EP2344769A1 - Vakuumpumpenrotor - Google Patents
VakuumpumpenrotorInfo
- Publication number
- EP2344769A1 EP2344769A1 EP09782947A EP09782947A EP2344769A1 EP 2344769 A1 EP2344769 A1 EP 2344769A1 EP 09782947 A EP09782947 A EP 09782947A EP 09782947 A EP09782947 A EP 09782947A EP 2344769 A1 EP2344769 A1 EP 2344769A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- vacuum pump
- elements
- projection
- pump rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
Definitions
- the invention relates to a vacuum pump rotor, in particular a turbomolecular pump rotor.
- Vacuum pump rotors as used in particular in turbomolecular pumps, have a plurality of rotor disks arranged parallel to one another and connected to a rotor shaft. Since this is to be manufactured extremely accurately in close tolerances component, such pump rotors are often formed in one piece. The manufacture of the rotor disks, including the rotor blades having a complex geometry, takes place here from the solid. Such a production of vacuum pump rotors is extremely complex and time consuming. Furthermore, there is a high material removal, so that high material and tooling costs arise.
- pump rotors are known in which rotor disks are shrunk onto a rotor shaft designed as a hollow or solid shaft. This has the advantage that the individual rotor disks, in particular the Rotorfiügel the rotor disks can be easily made.
- rotors build relatively large, since the realization of the required stability of the rotor, the diameter of the period must be relatively large. Further a bell-shaped shape of the rotor in the bladed area is not possible.
- the object of the invention is to provide a multi-part vacuum pump rotor with improved construction.
- the vacuum pump rotor according to the invention which is in particular a rotor for a turbomolecular pump, has a plurality of separate rotor elements, so that the rotor disks and the rotor shaft are not formed in one piece.
- Each of the rotor elements has a plurality, preferably a single rotor disk.
- the rotor disk is preferably annular and has a cylindrical projection on its inside.
- the approach forms a shaft portion of the rotor.
- the projections forming the shaft sections are connected to one another, in particular by shrinking methods, so that the projections form a rotor shaft.
- the rotor shaft is then surrounded in each case by rotor disks connected to the individual lugs. Since the Rotorweüe is formed by the projections of the rotor elements, a separate rotor shaft can be omitted. As a result, the space of the pump rotor can be kept low.
- an inner joining surface of a projection of a first rotor element bears against an outer joining surface of a projection of an adjacent rotor element. It is particularly preferred that the next rotor element is then formed at least with respect to the approach corresponding to the first rotor element, so that this rests with its inner joining surface on an outer joining surface of the preceding arranged between the two rotor elements rotor element.
- each identical rotor elements can alternately be arranged so that rotor elements are alternately provided with a innenigende and an outer approach. The provision of particularly identical rotor elements has the advantage that the manufacturing costs can be significantly reduced.
- the projections of the rotor elements are preferably designed such that they protrude from the rotor disk in both directions, wherein projections of adjacent rotor elements each overlap at least partially.
- the rotor elements at the ends of the rotor have no outwardly facing lugs, this being appropriate for reasons of symmetry of the individual rotor element is expedient to avoid shrinkage during deformation of the rotor disk in the axial direction of the rotor or twisting the rotor disk.
- the end elements of the rotor may also have a different structure.
- the rotor elements are preferably mirror-symmetrical in the region of the projections to a center plane.
- the median plane is the plane passing through the rotor center and perpendicular to the rotor longitudinal direction.
- an example bell-shaped rotor carrier may be connected to the first rotor element.
- the rotor carrier is preferably also connected to the rotor element by shrinking.
- the rotor carrier can be designed in accordance with a rotor element, but in a preferred embodiment has a special design. This can for example consist in that the rotor carrier has a suitable guide or receptacle for a connection to the drive shaft.
- the rotor carrier is connected to at least one rotor disk, in particular integrally formed therewith.
- the rotor carrier is in particular, if it is a Turbomolekularpumpenr ⁇ tor preferably arranged on the inlet side of the rotor. With the last, ie in the direction of the outlet side last arranged rotor elements, a further pumping element, such as a drag stage can be connected. This connection can also be made by shrinkage.
