientation, displacement, position of the handled material
    • B65H2301/33—Modifying, selecting, changing orientation
    • B65H2301/332—Turning, overturning
    • B65H2301/3322—Turning, overturning according to a determined angle
    • B65H2301/33222—90°
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/30—Orientation, displacement, position of the handled material
    • B65H2301/34—Modifying, selecting, changing direction of displacement
    • B65H2301/342—Modifying, selecting, changing direction of displacement with change of plane of displacement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/40—Type of handling process
    • B65H2301/42—Piling, depiling, handling piles
    • B65H2301/423—Depiling; Separating articles from a pile
    • B65H2301/4237—Depiling; Separating articles from a pile of vertical articles, e.g. by extracting articles laterally from the pile
    • B65H2301/42372—Depiling; Separating articles from a pile of vertical articles, e.g. by extracting articles laterally from the pile by extracting articles upwards from the pile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/40—Type of handling process
    • B65H2301/44—Moving, forwarding, guiding material
    • B65H2301/447—Moving, forwarding, guiding material transferring material between transport devices
    • B65H2301/4473—Belts, endless moving elements on which the material is in surface contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/40—Type of handling process
    • B65H2301/44—Moving, forwarding, guiding material
    • B65H2301/447—Moving, forwarding, guiding material transferring material between transport devices
    • B65H2301/4473—Belts, endless moving elements on which the material is in surface contact
    • B65H2301/44735—Belts, endless moving elements on which the material is in surface contact suction belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/11—Dimensional aspect of article or web
    • B65H2701/111—Plane geometry, contour
    • B65H2701/1111—Geometric shape
    • B65H2701/11112—Geometric shape disk

Definitions

  • the invention relates to a device for separating disc-shaped elements from a stack.
  • the stack is then returned to the belt in the direction of the stacking axis.
  • further belt conveyors are arranged downstream of the first belt conveyor. While the first, provided with the vacuum device belt conveyor is provided for conveying the respective first disc-shaped element from the stack in the vertical direction against gravity, a belt conveyor is arranged below, the conveying direction is inclined by approximately 45 ° relative to the conveying direction of the first belt conveyor. Opposite to the belt of the first belt conveyor, a further belt conveyor is arranged, so that a laterally conveyed off from the stack element between the belt of the first belt conveyor and the other belt conveyor clamped and so transported.
  • the element to be transported After leaving the belt of the first belt conveyor, the element to be transported falls onto the obliquely arranged part of the following belt conveyor. If gravity is insufficient, a scraper is arranged on the further belt conveyor in order to achieve a reliable release of the possibly adhering disk-shaped element.
  • the known conveyor has several disadvantages.
  • only the first belt conveyor is provided until it is transferred to the devices serving for further transport, which sucks the surrounding fluid through a belt provided with holes for releasing the first element of the stack.
  • the other belts of the subsequent transport and conveying devices are not perforated and also have no vacuum devices.
  • the stack is in a liquid bath at this time.
  • negative pressure is just used in the first belt conveyor.
  • the stack is fed lying, so that the conveying direction is perpendicular to the stacking axis and thus the respective first element is lifted out of the liquid bath in the vertical direction. During the entire travel, a secure adherence of the raised disk-shaped element to the belt is required.
  • DE 10 2006 011 870 A1 uses the webbing perforated according to a specific pattern. However, after lifting, adhesion alone or pinching of the disc-shaped elements between two straps is provided for adhesion. The holding forces are therefore very indefinite and it often comes to disruptions in the production process, as a safe transfer to the further-promoting transport devices is not guaranteed.
  • the invention is therefore based on the object to provide a separating device in which disc-shaped elements can be supplied from a stack individually to a further transporting device.
  • the separating device according to the invention for separating disk-shaped elements from a stack according to claim 1 has a first belt conveyor device and a second belt conveyor device.
  • the first belt conveyor device serves to receive in each case a disk-shaped element from a stack
  • the second belt conveyor device serves for the further transport and for the storage of the disk-shaped elements on a further transport device.
