EP2289091A2 - Kompaktes uv bestrahlungsmodul - Google Patents

Kompaktes uv bestrahlungsmodul

Info

Publication number
EP2289091A2
EP2289091A2 EP09776732A EP09776732A EP2289091A2 EP 2289091 A2 EP2289091 A2 EP 2289091A2 EP 09776732 A EP09776732 A EP 09776732A EP 09776732 A EP09776732 A EP 09776732A EP 2289091 A2 EP2289091 A2 EP 2289091A2
Authority
EP
European Patent Office
Prior art keywords
reflector
radiation
discharge lamp
irradiation
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09776732A
Other languages
German (de)
English (en)
French (fr)
Inventor
Sven Linow
Ralf Pretsch
Thomas Arnold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Publication of EP2289091A2 publication Critical patent/EP2289091A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/025Associated optical elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00Reflectors for light sources
    • F21V7/22Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
    • F21V7/24Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • H01J61/35Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/70Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/72Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of easily vaporisable metal vapour, e.g. mercury
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/82Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr

Definitions

  • the invention relates to a module for generating UV light for irradiating a substrate.
  • Discharge lamps for generating radiation in particular for the targeted generation of UV radiation are already known from the prior art.
  • the doping of the gas filling in order to achieve a specific influence on the design of the emission spectrum and thus to optimize radiators for different tasks, is described in various publications.
  • Such radiators can be embodied as low-pressure, medium-pressure or high-pressure radiators; the pressure under which the discharge takes place during operation also affects the power, in relation to the volume of the discharge, in addition to the spectrum.
  • Such discharge lamps radiate in all spatial directions, so that at least radially only a negligible dependence of the emitted intensity on the angle between the lamp and the substrate occurs.
  • the radiation emitted uniformly in all directions by the radiator means Reflectors directed to, for example, a substrate.
  • specular reflectors of good efficiency (ie high reflectivity) are not available for UV since metals have a high absorption and ceramics are either still transparent or likewise have a high absorption. Specular reflection is understood as meaning reflection on a substantially smooth surface in which the angular information of the radiation is retained.
  • dielectric reflectors made of transmissive materials with layer sequences of varying refractive indices are used. Such reflectors have only a limited bandwidth within which they actually reflect. They can therefore also be used as a filter. The production of such reflectors is complex because a variety of different layers must be applied to a high-quality polished carrier.
  • the reflective area of a dielectric reflector depends on the angle at which the light strikes the reflector, such reflectors must be designed for the geometric situation under which they operate. In order to obtain a reasonably homogeneous reflectivity over the area used, it must be arranged at a constant angle to the radiation source. The reflector must be placed at a not too close distance from the light source, since the radiation emitted by the lamp is not of punctiform origin, but comes from the entire surface of the discharge and thus hits the reflector at different angles, but for high efficiency no large variation in the angle is allowed under which the radiation impinges on the reflector ..
  • Modules for UV or VIS radiation ie housings in which the radiation source, reflector and possibly shutter are housed, always consist of a plurality of components and usually require water for cooling the reflector and the shutter. Only units of very low power can be air cooled.
  • a module is described for example in WO 2005/105448 as prior art.
  • DE 20 2004 006 274 U1 describes by way of example the difficulties such as a hand lamp extremely compact and simple can be set up: An external reflector must be selected. The power of the lamp is very low, so that the used very large cooling by means of air prevents overheating of the radiator and the reflector. It follows that the system is disproportionately large compared to the dimensions of the actual light source and also consists of a variety of items.
  • the object of the invention is therefore to provide a simple and compact module for generating UV or VIS radiation by means of a discharge lamp. It should be dispensed with a variety of components, so that size and cost of manufacture and assembly, maintenance, etc. are significantly reduced.
  • the module according to the invention for generating UV radiation for the irradiation of a substrate comprising an irradiation device, the irradiation device having a discharge lamp with an integrated reflector made of quartz glass, provides that the reflector is arranged inside the discharge lamp.
  • the reflector is thus located within a discharge lamp, with the result that radiation can be emitted by the lamp itself directed.
  • the position and the Orientation of the reflector can be adjusted so that the radiation emerges essentially only in the desired directions.
  • Such a device with an integrated reflector over 180 ° circumference of the lamp tube shows that when stretched lamps on the front side of the discharge lamp exits almost twice the amount of radiation. On the reverse side, less than 25% of the radiation is achieved compared to an uncoated radiator or an uncoated discharge lamp.
  • the radiation power is considered integrated over the entire spectral range.
  • Such an arrangement of a reflector within the discharge lamp has the effect that the rear reflector, which is normally arranged in the case of such devices for the irradiation, can be dispensed with or a simplification of the water cooling normally arranged there can take place.
