EP2320196A1 - Capteur magnétique - Google Patents

Capteur magnétique Download PDF

Info

Publication number
EP2320196A1
EP2320196A1 EP09802933A EP09802933A EP2320196A1 EP 2320196 A1 EP2320196 A1 EP 2320196A1 EP 09802933 A EP09802933 A EP 09802933A EP 09802933 A EP09802933 A EP 09802933A EP 2320196 A1 EP2320196 A1 EP 2320196A1
Authority
EP
European Patent Office
Prior art keywords
ground
power source
detection
terminal
detection units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09802933A
Other languages
German (de)
English (en)
Other versions
EP2320196A4 (fr
Inventor
Hideto Ando
Tomio ABE
Masayuki Obana
Shuji Maekawa
Naoki Mizutani
Tokuo Nakamura
Yasuyuki Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Publication of EP2320196A1 publication Critical patent/EP2320196A1/fr
Publication of EP2320196A4 publication Critical patent/EP2320196A4/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/091—Constructional adaptation of the sensor to specific applications

Definitions

  • the present invention relates to a magnetic detection device where a plurality of detection units which have a magnetoresistance effect element is provided on the same substrate and individual detection outputs can be obtained from each of the detection units.
  • a magnetic detection device which uses a magnetoresistance effect element in a magnetic encoder which detects moving magnets and the like.
  • the magnetic detection device has a bridge circuit which includes a magnetoresistance effect element and can obtain a voltage change from the bridge circuit according to a change in strength of a magnetic field used in the magnetoresistance effect element when the north pole and the south pole of a magnet are alternately moved.
  • the relationship between the voltage change and time resembles a trigonometric curve and it is possible to recognize the movement state of the magnet by detecting the voltage change.
  • a magnetic detection device is also used where a plurality of magnetoresistance effect elements is mounted thereon and individual detection outputs are obtained from each of the magnetoresistance effect elements.
  • a magnetic encoder when one cycle of a change of the north pole and the south pole of a moving magnet is 360 degrees, it is possible to distinguish the movement direction of the magnet by disposing the magnetoresistance effect elements to open up a distance so that there is a 90 degree phase difference with regard to the cycle.
  • a typical structure is where one magnetoresistance effect element and one circuit are mounted on one substrate, one magnetic detection device is configured for each substrate, and a plurality of the magnetic detection devices is lined up and disposed.
  • an operation of individually attaching substrates which configure individual magnetic detection devices and an operation of positioning the substrates relative to one another are necessary, and furthermore, it is necessary to individually wire so as to supply a voltage to the detection circuits on each of the substrates so that the wiring operation is also complex.
  • a magnetic detection device which can supply a driving voltage to all detection units by selecting any terminal portion individually provided for each detection unit and connecting to a power source or ground connection.
  • a plurality of detection units which has a magnetoresistance effect element and a detection circuit which detects a change in a resistance value of the magnetoresistance effect element, is provided on the same substrate, and each of the detection units is individually provided with a power source terminal portion which applies a positive potential, a ground terminal portion which sets a ground potential, and an output terminal portion which obtains a detection output generated by the detection circuit based on a change in the resistance value, and a plurality of positive potential applying portions of the detection units are connected to each other by a power source line portion and a plurality of ground portions of the detection units are connected to each other by a ground line portion, so that it is possible to apply a positive potential to all of the positive potential applying portions of the detection units using any one of the power source terminal portions and to set a ground potential in all of the ground portions of the detection units using any one of the ground terminal portions, and it is possible to obtain a detection output of each of the detection units from the respective output terminal portions.
  • each of the detection units has a power source terminal portion and the ground terminal portion, but it is possible to apply power to all of the detection units only by selecting any one of the power source terminal portions and any one of the ground terminal portions and applying a voltage between both of the terminal portions.
  • the detection output according to a change in a magnetic field acted on by the respective magnetoresistance effect elements can be individually obtained for each of the detection units from the output terminal portions provided for the respective detection units, it is also possible to use all of the outputs of the detection units at the same time, and furthermore, it is possible to use only any of the detection outputs of the detection units.
  • each of the detection units has a fixed resistor connected in series with the magnetoresistance effect element, and one end portion of the magnetoresistance effect element and the fixed resistor connected in series is set as the positive potential applying portion and the other end portion thereof is set as the ground portion, and the potential at the midpoint of the magnetoresistance effect element and the fixed resistor is applied to the detection circuit.
  • each of the detection units is formed of the magnetoresistance effect element, the fixed resistor, an electrode layer which connects between the magnetoresistance effect element and the fixed resistor, an electrode layer connected to the other terminal of the magnetoresistance effect element, and an electrode layer connected to the other end of the fixed resistor, and where, in each of the detection units, the power source line portion and the ground line portion are formed on the circuit configuring layer.