- stiffening elements such as reinforcements, which may in particular be made of CFRP, are connected to at least some of the rotor elements.
- the stiffening elements are preferably connected to a free outer surface of the neck, i. a surface that does not abut a shoulder of an adjacent rotor element connected.
- the stiffening elements are annular and surround the entire approach.
- an inner diameter of the lugs which is arranged near the rotor disk has a smaller diameter than a region of the lug which is more remote from the rotor disk. Starting from the rotor disk, the approach is thus preferably formed obliquely or conically outward
- Figure 1 is a schematic sectional view of a
- Figures 2 and 3 are sections of further embodiments of a rotor element in the region of the approach.
- the vacuum pump rotor shown in FIG. 1 has three rotor elements 10, 12, 10.
- the two rotor elements 10 are formed identically.
- Each rotor element 10, 12 has an annular, cylindrical projection 14, 16.
- the lugs 14, 16 are each connected to a rotor disk 18 having wings with different inner diameters.
- the three rotor elements 10, 12 are connected to each other via a shrinking process.
- an inner joining surface 20 of the projection 14 of the first rotor element 10 is connected to an outer joining surface 22 of the projection 16 of the second rotor element 12.
- the two projections 16, 14 in this case overlap in the axial direction 24 in such a way that the projection 14 rests against an outer side 26 of the rotor disk 18 of the second rotor element 12.
- a further rotor element 10 On the opposite side of the rotor disk 18 of the rotor element 12, a further rotor element 10, the outer dimension of which substantially corresponds to the first rotor element 10, arranged- The corresponding projection 14 overlaps the projection 16 in turn such that it on an outer side 28 of the rotor disk 18 of the second Rotoreiements 12 is present.
- a rotor carrier 30 is connected to the first rotor element 10. This also has a cylindrical, annular projection 32, the outer joining surface 34 rests against the inner joint surface 20 of the first rotor element 10, so that a connection by shrinking process takes place.
- the rotor carrier 30 is formed einstuckig and has two rotor disks 18. Furthermore, the rotor carrier on a central to the longitudinal axis 36 of the rotor symmetrical recess 38. Through the recess 38, the rotor carrier 32 can be connected to a drive shaft.
- the lower rotor element 10 in FIG. 1 is connected to a further rotor element 40 of slightly different geometry.
- the rotor element 40 has a radially outwardly extending body 42, which is in turn connected to the inside with a lug 44.
- An outer joining surface 46 of the projection 44 is connected to an inner joining surface 28 of the projection 14 by shrinking.
- the rotor element 40 also has one ei ⁇ Nativeig connected to the body 42 rotor disk 18.
- the body 42 has an annular receiving surface 50 arranged symmetrically with respect to the longitudinal axis.
- a further pumping element 52 such as a drag stage can also be connected by shrinking.
- the lugs 14, 16, 44 each form white sections which form a rotor shaft in the connected state.
- a separate RotorweiSe on which the rotor elements are shrunk, is not required according to the invention.
- annularly formed stiffening elements 56 are arranged. These may be annular reinforcements made of CFRP.
- FIGS. 2 and 3 Further possibilities to realize a stiffening of the lugs 14 are shown in FIGS. 2 and 3. These serve, in particular, to prevent deforming, such as twisting of the rotor disks 18, during shrinking.
- the free outer surfaces 54 of the lugs 14 are designed such that the diameters relative to the rotor disk are smaller in the near region 58 than in a remote region 60 relative to the rotor disk 2, a conically widening free outer surface 54 thus results.
- a cylindrical step is provided in the distal region 60, which is related to the rotor disk 18, to define a defined edge in the region 60 to ensure.