  • the first and second belt conveyor devices are connected to a vacuum generating device, such as a vacuum pump. While a first belt of the first belt conveyor has openings of a first cross section, second openings are made in the second belt of the second belt conveyor. The openings of the first
  • Belt conveyor have larger cross-sections than the second openings of the second belt conveyor.
  • the provision of negative pressure devices both in the first belt conveyor device and for the second belt conveyor device ensures that the disc-shaped elements securely adhere to the respective belt. At the same time, it is prevented by the different cross-sections of the openings of the first belt and the second belt, that a drying of the disk-shaped elements, which are taken out of the liquid bath, can occur. Due to the secure adhesion due to the generated negative pressure is the further handling considerably simplified.
  • a premature drop of the disk-shaped elements is avoided before the final deposition on a forwarding transport device, i ⁇ s can take place a targeted storage, as the disc-shaped elements that adhere securely due to the negative pressure on the second belt conveyor, are moved together with the second belt conveyor , For an active storage on the continuing transport device is possible.
  • the openings of the first belt are introduced as recesses in the belt, whereas cuts are made in the second belt to produce the openings.
  • the large openings are advantageous.
  • the vacuum device By means of the vacuum device, relatively large volume flows can pass through the webbing. Accordingly, the suction of the disk-shaped element from the stack takes place with a comparatively high force.
  • the surface of the disk-shaped element threatens to dry. This is undesirable because it can lead to increased rejection. Accordingly, only cuts are introduced as openings in the second webbing.
  • the second belt conveyor device has at least one section which is rotatably arranged.
  • the rotation which takes place in relation to the conveying plane of the first belt conveyor device, allows the disk-shaped element to be taken over at the conveying plane identical to the first belt conveyor device and the disk-shaped element to be deposited in a plane inclined thereto, in particular horizontal.
  • the disk-shaped element is detached from the belt of the portion of the second belt conveyor, which is rotatable, and fed to a further transporting device. This can be done, for example, simply by placing it on a cord drive or another conveyor belt. An uncontrolled tilting so as to deposit the disk-shaped element on a sloping further conveying plane is thus avoided.
  • the rotatable portion is arranged such that, initially in an initial position of the rotatable portion, the conveying plane of the first belt conveyor is parallel to the conveying plane of the rotatable portion of the second belt conveyor.
  • a conveying plane in each case that plane is referred to, in which the contact surface between the belt and disk-shaped element is located.
  • the second, rotated position of the portion of the second belt conveyor is selected so that in this position, the conveying plane at an angle with the conveying plane of the first
  • Belt conveyor includes.
  • the cutting line between these two planes is preferably perpendicular to the two conveying directions.
  • the second belt conveyor device has a first and a second section.
  • the conveying plane of the first section is preferably identical to the conveying plane of the first belt conveyor device, so that in this section the disk-shaped element is transported further in the vertical direction. This initially increases the distance from the liquid pool. This larger can often be necessary because the continuing transport device itself has a certain height.
  • the first belt conveyor device is kept as short as possible. After a complete detachment of the respective first disc-shaped element has taken place from the stack, therefore, a transfer to the second belt conveyor device or its first section will possibly take place as soon as possible.
  • a further vertical conveyance is first carried out by the first section of the second belt conveyor device.
  • the second portion of the second belt conveyor is rotatable.
  • the continuing transport device preferably alone under
  • the rotatable section and the first belt conveyor device are arranged such that the disk-shaped elements are held on different surfaces by the first section and the second section. While the first portion is in contact with a first surface of the wafer, after the transfer to the second portion, a holding force is generated on the second surface of the wafer remote therefrom.
  • the first section and the second section are arranged so far offset from one another that at no time acts a clamping force on the wafer. Rather, promotion takes place on the belt of the first section until the wafer protrudes beyond its end. At this protruding end, a holding force is then applied through the second section.
  • the distance in the transport direction is chosen to be so small that a secure adherence of the wafer to the belt of the first and / or the second section is ensured at all times.
  • the wafer is always in contact with a region in which a negative pressure is generated by the belt.