  • the detection circuit is configured as an integrated circuit, it is possible to pattern and form the magnetoresistance effect element and the fixed resistor on the circuit configuring layer which configures the integrated circuit.
  • a power source relay terminal and a ground relay terminal are provided on the circuit configuring layer, and using a connection line provided at an inner portion of the circuit configuring layer, the power source terminal portion and the power source relay terminal are connected and the ground terminal portion and the ground relay terminal are connected.
  • the power source relay terminal is connected to the power source line portion and the ground relay terminal is connected to the ground line portion.
  • a right-side power source coupling terminal and a right-side ground coupling terminal are provided on one side portion facing the arrangement direction of the detection unit, a left-side power source coupling terminal and a left-side ground coupling terminal are provided on the other side portion, the power source terminal portion and each of the left-side and right-side power source coupling terminals are connected by a connection line, and the ground terminal portion and each of the left-side and right-side ground coupling terminals are connected by a connection line, and where, between the adjacent detection units, the right-side power source coupling terminal of one detection unit and the left-side power source coupling terminal of another detection unit are connected by the power source line portion and the right-side ground coupling terminal of one detection unit and the left-side ground coupling terminal of another detection unit are connected by the ground line portion.
  • the embodiment of the invention has a configuration where, on the circuit configuring layer which configures the detection circuit, each of the detection units is formed of the magnetoresistance effect element, the fixed resistor, an electrode layer which connects between the magnetoresistance effect element and the fixed resistor, an electrode layer connected to the end of the magnetoresistance effect element, and an electrode layer connected to the other end of the fixed resistor, and where the connection line is wired in an inner portion of the circuit configuring layer, and the right-side and left-side power source coupling terminals and the right-side and left-side ground coupling terminals are provided on the circuit configuring layer.
  • the power source coupling terminal and the ground coupling terminal between both side portions of the respective detection units, it is possible to configure the power source line portion and the ground line portion which connect the left and right detection units to be as short as possible, and it is possible to make the resistance value of the power source line portion and the ground line portion to be low.
  • the power source coupling terminal and the ground coupling terminal at both side portions of each of the detection units and providing the connection line in an inner portion of a line layer, it is not necessary to form the line layer on the circuit configuring layer. As a result, it is possible to use a wide region on the circuit configuring layer as a formation region of the magnetoresistance effect element and the fixed resistor, and it is possible to reduce the size of the detection unit.
  • connection line in the inner portion of the line layer as described above, the cross-sectional area of the connection line may be made to be larger than the cross-section of the power source line portion and the ground line portion, and the resistance value per unit length of the connection line may be made to be smaller than the resistance value per unit length of the power source line portion and the ground line portion.
  • the arrangement pattern of the magnetoresistance effect element and the fixed resistor, the power source terminal portion and the ground terminal portion, and the output terminal portion are the same for all of the detection units.
  • the arrangement patterns of the magnetoresistance effect element and the fixed resistor, the power source terminal portion, the ground terminal portion, and the output terminal portion for adjacent detection units may be line-symmetric via a boundary portion of the detection units.
  • the magnetoresistance effect element is disposed to be closer to a predetermined edge portion of the substrate than the fixed resistor in all of the detection units.
  • the embodiment of the invention it is possible to precisely position and dispose the plurality of magnetoresistance effect elements of the detection units relative to each other. Additionally, by selecting and applying a voltage to either the power source terminal portion or the ground terminal portion provided in each of the detection units, it is possible to supply driving power to all of the detection units. In addition, since it is possible to generate a detection output individually from each of the detection units, it is possible to use all of the detection units together or use the detection units individually.
  • each of the detection units is configured as a small size, and even if in a case when the plurality of detection units is disposed on the common substrate, it is possible to reduce the number of wire bondings for wiring to an external portion and the like.
  • Fig. 1 is a planar diagram illustrating a magnetic detection encoder as one example of a device using a magnetic detection device according to the present invention.
  • Fig. 2 is a planar diagram of a magnetic detection device according to a first embodiment, and Fig. 3 is a cross-sectional enlarged diagram cut along a line III-III of the magnetic detection device shown in Fig. 2 .
  • Fig. 4 is a circuit diagram of one detection unit.
  • Fig. 5 is a planar diagram of a magnetoresistance effect element provided in the detection unit, and Fig. 6 is a cross-sectional enlarged diagram cut along a line VI of the magnetoresistance effect element shown in Fig. 5 .
  • Figs. 7A and 7B are operation description diagrams illustrating an operation of the detection circuit provided in each of the detection units.