- Rotoreiemente 10 shown in Figures 2, 3 are formed symmetrically to a median plane 62. In a preferred embodiment, this also applies to the rotor elements 10, 12 according to the embodiment shown in FIG.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14171260.4A EP2775149A1 (de) | 2008-11-07 | 2009-09-14 | Vakuumpumpenrotor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200810056352 DE102008056352A1 (de) | 2008-11-07 | 2008-11-07 | Vakuumpumpenrotor |
PCT/EP2009/061843 WO2010052056A1 (de) | 2008-11-07 | 2009-09-14 | Vakuumpumpenrotor |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14171260.4A Division EP2775149A1 (de) | 2008-11-07 | 2009-09-14 | Vakuumpumpenrotor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2344769A1 true EP2344769A1 (de) | 2011-07-20 |
EP2344769B1 EP2344769B1 (de) | 2014-07-02 |
Family
ID=41343300
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14171260.4A Withdrawn EP2775149A1 (de) | 2008-11-07 | 2009-09-14 | Vakuumpumpenrotor |
EP09782947.7A Not-in-force EP2344769B1 (de) | 2008-11-07 | 2009-09-14 | Vakuumpumpenrotor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14171260.4A Withdrawn EP2775149A1 (de) | 2008-11-07 | 2009-09-14 | Vakuumpumpenrotor |
Country Status (4)
Country | Link |
---|---|
EP (2) | EP2775149A1 (de) |
JP (1) | JP2012508340A (de) |
DE (1) | DE102008056352A1 (de) |
WO (1) | WO2010052056A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009035812A1 (de) * | 2009-08-01 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpenrotor |
EP2722528B1 (de) * | 2011-06-16 | 2018-05-30 | Edwards Japan Limited | Rotorbaugruppe sowie vakuumpumpe damit |
DE102014100622A1 (de) * | 2014-01-21 | 2015-07-23 | Pfeiffer Vacuum Gmbh | Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe |
EP3034880B1 (de) | 2014-12-15 | 2019-10-16 | Pfeiffer Vacuum Gmbh | Rotoranordnung für eine vakuumpumpe und verfahren zur herstellung derselben |
EP3462036B1 (de) * | 2017-10-02 | 2024-04-03 | Pfeiffer Vacuum Gmbh | Turbomolekularvakuumpumpe |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2035063C3 (de) * | 1970-07-15 | 1974-05-30 | Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar | Laufrad für eine Turbomolekularpumpe |
DE2554995A1 (de) * | 1975-12-06 | 1977-06-16 | Pfeiffer Vakuumtechnik | Turbomolekularpumpe |
JPS60203375A (ja) * | 1984-03-28 | 1985-10-14 | Hitachi Ltd | タ−ボ分子ポンプのロ−タの製作方法 |
JPS62265496A (ja) * | 1986-05-12 | 1987-11-18 | Mitsubishi Electric Corp | 動翼付きロ−タ |
JPS62184190U (de) * | 1986-05-16 | 1987-11-21 | ||
JP3160039B2 (ja) * | 1991-08-22 | 2001-04-23 | エヌティエヌ株式会社 | ターボ分子ポンプと動翼の加工方法 |
DE10124339B4 (de) * | 2001-05-18 | 2016-10-27 | Pfeiffer Vacuum Gmbh | Rotorscheiben mit Schaufeln für eine Turbomolekularpumpe |
JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
DE10331932B4 (de) * | 2003-07-15 | 2017-08-24 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
JP2007071139A (ja) * | 2005-09-08 | 2007-03-22 | Osaka Vacuum Ltd | 複合真空ポンプのロータ |
JP2007107480A (ja) * | 2005-10-14 | 2007-04-26 | Ebara Corp | ターボ型真空ポンプ |
-
2008
- 2008-11-07 DE DE200810056352 patent/DE102008056352A1/de not_active Withdrawn
-
2009
- 2009-09-14 EP EP14171260.4A patent/EP2775149A1/de not_active Withdrawn
- 2009-09-14 JP JP2011533646A patent/JP2012508340A/ja active Pending
- 2009-09-14 EP EP09782947.7A patent/EP2344769B1/de not_active Not-in-force
- 2009-09-14 WO PCT/EP2009/061843 patent/WO2010052056A1/de active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of WO2010052056A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2344769B1 (de) | 2014-07-02 |
EP2775149A1 (de) | 2014-09-10 |
DE102008056352A1 (de) | 2010-05-12 |
JP2012508340A (ja) | 2012-04-05 |
WO2010052056A1 (de) | 2010-05-14 |
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