  • the rotatable portion and the first belt conveyor are arranged such that the disc-shaped members conveyed by the first belt conveyor abut the first surface thereof against the belt and also the disk-shaped ones conveyed by the rotatable portion of the second belt conveyor Abut elements with the same first surface on the belt of the rotatable portion.
  • the second section in a rotated position can assume the function of a further transport device.
  • a transport plane of the further transport device is parallel to the conveying direction of the rotatable section in its rotated position. This is particularly advantageous when the transport plane is oriented horizontally, so that in the rotated position of the wafer can be easily stored on the forwarding transport device.
  • the rotatable section of the second belt conveyor device and the further transport device are in particular also aligned with one another in such a way that the belt of the rotatable section and a conveying device of the further transport device lie opposite one another in the rotated position of the second belt conveyor device. So while in the rotated position, first the wafer still on the belt of the second portion of the second
  • Belt conveyor is held by the negative pressure, the conveying means of the secondary transport device is already arranged on the side facing away from the wafer. If you now dissolve the wafer from the belt, so it can be stored directly on the conveyor of the continuing transport device.
  • a wetting device can be arranged in this area. Since the transport of the disk-shaped elements takes place by holding on different surfaces, the respective free surface of the disk-shaped element can be wetted.
  • a wetting device is preferably provided in the region of the forwarding transport device and the rotatable section.
  • the second belt conveyor device preferably has a movable device for deflecting the belt on a side facing away from the transport side, that is, the surface of the belt that comes into contact with the wafer. While usually the straps run over two rollers and run in a straight line along a guide surface between them, a deflection of the strap can be achieved by means of the movable device. This deformation of the belt causes a disc-shaped element adhering to the belt to come off, provided that a certain flexural rigidity of the element is present. Even with flexurally elastic elements, detachment is supported by such an ideally short impulse.
  • the movable device comprises an elastic element or is formed entirely by the elastic element.
  • This elastic element can be filled with a fluid to increase its volume.
  • the elastic element is arranged in a receiving space of the second belt conveyor. For example, when the volume is increased by filling with a fluid, the volume of the elastic element exceeds the volume of the receiving space. As a result, it partially comes out of the receiving space and leads to a deformation of the belt, which, when the elastic element is not filled, immediately along the open side of the receiving space runs.
  • the enlargement of the elastic element can also be transmitted indirectly to the belt.
  • Fig. 1 is a schematic representation for explaining the basic sequence of the
  • FIG. 2 is an enlarged view of a separator used for singling
  • Fig. 3 is a further enlarged view of
  • FIGS. 2 and 3 shows a schematic illustration of a detail of the singler from FIGS. 2 and 3 for explaining the function of the movable device.
  • FIG. 8A shows a separating nozzle device 200
  • FIG. 8B shows a separation nozzle device 60;
  • FIG. 1 shows a part of a larger installation which is used in the processing of wafers, for example.
  • the term "wafer” is hereby representative of essentially disc-shaped elements. Disc-shaped means that the
  • Extension in a first and a second dimension is considerably larger than in a third dimension.
  • the device 1 separates disc-shaped elements from a stack 2.
  • the stack 2 consists of a plurality of individual disc-shaped elements aligned parallel to one another.
  • the disk-shaped elements are oriented so that the stacking axis, which extends in the conveying direction, which is represented by the arrow, is perpendicular to the individual disk-shaped elements.
  • the stack 2 is placed horizontally in a liquid bath.
  • the term "lying" refers to the position assumed during operation, as indicated by the water line, the stack 2 is completely immersed in a liquid bath, which may be, for example, stress-free or stress-reduced water.
  • a supply device 3 is arranged in the liquid bath.
  • the stack 2 is arranged in unspecified manner on this feeding device 3.
  • the feeding device 3 By means of the feeding device 3, the stack 2 is moved in the direction of the stacking axis toward the actual singler 5.
  • the singler 5 For the sake of clarity, only the essential elements of the singler 5 are shown in FIG. A more detailed description will be explained below with reference to the further Figs. 2-5.
  • the singler 5 has a first belt conveyor 6 and a second belt conveyor 7.