  • a magnetic detection encoder 1 shown in Fig. 1 is provided with a detection rotor 2 which is capable of rotating with a rotation axis O as a center, and is provided with a rotation magnet 3 in an outer circumference portion of the detection rotor 2.
  • the rotation magnet 3 is a thin ring shape where the thickness dimension along the axial direction of the rotation axis O is smaller than its radius.
  • the rotation magnet 3 is divided up into 16 poles towards the circumference direction and is magnetized, and is a magnetic pole where an outer circumference surface 3a and an inner circumference surface 3b are opposites.
  • a north pole and a south pole are alternatively magnetized toward a rotation direction, an opening angle of the magnetized range of the magnetic pole of each of the north pole and the south pole is 22.5 degrees, and the rotation angle equivalent to one cycle of a change in the magnetic field changing from the north pole to the south pole is 45 degrees.
  • leakage of magnetic field is generated where the direction of the magnetic field changes in a planar surface perpendicular with the rotation axis O.
  • the leakage of magnetic field has magnetic flux ⁇ 1 which changes in a clockwise direction from the north pole toward the south pole in the outer circumference surface 3a and magnetic flux ⁇ 2 which changes in the counterclockwise direction from the north pole toward the south pole.
  • a magnetic detection device 10 of a first embodiment of the invention is fixed in a position facing the outer circumference surface 3a of the rotation magnet 3.
  • the magnetic detection device 10 has a substrate 11, but the surface of the substrate 11 is disposed in parallel to a planar surface perpendicular with the rotation axis O.
  • the detection rotor 2 can be rotated by a manual operation or can be rotated along with an operation portion of various devices. When rotating, the leakage of magnetic field from the outer circumference surface 3a of the rotation magnet 3 is detected by the magnetic detection device 10.
  • the magnetic detection device 10 is provided with two detection units 15A and 15B on the surface of the substrate 11.
  • the planar shape of the detection units 15A and 15B is a quadrangle, and a blank region 12 with a strip shape is provided between the detection unit 15A on the left side and the detection unit 15B on the right side.
  • a circuit part and a line pattern which configure the detection unit 15A and a circuit part or a line pattern which configure the detection unit 15B is not provided.
  • a power source line portion 17 and a ground line portion 18 which couple the detection unit 15A on the left side and the detection unit 15B on the right side cross the blank region 12.
  • the detection unit 15A on the left side and the detection unit 15B on the right side have exactly the same structure, each part and arrangement pattern of each terminal portion are exactly the same except for the power source line portion 17 and the ground line portion 18. As such, each of the parts, the terminal portions and the line patterns of the detection unit 15A on the left side and the detection unit 15B on the right side are formed by the same process at the same time.
  • the detection unit 15A on the left side and the detection unit 15B on the right side each have a circuit configuring layer 20.
  • the circuit configuring layer 20 provided in the detection unit 15A and the circuit configuring layer 20 provided in the detection unit 15B are exactly the same.
  • each of the circuit configuring layers 20 has an integrated circuit and is configured by forming each various type of conductor layer, semiconductor layer and insulating layer on the surface of the substrate 11 by a thin film process.
  • the planar shape of the circuit configuring layer 20 is substantially the same as the planar shape of each of the detection units 15A and 15B.
  • the portion surrounded by solid-line box is a circuit provided in an inner portion of the circuit configuring layer 20.
  • a detection circuit 21 which obtains a detection output according to a change in the resistance value of a magnetoresistance effect element, is configured.
  • the detection circuit 21 formed on the surface of the substrate 11 is covered by an insulating layer, and on an upper surface 20a of the circuit configuring layer 20 which is a surface of the insulating layer, a plurality of relay terminals which conduct to the detection circuit 21 is provided.
  • the relay terminals will be described while contrasting Figs. 2 and 4 .
  • a first power source relay terminal 22 On each of the upper surfaces 20a of the circuit configuring layers 20, there are a first power source relay terminal 22, a ground relay terminal 23, an input relay terminal 24 and a second power source relay terminal 25.
  • the relay terminals 22, 23, 24 and 25 are formed by conductive metallic materials with low resistance such as silver or gold and are exposed to the upper surface 20a of the circuit configuring layer 20.
  • a state where the input relay terminal 24 is exposed to the upper surface 20a of the circuit configuring layer 20 and conducts with the detection circuit 21 in the inner portion of the circuit configuring layer 20 is shown in a cross-sectional diagram.
  • a ground conducting terminal 26 is provided in the detection circuit 21.
  • the ground conducting terminal 26 is exposed to the upper surface 20a of the circuit configuring layer 20 and is connected to a connection line 43 of the detection circuit 21 in the circuit configuring layer 20.
  • a common external insulating layer 19 covers the top of the circuit configuring layer 20 which is formed by the detection unit 15A on the left side and the circuit configuring layer 20 which is formed by the detection unit 15B on the right side.
  • the external insulating layer 19 is an organic insulating film or an inorganic insulating film.
  • a ground terminal portion 31 is formed in a bump shape, and the ground terminal portion 31 conducts with the ground conducting terminal 26 and is exposed to a surface 19a of the external insulating layer 19.
  • a power source conducting terminal 27 and an output conducting terminal 28 are provided in the detection circuit 21.