  • cooling preferably takes place via convection in a simpler manner and ultimately results in reduced installation space and a reduction to a minimal and compact module. If another external reflector is attached, there will also be much less radiant power.
  • the invention provides that the reflector comprises a coating of opaque quartz glass.
  • a coating of opaque quartz glass allows the integration of a broadband reflector of UV-C to FIR so in the wavelength range of 200 nm to 3000 nm and effectively allows the entire emitted from the discharge by the emitter radiation emit directed.
  • the coating comprises synthetic quartz glass, which achieves a particularly effective UV reflection due to its reduced UV absorption.
  • UV-generating systems it is also conceivable for UV-generating systems to use a solarization-resistant quartz glass both for the radiator tube and for the opaque reflector.
  • Such a coating of opaque quartz glass reflects at sufficient thickness almost all the radiation in the UV and VIS, as well as in the IR.
  • the reflector which is hot during operation of the lamp, emits thermal radiation of about 3000 nm and more particularly about 4500 nm, the radiation emitted at the back is almost pure infrared from about 2500 nm.
  • the opaque reflector thus surprisingly additionally acts as useful filter.
  • the invention provides that the lamps used are mercury medium-pressure lamps and medium-pressure mercury lamps in the short-sheet embodiment. However, it is possible to apply the invention just as well for low-pressure lamps or high-pressure lamps, as well as for all commonly used UV lamps.
  • Figure 1 is a compact module without filter
  • FIG. 2 shows a discharge lamp with an additional filter
  • FIG. 3 shows a radiator for direct coupling into a light guide.
  • FIG. 1 shows a module according to the invention with passive convective cooling of the radiator in longitudinal section.
  • the module of the UV lamp (10) with its bruises (1 1) and the power supply lines (12) is arranged.
  • a reflector (13) made of opaque quartz is applied directly.
  • the radiator is mounted in a housing (14), which is cooled purely by convective air flow.
  • the housing (14) is divided into different areas.
  • the central region (16) is designed as a shaft, which is covered to limit the UV scattered radiation in the figure with a plate (15), are punched into the outflow openings for the warm rising air.
  • the openings for the discharge of the warm air (15) are shown as a particularly simple way. In the context of conventional inventive activity can be found technical solutions for a discharge of air, which allow better shading of the (harmful) UV radiation and at the same time allow good convection.
  • the invention is therefore not limited to the simple variant with a metal sheet (15), but also more complex versions of shaft (16) and cover the scattered radiation (15), such as flat or folded covers are covered here in the context of conventional inventive action.
  • the geometry results from the requirement to achieve a continuous convective flow that is as continuous as possible, which is achieved in particular at high shafts, to prevent the leakage of scattered radiation, where this is structurally required, and at the same time to keep the size as small as possible.
  • the departments (17) are used for foreclosure of pinch and power supply, as well as the mechanical support, not shown, of the spotlights, they can be actively cooled separately.
  • FIG. 2 shows the cross section through a module according to the invention with an active convective cooling of the radiator.
  • a reflector made of opaque quartz (22) is applied, which comprises more than 180 ° in order to minimize the impact of radiation on the module housing (24).
  • a fan (23) is arranged, which serves for active cooling. Shown is an axial fan, which can be both sucking and pushing used. It is conceivable that radial fans or compressors, compressed air o.a. - So devices that generate an air flow actively used as alternative solutions.
  • This fan can now either supply cold air, which is directed past the radiator tube (21) through the shaft (24) against a window (25) and exits from outlet openings (27) from the module again, or the fan sucks air through the openings (27).
  • a functional layer (26) is applied to the window (25), which as an additional reflection layer transmits only certain parts of the radiation.
  • the functional layer (26) can also be omitted.
  • the window (25) is preferably made of a UV-transmitting material, such as quartz glass, the reflector may also be constructed of a plurality of dielectric or metallic layers.
  • a shutter can be mounted in front of the window, which shades the radiation quickly.
  • the disc can also be replaced by a water-permeable hollow body of UV-transparent glass, which serves as an IR filter and at the same time has a very cold surface.
  • FIG. 3 shows a further device according to the invention, in which UV radiation from a discharge lamp is coupled directly into an optical fiber.
  • the lamp body (41) made of quartz glass is almost completely covered with a reflective coating of opaque quartz glass.
  • the bruises (43) close the glass bulb (41), in the bruises (43) are molybdenum foils (45) gas-tight squeezed to the outside electrically conductive pins (46) for supplying the electric current and inside electrodes (44) are welded.
  • the piston is provided with a tapered element of quartz glass (47) in which a majority of Radiation emerges from the lamp bulb, and the radiation due to total reflection at the surface can not leave. This element is connected to the actual optical fiber via a suitable coupling element, which is not shown in the figure.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
EP09776732A 2008-06-16 2009-06-15 Kompaktes uv bestrahlungsmodul Withdrawn EP2289091A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008028233A DE102008028233A1 (de) 2008-06-16 2008-06-16 Kompaktes UV-Bestrahlungsmodul
PCT/EP2009/004296 WO2010003511A2 (de) 2008-06-16 2009-06-15 Kompaktes uv bestrahlungsmodul

Publications (1)