  • the second belt conveyor 7 has a first section 7.1 and a second section 7.2.
  • the first belt conveyor device 6, the first section 7.1 and the second section 7.2 each have their own belt, which, however, is preferably driven together with the other belts. This is one
  • a disk-shaped element conveyed away from the stack 2 in the manner to be described below is transported as far as a further transport device 8.
  • the further transport device 8 transports, as indicated by the arrow C, the scattered disc-shaped elements and can thus for example supply them to a damage detection and sorting station and / or to the further process.
  • the stack 2 is transported with the first surface 4 of the first disc-shaped element to the right in the arrow direction until the first surface 4 rests against the belt of the first belt conveyor 6.
  • the first belt conveyor 6 and the sections 7.1 and 7.2 of the second belt conveyor 7 are each connected to a vacuum pump VP.
  • a vacuum is generated by means of the vacuum pump VP. This negative pressure is generated on a side facing away from the contact surface between the disc-shaped elements and the belt side in the first belt conveyor device 6 or the section 7.1 and the section 7.2.
  • the belt of the first belt conveyor 6 is guided along a guide surface on its side facing the stack 2.
  • a guide surface on its side facing the stack 2.
  • the hole pattern is created by recesses in the belt are introduced. For example, with a uniform pattern, a plurality of circular holes may be punched in the belt.
  • the vacuum pump VP By the vacuum pump VP, the surrounding fluid of the liquid bath is sucked. If the stack 2 is fed so far in the direction of the first belt conveyor 6 that the first surface 4 is in contact with the belt, the openings are closed and due to the resulting negative pressure the first disk-shaped element now adheres to the belt of the first belt conveyor 6.
  • the circulating belt therefore pulls the first disk-shaped element in the direction of the arrow A from the stack 2 and transports it in the direction of the first section 7.1 of the second belt conveyor device 7. Since the second belt conveyor device 7 and thus also the first section 7.1 is connected to the vacuum pump VP, the disk-shaped element is sucked onto the belt here as well.
  • the belt of the first belt conveyor device 6 and the belt of the section 7.1 of the second belt conveyor 7 are offset from each other but arranged with a common conveying plane. This means that the suction of the disk-shaped element takes place on the same side of the disk-shaped element, namely on the side of the first surface 4.
  • the distance in the transport direction A is chosen so that in the region of the transition between the first belt conveyor 6 and the second Belt conveyor 7 takes place for a certain time both an intake by the first belt conveyor 6 and by the second belt conveyor 7.
  • the length of the first belt conveyor 6 is dimensioned approximately so that the transport length, on which the first disk-shaped element is in contact with the belt, is arranged approximately completely in the liquid bath.
  • Vacuum device free surface as it is present in the region of the recesses of the belt of the first belt conveyor 6, therefore does not exist. This prevents that a partial drying of the surface takes place in the region of the recesses.
  • the belt of the first section 7.1 of the second belt conveyor device 7 further transports the disk-shaped element in the vertical direction and with a conveying plane identical to the conveying plane of the first belt conveyor device 6.
  • the transport through the first section 7.1 can be done so far as long as a secure adherence to the belt of the first section 7.1 is ensured.
  • the belt runs in the area in which a plant of the disc-shaped element must be made, also via a guide surface in which there are openings which are connected via a further channel system with the vacuum pump VP.
  • the front edge of the disk-shaped element in the transport direction eventually reaches the end of the belt of the first section 7.1.
  • the second section 7.2 is rotated in Fig. 1 by 90 ° clockwise.
  • the conveying plane of the second section 7.1 now runs parallel to the transport plane of the further transport device 8.
  • the pivot bearing about which the second section 7.2 can be rotated as a rotatable section of the second belt conveyor is positioned so that between the belt of the second section 7.2 and the transport device formed distance is slightly larger than the thickness of the disc-shaped element. This ensures that jamming of the disk-shaped elements, which leads to a mechanical load, is avoided.
  • the deformation of the belt of the second section 7.2 promotes detachment from the belt of the second section 7.2. For this a certain range of motion is required.