  • the power source conducting terminal 27 and the output conducting terminal 28 are exposed to the upper surface 20a of the circuit configuring layer 20 and are connected to the detection circuit 21 in the same manner as the ground conducting terminal 26.
  • a power source terminal portion 32 with a bump shape is provided on the power source conducting terminal 27, and the power source terminal portion 32 conducts with the power source conducting terminal 27 and is exposed to the surface 19a of the external insulating layer 19.
  • an output terminal portion 33 is formed in a bump shape on the output conducting terminal 28, and the output terminal portion 33 conducts with the output conducting terminal 28 and is exposed to the surface 19a of the external insulating layer 19.
  • the ground terminal portion 31, the power source terminal portion 32 and the output terminal portion 33 are formed by a metallic material and the portion exposed to the surface 19a of the external insulating layer 19 is formed by a conductive material such as gold which is difficult to oxidize.
  • the ground terminal portion 31, the power source terminal portion 32 and the output terminal portion 33 are formed together in a process at the detection unit 15A on the left side and the detection unit 15B on the right side. As shown in Fig. 2 , the arrangement of the ground terminal portion 31, the power source terminal portion 32 and the output terminal portion 33 are the same at the detection unit 15A on the left side and the detection unit 15B on the right side.
  • a reference resistor 41 and a reference resistor 42 connected in series are provided in the detection circuit 21.
  • the end portion of the reference resistor 41 is connected to the first power source relay terminal 22 and the end portion of the reference resistor 42 is connected to the ground relay terminal 23. Additionally, the ground relay terminal 23 and the ground conducting terminal 26 conduct via the connection line 43 wired in the inner portion of the circuit configuring layer 20.
  • a portion of the connection line 43 is shown in cross section.
  • a differential amplifier 44, a Schmitt trigger circuit 45 and a latch circuit 47 are configured in the inner portion of the detection circuit 21.
  • a connection midpoint 46 of the reference resistor 41 and the reference resistor 42 and the input relay terminal 24 are connected to the differential amplifier 44.
  • An output from the differential amplifier 44 is applied to the latch circuit 47 via the Schmitt trigger circuit 45.
  • an output switch portion 48 is changed by a high or low voltage value held in the latch circuit 47.
  • the output switch portion 48 is configured by two transistors 48a and 48b provided in the circuit configuring layer 20. The one transistor 48a is connected to the power source conducting terminal 27, the other transistor 48b is connected to the ground conducting terminal 26 and the connection midpoint of the transistor 48a and the transistor 48b is connected to the output conducting terminal 28.
  • a timing circuit 49 which includes a clock circuit is provided in the inner portion of the detection circuit 21.
  • the timing circuit 49 is controlled by signals applied to a control conducting terminal 29.
  • the control conducting terminal 29 is provided on the surface of the circuit configuring layer 20, a control terminal portion with a bump shape is provided thereon, and the control terminal portion is exposed to the surface of the external insulating layer 19. In addition, the diagrammatic illustration of the control terminal portion is omitted in Fig. 2 .
  • the control conducting terminal 29 and the timing circuit 49 are connected by a connection line 29a provided in the inner portion of the circuit configuring layer 20.
  • a switch circuit 51 is provided between the first power source relay terminal 22 and the power source conducting terminal 27. The switch circuit 51 is operated by a change timing with a constant interval set by the timing circuit 49. The connection and disconnection of the first power source relay terminal 22 and the power source conducting terminal 27 are repeated with a constant frequency. In the detection circuit 21, by applying a power source voltage VDD intermittently using the switch circuit 51, it is possible to reduce power consumption
  • the latch circuit 47 is controlled by the timing circuit 49, and the latch circuit 47 detects an output from the Schmitt trigger circuit 45 and holds the output in accordance with the timing when the switch circuit 51 is connected.
  • the second power source relay terminal 25 and the power source conducting terminal 27 conduct via a connection line 52 formed in the inner portion of the circuit configuring layer 20.
  • a magnetoresistance effect element 55 and a fixed resistor 56 are formed on each of the upper surfaces 20a of the circuit configuring layers 20, so as to each become a meander pattern.
  • the magnetoresistance effect element 55 is shown in a cross-sectional diagram.
  • an electrode layer 57 is formed which is connected to one end of the magnetoresistance effect element 55.
  • the electrode layer 57 extends on top of the ground relay terminal 23 which exists on the upper surface 20a of the circuit configuring layer 20. Due to the electrode layer 57, the magnetoresistance effect element 55 and the ground relay terminal 23 are connected.
  • an electrode layer 58 is formed which is connected to an end portion of the fixed resistor 56.
  • the electrode layer 58 extends on top of the first power source relay terminal 22, and due to the electrode layer 58, the fixed resistor 56 and the first power source relay terminal 22 are connected.
  • the electrode layer 57 is set as a ground portion and the electrode layer 58 is set as a positive potential applying portion.
  • an intermediate electrode layer 59 is formed which connects the magnetoresistance effect element 55 and the fixed resistor 56 in series. As shown in Figs. 2 and 3 , the intermediate electrode layer 59 is formed on top of the input relay terminal 24, and the connection midpoint of the magnetoresistance effect element 55 and the fixed resistor 56 is connected to the differential amplifier 44 via the input relay terminal 24.
