EP2378125A3 - Appareil de pompe à vide à sec - Google Patents

Appareil de pompe à vide à sec Download PDF

Info

Publication number
EP2378125A3
EP2378125A3 EP11003265.3A EP11003265A EP2378125A3 EP 2378125 A3 EP2378125 A3 EP 2378125A3 EP 11003265 A EP11003265 A EP 11003265A EP 2378125 A3 EP2378125 A3 EP 2378125A3
Authority
EP
European Patent Office
Prior art keywords
outlet port
vacuum pump
dry vacuum
check valve
pump apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11003265.3A
Other languages
German (de)
English (en)
Other versions
EP2378125A2 (fr
EP2378125B1 (fr
Inventor
Kazuma Ito
Katsuaki Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2010096543A external-priority patent/JP2011226368A/ja
Priority claimed from JP2010096541A external-priority patent/JP5393577B2/ja
Priority claimed from JP2010096542A external-priority patent/JP2011226367A/ja
Priority claimed from JP2010096545A external-priority patent/JP5524691B2/ja
Priority claimed from JP2010096544A external-priority patent/JP5595782B2/ja
Priority to EP21157362.1A priority Critical patent/EP3842642B1/fr
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to EP18198549.0A priority patent/EP3447297B1/fr
Publication of EP2378125A2 publication Critical patent/EP2378125A2/fr
Publication of EP2378125A3 publication Critical patent/EP2378125A3/fr
Publication of EP2378125B1 publication Critical patent/EP2378125B1/fr
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/061—Silencers using overlapping frequencies, e.g. Helmholtz resonators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/02—Rotary-piston machines or pumps of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F04C2/165—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type having more than two rotary pistons with parallel axes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/30—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C2/34—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members
    • F04C2/344—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/122—Arrangements for supercharging the working space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP11003265.3A 2010-04-19 2011-04-18 Appareil de pompe à vide à sec Active EP2378125B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18198549.0A EP3447297B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche
EP21157362.1A EP3842642B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2010096543A JP2011226368A (ja) 2010-04-19 2010-04-19 排気ユニット、及びドライ真空ポンプ装置
JP2010096544A JP5595782B2 (ja) 2010-04-19 2010-04-19 ドライ真空ポンプ装置
JP2010096545A JP5524691B2 (ja) 2010-04-19 2010-04-19 複合型サイレンサ、及びドライ真空ポンプ装置
JP2010096542A JP2011226367A (ja) 2010-04-19 2010-04-19 ドライ真空ポンプ装置
JP2010096541A JP5393577B2 (ja) 2010-04-19 2010-04-19 ドライ真空ポンプ装置、及び排気ユニット

Related Child Applications (3)

Application Number Title Priority Date Filing Date
EP21157362.1A Division EP3842642B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche
EP18198549.0A Division EP3447297B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche
EP18198549.0A Division-Into EP3447297B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche

Publications (3)

Publication Number Publication Date
EP2378125A2 EP2378125A2 (fr) 2011-10-19
EP2378125A3 true EP2378125A3 (fr) 2014-11-26
EP2378125B1 EP2378125B1 (fr) 2018-11-14

Family

ID=44070010

Family Applications (3)

Application Number Title Priority Date Filing Date
EP18198549.0A Active EP3447297B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche
EP21157362.1A Active EP3842642B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche
EP11003265.3A Active EP2378125B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide à sec

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP18198549.0A Active EP3447297B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche
EP21157362.1A Active EP3842642B1 (fr) 2010-04-19 2011-04-18 Appareil de pompe à vide sèche

Country Status (4)

Country Link
EP (3) EP3447297B1 (fr)
KR (1) KR101804422B1 (fr)
CN (1) CN102220981A (fr)
TW (1) TWI518245B (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101385954B1 (ko) * 2012-11-14 2014-04-16 데이비드 김 다단형 건식 진공펌프
CN105822889B (zh) * 2015-01-26 2021-01-29 吴小平 一种圆缺转子变容油泵
CN106762649A (zh) * 2015-11-23 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的排气结构
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
CN107288878B (zh) * 2017-08-18 2020-04-10 珠海格力电器股份有限公司 消声器及压缩机
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
KR102376859B1 (ko) * 2020-09-28 2022-03-22 주식회사 플랜 반도체 제조 설비의 배기 유체 처리 시스템 및 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003278680A (ja) * 2002-03-26 2003-10-02 Aisin Seiki Co Ltd 多段式真空ポンプ装置
EP1536140A1 (fr) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Pompe à vide sèche à étages multiples
US20070048162A1 (en) * 2005-08-24 2007-03-01 Kashiyama Industries, Ltd. Multistage root type pump
JP2008008302A (ja) * 2001-09-06 2008-01-17 Ulvac Japan Ltd 多段式容積移送型ドライ真空ポンプの省エネ方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749008A (en) * 1980-09-09 1982-03-20 Toyota Motor Corp Muffler
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
JPH0688595A (ja) * 1991-02-28 1994-03-29 Hitachi Ltd 渦流ブロワ
DE69625401T2 (de) 1995-03-20 2003-10-30 Ebara Corp Vakuumpumpe
JPH09287432A (ja) * 1996-04-24 1997-11-04 Toyota Motor Corp 内燃機関のマフラー
US6068455A (en) * 1997-03-20 2000-05-30 B/E Aerospace Long life pump system
JPH11315794A (ja) 1998-05-01 1999-11-16 Kashiyama Kogyo Kk 冷却機構付スクリュードライ真空ポンプ
JP2001289167A (ja) 2000-04-07 2001-10-19 Orion Mach Co Ltd 真空ポンプの消音器
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
JP4747437B2 (ja) * 2001-05-08 2011-08-17 株式会社豊田自動織機 真空ポンプにおける油洩れ防止構造
JP3673743B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 スクリュー式真空ポンプ
JP3758550B2 (ja) 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
WO2004083643A1 (fr) * 2003-03-19 2004-09-30 Ebara Corporation Pompe volumetrique a vide
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
GB0324068D0 (en) * 2003-10-14 2003-11-19 Boc Group Plc Improvements in pumping efficiency
GB0515905D0 (en) * 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
FR2923556A1 (fr) 2007-11-09 2009-05-15 Alcatel Lucent Sas Unite de pompage et dispositif de chauffage correspondant
US8662869B2 (en) * 2007-11-14 2014-03-04 Ulvac, Inc. Multi-stage dry pump
JP5438279B2 (ja) * 2008-03-24 2014-03-12 アネスト岩田株式会社 多段真空ポンプ及びその運転方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008008302A (ja) * 2001-09-06 2008-01-17 Ulvac Japan Ltd 多段式容積移送型ドライ真空ポンプの省エネ方法
JP2003278680A (ja) * 2002-03-26 2003-10-02 Aisin Seiki Co Ltd 多段式真空ポンプ装置
EP1536140A1 (fr) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Pompe à vide sèche à étages multiples
US20070048162A1 (en) * 2005-08-24 2007-03-01 Kashiyama Industries, Ltd. Multistage root type pump

Also Published As

Publication number Publication date
EP3842642B1 (fr) 2022-09-14
KR101804422B1 (ko) 2017-12-04
EP2378125A2 (fr) 2011-10-19
EP3842642A1 (fr) 2021-06-30
CN102220981A (zh) 2011-10-19
EP3447297A1 (fr) 2019-02-27
EP2378125B1 (fr) 2018-11-14
TW201207241A (en) 2012-02-16
TWI518245B (zh) 2016-01-21
KR20110116992A (ko) 2011-10-26
EP3447297B1 (fr) 2021-02-17

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