  • FIG. 2 once again shows an enlarged view of the singler 5. It is shown once again that initially the first belt conveying device 6 picks up a disk-shaped element 12 represented by way of example.
  • the disc-shaped element 12 is located with a surface in contact with the belt 10 of the first belt conveyor device 6.
  • On the side facing away from this disc-shaped element side of the belt 10 runs on a thakungsflache fitting.
  • the recesses are arranged, which are connected via a line system with the vacuum pump VP.
  • the belt 10 is the same endless conveyor belt and stretched between two rollers.
  • the rollers are rotatably mounted in a first pivot bearing 11.1 and a second pivot bearing 11.2, wherein one of the rollers is connected to a drive system, not shown in the figure 2.
  • the second belt conveyor 7 has a first section 7.1.
  • an endless trained belt is provided, which is stretched over two rollers.
  • Their pivot bearing 14.1 and 14.2 lie with the two pivot bearings 11.1 and 11.2 on a line.
  • the roller diameters are chosen to be equal, so that the first belt 10 and the second belt 13 have a common conveying plane.
  • a disc-shaped element is shown in Figure 2, which is at a later date alone in contact with the belt 13 of the first section 7.1.
  • the disc-shaped element 12 ' is with its first surface 25 in abutment against the belt 13.
  • the remote therefrom second surface 26 is free and can be protected by a wetting device, not shown in FIG. 2, for example, from drying out.
  • the need to provide such a wetting device depends on the particular application.
  • the straps 10 and 13 are driven synchronously, so that a further promotion in the direction of the arrow A is carried out by the second belt conveyor device 7 or first of its first section 7.1.
  • the disk-shaped element is in the position indicated by 12 ".
  • the second section 7.2 also has a first pivot bearing 16.1 and a second pivot bearing 16.2.
  • the two pivot bearings 16.1 and 16.2 in turn store rollers with which a belt 15 of the second section 7.2 is tensioned and driven.
  • the second section 7.2 is arranged to be rotatable about the first pivot bearing 16.1 in total.
  • the conveying plane can preferably be rotated by about 90 °.
  • the rotation through 90 ° is not intended to limit the present invention. This comes about because the further transport device 8, which will be explained below, with respect to the conveying plane of the first belt conveyor device 6 and the first portion 7 is rotated by 90 °.
  • the second section 7.2 is arranged so that the conveying plane of the second section 7.2 parallel to the conveying plane of the first
  • the conveying plane is the plane defined by the belt surface in contact with the disk-shaped element 12.
  • the conveying planes of the second section 7.2 and the first section 7.1 in this case have such a distance, which makes it possible to take over the disc-shaped element 12 without deformation. While towards the end of the transport path of the first section 7.1 a protruding part on the front in the transport direction edge of the disc-shaped element 12 '' is already held by the negative pressure on the belt 15 of the second section 7.2, the more in the direction of the trailing edge, in the transport direction seen, the disc-shaped member facing part held by the first section 7.1.
  • the entire section 7.2 is about the first pivot bearing 16.1, as shown by the arrow in FIG is, turned.
  • the second surface 26 of the disk-shaped element 12 is applied, after rotation, the first surface 25 is oriented parallel to a transport surface 20 of a conveying means 18 of the secondary transport device 8, as shown in Fig. 3.
  • the disk-shaped element 12 can now be deposited on the conveyor 18.
  • the conveyor 18 can either by another belt conveyor or z. B. be realized by a cord drive.
  • Vacuum lines that can be connected to the vacuum pump VP a movable wiring 17 is provided, which is known per se and therefore requires no further explanation.
  • the wiring 17 may also contain the vacuum lines in addition to electrical lines. Another routing is also conceivable.
  • the wetting device has a plurality of nozzles 23 and 24. A part of the nozzles, in Fig. 2, for example, the nozzle 23, is oriented so that the first surface 25 of the disk-shaped element 12 '' is wetted. By contrast, the second nozzle 24 is aligned so that the second surface 26 of the disk-shaped element 12 can be wetted in the further transport path. Since the further transport device 8 does not contain a vacuum device, the drying of the surface resting on the conveyor 18 is considerably less critical on the further transport path than in the areas where it is necessary to work with negative pressure.