  • the power source line portion 17 and the ground line portion 18 are formed from the upper surface 20a of the circuit configuring layer 20 of the detection unit 15A on the left side to the upper surface 20a of the circuit configuring layer 20 of the detection unit 15B on the right side via the blank region 12.
  • the power source line portion 17 and the ground line portion 18 are formed on the surface of the substrate 11 at a position lower than the upper surface 20a of the circuit configuring layer 20.
  • the second power source relay terminal 25 which exists on the upper surface 20a of the circuit configuring layer 20 of the detection unit 15A on the left side and the second power source relay terminal 25 which exists on the upper surface 20a of the circuit configuring layer 20 of the detection unit 15B on the right side are connected by the power source line portion 17. Additionally, the ground relay terminal 23 which exists on the upper surface 20a of the circuit configuring layer 20 of the detection unit 15A on the left side and the ground relay terminal 23 which exists on the upper surface 20a of the circuit configuring layer 20 of the detection unit 15B on the right side are connected by the ground line portion 18.
  • the magnetoresistance effect element 55 and the fixed resistor 56 are each formed at the same time on the upper surfaces 20a of all of the circuit configuring layers 20 by the same thin film process.
  • the electrode layer 57, the electrode layer 58 and the intermediate electrode layer 59 are formed on the upper surfaces 20a of all of the circuit configuring layers 20 similarly by the thin film process.
  • the power source line portion 17 and the ground line portion 18 which connect between the adjacent detection units 15A and 15B are formed.
  • the power source line portion 17 and the ground line portion 18 may be formed in a different process after the electrode layers 57, 58 and 59 are formed.
  • the external insulating layer 19 is formed. After this, in each of the detection units 15A and 15B, the ground terminal portion 31, the power source terminal portion 32 and the output terminal portion 33 are formed.
  • the substrate 11 is cut in the blank region between the adjacent detection units, and as shown in Fig. 2 , the magnetic detection device 10 is completed with the detection unit 15A and the detection unit 15B becoming a pair.
  • the magnetoresistance effect element 55 a plurality of element portions 61 is formed in parallel to each other.
  • the front and back end portions of each of the element portions 61 are connected in lots of two by the connection electrodes 62a and 62b and are configured in a meander pattern.
  • the magnetoresistance effect element 55 may be formed in a meander pattern by only the laminate structure of the element portions 61 shown in Fig. 6 without having the connection electrodes 62a and 62b.
  • each of the element portions 61 has an antiferromagnetic layer 63, a fixed magnetic layer 64, a nonmagnetic conductive layer 65 and a free magnetic layer 66 laminated in this order and deposited on the upper surface 20a of the circuit configuring layer 20, and the surface of the free magnetic layer 66 is covered by a protective layer 67.
  • the antiferromagnetic layer 63 is formed by an antiferromagnetic material such as an Ir-Mn alloy (iridium-manganese alloy).
  • the fixed magnetic layer 64 is formed by a soft magnetic material such as a Co-Fe alloy (cobalt-iron alloy).
  • the nonmagnetic conductive layer 65 is Cu (copper) or the like.
  • the free magnetic layer 66 is formed by a soft magnetic material such as a Ni-Fe alloy (nickel-iron alloy).
  • the protective layer 67 is a Ta (tantalum) layer.
  • the direction (P direction) of the fixed magnetization of the fixed magnetic layers 64 of each of the element portions 61 is an orientation perpendicular to the longitudinal direction of the element portions 61.
  • the longitudinal direction of the element portions 61 of each of the magnetoresistance effect elements 55 is formed in an orientation perpendicular to a long side 11a of the substrate 11.
  • the direction (P direction) of the fixed magnetization of the magnetoresistance effect element 55 shown in Fig. 5 is an orientation parallel to the long side 11a of the substrate 11.
  • the magnetoresistance effect element 55 is formed in a position closer to the long side 11a than the fixed resistor 56.
  • the surface of the substrate 11 is parallel to a planar surface perpendicular to the rotation axis O of the detection rotor 2 and the long side 11a of the substrate 11 is positioned to face the outer circumference surface 3a of the rotation magnet 3.
  • the magnetoresistance effect element 55 is disposed in a position close to the long side 11a, the magnetization of the free magnetic layers 66 of each of the element portions 61 typically becomes saturated by the leakage of magnetic field from the outer circumference surface 3a of the rotation magnet 3.
  • the magnetic flux ⁇ 1 and ⁇ 2 between adjacent magnetic poles in the outer circumference surface 3a exist as magnetic flux leakage.
  • the gap between the detection unit 15A and the detection unit 15B on the substrate 11 is determined so that the gap between the magnetoresistance effect element 55 provided in the detection unit 15A and the magnetoresistance effect element 55 provided in the detection unit 15B in connection line direction of the outer circumference surface 3a is 1/4 of a cycle. That is, when the cycle where the north pole and the south pole move in a forward direction of the magnetic detection device 10 is set to 360 degrees, the pitch of the detection unit 15A and the detection unit 15B is set so as to be equivalent to a cycle of 90 degrees.
  • the magnetic detection device 10 is provided with two of the detection unit 15A and the detection unit 15B side by side on the substrate 11 and each has the ground terminal portion 31, the power source terminal portion 32 and the output terminal portion 33.
  • the second power source relay terminals 25 which are positive potential applying portions are connected to each other by the power source line portion 17 and the ground relay terminals 23 which are the ground portions are connected to each other by the ground line portion 18.