Publication Number Publication Date
EP2289091A2 true EP2289091A2 (de) 2011-03-02

Family

ID=41317790

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09776732A Withdrawn EP2289091A2 (de) 2008-06-16 2009-06-15 Kompaktes uv bestrahlungsmodul

Country Status (10)

Country Link
US (1) US8330341B2 (zh)
EP (1) EP2289091A2 (zh)
JP (1) JP2011524616A (zh)
KR (1) KR20110030455A (zh)
CN (1) CN102084454B (zh)
BR (1) BRPI0914786B1 (zh)
CA (1) CA2727170C (zh)
DE (1) DE102008028233A1 (zh)
MX (1) MX2010014141A (zh)
WO (1) WO2010003511A2 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2474032B (en) * 2009-10-01 2016-07-27 Heraeus Noblelight Gmbh Flash lamp or gas discharge lamp with integrated reflector
US8960235B2 (en) * 2011-10-28 2015-02-24 Applied Materials, Inc. Gas dispersion apparatus
DE202013101906U1 (de) * 2012-05-04 2013-05-27 Heraeus Noblelight Gmbh Vorrichtung zum Absaugen von Aerosolen
KR101402236B1 (ko) * 2012-05-25 2014-06-02 국제엘렉트릭코리아 주식회사 노즐 유닛 및 그 노즐 유닛을 갖는 기판 처리 설비
DE102015104932B3 (de) * 2015-03-31 2016-06-02 Heraeus Noblelight Gmbh Vorrichtung zur Wärmebehandlung
DE102015107129B3 (de) * 2015-05-07 2016-07-07 Heraeus Noblelight Gmbh Vorrichtung zum Aushärten einer Beschichtung auf einer Innenwandung eines Kanals mit ovalem Querschnitt
JP7248954B2 (ja) * 2019-08-29 2023-03-30 岩崎電気株式会社 低圧水銀ランプユニット
CN116940055A (zh) * 2022-04-08 2023-10-24 贺利氏特种光源有限公司 冷却的红外线或uv模块

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DE3305173A1 (de) 1983-02-15 1984-08-16 Technigraf GmbH, 6394 Grävenwiesbach Durch zwangsluftstroemung kuehlbarer uv-strahler mit einer langbogenentladungslampe
JPS63176535U (zh) * 1986-06-18 1988-11-16
JPH02150610U (zh) * 1989-05-23 1990-12-27
JPH0343378U (zh) * 1989-08-31 1991-04-23
JPH0451755U (zh) * 1990-09-05 1992-04-30
JP2542952Y2 (ja) * 1991-03-28 1997-07-30 ウシオ電機株式会社 マイクロ波無電極発光装置
PL331378A1 (en) * 1996-05-31 1999-07-05 Fusion Lighting Multiple-reflection electrode-free sulphur- or selenium-filled lamp and method of generating radiation using such lamp
JP3702850B2 (ja) 2002-01-24 2005-10-05 ウシオ電機株式会社 誘電体バリヤ放電ランプを使用した処理方法
JP4221561B2 (ja) * 2002-10-02 2009-02-12 株式会社ジーエス・ユアサコーポレーション エキシマランプ
DE202004006274U1 (de) 2004-04-21 2004-06-17 Technigraf Gmbh UV-Lampe
WO2005105448A2 (de) 2004-05-04 2005-11-10 Advanced Photonics Technologies Ag Bestrahlungseinrichtung
CN101023041B (zh) * 2004-08-23 2012-08-01 赫罗伊斯石英玻璃股份有限两合公司 具有反射体层的组件及其生产方法
DE102004051846B4 (de) 2004-08-23 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht sowie Verfahren für seine Herstellung
DE102005016732A1 (de) * 2004-10-26 2006-10-12 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht
JP4424296B2 (ja) * 2005-10-13 2010-03-03 ウシオ電機株式会社 紫外線照射装置
JP4857939B2 (ja) * 2006-06-19 2012-01-18 ウシオ電機株式会社 放電ランプ
JP4788534B2 (ja) * 2006-09-07 2011-10-05 ウシオ電機株式会社 エキシマランプ
DE102006062166B4 (de) 2006-12-22 2009-05-14 Heraeus Quarzglas Gmbh & Co. Kg Quarzglas-Bauteil mit Reflektorschicht sowie Verfahren zur Herstellung desselben

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Also Published As

Publication number Publication date
DE102008028233A1 (de) 2009-12-17
US8330341B2 (en) 2012-12-11
KR20110030455A (ko) 2011-03-23
WO2010003511A2 (de) 2010-01-14
WO2010003511A3 (de) 2010-03-11
CA2727170A1 (en) 2010-01-14
MX2010014141A (es) 2011-09-28
US20110163651A1 (en) 2011-07-07
BRPI0914786A2 (pt) 2016-07-19
BRPI0914786B1 (pt) 2019-07-02
CN102084454B (zh) 2013-10-30
CN102084454A (zh) 2011-06-01
CA2727170C (en) 2015-04-07
JP2011524616A (ja) 2011-09-01

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