  • the conveyor 18 of the secondary transport device 8 is also a belt conveyor in the illustrated embodiment and runs over rollers which are rotatably mounted in a first pivot bearing 19.1 and a second pivot bearing 19.2.
  • FIG. 4a the second section 7.2 is already in its rotated position. In this position, the disc-shaped element 12 leading part of the belt 15 is already arranged parallel to a transport plane 20 of the conveyor 18. However, the belt is so far away from the conveyor 18 that the disc-shaped element 12 '' is not trapped between the two demanding parts.
  • the receiving space 28 may be formed, for example, in the form of a groove which is open towards the demanding side of the belt 15, and extends substantially across the width of the belt 15.
  • an elastic member 27 In this receiving space 28 is formed as a movable device, an elastic member 27.
  • the elastic member 27 is hollow and can be filled with a fluid. As long as the elastic element 27 is not filled, its outer dimensions are chosen so that it is completely arranged in the receiving space 28.
  • the belt may run flat over the open side of the groove and extend adjacent to the leading part of the section 7.2 through the vacuum device.
  • the elastic element 27 is filled.
  • a compressible medium can be used or an incompressible medium.
  • the use of a compressible medium has the advantage that the vacuum pump can be used simultaneously to fill the elastic element 27.
  • the volume of the elastic element 27 increases. Since the size in the unfilled state of the elastic element 27 is already designed such that the receiving space 28 is largely utilized, the increase in volume leads to a leakage of a part of the elastic element 27 on the open side of the receiving space 28.
  • FIG. 5 again shows a view from the left side of the singler 5 in FIGS. 1-3, wherein the second section 7.2 is in its starting position.
  • the belt 10 of the first belt conveyor 6 has openings 30, through which even the outlets of the channels provided for generating the negative pressure can be seen in the middle region.
  • the cuts 31 in the belt 15 are indicated only schematically. For better clarity, no cuts can be seen in the belt 13 of the first section of the second belt conveyor 7.
  • the first belt 10 of the first belt conveyor device 6 and the second belt 13 of the first section 7.1 of the second belt conveyor device 7 by means of a common Drive 33 are driven.
  • the mechanical operation has the advantage of being able to ensure a high degree of repeat accuracy and process stability with respect to the cycled rotational movement from the starting position into the rotated position and back again.
  • Belt conveyor 7 is provided. Instead of the second section 7.2, the alternativeVERzeier 5 'an alternative second section 7.2' on.
  • the alternative second section 7.2 also has the first pivot bearing 16.1 and the second pivot bearing 16.2.
  • the two pivot bearings 16.1 and 16.2 store in the alternative verzeier 5 'rollers with which the belt 15 of the alternative second section 7.2' is stretched and driven.
  • the alternative second section 7.2 ' is rotatably arranged overall around the first pivot bearing 16.1.
  • the conveying plane which is arranged vertically in the illustrated case perpendicular to the plane of the drawing and in the image, preferably by about 90 ° according to arrow D are rotated.
  • the conveying plane of the alternative second section 7.2 ' is identical in the illustrated case with the conveying plane of the first belt conveyor device 6 and in particular also of the first section 7.1'.
  • the conveying level can be from the Starting position shown by about 90 ° clockwise and rotated according to arrow D.
  • Transport device 8 ' is. It should also be noted here that the 90 ° rotation is not intended to be a limitation of the present invention. It can e.g. Also smaller or larger angles can be used.
  • the first pivot bearing 16.1 of the alternative second section 7.2 ' is displaced relative to the first pivot bearing 16.1 of the second section 7.2.
  • the pivot bearings 16.1, 14.1, 14.2, 11.1 and 11.2 are also aligned parallel to each other.
  • the alternative second section 7.2 ' is arranged in FIG. 6 such that the conveying plane of the alternative second section 7.2' is identical to the conveying plane of the first belt conveyor device 6 or of the first section 7.1.