  • only either one of the two power source terminal portions 32 and 32 shown in Fig. 2 is applied with the positive potential of the power source circuit, and only either one of the two ground terminal portions 31 and 31 shown in Fig. 2 is connected with the ground potential. Therefore, it is possible to supply power to each of the detection circuits 21 and 21 of the two detection units 15A and 15B at the same time.
  • the detection output where the phase differs by 90 degrees is obtained from the detection unit 15A and the detection unit 15B, it is possible to not only detect the number of rotations of the detection rotor 2 but also the rotation direction.
  • FIG. 7A and 7B show the detection operation of the one detection unit 15A, but in the detection operation of the other detection unit 15B, the phase of the waveform is deviated by only 90 degrees from the detection unit 15A and the detection operation itself is the same as the detection unit 15A.
  • the electrical resistance changes due to a relationship between the direction (P direction) of the fixed magnetization of the fixed magnetic layer 64 and the direction of the vector F of the magnetization of the free magnetic layer 66.
  • the electrical resistance is extremely small, and when the vector F is anti-parallel with the direction (P direction) of the fixed magnetization, the electrical resistance is extremely large.
  • the power source voltage VDD is applied between the first power source relay terminal 22 and the ground relay terminal 23. Since the orientation of the vector F of the magnetization of the free magnetic layer 66 of the magnetoresistance effect element 55 provided in the detection unit 15A rotates in accompaniment with the rotation of the rotation magnet 3, the resistance value of the magnetoresistance effect element 55 changes. Accompanying this, the potential at the midpoint of the magnetoresistance effect element 55 and the fixed resistor 56 changes, and the change of potential is applied from the input relay terminal 24 to the differential amplifier 44. Additionally, the potential (VDD/2) at the connection midpoint 46 of the reference resistor 41 and the reference resistor 42 is also applied to the differential amplifier 44.
  • Fig. 7A shows the change in the voltage applied to the Schmitt trigger circuit 45 from the differential amplifier 44.
  • the change in the voltage resembles a sine waveform or a cosine waveform, and while the rotation magnet 3 shown in Fig. 1 rotates by just an angle of 45 degrees, the voltage output changes only for one cycle.
  • the Schmitt trigger circuit 45 when the voltage difference detected by the differential amplifier 44 exceeds a first threshold value L1, a high output is applied to the latch circuit 40 and a high value is held, and when the voltage difference is lower than a second threshold value L2, a low output is applied to the latch circuit 40 and a low value is held.
  • the output switch circuit 48 when the high output can be obtained from the Schmitt trigger circuit 45, the output switch circuit 48 is turned ON, and when the output from the Schmitt trigger circuit 45 changes to low, the output switch circuit 48 is turned OFF.
  • a square wave can be obtained which falls when the output voltage from the differential amplifier 44 exceeds the first threshold value L1 and which rises when the output voltage from the differential amplifier 44 is lower than the second threshold value L2.
  • Fig. 8 is a planar diagram illustrating a magnetic detection device 110 according to a second embodiment of the present invention.
  • the magnetic detection device 110 is provided with two detection units 15 and 115 on the surface of the substrate 11.
  • the detection unit 15 on the left side is exactly the same as the detection units 15A and 15B shown in Fig. 2 .
  • Each member of the detection unit 115 on the right side is disposed so that the detection unit 115 becomes a line symmetrical form with a line LO-LO, which divides the blank region 12 between the two detection units 15 and 115 in a width direction, as a boundary.
  • Each of the constituent members of the detection unit 15 and the detection unit 115 is referenced by the same reference numeral for the same constituent element since only the arrangement is line symmetrical and the structure is the same.
  • the second power source relay terminal 25 of the detection unit 15 and the second power source relay terminal 25 of the detection unit 115 are coupled by a power source line portion 117
  • the ground relay terminal 23 of the detection unit 15 and the ground relay terminal 23 of the detection unit 115 are coupled by a ground line portion 118.
  • the magnetic detection device it is possible to configure the magnetic detection device as a magnetic detection device where 3 detection units or more than 3 detection units are mounted on the same substrate 11. Additionally, since each of the detection units has a structure where each is able to function so each can be an independent magnetic detection device as shown in Figs. 4 and 8 , it is possible for the substrate 11 to be cut in the blank region 12 and for each of the detection units to be used as a magnetic detection device having the one detection unit.
  • Fig. 9 is a planar diagram illustrating a magnetic detection device 210 according to a third embodiment of the present invention.
  • the magnetic detection device 210 is provided with detection units 215A and 215B side by side on the surface of a substrate 211 and is provided with a blank region 212 with a strip shape between both of the detection units 215A and 215B.
  • the detection unit 215A and the detection unit 215B are manufactured with the same structure by the same process.
  • Fig. 9 out of the elements which configure each of the detection units 215A and 215B, the same parts of the constituent members of the magnetic detection device 10 according to the first embodiment shown in Figs. 2 and 4 are referenced by the same reference numbers and a detailed description has been omitted.
  • the detection unit 215A and the detection unit 215B are each provided with a circuit configuring layer 220. In an inner portion of the circuit configuring layer 220, the same detection circuit 21 as shown in Fig. 4 is configured.
  • each of the circuit configuring layers 220 there are the ground conducting terminal 26, the power source conducting terminal 27 and the output conducting terminal 28 shown in Fig. 4 , and the ground terminal portion 31 with a bump shape is formed on the ground conducting terminal 26, the power source terminal portion 32 with a bump shape is formed on the power source conducting terminal 27, and the output terminal portion 33 with a bump shape is formed on the output conducting terminal 28. Furthermore, there is the control conducting terminal 29 on the surface of the circuit configuring layer 20, and a control terminal portion 34 with a bump shape is provided thereon.
  • a right-side power source coupling terminal 221a, a ground coupling terminal 222a and a control coupling terminal 223a are provided on an upper surface of the circuit configuring layer 220.
  • a left-side power source coupling terminal 221b, a ground coupling terminal 222b and a control coupling terminal 223b are provided on the upper surface of the circuit configuring layer 220.
  • connection lines 221c, 222c and 223c are wired.
  • the second power source relay terminal 25 and each of the right and left power source coupling terminals 221a and 221b are connected by the connection line 221c.
  • the ground relay terminal 23 and each of the right and left ground coupling terminals 222a and 222b are connected by the connection line 222c.
  • the control conducting terminal 29 and each of the right and left control coupling terminals 223a and 223b are formed by the connection line 223c.
  • the magnetoresistance effect element 55, the fixed resistor 56, the intermediate electrode layer 59 and the like are formed on the surface of the circuit configuring layer 220.
  • the right-side power source coupling terminal 221a, the ground coupling terminal 222a and the control coupling terminal 223a are provided in a right side portion
  • the left-side power source coupling terminal 221b, the ground coupling terminal 222b and the control coupling terminal 223b are provided in a left side portion, and a region in the middle thereof opens up widely without there being any line layers.
  • the magnetoresistance effect element 55 and the fixed resistor 56 are freely disposed on the upper surface of the circuit configuring layer 220.
  • the magnetoresistance effect element 55 is disposed in a position close to a long side 211a of the substrate 211, and it is possible to dispose the fixed resistor 56 in a position close to a different long side 211b so that at least a part of the fixed resistor 56 overlaps with the magnetoresistance effect element 55, and as a result, it is possible to configure the detection units 215A and 215B in a small size.
  • a power source line portion 217 is formed which conducts between the power source coupling terminal 221a of the detection unit 215A on the right side and the power source coupling terminal 221b of the detection unit 215B on the left side
  • a ground line portion 218 is formed which conducts between the ground coupling terminal 222a of the detection unit 215A on the right side and the ground coupling terminal 222b of the detection unit 215B on the left side
  • a control line portion 219 is formed which conducts between the control coupling terminal 223a of the detection unit 215A on the right side and the control coupling terminal 223b of the detection unit 215B on the left side.
  • the power source line portion 217, the ground line portion 218 and the control line portion 219 are formed from the right edge of the upper surface of the circuit configuring layer 220 of the detection unit 215A to the left edge of the upper surface of the circuit configuring layer 220 of the detection unit 215B via the top of the blank region 212 of the substrate 211.
  • the two detection units 215A and 215B are covered by the external insulating layer 19, and the power source line portion 217, the ground line portion 218 and the control line portion 219 are also covered by the external insulating layer 19 and insulated. Additionally, there are the ground terminal portion 31, the power source terminal portion 32, the output terminal portion 33 and the control terminal portion 34 on the surface of the external insulating layer 19.
  • connection lines 221c, 222c, and 223c which respectively connect the right-side power source coupling terminal 221a, the ground coupling terminal 222a and the control coupling terminal 223a to the left-side power source coupling terminal 221b, the ground coupling terminal 222b and the control coupling terminal 223b are formed in the inner portion of the circuit configuring layer 220.
  • connection lines 221c, 222c, and 223c it is possible to form the connection lines 221c, 222c, and 223c to be thicker than the power source line portion 217, the ground line portion 218 and the control line portion 219 and for the cross-sectional area to be larger.
  • the resistance value per unit length of the connection lines 221c, 222c, and 223c it is possible for the resistance value per unit length of the connection lines 221c, 222c, and 223c to be lower than the resistance value per unit length of the power source line portion 217, the ground line portion 218 and the control line portion 219. Accordingly, by forming the power source line portion 217, the ground line portion 218 and the control line portion 219 to be as short as possible, it is possible to reduce the resistance value of the entire circuit.
  • the magnetic detection device 210 shown in Fig. 9 By supplying a power source to either one of the power source terminal portions 32 and setting either one of the ground terminal portions 31 as the ground potential, it is possible for the magnetic detection device 210 shown in Fig. 9 to drive both of the detection units 215A and 215B. Additionally, it is possible to obtain individual detection outputs of the detection unit 215A and the detection unit 215B from the two output terminal portions 33. Additionally, by applying a control signal to either one of the control terminal portions 34, it is possible for the timing circuits 49 of both of the detection units 215A and 215B to be controlled.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
EP09802933.3A 2008-07-29 2009-07-28 Capteur magnétique Withdrawn EP2320196A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008195190 2008-07-29
JP2009047476 2009-03-02
PCT/JP2009/063380 WO2010013690A1 (fr) 2008-07-29 2009-07-28 Capteur magnétique