  • the conveying planes of the alternative second section 7.2 'and of the first section 7.1 also coincide and have the same orientation, as a result of which the contact surfaces are located on the left-hand sides of the first section 7.1 and the alternative second section 7.2' in FIG.
  • the first belt conveyor 6, the first section 7.1 and the alternative second section 7.2' each have their own belt.
  • the belts may optionally be driven together, as in singler 5, or separately, so that each belt has an individual speed.
  • Using the vacuum pump VP is also on one of the contact surface between the disc-shaped Elements and the belt 15 side facing away from the belt 15 in the alternative second section 7.2 'generates a negative pressure.
  • the belt of the alternative second section 7.2 'lsc may also be slightly different, and due to the negative pressure generated by the vacuum pump VP, a secure adhesion of the disk-shaped elements is achieved.
  • the first strap 10 of the first Gurtfordervoruze 6 further comprises the first openings 30, while the second strap 15 of the second Gurtfordervorides 7 further has second openings.
  • the opening cross sections of the second openings are smaller in this case than the opening cross sections of the first openings.
  • the first openings 30 of the first belt are introduced as recesses in the belt 10.
  • the second openings in the second belt are introduced as cuts 31.
  • the front edge of the disk-shaped element in the transport direction reaches the end of the first section 7.1.
  • the front edge of the disk-shaped element in the transport direction now comes to rest on the side adjacent to the belt of the first section 7.1 in contact with the belt of the alternative second section 7.2 '. Due to the negative pressure generated there is now a safe
  • the alternative second section is 7.2 by 90 °
  • the alternative second section 7.2 needs no means for deflecting the belt 15, since the storage takes place by rotation of the second section using gravity and no transfer is required when depositing.
  • the alternative second section 7.2 'therefore has no device for deflecting the belt 15 in the exemplary embodiment shown.
  • a dicing nozzle apparatus 200 and a retaining nozzle apparatus 60 are disposed.
  • the singulating nozzle device 200 is above the stack 2 arranged.
  • the retaining nozzle device 60 is arranged starting from the stack 2 directly behind the first belt conveyor 6.
  • the singulation nozzle device 200 has a plurality
  • Singling nozzles 200.1 - 200.4 which open above the stack 2 in the liquid bath.
  • the separating nozzles 200.1 - 200.4 are arranged so that the liquid jets lead to a spacing of the disk-shaped elements in the stack 2.
  • the separating nozzles 200.1 - 200.4 are oriented such that the liquid jets run at least partially substantially parallel to the disk-shaped elements.
  • the singling nozzles 200.1 - 200.4 are at the same time also oriented so that the liquid jets also have components perpendicular to the disk-shaped elements and thus parallel to the conveying direction of the stack 2. As a result, liquid is brought between the disk-shaped elements in a simple manner.
  • an auxiliary nozzle 200.5 is formed in the separating nozzle device 200.
  • the auxiliary nozzle 200.5 also opens into the liquid bath.
  • a liquid jet generated in the liquid bath by the auxiliary nozzle 200.5 conveys liquid in the liquid bath perpendicular to the disk-shaped elements and thus parallel to the conveying direction of the stack 2. This liquid jet already opposes the first belt conveyor 6 at least partially by the first belt conveyor 6 conveyed disc-shaped elements.
  • Retaining nozzle device 60 is U-shaped, with the plane in which U is perpendicular in FIG. 8A is oriented to the plane and parallel to the conveying direction of the stack 2.
  • the U comprises - as shown in the plan view of FIG. 8B - the first belt conveyor device 6.
  • the retention nozzle device 60 comprises at least two retention nozzles 60.1, 60.2 - at each end of the U each one -, which open into the liquid bath and generate liquid jets in the liquid bath , which press disc-shaped elements against the stack 2, which are directly adjacent those disc-shaped elements which are in direct contact with the first belt conveyor 6 and are removed by the latter just the stack 2.