Publications (2)

Publication Number Publication Date
EP2320196A1 true EP2320196A1 (fr) 2011-05-11
EP2320196A4 EP2320196A4 (fr) 2017-11-29

Family

ID=41610390

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09802933.3A Withdrawn EP2320196A4 (fr) 2008-07-29 2009-07-28 Capteur magnétique

Country Status (3)

Country Link
EP (1) EP2320196A4 (fr)
JP (1) JP5175350B2 (fr)
WO (1) WO2010013690A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2711728A1 (fr) * 2011-05-16 2014-03-26 Mitsubishi Electric Corporation Dispositif à capteur magnétique

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012173206A (ja) * 2011-02-23 2012-09-10 Yamanashi Nippon Denki Kk 磁気センサ及びその製造方法
JP2016121909A (ja) * 2014-12-24 2016-07-07 株式会社東海理化電機製作所 検出装置
JP2022150856A (ja) * 2021-03-26 2022-10-07 昭和電工株式会社 磁気センサ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5559314A (en) * 1978-10-27 1980-05-02 Sony Corp Magnetic scale signal detector
JPS5999370A (ja) * 1982-11-30 1984-06-08 Copal Co Ltd 磁気抵抗素子を具える磁気検出器の製造方法
CN101395450B (zh) * 2006-03-06 2012-06-13 日本电产三协株式会社 磁编码器装置
JP4999498B2 (ja) * 2006-03-06 2012-08-15 日本電産サンキョー株式会社 磁気式エンコーダ装置
JP2008195190A (ja) 2007-02-13 2008-08-28 Nippon Plast Co Ltd 車両用エアバッグ装置
JP2009047476A (ja) 2007-08-16 2009-03-05 Nippon Oil Corp 光学フィルムの検査方法
JP5040538B2 (ja) 2007-09-05 2012-10-03 セイコーエプソン株式会社 電子部品の温度制御装置、電子部品の温度制御方法及びｉｃハンドラ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010013690A1 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2711728A1 (fr) * 2011-05-16 2014-03-26 Mitsubishi Electric Corporation Dispositif à capteur magnétique
EP2711728A4 (fr) * 2011-05-16 2015-04-15 Mitsubishi Electric Corp Dispositif à capteur magnétique
US9244135B2 (en) 2011-05-16 2016-01-26 Mitsubishi Electric Corporation Magnetic sensor device

Also Published As

Publication number Publication date
WO2010013690A1 (fr) 2010-02-04
EP2320196A4 (fr) 2017-11-29
JP5175350B2 (ja) 2013-04-03
JPWO2010013690A1 (ja) 2012-01-12

Similar Documents

Publication Publication Date Title
US7876091B2 (en) Magnetic encoder
US9200884B2 (en) Magnetic sensor system including three detection circuits
US9810748B2 (en) Tunneling magneto-resistor device for sensing a magnetic field
EP2983293A1 (fr) Commutateur magnétorésistif en demi-pont à puce retournée à pousser-tirer
US10317480B2 (en) Magneto resistive device
US6452382B1 (en) Encoder provided with giant magnetoresistive effect elements
CN107179093B (zh) 磁体和位移检测装置
JP4028971B2 (ja) 磁気センサの組立方法
EP3399504A1 (fr) Capteur d'image magnétique
US9464919B2 (en) Magnetic position detecting apparatus
EP2117026A1 (fr) Module de capteur magnetique et dispositif de detection de position de pistons
EP2320196A1 (fr) Capteur magnétique
EP2159588A1 (fr) Dispositif de détection magnétique, procédé de fabrication d'un dispositif de détection magnétique, et dispositif de détection d'angle, dispositif de détection de position et commutateur magnétique utilisant le dispositif de détection magnétique
EP2071350B1 (fr) Appareil de détection de magnétisme
JP2016145745A (ja) 磁気センサ
JP5144373B2 (ja) 磁気検知型エンコーダ
JP2008014954A (ja) 磁気センサ
JP2015133377A (ja) 磁気検出素子および回転検出装置
JP2010056260A (ja) 磁気スイッチ、および磁界検出方法
JP5015966B2 (ja) 磁気検出装置及びその製造方法
JP2008249370A (ja) 磁性体検出センサ及び磁性体検出装置
JP2007127456A (ja) 回転検出装置
JP7341454B2 (ja) 磁気センサ
EP2722649B1 (fr) Codeur magnétique
JP5386714B2 (ja) 回転角度検出装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110222

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA RS

DAX Request for extension of the european patent (deleted)
RA4 Supplementary search report drawn up and despatched (corrected)

Effective date: 20171026

RIC1 Information provided on ipc code assigned before grant

Ipc: G01D 5/14 20060101ALI20171020BHEP

Ipc: G01R 33/00 20060101ALI20171020BHEP

Ipc: G01R 33/09 20060101AFI20171020BHEP

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20180926

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20190207