  • the liquid jets of the retaining nozzles 60.1, 60.2 have components parallel to the conveying direction of the stack 2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Structure Of Belt Conveyors (AREA)

Abstract

L'invention concerne un dispositif de séparation d'éléments en forme de disque provenant d'une pile (2). Le dispositif présente un premier dispositif de transport à courroie (6) et un second dispositif de transport à courroie (7). Le premier dispositif de transport à courroie (6) est conçu pour recevoir respectivement un élément en forme de disque provenant d'une pile (2). Le second dispositif de transport à courroie (7) est conçu pour le transport ultérieur et pour le dépôt des éléments en forme de disque sur un dispositif de transport supplémentaire (8). Le premier et le second dispositif de transport à courroie (6, 7) sont reliés à un dispositif (VP) générant une dépression. Une première courroie du dispositif de transport à courroie (6) présente des premières ouvertures et une seconde courroie du second dispositif de transport à courroie (7) présente des secondes ouvertures. Les sections transversales des secondes ouvertures sont inférieures aux sections transversales des premières ouvertures.
EP10707818A 2009-02-20 2010-02-19 Dispositif de séparation d'éléments en forme de disque Withdrawn EP2398723A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009009917 2009-02-20
PCT/EP2010/001068 WO2010094502A1 (fr) 2009-02-20 2010-02-19 Dispositif de séparation d'éléments en forme de disque

Publications (1)

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EP2398723A1 true EP2398723A1 (fr) 2011-12-28

Family

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EP10707818A Withdrawn EP2398723A1 (fr) 2009-02-20 2010-02-19 Dispositif de séparation d'éléments en forme de disque

Country Status (6)

Country Link
US (1) US20120048679A1 (fr)
EP (1) EP2398723A1 (fr)
CN (1) CN102369151A (fr)
DE (1) DE102010008619A1 (fr)
TW (1) TW201102337A (fr)
WO (1) WO2010094502A1 (fr)

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Publication number Priority date Publication date Assignee Title
DE102010045098A1 (de) * 2010-09-13 2012-03-15 Rena Gmbh Vorrichtung und Verfahren zum Vereinzeln und Transportieren von Substraten
TWI624424B (zh) * 2015-12-16 2018-05-21 理光股份有限公司 片材分離裝置、片材分離方法、程式、影像形成裝置及非暫時性電腦可讀取儲存媒體
CN109551650A (zh) * 2017-09-26 2019-04-02 天津环鑫科技发展有限公司 一种硅片水中分片机构

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NL112117C (fr) * 1960-07-30
US5336041A (en) * 1992-03-12 1994-08-09 Graphic Management Associates, Inc. Storage and retrieval device and method for imbricated planar articles
TW391895B (en) * 1998-10-02 2000-06-01 Ultra Clean Technology Asia Pt Method and apparatus for washing and drying semi-conductor devices
US6277234B1 (en) * 1999-06-01 2001-08-21 Lucent Technologies, Inc. Method and apparatus for removing work pieces adhered to a support
US6442914B1 (en) * 1999-11-29 2002-09-03 Rapid Automated Systems, Inc. Tagging system for inserting tags into plant containers
FI111100B (fi) * 2000-01-31 2003-05-30 Outokumpu Oy Hihna jatkuvatoimiseen materiaalipatjan lämpökäsittelyyn
US6595350B1 (en) * 2000-02-03 2003-07-22 Bowles Fluidics Corporation Bladder conveyor systems and method
US6638553B2 (en) * 2001-10-09 2003-10-28 Recot, Inc. System and method for monolayer alignment snack chip transfer
JP3739752B2 (ja) * 2003-02-07 2006-01-25 株式会社 ハリーズ ランダム周期変速可能な小片移載装置
DE102006011870B4 (de) 2006-03-15 2010-06-10 Rena Gmbh Vereinzelungsvorrichtung und Verfahren zur stückweisen Bereitstellung plattenförmiger Gegenstände

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US20120048679A1 (en) 2012-03-01
TW201102337A (en) 2011-01-16
DE102010008619A1 (de) 2010-08-26
WO2010094502A1 (fr) 2010-08-26
CN102369151A (zh) 2012-03-07

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